JP2002352401A - Composite thin film magnetic head and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow the enhancement in the magnetic shielding effectiveness between a recording component and a reproducing component, the reduction of process, such as a manufacturing process and a wiring connecting work process, and the man day to be provided, in a composite thin film magnetic head device constituted so that one composite thin film magnetic head records a signal and another composite thin film magnetic head reproduces the recorded signal simultaneously to enable a recorded condition to be verified. SOLUTION: This device is a composite thin film magnetic head device 1 in which a plurality of the composite thin film magnetic heads 3, 5 having the recording component and the reproducing component (91 and 81 ), (92 and 82 ), respectively, are integrated, and the information recorded by one composite thin film magnetic head 3 or 5 is reproduced immediately by another composite thin film magnetic head 5 or 3. In this head the magnetic shield layer 25, 26 to magnetically shield from each other between the composite thin film magnetic head 3 and 5 are formed by a thin film.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite thin-film magnetic head device in which information recorded by one recording element is immediately reproduced by another reproducing element, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a so-called tape streamer for backing up data of a computer, for example, one thin film magnetic recording medium is used to verify whether information recorded on a magnetic recording medium, that is, a magnetic tape, is correctly written. A composite thin-film magnetic head device is provided which enables information recorded by the head to be simultaneously reproduced by the other thin-film magnetic head.

FIGS. 6A and 6B show a schematic configuration of such a composite type thin film magnetic head device. The composite thin-film magnetic head device 41 has a first composite thin-film magnetic head 43 having an electromagnetic transducer 42 for performing recording and reproduction, and a second composite magnetic head 44 having an electromagnetic transducer 44 for recording and reproducing having the same configuration. And the composite thin-film magnetic head 45 is integrally joined. The electromagnetic transducers 42 and 44 electromagnetically convert a magnetic element recorded on a magnetic recording medium, for example, a magnetic tape 46 into an electric signal, and a reproducing element 48, and an electric signal input to the composite thin film magnetic head. The recording elements 49 for recording on the magnetic tape 46 are arranged in the width direction of the magnetic tape 46 in one or more sets (a plurality of sets in this example) according to the number of channels.

As shown in FIG. 7 (a sectional view taken along the line BB in FIG. 6B), the electromagnetic transducers 42 and 44 constituting the composite type thin film magnetic heads 43 and 45 are made of nonmagnetic ferrite and ceramic (for example, Al ₂ O 3). _3. Non-magnetic substrate 5 such as TiC)
A magnetic thin film 53 is formed on the substrate 1 via an insulating film 52, and an MR element (magnetoresistive element) 55 having electrodes at both ends is formed on the magnetic thin film 53 via an insulating film 54. Is formed thereon, and a magnetic thin film 56 serving as a lower magnetic core and a gap film 5 are further formed thereon via an insulating film 54.
7, coil conductor 58 and magnetic thin film 5 serving as an upper magnetic core
The recording elements 49 are formed by laminating the recording elements 49 by a so-called inductive head.

When producing the electromagnetic transducers 42 and 44, the reproducing element 4 is mounted on a circular or square nonmagnetic ferrite or ceramic substrate (so-called wafer) serving as a base.
8. After forming the recording element 49, the substrate is cut into a required shape and processed to form the substrate block 60. On this substrate block 60, a protection block 61 for protecting the reproducing element 48 and the recording element 49 and forming a sliding surface for ensuring a good contact state with the magnetic tape is joined. The protection block 61 is formed by processing nonmagnetic ferrite, ceramic, or the like into a required shape, and is bonded to the substrate block 60 using an adhesive, glass, or the like. Further, as shown in FIG. 6A, side members 64 and 65 made of, for example, non-magnetic ferrite, ceramic, and the like for stabilizing the running of the magnetic tape are joined to both ends of the substrate block 60 in the width direction of the magnetic tape. . The protection block 61 has a length common to the substrate block 60 and the side members 64 and 65.

In the composite type thin film magnetic head device 41, terminals that are electrically connected to the electromagnetic transducers 42 and 44 are formed on the exposed surfaces of the substrate blocks 60 of the respective composite type thin film magnetic heads 43 and 45 by a thin film forming technique. And wiring (in this example, a flexible printed circuit board) 66, 6
7 is connected. The wirings 66 and 67 are for electrically connecting to mounted devices. Terminal and wiring 6
6, 67 are electrically connected by a technique such as soldering or wire bonding.

Next, the composite type thin film magnetic head device 41
The operation for recording and reproducing information signals on and from a magnetic recording medium, in this example, a magnetic tape, will be described. As shown in FIG. 8, an information signal is recorded while the magnetic tape 46 runs along the sliding surface of the composite type thin film magnetic head device 41 in the direction of arrow A. That is, in the recording element 49 _{1 of} the first composite type thin film magnetic head 43, the input information signal is subjected to electromagnetic conversion and recorded on the magnetic tape 46 as magnetic information. As the magnetic tape 46 runs, the portion recorded as magnetic information by the recording element 49 ₁ of the first composite type thin film magnetic head 43 becomes the second composite type thin film magnetic head 4.
5 reaches the read element 48 ₂ , the write element 49
Magnetic information recorded by ₁ is read by the read element 48 _2, whether there is no omission of recorded inaccurate information or information on the magnetic tape 46 verification is performed.

When the magnetic tape 46 runs in the reverse direction, the recording element 49 of the second composite type thin film magnetic head 45
₂ and then reproduced by the reproducing element 481 of the _first composite type thin film magnetic head 43 to verify the recorded state.
That is, in the composite thin-film magnetic head device 41, when recording an input electric signal on the magnetic tape 46, the recording element 49 ₁ (or 49 ₂ ) of one of the composite thin-film magnetic heads 43 (or 45) facing each other. ) And the reproducing element 48 ₂ (or 48) of the other composite thin-film magnetic head 45 (or 43).
₁ ) are simultaneously activated.

By operating the recording element and the reproducing element simultaneously in this manner, as shown in FIG. 9, for example, a part of the magnetic field (so-called leakage) generated by the recording element 491 of the _first composite type thin-film magnetic head 43, as shown in FIG. flux) 70 reaches the read element 48 ₂ of the second composite thin film magnetic head 45 adjacent. When a part of the leak from the recording element 49 ₁ field 70 reaches the read element 48 _2, and the reproduced signal obtained from the magnetic information recorded on the magnetic tape 46 by the reproducing device 48 ₂ side, leaked from the recording element 49 ₁ Signal interference due to the magnetic field 70 occurs. Signal from the recording element 49 ₁ that interference becomes noise will disturb the reproduction signal read from the original magnetic tape 46.

Conventionally, in order to avoid this interference, FIG.
As shown, the first composite type thin film magnetic head 43 to be joined
A magnetic shield between the magnetic head and the second composite type thin film magnetic head 45.
A magnetic shield plate 71 such as a copper plate having an effect is provided for recording.
Element 49₁From the reproduction element 48 _TwoMagnetic field 70 to the
Recording element 49_TwoFrom the reproduction element 48₁Leakage magnetic field to
Shielded or reduced. Arrangement of magnetic shield plate 71
For example, the first and second composite thin-film magnetic heads 43
And 45 are provided with a groove at the joint interface, and a magnetic seal is provided in the groove.
The plate 71 was inserted and fixed with an adhesive or the like. Until now
According to the experiment, the installation position of the magnetic shield plate 71 is
The tip of the air shield plate 71 is closer to the top of the sliding surface 72.
In other words, close to the surface of the magnetic tape 46
That is, as shown in FIG.
Distance L between tip and surface of magnetic tape 46₁Is smaller than
It was confirmed that the magnetic shielding effect was improved by
Have been.

FIGS. 14 and 15 show noise levels in a conventional composite type thin film magnetic head device. When the magnetic shield plate 71 shown in FIG. 14A is not provided, the noise level is -13.5 dBm. When the upper end of the magnetic shield plate 71 shown in FIG. 14B is flush with the top of the sliding surface 72, the noise level is −23.5 dBm.
The upper end of the magnetic shield plate 71 shown in FIG.
If the noise level extends upward from the top of
40.5 dBm. When the upper end of the magnetic shield plate 71 shown in FIG. 15B is extended upward from the top of the sliding surface 72 and the magnetic shield plate 71 is connected to the ground, the noise level is -42.5 dBm.

[0012]

In the conventional method of inserting the magnetic shield plate 71, the distance L ₁ shown in FIG.
Of the magnetic shield plate in the Z direction shown in FIGS. 12A and 12B and the in-plane rotation of the magnetic shield plate shown in FIGS. However, it was difficult to reduce the variation in positioning. Further, in order to connect the magnetic shield plate 71 to the ground portion of the device on which the composite thin-film magnetic head device 41 is mounted, a part of the wiring connecting the electromagnetic transducer of the composite thin-film magnetic head and the device and a magnetic shield A work for electrically connecting the board to the board must be performed, which is complicated.

In view of the above, the present invention has an excellent magnetic shielding effect between a recording element and a reproducing element and can reduce the number of steps of manufacturing, connecting work, man-hours, and the like. It provides a method.

[0014]

SUMMARY OF THE INVENTION A composite thin film magnetic head device according to the present invention is a composite thin film magnetic head device for simultaneously performing recording and reproduction, and includes a recording element and a reproduction element for simultaneously performing recording and reproduction. A magnetic shielding thin film layer is formed between the magnetic shielding thin film layer and the device.

In the composite type thin film magnetic head device of the present invention,
Since the magnetic shielding layer that magnetically shields the recording element and the reproducing element that are driven at the same time is formed integrally with the thin film, it becomes possible to form the magnetic shielding thin film layer near the surface of the magnetic recording medium,
The magnetic shielding can be improved. Since the magnetic shielding thin film layer is formed by the thin film forming technology, it is possible to greatly reduce the number of steps and steps of manufacturing such a composite type thin film magnetic head device, connecting the magnetic shielding thin film layer to ground, and the like.

In the composite thin film magnetic head device according to the present invention, a plurality of composite thin film magnetic heads each having a recording element and a reproducing element are integrated, and information recorded by one composite thin film magnetic head is immediately read. A composite thin-film magnetic head device for reproducing with the other composite thin-film magnetic head, wherein a magnetic shielding thin-film layer for magnetically shielding between one and the other composite thin-film magnetic head is formed.

In the composite type thin film magnetic head device of the present invention,
Since the magnetic shielding layer that magnetically shields one composite thin-film magnetic head and the other composite thin-film magnetic head is formed integrally with a thin film, it is possible to form the magnetic shielding thin-film layer near the surface of the magnetic recording medium. In addition, the magnetic shielding effect can be improved. Since the magnetic shielding thin film layer is formed by the thin film forming technology, it is possible to greatly reduce the number of steps and steps of manufacturing such a composite type thin film magnetic head device, connecting the magnetic shielding thin film layer to ground, and the like.

A method of manufacturing a composite thin-film magnetic head device according to the present invention is a method of manufacturing a composite thin-film magnetic head device for simultaneously performing recording and reproduction. Then, a magnetic shielding thin film layer is formed between each of the recording element and the reproducing element that perform recording and reproduction at the same time.

In the method of manufacturing a composite thin film magnetic head device according to the present invention, the magnetic shielding thin film layer for magnetically shielding between the recording element and the reproducing element is continuously formed during the thin film forming step of the composite thin film magnetic head device. The manufacturing process can be reduced, and the magnetic shielding thin film layer can be of various designs such as single-layer, multi-layer, mesh, etc. slightly retracted from the sliding surface of the recording medium. Can be formed.

According to the method of manufacturing a composite thin-film magnetic head device of the present invention, a plurality of composite thin-film magnetic heads each having a recording element and a reproducing element are integrated, and information recorded by one composite thin-film magnetic head is recorded. A magnetically shielding thin film for magnetically shielding between one composite thin film magnetic head and the other composite thin film magnetic head. The layers are successively formed on one of the composite thin-film magnetic heads or on both composite thin-film magnetic heads during the thin-film forming step of the composite thin-film magnetic head.

In the method of manufacturing a composite type thin film magnetic head device according to the present invention, the magnetic shielding thin film layer for magnetically shielding between the one composite type thin film magnetic head and the other composite type thin film magnetic head is provided. In the thin film forming step, the film is continuously formed on one of the composite thin film magnetic heads or both of the composite thin film magnetic heads, so that the number of manufacturing steps can be reduced, and the recording medium can be used as the magnetic shielding thin film layer. It is possible to easily form various design shapes such as a single layer, a multilayer, a mesh shape, etc., with a slight recess from the sliding surface.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 to 3 show an embodiment of a composite type thin film magnetic head device according to the present invention. As described above, the composite thin-film magnetic head device 1 according to this embodiment includes a first composite thin-film magnetic head 3 having an electromagnetic transducer 2 for performing recording and reproduction, and recording and reproduction having the same configuration. Composite thin film magnetic head 5 having an electromagnetic transducer 4 for performing
And are integrally joined. Electromagnetic transducers 2, 4
Are a reproducing element 8 that electromagnetically converts magnetic information recorded on a magnetic recording medium, in this example, a magnetic tape 6 into an electric signal, and a magnetic tape 6 that electromagnetically converts an electric signal input to a composite thin film magnetic head. The recording elements 9 for recording on the magnetic tape 6 are arranged in the width direction of the magnetic tape 6 according to the number of channels.

First and second composite type thin film magnetic heads 3, 5
Are respectively shown in FIG. 3 (FIG. 2).
As shown in FIG. 1A, a magnetic thin film 13 is formed on a non-magnetic substrate 11 made of non-magnetic ferrite or ceramic (for example, Al ₂ O ₃ .TiC) via an insulating film 12. M having electrodes on both ends with an insulating film 14
An R element (magnetoresistive element) 15 is formed to form a reproducing element 8 using a so-called MR head, and an insulating film 1 is further formed thereon.
The recording element 9 is formed by laminating a magnetic thin film 16 serving as a lower magnetic core, a gap film 17, a coil conductor 18, and a magnetic thin film 19 serving as an upper magnetic core via a so-called inductive head.

When the electromagnetic transducers 2 and 4 were produced, the reproducing element 8 and the recording element 9 were formed on a circular or square nonmagnetic ferrite or ceramic substrate (so-called wafer) as a base as described above. Thereafter, the substrate block 20 is formed by cutting and processing into a required shape. While protecting the reproducing element 8 and the recording element 9 on the substrate block 20,
A protective block 21 for forming a sliding surface for ensuring a good contact state with the magnetic tape is joined. The protection block 21 is formed by processing nonmagnetic ferrite, ceramic, or the like into a required shape, and is bonded to the substrate block 20 using an adhesive, glass, or the like. Further, as shown in FIG. 1, side members 2 made of, for example, non-magnetic ferrite or ceramic for stabilizing the running of the magnetic tape are provided on both ends of the substrate block 20 in the width direction of the magnetic tape.
4, 25 are joined. The protection block 21 has a length common to the substrate block 20 and the side members 24 and 25.

In this embodiment, in particular,
For example, when the reproducing element 8 and the recording element 9 are formed on a wafer by a thin film forming technique such as sputtering, a magnetic shielding thin film layer (hereinafter referred to as a magnetic shield layer) 26 having a magnetic shielding effect is formed using the same thin film forming technique. It is formed.
That is, the magnetic shield layer 26 is continuously formed during the thin film forming process of the composite type thin film magnetic heads 3 and 5. In this example, as shown in FIG. 3, a magnetic shield film 26 made of a metal film such as copper having a magnetic shielding effect is formed on the wafer, that is, the finally obtained substrate 11 via an insulating film 27, A reproducing element 8 using an MR head and a recording element 9 using an inductive head are sequentially formed on the magnetic shield film 26 with the insulating film 12 interposed therebetween, and the protection block 21 is further formed via the planarizing film 28 with the insulating film. It is configured by lamination.

The magnetic shield layer 26 is located between the recording element 9 of one of the composite thin-film magnetic heads constituting the composite thin-film magnetic head device 1 and the reproducing element 8 of the other composite thin-film magnetic head. It is important to form. First
When the composite thin film magnetic head 3 and the second composite thin film magnetic head 5 are joined so that the substrate 11 is in contact with each other, the magnetic shield layers 26 are formed on the substrate 11 side as shown in FIG. You. The magnetic shield layer 26 may be formed so as to interpose at least between the electromagnetic transducers 2 and 4 so as to shield mutual leakage magnetic fields.
, That is, the entire length of the substrate in a direction orthogonal to the sliding surface of the magnetic recording medium.

By forming the magnetic shield layer 26 by the thin film forming technique, the terminals of the magnetic shield layer 26 are formed on the exposed surface of the substrate block 20 by the thin film forming technique similarly to the terminals of the recording element 9 and the reproducing element 8. It is formed.

In each of the composite thin-film magnetic heads 3 and 5 constituting the composite thin-film magnetic head device 1, the recording element 9, which is led out on the exposed surface of the respective substrate block 20,
Wirings (in this example, flexible printed circuit boards) 29, 3 are connected to the terminals of the read element 8 and the magnetic shield layer 26, respectively.
0 is connected. That is, the connection between the magnetic shield layer 26 and the ground wiring is performed by the same wirings 29 and 30. These wirings 29 and 30 are for electrically connecting to devices to be mounted. The terminals and the wirings 29 and 30 are electrically connected by a technique such as soldering or wire bonding.

The operation of recording and reproducing information signals on and from a magnetic recording medium, in this example, a magnetic tape, by the composite type thin-film magnetic head device 1 according to this embodiment is the same as that shown in FIG.
This is the same as described above. That is, as shown in FIG. 4, the magnetic tape 6 is caused to run in the direction of the arrow A along the magnetic recording medium sliding surface 7 of the composite type thin film magnetic head device 1. First
The composite type thin film magnetic head 3 recording element 9 _1, the electromagnetic transformation of the input information signal is carried out, is recorded as magnetic information on the magnetic tape 6. The running of the magnetic tape 6 causes the first
Magnetic information recorded by the recording device 9 ₁ of the composite type thin-film magnetic head 3 is read by the read element ₈₂ of the second composite thin film magnetic head 5, mistakes and information on the recording information to the magnetic tape 6 Verification is performed for any missing data.
When obtained by running the magnetic tape 6 in the reverse direction, the recording of the second recording element 9 ₂ in the information signal of a composite type thin film magnetic head 5 is performed, a composite thin film The recorded magnetic information is first reproduced by the reproducing device ₈₁ of the magnetic head 3, the verification of the recorded information is performed. Since the magnetic shield layer 26 is formed, part of the magnetic field generated by the recording element 9 of one composite thin-film magnetic head does not reach the reproducing element 8 of the other composite thin-film magnetic head. In addition, the reproduced signal is not disturbed.

According to the composite type thin film magnetic head device 1 according to this embodiment, the magnetic shield layer 2 is formed by a thin film forming technique.
By forming 6, the magnetic shield layer 26 can be formed up to the vicinity of the surface of the magnetic recording medium, which has been difficult in the prior art, and the magnetic shielding effect can be further improved. Since there is no need to insert a conventional magnetic shield plate, there is no variation in the positioning of the magnetic shield plate as shown in FIGS. 12 and 13, and a stable magnetic shielding effect can be obtained.

Since the magnetic shield layer 26 is formed by the thin film forming technique, it is possible to form the magnetic shield layer 26 for hundreds or thousands of heads at a time. Thereby, even if the step of forming the magnetic shield layer 26 is added,
Compared to the conventional process of inserting and fixing a magnetic shield plate to each of the composite thin-film magnetic head devices 1, a magnetic shielding effect equal to or more than that obtained in a much shorter time can be obtained, and a significant reduction in the number of manufacturing steps is possible. become.

Since the operation of connecting the magnetic shield layer 26 to the ground can be performed simultaneously when the electromagnetic transducers 2 and 4 are connected to the wirings 29 and 30, the conventional magnetic shield plate is installed and then connected to the ground. The work is eliminated, and the manufacturing process and the number of work steps can be reduced.

FIG. 5 shows another embodiment of the composite type thin film magnetic head device according to the present invention. The figure shows only the main parts. Composite thin-film magnetic head device 10 according to the present embodiment
Is formed by forming the magnetic shield layer 26 so that its end is not exposed to the magnetic recording medium sliding surface 7 and close to the magnetic recording medium sliding surface 7. Other configurations are the same as those in FIG. 1 to FIG. According to this composite thin film magnetic head device 10, the magnetic shield layer 26
Is not exposed on the sliding surface 7 of the magnetic recording medium, so that a metal material having low corrosion resistance can be used as the magnetic shield layer 26. Further, it is not suitable for an exposed magnetic shield layer as shown in FIG. It is also possible to select a material having a high magnetic shielding effect but a low corrosion resistance.

In the above embodiment, since the magnetic shield layer 26 is formed by the thin film forming technique, the magnetic shield layer 26 is formed.
Can easily be changed to a design having a high magnetic shielding effect, such as a simple surface, a mesh, or a multilayer film structure.

In the above example, the magnetic shield layer 26 is formed on both the first and second composite thin-film magnetic heads 3 and 5.
Alternatively, it is also possible to form the magnetic shield layer 26 only on the layer 5. Further, in the above example, the composite thin-film magnetic heads 3 and 5 are joined so that the substrate 11 side is in contact with the head.
For example, the magnetic shield layer 26 can be formed on the protective block 21 side according to the bonding mode.

The present invention relates to a composite thin-film magnetic head device as described above, that is, a composite thin-film magnetic head device obtained by integrating two sets of composite thin-film magnetic heads each having a recording element and a reproducing element. In addition, it includes a composite thin-film magnetic head device having a set of a recording element and a reproducing element so that recording by one recording element and reproduction by the other reproducing element can be simultaneously performed. The information recorded by the recording element can be immediately (that is, simultaneously) reproduced by the other reproducing element in a composite thin-film magnetic head device. In this case, the above-mentioned magnetic shield layer is formed continuously between the recording element and the reproducing element during the thin film forming step of the composite type thin film magnetic head device. A magnetic shield layer can be formed on one or both sides, and the same operation and effect as described above can be obtained.

[0038]

According to the composite type thin film magnetic head device of the present invention, since the magnetic shielding thin film layer is formed by the thin film forming technology, the magnetic shielding thin film layer is extended to the vicinity of the surface of the magnetic recording medium which has been difficult in the prior art. Can be formed, and the magnetic shielding effect can be further improved. Since there is no need to insert a conventional magnetic shield plate, there is no variation in positioning of the conventional magnetic shield plate, and a stable magnetic shielding effect can be obtained.

Since the magnetic shielding thin film layer is formed by the thin film forming technique, it is possible to form magnetic shielding thin film layers for several hundreds or thousands of heads at a time. As a result, even if the step of forming the magnetic shielding thin film layer is added, the process is much faster than or equal to the conventional process of inserting and fixing the magnetic shield plate in each of the composite thin film magnetic head devices. The magnetic shielding effect described above can be obtained, and the number of manufacturing steps can be significantly reduced. The work of connecting the magnetic shielding thin film layer to the ground can be performed at the same time as the connection of the electromagnetic transducer and the wiring.Therefore, the work of connecting the ground after installing the conventional magnetic shield plate is eliminated. Can be reduced.

Since the magnetic shielding thin film layer is formed by the thin film forming technology, the shape of the magnetic shielding thin film layer can be a simple surface, a mesh shape,
The degree of freedom in shape design, such as a multilayer structure, is high, and it is easy to change to a design with a higher magnetic shielding effect or a simple design. When the magnetic shielding thin film layer is formed so as not to reach the sliding surface of the magnetic recording medium, a material having low corrosion resistance can be used as the magnetic shielding thin film layer. Further, it is possible to select a material having a higher magnetic shielding effect than the conventional magnetic shielding material, and the degree of freedom in selecting the magnetic shielding material is further increased. Since the material used as the magnetic shielding thin film layer and the degree of freedom of arrangement are high, it is easy to achieve both the corrosion resistance and the magnetic shielding effect.

According to the method for manufacturing a composite thin film magnetic head device of the present invention, the magnetic shielding thin film layer is continuously formed during the thin film forming process of the composite thin film magnetic head device, so that the number of manufacturing steps is greatly reduced. It is possible to improve the mass productivity of this type of composite type thin film magnetic head device, reduce the manufacturing cost, and the like. In addition, it is possible to easily form a magnetic shield thin film layer having various design shapes such as a single layer, a multilayer, a mesh shape, etc., with the magnetic shield thin film layer being slightly retracted from the sliding surface of the recording medium.

[0042]

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing one embodiment of a composite thin-film magnetic head device according to the present invention.

FIG. 2 is an enlarged view of a portion M in FIG. 1;

FIG. 3 is a sectional view of a main part taken along line AA of FIG. 2;

FIG. 4 is an explanatory diagram illustrating an operation of the composite thin-film magnetic head device according to the embodiment of FIG. 1;

FIG. 5 is a sectional view of a main part showing another embodiment of the composite type thin-film magnetic head device according to the present invention.

FIG. 6A is a schematic configuration diagram showing a conventional composite type thin film magnetic head device. B is an enlarged view of a portion M ′ in FIG. 6A.

FIG. 7 is a cross-sectional view of a main part taken along line BB of FIG. 6B.

FIG. 8 is an explanatory diagram illustrating the operation of the composite thin-film magnetic head device of FIG. 6;

FIG. 9 is an explanatory diagram of a problem of the composite type thin film magnetic head device.

FIG. 10 is a cross-sectional view of a main part of a composite type thin-film magnetic head device in which the problem is improved.

11 is an explanatory diagram of a problem of the composite thin-film magnetic head device of FIG. 10;

12A and 12B are explanatory diagrams of a problem of a magnetic shield plate in the composite thin film magnetic head device of FIG.

13A and 13B are explanatory diagrams of problems of a magnetic shield plate in the composite thin-film magnetic head device of FIG.

FIG. 14 is an explanatory diagram showing a relationship between a noise level and a magnetic shield plate in the AB thin film magnetic head device.

FIG. 15 is an explanatory diagram showing a relationship between a noise level and a magnetic shield plate in the AB thin film magnetic head device.

[Explanation of symbols]

1, 10,... Composite thin-film magnetic head device, 2, 4,.
.Electromagnetic transducers, 3, 5, ... composite thin-film magnetic heads
6 ... magnetic tape, 7 ... magnetic recording medium sliding surface, 8
[8 ₁ , 8 ₂ ] ... reproducing element, 9 [9 ₁ , 9 ₂ ] ...
.Printing element, 11 ... substrate, 12, 14, 27 ...
Insulating film, 13, 16, 19 ... Magnetic thin film, 15 ...
MR element, 17 gap film, 18 coil conductor, 26 magnetic shield layer, 20 substrate block, 21 protection block, 24, 25 side member, 29, 30 ... wiring.

Claims (9)

[Claims] 1. A composite type thin film magnetic head device for simultaneously performing recording and reproduction, wherein a magnetic shielding thin film layer is formed between each recording element and reproduction element for simultaneously performing recording and reproduction. A composite thin-film magnetic head device characterized by the following. 2. The composite thin-film magnetic head according to claim 1, wherein the magnetic shielding thin film layer is formed on one or both of the recording element side and the reproduction element side. 3. A composite in which a plurality of composite thin-film magnetic heads each having a recording element and a reproducing element are integrated, and information recorded by one composite thin-film magnetic head is immediately reproduced by the other composite thin-film magnetic head. A composite thin-film magnetic head device, comprising: a magnetic shielding thin film layer formed between the one and the other composite thin-film magnetic heads. 4. The composite thin film magnetic device according to claim 3, wherein said magnetic shielding thin film layer is formed on one of said composite thin film magnetic heads or on both composite thin film magnetic heads. head. 5. The composite thin-film magnetic head device according to claim 1, wherein said magnetic shielding thin film layer is formed so as not to face a sliding surface of a magnetic recording medium. . 6. The composite thin film magnetic head device according to claim 1, wherein said magnetic shielding thin film layer is formed in a mesh shape. 7. The composite thin-film magnetic head device according to claim 1, wherein said magnetic shielding thin-film layer is formed in multiple layers. 8. A method of manufacturing a composite thin-film magnetic head device for simultaneously performing recording and reproduction, wherein each of the recording and reproduction is performed simultaneously and continuously during a thin-film forming step of the composite thin-film magnetic head device. A method of manufacturing a composite thin-film magnetic head device, comprising: forming a magnetic shielding thin film layer between an element for reproduction and an element for reproduction. 9. A composite in which a plurality of composite thin film magnetic heads each having a recording element and a reproducing element are integrated, and information recorded by one composite thin film magnetic head is immediately reproduced by the other composite thin film magnetic head. A method for manufacturing a thin film magnetic head device, comprising: a magnetic shielding thin film layer for magnetically shielding between the one composite thin film magnetic head and the other composite thin film magnetic head;
A composite thin-film magnetic head device comprising: forming a film on one of the composite thin-film magnetic heads or both of the composite thin-film magnetic heads continuously during the thin-film forming step of the composite thin-film magnetic head. Manufacturing method.