JP2002373577A - Test method of electron gun - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a test method of an electron gun wherein an inter-electrode distance L between the first electrode 13 and the second electrode 14 of an electron gun structural body 11 can be measured precisely. SOLUTION: The electron gun structural body 11 has a negative electrode support 12 and plural electrodes including the first electrode 13 and the second electrode 14 sequentially arranged, and beam holes 18R, 18G, 18B at the respective electrodes. One reference pin 25 is inserted into the beam holes 18R, 18G, 18B from the side of the electrode opposite to the negative support 12, and made abutted on the second electrode 14. The other reference pin 28 is inserted from the side of the negative support 12 and made abutted on the first electrode 13, and the first electrode 13 and the second electrode 14 are pinched with the reference pin 25. By measuring the distance between these tip end parts of the one reference pin 25 and the other reference pin 28, the distance L between the electrodes including the electrode thickness between the first electrode 13 and the second electrode 14 can be measured precisely.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a first electron gun assembly.
The present invention relates to a method and an apparatus for inspecting an electron gun for measuring a distance between an electrode and a second electrode.

[0002]

2. Description of the Related Art Conventionally, in a manufacturing process of an in-line electron gun used for a color cathode ray tube, a color display tube, etc., in order to measure a distance between a first electrode and a second electrode of an electron gun structure, a first electrode and a second electrode are measured. A spacer having a different thickness is inserted between two electrodes by a manual operation of an operator, and the distance is measured depending on whether or not the spacer is inserted.

In this method, it is necessary to insert a spacer in the vicinity of three beam passage holes formed in each electrode. However, measured values vary depending on the insertion position of the spacer and variations in the pressing force at the time of insertion. There is a problem. In addition, there are problems such as tolerance of the spacer thickness at the time of manufacturing the spacer and abrasion due to repeated measurement. Therefore, the minimum value of the spacer thickness, that is, the interval between the electrodes has to be increased to the unit of 0.005 mm. In addition, in order to accurately measure the distance between the electrodes, it is necessary to carefully handle the electron gun and the spacer, and in many cases, it is delicate to determine whether or not to insert the spacer. ing.

Further, as described in, for example, Japanese Patent No. 2807116, a measuring nozzle whose tip is movable in and out of each beam passage hole of the first electrode and the second electrode is used in an imaging apparatus. While observing the captured silhouette image on a monitor, the tip of the measurement nozzle is moved to a position where it passes through the second electrode and to a position where it reaches the first electrode, and the opposing surface between the first electrode and the second electrode. There is an inspection method in which the distance between the two is measured using an air micrometer attached to the base of the measurement nozzle.

However, in this inspection method, there is no problem if the first and second electrode components have no warpage or unevenness and if they are correctly assembled in parallel. Or if the first electrode and the second electrode are assembled with a slight inclination during assembly,
In the silhouette observation using the monitor, since only the minimum distance between the first electrode and the second electrode can be measured, there is a problem that the distance at a position near the beam passage hole, which is a part to be measured, cannot be accurately measured. Similarly, it is also difficult to separately measure the intervals near the three beam passage holes. Further, in silhouette observation using a monitor, it is difficult to reduce the variation in measured values and the minimum unit unless a high-precision monitor is employed. Also, in recent cathode ray tubes, particularly cathode ray tubes for computer terminals, high quality,
The demand for high definition is severe, and the electron gun assembly is required to reduce the size of each of the first and second electrode beam passage holes and the electrode thickness. There is a problem that it is difficult to process the corresponding extremely small diameter measurement nozzle, and the beam passage hole is likely to be deformed.

Further, as described in Japanese Patent Application Laid-Open No. 2000-306507, while moving the laser focus displacement meter from the last electrode side of the electron gun assembly perpendicularly to the axis of the electron gun assembly, There is an inspection method in which the height between the first electrode and the second electrode is continuously measured, and the distance between the first electrode and the second electrode is measured by calculating each measured height.

However, in the laser focus displacement meter, since the spot diameter of the laser beam is extremely small at several μm,
The surface roughness of the material of each electrode component of the first electrode and the second electrode is measured, and the measurement error is large, so that there is a problem that the height of each electrode cannot be measured accurately.

[0008]

By the way, recent cathode ray tubes, especially cathode ray tubes for computer terminals, have high quality.
The demand for high definition is severe, and there is a demand for reducing the electron beam assembly, particularly, the beam passage holes of the first electrode and the second electrode, and the electrode thickness.

Cut-off characteristics, which are one of the important characteristics for a cathode ray tube, include a diameter of each beam passage hole of the first electrode and the second electrode, an electrode thickness, a distance between the first electrode and the cathode, a first electrode. Is determined by the distance between the electrodes and the second electrode. However, as the beam passing holes of the first and second electrodes and the thickness of the electrodes are reduced, the distance between the first and second electrodes is also reduced. Therefore, the influence of the distance between the first electrode and the second electrode on the cutoff characteristic is increasing, and it is necessary to accurately measure this distance.

However, as described above, the inspection method by inserting the spacer, the tip of the measurement nozzle is connected to the second electrode and the first electrode.
Regardless of the method of measuring the position passing through the surface facing the electrode or measuring the height of each electrode using a laser focus displacement meter, the measurement error is large, and the distance between the first electrode and the second electrode is accurate. Has a problem that cannot be measured.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an electron gun inspection method and apparatus capable of accurately measuring the distance between the first electrode and the second electrode. I do.

[0012]

SUMMARY OF THE INVENTION The present invention is directed to an electron gun assembly in which a plurality of electrodes including a cathode support, a first electrode, and a second electrode are sequentially arranged and a beam passage hole is formed in each of these electrodes. Insert one reference pin into the beam passage hole from the electrode side opposite to the cathode support to
While being in contact with the electrodes, the other reference pin is inserted from the cathode support side to make contact with the first electrode, and the first electrode and the second electrode are sandwiched between one reference pin and the other reference pin. The distance between the tip of the reference pin and the other reference pin is measured.

Then, one reference pin is inserted into the beam passage hole from the electrode side opposite to the cathode support to make contact with the second electrode, and the other reference pin is inserted from the cathode support side to the first electrode. The first electrode and the second electrode are sandwiched between the one reference pin and the other reference pin, and the distance between the tip of the one reference pin and the other reference pin is measured, whereby the first electrode and the second electrode are measured. The distance between the electrodes including the electrode thickness between the two electrodes is accurately measured.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an enlarged schematic view of an inspection apparatus for an electron gun, FIG. 2 is an explanatory view for explaining an inspection method using the inspection apparatus in the order of (a), (b) and (c), and FIG. FIG. 9 is an explanatory diagram illustrating measurement positions of the electron gun assembly corresponding to the positions of the respective beam passage holes in the inspection method used.

The electron gun assembly 11 includes a cylindrical cathode support 12 on which a cathode (not shown) is disposed, a first electrode 13 and a second electrode 14.
A plurality of electrodes including the first and third electrodes 15 are sequentially arranged, and are integrally fixed by insulating supports 17 arranged on both sides. The electrodes include a first electrode 13 to a seventh electrode 16 as a final electrode, and three circular beam passage holes 18R, 18G, and 18B are formed in parallel in the inline direction through these electrodes 13 to 16. Have been. These beam passage holes 18R, 18G, 18
B indicates the entire beam passage hole of the electron gun structure 11,
The first electrode 13 has beam passage holes 13R, 13G, 13B, the second electrode 1
4 has beam passing holes 14R, 14G and 14B, the third electrode 15 has beam passing holes 15R, 15G and 15B... The seventh electrode 16 has beam passing holes 16R, 16G and 16B formed coaxially. I have.

The inspection device 21 has one reference member 22 disposed on the lower side and another reference member 23 disposed on the upper side.

On the reference member 22, five columnar pins 24 are projected in a line in the inline direction at a pitch corresponding to the beam passage holes 18R, 18G, and 18B of the electron gun assembly 11. The tip of one pin 24 in the middle is the other pin
It is configured as one reference pin 25 protruding from the distal end position of 24.

These pins 24 are inserted into the beam passage holes 18R, 18G, 18B of the electron gun assembly 11 from the side of the seventh electrode 16 opposite to the cathode support 12. One of the reference pins 25 has a tapered tip and a flat contact surface 25a perpendicular to the axial direction formed on the tip surface. The contact surface 25a is the beam of the second electrode 14. The holes are inserted until the peripheral edges of the through holes 14R, 14G, and 14B come into contact with the surface facing the third electrode 15. Each of the pins 24 other than the one reference pin 25 has a spherical end, and is inserted until the end penetrates the beam passage holes 15R, 15G, and 15B of the third electrode 15.
The contact between one reference pin 25 and the second electrode 14 restricts insertion at a position where the reference pin 25 does not contact the second electrode 14.

On the base end side of each pin 24, there is formed a positioning shaft portion 26 which is positioned and fitted into the beam passage holes 16R, 16G, 16B on the side facing the outer surface of the seventh electrode 16. On the distal end side of each pin 24, there is formed a positioning shaft portion 27 which is positioned and fitted into the beam passage holes 15R, 15G, 15B on the side of the third electrode 15 facing the second electrode 14. Positioning shaft of these pins 24
26 and the outer diameter of the positioning shaft 27 and the beam passage holes 16R, 1
Differences between the inner diameters of 6G, 16B and the beam passage holes 15R, 15G, 15B are set within a range of 0.02 to 0.04 mm.

The other reference body 23 is provided with another reference pin 28 which is coaxially opposed to the one reference pin 25 and protrudes therefrom. The other reference pin 28 is connected to the cathode support 12
It is formed in a columnar shape that can penetrate the inside, and the tip portion has a concave portion 2 facing the beam passage holes 13R, 13G, and 13B of the first electrode 13.
9 is formed in a concave shape. The concave portion 29 has a depth of, for example, about 0.1 mm and is formed to be larger than the diameter of the beam passage holes 13R, 13G, and 13B. Around the concave portion 29, a planar shape orthogonal to the axial direction of the other reference pin 28 is formed. Abutment surface 28
a is formed, and the contact surface 28a is formed with the beam passing holes 13R, 13G,
It is abutted at a position slightly outside the inner edge of 13B.

One drive means 31 for moving one reference body 22 in the axial direction of the electron gun assembly 11 and the other drive means 32 for moving the other reference body 23 in the axial direction of the electron gun assembly 11 are provided. Have. The other driving means 32 has two reference pins.
Measuring means 33 is provided for measuring the interval between these two reference pins 25 and 28, with the position where the 25 and 28 contact each other as the zero point. The minimum unit of the measured value by the measuring means 33 is 0.001 m
m.

An electron gun assembly support (not shown) for supporting the electron gun assembly 11 movably in the axial direction is provided. The electron gun assembly 11 is moved in a direction orthogonal to the axial direction via the electron gun assembly support. That is, the measurement position S1 where the center beam passage hole 18G of the electron gun assembly 11 matches between the reference pins 25 and 28, and the measurement position S2 where the beam passage hole 18R on one side matches between the reference pins 25 and 28. , The other side beam passage hole 18B is
There is provided a moving means 34 for moving to a measurement position S3 that coincides between the eight positions.

Next, a method of inspecting the electron gun assembly 11 by the inspection device 21 will be described.

First, as shown in FIG.
To lower one of the reference bodies 22, and drive means 32 to raise the other reference body 23.
The electron gun structure 11 is arranged via an electron gun structure support (not shown). At this time, for example, the measurement position S at which the beam passage hole 18G at the center of the electron gun assembly 11 matches between the two reference pins 25 and 28 is set.
Place on 1.

Subsequently, as shown in FIG.
1 raises one reference body 22, one reference pin 25 into the beam passage hole 18 G in the center of the electron gun structure 11, and the pins 24 on both sides of the one reference pin 25 through the beam on both sides of the electron gun structure 11 The holes are inserted into the holes 18R and 18B from the seventh electrode 16 side.

The one reference pin 25 and the pins on both sides
24 penetrates the beam passage holes 15R, 15G, 15B of the third electrode 15, and the contact surface 25a at the tip of one of the reference pins 25 is
The pins 24 on both sides are in contact with the peripheral portion of the beam passage hole 14G, and the pins 24 on both sides have the third electrode 15 and the second electrode whose tips do not contact the second electrode 14.
Insertion is restricted at a position between 14.

The contact surface 25a of one reference pin 25 is the second electrode 1
After abutting on the periphery of the beam passing hole 14G of the fourth, the one reference body 22
Lift the electron gun assembly 11 slightly together with 22. At the holding position where the electron gun assembly 11 is slightly lifted, one of the reference bodies 22 reaches a predetermined measurement height position, and the drive unit 31 stops lifting the one of the reference bodies 22.

In the holding state where the electron gun assembly 11 is slightly lifted, each of the beam passage holes 16R, 1R on the side facing the outer surface of the seventh electrode 16 is provided.
The positioning shaft of each pin 24 is positioned in the beam passing holes 15R, 15G, and 15B on the side of the third electrode 15 facing the second electrode 14 by positioning and fitting the positioning shaft portions 26 of the pins 24 in the 6G and 16B. The portion 27 is positioned and fitted. By positioning the electron gun assembly 11 and the pin 24 at two positions farthest in the axial direction between the third electrode 15 and the seventh electrode 16, the parallelism of each axis of the electron gun assembly 11 and the pin 24 is improved. Is obtained, and positioning can be performed reliably. Moreover,
Each outer diameter of the positioning shaft 26 and the positioning shaft 27 of each pin 24 and the beam passage holes 16R, 16G, 16B and the beam passage hole 15
The difference between each inner diameter of R, 15G and 15B is 0.02-0.04mm
Is set within the range, the positioning can be performed reliably without impairing the insertability of the pin 24.

Subsequently, as shown in FIG.
The other reference body 23 is lowered by 2 and the other reference pin 28 is inserted into the center cathode support 12, and the contact surface 28 a of the other reference pin 28 is connected to the center beam passage hole 13 G of the first electrode 13. Lower until it touches the surroundings. Connect the other reference pin 28 to the first
When lowering to the position where it contacts the electrode 13, if the pressing force is too large, the first electrode 13 is deformed toward the second electrode 14, and a value smaller than the actual distance is measured. Is set to 0.294 N or less, so that the amount of deformation of the first electrode 13 can be ignored.

As a result, the first electrode 13 and the second electrode 14 are sandwiched between the tips of the one reference pin 25 and the other reference pin 28, and the distance between the tips is measured by the measuring means 33. The first in the central beam passage holes 13G and 14G
The distance L between electrodes including the electrode thickness between the electrode 13 and the second electrode 14
Is measured.

After the measurement, the other reference body 23 is raised and the one reference body 22 is lowered to return to the initial state shown in FIG.

Then, as shown in FIG. 3, the electron gun assembly 11 is moved by the moving means 34, and the beam passing hole 18R on one side is
The beam is moved to the measurement position S2 that matches between the positions 5 and 28, or the beam passing hole 18B on the other side is moved to the measurement position S3 that matches between the reference pins 25 and 28, and the measurement is performed in the same manner. Therefore, by repeating the measurement operation three times for one electron gun assembly 11, three beam passage holes 18R, 18G, and 18B
The distance L between the first electrode 13 and the second electrode 14 at the position is continuously measured.

The amount of movement for raising one reference body 22 is always constant, and one reference pin 25 and the other reference pin 28 are operated in the same manner as described above without the electron gun assembly 11 being installed in advance. And the amount of movement of the other reference pin 28 at that time is set to zero, and the distance between the electrodes L from the movement position of the other reference pin 28 when the electron gun assembly 11 is installed.
Is measured. This zero point setting is set once when the power is turned on, so that the value is stored and used for subsequent measurements.

As described above, one reference pin 25 is moved from the side of the seventh electrode 16 opposite to the cathode support 12 to the beam passage holes 18R, 1R.
8G and 18B to be in contact with the second electrode 14, and the other reference pin 28 is inserted from the cathode support 12 side to be in contact with the first electrode 13, and one reference pin 25 Between the first electrode 13 and the second electrode 14
Between the one reference pin 25 and the other reference pin.
By measuring the distance between the tip of the first electrode 13 and the electrode 28, the distance L between the electrodes including the electrode thickness of the first electrode 13 and the second electrode 14 can be accurately measured. Since the electrode thickness of the first electrode 13 and the second electrode 14 is known in advance by measurement or the like, the first electrode 13
The distance between the first electrode 13 and the second electrode 14 can also be obtained from the distance L between the electrodes including the electrode thickness between the first electrode 13 and the second electrode 14.

Therefore, the thickness of the beam passage holes 18R, 18G, 18B of the first electrode 13 and the second electrode 14 and the thickness of the electrodes are reduced,
The first electrode is not affected by irregularities and warpage of the electrode parts.
The distance between 13 and the second electrode 14 can be measured accurately and in a short time. Even if the minimum unit of the measured value is 0.001 mm, a stable measured value without variation can be obtained.

Further, by inserting a plurality of pins 24 into the respective beam passage holes 18R, 18G, 18B from the side of the seventh electrode 16 opposite to the cathode support 12, the electron gun assembly 11 and the pins 24 can be positioned and fixed to each other. .

Further, the pin 24 is a beam passing hole 16R, 16G, 16 of the seventh electrode 16, which is the final electrode opposite to the cathode support 12.
B and the electron gun assembly 11 and the pin 24 are connected to the third electrode 15 in order to position and fit them into the beam passage holes 15R, 15G, and 15B of the third electrode 15.
Positioning can be performed at the two positions farthest in the axial direction between the electrode 15 and the seventh electrode 16, the parallelism of each axis of the electron gun assembly 11 and the pin 24 can be obtained, and the positioning can be performed reliably. Moreover, the outer diameters of the positioning shafts 26 and 27 of each pin 24 and the beam passage holes
Since the difference between the inner diameters of the 16R, 16G, 16B and the beam passing holes 15R, 15G, 15B is set within a range of 0.02 to 0.04 mm, the positioning of the pins 24 can be performed without impairing the insertability.

When the difference between the inner diameter of the hole and the outer diameter of the pin 24 is less than 0.02 mm, when there are three or more portions holding the electron gun assembly 11, the driving means 31 automatically drives the pin 24. When raised, the pins 24 are caught by the edges of the beam passage holes 18R, 18G, and 18B of the electron gun assembly 11, and the electron gun assembly 1
1 is raised at the same time, or the electron gun structure 11 is held diagonally due to the influence of the center axis deviation of each beam passage hole 18R, 18G, 18B of the electron gun structure 11 or the surface roughness of the pin 24. Therefore, a problem that the electron gun assembly 11 cannot be stably held easily occurs. If the difference between the inner diameter of the hole and the outer diameter of the pin 24 exceeds 0.04 mm, the electron gun assembly 11
When the electron gun assembly 11 is held, the rattling between the electron gun assembly 11 and the pin 24 is large, and a problem that the electron gun assembly 11 cannot be stably held easily occurs. Therefore, in order to stably hold the electron gun assembly 11 by the three pins 24 in the automatic operation, the pins 24
Are positioned and fitted at two positions, ie, the beam passing holes 16R, 16G, 16B of the seventh electrode 16, which is the final electrode opposite to the cathode support 12, and the beam passing holes 15R, 15G, 15B of the third electrode 15, and
The difference between the outer diameter of the pin 24 and the inner diameter of the beam passage holes 16R, 16G, 16B and the beam passage holes 15R, 15G, 15B is 0.02.
It is preferable that the distance is set within the range of 0.04 mm.

Also, since five pins 24 in which one reference pin 25 is arranged at the center are provided integrally with one reference body 22,
Connect one reference pin 25 to each beam passage hole 18 of the electron gun
R, 18G, and 18B in order, and each beam passage hole 18R, 18G, 1
The distance L between the first electrode 13 and the second electrode 14 corresponding to the position 8B can be measured.

The pressing force for sandwiching the first electrode 13 and the second electrode 14 between one reference pin 25 and the other reference pin 28 is:
In order to make the amount of deformation of the first electrode 13 negligible,
The first electrode 13 is connected to the second electrode 14
It can be prevented from being deformed to the side and measuring a value smaller than the actual interval, and accurate measurement can be performed. The lower limit of the applied pressure is 0 because the other reference pin 28 is in contact with the first electrode 13.
And is set to a value larger than 0.

Further, since the tip of one of the reference pins 25 is provided in a planar shape, the contact state can be stabilized by surface contact with the second electrode 14.

Further, the tip of the other reference pin 28 is formed in a concave shape facing the beam passage holes 18R, 18G, 18B,
Since the first electrode 13 is not directly in contact with the beam passage holes 18R, 18G, and 18B, it is possible to prevent burrs and the like generated when the beam passage holes 18R, 18G, and 18B are formed. In addition, even if the electrode thickness near the beam passing holes 18R, 18G, and 18B is thin and easily deformed, the other reference pin 28 is connected to the beam passing hole 18R.
Deformation can be prevented by not touching the edges near R, 18G, and 18B.

The shape of the tip of the other reference pin 28 is
When welding the cathode to the cathode support 12, it has a concave shape similar to the gauge that sets the distance between the first electrode 13 and the cathode, thereby reducing measurement errors due to the difference in shape between the gauge and the other reference pin 28. it can. In addition, when the distance between the first electrode 13 and the cathode is set at the time of welding the cathode, the distance between the first electrode 13 and the second electrode 14 measured by the inspection device 21 is fed back to stabilize the cutoff voltage. Can be planned.

In the above embodiment, in order to measure the distance L between the first electrode 13 and the second electrode 14 corresponding to the position of each of the beam passage holes 18R, 18G and 18B, the electron gun assembly 11 is measured.
Side, but even if each reference body 22, 23 side is moved,
A similar effect can be obtained.

[0046]

According to the present invention, one reference pin is inserted into the beam passage hole from the electrode side opposite to the cathode support to make contact with the second electrode, and the other reference pin is inserted from the cathode support side. To make contact with the first electrode, sandwich the first electrode and the second electrode between one reference pin and the other reference pin, and measure the distance between the tips of the one reference pin and the other reference pin. The distance between the electrodes including the electrode thickness of the first electrode and the second electrode can be accurately measured.

[Brief description of the drawings]

FIG. 1 is an enlarged schematic view of an electron gun inspection apparatus according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating an inspection method using the inspection device in the order of (a), (b), and (c).

FIG. 3 is an explanatory diagram for explaining a measurement position of the electron gun assembly corresponding to a position of each beam passage hole in the inspection method using the inspection device.

[Explanation of symbols]

 11 Electron gun assembly 12 Cathode support 13 1st electrode 14 2nd electrode 15 3rd electrode 16 7th electrode as final electrode 18R, 18G, 18B Beam passage hole 21 Inspection device 22 Reference body 24 pin 25, 28 Reference pin 33 Measurement means

Claims (14)

[Claims] A plurality of electrodes including a cathode support, a first electrode and a second electrode are sequentially arranged, and one reference pin is connected to a cathode support for an electron gun assembly having a beam passage hole formed in each of the electrodes. And inserted into the beam passage hole from the opposite electrode side to contact the second electrode, and the other reference pin is inserted from the cathode support side to the first electrode.
An electrode which is brought into contact with the electrode, the first electrode and the second electrode are sandwiched between one reference pin and the other reference pin, and the distance between the tips of the one reference pin and the other reference pin is measured. Gun inspection method. 2. A plurality of electrodes including a cathode support, a first electrode and a second electrode are sequentially arranged, and a plurality of pins are connected to an electron gun assembly having three beam passage holes formed in these electrodes. One of the pins is inserted into each of the beam passage holes from the electrode side opposite to the support, and one of the pins protrudes from the tip position of the other pin is brought into contact with the second electrode. Is inserted from the cathode support side into contact with the first electrode, the first electrode and the second electrode are sandwiched between the one reference pin and the other electrode, and the one reference pin and the other An electron gun inspection method, comprising: measuring a distance between a tip portion and a reference pin. 3. The method according to claim 2, wherein the pins are positioned and fitted in the beam passage holes of the last electrode and the third electrode opposite to the cathode support. 4. The method according to claim 3, wherein the difference between the outer diameter of the pin and the inner diameter of the beam passage hole is 0.02 to 0.04 mm. 5. The apparatus according to claim 1, further comprising five pins having one reference pin disposed at the center thereof, wherein one of the reference pins is inserted into each of the beam passage holes of the electron gun assembly in order for measurement. 5. The method for inspecting an electron gun according to any one of 2 to 4. 6. A pressure for sandwiching the first electrode and the second electrode between one reference pin and the other reference pin is 0.29.
6. The method for inspecting an electron gun according to claim 1, wherein the electron gun is set to 4N or less. 7. The inspection method for an electron gun according to claim 1, wherein the other reference pin has a tip portion formed in a concave shape facing the beam passage hole of the first electrode. . 8. An electron gun assembly in which a plurality of electrodes including a cathode support, a first electrode, and a second electrode are sequentially arranged, and a beam passage hole is formed in each of these electrodes. And a reference pin inserted from the cathode support side and abutted on the second electrode; and a first electrode and a second electrode inserted from the cathode support side and abutted on the first electrode, and between the one reference pin. An inspection apparatus for an electron gun, comprising: a second reference pin sandwiching two electrodes; and a measuring unit configured to measure a distance between a tip of the one reference pin and the other reference pin. 9. An electron gun assembly in which a plurality of electrodes including a cathode support, a first electrode, and a second electrode are sequentially arranged and three beam passage holes are formed in these electrodes, respectively. It has a plurality of pins that are inserted into each beam passage hole from the electrode side, and one of these pins protrudes from the tip position of the other pin and has one of the reference pins that is in contact with the second electrode. A reference body, and another reference pin that is inserted from the cathode support side to face the one reference pin and is in contact with the first electrode, and that sandwiches the first electrode and the second electrode between the one reference pin and An inspection apparatus for an electron gun, comprising: a measuring means for measuring a distance between the tip of one of the reference pins and the other of the reference pins. 10. The electron gun inspection apparatus according to claim 9, wherein the pins are positioned and fitted in the beam passage holes of the final electrode and the third electrode opposite to the cathode support. 11. The electron gun inspection apparatus according to claim 10, wherein a difference between an outer diameter of the pin and an inner diameter of the beam passage hole is 0.02 to 0.04 mm. 12. The reference body has five pins in which one reference pin is arranged at the center, and one of the reference pins is inserted into each of the beam passage holes of the electron gun assembly in order to be measured. The electron gun inspection apparatus according to any one of claims 9 to 11, wherein: 13. A pressing force for sandwiching the first electrode and the second electrode between one reference pin and the other reference pin is 0.2.
9. The method according to claim 8, wherein the pressure is 94 N or less.
2. The electron gun inspection apparatus according to any one of 2. 14. The inspection apparatus for an electron gun according to claim 8, wherein the tip of the other reference pin is formed in a concave shape facing the beam passage hole of the first electrode. .