JP2002357280A - Electromagnetic proportional valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic proportional valve which controls the stroke of a valve body by the balance of the attraction force of a fixed iron core and the restitutive force of a plate spring and greatly reduces the stagnant of a control fluid. SOLUTION: The side wall of a valve chest 27 is formed with 3 third core 16 extended from the outer periphery of a bobbin 14 in the inside of a body 28. A magnetic leakage space 28 is formed inside the valve chest 27 between the under end part of a first core 12 and the extended part of the third core 16 by protruding the bobbin 14 into the valve chest 27 with the hollow part of the bobbin 14 being sealed at the under end part of the first core 12. Furthermore, the plunger 30 is formed into a ring shape having a hollow part larger than the vertical projection part of the under part of the first core 12 and provided inside the valve chest 27.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic proportional valve for controlling a stroke of a valve body by balancing a suction force of a fixed iron core and a restoring force of a leaf spring.

[0002]

2. Description of the Related Art Conventionally, an electromagnetic proportional valve in which the stroke of a valve element is controlled by balancing a suction force of a fixed iron core and a restoring force of a leaf spring is, for example, a normally closed electromagnetic proportional valve shown in FIG. There is a valve 100. In the electromagnetic proportional valve 100 of FIG. 16, an inlet channel 102 and an outflow channel 104 are formed in a body 101, and a valve chamber 105 that connects the inlet channel 102 and the outflow channel 104 is provided.
Are formed. Further, in the valve chamber 105, a valve seat 103 is formed at a position which is an end of the outflow passage 104.

[0003] One end of an inner cylinder 107 made of a non-magnetic material is attached to the body 101. Further, a movable iron core 108 is slidably inserted into the inner cylinder 107. And, on the end face of the movable iron core 108,
A valve body 109 is provided, and a leaf spring 110 is attached. In this regard, since the other end of the leaf spring 110 is fixed to the body 101, the movable iron core 108 is supported by the leaf spring 110. Note that a valve seat 106 is attached to an end surface of the valve element 109.

A fixed iron core 111 made of a magnetic material is fixed to the inner cylinder 107, so that the fixed iron core 111 faces the movable iron core 108, and the fixed iron core 111 and the movable iron core 108 Slide interval 11 between
2 are provided. Then, on the outer periphery of the inner cylinder 107,
A coil 113 for exciting the fixed iron core 111 is provided.

Therefore, in the electromagnetic proportional valve 100 shown in FIG. 16, when the control fluid flows into the inlet channel 102 and the control fluid is desired to flow from the inlet channel 102 to the outlet channel 104, the control fluid is applied to the coil 113. Then, the fixed iron core 111 is excited. Then, the excited fixed core 111 attracts and moves the movable core 108 against the restoring force of the leaf spring 110, so that the valve seat 106 of the valve element 109 is separated from the valve seat 103, and the valve seat 103 is opened. Therefore, the inlet channel 102
The flow control body that has flowed into the
04.

[0006] At this time, if the voltage applied to the coil 113 is changed, the attraction force of the fixed iron core 111 is changed, and the sliding amount of the movable iron core 108 is also changed.
Since the distance between the valve 3 and the valve seat 106 can be changed, the flow rate of the control fluid flowing out from the outflow passage 104 can be controlled.

[0007]

However, FIG.
In the electromagnetic proportional valve 100, since a dead space such as the slide interval 112 exists around the movable iron core 108 inserted into the inner cylinder 107, a large amount of control fluid tends to stay. A large amount of stagnation in the electromagnetic proportional valve 100 in FIG. 16 is, for example, a difficulty in controlling fluids used in semiconductor-related or medical-related fields,
Its use was limited.

Accordingly, the present invention has been made to solve the above-mentioned problems, and the stroke of the valve body is controlled by the balance between the attraction force of the fixed iron core and the restoring force of the leaf spring. Accordingly, it is an object of the present invention to provide an electromagnetic proportional valve in which control fluid stagnation is greatly reduced.

[0009]

According to a first aspect of the present invention, there is provided a bobbin wound with a coil, a fixed core fixed to a hollow portion of the bobbin, and a fixed core. The movable iron core that is sucked into the movable iron core, a valve body fixed to the movable iron core, a valve chamber in which the valve body is present, an inlet flow path and an outflow path communicating with the valve chamber, the inlet flow path, and the A valve body formed with an outflow passage, a valve seat formed in the body, and the valve body being closely spaced from the valve body; and the movable iron core or the valve body being supported between the valve body and the body. A leaf spring for bringing a body into close contact with the valve seat, wherein the stroke of the valve body is controlled by a balance between a suction force of the fixed iron core and a restoring force of the leaf spring. Extending from the outer periphery of the body to the inside of the body A yoke member forming a side wall of the valve chamber, wherein a lower end portion of the fixed core projects into the valve chamber while sealing a hollow portion of the bobbin, thereby forming a lower end of the fixed core. While forming a magnetic leakage space inside the valve chamber between the portion and the extending portion of the yoke member, the movable iron core has a hollow portion larger than a vertical projection portion of a lower end portion of the fixed iron core. It is characterized in that it is formed in an annular shape and the movable iron core is provided inside the valve chamber.

In the electromagnetic proportional valve of the present invention having the above-described features, magnetic leakage occurs between the lower end of the fixed iron core protruding from the hollow portion of the bobbin and the lower end of the fixed iron core inside the valve chamber. There is an extended portion of the yoke member forming a space, and an annular movable iron core supported by a leaf spring. In this regard, since the extended portion of the yoke member forms the side wall of the valve chamber, the magnetic leakage space is formed on the left and right of the lower end portion of the fixed iron core. In addition, the hollow portion of the annular movable iron core exists vertically below the lower end portion of the fixed iron core and is larger than the periphery of the lower end portion of the fixed iron core. The valve body fixed to the movable iron core is in close contact with the valve seat by a leaf spring.

Therefore, when energization of the coil of the hobbin is started, the fixed core is excited and the yoke member is also excited, and magnetism is generated between the lower end portion of the fixed iron core and the extended portion of the yoke member. Due to the vertical component of magnetism acting on the iron core (attraction force of the fixed core), the movable core moves vertically upward to enter the magnetic leakage space against the restoring force of the leaf spring, and is fixed to the movable core. The valve body is
It will be separated from the valve seat.

At this time, since the hollow portion of the movable iron core is larger than the periphery of the lower end portion of the fixed iron core, depending on the strength of the magnetic field generated between the lower end portion of the fixed iron core and the extended portion of the yoke member. In addition, the movable core can enter the magnetic leakage space. Further, the stroke amount of the valve body is determined by balance with the restoring force of the leaf spring.

On the other hand, when the current supply to the coil of the hobbin is stopped, the fixed core is demagnetized and the yoke member is also demagnetized, so that the magnetism generated between the lower end portion of the fixed core and the extended portion of the yoke member disappears. Due to the restoring force of the leaf spring, the movable iron core retreats from the magnetic leakage space, and the valve element fixed to the movable iron core comes into close contact with the valve seat.

Therefore, the control fluid flowing from the inlet flow path can be flowed out of the flow path to the outside through the interior of the valve chamber by energizing the coil of the hobbin. In this regard, in the valve chamber, since the lower end portion of the fixed iron core seals the hollow portion of the bobbin, the control fluid does not enter the hollow portion of the bobbin. Flows into the valve chamber only.

That is, the electromagnetic proportional valve of the present invention is characterized in that the magnetic perpendicular component (attraction force of the fixed core) acting between the lower end portion of the fixed core and the extending portion of the yoke member and acting on the movable core and the plate. Stroke control of the valve body is performed by balancing with the restoring force of the spring.In the valve chamber, the lower end portion of the fixed iron core seals the hollow portion of the bobbin. Control fluid does not penetrate,
Since the control fluid that has flowed into the valve chamber from the inlet flow path flows only inside the valve chamber and flows out of the outflow path, the stagnation of the control fluid can be greatly reduced.

Further, in the electromagnetic proportional valve of the present invention, the movable core does not face the lower end portion of the fixed core and the extending portion of the yoke member in the vertical direction which is the moving direction of the movable core, and the movable core does not face the coil of the hobbin. If the amount of electricity is constant, the magnitude of the attractive force of the fixed core (the perpendicular component of the magnetic force generated between the lower end portion of the fixed core and the extended portion of the yoke member and acting on the movable core) is equal to the fixed core. Therefore, the stroke range of the proportionally controllable valve element can be secured large, and the assembling accuracy can be reduced.

According to a second aspect of the present invention, in the electromagnetic proportional valve according to the first aspect, the leaf spring includes an inner peripheral fixed portion, an outer peripheral fixed portion surrounding the inner peripheral fixed portion, A plurality of beams in which an inner peripheral fixing portion and the outer peripheral fixing portion are joined together, an inner peripheral side R portion in which one side contour of the beam is in contact with the inner peripheral fixing portion, and a contour on the other side of the beam. An outer peripheral side R portion in contact with the outer peripheral fixing portion, wherein the inner peripheral fixing portion or the outer peripheral fixing portion is displaced in a thickness direction, and the inner peripheral side R portion and the outer peripheral side R portion are An arc larger than half of the entire circumference is formed, and the beam is formed in a substantially S-shape. The movable iron core or the valve body is fixed to the inner peripheral fixing portion, and the outer peripheral fixing portion is fixed. The portion is sandwiched between the extending end of the yoke member and the body.

In the solenoid proportional valve of the present invention, the hollow portion of the movable iron core is larger than the periphery of the lower end portion of the fixed iron core, and the magnetism generated between the lower end portion of the fixed iron core and the extended portion of the yoke member. Even if it is strong, since the movable core enters the magnetic leakage space, there is no contact between the fixed core and the movable core,
Further, the movable core or the valve element is fixed to the inner peripheral fixing portion of the leaf spring, and the outer peripheral fixing portion of the leaf spring is sandwiched between the extending tip of the yoke member and the body. Each beam that joins the outer peripheral fixed part and the outer peripheral fixed part is formed in a substantially S-shape, and the rigidity of the inner peripheral fixed part of the leaf spring in the horizontal direction is large, so the movable iron core moves vertically upward and enters the magnetic leakage space. When attempting to enter, even if a magnetic horizontal component acts on the movable core, the movable core is less likely to move in the horizontal direction and is prevented from being attracted to the lower end portion of the fixed core or the extended portion of the yoke member. No particles are generated.

According to a third aspect of the present invention, there is provided the electromagnetic proportional valve according to the second aspect, wherein the leaf spring is symmetric.

Further, in the electromagnetic proportional valve of the present invention, if the leaf spring is symmetric, when the movable iron core moves in the vertical direction (the thickness direction of the inner peripheral fixing portion), the bending and bending are performed for each pair of beams. Since elastic deformation due to a combined load of tension and torsion occurs in the opposite direction, rotation of the movable core or the inner peripheral fixing portion to which the valve element is fixed can be prevented.

According to a fourth aspect of the present invention, there is provided the electromagnetic proportional valve according to any one of the first to third aspects, wherein the face plate that covers the hollow portion of the movable core is movable. It is provided on the iron core.

That is, in the electromagnetic proportional valve of the present invention,
When a face plate that covers the hollow portion of the movable core is provided on the movable core, the face plate of the movable core faces the lower end portion of the fixed core in the vertical direction that is the moving direction of the movable core, and The attraction force (the vertical component of the magnetic force generated between the lower end portion of the fixed core and the extended portion of the yoke member and acting on the movable core) increases, so that the leaf spring when the valve body is brought into close contact with the valve seat is increased. Even if the restoring force is increased, there is no problem in moving the movable core on which the valve body is fixed vertically upward, and it is possible to handle fluid control with higher pressure, and the valve seat is enlarged. This makes it possible to handle a control fluid having a larger flow rate.

Incidentally, the electromagnetic proportional valve of the present invention includes use as an on / off valve.

According to a fifth aspect of the present invention, there is provided the electromagnetic proportional valve according to any one of the first to fourth aspects, further comprising a protruding edge provided on an outer periphery of the movable iron core. A portion of the inner wall of the yoke member facing the protruding edge of the movable iron core is provided in a step shape.

That is, in the electromagnetic proportional valve of the present invention,
Providing a protruding edge provided on the outer periphery of the movable core, and providing a stepped portion of the inner wall of the yoke member opposing the protruding edge of the movable core, in a vertical direction which is a moving direction of the movable core,
Many parts of the stepped inner wall of the yoke member are opposed to the protruding edge of the movable core, and the suction force of the yoke member (generated between the protruding edge of the movable core and the stepped inner wall of the yoke member). And the vertical component of the magnetic force acting on the movable core) increases, so even if the restoring force of the leaf spring when the valve body is brought into close contact with the valve seat is increased, the movable core with the valve body fixed vertically It is possible to handle a fluid control with a higher pressure without any trouble in moving the control fluid to a higher pressure, and it is possible to handle a control fluid with a larger flow rate by increasing the valve seat.

Further, the control fluid is formed between the extended portion of the yoke member and the lower end portion of the fixed iron core via the space between the projecting edge of the movable iron core and the stepped inner wall of the yoke member. Since it becomes easier to flow into the leakage space, the stagnation of the control fluid in the magnetic leakage space can be greatly reduced.

The yoke member extends from the outer periphery of the bobbin to the inside of the body. In this regard, the extended portion of the yoke member is provided if the coil of the hobbin is energized by being energized. It may be connected to the yoke member.

[0028]

Embodiments of the present invention will be described below with reference to the drawings. First, the electromagnetic proportional valve of the first embodiment will be described. FIG. 2 is a sectional view of the electromagnetic proportional valve according to the first embodiment. As shown in FIG. 2, in the electromagnetic proportional valve 11A of the first embodiment, an inlet channel 24, an outlet channel 25, and a valve seat 26 are formed in the body 23. Then, the third core 16 (corresponding to the “extending portion of the yoke member”) is fitted into the body 23,
By screwing the tightening screw 19, the leaf spring 1A is held by the outer peripheral fixing portion 3 (see FIG. 7) of the leaf spring 1A.
In this regard, the leaf spring 1A has a hole 3 formed in the center thereof.
7 (see FIG. 7), a valve seat 22 (corresponding to a “valve body”) made of an elastic material such as rubber or polytetrafluoroethylene is fixed by welding through a valve seat holding plate 21. The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load by the restoring force of the leaf spring 1A.

The leaf spring 1A has a disk shape as shown in the front view of FIG. Further, in order to make the elastic deformation in the thickness direction smooth, the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 are formed concentrically around the hole 37, and the inner peripheral fixing portion 2 and the outer peripheral fixing portion are formed concentrically. Between the portion 3 and each of the four beams 4, each is formed in a substantially S-shape. At this time, since each of the four beams 4 connects the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3, the four long holes 7 are provided between the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3. Are formed. Further, the profile on one side of each beam 4 is in contact with the inner peripheral fixing portion 2 to form an inner peripheral side R portion 6, and the inner peripheral side R portion 6 is an arc larger than half the length of the entire circumference. It has become. Similarly, the contour of the other side of each beam 4 is in contact with the outer peripheral fixing portion 3 to form an outer peripheral side R portion 5.
The portion 5 also has an arc that is larger than half of the entire circumference.

The inner peripheral fixing portion 2 of the leaf spring 1A includes
As shown in FIG. 2, the holder 31 is fixed, and a ring-shaped plunger 30 (corresponding to a “movable iron core”) is fixed by welding on the outer periphery of the holder 31. Therefore, the plunger 30 is connected to the leaf spring 1A.
Supported by

Further, as shown in FIG. 2, in the electromagnetic proportional valve 11A of the first embodiment, the first core 12
(Equivalent to “fixed iron core”). Then, the hobbin 14 on which the coil 15 is wound is attached to the first core 12.
And the first core 12 is fixed by attaching the second core 13.

In this regard, the lower end of the first core 12 protrudes from the seal ring 17 and exists inside the valve chamber 27. In the third core 16, an extended portion fitted into the body 23 forms a side wall of the valve chamber 27. Further, the positional relationship between the lower end of the first core 12 and the hollow portion of the ring-shaped plunger 30 is such that, when the plunger 30 moves vertically upward, as shown in FIG. Are inserted without contacting the hollow portion of

In the electromagnetic proportional valve 11A of the first embodiment having such a configuration, the control fluid is supplied to the inlet flow passage 24 of the body 23. As described above, the control fluid is always supplied to the leaf spring 1A. , The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load, and the valve seat 26 is closed. Here, a voltage is applied to the coil 15 so that the first core 12
When the third core 16 and the like are magnetized, as shown in FIG.
The plunger 30 is attracted by the magnetic force of the first core 12 and the third core 16 against the restoring force of the leaf spring 1A, and the first core 1
Since the plunger 30 moves vertically upward so as to fill the magnetic leakage space 28 between the second and third cores 16,
The valve seat 22 separates from the valve seat 26 and the valve seat 26 can be opened. When the valve seat 26 is opened, the control fluid supplied to the inlet channel 24 passes through the valve seat 26 from the inlet channel 24, and thereafter flows out from the outlet channel 25.

In the electromagnetic proportional valve 11A of the first embodiment, the first core 12, the seal ring 17, the third core 16,
By welding and sealing between the respective bodies 23, leakage of the control fluid is prevented.

Next, an electromagnetic proportional valve according to a second embodiment will be described. FIG. 4 shows an electromagnetic proportional valve 11 according to the second embodiment.
It is sectional drawing of B. As shown in FIG. 4, in the electromagnetic proportional valve 11B of the second embodiment, an inlet channel 24, an outlet channel 25, and a valve seat 26 are formed in the body 23. Then, the third core 16 is fitted into the body 23 and the tightening screw 19 is screwed in, so that the leaf spring 1A is held by the outer peripheral fixing portion 3 (see FIG. 7) of the leaf spring 1A. In this regard, in the leaf spring 1A, the valve seat 22 is fixed to the hole 37 (see FIG. 7) formed at the center thereof by welding through the valve seat holding plate 21. The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load by the restoring force of 1A.

The leaf spring 1A has a disk shape as shown in the front view of FIG. Further, in order to make the elastic deformation in the thickness direction smooth, the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 are formed concentrically around the hole 37, and the inner peripheral fixing portion 2 and the outer peripheral fixing portion are formed concentrically. Between the portion 3 and each of the four beams 4, each is formed in a substantially S-shape. At this time, since each of the four beams 4 connects the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3, the four long holes 7 are provided between the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3. Are formed. Further, the profile on one side of each beam 4 is in contact with the inner peripheral fixing portion 2 to form an inner peripheral side R portion 6, and the inner peripheral side R portion 6 is an arc larger than half the length of the entire circumference. It has become. Similarly, the contour of the other side of each beam 4 is in contact with the outer peripheral fixing portion 3 to form an outer peripheral side R portion 5.
The portion 5 also has an arc that is larger than half of the entire circumference.

The inner peripheral fixing portion 2 of the leaf spring 1A has
As shown in FIG. 4, the plunger 20 having the face plate portion 29 provided in the hollow portion of the ring is fixed by welding. Therefore, the plunger 20 is supported by the leaf spring 1A.

As shown in FIG. 4, in the electromagnetic proportional valve 11B of the second embodiment, the first core 12 is held by mounting the seal ring 17 on the third core 16. And the hobbin 14 on which the coil 15 is wound
Is inserted into the first core 12 and the second core 13 is attached to fix the first core 12.

In this regard, the lower end of the first core 12 protrudes from the seal ring 17 and exists inside the valve chamber 27. In the third core 16, an extended portion fitted into the body 23 forms a side wall of the valve chamber 27. Further, the positional relationship between the lower end of the first core 12 and the hollow portion of the ring-shaped plunger 20 is such that when the plunger 20 moves vertically upward, as shown in FIG. Are inserted without contacting the hollow portion of

In the proportional solenoid valve 11B of the second embodiment having such a structure, the control fluid is supplied to the inlet passage 24 of the body 23. As described above, the control fluid is always supplied to the leaf spring 1A. , The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load, and the valve seat 26 is closed. Here, a voltage is applied to the coil 15 so that the first core 12
When the third core 16 and the like are magnetized, as shown in FIG.
The plunger 20 is attracted by the magnetic force of the first core 12 and the third core 16 against the restoring force of the leaf spring 1A,
The plunger 20 moves vertically upward so as to fill the gap between the second and third cores 16 and to fill the magnetic leakage space 28 between the first core 12 and the third core 16. The valve seat 22 is separated from the valve seat 26, and the valve seat 26 can be opened. When the valve seat 26 is opened, the control fluid supplied to the inlet channel 24 passes through the valve seat 26 from the inlet channel 24, and thereafter flows out from the outlet channel 25.

In the electromagnetic proportional valve 11B of the second embodiment, the first core 12, the seal ring 17, the third core 16,
By welding and sealing between the respective bodies 23, leakage of the control fluid is prevented.

Next, an electromagnetic proportional valve according to a third embodiment will be described. FIG. 13 shows an electromagnetic proportional valve 1 according to the third embodiment.
It is sectional drawing of 1C. As shown in FIG. 13, in the electromagnetic proportional valve 11 </ b> C of the third embodiment, an inlet channel 24, an outlet channel 25, and a valve seat 26 are formed in the body 23. Then, the third core 41 (corresponding to the “extended portion of the yoke member”) is fitted and welded to the body 23, so that the outer peripheral fixing portion 3 of the leaf spring 1A (see FIG. 7). , Leaf spring 1A. In this regard, in the leaf spring 1A, the valve seat 22 is fixed to the hole 37 (see FIG. 7) formed at the center thereof by welding through the valve seat holding plate 21. The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load by the restoring force of 1A.

As shown in the front view of FIG. 7, the leaf spring 1A has a disk shape. Further, in order to make the elastic deformation in the thickness direction smooth, the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 are formed concentrically around the hole 37, and the inner peripheral fixing portion 2 and the outer peripheral fixing portion are formed concentrically. Between the portion 3 and each of the four beams 4, each is formed in a substantially S-shape. At this time, since each of the four beams 4 connects the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3, the four long holes 7 are provided between the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3. Are formed. Further, the profile on one side of each beam 4 is in contact with the inner peripheral fixing portion 2 to form an inner peripheral side R portion 6, and the inner peripheral side R portion 6 is an arc larger than half the length of the entire circumference. It has become. Similarly, the contour of the other side of each beam 4 is in contact with the outer peripheral fixing portion 3 to form an outer peripheral side R portion 5.
The portion 5 also has an arc that is larger than half of the entire circumference.

The inner peripheral fixed portion 2 of the leaf spring 1A has
As shown in FIG. 13, the face plate 5
The plunger 50 provided with 1 is fixed by welding. Therefore, the plunger 50 is supported by the leaf spring 1A. Further, a projection 53 is provided on the outer surface of the plunger 50.
Is provided around.

As shown in FIG. 13, in the electromagnetic proportional valve 11C of the third embodiment, the first core 12 is held by welding the seal ring 17 to the third core 41. Then, while inserting the hobbin 14 around which the coil 15 is wound into the first core 12,
The first core 12 is fixed to the second core 44 (corresponding to a “yoke member”) by attaching the first core 12 with screws 42.

In this regard, the lower end of the first core 12 protrudes from the seal ring 17 and exists inside the valve chamber 27. In the third core 41, the body 23
Is formed in a stepped shape as a side wall (cross section) of the valve chamber 27. Further, the positional relationship between the lower end portion of the first core 12 and the hollow portion of the ring-shaped plunger 50 is such that when the plunger 50 moves vertically upward, FIG.
As shown in FIG.
0 is inserted without contacting the hollow part.
In addition, a stepped portion of the third core 41 (side wall of the valve chamber 27)
12 and the protruding edge 53 of the ring-shaped plunger 50 are opposed to each other regardless of whether the plunger 50 moves vertically upward or vertically downward. In particular, as shown in FIG. Even when the plunger 50 moves vertically upward, the protruding edge 53 of the plunger 50 does not contact the stepped portion of the third core 41 (the side wall of the valve chamber 27).

In the electromagnetic proportional valve 11C of the third embodiment having such a structure, the control fluid is supplied to the inlet passage 24 of the body 23. As described above, the control fluid is always supplied to the leaf spring 1A. , The valve seat 22 is pressed against the valve seat 26 with a predetermined mounting load, and the valve seat 26 is closed. Here, a voltage is applied to the coil 15 so that the first core 12
When the magnet and the third core 41 are magnetized, the plunger 50 is attracted by the magnetic force of the first core 12 and the third core 41 against the restoring force of the leaf spring 1A, as shown in FIG. To fill the gap between the 12 and the third core 41,
And, since the plunger 50 moves vertically upward so as to fill the magnetic leakage space 28 between the first core 12 and the third core 41, the valve seat 22 separates from the valve seat 26,
The valve seat 26 can be opened. When the valve seat 26 is opened,
The control fluid supplied to the inlet channel 24 passes through the valve seat 26 from the inlet channel 24, and thereafter flows out from the outlet channel 25.

In the electromagnetic proportional valve 11C of the third embodiment, the first core 12, the seal ring 17, the third core 41,
By welding and sealing between the respective bodies 23, leakage of the control fluid is prevented.

The solenoid proportional valve 11 of the first embodiment
A, the electromagnetic proportional valve 11B of the second embodiment, and the electromagnetic proportional valve 11C of the third embodiment, when the valve seat 22 is separated from the valve seat 26 by a predetermined stroke distance, the leaf spring 1A The fixed part 2 is displaced in the thickness direction,
A combined load of bending, tension and torsion is applied to each beam 4.

As described above in detail, in the electromagnetic proportional valve of the electromagnetic proportional valve 11A of the first embodiment, the valve chamber 27
2, a magnetic leakage space 28 is formed between the lower end of the first core 12 protruding from the hollow portion of the bobbin 14 and the lower end of the first core 12, as shown in FIG. There is an extended portion of the core 16 and a ring-shaped plunger 30 supported by the leaf spring 1A. In this regard, the core member 1
Since the extension of 6 forms the side wall of the valve chamber 27, the magnetic leakage space 28 is formed on the left and right of the lower end of the first core 12. The hollow portion of the ring-shaped plunger 30 exists vertically below the lower end of the first core 12 and is larger than the periphery of the lower end of the first core 12.
The valve seat 22 fixed to the plunger 30 is
The leaf spring 1A is in close contact with the valve seat 26.

Accordingly, when energization of the coil 15 of the hobbin 14 is started, the first core 12 is excited and the third core 16 is also excited, so that the lower end of the first core 12 and the extension of the third core 16 are connected to each other. Between the first core 12 and the vertical component of the magnet acting on the plunger 30.
Of the leaf spring 1A against the restoring force of the leaf spring 1A.
As shown in FIG. 3, the plunger 30 moves vertically upward to enter the magnetic leakage space 28, and the plunger 3
The valve seat 22 fixed to 0 is separated from the valve seat 26.

At this time, since the hollow portion of the plunger 30 is larger than the periphery of the lower end of the first core 12, the first
Depending on the strength of the magnetic field generated between the lower end of the core 12 and the extension of the third core, the plunger 30 can enter the magnetic leak space 28 as shown in FIG. Further, the stroke amount of the valve seat 22 is the leaf spring 1A.
Is determined by the balance with the restoring force.

On the other hand, when the energization of the coil 15 of the hobbin 14 is stopped, the first core 12 is demagnetized and the third core 16 is also demagnetized, so that the lower end portion of the first core 12 and the extension portion of the third core 16 are extended. 2, the plunger 30 is retracted from the magnetic leakage space 28 by the restoring force of the leaf spring 1A, and the valve seat 22 fixed to the plunger 30 is removed from the valve seat 22 as shown in FIG. It will be close to the seat 26.

Accordingly, by supplying electricity to the coil 15 of the hobbin 14, the control fluid flowing from the inlet channel 24 can flow out of the outlet channel 25 through the interior of the valve chamber 27 to the outside. In this regard, in the valve chamber 27, since the lower end of the first core 12 seals the hollow portion of the bobbin 14 with a welded seal, the control fluid does not enter the hollow portion of the bobbin 14. The control fluid flowing from the inlet passage 24 into the valve chamber 27 flows only inside the valve chamber 27.

That is, the electromagnetic proportional valve 1 of the first embodiment
1A is a vertical component of magnetic force (attraction force of the first core 12) generated between the lower end portion of the first core 12 and the extended portion of the third core 16 and acting on the plunger 30, and the restoration of the leaf spring 1A. The stroke of the valve seat 22 is controlled by balance with the force. In the valve chamber 27, the lower end portion of the first core 12 seals the hollow portion of the bobbin 14 with a welding joint seal. Since the control fluid does not enter the hollow portion of the bobbin 14 and the control fluid flowing from the inlet channel 24 into the valve chamber 27 flows only through the valve chamber 27 and flows out from the outlet channel 25. In addition, stagnation of the control fluid can be prevented.

The point of preventing the control fluid from staying is the second point.
The same applies to the electromagnetic proportional valve 11B of the embodiment and the electromagnetic proportional valve 11C of the third embodiment.

Further, the electromagnetic proportional valve 11A of the first embodiment
In the vertical direction which is the moving direction of the plunger 30, the plunger 30 does not face the lower end portion of the first core 12 and the extended portion of the third core 16, and
If the amount of current supplied to the coil 15 is constant, as shown in FIG. 5, the attraction force of the first core 12 (which is generated between the lower end portion of the first core 12 and the extended portion of the third core 16). The magnitude of the perpendicular magnetic component acting on the plunger 30 is the first
Since the distance between the core 12 and the plunger 30 is substantially constant without being affected by the distance, the proportionally controllable valve seat 22 is provided.
Large stroke range can be secured, and assembling accuracy can be relaxed.

In the electromagnetic proportional valve 11A of the first embodiment, when the coil 15 of the hobbin 14 is not energized, the first core 12 is moved in the vertical direction which is the direction of movement of the plunger 30. Lower end face and plunger 3
Since the distance of the upper end face of the zero is 0.7 mm, in FIG.
The difference between 0.7 mm and the movement distance of the valve seat 22 is the distance between the lower end surface of the first core 12 and the upper end surface of the plunger 30.

Further, the electromagnetic proportional valve 11A of the first embodiment
Then, as shown in FIGS. 1 and 2, the hollow portion of the plunger 30 is larger than the periphery of the lower end portion of the first core 12,
Although the magnetism generated between the lower end portion of the core 12 and the extended portion of the third core 16 is strong, the plunger 30 enters the magnetic leakage space 28 as shown in FIG.
2 and the plunger 30 do not come into contact with each other.

Further, the electromagnetic proportional valve 11 of the first embodiment
In FIG. 1A, as shown in FIGS. 1 and 2, the valve seat 22 is fixed to the inner peripheral fixing portion 2 (see FIG. 7) of the leaf spring 1A, and the outer peripheral fixing portion 3 (see FIG. 7) of the leaf spring 1A. Are sandwiched between the extension tip of the third core 16 and the body 23. In this regard, as shown in FIG. 7, each beam 4 for connecting the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 is formed in a substantially S shape, and the horizontal rigidity of the inner peripheral fixing portion 2 of the leaf spring 1A is formed. 2 to FIG. 1, when the plunger 30 moves vertically upward and attempts to enter the magnetic leakage space 28, even if a horizontal magnetic component acts on the plunger 30 as shown in FIGS. Since the plunger 30 is less likely to move in the horizontal direction and is prevented from being attracted to the lower end portion of the first core 12 or the extended portion of the third core 16, no particles are generated.

Further, the electromagnetic proportional valve 11B of the second embodiment
In the first embodiment, a face plate portion 29 covering the hollow portion of the ring-shaped plunger 20 is provided in the hollow portion of the plunger 20, and the plunger is disposed on the lower end portion of the first core 12 in the vertical direction that is the moving direction of the plunger 20. 20 face plate portion 29
Are opposed to each other, as shown in FIG. 6, as shown in FIG. Therefore, even if the restoring force (mounting load) of the leaf spring 1A when the valve seat 22 is brought into close contact with the valve seat 26 is increased, the plunger 20 on which the valve seat 22 is fixed is moved vertically upward. It is possible to handle fluid control with a higher pressure without any trouble in moving the valve seat,
By making 6 larger, it is possible to handle a control fluid having a larger flow rate.

In the electromagnetic proportional valve 11B of the second embodiment, when the coil 15 of the hobbin 14 is not energized, the first core 12 is moved in the vertical direction which is the direction of movement of the plunger 20. Lower end face and plunger 2
Since the distance of the upper end surface of 0 is 0.7 mm, FIG.
The difference between 0.7 mm and the movement distance of the valve seat 22 is the distance between the lower end surface of the first core 12 and the upper end surface of the plunger 30.

Further, the electromagnetic proportional valve 11B of the second embodiment
Also, as shown in FIG. 3 and FIG.
Is larger than the periphery of the lower end of the first core 12, and even if the magnetism generated between the lower end of the first core 12 and the extension of the third core 16 is strong, as shown in FIG. To
Since the plunger 20 enters the magnetic leakage space 28, the first core 12 and the plunger 20 do not come into contact with each other.

Further, the electromagnetic proportional valve 11 of the second embodiment
Also in B, as shown in FIGS. 3 and 4, the valve seat 22 is fixed to the inner peripheral fixing portion 2 (see FIG. 7) of the leaf spring 1A, and the outer peripheral fixing portion 3 (see FIG. 7) of the leaf spring 1A. Are sandwiched between the extension tip of the third core 16 and the body 23. In this regard, as shown in FIG. 7, each beam 4 for connecting the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 is formed in a substantially S shape, and the horizontal rigidity of the inner peripheral fixing portion 2 of the leaf spring 1A is formed. 4 to 3, when the plunger 20 moves vertically upward to enter the magnetic leakage space 28 as shown in FIGS. 4 to 3, even if a magnetic horizontal component acts on the plunger 20. Since the plunger 20 is less likely to move in the horizontal direction and is prevented from being attracted to the lower end portion of the first core 12 or the extended portion of the third core 16, no particles are generated.

Further, the electromagnetic proportional valve 11C of the third embodiment
In the same manner as in the electromagnetic proportional valve 11B of the second embodiment, a face plate portion 51 that covers the hollow portion of the ring-shaped plunger 50 is provided in the hollow portion of the plunger 50 in the moving direction of the plunger 50. The face plate portion 51 of the plunger 50 is opposed to the lower end portion of the first core 12 in the vertical direction. Further, in the electromagnetic proportional valve 11C of the third embodiment, the protruding edge 53 provided on the outer periphery of the ring-shaped plunger 50 is provided, and the ring-shaped inner wall of the third core 41 (the side wall of the valve chamber 27) is formed. A portion of the plunger 50 facing the protruding edge 53 is provided in the form of a step, and the third core 4 is provided in the vertical direction that is the moving direction of the plunger 50.
The protruding edge 53 of the ring-shaped plunger 50 is opposed to the stepped inner wall (the side wall of the valve chamber 27).

Therefore, as shown in FIG.
2 (a vertical component of the magnetic force generated between the lower end portion of the first core 12 and the third core 41 and acting on the plunger 50) and the attraction force of the third core 41 (the protruding edge 53 of the plunger 50). And the stepped inner wall of the third core 41 (the side wall of the valve chamber 27) and the vertical magnetic component acting on the plunger 50 are increased. Even if the restoring force (mounting load) of the leaf spring 1A is increased, there is no problem in moving the plunger 50 on which the valve seat 22 is fixed vertically upward, and it is possible to handle fluid control with a larger pressure. And the valve seat 2
By making 6 larger, it is possible to handle a control fluid having a larger flow rate.

In particular, the electromagnetic proportional valve 11C of the third embodiment
In the case where the protruding edge 53 of the ring-shaped plunger 50 is opposed to the stepped inner wall of the third core 41 (the side wall of the valve chamber 27) in the vertical direction which is the moving direction of the plunger 50, as shown in FIG. In this case, the force for sucking the plunger 50 increases (see FIGS. 14, 5, and 6).

Further, the electromagnetic proportional valve 11C of the third embodiment
Since the plunger 50 is hardly deformed by providing the protruding edge 53 provided on the outer periphery of the ring-shaped plunger 50, the plunger 50 can be made thinner and lighter.
Response performance (high-speed operation) can be improved.

In the electromagnetic proportional valve 11C of the third embodiment, when the coil 15 of the hobbin 14 is not energized, the first core 12 is moved in the vertical direction which is the direction of movement of the plunger 50. Lower end face and plunger 5
Since the distance between the upper end surface of the first core 12 and the upper end surface of the plunger 50 is the difference between 0.7 mm and the moving distance of the valve seat 22 in FIG. .

Further, the electromagnetic proportional valve 11C of the third embodiment
Then, as shown in FIG.
Stepped inner wall (valve chamber 2)
7 through the gap 43 between the third core 41 and the lower end of the first core 12, so that the control fluid in the magnetic leakage space 28 can easily flow into the magnetic leakage space 28. Stagnation can be greatly reduced.

Further, the electromagnetic proportional valve 11C of the third embodiment
Also, as shown in FIGS. 12 and 13, the hollow portion of the plunger 50 is larger than the periphery of the lower end of the first core 12 and is formed between the lower end of the first core 12 and the third core 41. Even if the magnetism is strong, the ring portion 52 of the plunger 50 enters the magnetic leakage space 28 as shown in FIG. 12, so that the first core 12 and the plunger 50 do not come into contact with each other.

Further, the electromagnetic proportional valve 11 of the third embodiment
12 and 13, the valve seat 22 is fixed to the inner peripheral fixing portion 2 (see FIG. 7) of the leaf spring 1A, and the outer peripheral fixing portion 3 (see FIG. 7) of the leaf spring 1A. Is the third
It is held between the core 41 and the body 23. In this regard, as shown in FIG. 7, each beam 4 for connecting the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 is formed in a substantially S shape, and the horizontal rigidity of the inner peripheral fixing portion 2 of the leaf spring 1A is formed. Figure 1
As shown in FIGS. 3 to 12, when the ring portion 52 of the plunger 50 moves vertically upward to enter the magnetic leakage space 28, even if a magnetic horizontal component acts on the plunger 50, Since the particles 50 are not easily moved in the horizontal direction and are prevented from being adsorbed by the lower end portion of the first core 12 or the third core 41, no particles are generated.

The present invention is not limited to the above embodiment, and various changes can be made without departing from the gist of the present invention. For example, in the present embodiment, the leaf spring 1
7A shows the inner fixed part 2 and the outer fixed part 3 as shown in FIG.
There were four beams 4 to connect the two. In this regard, in the leaf spring 1A, each beam 4 connecting the inner peripheral fixed portion 2 and the outer peripheral fixed portion 3 is formed in a substantially S-shape.
Because the inner peripheral side R part 6 and the outer peripheral side R part 5 are close to each other,
The space required for forming one beam 4 between the inner peripheral fixing part 2 and the outer peripheral fixing part 3 is reduced. Therefore, in the leaf spring 1A, for example, it is possible to provide six beams 4 like the leaf spring 1C shown in the front view of FIG. 9, or to use eight beams 4 like the leaf spring 1D shown in the front view of FIG. If the number of beams 4 is increased, the number of support points for connecting the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3 increases, and the horizontal rigidity of the inner peripheral fixing portion 2 is further increased. .

Therefore, the electromagnetic proportional valve 11 of the first embodiment
A, the electromagnetic proportional valve 11B of the second embodiment, and the electromagnetic proportional valve 11C of the third embodiment use, for example, a leaf spring 1C or 1D instead of the leaf spring 1A that supports the plungers 20, 30. , The rigidity of the inner peripheral fixing portion 2 in the horizontal direction can be further increased.
In the horizontal direction (“tilting operation” or “lateral displacement operation”) is less likely to occur.

Therefore, when the plungers 20, 30, 50 move, the plungers 20, 30, 50 are not
Control of control fluids (gas, pure water, chemicals, etc.) used in the semiconductor industry or in the medical field because there is no risk of wear particles entering the control fluid without touching the second and third cores 16 and 41. Also suitable for.

In this embodiment, the leaf spring 1A
In each of the beams 4 connecting the inner peripheral fixing portion 2 and the outer peripheral fixing portion 3, elastic deformation occurs due to a combined load of bending, tension and torsion, so that the plungers 20, 30, 50 are vertically When moving in the direction (the thickness direction of the inner peripheral fixing portion 2), the plungers 20, 30 and the valve seat 22 may rotate. Therefore, the leaf spring 1B shown in the front view of FIG. 8 and the leaf spring 1E shown in the front view of FIG.
When the shapes of the leaf springs 1B and 1E are formed symmetrically (for example, with the line 8), the plungers 20, 3
When 0 and 50 move in the vertical direction (the thickness direction of the inner peripheral fixing portion 2), elastic deformation due to a combined load of bending, tension and torsion occurs in the opposite direction for each pair of beams 4. Therefore, it is possible to prevent the inner peripheral fixing portion 2 to which the plungers 20, 30, 50 and the valve seat 22 are fixed from rotating.

The electromagnetic proportional valve 11A of the first embodiment
In the electromagnetic proportional valve 11B of the second embodiment and the electromagnetic proportional valve 11C of the third embodiment, the valve seat 22 is provided by providing a nonmagnetic spacer inside the valve chamber 27.
The plungers 20, 30, 50 to which the stylus is fixed may be prevented from entering the stroke uncontrollable region, thereby preventing the uncontrollability.

Further, the electromagnetic proportional valve 11A of the first embodiment
In the electromagnetic proportional valve 11B of the second embodiment, the third core 16 is used as the "yoke member", and the "yoke member" and the "extended portion of the yoke member" are constituted only by the third core 16. I do. In this regard, the electromagnetic proportional valve 11 of the third embodiment
As shown in C, if the second core 44 and the third core 41 are connected in series, the second core 44 and the third core 41 are excited when the coil 15 of the hobbin 14 is energized.
The second core 44 may be used as the “yoke member”, and the third core 41 may be used as the “extending portion of the yoke member”.

The specific numbers described in this section are all examples.

[0080]

The electromagnetic proportional valve according to the present invention is characterized in that a perpendicular component of magnetic force (attraction force of the fixed core) acting between the lower end portion of the fixed core and the extending portion of the yoke member and acting on the movable core and the plate. Stroke control of the valve body is performed by balancing with the restoring force of the spring.In the valve chamber, the lower end portion of the fixed iron core seals the hollow portion of the bobbin. Since the control fluid that has flowed into the valve chamber from the inlet flow path without flowing into the valve chamber flows only through the inside of the valve chamber and flows out of the outlet flow path, the stagnation of the control fluid can be greatly reduced. it can.

Further, in the solenoid proportional valve of the present invention, the movable core does not face the lower end portion of the fixed core and the extending portion of the yoke member in the vertical direction which is the moving direction of the movable core, and the movable core does not face the coil of the hobbin. If the amount of electricity is constant, the magnitude of the attractive force of the fixed core (the perpendicular component of the magnetic force generated between the lower end portion of the fixed core and the extended portion of the yoke member and acting on the movable core) is equal to the fixed core. Therefore, the stroke range of the proportionally controllable valve element can be secured large, and the assembling accuracy can be reduced.

Further, in the electromagnetic proportional valve of the present invention, the hollow portion of the movable core is larger than the periphery of the lower end portion of the fixed core, and the magnetism generated between the lower end portion of the fixed core and the extended portion of the yoke member is generated. Even if it is strong, since the movable core enters the magnetic leakage space, there is no contact between the fixed core and the movable core,
Further, the movable core or the valve element is fixed to the inner peripheral fixing portion of the leaf spring, and the outer peripheral fixing portion of the leaf spring is sandwiched between the extending tip of the yoke member and the body. Each beam that joins the outer peripheral fixed part and the outer peripheral fixed part is formed in a substantially S-shape, and the rigidity of the inner peripheral fixed part of the leaf spring in the horizontal direction is large, so the movable iron core moves vertically upward and enters the magnetic leakage space. When attempting to enter, even if a magnetic horizontal component acts on the movable core, the movable core is less likely to move in the horizontal direction and is prevented from being attracted to the lower end portion of the fixed core or the extended portion of the yoke member. No particles are generated.

In the electromagnetic proportional valve of the present invention, if the leaf spring is symmetric, when the movable iron core moves in the vertical direction (the thickness direction of the inner peripheral fixing portion), the bending and bending are performed for each pair of beams. Since elastic deformation due to a combined load of tension and torsion occurs in the opposite direction, rotation of the movable core or the inner peripheral fixing portion to which the valve element is fixed can be prevented.

That is, in the electromagnetic proportional valve of the present invention,
When a face plate that covers the hollow portion of the movable core is provided on the movable core, the face plate of the movable core faces the lower end portion of the fixed core in the vertical direction that is the moving direction of the movable core, and The attraction force (the vertical component of the magnetic force generated between the lower end portion of the fixed core and the extended portion of the yoke member and acting on the movable core) increases, so that the leaf spring when the valve body is brought into close contact with the valve seat is increased. Even if the restoring force is increased, there is no problem in moving the movable core on which the valve body is fixed vertically upward, and it is possible to handle fluid control with higher pressure, and the valve seat is enlarged. This makes it possible to handle a control fluid having a larger flow rate.

Further, in the electromagnetic proportional valve of the present invention, when the protruding edge provided on the outer periphery of the movable iron core is provided, and the portion of the inner wall of the yoke member facing the protruding edge of the movable iron core is provided in a stepped shape, In the vertical direction, which is the direction of movement of the iron core, many portions of the step-like inner wall of the yoke member face the protruding edge of the movable core, and the suction force of the yoke member (the step between the protruding edge of the movable core and the yoke member The vertical component of the magnetic force generated between the inner wall of the valve and the magnetic core acting on the movable iron core increases, so that even if the restoring force of the leaf spring when the valve is brought into close contact with the valve seat is increased, the valve is firmly fixed. There is no problem in moving the installed movable core vertically upward, and it is possible to handle fluid control with greater pressure, and by using a larger valve seat to handle control fluid with a larger flow rate. Becomes possible.

Further, the control fluid is formed between the extended portion of the yoke member and the lower end portion of the fixed iron core through the space between the projecting edge of the movable iron core and the stepped inner wall of the yoke member. Since it becomes easier to flow into the leakage space, the stagnation of the control fluid in the magnetic leakage space can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is a sectional view of an electromagnetic proportional valve according to a first embodiment when the valve is opened.

FIG. 2 is a sectional view of the electromagnetic proportional valve according to the first embodiment when the valve is closed.

FIG. 3 is a cross-sectional view of an electromagnetic proportional valve according to a second embodiment when the valve is opened.

FIG. 4 is a cross-sectional view of an electromagnetic proportional valve according to a second embodiment when the valve is opened.

FIG. 5 is a characteristic diagram of a suction force of the electromagnetic proportional valve according to the first embodiment.

FIG. 6 is a characteristic diagram of a suction force of the electromagnetic proportional valve according to the second embodiment.

FIG. 7 is a front view of an example of a leaf spring used for the electromagnetic proportional valve of the present embodiment.

FIG. 8 is a front view of another example of the leaf spring used in the electromagnetic proportional valve of the present embodiment.

FIG. 9 is a front view of another example of the leaf spring used for the electromagnetic proportional valve of the present embodiment.

FIG. 10 is a front view of another example of the leaf spring used in the proportional solenoid valve of the present embodiment.

FIG. 11 is a front view of another example of the leaf spring used for the electromagnetic proportional valve of the present embodiment.

FIG. 12 is a sectional view of the electromagnetic proportional valve according to the third embodiment when the valve is opened.

FIG. 13 is a cross-sectional view of the electromagnetic proportional valve according to the third embodiment when the valve is opened.

FIG. 14 is an explanatory diagram of an operation of the electromagnetic proportional valve of the third embodiment.

FIG. 15 is a characteristic diagram of a suction force of the electromagnetic proportional valve according to the third embodiment.

FIG. 16 is a sectional view of a conventional electromagnetic proportional valve.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1A-1E Leaf spring 2 Inner peripheral fixed part 3 Outer peripheral fixed part 4 Beam 5 Outer peripheral side R part 6 Inner peripheral side R part 11A-11C Electromagnetic proportional valve 12 1st core 13,44 2nd core 14 Hobbin 15 Coil 16,41 Third core 20, 30, 50 Plunger 22 Valve seat 23 Body 26 Valve seat 27 Valve room 28 Magnetic leakage space 29, 51 Face plate portion 43 Gap between protruding edge of plunger and stepped inner wall of third core 53 Plunger Ridge

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Yukio Ozawa 850, Horinouchi-cho, Kasugai-shi, Aichi Prefecture Inside Kasugai Office, Kakei Corporation (72) Inventor Tadakazu Watanabe 850, Horinochi-cho, Kasugai-shi, Aichi Prefecture Kasugai Business, Inc. In-house F-term (reference) 3H106 DA05 DA13 DA23 DB02 DB12 DB22 DB32 DC02 DC17 DD03 EE30 EE35 EE42 EE48 GA13 GA15 GA24 GB11

Claims (5)

[Claims] 1. A bobbin wound with a coil, a fixed core fixed to a hollow portion of the bobbin, a movable core sucked by the fixed core, a valve fixed to the movable core, and the valve. A valve chamber in which a body is present, an inlet flow path and an outflow path communicating with the valve chamber, a body in which the inlet flow path and the outflow path are formed, and the valve body formed in the body and in close contact with the body. A valve seat that separates, and a leaf spring that is supported between the movable core or the valve body and the body to bring the valve body into close contact with the valve seat; and a suction force of the fixed core. And a restoring force of the leaf spring, the yoke member extending from the outer periphery of the bobbin to the inside of the body and forming a side wall of the valve chamber. A lower end portion of the fixed iron core Projecting into the valve chamber while sealing the hollow portion of the bobbin, magnetic leakage into the valve chamber between the lower end portion of the fixed iron core and the extending portion of the yoke member. While forming a space, the shape of the movable core is formed in an annular shape having a hollow portion larger than a vertical projection portion of a lower end portion of the fixed core, and the movable core is provided inside the valve chamber. Electromagnetic proportional valve. 2. The electromagnetic proportional valve according to claim 1, wherein the leaf spring includes: an inner fixed portion; an outer fixed portion surrounding the inner fixed portion; the inner fixed portion and the outer fixed portion. A plurality of beams that are joined together, an inner peripheral side R portion in which one side contour of the beam is in contact with the inner peripheral fixing portion, and an outer peripheral side in which the other side contour of the beam is in contact with the outer peripheral fixing portion. An inner peripheral fixed portion or the outer peripheral fixed portion is displaced in the thickness direction, and the inner peripheral side R portion and the outer peripheral side R portion are arcs larger than half of the entire circumference. And the beam is formed in a substantially S-shape, and the movable iron core or the valve element is fixed to the inner peripheral fixing portion, and the outer peripheral fixing portion extends the yoke member. An electromagnetic proportional valve, being sandwiched between a tip and the body. 3. The proportional solenoid valve according to claim 2, wherein the leaf spring is symmetric. 4. The electromagnetic proportional valve according to claim 1, wherein a face plate for covering a hollow portion of the movable core is provided on the movable core. Electromagnetic proportional valve. 5. The electromagnetic proportional valve according to claim 1, further comprising: a protruding edge provided on an outer periphery of the movable iron core, wherein the movable portion of the inner wall of the yoke member is provided. An electromagnetic proportional valve, wherein a portion facing a protruding edge of an iron core is provided in a step shape.