JP2002350733A - Inverted microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inverted microscope into which various auxiliary apparatus applicable to inverted microscopes for industrial applications having vertical illumination can be built and which are low in terms of a cost and is excellent in operability. SOLUTION: This inverted microscope has an objective lens (10) which is arranged on the lower side of a sample, an imagery lens (12) which is arranged in the optical path of the observation light emitted from the objective lens and images the observation light, a vertical illuminating optical system (9) which is arranged between the objective lens and the imagery lens and introduces the vertical illumination to the optical path of the observation light and an input/output port (25) which is arranged between the vertical illuminating optical system and the imagery lens and branches the luminous flux from the optical path of observation light and introduces the luminous flux to the optical path of the observation light.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inverted microscope for magnifying and observing an observation sample placed on a stage by an objective lens disposed immediately below the observation sample.

[0002]

2. Description of the Related Art Inverted microscopes are widely used in the following fields. For example, (1) research in various fields dealing with living cells in medicine and physiology, and (2) industrial research and inspection such as tissue observation, defects, and inclusion detection of various metal materials.

In recent years, in studies and inspections using an inverted microscope, cases where functions other than simple observation and photographing are required are increasing. Specifically, in addition to the visual observation and photographing of a sample with an eyepiece, there are the following uses. For example, imaging a sample using a TV camera,
This includes observing the change over time of the sample and performing image processing, and irradiating the sample with laser light to observe the change. In addition, in research and inspection of industrial systems that handle metal materials, in addition to the above-mentioned applications, cases where a macro observation device for observing a wider field of view of the sample at low magnification are used, and the internal structure rather than the surface of the sample is used. In some cases, infrared light and an image sensor for infrared light are combined for observation.

There is known an inverted microscope in which light sequentially passing through an objective lens and an imaging lens is branched into three or more different directions of photographing optical paths for the purpose of increasing the number of photographing optical paths having the same projection magnification. See JP-A-7-35986).

According to the inverted microscope as described above, for example, three or more photographing devices such as a still camera and a TV camera can be mounted. Further, the image magnification of the image of the sample formed on each photographing optical path by the imaging lens can be set equal.
Therefore, it is possible to easily compare and contrast each image.

However, in the above-mentioned inverted microscope, light sequentially passing through the objective lens and the imaging lens is branched into projection optical paths in three or more different directions. Therefore, this inverted microscope has a first optical element in the microscope main body,
A so-called optical path switching mechanism that switches the position of the first optical element on the optical path to change the state of supply of light to each imaging optical path must always be incorporated.

Therefore, for a user who does not need a photographing optical path, it is useless to always incorporate the optical path switching mechanism for switching between the first optical element and the first optical element, and the cost of the microscope body is increased. Become a factor. Also, when it is desired to perform TV observation using infrared light in research and inspection of industrial systems, the imaging lens and the first optical element in the microscope main body are made to transmit infrared light by changing the coating or the like. In many cases, it is necessary to change to a type that does. These changes require that inverted microscopes be pulled from the user to the manufacturing plant,
Disassembly, remodeling, and assembly of the inverted microscope are required. Therefore,
There is a problem that changing the type takes time and effort.

[0008] Further, by newly expanding or contracting the stage support member with respect to the microscope base, or by disposing a spacer member between at least one of the stage and the microscope base and the stage support member, a new optical system is provided. An inverted microscope having a structure that can be added is also known (Japanese Unexamined Patent Publication No.
No. 72715).

According to the inverted microscope as described above, a new space is formed between the stage and the microscope base. Then, it is possible to additionally arrange a new optical system in this space. In addition, a new optical system is arranged between the objective lens arranged below the stage and the imaging lens arranged on the microscope base, and in the parallel light beam emitted from the objective lens, the optical performance of the microscope is improved. Can hardly be reduced.

As described above, the height of the stage from the desk surface changes by extending and retracting the stage support member and disposing the spacer member. Therefore, there are the following problems.

(1) The operability of the stage handle for moving the stage in the horizontal plane to change the observation site of the sample is deteriorated.

(2) It is necessary to change the height of a peripheral device such as a manipulator used with the inverted microscope from the desk top surface.

(3) The work of removing the stage and the stage supporting member, adding a new optical system, arranging the spacer member, and assembling the stage and the stage supporting member again is troublesome.

(4) By arranging the spacer member, the orthogonality between the optical axis of the objective lens and the stage surface is deteriorated, and the optical performance is deteriorated.

Further, in an inverted microscope provided with a filter block provided below the stage of the microscope main body and an illumination projection unit for projecting incident illumination light onto the sample via the filter block, the illumination projection unit is replaced with the illumination projection unit. An inverted microscope provided with a light receiving means for receiving light from a sample is also known (see Japanese Patent Application Laid-Open No. H11-194277).

According to such an inverted microscope, when the light receiving means is mounted in place of the illumination projection unit, the light from the sample reflected by the filter block is received by the light receiving means and converted into an electric signal. You. Therefore, even a popular inverted microscope having no image output port can easily observe a microscope image and detect a light amount.

However, in the above-mentioned inverted microscope, since the illumination projection unit is removed, there is a problem that it cannot be applied at all to industrial research and inspection, such as observation of the structure of a metal material that requires incident illumination. .

[0018]

SUMMARY OF THE INVENTION The present invention can easily incorporate various auxiliary devices applicable to an inverted microscope for industrial use provided with epi-illumination, is inexpensive in cost, and has low operability. Another object of the present invention is to provide an excellent inverted microscope.

[0019]

According to the present invention, the following means have been taken in order to solve the above-mentioned problems.

An inverted microscope according to an aspect of the present invention includes an objective lens arranged below a sample, and an imaging lens arranged in an optical path of observation light emitted from the objective lens to form the observation light. A lens, an epi-illumination optical element that is disposed between the objective lens and the imaging lens, and that introduces epi-illumination into an optical path of the observation light, and is disposed between the epi-illumination optical element and the imaging lens. And an input / output port for splitting a light beam from the optical path of the observation light or introducing the light beam into the optical path of the observation light.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1 and 2 are block diagrams of an inverted microscope to which a first embodiment of the present invention is applied. FIG. 1 is a side view. FIG. 2 is a front view of the vertical optical path portion including the objective lens of the inverted microscope shown in FIG. 1 as viewed from the front.

In FIG. 1, a microscope main body (hereinafter, referred to as a “mirror body”) 1 has a substantially concave shape. The front and rear of the mirror body 1 are formed with upwardly protruding portions called mirror legs. The stage 3 is arranged above the mirror legs. The observation sample 2 is placed on the stage 3.

A light beam from an illumination light source 4 such as a halogen lamp is guided to a light emitting tube 6 via a collector lens 5. The light beam guided to the light projecting tube 6 is incident on a semi-transparent mirror 9 as an epi-illumination optical element via relay lenses 7 and 8 for relaying the light collected by the collector lens 5. In this case, the light emitting tube 6 is fixed to an opening (not shown) provided at the center of the rear mirror leg of the mirror body 1 to constitute an epi-illumination device.

The IR cut filter 91 is provided for the illumination light source 4.
The infrared light component contained in the light is blocked in front of the collector lens 5.

The light beam reflected by the semi-transmissive mirror 9 is applied to the observation sample 2 via the objective lens 10. The revolver 11 holds a plurality of objective lenses (only one is shown in FIGS. 1 and 2). As for the objective lens 10 including a plurality of objective lenses, one of them is arranged in the optical path alternatively.

The reflected light from the observation sample 2 passes through the semi-transmissive mirror 9. For the transmitted light, an enlarged image of the observation sample 2 is formed together with the objective lens 10 by the imaging lens 12. This enlarged image is incident on the reflection mirror 13. The reflection mirror 13 is arranged at the lowermost end of the mirror body 1.
The reflection mirror 13 includes the objective lens 10 and the imaging lens 1.
2 reflects the image-forming light beam of the observation sample 2 emitted vertically downward obliquely upward (here, 45 °). And
An intermediate image I1 is formed on the observation optical path 14 in which the imaging light flux goes obliquely upward.

The intermediate image I1 is incident on the relay lenses 15, 16. These relay lenses 15 and 16 relay the intermediate image I1 to adjust the light beam emitted from the lens barrel mounting portion 1a located above the front part of the lens body 1 into a parallel light beam. The intermediate image I1 relayed by the relay lenses 15 and 16 forms an image at the position of the eyepiece 18 via the imaging lens 17. The formed intermediate image I1 is connected to the eyepiece 18
From the observer's eyes, the image of the observation sample 2 is observed. In this case, the imaging lens 17 is provided inside a lens barrel 19 detachably attached to the lens barrel mounting portion 1a. Further, the eyepiece 18 is attached to a binocular unit 20 provided for observation with both eyes, which is provided integrally with a lens barrel 19.

The revolver 11 is held on a revolver stand 21. The revolver table 21 is supported so as to be vertically movable with respect to the center of the mirror body 1. A rack 22 is attached to the revolver table 21. A pinion shaft 23 meshing with the rack 22 is provided coaxially with the focusing handle 24. This allows
When the focusing handle 24 is rotated, the pinion shaft 23 is rotated. Then, the rack 22 meshing with the pinion shaft 23 and the revolver table 21 to which the rack 22 is fixed are driven in the vertical direction. Thereby, the relative distance between the observation sample 2 placed on the stage 3 and the objective lens 10 held by the revolver 11 changes. As a result, it is possible to perform focus adjustment for forming an intermediate image I1 of the observation sample 2 formed by the objective lens 10 and the imaging lens 12 at a predetermined position.

On the other hand, an optional port unit 25 is inserted as an input / output port between the semi-transmissive mirror 9 and the imaging lens 12 inside the mirror body 1. The optional port unit 25 is detachable from the side surface of the mirror body 1 along the dovetail portion 251.

At the end of the option port unit 25,
As shown in FIG. 2, a laser light source 26 is provided as an auxiliary device. In this case, the laser light source 26 is supported by the adapter 27. The adapter 27 is fixed to a base member of the option port unit 25 via a mounting portion 28. Also, the optional port unit 25
On the optical path of the light beam from the internal laser light source 26, a mirror 29 is arranged as a port optical element. This mirror 29 is fixed to a mirror frame 30. The mirror frame 30 is configured to be linearly movable in the left-right direction of FIG. 2 with respect to the base member of the option port unit 25 via the guide mechanism 31. Thereby, the mirror 29 can be inserted into and removed from the optical axis of the objective lens 10. In this case, when the mirror 29 is positioned on the optical axis of the objective lens 10, the mirror 29 reflects the light beam from the laser light source 26 toward the objective lens 10, and irradiates the observation sample 2 via the objective lens 10.

The laser light source 26 is used in the industrial field, for example, for the following applications. For example, (1) a sample in which microspheres made of a polymer material are arranged innumerably in a liquid serving as a medium is captured by irradiating a laser light source having a high energy density like a biological cell (laser trap). ) And (2) pattern repair (laser repair) in samples such as IC chips.

A switching lever 32 is provided on the movable side of the guide mechanism 31, that is, on the mirror frame 30. The switching lever 32 linearly moves the mirror frame 30 via a guide mechanism 31 as a transfer unit. The switching lever 32 allows the mirror 29 to be inserted into and removed from the objective lens 10 on the optical axis.

In such a configuration, first, the optional port unit 25 is attached to the dovetail portion 251 from the side of the mirror body 1.
Attach while moving along.

Next, the switching lever 32 is pushed toward the inside of the mirror body 1. The mirror frame 30 linearly moves rightward in FIG. 2 via the guide mechanism 31. Thereby, the mirror 29
Is positioned on the optical axis of the objective lens 10 at the position indicated by the solid line in FIG.

In this state, when laser light is generated from the laser light source 26, the laser light is reflected by the mirror 29 toward the objective lens 10 and irradiates the observation sample 2 via the objective lens 10.

Next, when the switching lever 32 is pulled out of the mirror body 1, the mirror frame 30 moves linearly to the left in FIG. Thereby, the mirror 29
Is retracted from the optical axis of the objective lens 10 to the position indicated by the broken line in FIG.

In this state, the laser light emitted from the laser light source 26 is not introduced into the objective lens 10.
The light flux from the illumination light source 4 is reflected by the semi-transmissive mirror 9,
The observation sample 2 is irradiated via the objective lens 10. Then, the reflected light from the observation sample 2 passes through the semi-transmissive mirror 9 and is incident on the reflecting mirror 13 by the imaging lens 12. The light reflected by the reflection mirror 13 is formed on the observation optical path 14 as an intermediate image I1. The intermediate image I1 is formed at the position of the eyepiece 18 via the relay lenses 15, 16 and the imaging lens 17. Thereby, the change of the observation sample 2 after irradiating the observation sample 2 with a laser beam or the like can be visually observed.

In the above description, the laser light source 26 is exemplified as the auxiliary device. Depending on the auxiliary device to be combined, the mirror 29 may be replaced with the mirror frame 30 or another optical element, for example, a dichroic mirror that reflects only a specific wavelength range.

In the case where the laser light source 26 having a relatively long wavelength is used in the above-described application such as a laser trap, not the mirror 29 but the wavelength range including the wavelength range of the laser light source 26 and reflecting the longer wavelength side is reflected. It is preferable to replace the dichroic mirror with a dichroic mirror that allows the light to pass on the shorter wavelength side. Thereby, it is possible to irradiate the laser light while observing the observation sample 2 with the illumination light source 4.

According to the first embodiment, mirror 29,
Only a relatively simple configuration including a guide mechanism 31 for inserting and removing the mirror 29 with respect to the optical path together with the mirror frame 30 is used to irradiate the observation sample 2 with light from the laser light source 26 as an auxiliary device. Optional port unit 2
5. Moreover, in the first embodiment, the option port unit 25 is configured to be detachable from the mirror 1. As a result, the option port unit 25 can be provided only to a user who needs it later. Optional port unit 2
The reference numeral 5 is arranged in a portion of the parallel light between the objective lens 10 and the imaging lens 12, so that it is advantageous for branching or introducing a light beam, and there is a merit in terms of a system. Therefore,
The inverted microscope according to the first embodiment can reduce the cost of the main body of the mirror 1 as compared with an inverted microscope in which an optical element or the like for switching an optical path is permanently installed inside the microscope main body. In addition, the inverted microscope according to the first embodiment avoids deterioration in workability and operability as compared with the inverted microscope in which the height of the stage is changed to newly add a conventional optical system. it can. Further, the inverted microscope according to the first embodiment can be applied to an inverted microscope for industrial use that requires epi-illumination.

(Second Embodiment) A second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a front view of the vertical optical path portion including the objective lens of the inverted microscope viewed from the front. The inverted microscope shown in FIG. 3 is different from the inverted microscope described in the first embodiment only in the configuration of the option port unit, and the other configurations are the same. Therefore, in FIG. 3, the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 3, the option port unit 41 includes a semi-transparent mirror 9 inside the mirror body 1 and the imaging lens 1.
Inserted between 2. The option port unit 41 is detachable from the side surface of the mirror body 1 along an ant portion (not shown).

At the end of the option port unit 41, a TV having a built-in image pickup device such as a CCD as an auxiliary device is provided.
A camera 42 is provided. In this case, the TV
The camera 42 is supported by the adapter 43,
And is fixed to the base member of the option port unit 41 via the.

A semi-transparent mirror 45 is disposed inside the option port unit 41 so as to be insertable into and removable from the optical axis of the objective lens 10. This semi-transparent mirror 4
5 is fixed to a semi-transparent mirror frame 46. The semi-transparent mirror frame 46 is linearly movable in the left-right direction of FIG. 3 with respect to the base member of the option port unit 41 via the guide mechanism 47. Thereby, the semi-transparent mirror 45
Can be inserted into and removed from the optical axis of the objective lens 10. In this case, the semi-transparent mirror 45 is
Of the reflected light from the observation sample 2 condensed by the objective lens 10 (for example, 50
%) Is deflected to the TV camera 42 side, and the rest is transmitted to the imaging lens 12 side.

A switching lever 48 is provided on the movable side of the guide mechanism 47, that is, on the semi-transparent mirror frame 46.
The switching lever 48 causes the mirror frame 46 to move linearly via the guide mechanism 47. The switching lever 48 switches the insertion / removal of the semi-transmissive mirror 45 onto / from the optical axis of the objective lens 10.

An imaging lens 49 is disposed between the semi-transmissive mirror 45 and the TV camera 42. Imaging lens 49
Is a lens for forming reflected light from the observation sample 2 deflected by the semi-transmissive mirror 45 as an image on an image sensor of the TV camera 42, and is built in the imaging lens unit 50. The imaging lens unit 50 is detachably attached inside the option port unit 41.

In the above-described configuration, first, the option port unit 41 is mounted while moving from the side surface of the mirror body 1 along the dovetail portion.

Next, when the switching lever 48 is pushed toward the inside of the mirror body 1, the semi-transparent mirror frame 46 linearly moves to the left in FIG. The semi-transmissive mirror 45 is positioned at the position of the solid line in FIG.

In this state, first, a light beam from an unillustrated illumination light source is reflected by the semi-transmissive mirror 9. Then, the reflected light is applied to the observation sample 2 via the objective lens 10. The reflected light from the observation sample 2 enters the semi-transmissive mirror 45 via the semi-transparent mirror 9. Part of the light incident on the semi-transmissive mirror 45 (for example, about 50%)
Is deflected to the TV camera 42 side and is imaged on the image sensor of the TV camera 42 via the imaging lens 49. As a result, an imaging signal is output from the TV camera 42. This signal is displayed on a TV monitor or the like (not shown) as an image to perform observation.

When the switching lever 48 is pulled out to the outside of the mirror body 1, the semi-transparent mirror frame 46 linearly moves rightward in FIG. Thereby, the semi-transmissive mirror 45 is retracted to the position shown by the broken line in FIG. 3 which is off the optical axis of the objective lens 10.

In this state, the reflected light from the observation sample 2 is not introduced to the TV camera 42 side. Therefore, the reflected light from the observation sample 2 passes through the semi-transmissive mirror 9 and enters the reflecting mirror 13 via the imaging lens 12. The light reflected by the reflection mirror 13 is formed on the observation optical path 14 as an intermediate image I1. The intermediate image I1 is formed at the position of the eyepiece 18 via the relay lenses 15, 16 and the imaging lens 17, and is visually observed.

The imaging lens unit 50 can be replaced with another imaging lens unit 52 having an imaging lens 51 having different specifications such as magnification according to the size of the image pickup device of the TV camera 42 to be combined. It is possible. By the way, in the second embodiment, for example, the imaging lens 49 is
0.5 × at a focal length half the focal length of the imaging lens 12
The imaging lens 51 having an imaging magnification of 0.3 mm has a focal length of about １ ／ of the focal length of the imaging lens 12 and 0.3.
An imaging lens having an imaging magnification of 5 × is used.

When an IR (infrared) camera is combined with the TV camera 42 for the purpose of observing the inside of a metal sample, an IR (infrared) is used instead of the imaging lens 49 (51). An IR imaging lens having a sufficiently transmitting characteristic is used.

Further, it is possible to prepare another imaging lens having a magnification larger or smaller than that of the imaging lens 49 (and 51). An imaging lens suitable for the TV camera 42 to be combined with the inverted microscope can be selected from imaging lenses having different specifications such as magnification and wavelength characteristics. Therefore, there is an advantage that the application is expanded.

It should be noted that also in the second embodiment, the semi-transmissive mirror 45 can be replaced together with the semi-transparent mirror frame 46. Therefore, TVs combined with inverted microscopes
When the camera 42 is an IR (infrared) camera, the semi-transparent mirror 45 is replaced by a dichroic mirror or the like that reflects only the IR (infrared) wavelength range together with the mirror frame 46, thereby enabling efficient IR observation. Becomes possible.

When performing IR observation, the IR cut filter 91 shown in FIG. 1 is removed from the illumination light path, and the infrared light component of the illumination light source 4 is sufficiently illuminated on the observation sample 2. Further, instead of the imaging lens unit 50 (or the imaging lens unit 52) and the like, an imaging lens unit having a property of sufficiently transmitting infrared light is used.

As described above, the combined TV
An imaging lens unit 50 (5) incorporating imaging lenses 49 (51) having different specifications such as magnification according to the camera 42.
2) can be provided detachably on the option port unit 41. Therefore, when the TV camera 42 is attached, by selecting an imaging lens having a desired reduction magnification from several types of magnifications depending on the size of the imaging element, a wide field of view can be imaged. Can be imaged. Thereby, good microscope observation can be realized.

Since the imaging lens unit can be supplied as an option independent of the mirror 1, it can be easily replaced.
Further, in the second embodiment, the removal of the IR cut filter 91 as described in the first embodiment can be easily performed. As described above, also in the second embodiment, there is no need to modify or replace the components of the mirror body 1 itself. Therefore, the inverted microscope according to the second embodiment has an advantage that it is easily applicable to various uses. Further, the inverted microscope according to the second embodiment is very preferable for changing the imaging magnification, IR observation, and the like. All of these effects are obtained by forming the optional port unit at a position before the light from the objective lens 10 passes through the translucent mirror 9 for introducing the epi-illumination light and enters the imaging lens 12.

(Third Embodiment) A third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a front view of a vertical optical path portion including the objective lens of the inverted microscope viewed from the front.

The inverted microscope shown in FIG. 4 differs from the inverted microscope described in the second embodiment only in the configuration of the option port unit, and the other configurations are the same. Therefore, in FIG. 4, the same parts as those in FIG.

In FIG. 4, the option port unit 61 includes a semi-transparent mirror 9 inside the mirror body 1 and the imaging lens 1.
Inserted between 2. The optional port unit 61 can be inserted and removed from the side surface of the mirror body 1 along an ant portion (not shown).

The optional port unit 61 includes the mirror 1
Are provided through the left and right side surfaces of the. At one end of the option port unit 61, a TV camera 42 having a built-in image pickup device such as a CCD is provided as an auxiliary device. In this case, the TV camera 42 is connected to the adapter 4
3 and is fixed to the option port unit 61 via the mounting portion 44.

An imaging lens 49 for forming an image on the image sensor of the TV camera 42 is disposed inside the option port unit 61. This imaging lens 49
Are built in the imaging lens unit 50. The imaging lens unit 50 is detachably mounted inside the option port unit 61.

The configuration, operation, and effect up to this point are the same as those of the above-described second embodiment, and thus detailed description is omitted.

In the option port unit 61,
The prism 6 can be inserted into and removed from the optical axis of the objective lens 10.
2 are arranged. This prism 62 is fixed to a prism frame 63. The prism frame 63 can move linearly in the left-right direction in FIG. 4 with respect to the base member of the option port unit 61 via the guide mechanism 64. Thereby, the prism 62 can be inserted into and removed from the optical axis of the objective lens 10. In this case, the prism 62 is positioned on the optical axis of the objective
A part (for example, about 80%) of the reflected light from the observation sample 2 condensed at 0 is deflected to the TV camera 42 side via the imaging lens 49 and the rest is transmitted to the imaging lens 12 side. . A switching lever is fixed to the mirror frame 46, but is not shown.

On the other hand, a macro observation device 66 is provided at the other end of the option port unit 61 via a mounting portion 65 as another auxiliary device.

The macro observation device 66 is configured as follows.

An objective lens 68 is provided for an object 67 such as a specimen or a drawing surface placed horizontally. Light emitted from the upper surface of the object 67 is subjected to an image forming operation of the objective lens 68. The optical axis 69 is deflected in a horizontal direction from a vertical direction by a first deflection unit 70 formed of a mirror. Then, an image is formed as an image 72 by the image forming operation of the image forming lens 71.
The light from the image 72 is subjected to an image forming operation by the relay lens 73. A mirror 74 having two surfaces with the optical axis of the light from the image 72.
After being deflected from the horizontal direction to the vertical direction by the second deflecting unit consisting of a and 74b, an image is formed as an image 75. Further, the light from the image 75 is subjected to an image forming operation by the relay lens 76. Mirror 7 with two optical axes of light from image 75
After being deflected from the vertical direction to the horizontal direction by the third deflecting portion composed of 7a and 77b, the light is adjusted into a parallel light beam by the image forming action of the relay lens 78, and introduced into the inside of the mirror body 1 from the mounting portion 65. You. In this case, the objective lens 68,
A first deflecting unit 70, an imaging lens 71, a relay lens 73,
The mirrors 74 a and 74 b and the relay lens 76 are supported by the first lens barrel 79. Also, mirrors 77a, 77b,
The relay lens 78 is supported by the second lens barrel 80. The first lens barrel 79 is rotatably supported by the second lens barrel 80 in a horizontal plane. The second lens barrel 80 is supported on a support table 81 so that the position in the vertical direction can be adjusted. Also, the first
The objective lens 68 in the lens barrel 79 is movable along the optical axis for changing the magnification. Further, the relay lens 78 in the second lens barrel 80 is movable along the optical axis for focusing.

In the above-described configuration, the switching lever (not shown) is pushed toward the inside of the mirror body 1 to position the prism 62 at the position indicated by the solid line in FIG. Approximately 80% of the parallel light flux introduced through 65 is deflected by the prism 62 toward the imaging lens 12 in the direction opposite to the objective lens 10 and enters the reflection mirror 13. The light reflected by the reflection mirror 13 is formed as an intermediate image I1 on the observation optical path 14, as described with reference to FIG. Intermediate image I1
Is visually observed by an eyepiece 18 via relay lenses 15 and 16 and an imaging lens 17.

On the other hand, when a light beam from an unillustrated illumination light source is reflected by the semi-transmissive mirror 9 and irradiates the observation sample 2 through the objective lens 10, it is incident on the prism 62 through the semi-transparent mirror 9. Is done. Then, about 80 of these
% Is deflected to the TV camera 42 side and is imaged on the image sensor of the TV camera 42 via the imaging lens 49. As a result, an image pickup signal is output from the TV camera 42, displayed on a TV monitor (not shown) or the like as an image, and provided for observation.

A part (about 20% in this case) of the parallel light flux from the object 67 introduced from the mounting part 65 by the macro observation device 66 passes through the prism 62 without being reflected by the prism 62. , A TV camera 42 via an imaging lens 49
Is imaged on the image sensor of. Therefore, in the TV camera 42, the enlarged image of the observation sample 2 by the objective lens 10 and the image of the object 67 by the macro observation device 66 are superimposed and imaged, and the superimposed image can be observed on a TV monitor or the like. It is possible.

Similarly, a part (about 20% in this case) of the light beam from the observation sample 2 emitted from the objective lens 10
Pass through the prism 62 without being reflected by the prism 62,
The light is visually observed by an eyepiece 18 through a reflection mirror 13, relay lenses 15, 16 and an imaging lens 17 in this order.
Therefore, also with the eyepiece 18, it is possible to observe the image of the object 67 by the macro observation device 66 and the enlarged image of the observation sample 2 by the objective lens 10 in a superimposed manner.

When a blank sheet is placed as the object 67,
Handwriting can be performed on this blank paper in accordance with the image of the observation sample 2. This technique is known as a drawing device.

The reflection / transmission ratio of the prism 62 is 80.
%: Not limited to 20%, but can be appropriately selected according to the use, such as 50%: 50%.

The switching lever (not shown) is pulled out of the lens body 1 to retract the prism 62 to the position shown by the broken line in FIG. In this case,
The reflected light from the observation sample 2 is not introduced to the TV camera 42 side. Therefore, the reflected light from the observation sample 2 is
The light enters the reflection mirror 13 via the imaging lens 12. The light reflected by the reflection mirror 13 is formed as an intermediate image I1 on an observation optical path 14, and is visually observed through an eyepiece 18 via relay lenses 15, 16 and an imaging lens 17.

According to the third embodiment, the option port unit 61 is provided so as to penetrate the left and right side surfaces of the mirror body 1, and two auxiliary devices can be attached at the same time.
Therefore, observation by the TV camera 42 (IR camera) and macro observation by the macro observation device 66 can be realized at the same time.

(Fourth Embodiment) A fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a front view of the vertical optical path portion including the objective lens of the inverted microscope viewed from the front.

The inverted microscope shown in FIG. 5 is different from the inverted microscope described in the second embodiment only in the configuration of the option port, and the other configurations are the same. Therefore,
5, the same parts as those in FIG. 4 are denoted by the same reference numerals, and the description will be omitted.

In FIG. 5, the option port unit 101 is inserted between the semi-transparent mirror 9 and the imaging lens 12 inside the mirror body 1. Optional port unit 10
Numeral 1 is detachable from a side surface of the mirror body 1 along an ant portion (not shown).

The portion of the option port unit 101 protruding from the left side mirror 1 in FIG.
02 is formed. The TV camera 42 is mounted on one mounting portion 102a of the double port portion 102, and another TV camera (here, “IR observation camera”) 103 is mounted on the other mounting portion 102b. It is installed. In this case, the TV camera 42 is connected to the adapter 4
3 and is fixed to the double port portion 102 via the mounting portion 102a. Also, the TV camera 10
3 is supported by the adapter 110, and the mounting portion 102b
And is fixed to the double port unit 102 via the.

A dichroic mirror 104 that reflects only light in the infrared region is disposed inside the double port section 102. The dichroic mirror 104 is movable in a direction perpendicular to the paper surface. When the dichroic mirror 104 moves in the direction perpendicular to the paper surface, the dichroic mirror 104
From the optical axis connecting the camera and the TV camera 42.

In the fourth embodiment, the mounting portion 102b of the double port portion 102 is provided vertically upward. Of course, the mounting portion 102b can be provided in a horizontal direction (a direction perpendicular to the paper surface).

The semi-transmissive mirror 45, the semi-transparent mirror frame 46,
The configurations and operations of the guide mechanism 47 and the switching lever 48 are the same as those of the second embodiment, and thus description thereof is omitted.

An imaging lens 105 is arranged between the semi-transparent mirror 45 inside the option port unit 101 and the TV camera 42. This imaging lens 105
The focal length is longer by the dimension of the double port 102 than in the imaging lens 49 of the second embodiment. The imaging lens 105 forms an image of the reflected light from the observation sample 2 deflected by the semi-transmissive mirror 45 on the image sensor of the TV camera 42 or 103. The imaging lens 105 is built in the imaging lens unit 106. The imaging lens unit 106 is detachably mounted inside the option port unit 101.

In the above configuration, the switching lever 4
8, the semi-transparent mirror 45 moves the objective lens 10.
Is positioned on the optical axis of

In this state, when the light beam from the illumination light source (not shown) is reflected by the semi-transmissive mirror 9, the objective lens 10
Irradiates the observation sample 2 via the. When the reflected light from the observation sample 2 enters the semi-transmissive mirror 45 via the semi-transmissive mirror 9, a part (for example, about 50%) of the light is deflected toward the double port unit 102 side. Double port part 10
When the dichroic mirror 104 inside the camera 2 is located on the optical axis connecting the semi-transmissive mirror 45 and the TV camera 42, the infrared light component of the light flux deflected toward the double port section 102 is reflected. Then, an image is formed on the image sensor of the IR observation TV camera 103. The remaining visible light component excluding the infrared light component is the dichroic mirror 1 as it is.
After passing through the camera 04, an image is formed on the image sensor of the TV camera 42.

When the dichroic mirror 104 inside the double port unit 102 is retracted from the optical axis connecting the semi-transmissive mirror 45 and the TV camera 42, all the light beams deflected to the double port unit 102 side An image is formed on the image sensor of the TV camera 42.

As a result, video signals are output from the TV camera 42 and the IR observation TV camera 103. This signal is displayed as an image on a TV monitor (not shown) or the like, and is used for observation.

When the switching lever 48 is pulled out of the mirror body 1, the reflected light from the observation sample 2 is not introduced into the TV cameras 42 and 103, as in the second embodiment, and is visually observed. To be served.

In the third embodiment, the optical element incorporated in the double port section 102 is a dichroic mirror 104 that reflects an infrared light component. However, the optical element is not limited to this,
It may have different characteristics such as a mere semi-transmissive mirror.

As described above, in the fourth embodiment, a double port portion is formed at one end of the option port unit, and two cameras are mounted.
Therefore, applications such as switching between a normal observation image and an IR observation image of a sample quickly for observation are possible.
The option port unit is not limited to two units,
More cameras may be attached.

(Fifth Embodiment) A fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a front view of the vertical optical path portion including the objective lens of the inverted microscope viewed from the front.

The inverted microscope shown in FIG. 6 is different from the inverted microscope described in the second embodiment only in the configuration of the option port, and the other configurations are the same. Therefore,
6, the same parts as those in FIG. 4 are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 6, the option port unit 201 is inserted between the semi-transmissive mirror 9 and the imaging lens 12 inside the mirror body 1. Optional port unit 20
Numeral 1 is detachable from a side surface of the mirror body 1 along an ant portion (not shown).

A TV camera 42 is mounted as an auxiliary device at the left end of the option port unit 201 in FIG. The TV camera 42 is supported by the adapter 43. The adapter 43 is fixed to a base member of the option port unit 201 via a mounting portion 202.

Further, a laser light source 2 as an auxiliary device is provided at the right end of the option port unit 201 in FIG.
6 is mounted. The laser light source 26 is connected to the adapter 2
7 supported. The adapter 27 is fixed to a base member of the option port unit 201 via a mounting portion 203.

Inside the option port unit 201, a semi-transmissive mirror 45 and a dichroic mirror 204 are arranged so as to be insertable and removable from the optical axis of the objective lens 10. The translucent mirror 45 is a translucent mirror frame 46.
It is fixed to. The dichroic mirror 204 is fixed to a dichroic mirror frame 205. Further, the translucent mirror 45 and the dichroic mirror 204 are integrally arranged on the guide mechanism 206. Here, the semi-transparent mirror 45 and the dichroic mirror 2
Numeral 04 can move linearly in the left-right direction of FIG. 6 with respect to the base member of the option port unit 201. Thereby, the semi-transmissive mirror 45 and the dichroic mirror 204 can be inserted into and removed from the optical axis of the objective lens 10. In FIG. 6, a switching lever 210 is fixed to the right side of the guide mechanism 206. FIG. 6 shows a state in which the semi-transmissive mirror 45 is arranged on the optical axis of the objective lens 10. In this case, the objective lens 10
A part (for example, about 50%) of the reflected light from the observation sample 2 condensed in the above is deflected to the TV camera 42 side, and the rest is transmitted to the imaging lens 12 side. In the state where the dichroic mirror 204 is arranged on the optical axis of the objective lens 10, the following is performed. The light beam from the laser light source 26 is reflected 100% to the objective lens 10 side. The reflected light irradiates the observation sample 2 via the objective lens 10.
Also, the observation sample 2 by a light beam from an illumination light source (not shown)
After passing through the semi-transmissive mirror 9, the reflected light passes through the dichroic mirror 204 in the direction of the imaging lens 12.

In FIG. 6, an imaging lens 208 is provided on the left side of the guide mechanism 206 via an imaging lens frame 207.
Has been fixed. When the semi-transmissive mirror 45 is arranged on the optical axis of the objective lens 10, the imaging lens 208 is used to deflect the objective lens 1 deflected by the semi-transmissive mirror 45.
The light flux from 0 is focused on the image sensor of the TV camera 42. When the dichroic mirror 204 is positioned on the optical axis of the objective lens 10, the imaging lens 208 is retracted to the left in FIG.

In the above configuration, the switching lever 2
When the 10 is pushed in, the dichroic mirror 204 is positioned on the optical axis of the objective lens 10.

In this state, when the laser light is emitted from the laser light source 26, the laser light is reflected by the dichroic mirror 204 toward the objective lens 10. The reflected light irradiates the observation sample via the objective lens 10.

When the switching lever 210 is pulled out, the translucent mirror 45 is positioned on the optical axis of the objective lens 10, and the imaging lens 208 is positioned at a predetermined position.

In this state, a light beam from an unillustrated illumination light source is reflected by the semi-transmissive mirror 9 and the objective lens 1
The observation sample 2 is radiated through the reference numeral 0. The reflected light from the observation sample 2 is transmitted through the semi-transmissive mirror 9 to the semi-transmissive mirror 45.
, A part (for example, about 50%) of the incident light is T
The light is deflected toward the V camera 42 and is imaged on the image sensor of the TV camera 42 via the imaging lens 208. As a result, an imaging signal is output from the TV camera 42. This signal is displayed as an image on a TV monitor (not shown) or the like, and is used for observation.

The remaining light beam that has passed through the semi-transmissive mirror 45 is finally visually observed by the eyepiece 18 via the imaging lens 12, the mirror 13, and the like.

As described above, in the fifth embodiment, a TV camera and a laser light source are mounted as auxiliary devices on both sides of the option port unit. This has the advantage that both applications can be performed efficiently at one location.

According to the embodiments of the present invention, the present invention can be applied not only to an inverted microscope for research use in various fields dealing with living cells in medicine and physiology but also to an inverted microscope for industrial use provided with epi-illumination. It is possible. Further, it is possible to combine a TV camera, introduce a laser beam, or combine a macro observation device as desired by the user without increasing the cost of the microscope body. In addition, an input / output port can be provided without causing deterioration in operability due to a change in stage height.

The following inventions can be extracted from the above embodiments.

An inverted microscope according to an aspect of the present invention includes an objective lens arranged below a sample and an imaging lens arranged in an optical path of observation light emitted from the objective lens to form the observation light. A lens, an epi-illumination optical element that is disposed between the objective lens and the imaging lens, and that introduces epi-illumination into an optical path of the observation light, and is disposed between the epi-illumination optical element and the imaging lens. And an input / output port for splitting a light beam from the optical path of the observation light or introducing the light beam into the optical path of the observation light.

In an aspect of the present invention, preferred embodiments are as follows. The following embodiments may be applied independently or may be applied in appropriate combinations.

(1) The input / output port includes a detachable option port unit. The option port unit splits or introduces a light beam into the optical path of the observation light, and the port optical element. Switching means for inserting / removing the observation light into / from the optical path of the observation light, and assisting reception of a light beam branched from the optical path of the observation light by the port optical element or transmission of a light beam inserted into the optical path of the observation light. An auxiliary device mounting part for mounting the device is provided.

(2) A dovetail mechanism for detachably mounting the optional port unit is further provided.

(3) The optional port unit may further include a second imaging lens disposed between the port optical element and the auxiliary device mounting portion.

(4) The second imaging lens is interchangeable with another imaging lens having a different magnification.

(5) It is further provided with an IR cut filter detachably arranged between the epi-illumination optical element and the light source.

(6) The port optical element forms two optical paths that are branched or introduced into the optical path of the observation light, and the auxiliary device mounting portions are provided corresponding to the two optical paths. thing.

(7) The optional port unit has at least two mounting portions for mounting an imaging device.

[0117]

According to the embodiment of the present invention, when the input / output port is used as an output port for taking out reflected light from a sample, the light taken out of the input / output port can be used to detect the amount of light or use a TV camera. It can be used for imaging.
In addition, when used as an input port for introducing light from the outside, light emitted from an external laser light source to the sample can be introduced so as to form an image on the sample. Is introduced, a primary image is formed in exactly the same manner as the image of the sample that has passed through the objective lens, and can be observed with an eyepiece or the like.

According to the embodiment of the present invention, various observations and the like can be performed by attaching an auxiliary device such as a TV camera or a macro observation device only when an input / output port which is an optional unit is attached. The introduction of light into these auxiliary devices can be performed by operating the conveying means and inserting the optical element into the optical path.

Further, according to the embodiment of the present invention, it is possible to cope with various auxiliary devices by changing the imaging lens inserted in the optical path of the reflected light from the sample. For example, T
When a V-camera or a digital camera is mounted, a wide field of view can be imaged by selecting an imaging lens having a reduction magnification from several types of magnifications depending on the size of the imaging element. Imaging lens and IR that sufficiently transmit infrared light
If a camera is used, infrared light observation becomes possible.

Further, according to the embodiment of the present invention, two auxiliary devices of different types can be attached, so that T
Observation by a V camera (IR camera) and macro observation using a macro observation device can be simultaneously realized.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of an inverted microscope according to a first embodiment of the present invention.

FIG. 2 is a view of a vertical optical path portion including an objective lens of the inverted microscope according to the first embodiment as viewed from the front.

FIG. 3 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a second embodiment of the present invention.

FIG. 4 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a third embodiment of the present invention.

FIG. 5 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a fourth embodiment of the present invention as viewed from the front.

FIG. 6 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a fifth embodiment of the present invention as viewed from the front.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microscope main body (mirror body) 1a ... Lens tube mounting part 2 ... Observation sample 3 ... Stage 4 ... Illumination light source 5 ... Collector lens 6 ... Projection tube 7, 8 ... Relay lens 9 ... Semi-transmissive mirror 10 ... Objective Lens 11 Revolver 12 Imaging lens 13 Reflecting mirror 14 Observation optical path 15, 16 Relay lens 17 Imaging lens 18 Eyepiece 19 Barrel 20 Binocular part 21 Revolver base 22 Rack 23 Pinion Axis 24 Focusing handle 25 Optional port unit 26 Laser light source 27 Adapter 29 Mirror 30 Mirror frame 31 Guide mechanism 32 Switching lever

Claims (8)

[Claims] An objective lens disposed below a sample; an imaging lens disposed in an optical path of observation light emitted from the objective lens to form an image of the observation light; An epi-illumination optical element arranged between the epi-illumination optical element and the imaging lens, the luminous flux from the optical path of the observation light being arranged between the epi-illumination optical element and the imaging lens; And an input / output port for introducing a light beam into the optical path of the observation light. 2. The inverted microscope according to claim 1, wherein the input / output port includes a detachable option port unit, and the option port unit branches or introduces a light beam into an optical path of the observation light. An optical element for
Switching means for inserting and removing the port optical element with respect to the optical path of the observation light; and a light flux received from the optical path of the observation light or a light flux inserted into the optical path of the observation light by the port optical element. And an auxiliary device mounting portion for mounting an auxiliary device for sending out an image. 3. The inverted microscope according to claim 2, further comprising a dovetail mechanism for detachably attaching said optional port unit. 4. The inverted microscope according to claim 2, wherein the optional port unit is disposed between the port optical element and the auxiliary device mounting portion. An inverted microscope further comprising: 5. The inverted microscope according to claim 4, wherein said second imaging lens is interchangeable with another imaging lens having a different magnification. 6. The inverted microscope according to claim 1, further comprising an IR cut filter detachably disposed between the incident light optical element and a light source. An inverted microscope characterized by the following. 7. The inverted microscope according to claim 2, wherein the port optical element forms two optical paths that are branched or introduced into the optical path of the observation light. An inverted microscope provided to correspond to the two optical paths. 8. The inverted microscope according to claim 2, wherein the option port unit has at least two mounting portions for mounting an imaging device.