JP2002374026A - Light output element, light output element array, lens element and lens element array - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a novel light output element, with which changes in all the light energy of laser light flux radiated from a VCSEL can be detected easily and surely, without being affected by the fluctuation in light emission. SOLUTION: A light-receiving element has a single VCSEL 1, a single lens element 2 in the shape of transparent plate having a lens surface 2A of positive power on the side of the VCSEL 1 and having a reflecting function on another side 2B for making scattered laser light flux radiated from the VCSEL 1 incident on the lens surface 2A and reflecting laser light flux transmitted through the lens surface 2A to the side of the VCSEL 1, by separating it from the optical path of incident laser light flux, at a prescribed ratio by the reflecting function on the other side 2B; and a single photodetecting means 3 for monitor for receiving converged light flux, which is reflected on the other side 2B, converged by the lens surface 2A and emitted from the lens element 2 to the side of the VCSEL 1, as monitor light and converting that light to an electrical signal.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a light output element / light output element array, a lens element for a light output element, and a lens element array for a light output element array.

[0002]

2. Description of the Related Art VCSEL (vertical cavity surface)
In the case of emitting laser, the cross-sectional shape of the emitted laser beam is close to a circle, has a high light density, and has the characteristic of operating in a single mode. Therefore, optical devices such as an optical pickup and optical fiber communication are used. It is intended for use as a light source.

[0003] In a VCSEL, temperature fluctuation and VCS
There is a variation in the intensity of the emitted laser beam due to the deterioration of the characteristics of the EL itself over time. Therefore, it is necessary to monitor the intensity of the emitted laser beam in order to stabilize the intensity of the laser beam emitted from the VCSEL.

A normal semiconductor laser can use a monitor system for detecting the intensity of a back-emission laser beam.
Since EL has "no backside emission" due to its structure, such a monitoring method cannot be used.

Therefore, the VCSEL monitors "part of the laser beam radiated to the front side" by receiving it. Japanese Patent Application Laid-Open No. 9-19 / 1997 discloses such a monitor system.
Nos. 8707 and 10-51067 are known.

In the monitor system described in these publications,
A part of the laser beam emitted to the front side of the VCSEL is V
The intensity of the laser beam is detected by being reflected by the exit window of the CSEL package and received by a light receiving unit disposed in the package.

It is known that a laser beam emitted by a VCSEL has "light emission fluctuation". The emission fluctuation
Considering a virtual plane orthogonal to the traveling direction with respect to the emitted laser beam, the distribution of light intensity on this plane varies with time. The distribution of the light intensity fluctuates with time even if the total light intensity (integrated light intensity distribution in the planar shape) is constant with time.

For this reason, when “a part of the laser beam radiated to the front side of the VCSEL” is used as the monitor light as in the monitor systems described in the above publications, the total light energy of the radiated laser beam changes. However, there is a problem that the change in the monitor light intensity due to the light emission fluctuation is detected as the "change in the total light energy" despite the absence of the light.

[0009]

SUMMARY OF THE INVENTION The present invention provides a VCSE
The change in the total light energy of the laser beam emitted from L
It is an object of the present invention to realize a novel optical output element and an optical output element array that can be easily and reliably detected without being affected by light emission fluctuation.

Another object of the present invention is to realize a novel lens element and a lens element array used in these light output elements and light output element arrays.

[0011]

The light output element of the present invention has a single VCSEL, a single lens element, and a single light detecting means. "Single VCSE
L "emits a divergent laser beam.

"Single lens element" is a transparent plate
The VCSEL side has a lens surface of positive power, the other surface has a reflection function, and a divergent laser beam emitted from the VCSEL is incident on the lens surface, and the laser beam transmitted through the lens surface is reflected by the VCSEL. The light is separated from the optical path of the incident laser beam at a predetermined ratio by the reflection function of the other surface, and is reflected toward the VCSEL.

The "single light detecting means" receives a condensed light beam reflected by the other surface of the lens element, condensed on the lens surface, and emitted from the lens element to the VCSEL side as monitor light, and receives electric light. Convert to a signal.

The surface having the above-mentioned reflection function is used by the reflection function to “convert a laser beam transmitted through the lens surface into a VC
"Reflecting to the side of the SEL" means that the surface having the above-mentioned reflection function causes all of the light beam portions of the laser light beam (laser light beam transmitted through the lens surface) incident on this surface to reach the VCSEL at a predetermined ratio.
This means that the light is reflected toward the EL side.

That is, assuming that the reflectance of the surface is K, the total light energy of the laser beam incident on the surface is I and K
The light energy of I is reflected toward the VCSEL. Therefore, the total light energy transmitted through the lens element is I ·
(1-K).

The laser beam reflected by the surface passes through the lens surface, receives the positive power of the lens surface, and exits from the lens element as a focused beam. Separate from the light path of
Without returning to the VCSEL position,
Focus at a position different from the position of the CSEL. This focused laser beam is received (substantially all) by the light detecting means as "monitor light".

Therefore, the change of the monitor light correctly corresponds to the change of the light emission intensity (light energy) of the VCSEL, and is not affected by the light emission fluctuation.

The light output device according to claim 1,
The “surface having a reflection function” in the lens element can be a plane inclined with respect to a surface orthogonal to the optical axis of the lens surface. In this case, a "semi-transmissive film having a predetermined reflectance" may be formed on the plane (claim 3).

The light output device according to claim 1,
The “surface having a reflective function” in the lens element may be formed as a reflective grating. The "lens surface having positive power" of the lens element in the optical output element according to any one of claims 1 to 4.
Can have a function (collimating function) of turning a divergent laser beam from the VCSEL into a parallel beam (claim 5).

In this case, the VCSEL and the light detecting means can be arranged on substantially the same plane of the supporting substrate. That is, when the lens surface has a collimating function, the divergent laser light beam emitted from the VCSEL is converted into a parallel light beam when entering the lens surface of the lens element, and is reflected by the surface having the reflecting function to produce the above-mentioned lens. When the light enters the lens surface and exits from the lens element, it becomes a converged light beam due to the positive power of the lens surface. However, since the light beam form when entering the lens surface in the lens element is a parallel light beam, the VCSEL The focused position of the focused light beam emitted to the side is substantially on the same plane as the light emitting unit of the VCSEL.

Therefore, in the case of the fifth aspect, it is possible to "dispose the VCSEL and the light detecting means on substantially the same surface of the supporting substrate" as described in the sixth aspect.

In the optical output device according to any one of the first to fourth aspects, the lens surface having a positive power of the lens element may “convert the divergent laser beam from the VCSEL into a converging beam”. (Claim 7). In this case, V
The laser beam incident from the CSEL side becomes a condensed light beam and is "reflected by a surface having a reflection function", passes through the lens surface in a focused state, and is further focused by the positive power of the lens surface. VCSEL from lens element as light beam
Since the light is emitted to the side, its focal position is closer to the lens element than the light emitting unit of the VCSEL.

Therefore, in the light output device according to the seventh aspect, a step is formed on the support substrate that supports the VCSEL and the light detecting means, the VCSEL is disposed at the bottom of the step, and the light detecting means is disposed above the step (lens). (Position close to the element) (claim 8).

An optical output element array according to the present invention comprises the optical output element according to any one of claims 1 to 8 as one unit,
A plurality of light output elements are arranged in an array and integrated.

According to a ninth aspect of the present invention, there is provided a light output element array comprising: a lens element array formed on a common transparent plate;
An array of SELs, and each photodetector corresponding to each VCSEL is supported by a common support substrate. "

The light output element array according to the ninth or tenth aspect is configured such that the array of lens elements is formed on a common transparent plate, and a plurality of lens elements have a common surface having a reflection function. (Claim 11).

The lens element of the present invention is a lens element used for an optical output element using a VCSEL. The lens element has a transparent plate shape, one surface having a positive power lens surface, and the other surface having a reflection function. The divergent laser beam emitted from the VCSEL is incident on the lens surface, and the laser beam transmitted through the lens surface is separated from the optical path of the incident laser beam at a predetermined ratio by the reflection function of the other surface. Thus, a lens element that reflects light toward the VCSEL ”.

In the lens element according to the twelfth aspect, the surface having a reflection function in the lens element may be "a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface". In this case, the “semi-transmissive film having a predetermined reflectance” can be formed on a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface. The “surface having a reflection function” of the lens element according to claim 12 is:
It can also be formed as a reflection type grating (claim 15).

The function of the “lens surface having positive power” of the lens element according to any one of claims 12 to 15 is as follows.
A collimating function for converting a divergent laser beam from the VCSEL into a parallel beam can be provided (claim 16).
The divergent laser beam from the VCSEL may be converted into a converging beam.

The lens element array according to the present invention is described in claim 1
The lens element according to any one of 2 to 15 is defined as one unit,
A plurality of lens elements are arranged in an array and integrated. "

The lens element array according to the eighteenth aspect may have a configuration in which the lens element array is formed on a common transparent plate. In this case, "a surface having a reflection function in a plurality of lens elements can be shared" (claim 20).

The material of the lens element / lens element array is
It can be glass, quartz glass, transparent resin, or the like. When glass or quartz glass is used, the positive power lens surface of the lens element and the reflection grating
It can be formed by photolithography and etching.

That is, a photoresist layer is formed on the surface of a transparent glass plate serving as a lens element material, and exposure is performed in accordance with the shape of the lens surface or the reflection grating according to the spatial distribution of the amount of exposure, followed by development. A desired lens element can be obtained by forming a shape corresponding to the surface of the lens and the reflection grating on a photoresist and transferring the shape to a transparent glass plate by anisotropic etching.

When a resin material is used, a lens surface or a reflective grating can be formed by embossing or injection molding.

[0035]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG.
CSEL, reference numeral 2 denotes a single lens element, reference numeral 3 denotes a light receiving element as a single light detecting means, and reference numeral 4 denotes a support substrate. VCSEL 1 and light receiving element 3 are arranged on the same surface of support substrate 4. The lens element 2 is a transparent plate and has a lens surface 2A having a positive power on the surface on the VCSEL 1 side, and the other surface 2B has a reflection function. The surface 2B having a reflecting function is a plane inclined with respect to a surface of the lens surface 2A orthogonal to the optical axis AX.

The VCSEL 1 is provided at a position on the optical axis AX on a focal plane on the object side of the lens surface 2A.
Therefore, when the VCSEL 1 emits light, the emitted divergent laser beam enters the lens surface 2A as shown by the solid line, is converted into a parallel beam by the positive power of the lens surface 2A, and travels in the optical axis AX direction. Incident on the surface 2B.

The surface 2B reflects all the incident parallel light beams at a "predetermined rate of reflectance". At this time, since the surface 2B is “inclined with respect to the plane perpendicular to the optical axis”, the reflected light flux indicated by the broken line “separates from the optical path of the incident laser light flux” and proceeds to the VCSEL 1 side, The light is condensed by the positive power of the surface 2A and condensed on the focal plane on the object side of the lens surface 2A.

The light receiving element 3 is connected to the lens surface 2A from the
It is arranged at the condensing position of the condensed light beam emitted to the L1 side, receives the condensed light beam as monitor light LM, and converts it into an electric signal. The reflectance of the surface 2B is determined by the refractive index of the material of the lens element 2 and the “angle of inclination of the surface 2B with respect to a plane perpendicular to the optical axis AX”, and can be set to a desired value as a design condition.

With respect to the laser beam incident on the surface 2B, a reflected component of the laser beam passes through the surface 2B and is refracted by the surface 2B.
Emit as a parallel light beam. This emitted parallel light beam is the “light output”.

FIG. 2 shows another embodiment. In order to avoid complications, it is assumed that there is no risk of confusion.
In the following drawings, the same reference numerals as in FIG. 1 are used.

In the embodiment shown in FIG.
The support substrate 4A supporting the light receiving element 1 and the light receiving element 3 has a step. The VCSEL 1 is arranged at the bottom of the step, and the light receiving element 3 as the light detecting means is arranged above the step.

The lens element 2 ′ is a transparent plate,
The L1 side surface has a positive power lens surface 2A, and the other surface 2B has a reflection function. The surface 2B having a reflection function is
This is a plane inclined with respect to a plane orthogonal to the optical axis AX of the lens surface 2A. In this embodiment, a semi-transmissive film 2C having a predetermined reflectance is formed on the surface 2B by vapor deposition in order to "obtain a desired reflectance reliably".

The VCSEL 1 is provided on the optical axis AX on the object side of the lens surface 2A, at a position farther from the lens surface 2A than the focal position. Therefore, when the VCSEL 1 emits light, the emitted divergent laser beam enters the lens surface 2A as shown by the solid line, is converted into a condensed light beam by the positive power of the lens surface 2A, and moves in the optical axis AX direction. The light advances and enters the surface 2B.

The surface 2B reflects all of the incident condensed light beams at a predetermined rate of reflectance by the action of the semi-transmissive film 2C. Since the surface 2B is “inclined with respect to a plane orthogonal to the optical axis”, the reflected light flux indicated by the broken line advances toward the VCSEL 1 so as to “separate from the optical path of the incident laser light flux”, With the power of lens surface 2
The light is focused on a position closer to the lens surface 2A than on the focal plane on the object side of A.

The light receiving element 3 is connected to the lens surface 2A from the
It is arranged at the condensing position of the condensed light beam emitted to the L1 side, receives the condensed light beam as monitor light LM, and converts it into an electric signal. In the laser beam incident on the surface 2B, a component of the reflected light passes through the surface 2B, is refracted by the surface 2B, and is "condensed light beam".
Inject as This emitted condensed light beam becomes “light output”.

FIG. 3 shows another embodiment. As in the embodiment of FIG. 1, the VCSEL 1 and the light receiving element 3 are arranged on the same surface of the support substrate 4. The lens element 20 is a transparent plate and has a lens surface 20A having a positive power on the surface on the VCSEL 1 side, and the other surface 20B has a reflection function. The surface 20B having a reflection function is formed as a “reflection type grating”.

Since the direction of reflection on the surface 20B is determined as a diffraction angle, the surface 20B can be orthogonal to the optical axis AX.

The VCSEL 1 is provided at a focal position on the object side of the lens surface 20A, and when the VCSEL 1 emits light,
The emitted divergent laser beam enters the lens surface 20A as shown by a solid line, is converted into a parallel beam by the positive power of the lens surface 20A, travels in the direction of the optical axis AX, and enters the surface 20B. .

The surface 20B reflects all incident parallel light beams at a predetermined reflectance by the action of the reflection grating. The -1st-order diffracted light component of the reflected diffracted light beam is used as the monitor light LM.

That is, the reflected light beam (parallel light beam) serving as the monitor light is separated from the optical axis AX so that the VCSEL
1, the light is focused by the positive power of the lens surface 20A, and is focused on the focal plane on the object side of the lens surface 2A. The light receiving element 3 is arranged at a position where the converged light beam emitted from the lens surface 20A toward the VCSEL 1 is condensed, receives the condensed light beam as monitor light LM, and converts it into an electric signal.

The laser beam incident on the surface 20B is emitted from the surface 20B as a "zero-order light" with a component of the reflected residual, and is emitted as a parallel light beam parallel to the optical axis AX. This emitted parallel light beam is the “light output”. Needless to say, an optical output element similar to that of the embodiment of FIG. 2 can be configured using the lens element 20 of the embodiment shown in FIG.

"Light output element" described in the above embodiment
Is a single VCSEL1 and a transparent plate
Side surfaces 2A and 20A having positive power, the other surfaces 2B and 20B having a reflection function, and transmitting the divergent laser beam emitted from the VCSEL 1 to the lens surfaces 2A and 20A.
A, and the laser beam transmitted through the lens surfaces 2A and 20A is separated from the optical path of the incident laser beam at a predetermined ratio by the reflection function of the other surfaces 2B and 20B to the VCSEL 1 side. A single reflecting lens element 2, 2 ', 20 and the other surface 2B, 20B
The lens element 2, which is condensed by the lens surfaces 2A and 20A,
There is provided a single monitoring light detecting means 3 for receiving a condensed light beam emitted from the 2 ', 20 to the VCSEL 1 side as monitor light LM and converting it into an electric signal (claim 1).

The lens elements 2 and 2 'in the embodiment shown in FIGS. 1 and 2 are planes in which the surface 2B having a reflecting function of the lens element is inclined with respect to the surface orthogonal to the optical axis AX of the lens surface. In the lens element 2 'shown in FIG. 2, the plane 2B inclined with respect to the plane orthogonal to the optical axis AX of the lens surface 2A is formed as a semi-transmissive film 2C having a predetermined reflectance.
(Claim 3).

In the lens element 20 in the embodiment shown in FIG. 3, the surface 20B having a reflection function is formed as a reflection type grating (claim 4). Figure 1,
In the optical output device shown in the embodiment in FIG. 3, the lens surfaces 2A and 20A having positive power of the lens element
It has a collimating function for converting the divergent laser beam from L1 into a parallel beam (Claim 5), and the VCSEL 1 and the light detection means 3 are arranged on substantially the same plane of the support substrate 4 (Claim 6). ).

In the light output element shown in FIG. 2, the lens surface 2A having a positive power of the lens element 2 'is used.
Converts the divergent laser beam from the VCSEL 1 into a converging beam (claim 7), the support substrate 4A supporting the VCSEL 1 and the light detecting means 3 has a step, and the VCSEL 1 is disposed at the bottom of the step, The means 3 is disposed above the step (claim 8).

The lens elements 2, 2 ', and 20 in each of the above-described embodiments are lens elements used for an optical output element using the VCSEL 1, and have a transparent plate shape. Lens surfaces 2A and 20A having the same power, while the other surfaces 2B and 20B have a reflection function,
The divergent laser beam emitted from L1
A, the side of the VCSEL 1 is separated from the optical path of the incident laser beam by a predetermined ratio by the reflection function of the other surface 2B, 20B. This is a lens element that reflects light to the lens (claim 12).

In the lens elements 2 and 2 ', the surface 2B having a reflecting function is a plane inclined with respect to the surface of the lens surface 2A orthogonal to the optical axis AX (claim 13).
In this case, a plane 2B inclined with respect to a plane orthogonal to the optical axis of the lens surface forms a semi-transmissive film 2C having a predetermined reflectance (Claim 14). In the lens element 20, the surface 20B having the reflection function is formed as a reflection type grating.

In the lens elements 2 and 20, the lens surfaces 2A and 20A having a positive power convert the divergent laser beam from the VCSEL 1 into a parallel beam (claim 16), and the lens element 2 'has a positive power. The lens surface 2A has a VCSEL
The divergent laser beam from the first laser beam is converted into a converging beam (claim 17).

The surfaces 2B and 20B reflect the "all luminous flux portions" of the incident laser luminous flux (the laser luminous flux transmitted through the lens surface) toward the VCSEL 1 at a predetermined ratio, and are reflected by the photodetecting means 3 (substantially). All) received, the monitor light LM
Changes correctly correspond to changes in the light emission intensity of the VCSEL 1, and are not affected by light emission fluctuations.

Therefore, the light output device of each of the above embodiments controls the light intensity of the monitor light to a predetermined level, thereby controlling the intensity of the emitted laser light flux due to temperature fluctuations in the VCSEL 1 and deterioration of the VCSEL itself over time. The fluctuation can be reliably controlled to a desired level without being affected by light emission fluctuation.

FIG. 4 shows an embodiment of the light output element array. This light output element array is one in which the light output element shown in the embodiment in FIG. 1 is one unit, and a plurality of light output elements are arrayed and integrated (claim 9). Of course, one unit of light output element is the same as each other.

The same lens elements 2-1, 2-2, 2-
The lens element array (Claim 18), which is arrayed and integrated with each unit of 3,..., Is formed on a “common transparent plate” (Claim 19).
, 3-2,... Corresponding to the VCSEL are supported by a common support substrate 40 (claim). Item 10). The light output and the light intensity detection of the monitor light in the light output element of each unit are the same as in the embodiment of FIG. Symbol 2A
1, 2A2, 2A3. Is "Positive lens surface",
Symbols 2B1, 2B2, 2B3. . Indicates a “surface having a reflection function”.

In the embodiment shown in FIG. 4, the arrangement of lens elements, VCSELs, and light receiving elements is one row in the horizontal direction of the figure. It goes without saying that it can be arranged in the horizontal direction and the direction perpendicular to the drawing.

In this case, the arrangement of the respective light output elements shown in FIG. 4 is changed in the direction orthogonal to the drawing.
They can be arranged to overlap each other in this direction. That is, in this case, the arrangement of the light output elements has a “go-to-me” pattern. At this time, a plurality of lenses in which the surfaces 2B1, 2B2, 2B3,... Having a reflection function in each lens element 2-1, 2-2,. The elements can be "shared" (claims 11 and 20).

Further, in such a case, the light receiving element 3
Instead of arranging -1, 3-2, etc. in one line in a direction orthogonal to the drawing, an area sensor having a long light receiving surface in the direction orthogonal to the drawing is arranged, and the area sensor " The light detecting means of the “lens element array arranged in one row in the direction” may be shared.

If the lens element array has “tilt, placement error, etc.”, the “surface having a reflection function” of each lens element is determined.
And the return position of each condensed light flux exiting to the VCSEL side changes. Therefore, all or a part of the light receiving elements 3-1, 3-2, etc. are used as area sensors, and the return position of the converged light beam is accurately detected by these area sensors to know the inclination and position error of the lens element array. be able to.

That is, using the output of the area sensor, "VC
"Alignment correction for the SEL array" can be easily and extremely accurately performed. Note that, instead of the area sensor, another light detecting unit that can detect the return position of the focused light beam, such as a position sensor or a divided light receiving element, may be used.

Needless to say, a plurality of light output elements can be arrayed in the same manner as in the embodiment of FIG. 4, with the light output elements shown in FIGS. 2 and 3 as one unit.

[0069]

As described above, according to the present invention, a novel light output element and a new light output element array, a novel lens element and a new lens element array can be realized. As described above, the lens element / lens element array of the present invention
Since the light energy proportional to the total energy of the divergent laser beam emitted from the CSEL is separated toward the light detecting means, it is possible to generate monitor light which is not affected by the "luminous fluctuation" of the VCSEL.

Therefore, the light output element / light output element array of the present invention can stably emit light of the VCSEL, and can always output a proper light output.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating one embodiment of a light output element.

FIG. 2 is a diagram for explaining another embodiment of the light output element.

FIG. 3 is a diagram for explaining another embodiment of the light output element.

FIG. 4 is a diagram for explaining an embodiment of a light output element array.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 VCSEL 2 Lens element 2A Lens surface having positive power 2B Surface having reflection function 3 Light receiving element as light detecting means 4 Support substrate

Claims (20)

[Claims] A single VCSEL; a transparent plate-like surface having a lens surface having a positive power on the surface on the VCSEL side; a reflecting surface on the other surface;
The divergent laser beam emitted from the EL is incident on the lens surface, and the laser beam transmitted through the lens surface is separated from the optical path of the incident laser beam at a predetermined ratio by the reflection function of the other surface. So that the VCS
A single lens element that reflects to the EL side, and a condensed light beam that is reflected by the other surface, condensed by the lens surface, and emitted from the lens element to the VCSEL side is received as monitor light and A light output element having a single photodetector for monitoring for converting the signal into a signal. 2. The light output element according to claim 1, wherein the surface of the lens element having a reflection function is a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface. . 3. A light output element according to claim 2, wherein a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface is formed with a semi-transmissive film having a predetermined reflectance. Light output element. 4. The light output element according to claim 1, wherein the surface of the lens element having a reflection function is formed as a reflection type grating. 5. The optical output device according to claim 1, wherein a lens surface of the lens element having a positive power is a VCSEL.
An optical output device for converting a divergent laser beam from a laser beam into a parallel beam. 6. The light output device according to claim 5, wherein the VCSEL and the light detection means are arranged on substantially the same surface of the support substrate. 7. The optical output device according to claim 1, wherein a lens surface of the lens element having a positive power is a VCSEL.
An optical output device for converting a divergent laser beam from a laser beam into a converging beam. 8. The light output device according to claim 7, wherein the VCSEL and the supporting substrate supporting the light detecting means have a step, the VCSEL is arranged at the bottom of the step, and the light detecting means is located above the step. A light output element, wherein the light output element is disposed in a light source. 9. A light output element array, wherein the light output element according to any one of claims 1 to 8 is defined as one unit, and a plurality of light output elements are arrayed and integrated. 10. The light output element array according to claim 9, wherein the array of lens elements is formed on a common transparent plate, and the array of VCSELs and each light detecting means corresponding to each VCSEL are supported on a common support substrate. An optical output element array, comprising: 11. The optical output element array according to claim 9, wherein the array of lens elements is formed on a common transparent plate, and a plurality of lens elements have a common surface having a reflection function. Light output element array. 12. A lens element used for an optical output element using a VCSEL, wherein the lens element is a transparent plate, has a lens surface of positive power on one surface, has a reflection function on the other surface, and has a reflection function. The emitted divergent laser beam is incident on the lens surface, and the laser beam transmitted through the lens surface is separated from the optical path of the incident laser beam at a predetermined ratio by the reflection function of the other surface. A lens element that reflects toward the VCSEL. 13. The lens element according to claim 12, wherein a surface having a reflection function in the lens element is a plane inclined with respect to a plane orthogonal to an optical axis of the lens surface. 14. A lens element according to claim 13, wherein a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface is formed with a semi-transmissive film having a predetermined reflectance. element. 15. The lens element according to claim 12, wherein the surface having a reflection function is formed as a reflection type grating. 16. A lens element according to claim 12, wherein the lens surface having a positive power converts a divergent laser beam from the VCSEL into a parallel beam. . 17. The lens element according to claim 12, wherein a lens surface of the lens element having a positive power is a VCSEL.
A lens element characterized in that a divergent laser beam emitted from a lens is condensed. 18. A lens element array wherein the lens element according to any one of claims 12 to 15 is defined as one unit, and a plurality of lens elements are arrayed and integrated. 19. The lens element array according to claim 18, wherein the lens element array is formed on a common transparent plate. 20. The lens element array according to claim 19, wherein a surface having a reflection function among a plurality of lens elements is shared.