JP2002320933A - Washing unit - Google Patents

Washing unit

Info

Publication number
JP2002320933A
JP2002320933A JP2001133591A JP2001133591A JP2002320933A JP 2002320933 A JP2002320933 A JP 2002320933A JP 2001133591 A JP2001133591 A JP 2001133591A JP 2001133591 A JP2001133591 A JP 2001133591A JP 2002320933 A JP2002320933 A JP 2002320933A
Authority
JP
Japan
Prior art keywords
cleaning
tank
gas
pressure
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001133591A
Other languages
Japanese (ja)
Inventor
Hajime Takeuchi
一 竹内
Setsuzo Takeuchi
節三 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON KAKOKI KOGYO KK
Original Assignee
NIPPON KAKOKI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON KAKOKI KOGYO KK filed Critical NIPPON KAKOKI KOGYO KK
Priority to JP2001133591A priority Critical patent/JP2002320933A/en
Publication of JP2002320933A publication Critical patent/JP2002320933A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a washing unit which stops the air pollution problem from occurring by not exhausting the exhaust into the air when changing the pressure, which was impossible in the conventional washing units which emitted solvent vapor into the air. SOLUTION: A gas circulating path 21 is provided at a washing tank 12, and a refrigerant recovery device 22, a second vacuum valve 23, a second vacuum pump 24, a non-return valve 25, a storage tank 26 and a gas supplying valve 27 are provided at this gas circulating path 21. A pressurized condition under which gas, whose main component is nitrogen gas, stored in the storage tank 26 is supplied into the washing 12 tank through the gas circulating path 21; and a vacuum condition under which the gas in the washing tank is recovered into the storage tank are repeated alternately to accelerate the washing.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は洗浄槽に洗浄対象物
(ワーク)を収納し、この洗浄槽に洗浄液を導入して洗
浄を行うと共に洗浄液に掛ける圧力を変化させることで
洗浄を促す形式の洗浄装置の改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a type in which an object to be cleaned (work) is stored in a cleaning tank, a cleaning liquid is introduced into the cleaning tank to perform cleaning, and cleaning is promoted by changing a pressure applied to the cleaning liquid. It relates to improvement of a cleaning device.

【0002】[0002]

【従来の技術】図8は従来の洗浄装置の原理図であり、
この洗浄装置100は、蓋101を備えた洗浄槽102
と、洗浄液を回収する洗浄液タンク103と、洗浄槽1
02に外気を導入する外気注入管104及び空気供給弁
105と、洗浄槽102内のガスを排気する排気管10
6と、この排気管106に介設した冷媒回収機107、
排気弁108及び真空ポンプ109とからなる。
2. Description of the Related Art FIG. 8 is a principle diagram of a conventional cleaning apparatus.
This cleaning apparatus 100 includes a cleaning tank 102 having a lid 101.
And a cleaning liquid tank 103 for collecting the cleaning liquid, and a cleaning tank 1
02, an outside air injection pipe 104 for introducing outside air and an air supply valve 105, and an exhaust pipe 10 for exhausting gas in the cleaning tank 102.
6, a refrigerant recovery machine 107 provided in the exhaust pipe 106,
It comprises an exhaust valve 108 and a vacuum pump 109.

【0003】前記洗浄装置100の作用を述べると、先
ず、蓋101を開けてワーク111を洗浄槽102に収
納し、蓋101を閉じ、空気供給弁105は閉じてお
き、液ストップ弁112及び排気弁108を開き、真空
ポンプ109を運転する。すると、洗浄槽102の内圧
が大気圧未満になり、この圧力に応じて洗浄液タンク1
03の洗浄液が洗浄槽102へ移動する。
The operation of the cleaning device 100 will be described. First, the lid 101 is opened, the work 111 is stored in the cleaning tank 102, the lid 101 is closed, the air supply valve 105 is closed, the liquid stop valve 112 and the exhaust gas are exhausted. The valve 108 is opened, and the vacuum pump 109 is operated. Then, the internal pressure of the cleaning tank 102 becomes lower than the atmospheric pressure.
The cleaning liquid 03 moves to the cleaning tank 102.

【0004】洗浄液113の液面114が図のレベルに
達したら、液ストップ弁112を閉じ、真空ポンプ10
9の排気作用により、洗浄液113の上方空間の圧力を
5kPaまで下げる。次に、排気弁108を閉じて、空
気供給弁105を開き洗浄液113の上方空間へ外気を
供給して、40kPa(約0.4気圧)まで圧力を上げ
る。
When the liquid level 114 of the cleaning liquid 113 reaches the level shown in the figure, the liquid stop valve 112 is closed and the vacuum pump 10
The pressure in the space above the cleaning liquid 113 is reduced to 5 kPa by the evacuation action of No. 9. Next, the exhaust valve 108 is closed, the air supply valve 105 is opened, and outside air is supplied to the space above the cleaning liquid 113 to increase the pressure to 40 kPa (about 0.4 atm).

【0005】炭化水素洗浄剤は可燃物であり、取扱いを
誤ると爆発する。大気圧未満の洗浄剤蒸気中に空気を吹
込んで圧力を上げると、ガス中の酸素濃度が上昇し、爆
発限界に近づく。そこで、圧力上昇を40kPaに留め
ることで、危険を回避する。これが、約0.4気圧まで
しか圧力を上げないことの理由である。
[0005] Hydrocarbon detergents are combustible and explode if mishandled. When air is blown into the cleaning agent vapor at a pressure lower than the atmospheric pressure to increase the pressure, the oxygen concentration in the gas increases and approaches the explosion limit. Therefore, danger is avoided by keeping the pressure rise to 40 kPa. This is the reason that the pressure is increased only to about 0.4 atm.

【0006】図9(a)〜(c)は従来の圧力変動によ
る洗浄作用説明図である。(a)はワーク111の底に
設けた行き止まり穴115を示し、洗浄開始時(98k
Pa)に、排気しきれなかった空気による小さな気泡1
16が行き止まり穴115に貼りついていることを示
す。気泡116は便宜上1個とするが、一般には複数で
ある。(b)において、真空排気により洗浄液に掛る圧
力が40kPaになれば、気泡116は膨らむ。(c)
において、真空排気により洗浄液に掛る圧力が5kPa
になれば、気泡116は更に膨らむ。
FIGS. 9 (a) to 9 (c) are illustrations of a conventional cleaning action due to pressure fluctuation. (A) shows a dead end hole 115 provided at the bottom of the work 111, and at the start of cleaning (98k
Pa), small bubbles 1 due to air that could not be exhausted
No. 16 is attached to the dead end hole 115. The number of the bubbles 116 is one for convenience, but a plurality is generally used. In (b), when the pressure applied to the cleaning liquid by evacuation reaches 40 kPa, the bubbles 116 expand. (C)
, The pressure applied to the cleaning liquid by evacuation is 5 kPa
, The bubble 116 further expands.

【0007】以降、圧力を変動させることで(b)と
(c)とを交互に繰り返すと、気泡116の攪拌作用に
より、洗浄液113を行き止まり穴115に作用させる
ことができ、通常では洗浄しにくい箇所であっても洗浄
可能になる。これが圧力変動による洗浄法の効果であ
る。
[0007] Thereafter, if the pressure (b) and (c) are alternately repeated by changing the pressure, the cleaning liquid 113 can be caused to act on the dead-end holes 115 due to the stirring action of the bubbles 116, so that cleaning is usually difficult. It is possible to wash even at the place. This is the effect of the cleaning method due to pressure fluctuation.

【0008】図10は従来の圧力変動による洗浄法の圧
力波形図であり、縦軸を洗浄液に掛る圧力、横軸を時間
とすれば、圧力は図のように変動する。すなわち、爆発
の回避するために40kPaを上限として変動させる。
すると、図9(b),(c)のごとく気泡116が拡縮
する。
FIG. 10 is a pressure waveform diagram of the conventional cleaning method based on pressure fluctuation. If the vertical axis is the pressure applied to the cleaning liquid and the horizontal axis is time, the pressure fluctuates as shown in the figure. That is, in order to avoid an explosion, the upper limit is changed to 40 kPa.
Then, the bubble 116 expands and contracts as shown in FIGS. 9B and 9C.

【0009】[0009]

【発明が解決しようとする課題】しかし、図9(b),
(c)に示す通り、気泡116の拡縮は不十分であり、
行き止まり穴115が深い若しくは大きい場合には洗浄
に時間が掛ることになる。
However, as shown in FIG.
As shown in (c), the expansion and contraction of the bubble 116 is insufficient,
When the dead end hole 115 is deep or large, it takes a long time for cleaning.

【0010】また、図8において1サイクル毎に真空弁
108を開いて液面上方空間のガスを真空ポンプ109
の作用で屋外へ排出するが、このときの排気には空気に
多量の洗浄液蒸気が含まれている。この洗浄液蒸気は冷
媒回収機107で回収するが、回収しきれなかったもの
が排気とともに屋外に至る。このことは大気汚染の要因
となる。
In FIG. 8, a vacuum valve 108 is opened for each cycle so that gas in the space above the liquid surface is pumped by a vacuum pump 109.
The exhaust air at this time contains a large amount of cleaning liquid vapor in the air. The cleaning liquid vapor is collected by the refrigerant recovery unit 107, but the unrecovered liquid reaches the outside together with the exhaust gas. This causes air pollution.

【0011】そこで、本発明の目的は大気汚染の防止を
図ると共に圧力変動幅を拡大することで能率よく洗浄を
行うことのできる技術を提供することにある。
It is an object of the present invention to provide a technique capable of efficiently cleaning by preventing air pollution and expanding the pressure fluctuation range.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するため
に請求項1は、洗浄槽に洗浄対象物を収納し、この洗浄
槽に炭化水素系若しくは有機溶剤系洗浄液を導入して洗
浄を行うと共に洗浄液に掛ける圧力を変化させることで
洗浄を促す形式の洗浄装置において、浄槽の外に窒素ガ
スを主成分とするガスを蓄えるストレージタンクを設
け、洗浄槽内の洗浄液に掛ける圧力を微小にするときに
は洗浄液の液面上方空間から排気したガスをストレージ
タンクに蓄え、洗浄槽内の洗浄液に掛ける圧力を増大す
るときにはストレージタンクに蓄えたガスを洗浄液の液
面上方空間へ戻すガス循環路を、洗浄装置に付設したこ
とを特徴とする。
According to a first aspect of the present invention, an object to be cleaned is stored in a cleaning tank, and a hydrocarbon-based or organic solvent-based cleaning liquid is introduced into the cleaning tank to perform cleaning. At the same time, in a cleaning device that promotes cleaning by changing the pressure applied to the cleaning liquid, a storage tank that stores a gas containing nitrogen gas as the main component is provided outside the cleaning tank, and the pressure applied to the cleaning liquid in the cleaning tank is extremely small. When performing, the gas exhausted from the space above the liquid level of the cleaning liquid is stored in the storage tank. It is characterized by being attached to a cleaning device.

【0013】ストレージタンクに蓄えた窒素ガスを主成
分とするガスを洗浄槽に供給する加圧状態と、洗浄槽内
のガスをストレージタンクに回収する真空状態とを交互
に繰り返して洗浄を促す。すなわち、圧力を変化させる
ときに排気を大気へ排出しないので、大気汚染の問題は
起こらない。また、槽内に窒素ガスを吹込むことで爆発
を誘発する酸素の存在を排除することができる。このよ
うに、洗浄液蒸気が爆発する心配はなく洗浄液を大気圧
以上に加圧することが可能になり、圧力変動幅を従来よ
り大幅に増加することができ洗浄性能を大幅に向上させ
ることができる。
The cleaning is promoted by alternately repeating a pressurized state in which a gas containing nitrogen gas as a main component stored in the storage tank is supplied to the cleaning tank and a vacuum state in which the gas in the cleaning tank is collected in the storage tank. That is, since the exhaust gas is not exhausted to the atmosphere when the pressure is changed, the problem of air pollution does not occur. Further, by blowing nitrogen gas into the tank, the presence of oxygen that induces an explosion can be eliminated. As described above, there is no fear that the cleaning liquid vapor explodes, and the cleaning liquid can be pressurized to the atmospheric pressure or higher, the pressure fluctuation width can be greatly increased, and the cleaning performance can be greatly improved.

【0014】請求項2は、ガス循環路に少なくとも大気
圧を超える圧力の窒素ガスを注入する窒素ガス供給路を
付設したことを特徴とする。
A second aspect of the present invention is characterized in that the gas circulation path is provided with a nitrogen gas supply path for injecting nitrogen gas at a pressure exceeding at least atmospheric pressure.

【0015】窒素ガスはストレージタンクに回収するた
め、窒素ガスの補充は原則として必要ない。しかし、洗
浄サイクルを続けると窒素ガスが洩れるなどして目減り
することが考えられるため、ガス循環路に窒素ガス供給
路を常備する。
Since nitrogen gas is collected in the storage tank, replenishment of nitrogen gas is not required in principle. However, if the cleaning cycle is continued, the gas may be reduced due to leakage of nitrogen gas or the like. Therefore, a nitrogen gas supply path is always provided in the gas circulation path.

【0016】[0016]

【発明の実施の形態】本発明の実施の形態を添付図に基
づいて以下に説明する。図1は本発明に係る洗浄装置の
原理図であり、洗浄装置10は蓋11を備えた洗浄槽1
2と、洗浄液13を回収する洗浄液タンク14及び液ス
トップ弁16と、始めに洗浄槽12内を排気する排気管
17、第1真空ポンプ18並びに第1真空弁19と、洗
浄槽12に付設したガス循環路21と、このガス循環路
21に介設した冷媒回収機22、第2真空弁23、第2
真空ポンプ24、逆止弁25、ストレージタンク26並
びにガス供給弁27と、前記ストレージタンク26へ大
気圧を超える高圧の窒素ガスを供給する窒素ガス供給路
30(この窒素ガス供給路30は窒素ボンベ31、管3
2、圧力調整弁33とからなる。)と、圧力調整弁33
を制御する圧力センサ34及び圧力制御部35と、スト
レージタンク26から洗浄装置10の底へ延ばしたバブ
リング配管37及びバブリング弁38とからなる。
Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a principle view of a cleaning device according to the present invention. A cleaning device 10 includes a cleaning tank 1 having a lid 11.
2, a cleaning liquid tank 14 for recovering the cleaning liquid 13 and a liquid stop valve 16, an exhaust pipe 17 for first evacuating the cleaning tank 12, a first vacuum pump 18 and a first vacuum valve 19, and a cleaning tank 12. A gas circulation path 21, a refrigerant recovery device 22 provided in the gas circulation path 21, a second vacuum valve 23,
A vacuum pump 24, a check valve 25, a storage tank 26, a gas supply valve 27, and a nitrogen gas supply path 30 for supplying high-pressure nitrogen gas exceeding atmospheric pressure to the storage tank 26 (the nitrogen gas supply path 30 is a nitrogen cylinder). 31, tube 3
2. It comprises a pressure regulating valve 33. ) And the pressure regulating valve 33
, And a bubbling pipe 37 and a bubbling valve 38 extending from the storage tank 26 to the bottom of the cleaning device 10.

【0017】以上の構成からなる洗浄槽12の作用を次
に説明するが、後述のフロー(図2〜図4)では説明を
簡便にするために、第1真空ポンプ18をP1、第2真
空ポンプ24をP2、第1真空弁19をV1、第2真空
弁23をV2、ガス供給弁27をV3、バブリング弁3
8をV4、液ストップ弁16をV5と略記する。
The operation of the cleaning tank 12 having the above configuration will be described below. In the flow described later (FIGS. 2 to 4), the first vacuum pump 18 is set to P1 and the second Pump 24 is P2, first vacuum valve 19 is V1, second vacuum valve 23 is V2, gas supply valve 27 is V3, bubbling valve 3
8 is abbreviated as V4, and the liquid stop valve 16 is abbreviated as V5.

【0018】図2は本発明に係る洗浄作業の準備工程フ
ロー図であり、ST××はステップ番号を示す。このフ
ローは図1を参照しつつ説明する。 ST01:V1〜V5の全てを閉じる。 ST02:蓋を開けて洗浄対象物であるワークを投入し
蓋を閉じる。槽内は空気雰囲気であり、圧力は大気圧
(98kPa)である。 ST03:V1を開く。 ST04:P1(第1真空ポンプ)の作用で槽内を5k
Paまで減圧する。これで、槽内の空気量はほぼ0にな
る。
FIG. 2 is a flow chart of a preparation process for a cleaning operation according to the present invention, where STxx indicates step numbers. This flow will be described with reference to FIG. ST01: Close all of V1 to V5. ST02: The lid is opened, a work to be cleaned is thrown in, and the lid is closed. The inside of the tank is an air atmosphere, and the pressure is atmospheric pressure (98 kPa). ST03: Open V1. ST04: 5 k in the tank by the action of P1 (first vacuum pump)
Reduce the pressure to Pa. Thus, the amount of air in the tank becomes almost zero.

【0019】ST05:V1を閉じ、V5を開く。 ST06:洗浄槽が低圧(真空)であるため、洗浄タン
ク内の洗浄液が洗浄槽に移る。この際に洗浄液は波立つ
ため初期的な洗浄をなすことできる。 ST07:槽内の洗浄液の液面レベルが所定レベルに達
したらV5を閉じる。
ST05: V1 is closed and V5 is opened. ST06: Since the cleaning tank is at a low pressure (vacuum), the cleaning liquid in the cleaning tank moves to the cleaning tank. At this time, since the cleaning liquid is wavy, initial cleaning can be performed. ST07: When the liquid level of the cleaning liquid in the tank reaches a predetermined level, V5 is closed.

【0020】ST08:ストレージタンクに予め窒素ガ
スを封じ込めておき、V3を開ける。 ST09:窒素ガスを液面上方空間へ吹込み、大気圧を
超える130kpa(1.32気圧)にする。 ST10:V3を閉じる。
ST08: Nitrogen gas is sealed in the storage tank in advance, and V3 is opened. ST09: Nitrogen gas is blown into the space above the liquid surface to make it 130 kpa (1.32 atm) exceeding atmospheric pressure. ST10: Close V3.

【0021】図3は本発明に係る圧力変動による洗浄工
程フロー図である。 ST11:V2を開く。 ST12:P2(第2真空ポンプ)により、槽内の液面
上方空間のガスを排気し、これをストレージタンクへ送
る。槽内が5kPaになるまで続ける。
FIG. 3 is a flow chart of a cleaning process by pressure fluctuation according to the present invention. ST11: Open V2. ST12: The gas in the space above the liquid level in the tank is exhausted by P2 (second vacuum pump) and sent to the storage tank. Continue until the inside of the tank reaches 5 kPa.

【0022】ST13:排気したガス(主として窒素ガ
ス)をストレージタンクに溜める。洗浄液蒸気は大部分
を冷媒回収機で回収するが、回収しきれない分はストレ
ージタンクに至る。真空ポンプの押込作用でストレージ
タンクは圧力が高まるが、この圧力が130kPaに達
しない場合には圧力調整弁(図1の符号33)を開いて
高圧の窒素ガスを補充することができる。
ST13: The exhausted gas (mainly nitrogen gas) is stored in a storage tank. Most of the cleaning liquid vapor is collected by the refrigerant recovery machine, but the remaining part reaches the storage tank. The pressure of the storage tank increases due to the pushing action of the vacuum pump. If the pressure does not reach 130 kPa, the pressure regulating valve (reference numeral 33 in FIG. 1) can be opened to replenish high-pressure nitrogen gas.

【0023】ST14:V2を閉じ、V3を開く。 ST15:するとストレージタンクに蓄えた窒素ガスを
主体としたガスが、槽内の至る。これは槽内の圧力が1
30kPaになるまで続ける。 ST16:圧力が130kPaに達したらV3を閉じ
る。 ST17:洗浄を終了するか否かを判断する。一般に洗
浄は時間で管理するため、時間が所定時間に達していな
いときにはNoであり、ST11〜ST17を繰り返
す。
ST14: V2 is closed and V3 is opened. ST15: Then, the gas mainly composed of the nitrogen gas stored in the storage tank reaches the inside of the tank. This is because the pressure in the tank is 1
Continue until the pressure reaches 30 kPa. ST16: When the pressure reaches 130 kPa, V3 is closed. ST17: It is determined whether to end the cleaning. Generally, the cleaning is controlled by time, so if the time has not reached the predetermined time, the result is No, and ST11 to ST17 are repeated.

【0024】図4は本発明に係る圧力変動の波形図であ
り、縦軸を液面上方空間の圧力、横軸を時間とすれば、
槽内圧力は130kPaから5kPaのまでを変動す
る。従来は上限圧が40kPaであったが、本発明では
窒素ガスを用いることで上限圧の大幅増加を可能にした
ことを特徴とする。
FIG. 4 is a waveform diagram of the pressure fluctuation according to the present invention, where the vertical axis represents the pressure in the space above the liquid surface and the horizontal axis represents time.
The tank pressure varies from 130 kPa to 5 kPa. Conventionally, the upper limit pressure was 40 kPa, but the present invention is characterized in that the use of nitrogen gas enables a significant increase in the upper limit pressure.

【0025】図5(a)〜(c)は本発明での圧力変動
による洗浄作用説明図である。(a)は洗浄対象物とし
てのワーク41の底に設けた行き止まり穴42を示し、
洗浄開始時(98kPa)には、排気しきれなかった微
小の気泡43が行き止まり穴42に貼りついている。
(b)において、加圧により洗浄液に掛る圧力が130
kPaになれば、気泡43は縮む。(c)において、真
空排気により洗浄液に掛る圧力が5kPaになれば、気
泡43は大きく膨らむ。
FIGS. 5 (a) to 5 (c) are illustrations of the cleaning action due to pressure fluctuation in the present invention. (A) shows a dead end hole 42 provided at the bottom of a work 41 as an object to be cleaned,
At the start of cleaning (98 kPa), minute air bubbles 43 that could not be exhausted are stuck to the dead ends 42.
In (b), the pressure applied to the cleaning liquid by pressurization is 130.
When the pressure reaches kPa, the bubbles 43 shrink. In (c), when the pressure applied to the cleaning liquid by evacuation becomes 5 kPa, the bubbles 43 expand significantly.

【0026】以降、圧力を変動させることで(b)と
(c)とを交互に繰り返すと、気泡43の攪拌作用によ
り、洗浄液13を行き止まり穴42に作用させることが
でき、通常では洗浄しにくい箇所であっても洗浄可能に
なる。すなわち、本発明では(b)での気泡43の体積
と、(c)での気泡43の体積とが激変するため、攪拌
効果が従来の数倍に達し、洗浄時間の大幅な短縮が図れ
る。または、攪拌作用が強力になったので、より細部を
洗浄することができる。
Thereafter, when the pressures are varied to alternately perform the steps (b) and (c), the cleaning liquid 13 can act on the dead-end holes 42 due to the stirring action of the bubbles 43, and it is usually difficult to perform cleaning. It is possible to wash even at the place. That is, in the present invention, since the volume of the bubble 43 in (b) and the volume of the bubble 43 in (c) change drastically, the stirring effect reaches several times that of the related art, and the cleaning time can be greatly reduced. Alternatively, since the stirring action is enhanced, it is possible to wash more details.

【0027】図6は本発明に係るバブリング作用図であ
り、本発明の洗浄装置10ではバブリング、すなわち泡
立ち洗浄を実施することができる。すなわち、槽内が低
圧(5kPa)のときに、V4を開けばストレージタン
ク26内の窒素ガスが洗浄槽12内に至り、膨張しなが
ら洗浄液13中を移動する。従って、洗浄液は激しく波
立つ。このようなバブリングは単独で実施すること、図
3のフローに平行して実施することの何れであってもよ
い。
FIG. 6 is a diagram showing a bubbling operation according to the present invention. In the cleaning apparatus 10 of the present invention, bubbling, that is, bubbling cleaning can be performed. That is, when the inside of the tank is at a low pressure (5 kPa), when V4 is opened, the nitrogen gas in the storage tank 26 reaches the inside of the washing tank 12 and moves in the washing liquid 13 while expanding. Therefore, the cleaning liquid vibrates violently. Such bubbling may be performed independently, or may be performed in parallel with the flow of FIG.

【0028】図7は本発明に係る乾燥作業のフロー図で
あり、このフローは図3に続く。 ST21:V5及びV3を開ける。 ST22:V3を開けることで洗浄液の液面に下向き圧
力を掛けることができ、この結果、槽内の洗浄液を洗浄
液タンクへ戻す。 ST23:V3及びV5を閉じる。
FIG. 7 is a flowchart of the drying operation according to the present invention, and this flow is continued from FIG. ST21: Open V5 and V3. ST22: By opening V3, a downward pressure can be applied to the liquid level of the cleaning liquid, and as a result, the cleaning liquid in the tank is returned to the cleaning liquid tank. ST23: V3 and V5 are closed.

【0029】ST24:次にV2を開く。 ST25:P2(第2真空ポンプ)で槽内を減圧する。 ST26:真空にすることでワークに付着していた洗浄
液が蒸発する。これを真空乾燥と言う。 ST27:この間の排気をストレージタンクに溜める。
排気には洗浄液蒸気が含まれているが、この蒸気を屋外
へ放出しない。 ST28:乾燥終了までは真空乾燥を継続する。
ST24: Next, V2 is opened. ST25: The pressure in the tank is reduced by P2 (second vacuum pump). ST26: The cleaning liquid attached to the work evaporates by applying a vacuum. This is called vacuum drying. ST27: The exhaust gas during this period is stored in a storage tank.
The exhaust contains cleaning liquid vapor, but does not release this vapor to the outdoors. ST28: Vacuum drying is continued until drying is completed.

【0030】ST29:乾燥が終了したら、V2を閉じ
て排気を止める。 ST30:V3を開いて槽内を98kPaに戻し、V3
を閉じる。このV3を開ける代わりに図示せぬ空気供給
弁で外気を槽内へ注入してもよい。 ST31:扉を開いてワークを取出す。
ST29: When the drying is completed, V2 is closed to stop the exhaust. ST30: Open V3, return the inside of the tank to 98 kPa, and
Close. Instead of opening V3, outside air may be injected into the tank by an air supply valve (not shown). ST31: Open the door and take out the work.

【0031】以上のフロー及び図1から明らかなよう
に、本発明装置ではガス循環路を用いてストレージタン
クに蓄えた窒素ガスを主成分とするガスを洗浄槽に供給
する加圧状態と、洗浄槽内のガスをストレージタンクに
回収する真空状態とを交互に繰り返して洗浄を促す。す
なわち、圧力を変化させるときに排気を大気へ排出しな
いので、大気汚染の問題は起こらない。また、槽内に窒
素ガスを吹込むため、洗浄液蒸気が爆発する心配はなく
洗浄液を大気圧以上に加圧することが可能になり、圧力
変動幅を従来より大幅に増加することができ洗浄性能を
大幅に向上させることができる。
As is apparent from the above flow and FIG. 1, the apparatus of the present invention uses a gas circulation path to supply a gas containing nitrogen gas as a main component stored in a storage tank to a cleaning tank, Cleaning is promoted by alternately repeating the vacuum state in which the gas in the tank is collected in the storage tank. That is, since the exhaust gas is not exhausted to the atmosphere when the pressure is changed, the problem of air pollution does not occur. In addition, since nitrogen gas is blown into the tank, there is no risk of explosion of the cleaning liquid vapor, and it is possible to pressurize the cleaning liquid above atmospheric pressure. It can be greatly improved.

【0032】尚、実施の形態ではストレージタンクへ窒
素ガス供給路を接続したが、この窒素ガス供給路はガス
循環路の何処に接続してもよい。
In the embodiment, the nitrogen gas supply path is connected to the storage tank, but the nitrogen gas supply path may be connected to any part of the gas circulation path.

【0033】[0033]

【発明の効果】本発明は上記構成により次の効果を発揮
する。請求項1は、ガス循環路を用いてストレージタン
クに蓄えた窒素ガスを主成分とするガスを洗浄槽に供給
する加圧状態と、洗浄槽内のガスをストレージタンクに
回収する真空状態とを交互に繰り返して洗浄を促す。す
なわち、圧力を変化させるときに排気を大気へ排出しな
いので、大気汚染の問題は起こらない。また、槽内に窒
素ガスを吹込むため、洗浄液蒸気が爆発する心配はなく
洗浄液を大気圧以上に加圧することが可能になり、圧力
変動幅を従来より大幅に増加することができ洗浄性能を
大幅に向上させることができる。
According to the present invention, the following effects are exhibited by the above configuration. Claim 1 is a pressurized state in which a gas containing nitrogen gas stored in a storage tank as a main component is supplied to a cleaning tank using a gas circulation path, and a vacuum state in which gas in the cleaning tank is collected in the storage tank. Prompt washing alternately. That is, since the exhaust gas is not exhausted to the atmosphere when the pressure is changed, the problem of air pollution does not occur. In addition, since nitrogen gas is blown into the tank, there is no risk of explosion of the cleaning liquid vapor, and the cleaning liquid can be pressurized to a pressure higher than the atmospheric pressure. It can be greatly improved.

【0034】請求項2は、ガス循環路に少なくとも大気
圧を超える圧力の窒素ガスを注入する窒素ガス供給路を
付設したことを特徴とし、洗浄サイクルを続けると窒素
ガスが洩れるなどして目減りすることが考えられるた
め、ガス循環路に窒素ガス供給路を常備することで、安
定した洗浄サイクルを続けることができる。
A second aspect of the present invention is characterized in that the gas circulation path is provided with a nitrogen gas supply path for injecting a nitrogen gas having a pressure exceeding at least atmospheric pressure. If the cleaning cycle is continued, the nitrogen gas leaks and decreases. Therefore, a stable cleaning cycle can be continued by always providing a nitrogen gas supply path in the gas circulation path.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る洗浄装置の原理図FIG. 1 is a principle diagram of a cleaning apparatus according to the present invention.

【図2】本発明に係る洗浄作業の準備工程フロー図FIG. 2 is a flowchart of a preparation process for a cleaning operation according to the present invention.

【図3】本発明に係る圧力変動による洗浄工程フロー図FIG. 3 is a flowchart of a cleaning process by pressure fluctuation according to the present invention.

【図4】本発明に係る圧力変動の波形図FIG. 4 is a waveform diagram of pressure fluctuation according to the present invention.

【図5】本発明での圧力変動による洗浄作用説明図FIG. 5 is an explanatory diagram of a cleaning action due to pressure fluctuation in the present invention.

【図6】本発明に係るバブリング作用図FIG. 6 is a diagram of a bubbling operation according to the present invention.

【図7】本発明に係る乾燥作業のフロー図FIG. 7 is a flowchart of a drying operation according to the present invention.

【図8】従来の洗浄装置の原理図FIG. 8 is a principle diagram of a conventional cleaning device.

【図9】従来の圧力変動による洗浄作用説明図FIG. 9 is an explanatory view of a conventional cleaning action due to pressure fluctuation.

【図10】従来の圧力変動による洗浄法の圧力波形図FIG. 10 is a pressure waveform diagram of a conventional cleaning method using pressure fluctuation.

【符号の説明】[Explanation of symbols]

10…洗浄装置、12…洗浄槽、13…洗浄液、21…
ガス循環路、23…第2真空弁、24…第2真空ポン
プ、26…ストレージタンク、30…窒素ガス供給路、
31…窒素ボンベ、33…圧力調整弁、34…圧力セン
サ、35…圧力制御部、41…洗浄対象物(ワーク)、
42…行き止まり穴、43…気泡。
10 cleaning device, 12 cleaning tank, 13 cleaning solution, 21
Gas circulation path, 23 second vacuum valve, 24 second vacuum pump, 26 storage tank, 30 nitrogen gas supply path,
Reference numeral 31 denotes a nitrogen cylinder, 33 denotes a pressure regulating valve, 34 denotes a pressure sensor, 35 denotes a pressure controller, 41 denotes an object to be cleaned (work),
42: dead end hole, 43: air bubble.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 洗浄槽に洗浄対象物を収納し、この洗浄
槽に炭化水素系若しくは有機溶剤系洗浄液を導入して洗
浄を行うと共に洗浄液に掛ける圧力を変化させることで
洗浄を促す形式の洗浄装置において、 前記洗浄槽の外に窒素ガスを主成分とするガスを蓄える
ストレージタンクを設け、洗浄槽内の洗浄液に掛ける圧
力を微小にするときには洗浄液の液面上方空間から排気
したガスを前記ストレージタンクに蓄え、洗浄槽内の洗
浄液に掛ける圧力を増大するときにはストレージタンク
に蓄えたガスを洗浄液の液面上方空間へ戻すガス循環路
を、前記洗浄装置に付設したことを特徴とする洗浄装
置。
1. A cleaning type in which an object to be cleaned is stored in a cleaning tank, a cleaning liquid is introduced into the cleaning tank by introducing a hydrocarbon-based or organic solvent-based cleaning liquid, and cleaning is promoted by changing a pressure applied to the cleaning liquid. In the apparatus, a storage tank for storing a gas containing nitrogen gas as a main component is provided outside the cleaning tank, and when the pressure applied to the cleaning liquid in the cleaning tank is reduced, the gas exhausted from the space above the liquid level of the cleaning liquid is stored in the storage tank. A cleaning device, wherein a gas circulation path for returning gas stored in a storage tank to a space above the liquid level of the cleaning liquid when increasing pressure applied to the cleaning liquid in the cleaning tank and increasing the pressure applied to the cleaning liquid in the cleaning tank is provided in the cleaning apparatus.
【請求項2】 前記ガス循環路に少なくとも大気圧を超
える圧力の窒素ガスを注入する窒素ガス供給路を付設し
たことを特徴とする請求項1記載の洗浄装置。
2. The cleaning apparatus according to claim 1, wherein a nitrogen gas supply path for injecting a nitrogen gas at a pressure exceeding at least atmospheric pressure is provided in the gas circulation path.
JP2001133591A 2001-04-27 2001-04-27 Washing unit Pending JP2002320933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001133591A JP2002320933A (en) 2001-04-27 2001-04-27 Washing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001133591A JP2002320933A (en) 2001-04-27 2001-04-27 Washing unit

Publications (1)

Publication Number Publication Date
JP2002320933A true JP2002320933A (en) 2002-11-05

Family

ID=18981421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001133591A Pending JP2002320933A (en) 2001-04-27 2001-04-27 Washing unit

Country Status (1)

Country Link
JP (1) JP2002320933A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011235211A (en) * 2010-05-07 2011-11-24 Miura Co Ltd Cleaning apparatus
CN105149263A (en) * 2015-07-02 2015-12-16 无锡新弘田环保技术有限公司 Cleaning and drying method and device through steam and superheated water
JP2019018139A (en) * 2017-07-14 2019-02-07 中外炉工業株式会社 Cleaning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011235211A (en) * 2010-05-07 2011-11-24 Miura Co Ltd Cleaning apparatus
CN105149263A (en) * 2015-07-02 2015-12-16 无锡新弘田环保技术有限公司 Cleaning and drying method and device through steam and superheated water
JP2019018139A (en) * 2017-07-14 2019-02-07 中外炉工業株式会社 Cleaning device

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