JP2002350068A - Vacuum furnace - Google Patents

Vacuum furnace

Info

Publication number
JP2002350068A
JP2002350068A JP2001160093A JP2001160093A JP2002350068A JP 2002350068 A JP2002350068 A JP 2002350068A JP 2001160093 A JP2001160093 A JP 2001160093A JP 2001160093 A JP2001160093 A JP 2001160093A JP 2002350068 A JP2002350068 A JP 2002350068A
Authority
JP
Japan
Prior art keywords
container
furnace
lid
vacuum furnace
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001160093A
Other languages
Japanese (ja)
Inventor
Satoru Hori
堀  哲
Takashi Maruyama
崇 丸山
Shinobu Inuzuka
忍 犬塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Original Assignee
Daido Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP2001160093A priority Critical patent/JP2002350068A/en
Publication of JP2002350068A publication Critical patent/JP2002350068A/en
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)

Abstract

PROBLEM TO BE SOLVED: To efficiently treat a powdery or powder-containing object to be treated in an atmospheric gas. SOLUTION: A vacuum furnace in which the object to be treated is treated by introducing the atmospheric gas after the inside of the furnace is evacuated to a vacuum is provided with a wire 54 which hangs a lid body 52 and closes the opening of a container 51 containing the object from an opened state by lowering the lid body 52 and a driving cylinder 6 which moves the wire 54 upward and downward.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は真空炉に関し、特
に、雰囲気ガス内で粉体状ないし粉体を含んだ被処理物
の飛散を防止しつつ効率的な処理を行うことができる真
空炉の構造改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum furnace, and more particularly to a vacuum furnace capable of performing efficient processing while preventing powdery or powder-containing objects from being scattered in an atmosphere gas. Related to structural improvement.

【0002】[0002]

【従来の技術】例えばTi合金の粉砕化炉では、被処理
物を炉内に装入して真空排気を行なった後、炉内に雰囲
気ガスとしてH2ガスを導入するとともに被処理物を加
熱して自己崩壊反応によって粉砕し、その後徐冷してい
る。また、例えば粉体状のNi−MH系水素吸蔵合金の
真空加熱炉においては、加熱室で真空加熱した被処理物
を冷却室へ送った後、直ちに当該冷却室にArガスを導
入し、これを攪拌して被処理物の冷却を行っている。
2. Description of the Related Art In a pulverizing furnace for a Ti alloy, for example, an object to be processed is charged into a furnace and evacuated, and then H2 gas is introduced into the furnace as an atmosphere gas and the object is heated. Crushed by a self-disintegration reaction, and then slowly cooled. Further, for example, in a vacuum heating furnace made of a powdery Ni-MH-based hydrogen storage alloy, an object to be processed vacuum-heated in a heating chamber is sent to a cooling chamber, and then Ar gas is immediately introduced into the cooling chamber. Is stirred to cool the object.

【0003】[0003]

【発明が解決しようとする課題】ところで上記粉砕化炉
や加熱炉における加熱を効率的に行なうために、通常、
被処理物は開放容器内に収納しているが、粉砕化炉にお
いては、Ti合金がH2雰囲気下で自己崩壊する際の衝
撃やH2ガスの導入に伴う気流によって、粉体化したT
i合金が炉内に飛散するという問題があった。また、加
熱炉においても、Arガスを導入することによる炉内の
攪拌に伴って粉体状の水素吸蔵合金が炉内に飛散すると
いう問題があった。そこで、ガスの導入速度や攪拌速度
を低下させることが行なわれているが、これによっても
被処理物の飛散を完全に防止することは困難である上
に、速やかなガス導入や十分なガス攪拌がなされないた
めにに迅速な冷却や均一な冷却が困難であるという問題
があった。
In order to efficiently heat the above-mentioned pulverizing furnace or heating furnace, usually,
The object to be treated is stored in an open container, but in the pulverizing furnace, the Ti alloy is pulverized due to the impact of the self-collapse of the Ti alloy in the H2 atmosphere or the gas flow accompanying the introduction of the H2 gas.
There was a problem that the i-alloy was scattered in the furnace. Also, in the heating furnace, there is a problem that the powdery hydrogen storage alloy is scattered into the furnace with stirring in the furnace by introducing Ar gas. Therefore, the introduction speed and the stirring speed of the gas are reduced, but it is difficult to completely prevent the scattering of the object to be processed. Therefore, there is a problem that rapid cooling and uniform cooling are difficult because of the lack of cooling.

【0004】そこで本発明はこのような課題を解決する
もので、粉体状ないし粉体を含む被処理物の処理を雰囲
気ガス内で効率的に行なうことができる真空炉を提供す
ることを目的とする。
[0004] Therefore, the present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum furnace capable of efficiently performing processing of a powdery substance or an object containing a powdery substance in an atmosphere gas. And

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に本第1発明では、真空排気後に所定の雰囲気ガスを導
入して被処理物を処理する真空炉において、被処理物を
収納した開放状態の容器(51)に対して蓋体(52)
を進出させて容器(51)の開口を閉鎖する蓋体駆動手
段(6,54)を設ける。
According to a first aspect of the present invention, there is provided a vacuum furnace for processing a workpiece by introducing a predetermined atmospheric gas after evacuating the vacuum furnace. Lid (52) for container (51) in state
Are provided and lid driving means (6, 54) for closing the opening of the container (51) is provided.

【0006】本第1発明の真空炉を例えばTi合金の粉
砕化炉として使用する場合、Ti合金を加熱する際には
蓋体を後退させておけば、容器内のTi合金は効率的に
加熱される。一方、雰囲気ガスとしてH2ガスを導入す
る場合には、蓋体を進出させて容器の開口を閉鎖してお
くことにより、ガス導入に伴う気流によって粉体化した
Ti合金が炉内に飛散するのを防止することができる。
また本第1発明の真空炉を例えばNi−MH系水素吸蔵
合金の真空加熱炉の真空室として使用する場合には、前
段の加熱室では容器は開放状態であるから、被処理物を
所定温度まで効率的に加熱することができる。冷却室内
では容器の開口を蓋体で閉鎖すれば、冷却室内へのAr
ガスを急速に導入し攪拌しても容器内の被処理物が飛散
することはなく、被処理物の冷却を速やかかつ効率的に
行うことができる。
When the vacuum furnace of the first invention is used, for example, as a pulverizing furnace for Ti alloy, if the lid is retracted when heating the Ti alloy, the Ti alloy in the container is efficiently heated. Is done. On the other hand, when H2 gas is introduced as the atmospheric gas, the lid is advanced and the opening of the container is closed, so that the powdered Ti alloy is scattered into the furnace by the gas flow accompanying the gas introduction. Can be prevented.
When the vacuum furnace of the first invention is used as a vacuum chamber of, for example, a vacuum heating furnace made of a Ni-MH-based hydrogen storage alloy, since the container is open in the preceding heating chamber, the object to be processed is kept at a predetermined temperature. Can be heated efficiently. In the cooling chamber, if the opening of the container is closed with a lid, Ar
Even if the gas is rapidly introduced and stirred, the object in the container does not scatter, and the object can be cooled quickly and efficiently.

【0007】本第2発明では、上記蓋体駆動手段は、上
記蓋体(52)を吊り下げてこれを下降進出させる変形
可能な紐状体(54)と、当該紐状体(54)を上下方
向へ移動させる紐状体移動部材(6)とを具備してい
る。
In the second aspect of the present invention, the cover driving means includes a deformable string (54) for suspending the cover (52) and lowering and moving the same, and the string (54). And a cord-like body moving member (6) for moving the cord in a vertical direction.

【0008】本第2発明においては、容器の搬送にロー
ラを使用した場合に、ローラのオッシレーションによっ
て容器が周期的に前後に移動しても、容器開口を蓋体で
閉じた状態で容器の移動に容易に追従することができ
る。
In the second aspect of the invention, when a roller is used to transport the container, even if the container periodically moves back and forth due to the oscillation of the roller, the container is closed with the lid closed. It can easily follow the movement.

【0009】なお、上記カッコ内の符号は、後述する実
施形態に記載の具体的手段との対応関係を示すものであ
る。
The reference numerals in parentheses indicate the correspondence with the specific means described in the embodiments described later.

【0010】[0010]

【発明の実施の形態】図1は水素吸蔵合金用加熱炉の加
熱室の後段に、本発明の真空炉を冷却室1として設けた
場合の一例を示す縦断面図であり、図2はその横断面図
である。冷却室1は円筒状の室壁11を有し、その両端
開口は気密扉12,13で閉鎖されている。各気密扉1
2,13は、図略の駆動シリンダから下方へ延びるロッ
ド21の先端に設けられた作動子22に平行リンク23
によって結合されて、作動子22の上昇に伴って開放さ
れるようになっている。冷却室1内には下半に、長手方
向へ一定間隔で搬送ローラ31が配設してあり、両気密
扉12,13の外方にも支持架台14上に搬送ローラ3
2,33が上記搬送ローラ31と同レベルで設けられ
て、搬送ローラ32は前段の加熱室の搬送ローラ(図示
略)に連続している。
FIG. 1 is a longitudinal sectional view showing an example in which a vacuum furnace of the present invention is provided as a cooling chamber 1 after a heating chamber of a heating furnace for a hydrogen storage alloy, and FIG. FIG. The cooling chamber 1 has a cylindrical chamber wall 11, and the openings at both ends thereof are closed by airtight doors 12 and 13. Each airtight door 1
2 and 13 are parallel links 23 to an actuator 22 provided at the tip of a rod 21 extending downward from a drive cylinder (not shown).
And is opened as the operation element 22 rises. In the lower part of the cooling chamber 1, transport rollers 31 are arranged at regular intervals in the longitudinal direction.
2, 33 are provided at the same level as the transport roller 31, and the transport roller 32 is continuous with a transport roller (not shown) in the preceding heating chamber.

【0011】冷却室1内の搬送ローラ31の下方には長
手方向へ延びる矩形断面の熱交換器41が底壁111に
設けた架台411(図2)に支持させて設けてあり、ま
た、冷却室1の上半内には熱交換器41と同一形状の熱
交換器42が頂壁112に設けた架台421に支持させ
て設けてある。上下の熱交換器41,42の間には搬送
ローラ31上に、上方へ開放する直方体状の容器51が
位置して、当該容器51内に粉体状の被処理物が収容さ
れている。被処理物は開放状態の容器51内に収容され
た状態で前段の加熱室で効率的に所定温度まで加熱さ
れ、搬送ローラ31,32によって冷却室1内に搬入さ
れたものである。
Below the conveying roller 31 in the cooling chamber 1, a heat exchanger 41 having a rectangular cross section extending in the longitudinal direction is provided so as to be supported by a gantry 411 (FIG. 2) provided on a bottom wall 111. In the upper half of the chamber 1, a heat exchanger 42 having the same shape as the heat exchanger 41 is provided so as to be supported by a frame 421 provided on the top wall 112. Between the upper and lower heat exchangers 41, 42, a rectangular parallelepiped container 51 which is opened upward is located on the transport roller 31, and a powdery object to be processed is accommodated in the container 51. The object to be processed is efficiently heated to a predetermined temperature in the preceding heating chamber in a state of being accommodated in the open container 51, and is carried into the cooling chamber 1 by the transport rollers 31 and 32.

【0012】冷却室1内の容器51開口には蓋体52が
被せられており、この蓋体52は図3に示すように、平
面視で上記容器51よりやや大きい長方形状をなすとと
もに、その外周縁521(図1、図2)は下方へ折り曲げ
られている。蓋体52の外表面には長手方向の複数箇所
に一定幅の強化板522が蓋幅方向へ接合されており、
両端の強化板522の中央にはそれぞれアイボルト53
が貫通設置されている(図4)。アイボルト53にはワ
イヤ54の一端が結合されており、各ワイヤ54の他端
は、冷却室1の頂壁112に立設した駆動シリンダ6
の、ロッド61先端のワイヤ吊り具62に結合されてい
る。なお、上記ワイヤ54に代えて、チェーンやコイル
バネ等を使用することができる。
A cover 52 is placed over the opening of the container 51 in the cooling chamber 1. The cover 52 has a rectangular shape slightly larger than the container 51 in a plan view as shown in FIG. The outer peripheral edge 521 (FIGS. 1 and 2) is bent downward. On the outer surface of the lid 52, reinforcing plates 522 having a constant width are joined at a plurality of locations in the longitudinal direction in the lid width direction.
At the center of the reinforcing plate 522 at both ends,
Are provided to penetrate (FIG. 4). One end of a wire 54 is connected to the eyebolt 53, and the other end of each wire 54 is connected to the drive cylinder 6 erected on the top wall 112 of the cooling chamber 1.
Is connected to a wire suspender 62 at the tip of the rod 61. Note that a chain, a coil spring, or the like can be used instead of the wire 54.

【0013】搬送ローラ31上に位置決めされた上記容
器51の一方の側面に対向する位置に、容器51側へ拡
径する筒状の風向ガイド板71が設けられており(図
2)、風向ガイド板71に対向する冷却室1の側壁11
3には送風機収納室81が突設されてその内部に送風機
モータ82が収納されている。送風機モータ82の出力
軸には攪拌用のファン83が装着されて風向ガイド板7
1に向いている。上記容器51の他方の側面に対向する
位置の冷却室側壁114には、頂部が容器51方向へ延
びる山型の風向ガイド板72が設けられている。なお、
冷却室1には真空排気管とArガス導入管がそれぞれ接
続されている(図示略)。
At a position facing one side surface of the container 51 positioned on the transport roller 31, a cylindrical wind direction guide plate 71 which expands in diameter toward the container 51 is provided (FIG. 2). Side wall 11 of cooling chamber 1 facing plate 71
3 is provided with a blower storage chamber 81 in which a blower motor 82 is stored. A fan 83 for stirring is mounted on the output shaft of the blower motor 82 so that the wind direction guide plate 7
Suitable for 1. The cooling chamber side wall 114 at a position facing the other side surface of the container 51 is provided with a mountain-shaped wind direction guide plate 72 whose top extends in the direction of the container 51. In addition,
A vacuum exhaust pipe and an Ar gas introduction pipe are connected to the cooling chamber 1 (not shown).

【0014】加熱室で所定温度まで加熱された被処理物
を冷却室1で冷却する場合には、気密扉12を開放し
て、被処理物を収容した容器51を搬送ローラ31,3
2によって図1に示す冷却室1内の所定位置へ搬入す
る。この状態で、蓋体52は駆動シリンダ6によって図
1の鎖線で示すように、容器51と干渉しない上方位置
へ引き上げられている。この後、位置決めされた容器5
1に対して蓋体52を下降させると、蓋体52はその自
重によって容器51の開口端面に当接して開口を閉鎖す
る。この状態で冷却室1内を排気するとともにArガス
を所定圧まで導入してファン83を回転させ、図2の矢
印で示すようにArガスを攪拌循環させて容器51内の
被処理物を冷却する。
When the object to be processed heated to a predetermined temperature in the heating chamber is cooled in the cooling chamber 1, the airtight door 12 is opened, and the container 51 containing the object to be processed is transported by the transport rollers 31, 3.
By 2, it is carried into a predetermined position in the cooling chamber 1 shown in FIG. In this state, the cover 52 is
As shown by the dashed line 1, it is raised to an upper position that does not interfere with the container 51. After this, the positioned container 5
When the lid 52 is lowered with respect to 1, the lid 52 contacts the opening end surface of the container 51 by its own weight and closes the opening. In this state, the inside of the cooling chamber 1 is exhausted, Ar gas is introduced to a predetermined pressure, the fan 83 is rotated, and the Ar gas is stirred and circulated as shown by the arrow in FIG. I do.

【0015】本実施形態によれば、冷却室1内では容器
51の開口に蓋体52が被せられるから、冷却室1内へ
のArガスの導入を急速に行い、また、その攪拌を十分
行っても、容器51内の被処理物が飛散することはな
く、被処理物の冷却を速やかかつ効率的に行うことがで
きる。なお、前段の加熱室では容器51は開放状態であ
るから、被処理物を所定温度まで効率的に加熱すること
ができる。また、蓋体52を容器51に被せた状態でワ
イヤ54が弛むようにしておけば、搬送ローラ31の湾
曲変形を防止するためにこれを周期的に正逆転させるオ
ッシレーションを行っても、ワイヤ54は容器の移動に
つれて図1の鎖線で示すように振れてこれに追従するこ
とができる。
According to this embodiment, since the lid 52 covers the opening of the container 51 in the cooling chamber 1, the Ar gas is rapidly introduced into the cooling chamber 1 and the stirring is sufficiently performed. However, the object in the container 51 does not scatter, and the object can be cooled quickly and efficiently. Since the container 51 is open in the former heating chamber, the object to be processed can be efficiently heated to a predetermined temperature. Further, if the wire 54 is allowed to be loosened while the cover 52 is placed on the container 51, even if an oscillation is performed to periodically rotate the transport roller 31 in order to prevent the transport roller 31 from bending and deforming, the wire 54 is not rotated. As the container moves, it can swing and follow this as shown by the chain line in FIG.

【0016】上記実施形態では本発明の冷却炉を被処理
物の冷却のみに使用した場合について説明したが、ヒー
タを追加して被処理物の加熱を行えるようにしても良
く、これによれば、本発明の熱処理炉をTi合金の粉砕
化炉等として使用することができる。この場合、加熱時
には蓋体52を引き上げて被処理物を収納した容器51
を開放状態とすることにより効率的な加熱が可能である
とともに、これに続く被処理物の冷却時には容器51を
蓋体52で閉鎖することにより、粉体状被処理物を飛散
させることなく急速冷却を行うことができる。なお、蓋
体は必ずしもワイヤで吊る構造とする必要はなく、例え
ばシリンダロッドで昇降させるようにしても良いが、ワ
イヤを使用した方が構造が簡易であるとともに、ワイヤ
を弛ませておくことによって、既述のように搬送ローラ
のオッシレーションに伴い容器が前後に移動する場合に
もこれに蓋体を容易に追従させることができる。また、
容器の高さが変動してもこれを容易に吸収することがで
きる。
In the above embodiment, the case where the cooling furnace of the present invention is used only for cooling the object to be processed has been described. However, a heater may be added to heat the object to be processed. The heat treatment furnace of the present invention can be used as a Ti alloy pulverizing furnace or the like. In this case, at the time of heating, the lid 52 is pulled up and the container 51 containing the object to be processed is lifted.
Can be efficiently heated by opening the container, and at the time of cooling the object to be processed, by closing the container 51 with the lid 52, the object to be powdered can be rapidly heated without scattering. Cooling can be performed. The lid does not necessarily have to be hung with a wire, but may be lifted and lowered with a cylinder rod, for example. As described above, even when the container moves back and forth with the oscillation of the transport roller, the lid can easily follow the container. Also,
Even if the height of the container changes, this can be easily absorbed.

【0017】[0017]

【発明の効果】以上のように、本発明の真空炉によれ
ば、粉体状ないし粉体を含む被処理物の処理を雰囲気ガ
ス内で効率的に行なうことができる。
As described above, according to the vacuum furnace of the present invention, it is possible to efficiently process a powder or an object containing powder in an atmosphere gas.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態を示す、冷却炉の縦断面図
である。
FIG. 1 is a longitudinal sectional view of a cooling furnace, showing one embodiment of the present invention.

【図2】冷却炉の横断面図である。FIG. 2 is a cross-sectional view of a cooling furnace.

【図3】蓋体の平面図と側面図である。FIG. 3 is a plan view and a side view of a lid.

【図4】ワイヤ結合部の詳細を示す側面図である。FIG. 4 is a side view showing details of a wire connection portion.

【符号の説明】[Explanation of symbols]

1…冷却室、51…容器、31…搬送ローラ、41,4
2…熱交換器、52…蓋体、54…ワイヤ、6…駆動シ
リンダ、83…ファン。
DESCRIPTION OF SYMBOLS 1 ... Cooling room, 51 ... Container, 31 ... Transport roller, 41, 4
2 heat exchanger, 52 lid, 54 wire, 6 drive cylinder, 83 fan.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 犬塚 忍 愛知県名古屋市熱田区六野一丁目2番5号 大同特殊鋼株式会社高蔵製作所内 Fターム(参考) 4K063 AA05 AA15 AA16 BA03 CA06 DA07 DA19 DA22  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Shinobu Inuzuka 1-2-5 Rokuno, Atsuta-ku, Nagoya City, Aichi Prefecture F-term in Takakura Works, Daido Steel Co., Ltd. 4K063 AA05 AA15 AA16 BA03 CA06 DA07 DA19 DA22

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 真空排気後に所定の雰囲気ガスを導入し
て被処理物を処理する真空炉において、前記被処理物を
収納した開放状態の容器に対して蓋体を進出させて前記
容器の開口を閉鎖する蓋体駆動手段を設けたことを特徴
とする真空炉。
In a vacuum furnace for processing an object by introducing a predetermined atmospheric gas after evacuation, a lid is advanced to an open container containing the object to open the container. A vacuum furnace provided with a lid driving means for closing the vacuum furnace.
【請求項2】 前記蓋体駆動手段は、前記蓋体を吊り下
げてこれを下降進出させる変形可能な紐状体と、当該紐
状体を上下方向へ移動させる紐状体移動部材とを具備し
ている請求項1に記載の真空炉。
2. The lid driving means includes a deformable string that suspends the lid and lowers and advances the lid, and a string moving member that moves the string vertically. The vacuum furnace according to claim 1, wherein
JP2001160093A 2001-05-29 2001-05-29 Vacuum furnace Pending JP2002350068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001160093A JP2002350068A (en) 2001-05-29 2001-05-29 Vacuum furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001160093A JP2002350068A (en) 2001-05-29 2001-05-29 Vacuum furnace

Publications (1)

Publication Number Publication Date
JP2002350068A true JP2002350068A (en) 2002-12-04

Family

ID=19003562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001160093A Pending JP2002350068A (en) 2001-05-29 2001-05-29 Vacuum furnace

Country Status (1)

Country Link
JP (1) JP2002350068A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62223593A (en) * 1986-03-22 1987-10-01 大同特殊鋼株式会社 Method of cooling treated substance in muffle furnace
JPS637797A (en) * 1986-06-27 1988-01-13 Toyobo Co Ltd Activity measurement of alpha-amylase
JPH0135898B2 (en) * 1983-02-14 1989-07-27 Morita Tetsuko Hanbai Kk
JPH0587459A (en) * 1991-04-30 1993-04-06 Dia Shinku Kk Vacuum heat treating furnace
JPH06249578A (en) * 1993-02-26 1994-09-06 Shimadzu Corp Heat treatment furnace
JP2000144242A (en) * 1998-11-13 2000-05-26 Sumitomo Special Metals Co Ltd Heat treatment apparatus, heat treatment and production of rare earth metal base alloy powder for permanent magnet using the heat treatment apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0135898B2 (en) * 1983-02-14 1989-07-27 Morita Tetsuko Hanbai Kk
JPS62223593A (en) * 1986-03-22 1987-10-01 大同特殊鋼株式会社 Method of cooling treated substance in muffle furnace
JPS637797A (en) * 1986-06-27 1988-01-13 Toyobo Co Ltd Activity measurement of alpha-amylase
JPH0587459A (en) * 1991-04-30 1993-04-06 Dia Shinku Kk Vacuum heat treating furnace
JPH06249578A (en) * 1993-02-26 1994-09-06 Shimadzu Corp Heat treatment furnace
JP2000144242A (en) * 1998-11-13 2000-05-26 Sumitomo Special Metals Co Ltd Heat treatment apparatus, heat treatment and production of rare earth metal base alloy powder for permanent magnet using the heat treatment apparatus

Similar Documents

Publication Publication Date Title
JP4645592B2 (en) Two-chamber heat treatment furnace
JP6178876B2 (en) Raw material carrying bucket, preheating device, melting equipment, and method of operating melting equipment
CA2776157C (en) Unitized vacuum fryer
JP2014081152A (en) Drum type dryer
CN107326155A (en) A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment
CN107321977A (en) A kind of rare earth permanent magnet vacuum sintering method and vacuum-sintering Equipment for Heating Processing
JP2002350068A (en) Vacuum furnace
CN107326156A (en) A kind of Nd-Fe-B permanent magnetic vacuum-sintering heat treatment method and vacuum heat treatment equipment
US4086050A (en) Method and apparatus for gas circulation in a heat treating furnace
JPH0587459A (en) Vacuum heat treating furnace
CN106802081B (en) A kind of smelting device
CN107002159A (en) Annealing device
CN107034434B (en) Mechanical energy aided diffusion device
JP4280406B2 (en) Fast heating furnace
CN211226954U (en) Facility tail dish processing apparatus
CN211282153U (en) A cement access arrangement for laboratory
JP2002356705A (en) Vacuum furnace
CN210848186U (en) Metal forging heating furnace convenient to ejection of compact
CN214620578U (en) Heat preservation structure of moisture drying furnace
JP2005049091A (en) Surface reforming heat treatment device for metallic material
KR20090112407A (en) Vertical type vacuum furnace with elevation apparatus
CN220643202U (en) Metal product processing heat treatment device convenient to get material
CN220793686U (en) Animal innocent treatment high-efficient drying equipment
CN216237189U (en) Neodymium iron boron magnetism nature material production heat treatment device
JPH0599572A (en) Continuous vacuum furnace

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080327

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110208

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110909