JP2002333349A - Fluidic element manufacturing method, fluidic element, fluidic-type flow meter, and composite-type flow meter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a root of an end block with a shape which can be shaped by metal molds while maintaining the widening of a region of flow measurement by fluidic vibration output to the side of a region of a small quantity of flow, by stabilizing fluidic vibration in the region of a small quantity of flow. SOLUTION: This fluidic element 1A comprises a channel 5 formed by sequentially connecting a channel narrowing part 2, a nozzle 3, and a channel enlarging part 4 larger than the cross-sectional area of the nozzle 3; a vibrator 7 arranged at a location opposing an exit 6 of the nozzle 3 in the channel enlarging part 4; and the end block 8 arranged at a location on the downstream side of the vibration inducer 7 in the channel enlarging part 4. The element 1A is shaped through the use of a plastic material so as to form a shape symmetric with respect to a center line passing through the center of the nozzle 3. The upstream-side end of the channel narrowing part 2 and the downstream-side end of the channel enlarging part 4 are open, and a plurality of grooves 9 are formed in wall surfaces on both sides of the channel narrowing part 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a fluidic element, a fluidic element, a fluidic type flow meter, and a compound type flow meter. More specifically, the present invention relates to a fluidic vibration corresponding to a change in fluid flow rate. The present invention relates to a method for manufacturing a fluidic element to be detected, a fluidic element, a fluidic flowmeter, and a composite flowmeter. For example, it can be used for a flow meter such as city gas (LNG) and propane gas (LPG), or a flow rate control device such as city gas (LNG), propane gas (LPG), air conditioner and engine.

[0002]

2. Description of the Related Art Conventionally, various proposals have been made for a fluidic flow meter. For example, JP-A-8-
FIG.
The fluidic element 100 shown in FIG. The fluidic element 100 is connected to the fluid inlet 10.
1, a flow path formed by sequentially connecting the nozzle 102, the flow path expansion section 103, and the fluid discharge port 104, an exciter 105 disposed in the flow path expansion section 103 and facing the outlet of the nozzle 102, End block 1 located downstream
06.

[0003] In a fluidic flow meter using such a fluidic element 100, the fluid ejected from the nozzle 102 toward the downstream side is alternately distributed along the outside of the exciter 105. The state in which the fluid flows under the vibrator 105 in FIG. 6 will be described. Most of the fluid ejected from the nozzle 102 flows from the flow path expanding portion 103 toward the fluid discharge port 104, but a part thereof flows into the end block 10.
6 and returns as a return fluid along the lower side wall of the flow path expanding portion 103, and newly hits the jet of the fluid ejected from the nozzle 102 from a direction perpendicular to the jet.

[0004] Due to the energy of the return fluid, a jet of fluid newly ejected from the nozzle 102 now flows above the exciter 105, and a part thereof hits the end block 106 and is formed on the upper side wall of the flow path enlarging portion 103. Along with this, it becomes a return fluid, and hits a jet of fluid newly ejected from the nozzle 102 from a direction perpendicular to the jet.

[0005] Due to the energy of the return fluid, a jet of fluid newly ejected from the nozzle is turned to the exciter 105 this time.
Flows below. The distribution of the jet flowing from the nozzle 102 is repeated in this manner.

The fluidic flow meter measures the flow rate of the fluid by detecting the frequency of the vibration (alternating pressure wave) generated in the fluid by the pressure sensor as described above and converting the detected output into an electric signal. What you want to do. In such a fluidic flow meter, when a fluid is ejected from a nozzle 102 having a fixed width toward an exciter 105,
The relationship between the "jet" of a high-speed flow faster than the flow velocity of the surrounding fluid and the "wake" seen downstream of the exciter 105 placed in the flow becomes important, and it is considered in a two-dimensional field. And the shape of the inducer 105 play a very important role in the fluidic vibration characteristics.

More specifically, when the “jet” from the nozzle 102 is ejected into a semi-infinite space, the direction of the “jet” is stable, but the space of the flow channel enlarging portion 103 is limited, and Because of the presence of the inducer 105, the jet flows
It is impossible to maintain the direction of the initial velocity at the time of jetting from the nozzle, so that the two-dimensional jet becomes unstable, and this instability is considered to trigger the start of fluidic oscillation.

On the other hand, an asymmetrically arranged vortex (Karman vortex) is generated downstream of the vibrator 105 disposed in the flow,
This vortex street forms a meandering flow. Therefore, "the wake"
Is considered to be an oscillating flow and cannot be stabilized.

As described above, both the “jet” and the “wake” have the shape of the inducer 105, the end block 106,
3 and become unstable under the influence of the wall surface.

[0010]

The conventional fluidic type flow meter has poor linearity in a small flow rate range, but is suitable for measurement in a large flow rate range. Therefore, for example, in a gas meter for measuring a flow rate of city gas, etc. A composite type flow meter having both a thermal type flow detection sensor such as a flow sensor suitable for measurement in a small flow rate region and a fluidic type flow meter is used.

For this reason, the fluidic type flow meter has a low minimum vibration flow rate (flow rate at which fluidic vibration starts),
A wide dynamic range is desired for the flow rate range.
If the fluid vibration start amount of the fluidic flow meter can be used from the zero flow rate, a flow meter using only the fluidic flow meter can be realized without using a thermal flow detection sensor. Even if this is not the case, if the flow rate at the start of stable fluid oscillation of the fluidic flow meter can be reduced as much as possible, the required specifications for the thermal flow rate detection sensor can be relaxed.

That is, in the current composite type flow meter, for example, full scale 4000 L (liter) / h (hour)
The fluid flow meter covers a range of 200 L / h to several thousand L / h, and the thermal flow sensor covers a range of 0 to 200 L / h. For this reason, there is a problem that it is difficult to obtain measurement accuracy in a small flow rate region because the flow rate range of the thermal type flow detection sensor is as large as two digits.

As a result, strict specifications are required for the performance of the thermal type flow rate detection sensor, and when used as a flow meter, complicated signal processing and flow rate correction calculation processing are required. Therefore, the fluid vibration start amount of the fluidic flow meter is set to 100
Even if the value can be reduced to L / h or less, the effect on the improvement in easiness of signal processing, reliability, or manufacturing cost increases. For this reason, various experimental studies have been conducted on the flow rate (minimum vibration detection flow rate) and the flow rate-frequency characteristic when vibration is started to be detected by the fluidic type flow meter. It has been found that the distance between the nozzle outlet and the end block facing the nozzle is an important control factor, and various proposals have been made so far.

More specifically, in order to reduce the minimum vibration detection flow rate, the distance between the outlet of the nozzle and the end block facing the nozzle may be constant in the depth direction of the flow path enlarged portion. This is so because there is a desirable and optimal distance.

If the nozzle outlet is farther from the nozzle outlet than the optimal distance between the nozzle and the end block facing the nozzle, the dependence of the fluid vibration frequency (F) on the flow rate (Q) is the same. The vibration frequency at the time of flow decreases, and the linearity of flow-vibration frequency (dF / d
Q) becomes worse.

If the distance is closer to the nozzle outlet than the above-mentioned optimum distance, the dependence of the fluidic vibration frequency (F) on the flow rate (Q) is such that the vibration frequency at the same flow rate increases, and the flow rate-vibration frequency Has poor linearity (dF / dQ).

Accordingly, if the distance between the outlet of the nozzle and the end block facing the nozzle is managed, there is no problem in terms of performance.

However, there was no problem in the work at the laboratory level because the aluminum block was manufactured by cutting the aluminum block. Investigations have shown that it is a costly task to keep the distance between the outlet of the nozzle and the end block facing the nozzle constant in the depth direction of the flow path enlarged portion, and it is not always easy. Was. In other words, in the normal mold molding method, since the end block stands upright in a column shape from the floor surface (bottom surface) of the fluidic element, a thermal stress is applied due to a difference in temperature distribution at the time of molding, and the nozzle outlet is exposed to the nozzle outlet. If the end block is inclined or burrs are present at the root of the end block, the flow state is disturbed between the portion where the burrs exist and the portion where it is not, and the performance as a flowmeter is significantly reduced. There was a problem.

For this reason, when manufacturing by die molding with emphasis on productivity, it is necessary to form a curved surface at the root portion of the end block in order to prevent the end block from tilting or generating burrs. However, as the radius of the curved surface increases, the inclination of the end block is suppressed, but the fluctuation of the separation position of the jet with respect to the base of the end block increases, and as a result, fluidic vibration with respect to the flow rate in a small flow rate region There was a problem that the frequency linearity deteriorated.

The present invention has been made in view of these problems, and has been made in view of the performance by the optimal shape obtained in the laboratory, the stability of fluidic vibration in a small flow rate range, and the use of fluidic vibration output. The shape of the base of the end block, which can be molded while maintaining the flow measurement area expanded to the small flow area side, that is, a method of manufacturing a fluidic element having a curved surface radius and a cut surface and the manufacturing method. It is an object of the present invention to provide a fluidic element, a fluidic type flowmeter, and a composite type flowmeter which are provided.

[0021]

[MEANS FOR SOLVING THE PROBLEMS] To solve the above-mentioned problems,
In order to achieve the object, a method for manufacturing a fluidic element according to the invention according to claim 1 includes a flow path formed by connecting a nozzle and a flow path enlarged portion wider than a cross-sectional area of the nozzle;
A fluidic element having a vibrator disposed in the flow channel enlarging portion at a position facing the outlet of the nozzle, and an end block disposed in the flow channel enlarging portion at a position downstream of the vibrator. When integrally molding with a mold, molding the fluidic element so that the root portion of the end block is smooth to stably return or exhaust fluid evenly distributed by the inducer. Features.

According to the first aspect of the present invention, a flow path formed by connecting a nozzle and a flow path expansion portion having a cross section larger than the cross-sectional area of the nozzle, and the flow path expansion at a position facing the outlet of the nozzle. When a fluidic element having an exciter disposed in the portion and an end block disposed in the flow path enlarging portion at a position on the downstream side of the exciter is integrally molded by a mold, the exit side of the nozzle In order to evenly and stably distribute the fluid ejected from the nozzle by the end block facing the nozzle, the fluidic element is molded so as to be smooth. For this reason, the fluidic element manufactured by this method, after the fluid ejected from the nozzle is distributed to the left and right of the jet by the exciter, the location where the vortex is generated in the region between the exciter and the end block and the end Fluctuation in the separation position of the fluid on the block surface is reduced, and the wake distribution to the left and right is stabilized.

According to a second aspect of the present invention, there is provided a method of manufacturing a fluidic element according to the first aspect, wherein the root of the end block is smoothed. Is characterized in that the fluidic element satisfies a tolerance such that a curved surface has a radius equal to or smaller than a certain radius.

According to the second aspect of the present invention, as a method of smoothing the root portion of the end block, a fluidic element which satisfies a tolerance such that the root portion is a curved surface having a radius equal to or less than a predetermined radius is used. Since the fluidic element manufactured by this method is used to mold the fluid, the fluid ejected from the nozzle is distributed to the left and right by the inducer, and the vortex position caused by the fluctuation of the fluid separation position at the root of the end block is changed. The fluctuation is reduced, and the distribution of the downstream end block to the left and right is stabilized. As a result, the phenomenon of drawing in the fluid is eliminated, so that the fluid can be exhausted smoothly.

According to a third aspect of the present invention, in the method of manufacturing a fluidic element according to the second aspect of the present invention, the flow of the fluid flowing out of the nozzle and flowing through the enlarged channel portion is provided. The fluidic element is molded so as to satisfy a tolerance such that the entire area of the root portion of the end block in the bottom surface parallel to the layer direction is uniformly curved with a radius equal to or less than a certain radius.

According to the third aspect of the present invention, the entire area of the root portion of the end block in the bottom surface parallel to the layer direction of the flow of the fluid flowing from the nozzle and flowing through the enlarged channel portion is uniformly constant. Since the fluidic element that satisfies the tolerance such that the curved surface has a radius equal to or smaller than the radius is formed, the distribution direction of the wake is stable even in a two-dimensional field.

According to a fourth aspect of the present invention, in the method for manufacturing a fluidic element according to the second or third aspect, the center line passing through the center of the nozzle and the center of the transducer is provided. The fluidic element is molded so as to satisfy a tolerance such that both sides of a root portion of the end block to be distributed are uniformly curved surfaces having a radius equal to or smaller than a predetermined radius.

According to the fourth aspect of the present invention, both sides of the base of the end block, which is divided by the center line passing through the center of the nozzle and the center of the vibrator, are uniformly curved surfaces having a predetermined radius or less. Since the fluidic element that satisfies the tolerance is molded, the wake distribution is performed evenly.

According to a fifth aspect of the present invention, in the method of manufacturing a fluidic element according to any one of the second to fourth aspects, the depth of the flow path enlarging portion is reduced. Where h is the radius of the root of the end block and R is the relationship between the radius R of the root of the end block and the depth h of the flow channel enlarged portion.
The fluidic element is molded so as to satisfy a tolerance of not more than 0.12.

According to the fifth aspect of the present invention, when the depth of the flow path enlarged portion is h and the radius of the base of the end block is R, the radius R of the base of the end block and the flow Since the fluidic element is molded such that the relationship with the depth h of the road enlarging portion satisfies a tolerance such that R / h = 0.12 or less, the radius of the curved surface is specifically given. Therefore, when the fluid is ejected from the nozzle, the fluctuation of the fluid separation position at the root of the end block is suppressed to a certain range or less, and the distribution of the wake is uniform and stable.

According to a sixth aspect of the present invention, in the method of manufacturing a fluidic element according to any one of the second to fourth aspects, the depth of the flow path enlarging portion is reduced. h, and the radius of the root of the end block is R, the relationship between the radius R of the root of the end block and the depth h of the enlarged channel portion is R / h =
The fluidic element is molded so as to satisfy a tolerance of not more than 0.04.

According to the sixth aspect of the present invention, when the depth of the flow path enlarged portion is h and the radius of the base of the end block is R, the radius R of the base of the end block and the flow Since the fluidic element is molded so that the relationship with the depth h of the road enlarging portion satisfies the tolerance of forming a curved surface with R / h = 0.04 or less, the wake after distribution by the exciter The variation in the peeling position of the fluid at the root of the end block is suppressed, which is further suppressed as compared with the case of the fifth aspect.

According to a seventh aspect of the present invention, in the method of manufacturing a fluidic element according to the first aspect of the present invention, in order to smooth a root portion of the end block, The shape of the root portion of the end block is a cut surface C having a certain value or less so that the root portion is fluidly smooth.

According to the seventh aspect of the present invention, as a method of smoothing the root portion of the end block, a fluidic method is used such that the root portion satisfies a tolerance such that a cut surface having a predetermined value or less is satisfied. Since the element was molded, the fluidic element manufactured by this method has a vortex position generated by the fluctuation of the fluid separation position at the root of the end block after the fluid ejected from the nozzle is distributed to the left and right by the inducer. And the distribution of the downstream end block to the left and right is stabilized. This eliminates the draw-in phenomenon of the fluid, so that the fluid is smoothly exhausted and the shape of the base of the end block is the cut surface C, which is simplified compared to the shapes according to claims 2 to 6. it can.

According to a eighth aspect of the present invention, in the method for manufacturing a fluidic element according to the seventh aspect, the depth of the flow path enlarging portion is h.
When the chamfer of the root portion of the end block is C, the relationship between the chamfer C and the depth h of the flow channel enlarged portion satisfies a tolerance such that C / h = 0.12 or less. The fluidic element is molded so as to perform

According to the eighth aspect of the present invention, when the depth of the enlarged channel portion is h and the chamfer of the root portion of the end block is C, the chamfer C and the depth of the enlarged channel portion are determined. Since the fluidic element is molded so as to satisfy a tolerance such that the relationship with h is C / h = 0.12 or less, the cut surface has a smoothness within a hydrodynamically negligible range. Fluctuation of the fluid separation position at the base of the end block is suppressed and stabilized.

According to a ninth aspect of the present invention, in the method of manufacturing a fluidic element according to the seventh aspect, the depth of the flow path enlarging portion is h.
When the chamfer of the root portion of the end block is C, the relationship between the chamfer C and the depth h of the flow channel enlarged portion satisfies a tolerance such that C / h = 0.04 or less. The fluidic element is molded so as to perform

According to the ninth aspect of the present invention, when the depth of the flow channel enlarging portion is h and the chamfer of the base of the end block is C, the radius C of the base of the end block is C.
And a depth h of the flow channel enlarged portion, the fluidic element was molded so as to satisfy a tolerance such that a curved surface of C / h = 0.04 or less. Fluctuation of the peeling position of the fluid at the root of the end block is suppressed, which can be further suppressed as compared with the case of the eighth aspect.

According to a tenth aspect of the present invention, there is provided a method of manufacturing a fluidic element according to any one of the first to ninth aspects, wherein the fluidic element is manufactured using a plastic material. Is characterized by being molded.

According to the tenth aspect of the present invention, since the fluidic element is molded using a plastic material, a fluidic element capable of stabilizing the direction of the wake can be obtained at low cost and easily. Can be.

According to a fifteenth aspect of the present invention, in the fluidic element, a flow path formed by connecting a nozzle and a flow path enlarging portion wider than a cross-sectional area of the nozzle is provided at a position opposed to an outlet of the nozzle. An exciter disposed in the path enlarging section, and an end block disposed in the flow path enlarging section at a position downstream of the exciter, wherein the flow of the fluid ejected from the nozzle is controlled by the exciter. In the fluidic element which generates an alternating pressure wave by being distributed left and right around the center, the root portion of the end block is formed so as to be smooth in order to stably return the fluid uniformly distributed by the inducer. It is characterized by being.

According to the eleventh aspect of the present invention, the flow path formed by connecting the nozzle and the flow path enlarged portion having a larger cross-sectional area than the nozzle is connected to the flow path enlarged portion at a position facing the outlet of the nozzle. It has an arranged exciter, and an end block arranged in the flow path enlarged portion at a position on the downstream side of the exciter, and distributes the flow of fluid ejected from the nozzle to the left and right around the exciter. In a fluidic element that generates an alternating pressure wave, the root of the end block is formed smoothly to stabilize the wake that is ejected from the nozzle and distributed by the inducer. For this reason, the fluctuation of the separation position of the fluid at the root of the end block is reduced, and the position where the vortex is generated becomes stable, and the distribution of the wake is stabilized.

According to a twelfth aspect of the present invention, in the fluidic element according to the eleventh aspect, the base of the end block is formed as a curved surface or a chamfered C surface having a radius equal to or less than a predetermined radius. It is characterized by.

According to the twelfth aspect of the present invention, since the base of the end block is formed as a curved surface or a chamfered C surface having a radius equal to or smaller than a predetermined radius, the fluid ejected from the nozzle is prevented from being discharged from the base of the end block. Fluctuation of the fluid separation position in the portion is reduced, and the distribution of the jet is stabilized.

According to a thirteenth aspect of the present invention, there is provided the fluidic element according to the eleventh or twelfth aspect, wherein the fluid is ejected from the nozzle and is parallel to the layer direction of the flow of the fluid flowing through the enlarged flow path. The entire area of the root of the end block in the bottom surface is uniformly formed as a curved surface or a chamfered C surface having a radius equal to or less than a certain radius.

According to the thirteenth aspect of the present invention, the entire area of the base of the end block in the bottom surface parallel to the layer direction of the flow of the fluid ejected from the nozzle and flowing through the enlarged flow path is uniformly uniform. Is formed as a curved surface or a chamfered C-plane having a radius equal to or less than the radius of, the distribution of the wake is stabilized even in a two-dimensional field.

According to a fourteenth aspect of the present invention, there is provided the fluidic element according to the eleventh or twelfth aspect, wherein the end block is divided by a center line passing through the center of the nozzle and the center of the vibrator. It is characterized in that both sides of the root are uniformly formed as a curved surface or a chamfer C having a radius equal to or less than a certain radius.

According to the fourteenth aspect of the present invention, both sides of the root portion of the end block, which is divided by the center line passing through the center of the nozzle and the center of the vibrator, have a curved surface or a chamfer C having a uniform radius or less. Since it is formed as a surface, distribution of the wake is performed evenly.

According to a fifteenth aspect of the present invention, there is provided the fluidic element according to any one of the eleventh to fourteenth aspects, wherein the depth of the flow path enlarging portion is h, and the depth of the end block is h. When the radius of the root portion of the end block is R, the relationship between the radius R of the root portion of the end block and the depth h of the flow channel enlarged portion is a curved surface of R / h = 0.12 or less; Alternatively, when the depth of the channel enlargement portion is h and the chamfer of the root portion of the end block is C, the relationship between the chamfer C and the depth h of the channel enlargement portion is C / h. It is characterized as being formed as a chamfer C of 0.12 or less.

According to the fifteenth aspect of the present invention, when the depth of the flow channel enlarging portion is h and the radius of the base of the end block is R, the radius R of the base of the end block is R.
When the relationship between R and h = 0.12 or less, or the depth of the enlarged flow path portion is h, and the chamfer at the root of the end block is C, And Chamfer C
And the depth h of the channel enlarged portion is formed as a chamfer C of C / h = 0.12 or less. For this reason, since the radius of the curved surface is specifically given, the fluctuation of the fluid separation position at the base of the end block of the fluid ejected from the nozzle is suppressed to a certain range or less, and the wake is distributed. Becomes stable.

According to a sixteenth aspect of the present invention, there is provided the fluidic element according to any one of the eleventh to fourteenth aspects, wherein the depth of the flow path enlarging portion is h, and the end block is When the radius of the root of the end block is R, the relationship between the radius R of the root of the end block and the depth h of the flow channel enlarged portion is a curved surface of R / h = 0.04 or less, Alternatively, when the depth of the channel enlargement portion is h and the chamfer of the root portion of the end block is C, the relationship between the chamfer C and the depth h of the channel enlargement portion is C / h. It is characterized in that it is formed as a chamfer C of 0.04 or less.

According to the sixteenth aspect of the present invention, when the depth of the flow path enlarged portion is h and the radius of the root of the end block is R, the radius R of the root of the end block is R.
And the depth h of the enlarged channel portion is a curved surface of R / h = 0.04 or less, or the depth of the enlarged channel portion is h, and the chamfer of the root portion of the end block is C. In this case, the relationship between the chamfer C and the depth h of the enlarged channel portion is C / h
= Chamfer C of 0.04 or less. For this reason, the variation of the fluid separation position at the root of the end block of the fluid ejected from the nozzle can be further suppressed as compared with the case of the fifteenth aspect.

According to a seventeenth aspect of the present invention, in the fluidic element according to any one of the eleventh to sixteenth aspects, a curved surface or a chamfered C surface is formed at a root portion of the end block. In this case, the length of the curved surface or the chamfered C surface is uniform at least in the direction facing the nozzle at the root portion of the end block, and is uniform over the entire circumference of the root of the end block. It is characterized by.

According to the seventeenth aspect of the present invention, when a curved surface is formed at the root of the end block, the length of the arc of the curved surface is uniform at least in the direction opposed to the nozzle at the root of the end block. In addition, since it is made uniform over the entire circumference of the root of the end block, the distribution of the wake is stabilized even in a two-dimensional field.

According to a eighteenth aspect of the present invention, in the fluidic element according to any one of the eleventh to sixteenth aspects, a curved surface or a chamfered C surface is formed at a root portion of the end block. In this case, the length of the curved surface or the chamfered C surface is made uniform on both sides of a root portion of the end block which is divided by a center line passing through the center of the nozzle and the center of the exciter.

According to the eighteenth aspect of the present invention, when a curved surface is formed at the base of the end block, the length of the arc of the curved surface is distributed by the center line passing through the center of the nozzle and the center of the exciter. Since it is uniform on both sides of the root of the end block, the distribution of the wake is performed evenly.

According to a nineteenth aspect of the present invention, in the fluidic element according to any one of the eleventh to eighteenth aspects, the flow path, the vibrator, and the end block are made of a plastic material. It is characterized by being molded using.

According to the nineteenth aspect of the present invention, since the flow path, the vibrator, and the end block are molded using a plastic material, a fluidic element capable of stabilizing the distribution of the jet and the wake is inexpensive. And can be obtained easily.

According to a twentieth aspect of the invention, there is provided a fluidic type flow meter according to any one of the eleventh to eighteenth aspects, wherein the fluidic flow meter measures an alternating pressure wave generated by the fluidic element. A pressure sensor that outputs a signal corresponding to the alternating pressure wave generated by the fluidic element that outputs a corresponding signal.

According to the twentieth aspect, the fluidic element according to any one of the eleventh to eighteenth aspects, and a signal corresponding to an alternating pressure wave generated by the fluidic element is output. After the fluid ejected from the nozzle is distributed by the vibrator, the fluctuation of the fluid separation position at the root of the end block is reduced. A fluidic flow meter that can be stabilized can be provided.

According to a twenty-first aspect of the present invention, there is provided a composite flow meter comprising the fluidic flow meter according to the twentieth aspect and a small flow rate range detecting element for detecting a flow rate of a fluid in a small flow rate range. It is characterized by having.

According to the twenty-first aspect of the present invention, since the fluid flow meter according to the twentieth aspect and the small flow rate range detecting element for detecting the flow rate of the fluid in the small flow rate range are provided, Fluidic flow rate with a wide dynamic range of measured flow rate that reduces the fluctuation of the fluid separation position at the root of the end block after the fluid ejected from the nozzle is distributed by the inducer and stabilizes the wake distribution Meter can be provided.

A composite flow meter according to a twenty-second aspect of the present invention is the composite type flow meter according to the twenty-first aspect, wherein the small flow rate range detecting element is provided at an inlet side of the nozzle of the fluidic type flow meter. Characterized by being arranged in

According to the twenty-second aspect of the present invention, since the small flow rate detecting element is disposed on the inlet side of the nozzle of the fluidic type flow meter, the same operation as the twenty-first aspect can be obtained. In addition, the configuration of the flow path can be simplified.

The composite flow meter according to the invention of claim 23 is the composite flow meter of claim 22, wherein the small flow rate region detecting element is configured to detect a flow of the fluid by the nozzle of the fluidic flow meter. It is characterized in that it is arranged in a small flow path formed at a position that is not affected by fluctuations in the flow.

According to the twenty-third aspect of the present invention, the small flow rate detecting element is disposed in the small flow rate flow path formed at a position which is not affected by the fluctuation of the fluid flow by the nozzle of the fluidic type flow meter. Therefore, an operation equivalent to that of the invention described in claim 22 can be obtained, and when measuring the flow rate of the fluid by the output of the small flow rate range detection element, it is not affected by the fluctuation of the flow of the fluid in the enlarged flow path portion. Measurement becomes possible.

According to a twenty-fourth aspect of the present invention, there is provided a composite type flow meter according to any one of the twenty-first to twenty-third aspects, wherein a thermal type flow detection sensor is used as the small flow rate range detecting element. It is characterized by using.

According to the twenty-fourth aspect of the present invention, since the thermal flow rate detection sensor is used as the small flow rate range detecting element, the same operation as the inventions of the twenty-first to twenty-third aspects can be obtained, and the small flow rate detection element can be used. Measurement sensitivity in the region.

[0069]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a fluidic element, a fluidic type flow meter and a composite type flow meter according to the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a fluidic element according to the present embodiment, and FIG. 2 is a plan view showing a schematic structure of a composite type flow meter according to the present embodiment.

First, the configuration of the fluidic element 1A will be described with reference to FIG. This fluidic element 1A
Is a flow path restricting section 2 whose flow path cross-sectional area is narrowed in the direction of flow of the fluid indicated by the arrow in the figure, a nozzle 3,
A flow path 5 formed by sequentially connecting a flow path enlarged portion 4 having a larger cross-sectional area than the nozzle 3, an exciter 7 arranged in the flow path enlarged portion 4 at a position facing the outlet 6 of the nozzle 3, Pendulum 7
And an end block 8 disposed in the flow channel enlarging portion 4 at a position downstream of the nozzle 3 and molded using a plastic material so as to have a symmetrical shape with respect to a center line passing through the center of the nozzle 3. Have been. The upstream end of the flow path restricting section 2 and the downstream end of the flow path enlarging section 4 are open. Further, a plurality of grooves 9 are formed on the wall surfaces on both sides of the flow path restricting portion 2.

Such a fluidic element 1A is incorporated in a flowmeter main body 10 as shown in FIG. 2, and an opening on the upper surface is covered by a lid (not shown) for closing the upper surface of the flowmeter main body 10. ing. And on the top of the lid,
A pressure sensor (not shown) is attached.

This pressure sensor detects alternating pressure waves of the fluidic element 1A through holes 11 formed on the lid, which are arranged on both sides of the nozzle 3 on the outlet 6 side, and detects an electric pressure corresponding to the detected pressure. Output a signal.

A rectifying network 12 and a rectifying grid 13 are incorporated in the groove 9 formed in the fluidic element 1A. The flowmeter main body 10 is formed with a fluid inlet 14, a fluid outlet 15, and a flow path 16 through which gas as a fluid flows from the fluid inlet 14 to the fluid outlet 15. The fluidic element 1A is arranged at the center of the.

The upstream side of the flow path restricting section 2 of the fluidic element 1A is connected to a fluid inlet 14 and the outlet side of the flow path expanding section 4 is connected to a fluid outlet 15. Further, a shutoff valve 18 for shutting off the flow path 16 by the drive unit 17 when receiving abnormal vibration such as an earthquake is assembled in the flow path 16 on the upstream side of the fluidic element 1A. The fluidic flow meter 20 is configured by the above assembly.

Further, at the inlet side of the nozzle 3 of the fluidic element 1A, a heat-sensitive flow rate detecting sensor (hereinafter, referred to as a flow sensor in the present embodiment) 19 as a small flow rate detecting element is provided. A composite flow meter 30 is configured. Since the flow sensor 19 outputs an electric signal corresponding to the gas flow rate, the gas flow rate is measured based on the output.

The fluidic element 1A, which is a main component of the fluidic flow meter 20, is provided with a fluid inlet 14
When the gas that has flowed in from the nozzle 3 blows out from the nozzle 3 toward the downstream side, the gas is alternately distributed along the outside of the vibrator 7. In FIG. 2, a description will be given of a state in which the gas flows on the upper side of the inducer 7. Most of the gas ejected from the nozzle 3 flows from the enlarged flow path portion 4 toward the fluid outlet 15, but a part of the gas flows out of the end block 8. Channel expansion part 4
Return fluid along the upper side wall of the nozzle 3
From a direction substantially perpendicular to the jet of gas ejected from it.

Due to the energy of the return fluid, the jet of gas newly ejected from the nozzle 3 now flows below the vibrator 7, partially hits the end block 8, It becomes a return fluid along the side wall and hits a jet of gas newly ejected from the nozzle 3 from a direction substantially perpendicular to the jet. Due to the energy of the return fluid, a jet of gas newly ejected from the nozzle 3 flows above the exciter 7 this time. The distribution of the jet flowing from the nozzle 3 is repeated by such a Coanda effect. The fluid vibration (alternating pressure wave) generated in this way is detected by a pressure sensor, and the cycle of the output is converted into an electric signal and recognized to measure the gas flow rate.

By the way, the fluidic element 1A is
BS (Alkyl Benzene Sulfonate), PBT (Poly Butyren
e Terephthalate), PC (polycabonate), POM (Polya
It is molded from a plastic material such as cetal resin) or BMC (Bulk Molding Compound). In this case, in order to reduce the dimensional change after molding, the plastic material has a different shrinkage ratio depending on the direction.
ABS, PBT, PC, etc. as low as about / 1000 are preferred.

Since a mold is used when molding the fluidic element 1A, burrs are likely to be formed at the root 8a of the end block 8, which is a joint of the molds. The burrs cause the flow to be disturbed when the fluid is distributed by the nozzle 3 and flows along the end block as described above. Further, the end block 8 is inclined.

Therefore, a curved surface is formed at the root 8a of the end block 8 in order to avoid the generation and inclination of the burr. If the radius of the curved surface is too large, the fluctuation of the fluid separation position becomes large. Further, it is very difficult to set the burrs and inclination to a constant value by finishing or the like, and this method is also costly.

For this reason, the fluidic element 1A of the present embodiment is molded so as to satisfy the tolerance such that the root 8a of the end block 8 has a curved surface having a radius equal to or less than a predetermined radius. Here, the constant radius is defined as R / h = 0.12, where h is the depth of the enlarged channel portion and R is the radius.
It is as follows. In particular, it is even better if R / h = 0.04. Since the depth h of the enlarged channel portion is 25 mm in this example, the radius R of the former is 3 mm, and the radius R of the latter is 1 mm.

Accordingly, the root portion 8a of the end block 8 of the fluidic element 1A manufactured by such a method.
Is maintained in a state of a curved surface having a radius of 3 mm or less from a state of an edge (right angle) having no curved surface R. In such a configuration, when gas is ejected from the nozzle 3,
Fluctuation of the fluid (jet stream) distributed by the inducer 7 in the gas separation position at the base portion 8a of the end block 8 and at portions other than the base portion is within an allowable range, and the distribution of the wake is stabilized.

Further, the entire area of the root portion 8a of the end block 8 in the bottom surface parallel to the layer direction of the flow of the fluid ejected from the nozzle 3 and flowing through the flow path enlarged portion becomes a curved surface having a uniform radius or less. By molding the fluidic element 1A so as to satisfy such a tolerance, the root portion 8a of the end block 8 of the molded fluidic element 1A is formed.
Thereby, it is maintained upright in the height direction. Therefore, the distribution of the wake is stabilized even in a two-dimensional field.

Further, the filter is formed so that both sides of the root 8a of the end block 8 distributed by the center line passing through the center of the nozzle and the center of the vibrator have a uniform radius or less. By molding the dick element 1A, the end block 8 is maintained in an upright state. Therefore, distribution of the wake by the Coanda effect is performed very evenly.

Here, FIGS. 3 to 5 show experimental results when the radius of the curved surface of the root portion 8a of the end block 8 is R / h = 0.12 (radius 3 mm).

FIG. 3 is a graph showing the dependence of the minimum vibration flow rate on R / h according to the present embodiment. As shown in FIG. 3, the minimum vibration flow rate starts to decrease from around R / h = 0.16 (radius 4 mm), and R / h = 0.12 (radius 3 mm).
And the minimum vibration flow rate satisfies 150 L / H. 150
As the value of R / h decreases after passing L / H, the minimum vibration flow rate gradually decreases as the value of R / h decreases.
0.04 (radius 1 mm) satisfies 100 L / H and 10
It has an inflection point at 0 L / H, and R / h = 0 (right angle) 90 L /
It turns out that it converges to H.

FIG. 4 is a graph in which the flow rate of the alternating pressure wave in the flow rate range of 0 L / H to 6000 L / H is divided for each flow rate, that is, the flow rate per vibration is measured. 5 is a graph showing the flow rate dependence of the present invention.
As can be seen from FIG. 4, if the flow rate value for one cycle of the fluidic oscillation is stable, the pulse constant becomes a constant value, and if it is unstable, the pulse constant has a slope. FIG.
As shown in the graph, when R / h = 0.16, the dependence of the pulse constant on the flow rate has a slope, indicating that the fluidic oscillation with respect to the flow rate is unstable.

When R / h = 0.12, the flow rate dependence of the pulse constant is stable. This value is an improved value compared to the related art. In the small flow rate range of 200 L / h to 400 L / h or less, the value was within the range of the instrumental error 3% allowed by the measurement method.

To further improve the linearity in the low flow rate region,
What is necessary is just to make the ratio R / h of the radius R of the root portion of the end block 8 to the depth of the flow channel enlarged portion: R / h smaller. That is, FIG.
As shown in the figure, when R / h = 0.04, R / h = 0.12
The value of the pulse constant is smaller than that of. This indicates that the flow rate dependency of the fluidic oscillation frequency of R / h = 0.04 has a larger slope dF / dQ than R / h = 0.12, and the accuracy of the flow rate measurement is It shows that it gets better.

Up to now, the root portion 8 of the end block 8
The embodiment has been described in which the molding is performed so as to satisfy a tolerance such that a is a curved surface R having a radius equal to or smaller than a certain radius. The constant radius here is an R / h ratio where h is the depth of the enlarged channel portion and R is the radius. In this case, it has been found that the root 8a of the end block 8 may be a cut surface C having a certain size or less, and it suffices to satisfy the tolerance by the C / h ratio.

FIG. 5 is a graph showing the flow rate dependence of the pulse constant in the present embodiment. In FIG. 5, for comparison, R / h = 0.04 (radius 1 mm) and C / h = 0.
04 (1 mm cut surface)
It has been found that the same effect can be obtained when the curvature R is provided at the root 8a of the end block 8 and when the cut surface C is provided.

Further, in this embodiment, as shown in FIG. 2, the flow sensor 19 is arranged on the inlet side of the nozzle 3 of the fluidic element 1, so that the configuration of the flow path 16 as the composite flow meter 30 is changed. It can be simplified.

[0094]

As described above, according to the first aspect of the present invention, the fluid (the wake) in which the root portion of the end block uniformly distributes the fluid ejected from the nozzle by the inducer is provided. Since the fluidic element is molded so that it is smooth to return or exhaust evenly, the fluid that is evenly distributed by the vibrator and becomes wake is less likely to fluctuate in the separation position at the root of the end block. Thus, the position of the vortex generated by the wake is stabilized, whereby the fluidic vibration in the small flow rate region is also stabilized, and the flow rate measurement region by the fluidic vibration output can be extended to the small flow rate region side.

According to the second aspect of the present invention, as a method of smoothing the root of the end block, a fluidic which satisfies a tolerance such that the root of the end block is a curved surface having a radius equal to or smaller than a predetermined radius is used. Since the element is molded, the same effect as the first aspect can be obtained.

According to the third aspect of the present invention, the entire area of the root of the end block in the bottom surface parallel to the layer direction of the flow of the fluid which is ejected from the nozzle and is distributed by the vibrator and flows through the enlarged channel portion is formed. Since the fluidic element is molded so as to satisfy the tolerance of uniformly forming a curved surface having a radius equal to or smaller than a certain radius, the distribution of the wake can be stabilized even in a two-dimensional field.

According to the fourth aspect of the invention, both sides (left and right) of the base of the end block, which are distributed by the center line passing through the center of the nozzle and the center of the vibrator, are uniformly curved surfaces having a radius equal to or less than a predetermined radius. Since the fluidic element is molded so as to satisfy the following tolerances, the direction of the wake is stable even in a two-dimensional field, and the distribution of the wake can be stabilized, and the distribution of the wake is uniform. Since the pulse omission of fluidic vibration can be effectively prevented, the flow rate per vibration can be further stabilized over the flow region.

According to the fifth aspect of the present invention, the relationship between the radius R of the root portion of the end block and the depth h of the enlarged channel portion is R
Since the fluidic element is molded so as to satisfy a tolerance such that the curved surface is not more than /h=0.12, since the radius of the curved surface is specifically given, the fluid is ejected from the nozzle and fully divided by the vibrator. Fluctuation of the separation position of the fluid at the root of the end block of the fluid flowing downstream can be suppressed within a certain range, and the position of the vortex generated by the downstream flow and the uniformity can be stabilized.

According to the sixth aspect of the present invention, assuming that the depth of the enlarged channel portion is h, and the radius of the root portion of the end block is R, the radius R of the root portion of the end block and the enlarged channel portion are defined. Since the fluidic element is molded so as to satisfy a tolerance such that the relationship with the depth h of the surface becomes a curved surface of R / h = 0.04 or less, a change in the fluid separation position at the root of the end block is required. Item 5 can be further suppressed as compared with the case of item 5.

According to the seventh aspect of the present invention, since the shape of the base portion of the end block is simple because the shape of the base is the cut surface C, it is possible to reduce the cost when manufacturing a molding die.

According to the eighth aspect of the present invention, when the depth of the channel enlargement portion is h and the chamfer of the root of the end block is C, the difference between the chamfer C and the depth h of the channel enlargement portion is as follows. Relationship is C
Since the fluidic element is molded so as to satisfy a tolerance of not more than /h=0.12, fluctuations in the fluid separation position at the root of the end block in the wake are suppressed and the wake is stabilized.

According to the ninth aspect of the present invention, assuming that the depth of the enlarged channel portion is h and the chamfer of the root portion of the end block is C, the cut surface C at the root portion of the end block and the enlarged channel portion. Since the fluidic element is molded so as to satisfy the tolerance such that the relationship of the depth h of the portion is a curved surface of C / h = 0.04 or less, the wake distributed by the vibrator is at the base of the end block. The fluctuation of the fluid separation position in the above is suppressed, which is further suppressed as compared with the case of the eighth aspect. Claim 8
In the examples 9 and 9, since specific numerical values are given, the effects of the present invention can be easily obtained by processing the chamfer C at the root of the end block.

According to the tenth aspect of the present invention, since the fluidic element is molded by using a plastic material, the direction of the jet is stabilized, and the jet separated by the inducer becomes a wake and becomes a stable vortex. Can be easily obtained at low cost.

According to the eleventh aspect of the present invention, since the root portion of the end block of the fluidic element is formed smoothly to stabilize the distribution direction of the wake, the fluid separation position in the end block. Is small, and the wake distribution is stabilized, whereby the fluidic vibration in the small flow rate region is stabilized, and the flow rate measurement region by the fluidic vibration output can be expanded toward the small flow rate region.

According to the twelfth aspect of the present invention, since the entire area of the root of the end block of the fluidic element is formed as a curved surface or a chamfered C surface having a radius equal to or less than a predetermined radius, the fluid collides with the end block. In this case, the fluctuation of the fluid separation position at the root of the end block is reduced, and a stable vortex due to the wake can be generated.
Thereby, the fluidic vibration in the small flow rate region is stabilized, and the flow rate measurement region by the fluidic vibration output can be expanded toward the small flow rate region.

According to the thirteenth aspect of the present invention, the entire area of the root portion of the end block in the bottom surface parallel to the layer direction of the flow of the fluid ejected from the nozzle and flowing through the enlarged channel portion is uniformly uniform. Since it is formed as a curved surface or a chamfered cut surface having a radius equal to or less than the radius, the direction of the wake can be stabilized even in a two-dimensional field.

According to the fourteenth aspect of the present invention, both sides of the base of the end block, which is divided by the center line passing through the center of the nozzle and the center of the exciter, have a curved surface or a chamfered cut surface having a uniform radius or less. Therefore, the direction of the wake can be stabilized, the distribution of the wake can be made uniform, and the pulse omission of fluidic vibration can be effectively prevented.

According to the fifteenth aspect of the present invention, when the depth of the flow path enlarging portion is h and the radius of the exciter root portion is R, the radius R of the root portion of the end block and the flow channel enlarging portion are set. The relationship with the depth h of the portion is formed as a curved surface with R / h = 0.12 or less, or the depth of the enlarged channel portion is h, and the chamfer of the root portion of the end block is C. In this case, the relationship between the chamfer C and the depth h of the enlarged channel portion is C / h.
Since the radius of the curved surface, which is formed as a chamfer C of 0.12 or less, is specifically given, the wake after the fluid ejected from the nozzle is distributed by the inducer is the fluid at the root of the end block. The fluctuation of the peeling position of the film can be suppressed to a certain range or less, and the direction of the wake can be stabilized.

According to the sixteenth aspect of the present invention, when the depth of the enlarged channel portion is h and the radius of the root portion of the end block is R, the radius R of the root portion of the end block and the flow channel When the relationship with the depth h of the enlarged portion is formed as a curved surface with R / h = 0.04 or less, or when the chamfer at the base of the end block is C, the chamfer C and the depth of the flow channel enlarged portion are set. Since the relationship with the height h is formed as a chamfer C of C / h = 0.04 or less, the fluid ejected from the nozzle further suppresses the fluctuation of the fluid separation position in the exciter than in the case of claim 15. can do.

According to the seventeenth aspect, when a curved surface or a cut surface is formed at the root of the end block, the length of the arc of the curved surface is at least the direction opposing the nozzle at the root of the end block. Is uniform over the entire circumference of the root of the end block, so that the direction of the wake can be stabilized even in a two-dimensional field.

According to the eighteenth aspect of the present invention, when a curved surface or a cut surface is formed at the root of the end block, the length of the arc of the curved surface is the center line passing through the center of the nozzle and the center of the exciter. Is uniform on both sides of the root portion of the end block, which can be distributed in the wake.

According to the nineteenth aspect of the present invention, since a plastic material is used for molding, a fluidic element capable of uniformly stabilizing the wake distribution can be obtained at low cost and easily.

According to the twentieth aspect, the fluidic type flow meter according to the eleventh to eighteenth aspects includes a pressure sensor for outputting a signal corresponding to an alternating pressure wave generated by the fluidic element. Since the fluid ejected from the nozzle is distributed by the inducer, the fluctuation of the fluid separation position at the root of the end block is reduced, and the fluidic flow meter can stabilize the distribution of the wake. Can be provided.

According to the twenty-first aspect, the nozzle is provided with the fluidic flow meter according to the twentieth aspect and the small flow rate detection element for detecting the flow rate of the fluid in the small flow rate range. It is possible to provide a composite type flow meter which can reduce the fluctuation of the fluid separation position in the end block where the fluid ejected from the end block can stabilize the wake direction.

According to the twenty-second aspect of the present invention, since the small flow rate area detecting element is disposed on the inlet side of the nozzle, the same effect as that of the twenty-first aspect of the present invention can be obtained, and the flow path of the flow path can be reduced. The configuration can be simplified.

According to the twenty-third aspect of the present invention, the small flow rate detecting element is disposed in the small flow rate flow path formed at a position which is not affected by the fluctuation of the fluid flow by the nozzle. In addition to the effects of the described invention, when the flow rate of the fluid is measured by the output of the small flow rate range detection element, the measurement can be performed without being affected by the fluctuation of the flow of the fluid in the nozzle.

According to the twenty-fourth aspect of the present invention, since the thermal type flow rate detection sensor is used as the small flow rate area detecting element, the same effect as the inventions of the twenty-first to twenty-third aspects can be obtained, and the small flow rate area can be obtained. Measurement sensitivity can be increased.

[Brief description of the drawings]

FIG. 1 is a perspective view of a fluidic element according to the present embodiment.

FIG. 2 is a plan view showing a schematic structure of a compound flow meter according to the present embodiment.

FIG. 3 is a graph showing the dependence of the minimum vibration flow rate on R / h according to the present embodiment.

FIG. 4 shows 0 L / H to 6000 L /
It is the graph which divided for every flow rate with the cycle of the vibration of the alternating pressure wave in the flow rate area of H.

FIG. 5 is a graph showing the flow rate dependence of a pulse constant in the present embodiment.

FIG. 6 is a plan view showing a schematic configuration of a conventional fluidic element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1A Fluidic element 2 Flow path restricting part 3 Nozzle 4 Flow path enlargement part 5 Flow path 6 Outlet 7 Exciter 8 End block 8a Root part 9 Groove 10 Flow meter main body 11 Hole 12 Rectifier net 13 Rectifier grid 14 Fluid inlet 15 Fluid Outflow port 16 Flow path 17 Drive unit 18 Shutoff valve 19 Thermal type flow detection sensor (flow sensor) 20 Fluidic flow meter 30 Composite flow meter

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) // G01F 3/22 G01F 1/68 101Z (72) Inventor Toshiyuki Takamiya 2nd Nishiki, Naka-ku, Nagoya City, Aichi Prefecture No. 2-13 Ricoh Elemex Co., Ltd. F term (reference) 2F030 CA04 CA10 CC13 CD13 CF01 CF05 CF11 CH01 CH05 2F035 EA04

Claims (24)

[Claims] A flow path formed by connecting a nozzle and a flow path enlargement section wider than a cross-sectional area of the nozzle; an exciter arranged in the flow path enlargement section at a position facing an outlet of the nozzle; When integrally molding a fluidic element having an end block disposed in the flow path enlarging portion at a position on the downstream side of the exciter with a mold, a root portion of the end block is equally distributed by the exciter. A method for manufacturing a fluidic element, characterized in that the fluidic element is molded so as to be smooth in order to stably return or exhaust the fluid obtained. 2. The fluidic element according to claim 1, wherein said fluidic element satisfies a tolerance such that a root portion of said end block is a curved surface having a radius equal to or less than a predetermined radius so as to be smooth. 2. The method for producing a fluidic device according to item 1. 3. The entire area of the root portion of the end block in the bottom surface parallel to the layer direction of the flow of the fluid ejected from the nozzle and flowing through the flow channel expanding portion has a curved surface having a uniform radius or less. The method according to claim 2, wherein the fluidic element is molded so as to satisfy a tolerance. 4. A filter which satisfies a tolerance such that both sides of a root portion of the end block, which are distributed by a center line passing through the center of the nozzle and the center of the vibrator, have a curved surface having a uniform radius or less. The method for producing a fluidic element according to claim 2, wherein the dick element is molded. 5. When the depth of the enlarged channel portion is h and the radius of the root portion of the end block is R, the radius R of the root portion of the end block and the depth of the enlarged channel portion are defined. The fluidic element according to any one of claims 2 to 4, wherein the fluidic element is molded so as to satisfy a tolerance such that a relationship with h is R / h = 0.12 or less. Dick element manufacturing method. 6. A radius R of a root portion of the end block and a depth of the flow channel enlarged portion, where h is a depth of the enlarged channel portion and R is a radius of a root portion of the end block. The fluidic element according to any one of claims 2 to 4, wherein the fluidic element is molded so as to satisfy a tolerance such that a relation with h is R / h = 0.04 or less. Dick element manufacturing method. 7. A cut surface C having a shape of a root portion of the end block, wherein the shape of the root portion of the end block is equal to or less than a predetermined value, so that the root portion of the end block is smoothed hydrodynamically. The method for manufacturing a fluidic element according to claim 1, wherein: 8. A relationship between the chamfer C and the depth h of the flow channel enlarging portion, where h is a depth of the flow channel enlarging portion and C is a chamfer of a root portion of the end block, C / h
The method for producing a fluidic element according to claim 7, wherein the fluidic element is molded so as to satisfy a tolerance such that = 0.12 or less. 9. The relationship between the chamfer C and the depth h of the flow channel enlarging portion, where h is the depth of the flow channel enlarging portion and C is the chamfer of the root portion of the end block, C / h
The method for manufacturing a fluidic element according to claim 7, wherein the fluidic element is molded so as to satisfy a tolerance that satisfies 0.04 or less. 10. The fluidic element is molded using a plastic material.
The method for producing a fluidic device according to any one of the above. 11. A flow path formed by connecting a nozzle and a flow path enlarged portion wider than a cross-sectional area of the nozzle, an exciter arranged in the flow path enlarged portion at a position facing an outlet of the nozzle, and An end block disposed in the flow path enlarged portion at a position on the downstream side of the exciter, and an alternating pressure wave is generated by distributing a flow of fluid ejected from the nozzle to the left and right around the exciter. A fluid element, wherein a root portion of the end block is formed so as to be smooth for stably returning fluid evenly distributed by the inducer. 12. The fluidic element according to claim 11, wherein a root portion of the end block is formed as a curved surface or a chamfered C surface having a radius equal to or less than a predetermined radius. 13. The entire area of the root portion of the end block in the bottom surface parallel to the layer direction of the flow of the fluid ejected from the nozzle and flowing through the flow path expanding portion is a curved surface or chamfer C having a uniform radius or less. The fluidic device according to claim 11, wherein the fluidic device is formed as a surface. 14. Both sides of a root of the end block, which are divided by a center line passing through the center of the nozzle and the center of the vibrator, have a curved surface or a chamfer C having a uniform radius or less.
The fluidic element according to claim 11, wherein the fluidic element is formed as: 15. A radius R of a root portion of the end block and a depth of the flow channel enlarged portion, where h is a depth of the enlarged channel portion and R is a radius of a root portion of the end block. When the relationship with h is a curved surface of R / h = 0.12 or less, or when the depth of the enlarged channel portion is h and the chamfer of the root portion of the end block is C, The relationship between the chamfer C and the depth h of the enlarged channel portion is C / h
The fluidic element according to any one of claims 11 to 14, wherein the fluidic element is formed as a chamfer C having a value equal to or less than 0.12. 16. When the depth of the enlarged channel portion is h and the radius of the root portion of the end block is R, the radius R of the root portion of the end block and the depth of the enlarged channel portion are determined. When the relationship with h is a curved surface of R / h = 0.04 or less, or when the depth of the enlarged channel portion is h and the chamfer of the root portion of the end block is C, The relationship between the chamfer C and the depth h of the enlarged channel portion is C / h
The fluidic element according to any one of claims 11 to 14, wherein the fluidic element is formed as a chamfer C having a value of 0.04 or less. 17. When a curved surface or a chamfered C surface is formed at a root portion of the end block, the length of the curved surface or the chamfered C surface is uniform at least in a direction facing the nozzle at the root portion of the end block. The fluidic element according to any one of claims 11 to 16, characterized in that the element is made uniform over the entire periphery of the root of the end block. 18. When a curved surface or a chamfered C surface is formed at a root portion of the end block, the length of the curved surface or the chamfered C surface is divided by a center line passing through the center of the nozzle and the center of the exciter. The fluidic element according to any one of claims 11 to 16, wherein the element is made uniform on both sides of a root portion of the end block. 19. The fluidic device according to claim 11, wherein the flow path, the vibrator, and the end block are molded using a plastic material. 20. The fluidic element according to claim 11, wherein the fluidic element generates a signal corresponding to an alternating pressure wave generated by the fluidic element. A fluid sensor comprising: a pressure sensor that outputs a signal corresponding to an alternating pressure wave; 21. A compound flow meter comprising: the fluidic flow meter according to claim 20; and a small flow rate detection element for detecting a flow rate of a fluid in a small flow rate range. 22. The combined flow meter according to claim 21, wherein the small flow rate detection element is disposed on the inlet side of the nozzle of the fluidic flow meter. 23. The small flow rate detecting element is arranged in a small flow rate flow path formed at a position which is not affected by a fluctuation of a fluid flow by the nozzle of the fluidic type flow meter. A composite flow meter according to claim 22. 24. A thermal type flow rate detection sensor is used as said small flow rate area detecting element.
The combined flow meter according to any one of claims 1 to 4.