JP2002364644A - Linear guide device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a straight guide device capable of improving effectiveness to an arrangement space by eliminating necessity of an opening on the top of the top table preventing enlargement of a top table in the width direction, in mounting and fixing a bearing on the top table. SOLUTION: This guide device is provided with a base 1, rails 20 laid on the base, bearings 30 which are provided on the rails can move, and the top table 40 which is supported by the bearings and are linearly guided along the rails. Through-holes 13 are provided in a surface facing the rails, and fixing bolts 5 for mounting and fixing the bearings on the top table are inserted into the through-holes from the rail side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear guide device provided in, for example, a machine tool or a semiconductor manufacturing apparatus and employed as a work transfer mechanism or a positioning mechanism.

[0002]

2. Description of the Related Art For example, a linear guide, a so-called linear guide, which is provided in a machine tool, a semiconductor manufacturing apparatus, or the like as a work transfer mechanism or a positioning mechanism, is often used.

FIG. 5 shows the most general configuration of a conventional linear guide. In the drawing, reference numeral 1 denotes a base, which has a substantially concave cross section and has a predetermined longitudinal dimension. Rails 2 are laid on the upper surface of both sides of the base 1 along the longitudinal direction of the base 1. Appropriate means is employed for attaching and fixing the rail 2 to the base 1.

A bearing 3 is movably provided on each rail 2. In addition, if it explains, bearing 3
Has a concave cross section. The concave portion is fitted into the rail 2, and a plurality of balls as rolling elements are interposed on a surface facing the side surface of the rail 2. A groove for engaging the ball is provided on the side surface of the rail 2 along the longitudinal direction, and the ball circulates as the bearing 3 moves. (The drawing is simplified and the details are not shown. The same applies to the following.) A top table 4 is placed over the upper surface of both the left and right bearings 3, and the top table 4 is fixed via fixing bolts 5 as mounting fixtures. It is fixed to the bearing 3.

Specifically, a counterbore 6 is provided on the upper surface of the top table 4, and a screw hole 7 communicating with the counterbore 6 is provided in the bearing 3. The fixing bolt 5 is inserted into the counterbore hole 6 from the upper surface side of the top table 4, and this screw portion 5 b is screwed into the screw hole 7, and
And the bearing 3 are fastened and fixed.

The head 5a of the fixing bolt 5 is located in the counterbore 6 and does not protrude from the upper surface of the top table 4. Thus, the work can be guided without any trouble in attaching the work of the machine tool or the semiconductor manufacturing apparatus to the top table 4.

[0007]

However, if the top table 4 is too thick, the counterbore 6 cannot be machined, or if the portion corresponding to the top table 4 is a partition of a vacuum chamber. In this case, if the counterbore 6 is provided, external air enters into the vacuum chamber, so that a seal is required.

[0008] The structure shown in FIG. 6 has been designed. In this case, flanges 3a, 3a are integrally provided in both directions perpendicular to the longitudinal direction of the rail 2, that is, both sides of the bearing 3, and penetrate the mounting hole 8 here.

A screw hole 9 is provided on the lower surface of the top table 4 so as to communicate with the mounting hole 8. The screw hole 9 has a predetermined depth and does not penetrate to the top table 4 upper surface.

The fixing bolt 5 is inserted into the mounting hole 8 from the lower surface of the flange 3a and screwed into the screw hole 9, and the bearing 3 is mounted and fixed to the top table 4. According to this fixing method, the bearing 3 can be fixed to the top table 4 even when the thickness of the top table 4 is large, and a sealing member is required even when the top table 4 corresponds to a partition of a vacuum chamber. The bearing 3 can be fixed without the need.

On the other hand, the presence of the flange 3a integrally provided in the width direction of the bearing 3 affects the space for mounting the linear guide 3. For example, there is a case where the arrangement space cannot be secured in the horizontal direction, and in this case, the protruding portion of the flange portion 3a becomes an obstacle.

FIGS. 7A, 7B and 7C show a modified example of the related art, which is basically the same as the mounting structure described above with reference to FIG. Here, a spacer 3b is used as a substitute for the flange 3a.

That is, as the bearing 3, a bearing body 3A, end gaps 3c attached to both side surfaces thereof, and side seals (not shown) attached to both side surfaces of the end gaps 3c (in some cases, double side seals) are provided. Have.

The bearing 3 is mounted and fixed to the top table 4 with the fixing bolt 5 via the spacer 3b. Zama 3
Since the mounting and fixing portion b is provided in the longitudinal direction of the bearing 3 and does not project in the width direction of the top table 4,
The width of the top table 4 is smaller than that of FIG.

However, in this mounting structure, the fixing bolts 5 are located at positions protruding from both sides in the longitudinal direction of the bearing 3, and if the rigidity of the spacer 3b is not sufficient, as shown in FIG. Is considered to give a deformation force to the bearing 3 and affect the guiding accuracy.

As a modified example, as shown in FIGS. 9A, 9B and 9C, there is a bearing 3S whose total length is double (or triple). Naturally, top table 4S
Is longer in accordance with the bearing 3S.

If a structure is employed in which the above-described spacer 3a is mounted and fixed to the top table 4 in addition to the use of such a bearing 3S, the length of the spacer 3b naturally increases.
It is considered that the rigidity of the spacer 3b is reduced, which affects the guiding accuracy.

In the case where the bearing is formed directly at the longitudinal end of the bearing without using the spacer 3b and the bearing is directly fixed to the top table 4, there is a problem that the rigidity is reduced if the bearing is long. , It may affect the guidance accuracy.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object the purpose of mounting and fixing a bearing to a top table without lowering the guiding accuracy and expanding the width of the top table in the width direction. It is an object of the present invention to provide a linear guide device that can improve the effectiveness of the arrangement space by preventing the above.

[0020]

According to the present invention, there is provided a linear guide device having a rail and a bearing which relatively moves along the rail via a rolling element. An insertion hole for a mounting fixture capable of mounting the bearing from the rail side to the bearing fixed member is provided on the inner surface of the bearing and facing the rail.

According to a second aspect of the present invention, in the linear guide device according to the first aspect, the rail is provided with a through hole through which the mounting fixture is inserted so as to communicate with the insertion hole.

According to a third aspect of the present invention, there is provided a base, a rail laid on the base, a bearing laid over the rail and movable relative to the base, and supported by the bearing. A linear guide device provided with a top table, wherein an insertion hole is provided on the inner surface of the bearing and on a surface facing the rail, and the bearing is mounted and fixed to the top table from the rail side to the insertion hole. It is characterized in that the fixture is inserted.

According to a fourth aspect of the present invention, in the linear guide device according to the third aspect, the rail and the base are provided with a through hole communicating with the insertion hole and through which the mounting fixture is inserted.

By adopting the means for solving the above-mentioned problems, it is possible to prevent the top table from being widened in the width direction without lowering the guiding accuracy, to improve the effectiveness of the arrangement space, and to improve the effectiveness of the top table. The mounting and fixing of the bearing becomes possible.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

As a first embodiment, FIG.
The side view of the linear guide which is a linear guide device. FIG. 1 (B)
FIG. 2 is a cross-sectional view along the line BB in FIG. FIG. 1 (C)
FIG. 2 is a sectional view taken along line CC of FIG. FIG. 1 (D)
FIG. 2 is a sectional view taken along line DD in FIG.

FIG. 2E is a front view of a linear guide which is the linear guide device shown in FIG. FIG. 2 (F) shows FIG.
It is sectional drawing which follows the FF line of (B). FIG.
(C), FIG. 1 (D), FIG. 2 (E), and FIG. 2 (F) are shown upside down.

In the drawing, reference numeral 1 denotes a base, which has a substantially concave cross section and has a predetermined longitudinal dimension. Rails 2 are provided on the upper surface of both sides of the base 1 along the longitudinal direction of the base 1.
0 is laid with appropriate fixing means and fixing means described later.

Each rail 20 has a bearing 3
0 is laid so as to be relatively movable. The bearing 30 has a concave cross section. The concave portion is fitted into the rail 20, and a plurality of balls as rolling elements are interposed on a surface facing the side surface of the rail 20.

A groove is provided on the side surface of the rail along the longitudinal direction so that the ball circulates with the relative movement of the bearing and the rail. This embodiment is particularly applicable to the case without the retainer. The top table 40 is placed over the upper surfaces of both the left and right bearings 30. As will be described later, the top table 40 is mounted on the bearings 30 via the spacers 30a by the fixing bolts 5 as mounting fixtures. Installed and fixed.

The bearing 30 includes a number of balls,
A bearing body 30S having a ball return passage, an end gap 30b attached to both sides of the bearing body 30S and having a direction change path for the ball, and a side seal (not shown) attached to both sides of the end gap 30b. (May be double side seal)
It has.

The spacer 30a is integrally provided with a flange portion directly attached and fixed by the fixing bolt 5.
This flange portion is provided in the longitudinal direction of the bearing 30 and does not project in the width direction.

Further, the bearing 30 is fixedly mounted on the top table 40 as described below. That is, a part of the rail 20 has a predetermined interval along the center axis La and the through hole 11
Are provided, and these through holes 11 open on the upper surface and the lower surface of the rail 20.

A through-hole 12 is also provided in a portion of the base 1 opposite to the through-hole 11, and the through-holes 11 and 12 are formed to have the same diameter and communicate with each other.

Further, the inner surface of the bearing 30 facing the rail 20 and the through holes 11 and 12 of the base 1,
A through hole 13 as an insertion hole is provided at a portion facing the upper surface of the rail 2. The diameter of the through hole 13 is the same as the diameter of the through hole 11, and a through hole 113 having a diameter through which the threaded portion of the fixing bolt 5 is inserted in the spacer 30 a faces the through hole 11 of the bearing. Is formed.

A plurality of screw holes 14 are provided at a predetermined depth from the lower surface of the top table 40. The positions of these screw holes 14 correspond to the positions of the through holes 1 of the bearing 30.
3, and therefore, the through holes 12, 11, 1 provided from the base 1 to the rail 20.
3, 113 and the screw hole 14 are all communicated.

On the other hand, a counterbore hole 15 is provided at an intermediate portion between the through holes 11 provided at intervals along the center axis of the rail 20 from the side where the bearing 30 is fitted on the upper surface side. The diameter of the counterbore hole 15 may be the same as the diameter of the through hole 13 provided in the bearing 30.

A screw hole 16 is provided at a portion of the base 1 communicating with the counterbore hole 15 of the rail 20.
The depth dimension of the screw holes 16 may be an appropriate dimension that does not reach the lower surface of the base 1, and may extend to the lower surface.

After the above-described piercing, the rail 20 is first fixed to the base 1. At this time, the positioning is performed so that the counterbore hole 15 provided in the rail 20 and the screw hole 16 provided in the base 1 communicate with each other.

Then, the fixing bolt 5 is inserted into the counterbore hole 15 of the rail 2 and screwed into the screw hole 16 of the base 1. Therefore, the rail 20 is fixedly attached to the base 1.

In this state, the bearing 30 is mounted on the rail 20.
Straddle. In other words, a part of the rail 20 is fitted into the recess of the bearing 30. And bearing 3
0, the through-hole 113 of the spacer 30a fixed to the bearing 30, and the through-holes 11, 12 provided in the rail 20 and the base 1 are aligned.

Then, the spacer 30 a attached to the bearing 30 itself or the bearing body 30 S from above with respect to the top table 40 is fastened and fixed with the fixing bolt 5. In this state, the through holes 13 provided in the rail 20 on the back surface side of the bearing 30 and the through holes 11 and 12 provided in the base 1 are provided with respect to the through holes 13 provided on the inner surface of the bearing 30 and facing the upper surface of the rail 20. Communicate.

Next, the fixing bolt 5 is inserted from the through hole 12 of the base 1. Fix this fixing bolt 5 to the rail 20
Through the through hole 11 of the bearing 30 and the through hole 113 of the spacer 30a, and is screwed into the screw hole 14 of the top table 40.

That is, the fixing bolt 5 is attached to the bearing 30.
To the top table 40 through the spacer 30a. In this installation work, the rail 20
The bearing 30 can be mounted and fixed to the base 1 from the back surface side of the base, and the workability is good.

A through-hole 13 is provided in the bearing 30 and the fixing bolt 5 is attached to the top table 4 from the back side of the bearing 3.
Since it can be fixed to 0, the longitudinal inner surface of the rail 2 of the bearing 3 can be fixed to the top table 40 at a plurality of locations, and there is no fear that the rigidity of the spacer 30a is reduced.
Moreover, it prevents the top table 40 from expanding in the width direction,
The effectiveness of the arrangement space can be improved.

Next, a second embodiment of the present invention will be described.

FIG. 3A is a side view of a linear guide which is a linear guide device according to the embodiment. FIG. 3 (B)
Sectional drawing which follows the BB line of FIG. 3 (A). FIG. 3C is a front view in which the top and bottom of the linear guide are reversed. FIG. 3D is a cross-sectional view taken along line DD in FIG. 3B. FIG. 3E shows FIG.
Sectional drawing which follows the EE line of (B). FIG.
It is sectional drawing which follows the FF line of (B).

Here, the bearing 30A is applied when using a bearing 30A. That is, since the bearing is provided, the ball does not fall even if the bearing 30A is removed from the rail 20, and there is no need to provide a through hole communicating with the base 40 and the rail 20.

Other processing, that is, the bearing 3
A counterbore hole 213 as an insertion hole is provided at 0A, and a screw hole 14 is provided at a portion of the top table 40 communicating with the counterbore hole 213. Further, providing the counterbore hole 15 in the rail 20 and providing the screw hole 16 in the base 40 so as to communicate with the counterbore hole 15 remain unchanged.

Since the bearing 30A has a retainer, the rail 20 is removed from the bearing 30A, the fixing bolt 5 is inserted into the counterbore 213 of the bearing 30A, and the bearing 30 is screwed into the screw hole 14. 30
A and the top table 40 are fastened and fixed.

The fastening and fixing between the rail 20 and the base 1 are completed by inserting the fixing bolt 5 from the counterbore hole 15 of the rail 20 and screwing it into the screw hole 16 of the base 1 in the same manner as described above. Becomes

Also in this case, since the bearing 30A can be fixed to the top table 40 from the back side thereof, the inner surface of the rail 20 of the bearing 30A in the longitudinal direction can be fixed to the top table 40 at a plurality of locations, and the rigidity of the bearing 30A is reduced. There is no fear. In addition, it is possible to prevent the top table 40 from expanding in the width direction, and to improve the effectiveness of the arrangement space.

Next, a third embodiment of the present invention will be described.

FIG. 4A is a side view of a linear guide which is a linear guide device according to the embodiment. FIG. 4 (B)
Sectional drawing which follows the BB line | wire of FIG. 4 (A). FIG. 4C is a front view in which the linear guide is turned upside down. FIG. 4D is a cross-sectional view along the line DD in FIG. 4B. FIG. 4E shows FIG.
Sectional drawing which follows the EE line of (B). FIG.
It is sectional drawing which follows the FF line of (B).

Here, the bearing 30B has a conventional structure, and does not include a flange for attaching and fixing it to the top table 40 in advance. Then, the same processing as the drilling described in the first embodiment (shown in FIGS. 1 and 2) is performed. That is, through holes 12 and 11 communicating with each other are provided in the base 1 and the rail 20, and further, the through hole 13 is provided in the bearing 30B, the through hole 113 is provided in the spacer 30a, and the screw hole 14 is provided in the top table 40.

On the other hand, a counterbore hole 15 is provided in the rail 20 and a screw hole 16 is provided in the base 1 to communicate with each other. Then, the fixing bolt 5 is inserted from the counterbore hole 15 of the rail 20 and screwed into the screw hole 16 of the base 1 to fix the rail 20 to the base 1.

With the bearing 30B straddling the rail 20, the fixing bolt 5 is inserted from the through hole 12 of the base 1 through the through hole 11 of the rail 20 into the through hole 13 of the bearing 30B. And the top table 40 and the bearing 30B are fastened and fixed via the spacer 30a.

Also in this case, since the bearing 30B can be fixed to the top table 40 from the back surface side, the inner surface of the rail 20 of the bearing 30B in the longitudinal direction can be fixed to the top table 40 at a plurality of locations, and the spacer 30a
There is no fear of lowering the rigidity. Moreover, the top table 40
Can be prevented from expanding in the width direction, and the effectiveness of the arrangement space can be improved.

[0059]

As described above, according to the present invention, when mounting and fixing the bearing to the top table, the guide accuracy is not reduced, and the width of the top table is prevented from being increased in the width direction, so that the space for the top table can be effectively reduced. In the case where the rail is movable, there are effects such as easy mounting and fixing of the bearing to the top table.

[Brief description of the drawings]

FIG. 1 is a side view of a linear guide device according to a first embodiment of the present invention, a plan view with a part thereof omitted, and a diagram in which each part is sectioned.

FIG. 2 is a front view of the linear guide device according to the embodiment,
FIG.

FIG. 3 is a side view of a linear guide device according to a second embodiment of the present invention, a plan view with a part thereof omitted, a front view, and a diagram in which each part is sectioned.

FIG. 4 is a side view of a linear guide device according to a third embodiment of the present invention, a plan view with a part thereof omitted, a front view, and a diagram in which each part is sectioned.

FIG. 5 is a side view of a conventional linear guide device.

FIG. 6 is a side view of still another conventional linear guide device.

FIG. 7 is a side view, a partially omitted plan view, and a front view of a different conventional linear guide device.

FIG. 8 is an explanatory view of a conventional case where the rigidity of the spacer is insufficient.

FIG. 9 is a side view, a plan view with a part omitted, and a front view of another conventional linear guide device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Base, 20 ... Rail, 30, 30A, 30B ... Bearing, 40 ... Top table, 13 ... Through-hole (insertion hole), 11, 12 ... Through-hole, 5 ... Fixing bolt (mounting fixture).

Claims (4)

[Claims] 1. A linear guide device having a rail and a bearing which relatively moves along the rail via a rolling element, wherein the bearing is provided on an inner surface of the bearing and on a surface facing the rail. A linear guide device provided with an insertion hole for a mounting fixture that can be mounted on a bearing fixed member from the side. 2. A linear guide device according to claim 1, wherein said rail is provided with a through hole communicating with said insertion hole and through which said mounting fixture is inserted. 3. A linear guide device comprising: a base; a rail laid on the base; a relatively slidable bearing laid on the rail; and a top table supported by the bearing. And a mounting fixture for mounting and fixing a bearing to a top table is inserted from the rail side into the insertion hole from the rail side. apparatus. 4. The linear guide device according to claim 3, wherein the rail and the base are provided with through holes communicating with the insertion holes and through which the mounting fixture is inserted.