JP2002307204A - Micro unevenness machining method and micro unevenness machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily form micro unevenness with the difference of elevation of 10 μm or less at a low cost by securing machining accuracy while eliminating the degradation of accuracy caused by changing the grip of a workpiece. SOLUTION: In forming micro unevenness d1 with the difference of elevation of 10 μm or less on the outer peripheral surface WS of the workpiece W, a cutting tool 3 and a super-finishing grinding wheel 4 are held by the same tool holding part 10, and after machining for forming a micro recessed part is carried out by relative movement while cutting into the outer peripheral surface WS of the rotating workpiece W with the cutting tool 3, the tool holding part 10 is slided to move the relative position to the workpiece W while maintaining the held state of the workpiece W, and super-finishing grinding wheel 4 is moved into the same position as the position where the cutting tool 3 was machining, and relatively moved while cutting into the outer peripheral surface WS of the workpiece W to carry out finishing, thus forming the micro unevenness d1 with the difference of elevation of 10 μm or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a method for forming fine grooves having a depth of not more than 10 .mu.m in a circumferential direction on an outer peripheral surface of a toroidal type CVT rolling element. And a fine unevenness processing device.

[0002]

2. Description of the Related Art Conventionally, fine irregularities (for example, a fine continuous spiral groove having a cutting depth of 10 μm or less) are formed on a work surface of a work.
In forming, first, after forming a fine concave portion on the work surface of the work by a precision lathe, finish processing of the convex portion other than the fine concave portion by a super finishing machine (for example, plateau processing) , Depth of cut is 10
Fine continuous spiral grooves of not more than μm were formed.

[0003]

However, in the prior art, as described above, the forming process for the fine concave portion and the finishing process for the convex portion other than the fine concave portion are performed in separate steps, so that the processing accuracy is high. Had limitations. In other words, when a work set on a precision lathe is set on a super-finishing machine again, the processing center of the work is shifted, which may cause problems such as variations in the depth of fine continuous spiral grooves. Was.

As described above, even if the forming process for the fine concave portion and the finishing process for the convex portion other than the fine concave portion are performed in separate steps, the work has a simple shape (for example, a single cylindrical shape). In the case where the processing is performed, it is possible to cope to some extent by increasing the pre-processing accuracy of the portion serving as the processing reference, but there is a problem that the processing cost is high.

On the other hand, when the workpiece has a complicated shape, such as a rolling element of a toroidal type CVT, in which it is difficult to ensure the accuracy, it is difficult to cope with the improvement in the pre-processing accuracy. It has been a conventional problem to solve these problems.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and it is possible to prevent deterioration of accuracy due to re-gripping of a work. Maintaining machining accuracy by holding a concave portion processing tool that forms a fine concave portion on the surface and a finish processing tool that finishes the convex portion other than the fine concave portion formed on the work surface of the work Is possible, so that
An object of the present invention is to provide a fine unevenness processing method and a fine unevenness processing apparatus which can easily and inexpensively form fine unevenness having a height difference of 10 μm or less without increasing the pre-processing accuracy unlike the related art.

[0007]

According to a first aspect of the present invention, there is provided a method for processing fine irregularities, wherein the surface to be processed has a height difference of one.
When forming fine irregularities of 0 μm or less, a concave portion processing tool for forming a fine concave portion on a work surface of a work, and a finish for performing a finishing process for a convex portion other than the fine concave portion formed on the work surface of the work. After holding the processing tool and the same tool holding part in the same tool holding part and moving the cutting tool relative to the surface to be processed of the rotating work while cutting it to form a fine concave part, the holding state of the work By moving the relative position with respect to the workpiece by sliding or rotating the tool holding unit while maintaining the position, the finishing processing tool is moved to the same position as the position where the machining tool was processing the concave portion, and the concave portion is moved. A configuration in which fine irregularities with a height difference of 10 μm or less are formed by performing relative finishing while cutting relative to the surface to be processed of a rotating workpiece that has been processed by a processing tool. The configuration of this fine unevenness processing method is used as means for solving the conventional problems.

According to a second aspect of the present invention, there is provided a method for forming fine concaves and convexes on a work surface of a workpiece by forming fine concaves and convexes having a height difference of 10 μm or less. A processing tool and a finishing tool for finishing a convex portion other than the minute concave portion formed on the surface to be processed of the work are held by the same tool holding portion, and a concave is formed with respect to the processing surface of the rotating work. After performing the processing to form the minute concave portion by moving the tool relatively while cutting the partial processing tool, slide or rotate the tool holding part to move the relative position with the work while maintaining the holding state of the work By moving the finishing tool to a position different from the position where the recessed portion processing tool was processing, the indentation was performed on the surface of the rotating workpiece that the concave portion processing tool processed. Are relatively moved by performing a finishing has a configuration in which difference in height forms a less fine irregularities 10 [mu] m, has the configuration of the fine unevenness processing method and means for solving the conventional problems.

On the other hand, a fine unevenness processing apparatus according to a third aspect of the present invention is a fine unevenness processing apparatus for forming fine unevenness having a height difference of 10 μm or less on a surface to be processed of a work. Work holding part to hold until the end, concave part forming tool to form fine concave part on the work surface of the work, and finish processing to finish convex part other than fine concave part formed on the work surface of the work Equipped with tools,
The concave portion machining tool and the finishing machining tool are movably held at respective predetermined machining start positions at each machining time, and the concave portion machining tool and the finishing machining tool are respectively cut into the work surface of the rotating workpiece. In addition, the apparatus is configured so as to be capable of moving while being moved, and the configuration of the fine unevenness processing apparatus is used as means for solving the conventional problems.

A fine unevenness processing apparatus according to a fourth aspect of the present invention is a fine unevenness processing apparatus for forming fine unevenness having a height difference of 10 μm or less on a surface to be processed of a work, wherein the work is rotated until the work is completed. A work holding part for holding, a concave part forming tool for forming a fine concave part on the work surface of the work, and a finishing processing tool for performing finish processing of a convex part other than the fine concave part formed on the work surface of the work. A tool holder for moving a concave portion machining tool and a finishing machining tool to each predetermined machining start site at each machining time, and holding the workpiece in a feedable manner while cutting the rotating workpiece to be machined, respectively; Part is provided,
The configuration of this fine unevenness processing apparatus is used as means for solving the conventional problems.

The fine unevenness processing apparatus according to claim 5 of the present invention has a configuration in which predetermined processing start portions of each of the concave portion processing tool and the finishing processing tool are set at the same position, and according to claim 6 of the present invention. The micro-asperity processing apparatus has a configuration in which predetermined processing start portions of the concave portion processing tool and the finishing processing tool are set at different positions.

According to a seventh aspect of the present invention, the tool holding section is configured to be movable in two axial directions orthogonal to each other on a plane parallel to the rotation axis of the work. 9. The micro-asperity processing device according to claim 8, wherein the tool holder rotates about two rotation directions orthogonal to each other on a plane parallel to the rotation axis of the work and a rotation axis perpendicular to a plane parallel to the rotation axis of the work. In which at least two of the directions can be moved.

In the fine unevenness processing apparatus according to the ninth aspect of the present invention, the work holding portion holds a plurality of works and sequentially positions each work in a work area by the concave portion processing tool and a work area by the finish processing tool. It is configured to operate to perform.

According to a tenth aspect of the present invention, the tool holding portion holds the concave portion machining tool and the finish machining tool with the same cutting direction or pressing direction with respect to the work surface of the work. In the fine unevenness processing apparatus according to claim 11 of the present invention, the tool holding portion is rotatably supported on a plane parallel to the rotation axis of the work, and the cutting direction or the pressing direction with respect to the work surface of the work. Are held in different directions to hold the recessed portion machining tool and the finish machining tool, and to move the recessed portion machining tool and the finish machining tool to respective predetermined machining start positions by indexing rotation.

According to a twelfth aspect of the present invention, there is provided a fine unevenness processing apparatus, wherein a concave portion processing tool is operated with an axis in a direction orthogonal to a rotation axis of a work as a rotation center axis or a swing center axis to rotate the work rotation axis. A concave portion machining tool driving mechanism for forming a fine concave portion on a surface to be processed of a work having a single radius of curvature with an axis in a direction orthogonal to the direction of curvature as a center of curvature, and rotating an axis in a direction orthogonal to the rotation axis of the work A finishing tool drive mechanism for operating a finishing tool as a center axis or a swing center axis to finish a convex portion other than the fine concave portion formed on the work surface of the workpiece is provided independently of each other. It has a configuration.

In the fine unevenness processing apparatus according to the thirteenth aspect of the present invention, the concave portion machining tool drive mechanism operates in a state where the concave portion machining tool is located at the predetermined machining portion, and the finishing machining tool is moved to the predetermined machining portion. The configuration is such that the finishing tool drive mechanism is switched and operates in the positioned state.

In the fine unevenness processing apparatus according to the present invention, the tool holding portion is provided with a holding portion side engaging portion, and the concave portion machining tool drive mechanism and the finishing machining tool drive mechanism are provided with a drive mechanism side engagement device. A mating portion is provided, and in a state where the holding portion side engaging portion of the tool holding portion and the drive mechanism side engaging portion of the concave portion machining tool drive mechanism are engaged with each other, the concave portion machining tool drive mechanism is connected via the tool holding portion. The driving force is transmitted to the machining tool corresponding to the concave portion, and in a state where the holding portion side engaging portion of the tool holding portion and the driving mechanism side engaging portion of the finishing tool driving mechanism are engaged, the tool holding portion is moved from the finishing tool driving mechanism to the tool holding portion. The driving force is transmitted to the finishing tool via the tool, and the fine unevenness processing apparatus according to the fifteenth aspect of the present invention is configured such that the holding portion side engaging portion of the tool holding portion is formed as a spline or serration, and the concave portion is added. The drive mechanism side engagement part of the tool drive mechanism and the finishing machining tool drive mechanism is a spline or serration, and the tool holding part is slid, and the holding part side engagement part is engaged with the recessed part of the machining tool drive mechanism by the drive mechanism side engagement. The transmission system of the driving force is switched by engaging with any one of the driving mechanism-side engaging portions of the driving mechanism-side engaging portion of the finishing tool driving mechanism.

According to a sixteenth aspect of the present invention, there is provided a micro-asperity processing apparatus comprising: a cutting force applying means or a pressing force applying means of a concave portion machining tool; and a cutting force applying means or a pressing force applying means of a finishing tool. The components are arranged independently on each other.

According to a seventeenth aspect of the present invention, there is provided the fine unevenness processing device, wherein the concave portion processing tool is any one of a grinding, cutting, rolling, superfinishing, lap, and a tool having an electrical or chemical action added thereto. The fine unevenness processing apparatus according to claim 18 of the present invention is characterized in that any one of a grinding, cutting, superfinishing, lap and a tool having an electrical action or a chemical action added thereto is used as a finishing tool. Is adopted.

According to a nineteenth aspect of the present invention, there is provided a fine unevenness processing apparatus, wherein a coolant used in a step of forming a fine concave portion on a work surface of a work by a concave portion processing tool, and a work surface of the work by a finish processing tool. According to a twentieth aspect of the present invention, there is provided a fine unevenness processing apparatus according to the present invention, wherein a grinding part, a cutting part, and a rolling part are used as a concave part processing tool. In the case where the tool of (1) is used, a mist-like coolant is supplied. Between the workpiece that has been subjected to, and the workpiece that has been subjected to finish processing on the convex part other than the minute concave part of the work surface at the processing position by the finishing processing tool. Coolant used in each other resulting chips and processing is configured of arranging the partition plate to prevent the scattering to the other party.

In the method and apparatus for processing fine irregularities according to the present invention, a concave portion forming tool for forming a fine concave portion on a work surface of a work and a convex other than the fine concave portion formed on the work surface of the work. The finishing tools for finishing a part shall include not only the tool itself but also, for example, a tool and a tool device equipped with a spindle for rotating the tool. And the tool stand.

[0022]

According to the method for processing fine irregularities according to the first and second aspects of the present invention, the process for forming a fine concave portion on the surface to be processed of the work is not limited to the process other than the fine concave portion formed on the surface to be processed of the work. Since it is not necessary to set the work once set before finishing work to finish the convex part, deterioration of accuracy is avoided by that much, and machining is performed with the tool on the same tool holding part. Therefore, the processing accuracy depends only on the positioning accuracy of the processing device, and high processing accuracy can be secured. Therefore, it is not necessary to increase the pre-processing accuracy, and the height difference is 1
The formation of the desired fine irregularities of 0 μm or less can be easily and inexpensively formed. In particular, in the method of processing the fine irregularities according to claim 2, the difference between the forming process and the finishing process for the minute concave portions and the apparatus layout due to the shape of the work. Since there is no restriction, it is possible to select the optimum processing according to the intended shape of the fine unevenness, and as a result, the most reasonable fine unevenness processing is performed.

On the other hand, the fine unevenness processing apparatus according to claims 3 to 6 of the present invention has the above-described configuration.
Deterioration of accuracy due to gripping of the work between the forming process and the finishing process for the minute concave portion is prevented, and high working accuracy is ensured because the working accuracy depends only on the positioning accuracy of the device itself. It is not necessary to increase the pre-processing accuracy, and as a result, the height difference can be easily and inexpensively reduced by one.
Fine irregularities of 0 μm or less are formed. In particular, in the fine irregularity processing apparatus according to claim 6, the desired fine irregularities are not affected by differences in processing and restrictions on the apparatus layout due to the shape of the work. The fine unevenness processing most suitable for the shape is performed.

[0024] In the fine unevenness processing apparatus according to claim 7 of the present invention, the processing point is always located on the plane including the rotation axis of the work, and the tool is controlled by simultaneously controlling two axes. By operating the holding part, it is possible to cope with a work having a complicated shape. In the fine unevenness processing apparatus according to claim 8 of the present invention, the work having a spherical shape is formed. Processing with higher precision is performed on the surface.

In the fine unevenness processing apparatus according to the ninth aspect of the present invention, when the work holding portion holding a plurality of works is operated, the positioning of each work is performed in the processing area by the concave portion processing tool and the processing area by the finishing processing tool. Is performed, the forming process of the fine concave portion by the concave portion processing tool and the finishing process by the finishing processing tool are sequentially performed, that is, the processing of a plurality of workpieces is performed on one facility. If, on the other hand, processing is not performed while processing is performed on the other hand, the work can be replaced on the other side, and the time required for the work replacement can be shortened. Depending on the arrangement of the concave machining tool and the finishing machining tool, simultaneous machining can be performed by moving one tool holder. Next, so that the productivity can be improved.

In the fine unevenness processing apparatus according to the tenth aspect of the present invention, since the above-described configuration is employed, when forming the fine unevenness on the work surface of the work, the concave and partial processing tool and the finish processing tool are processed. The cutting direction becomes the same, and the accuracy of the height difference of the unevenness is improved,
Since the fine unevenness processing apparatus according to claim 11 of the present invention has the above-described configuration, similar to the sixth and ninth aspects, the fine unevenness processing most suitable for the shape of the desired fine unevenness is performed, and the work of the workpiece is formed. The replacement time can be shortened and the productivity can be improved.

In the fine unevenness processing apparatus according to the twelfth aspect of the present invention, since it has the above-described structure, the work piece having a single radius of curvature whose center of curvature is the axis perpendicular to the rotation axis of the work. A fine concave and convex portion can be formed on the processing surface with high precision. In addition, a concave portion forming tool driving mechanism for forming a fine concave portion on the work surface of the work, and a fine concave portion formed on the work surface of the work. Since the finishing tool drive mechanism for performing the finishing of the convex portion other than is independent of each other, the processing feed and operation suitable for each of the forming process and the finishing process for the minute concave portion will be performed, and therefore, the intended It is possible to select the most suitable processing for the fine uneven shape, and the processed surface quality becomes good.

In the fine unevenness processing apparatus according to the thirteenth aspect of the present invention, since the above-described configuration is adopted, it is possible to switch between the two mechanisms of the concave portion processing tool driving mechanism and the finishing processing tool driving mechanism at a time. In addition to shortening the time, for example, when the concave portion machining tool drive mechanism and the finishing machining tool drive mechanism have a rotation center or a swing center, if both drive mechanisms are switched on the same axis, Since the position of the center of rotation or the center of oscillation does not deviate in both the forming process and the finishing process for the minute concave portion, good processing accuracy can be obtained.

In the fine unevenness processing apparatus according to the fourteenth aspect of the present invention, the holding portion side engaging portion of the tool holding portion is engaged with the driving mechanism side engaging portion of the concave portion machining tool driving mechanism or the driving mechanism of the finishing machining tool driving mechanism. When engaged with the side engaging portion, the driving force is transmitted from any of the tool driving mechanisms to the concave machining tool or the finishing machining tool via the tool holding portion,
Reliable power transmission and positioning are performed. In the fine unevenness processing apparatus according to the fifteenth aspect of the present invention, since the above configuration is adopted, switching of the driving force transmission system and positioning can be performed reliably and easily. The Rukoto.

In the fine unevenness processing device according to the sixteenth aspect of the present invention, since the above-described configuration is employed, the positioning of the tool is facilitated, and the wear of the tool can be appropriately corrected. Therefore, since the processing conditions at each processing portion of the concave portion processing tool and the finishing processing tool can be precisely corrected, each processing is performed under the optimum processing conditions.

In the fine unevenness processing apparatus according to the seventeenth and eighteenth aspects of the present invention, since the above-described configuration is used, if the tool is selected according to the intended fine unevenness shape, the processing can be performed under the optimum processing conditions. When using a tool with a fixed whetstone or abrasive grains, fine abrasive grains will be used depending on the height difference of the unevenness on the surface to be processed, but at this time, an electrical action or a chemical action is given If suppressed, the occurrence of processing defects due to clogging will be avoided.

In the fine unevenness processing apparatus according to the nineteenth aspect of the present invention, since the above-described configuration is employed, the use of a coolant suitable for each of the fine concave portion forming processing and the finishing processing enables good processing. Can be performed.

In the fine unevenness processing apparatus according to the twentieth aspect of the present invention, since the above-described configuration is adopted, the apparatus suitable for performing processing using a grinding, cutting and rolling tool as a concave portion processing tool is provided. Becomes

The fine unevenness processing apparatus according to claim 21 of the present invention has the above-described configuration, so that chips generated by forming the minute concave portion by the concave portion forming tool are subjected to finish processing by the finish processing tool. The partition plate prevents scattering on the side of the work that is being performed, thereby avoiding the occurrence of processing defects.Especially when different coolants are used in both processes, mixing of the coolant by the partition plate Is prevented, the deterioration of the coolant performance is suppressed, and the shortening of the coolant replacement frequency is suppressed.

[0035]

According to the first and second aspects of the present invention, since the above-described configuration is employed, the processing for forming a fine concave portion on the work surface of the work and the convex portion other than the fine concave portion are performed. Since it is not necessary to reset the work between finishing work and finishing work, it is possible to prevent the deterioration of accuracy, and in addition, it is possible to secure high processing accuracy, and as a result, Desired fine irregularities having a height difference of 10 μm or less can be formed easily and at low cost. In particular, in the fine irregularity processing method according to claim 2, an optimum processing according to the intended shape of the fine irregularities is selected. Is very advantageous.

On the other hand, in the fine unevenness processing apparatus according to claims 3 to 6 of the present invention, it is not necessary to grip the work between the fine concave portion forming processing and the finishing processing because of the above, and the precision is accordingly reduced. Can be prevented, and in addition, high processing accuracy can be ensured, and fine irregularities having a height difference of 10 μm or less can be formed easily and inexpensively. In the fine unevenness processing apparatus according to the sixth aspect, a very excellent effect that fine unevenness processing most suitable for a desired shape of fine unevenness can be performed is brought about.

In the fine unevenness processing apparatus according to the seventh aspect of the present invention, since the above-described configuration is employed, by simultaneously controlling two axes to operate the tool holding unit, it is possible to cope with a work having a complicated shape. In the fine unevenness processing apparatus according to claim 8 of the present invention, since the above-described configuration is used, it is possible to perform a highly accurate processing on a spherical surface of a workpiece to be processed. Excellent effect is obtained.

In the fine unevenness processing apparatus according to the ninth aspect of the present invention, since the above-described configuration is employed, a plurality of workpieces can be processed on one facility while the processing is being performed. On the other hand, by exchanging the work, it is possible to reduce the time for exchanging the work, and in addition, the concave machining tool so that the simultaneous machining can be performed by moving one tool holding portion. By arranging the finishing tools, a very excellent effect that productivity can be greatly improved is brought about.

In the fine unevenness processing apparatus according to the tenth aspect of the present invention, since the above-described configuration is used, fine unevenness having a more precise height difference can be formed on the work surface of the work. Since the fine unevenness processing apparatus according to claim 11 has the above-described configuration, it is possible to perform fine unevenness processing most suitable for a desired shape of fine unevenness, and to exchange a work, similarly to the sixth and ninth aspects. A very excellent effect that a reduction in time and an improvement in productivity can also be achieved is provided.

In the fine unevenness processing apparatus according to the twelfth aspect of the present invention, since the above-described configuration is employed, the surface of a work having a single radius of curvature whose center is a center of curvature in a direction perpendicular to the rotation axis of the work is described. It is possible to form fine irregularities with high precision on the processing surface, and it is possible to perform processing feed and operation suitable for each of forming processing and finishing processing for fine concave parts, and as a result, the intended fine A very excellent effect that good processing surface quality can be obtained by selecting the optimum processing for the uneven shape is brought about.

In the fine unevenness processing apparatus according to the thirteenth aspect of the present invention, since the above-described configuration is employed, it is possible to switch between the two mechanisms of the concave portion processing tool drive mechanism and the finish processing tool drive mechanism at a time. By shortening the time, for example, when the concave portion machining tool drive mechanism and the finish machining tool drive mechanism have a rotation center or a swing center, by switching both drive mechanisms on the same axis. It is possible to prevent the position of the center of rotation or the center of oscillation from being shifted in both the forming process and the finishing process for the minute concave portion, and therefore, it is very excellent that high processing accuracy can be secured. The effect is brought about.

In the fine unevenness processing apparatus according to the fourteenth aspect of the present invention, since the above-described configuration is employed, it is possible to transmit power reliably and perform accurate alignment. In the fine unevenness processing apparatus according to claim 15, since the above-described configuration is employed, a very excellent effect that switching of the transmission system of the driving force and alignment can be performed reliably and easily is brought about.

In the fine unevenness processing apparatus according to the sixteenth aspect of the present invention, since the above-described configuration is employed, the positioning of the tool can be easily performed, and the appropriate correction for the wear of the tool can be performed. In addition, by precisely correcting the processing conditions in each processing part of the concave portion processing tool and the finishing processing tool, a very excellent effect that the processing can always be performed under the optimum processing condition is provided. It is.

In the fine concavo-convex processing apparatus according to the seventeenth and eighteenth aspects of the present invention, since the above-described configuration is employed, it is possible to always perform processing under optimum processing conditions by selecting a tool that matches the intended fine concavo-convex shape. Even if a tool with a fixed whetstone or abrasive grains is used, it is possible to prevent the occurrence of processing defects due to the clogging by suppressing the clogging by applying an electrical action or a chemical action. This is a very good effect.

In the fine unevenness processing apparatus according to the nineteenth aspect of the present invention, since the above-described structure is employed, a very excellent effect that both the fine concave portion forming processing and the finishing processing can be performed satisfactorily is brought about. In the fine unevenness processing apparatus according to the twentieth aspect of the present invention, since the above-described configuration is employed, when a grinding, cutting, and rolling tool is used as the concave portion processing tool, the fine concave portion forming process is further performed. A very excellent effect of being able to perform well is provided.

Since the fine unevenness processing apparatus according to claim 21 of the present invention has the above-described configuration, it is possible to prevent the occurrence of processing defects, and in particular, the case where different coolants are used in both processing. However, it is possible to suppress the deterioration of the coolant performance to a small extent, and it is possible to reduce the frequency of replacement of the coolant.

[0047]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

[First Embodiment] FIGS. 1A and 2 are views for explaining a fine unevenness processing method and a fine unevenness processing apparatus according to one embodiment of the present invention.
This shows a case where fine irregularities having a height difference of 10 μm or less are formed on the outer peripheral surface of a cylindrical work obtained by carburizing, quenching, tempering and hardening M420H.

As shown in FIG. 1 (a), this fine unevenness processing apparatus 1 includes a chuck (work holding portion) 2 for holding a work W while rotating the work W until the end of the work, and an outer peripheral surface (working surface) of the work W. ) A cutting tool 3 as a concave portion processing tool for forming a fine concave portion in WS, and a super-finishing grindstone as a finishing tool for performing a finishing process on a convex portion other than the fine concave portion formed on the outer peripheral surface WS of the work W. 4 and a tool holder 10 for holding the cutting tool 3 and the superfinishing grindstone 4.
In this embodiment, a polycrystalline CBN tool is used for the cutting tool 3 and a WA ceramic bond grindstone is used for the superfinishing grindstone 4 (in the fine concavo-convex processing method and the fine concavo-convex processing device according to the present invention, The working tool and the finishing working tool are not limited to the tools shown in the present embodiment).

The tool holding section 10 is provided with a rotating shaft WL of the workpiece W.
An X-axis table 11 along the X-axis direction located on a plane parallel to the Z-axis table; a Z-axis table 12 along the Z-axis direction orthogonal to the X-axis table 11 on the plane; The table 12 is provided with a tool base 13 slidably attached to each of the tables 12 and rotatable. The cutting tool 3 and the superfinishing grindstone 4 are rotated 180 degrees with the rotation center P of the tool base 13 therebetween. Mounted back to back at an interval of °.

In this case, the predetermined machining start portions of the cutting tool 3 and the super-finishing grindstone 4 are set at the same position. Therefore, in the tool holding unit 10, each of the cutting tool 3 and the super-finishing grindstone 4 is set. At the time of machining, the workpiece W can be moved to the same predetermined machining start site and can be moved while being cut into the outer peripheral surface WS of the rotating workpiece W.

The fine unevenness processing apparatus 1 includes a coolant supply mechanism (not shown) for supplying oil-based coolant to a processing point.

Next, the procedure for forming fine irregularities having a height difference of 10 μm or less on the cylindrical work W by the fine irregularity processing apparatus 1 will be described.

First, the tool table 13 of the tool holder 10 is slid with respect to each of the X-axis table 11 and the Z-axis table 12 to move the cutting tool 3 to a predetermined machining start position.

Next, the cutting tool 3 is moved to the outer circumferential surface W of the workpiece W.
The cutting tool 3 is slid together with the tool base 13 of the tool holding unit 10 with respect to the Z-axis table 12 while being cut into the S at a depth of 10 μm.
Is moved in parallel along and processing is performed by dry cutting.

During this time, if an appropriate feed is given to the tool base 13 of the tool holding unit 10, a continuous fine spiral groove having a screw shape is provided.
(Fine irregularities) are created on the outer peripheral surface WS of the work W.

After the formation of the minute concave portion by the cutting tool 3 is completed, the tool base 13 is moved to the X-axis table 1.
1 and once moved away from the work W, the tool table 13 is moved 180 degrees so as not to interfere with the work W.
Rotate to move the superfinishing stone 4 to a predetermined machining start position.

At this time, since the predetermined machining start portions of the cutting tool 3 and the super-finishing grindstone 4 are set at the same position, the super-finishing is performed at the portion where the cutting tool 3 faces the workpiece W at the start of the machining. The grindstone 4 is located. In addition, since the super-finishing grindstone 4 is attached in advance so as to obtain a predetermined pressing force on the tool base 13, the superfinishing grindstone 4 is located at the position where the cutting tool 3 was located. At the same time, an appropriate pressing force can be obtained.

In this state, the superfinishing grindstone 4 is slid together with the tool base 13 of the tool holder 10 with respect to the Z-axis table 12 while supplying oily coolant to the processing point from a coolant supply mechanism (not shown). That is, when the superfinishing grindstone 4 is moved along the outer peripheral surface WS of the work W and the outer peripheral surface WS is uniformly subjected to plateau processing as shown in FIG. The convex portion other than the formed fine concave portion is finished, so that the fine spiral groove d1 having a height difference of 10 μm or less is formed on the outer peripheral surface WS of the work W.

As described above, in the method for processing fine unevenness and the fine unevenness processing apparatus 1 according to the above embodiment, the processing for forming the fine concave portion on the outer peripheral surface WS of the work W by the cutting tool 3 is performed, Since the work W once set on the chuck 2 does not need to be grasped and replaced during the process of finishing the convex portion other than the concave portion, the deterioration of accuracy is suppressed by that much, and in addition, the same tool holding unit 10 is used.
Since the machining is performed by the cutting tool 3 and the super-finishing grindstone 4 attached above, high machining accuracy is ensured because the machining accuracy depends only on the positioning accuracy of the apparatus 1 itself, and it is not necessary to increase the pre-machining accuracy. As a result, the fine spiral groove d1 having a height difference of 10 μm or less can be formed simply and inexpensively.

In the above-described embodiment, the case where fine irregularities having a height difference of 10 μm or less are formed on the outer peripheral surface WS of the cylindrical work W is described. However, the present invention is not limited to this. As shown in the figure, the present invention may be employed to form fine irregularities having a height difference of 10 μm or less on the curved outer peripheral surface WS of the work W having a substantially bowl shape. In the unevenness processing method and the fine unevenness processing apparatus 1, since the processing point is always located on a plane including the rotation axis WL of the work W, the operations of the tool table 13 with respect to the X-axis table 11 and the Z-axis table 12 are simultaneously controlled. ,
By operating the cutting tool 3 and the superfinishing grindstone 4 so as to draw arcs, it is possible to cope with a work surface having a complicated shape such as the curved outer peripheral surface WS.

FIG. 1B shows another embodiment of the first embodiment. As shown in FIG. 1B, even when the rotation center P is at such a position, the same processing as in the above embodiment can be performed, and therefore, the same effect can be obtained.

[Second Embodiment] FIG. 4 is a view for explaining a fine concavo-convex processing method and a fine concavo-convex processing apparatus according to another embodiment of the present invention. In this embodiment, a substantially bowl-shaped work is described. This shows a case where fine irregularities having a height difference of 10 μm or less are formed on a curved outer peripheral surface.

As shown in FIG. 4, the fine unevenness processing apparatus 21 includes a chuck (work holding portion) 22 for holding the work W until the end of the work while rotating the work W, and a curved outer peripheral surface (work surface) of the work W. A fine groove grinding wheel (a grindstone obtained by hardening CBN abrasive grains having a JIS mesh size of # 3000 by a metal bond) 23 as a concave portion processing tool for forming a fine groove in WSa, and a curved outer periphery of the work W A plateau surface grinding wheel as a finishing tool for finishing a convex portion other than the fine groove formed on the surface WSa (in this embodiment, a grinding wheel obtained by hardening CBN abrasive grains of JIS mesh size # 6000 with a metal bond) 24 and fine groove grinding wheel 2
3 and a tool holding unit 30 for holding the plateau surface grinding grindstone 24 (in the fine unevenness processing method and the fine unevenness processing apparatus according to the present invention, the concave portion machining tool and the finish machining tool are shown in the present embodiment. It is not limited to tools).

The tool holding section 30 is provided with a rotating shaft WL of the workpiece W.
An X-axis table 31 along the X-axis direction located on a plane parallel to the X-axis table 31; a Z-axis table 32 along the Z-axis direction orthogonal to the X-axis table 31 on the plane; There is provided a tool base 33 slidably mounted on each of the tables 32 and capable of rotating and indexing. The fine groove grinding wheel 23 and the plateau surface grinding wheel 24 are attached to the tool table 33 with each other. The rotating shaft 34a of the fine groove grinding spindle 34, which is a tool device arranged in parallel and in opposite directions, and the rotating shaft 3 of the plateau surface grinding spindle 35, which is also a tool device.
5a.

When a fine groove having a height difference of 10 μm or less is formed on the curved outer peripheral surface WSa of the work W using the fine unevenness processing apparatus 21, the fine groove grinding wheel 23 has Whetstone pre-formed to fit
(For example, make the outer edge of the grindstone V-shaped and
After performing truing and dressing on the device, in order to secure the accuracy and sharpness of the shape of the tip of the outer periphery of the grindstone and to secure the position of the tip of the grindstone at the tool base 33, using a whetstone with a radius (R) of m. , X-axis table 31
While simultaneously controlling the movement of the tool table 33 with respect to the Z-axis table 32 and the
It is moved along the Sa by a predetermined cut amount (for example, 3 μm) to create a fine spiral groove (fine unevenness).

Then, after the tool table 33 is moved to separate the fine groove grinding wheel 23 from the curved outer peripheral surface WSa, the tool table 33 is rotated to perform finishing with the plateau surface grinding wheel 24.

At this time, similarly to the fine groove grinding wheel 23, the plateau surface grinding wheel 24 also uses a preformed grindstone (for example, a mold wheel whose outer peripheral surface is adjusted to the curvature of the curved outer peripheral surface WSa). After performing truing and dressing on the apparatus, in order to secure the accuracy and sharpness of the shape of the tip of the grindstone outer periphery and the position of the tip of the grindstone on the tool table 33, for example, a predetermined groove depth is given while giving a cut of 0.1 μm. When processing is performed such that the convex outer portion other than the fine groove formed by the fine groove grinding wheel 23 is finished on the curved outer peripheral surface WSa of the work W, the curved outer peripheral surface WSa of the work W is finished. Thus, a fine groove having a height difference of 10 μm or less is formed.

As described above, in the fine unevenness processing method and the fine unevenness processing apparatus 21 according to the above embodiment, the fine groove forming processing by the fine groove grinding wheel 23 and the plateau processing by the plateau surface grinding wheel 24 are the same for the work W. As shown in the present embodiment, the spindle 34,
In the case where the grindstones 23 and 24 are rotated and machined by 35, the rotational direction of the work W and the rotating grindstones 23 and 24 can be set to the same direction (for example, both can be set to upcut). There is.

In this embodiment, since the grindstones 23 and 24 which are similar to the fine groove forming process and the plateau process are used, both processes are performed while supplying a water-soluble coolant liquid.

Further, between the spindles 34, 35 of the fine groove grinding wheel 23 and the plateau surface grinding wheel 24 and the tool table 33, for example, the rotating shafts of the spindles 34, 35 A slide table may be provided as a mechanism for compensating wear of the grindstones 23 and 24 in a direction orthogonal to 34a and 35a. In this embodiment, the amount of movement of the tool base 33 with respect to the X-axis table 31 and the Z-axis table 32 is limited. I am trying to correct it by changing it.

[Third Embodiment] FIG. 5 is a view for explaining a fine concavo-convex processing method and a fine concavo-convex processing apparatus according to still another embodiment of the present invention. This shows a case where fine irregularities having a height difference of 10 μm or less are formed on the curved outer peripheral surface of the work.

As shown in FIG. 5, the fine unevenness processing apparatus 41 according to this embodiment is different from the second embodiment in that the fine unevenness processing apparatus 21 according to the second embodiment is different from the second embodiment. The microgrooving spindle 34 and the plateau surface grinding spindle 35 each having the groove grinding wheel 23 and the plateau surface grinding wheel 24 mounted thereon are arranged on the tool table 33. At 41, both the fine groove grinding spindle 34 and the plateau surface grinding spindle 35 are mounted on the X-axis table 31.
The other configuration is that the second
This is the same as the fine unevenness processing apparatus 21 according to the embodiment.

That is, in the fine unevenness processing apparatus 21 according to the second embodiment, the fine groove grinding wheel 23 and the plateau surface grinding wheel 24 are switched by rotating the tool table 33. In the fine unevenness processing device 41 according to the embodiment, the fine groove grinding wheel 23 and the plateau surface grinding wheel 24 are switched by sliding the X-axis table 31 so as to sandwich the rotation axis WL with respect to the curved outer peripheral surface WSa of the work W. Processing is performed from the opposite sides, whereby the configuration is simpler than that of the second embodiment in which processing is performed at the same position, and there is an advantage that the cost is reduced accordingly.

[Fourth Embodiment] FIG. 6 is a view for explaining a fine concavo-convex processing method and a fine concavo-convex processing apparatus according to still another embodiment of the present invention.

As shown in FIG. 6, the fine unevenness processing apparatus 51 according to the present embodiment is configured so that the work W having a single radius of curvature whose center is the center of curvature of the axis L in the direction orthogonal to the rotation axis WL of the work W is shown. A fine concave portion having a height difference of 10 μm or less is formed on the concave outer peripheral surface WSb. The fine concave / convex processing device 51 includes a chuck (work holding portion) 52 that holds the work W until the processing is completed while rotating the work W. , A cutting tool 53 as a concave machining tool, a superfinishing grindstone 54 as a finishing machining tool, a cutting tool 53 and a superfinishing grindstone 54
A concave part machining tool drive mechanism 55 for forming a fine concave part on the concave outer peripheral surface WSb of the workpiece W by operating the cutting tool 53 with the axis L as a rotation center axis; Super finishing whetstone 54 with L as swing center axis
And a finishing machining tool drive mechanism 56 for performing finishing machining of a convex portion other than the fine concave portion formed on the concave outer peripheral surface WSb of the work W, and the two mechanisms 55 and 56 are provided independently of each other. It is.

The tool holding section 60 is provided with a rotation axis WL of the workpiece W.
A tool table 61 movable along an axis L perpendicular to the axis and rotatably provided around the axis L; and a cutting tool 53 and a super-finishing grindstone 54 provided on the tool table 61 in the axis L direction. The tool holders 62 are arranged so as to be parallel to each other. Thus, in this embodiment,
Since both the cutting tool 53 and the superfinishing grindstone 54 are supported by the same tool holder 62, there is an advantage that the structure is simple, tool exchange can be easily performed, and cost reduction can be realized. In the case where machining is performed by adopting a method other than the present embodiment, for example, when machining with higher precision is performed, the cutting tool 53 and the superfinishing grindstone 5 are used.
It is desirable to support 4 with separate tool holders.

The concave portion machining tool drive mechanism 55 is shown in FIG.
As shown in the figure, the first motor 55a and the first motor
A worm gear 55c fixed to the output shaft 55b of 5a;
A spur gear 55d provided on the shaft L and meshing with the worm gear 55c is provided. On the other hand, as shown in FIG.
a, a disk 56c fixed to the output shaft 56b of the second motor 56a, a swing disk 56d provided on the shaft L,
There is provided a rod 56e having one end pivotally connected to the periphery of the disk 56c and the other end pivotally connected to the periphery of the swinging disk 56d.

In this case, a spline 6 as a holding portion side engaging portion is provided on the outer peripheral surfaces of both ends of the tool stand 61 of the tool holding portion 60.
1a are provided, and the inner peripheral surfaces of the shaft holes of the spur gear 55d of the concave portion machining tool drive mechanism 55 and the oscillating disk 56d of the finish machining tool drive mechanism 56 serve as drive mechanism side engagement portions. Splines 55f and 56f are provided respectively.

The tool table 61, the spur gear 55d and the swinging disk 56d are connected to the splines 61a, 61 at both ends of the tool table 61.
When one of the splines 61a is fitted with one of the splines 55f, 56f on the drive mechanism side, the other spline 61a is arranged in a free state, and the spur gear 55d and the swing Disk 56d
The fluid pressure (eg, hydraulic pressure) supplied through the pressurizing and depressurizing supply ports 55g and 56g provided in
The tool base 61 is slid along the axis L, and the spline 61a is moved to the spur gear 5 of the machining tool drive mechanism 55 for the concave portion.
5d and oscillating disk 56 of finishing tool drive mechanism 56
The transmission system of the driving force is switched by fitting into any one of the splines 55f (56f) of the respective splines 55f, 56f of d.

At this time, as shown in FIG.
In a state where the upper spline 61a is fitted with the spline 55f on the concave machining tool drive mechanism 55 side, that is, the driving force is applied to the cutting tool 53 via the tool base 61 from the concave machining tool drive mechanism 55. In the transmitted state, the cutting edge of the cutting tool 53 is set so as to be at the same height as the rotation axis WL of the work W, and the spline 61a below the tool base 61 is fitted with the spline 56f on the finishing tool drive mechanism 56 side. In the state in which the superfinishing grindstone 54 is in contact with the superfinishing grindstone 54 via the tool table 61 from the finishing machining tool drive mechanism 56, the center of the superfinishing grindstone 54 is aligned with the rotation axis WL of the workpiece W. It is set to be the same height.

On the back surface of the tool holder 62, a grindstone pressing pressure supply port (pressing force applying means) 62a is provided, and when performing super-finishing, the grindstone pressing pressure supply port 62a is provided.
The super-finishing grindstone 54 can be pressed against the concave outer peripheral surface WSb of the workpiece W by supplying air pressure from the workpiece (aside from the grindstone pressing pressure supply port 62a, the recessed cutting tool is cut into the tool holder 62). It is also possible to provide a force applying means or a pressing force applying means).

Using this fine unevenness processing apparatus 51, the concave outer peripheral surface WSb of the work W having a single radius of curvature centered on the axis L in the direction orthogonal to the rotation axis WL of the work W.
When a fine groove having a height difference of 10 μm or less is formed, first, a spline 61a above the tool base 61 is fitted to a spline 55f on the side of the concave portion machining tool drive mechanism 55 (see FIG. 6B). When the machining is started, the cutting tool 53 to which the driving force is transmitted from the concave portion machining tool driving mechanism 55 rotates around the axis L together with the tool base 61, that is, the workpiece W on which the cutting tool 53 rotates. Move along the concave outer peripheral surface WSb to form a fine groove on the concave outer peripheral surface WSb.

Next, the spur gear 55d and the oscillating disk 56
By supplying and discharging the fluid through each of the pressurizing and depressurizing supply ports 55g and 56g of d, the tool table 61 of the tool holding unit 60 is slid along the axis L, and the upper spline 61a is moved toward the concave part machining tool drive mechanism 55 side. And the lower spline 61a is fitted to the spline 56f of the oscillating disk 56d of the finishing tool drive mechanism 56 to switch the driving force transmission system to the finishing side.

At this time, the center of the superfinishing grindstone 54 is at the same height as the rotation axis WL of the work W. In this state, when the finishing is started while supplying the oily coolant, the finishing tool driving mechanism 56 The super-finishing grindstone 54 to which the driving force is transmitted swings around the axis L together with the tool table 61, that is, the super-finishing grindstone 54 to which the air pressure is applied from the grindstone pressing pressure supply port 62a rotates. While moving along the concave outer peripheral surface WSb while pressing the concave outer peripheral surface WSb to remove the convex portion of the fine groove, the height difference between the concave outer peripheral surface WSb of the work W is 10 μm.
The following fine grooves will be formed.

In the fine unevenness processing apparatus 51 and the fine unevenness processing method using the fine unevenness processing apparatus 51,
Fine grooves can be accurately formed on the concave outer peripheral surface WSb of the work W having a single radius of curvature with the axis L in the direction orthogonal to the rotation axis WL of the work W as the center of curvature. Since the partial machining tool driving mechanism 55 and the finishing machining tool driving mechanism 56 are made independent, machining feed, rotation and swing suitable for each of the minute concave portion forming and finishing are performed. Therefore, it is possible to select the most suitable processing for the intended fine groove.

In the fine unevenness processing apparatus 51, the tool table 61 of the tool holding unit 60 is slid along the axis L, and the spline 61 a is used to drive the recessed portion machining tool drive mechanism 55.
The driving force transmission system is switched by fitting any one of the splines 55f (56f) of the splines 55f, 56f of the oscillating disk 56d of the finishing tool drive mechanism 56 and the spur gear 55d of the above. As a result, it is possible to switch between the two mechanisms of the concave portion machining tool drive mechanism 55 and the finish machining tool drive mechanism 56 at a time, so that time can be reduced, and both drive mechanisms 55, 55
Since 56 is switched on the same axis, the positions of the rotation center and the swing center do not shift in both the forming process and the finishing process for the minute concave portion, so that good processing accuracy can be obtained. .

Further, in the fine unevenness processing apparatus 51,
By providing a grindstone pressing pressure supply port 62a on the back surface of the tool holder 62, the superfinishing grindstone 5
4 is pressed against the concave outer peripheral surface WSb of the workpiece W, so that the wear of the superfinishing grindstone 54 can be appropriately corrected.
Since the processing conditions at the processing part can be precisely corrected,
Each processing is performed under the optimum processing conditions.

In this embodiment, the tool base 61 of the tool holding section 60 is rotated by an axis L perpendicular to the rotation axis WL of the workpiece W.
Along the axis L and rotate about the axis L, the present invention is not limited to this. As shown in FIG. It moves along the axis L perpendicular to the rotation axis WL (moves from the state shown in FIG. 7A to the state shown in FIG. 7B), and rotates around this axis L. You may.

[Fifth Embodiment] FIG. 8 is a view for explaining a fine concavo-convex processing method and a fine concavo-convex processing apparatus according to still another embodiment of the present invention. In this embodiment, a plurality of work holding portions are provided. This shows a case where a work is held.

As shown in FIG. 8, this fine unevenness processing apparatus 71 is a headstock as a work holding portion for holding a plurality of (two in this embodiment) cylindrical works W until the work is completed while rotating the work W. 72 and the outer peripheral surface (work surface) of the work W
A micro-groove grinding wheel 73 as a concave-part machining tool for forming micro-grooves in WS, and a plateau surface grinding wheel as a finishing tool for finishing a convex portion other than the micro-grooves formed on the outer peripheral surface WS of the work W 74 and a fine groove grinding wheel 73
And tool holding portion 8 for holding plateau surface grinding wheel 74
0 is provided.

The headstock 72 is rotatable around a main shaft 72a, and works W are fixed to both ends of a rotation shaft WL projecting from the upper and lower ends of the headstock 72 in the drawing. The headstock 72 operates so as to sequentially position each work W in the processing area by the fine groove grinding wheel 73 and the processing area by the plateau surface grinding wheel 74. That is, the headstock 72 is It rotates so that it can be positioned at 180 ° intervals. In this embodiment, the two workpieces W are held on the same rotation axis WL at the upper and lower ends of the headstock 72.
This is because the work W has a cylindrical shape, and it is necessary to change the holding state depending on the shape of the work W.

The tool holding section 80 includes a base 81 and a movable table 82 supported by the base 81. A fine groove grinding wheel 73 and a plateau surface grinding wheel 74 are provided.
The rotary shaft 84a of the fine groove grinding spindle 84, which is a tool device, which is fixed to the movable table 82 so as to be parallel to the rotation axis WL of the work W and opposed to each other, and the plateau surface grinding spindle 85, which is also a tool device, Each is attached to the rotating shaft 85a.

In this case, the movable table 82
And the distance between the two spindles 84 and 85 can be adjusted by sliding the movable table 82 in the Z-axis direction as shown in FIG. When machining any one of the two works W, W with any one of the grindstones 73 (74) out of 74,
Any one of the other workpieces W may have one of the other grinding wheels 74 (7
3) is set to a distance that does not interfere.

Further, the respective cutting amounts of the fine groove grinding wheel 73 and the plateau surface grinding wheel 74 are set by sliding the movable table 82 in the X-axis direction in the figure.

When a fine groove having a height difference of 10 μm or less is formed on the outer peripheral surface WS of the work W by using the fine unevenness processing device 71, first, one of the rotating work W (the upper work W in the figure) is rotated. While the movable table 82 is moved in the X-axis direction to cut the fine groove grinding wheel 73,
The movable table 82 is moved in the Z-axis direction to create fine spiral grooves (fine irregularities) on the entire outer peripheral surface WS of the work W.

Next, the movable table 82 is moved in the X-axis direction to separate the fine groove grinding wheel 73 from the work W, and then the headstock 72 is rotated to move the work W on which the fine spiral groove is formed into a fine groove. The movable table 82 is moved to the plateau surface grinding wheel 74 side facing the grinding wheel 73 and
The plateau surface grinding grindstone 74 is moved to the processing position of the workpiece W by sliding in the axial direction, and in this state, the plateau surface finish processing is performed in the same manner as in the fine groove grinding.

Then, after performing the finish grinding of the plateau surface, the movable table 82 is slid in the opposite direction (downward in the figure) to the processing position of the other workpiece W which rotates the fine groove grinding wheel 73. Move.

At this time, since the processed work W is not located at a portion where the plateau surface grinding is performed by the plateau surface grinding wheel 74, when the processed work W is replaced with an unprocessed work W in this state. Thus, the setting of the fine groove processing for the next work W is completed.

As described above, in the fine unevenness processing method and the fine unevenness processing apparatus 71 according to the above-described embodiment, the two workpieces W are processed on one facility, and the processing is performed on the other hand. Since the work W can be replaced on the other side during the operation, the time required for the replacement of the work W is greatly reduced. In addition, depending on the arrangement of the fine groove grinding wheel 73 and the plateau surface grinding wheel 74, Can be simultaneously processed by sliding the movable table 82, and the productivity can be improved.

[Sixth Embodiment] FIG. 9 is a view for explaining a fine concavo-convex processing method and a fine concavo-convex processing apparatus according to still another embodiment of the present invention. Shows the case where the workpiece is held.

As shown in FIG. 9, this fine unevenness processing apparatus 91 is a spindle as a work holding portion for holding a plurality of (two in this embodiment) substantially bowl-shaped works W until the processing is completed while rotating. A table 92, a rolling tool 93 as a concave portion forming tool for forming a fine groove in a curved outer peripheral surface (working surface) WSa of the work W, and a curved outer peripheral surface WS of the work W
A wrapping film 94 as a finishing tool for finishing a convex portion other than the micro-groove formed in a, and a tool stand 100 as a tool holder for holding the rolling tool 93 and the wrapping film 94 are provided.

The spindle table 92 is rotatable around a spindle 92a.
A workpiece W is fixed to each of two parallel rotation axes WL located at symmetrical portions on both sides of a. A partition plate 92b is attached between the two works W so as not to be perpendicular to the line connecting the axes of the works W and not to interfere with any of the works W.

The tool table 100 on which the rolling tool 93 for forming fine grooves and the wrapping film 94 for finishing are mounted is rotated about an axis L in a direction orthogonal to the rotation axis WL of the work W. That is,
The rolling tool 93 and the wrapping film 94 rotate around the center of curvature of the curved outer peripheral surface WSa.
Are arranged so that they can be machined simultaneously for two works W.

When a fine groove having a height difference of 10 μm or less is formed on the curved outer peripheral surface WSa of the work W using the fine unevenness processing apparatus 91, first, two rotating works W (positioned on the side of the wrapping film 94) are rotated. When the tool base 100 is rotated while pressing the rolling tool 93 and the wrapping film 94 against the work W having the fine grooves already formed, the fine grooves are formed and processed on the rolling tool 93 side. Finishing is performed on the wrapping film 94 side.

Next, even if the spindle table 92 is rotated, the work W is rolled by the rolling tool 93 and the wrapping film 94.
Then, the work W on the wrapped side is replaced with a new work W on which fine grooves are not formed, after securing the distance between the tool table 100 and the spindle table 92 so as not to interfere with the work.

In this state, the spindle table 92 is
When the workpiece W is rotated by 80 °, the work W on which the fine grooves are formed moves to the wrapping film 94 side, and the newly set unprocessed work W moves to the rolling tool 93 side. The tool table 100 is rotated while pressing the rolling tool 93 and the wrapping film 94 against the two workpieces W in the same manner as described above to form fine grooves on the rolling tool 93 side and the wrapping film 94 side, respectively. Processing and finishing are performed, and thereafter, the fine groove forming processing and the plateau processing are simultaneously performed in the same manner.

At this time, the rolling by the rolling tool 93 is performed while spraying an oily coolant in a mist shape.

Even if the coolant used for forming and finishing the fine grooves is different from each other, the partition plate 92b is attached to the spindle table 92. In addition, even if the chips are scattered during the processing, the partition plate 92b prevents the chips from being scattered to the other side.

Here, FIG. 10 shows a cross-sectional curve model of a traction drive rolling element surface obtained by the fine unevenness processing method using the fine unevenness processing apparatus according to the fifth embodiment of the present invention.

As shown in FIG. 10, the fine concave / convex processing method using the fine concave / convex processing apparatus according to the fifth embodiment of the present invention employs a fine concave portion A having a depth d of 0.1 to 1.7 μm.
And the surface roughness f of the super-finished surface (plateau surface) s is 0.
An outer peripheral surface WS having fine convex portions B flattened to about 05 μm can be created, that is, a rolling element surface exhibiting excellent traction performance can be obtained.

Therefore, if the fine irregularities (fine grooves) formed on the outer peripheral surface WS are formed on the surface of the rolling element used for the toroidal type CVT rolling element, the rolling element has the same size as the conventional one and has a higher height than the conventional one. It is possible to transmit the torque, in other words, it is possible to reduce the size of the rolling element.

The sliding members whose surfaces slide with each other can be subjected to processing for forming fine grooves similar to the above-mentioned fine grooves on the surface, and in this case, excellent friction performance can be obtained. Obtainable.

[Brief description of the drawings]

FIG. 1 (a) is an operation explanatory view from the front showing a state in which a fine unevenness having a height difference of 10 μm or less is formed on a cylindrical work by a fine unevenness processing apparatus according to a first embodiment of the present invention. (b) It is operation | movement explanatory drawing from the front direction which shows the other form of the fine unevenness processing apparatus by 1st Example.

FIG. 2 is a partial cross-sectional explanatory view showing a state in which finishing is performed by a superfinishing grindstone of the fine unevenness processing apparatus in FIG. 1;

FIG. 3 is an operation explanatory view from the front showing a situation in which fine unevenness having a height difference of 10 μm or less is formed on a curved outer peripheral surface of a substantially bowl-shaped work by the fine unevenness processing apparatus in FIG. 1;

FIG. 4 is a view showing a height difference of 10 μm on a curved outer peripheral surface of a substantially bowl-shaped workpiece by the fine unevenness processing apparatus according to the second embodiment of the present invention;
FIG. 9 is an explanatory diagram of an operation from the front showing a state of forming fine irregularities of m or less.

FIG. 5 is a view showing a height difference of 10 μm on a curved outer peripheral surface of a substantially bowl-shaped workpiece by the fine unevenness processing apparatus according to the third embodiment of the present invention;
FIG. 9 is an explanatory diagram of an operation from the front showing a state of forming fine irregularities of m or less.

FIG. 6 is an operation explanatory view from a plane direction showing a situation in which a fine concave portion having a height difference of 10 μm or less is formed on a concave outer peripheral surface of a workpiece by a fine concave / convex processing device according to a fourth embodiment of the present invention;
(a), an operation explanatory view from the front direction (b) and an operation explanatory view from the bottom direction (c).

7A and 7B are operation explanatory views showing another example of the configuration of the fine unevenness processing apparatus in FIG. 6;

FIG. 8 is an operation explanatory view from the front showing a situation where fine unevenness having a height difference of 10 μm or less is formed on a cylindrical work by a fine unevenness processing apparatus according to a fifth embodiment of the present invention.

FIG. 9 shows that the height difference between the curved outer peripheral surface of the substantially bowl-shaped workpiece is 10 μm in the fine unevenness processing apparatus according to the sixth embodiment of the present invention.
FIG. 7A is an operation explanatory view from a plane direction and FIG. 8B is an operation explanatory view from a front direction, showing a situation in which fine irregularities of m or less are formed.

FIG. 10 is an explanatory diagram of a cross-sectional curve model of a traction drive rolling element surface obtained by a fine unevenness processing method using a fine unevenness processing apparatus according to a fifth embodiment.

[Explanation of symbols]

 3,53 Cutting tool (recess processing tool) 4,54 Super-finishing wheel (finishing processing tool) 10,30,60,80,100 Tool holding part 23,73 Fine groove grinding wheel (recess processing tool) 24,74 Plateau surface grinding wheel (finishing processing tool) 93 Rolling tool (recess processing tool) 94 Wrapping film (finishing processing tool) W Work WS Outer peripheral surface (working surface) WSa Curved outer peripheral surface WSb Concave outer peripheral surface

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Minoru Ota 2 Term Takaracho, Kanagawa-ku, Yokohama-shi, Kanagawa Nissan Motor Co., Ltd. F-term (reference) 3C045 DA03 DA30

Claims (21)

[Claims] When forming a fine unevenness having a height difference of 10 μm or less on a work surface of a work, a concave portion forming tool for forming a fine concave portion on the work surface of the work, and a concave portion forming tool formed on the work surface of the work. Holding a finishing tool that finishes the convex part other than the minute concave part in the same tool holding part,
After performing the processing to form the fine concave part by cutting the concave part processing tool relative to the processing surface of the rotating work while cutting it, slide or rotate the tool holding part while maintaining the work holding state. By moving the relative position with respect to the workpiece, the finishing tool is moved to the same position where the concave portion machining tool was machining,
The concave and convex processing tool is characterized in that the concave and convex processing tool performs a finishing process by making a relative movement while cutting into a processing surface of a rotating workpiece that has been processed, thereby forming fine irregularities with a height difference of 10 μm or less. Processing method. 2. A concave portion forming tool for forming a fine concave portion on a work surface of a work when forming fine irregularities having a height difference of 10 μm or less on a work surface of the work, and a concave portion forming tool formed on the work surface of the work. Holding a finishing tool that finishes the convex part other than the minute concave part in the same tool holding part,
After performing the processing to form the fine concave part by cutting the concave part processing tool relative to the processing surface of the rotating work while cutting it, slide or rotate the tool holding part while maintaining the work holding state. By moving the relative position with respect to the workpiece, the finishing tool is moved to a position different from the position where the concave-part machining tool was processing, and the rotating workpiece that the concave-part machining tool processed is processed. A fine unevenness processing method characterized in that fine unevenness having a height difference of 10 μm or less is formed by performing a finishing process by making a relative movement while cutting the surface. 3. A fine unevenness processing apparatus for forming fine unevenness with a height difference of 10 μm or less on a work surface of a work, a work holding portion for holding the work until the end of the work while rotating the work, and a work surface of the work. A concave part processing tool for forming a fine concave part, and a finishing processing tool for performing finishing processing of a convex part other than the fine concave part formed on the work surface of the work,
The concave portion machining tool and the finishing machining tool are movably held at respective predetermined machining start positions at each machining time, and the concave portion machining tool and the finishing machining tool are respectively cut into the work surface of the rotating workpiece. A fine unevenness processing device characterized by being held so as to be able to move while feeding. 4. A fine unevenness processing apparatus for forming fine unevenness having a height difference of 10 μm or less on a work surface of a work, a work holding section for holding the work until the end of the work while rotating the work, and a work surface of the work. A concave part processing tool for forming a fine concave part, and a finishing processing tool for performing finishing processing of a convex part other than the fine concave part formed on the work surface of the work,
A tool holding portion that holds the concave portion machining tool and the finish machining tool to each predetermined machining start site at each machining time and feedably holds the cutting tool while cutting the rotating workpiece surface. A fine unevenness processing device provided. 5. The fine unevenness processing apparatus according to claim 3, wherein predetermined processing start portions of the concave portion processing tool and the finishing processing tool are set at the same position. 6. The fine unevenness processing apparatus according to claim 3, wherein predetermined processing start portions of the concave portion processing tool and the finishing processing tool are set at different positions. 7. The fine unevenness processing apparatus according to claim 3, wherein the tool holding unit is movable in two axial directions orthogonal to each other on a plane parallel to the rotation axis of the workpiece. 8. The tool holding portion is provided in at least one of two axial directions orthogonal to each other on a plane parallel to the rotation axis of the workpiece and a direction rotating around a rotation axis perpendicular to the plane parallel to the rotation axis of the workpiece. 7. The fine unevenness processing apparatus according to claim 3, wherein the fine unevenness processing apparatus is movable in two directions. 9. The work holding part operates to hold a plurality of works and to sequentially position each work in a processing part by a concave part processing tool and a processing part by a finishing processing tool. 3. The fine unevenness processing device according to 1. 10. The tool holding part according to claim 3, wherein the tool holding part holds the recessed portion machining tool and the finish machining tool with the same cutting direction or pressing direction with respect to the work surface of the work. Micro unevenness processing equipment. 11. A tool for holding a concave portion and a finishing tool, wherein a tool holding portion is rotatably supported on a plane parallel to a rotation axis of a work, and a cutting direction or a pressing direction with respect to a work surface of the work is different. 10. The micro-asperity processing apparatus according to claim 3, wherein the processing tool and the finishing tool are moved to respective predetermined processing start portions by indexing and rotating the indexing tool. 12. A machining tool for a concave portion is operated with an axis in a direction orthogonal to the rotation axis of the work as a rotation center axis or a swing center axis, and a single axis having a direction in a direction orthogonal to the rotation axis of the work as a center of curvature. A concave-part machining tool drive mechanism for forming a fine concave part on the surface to be processed of a work having a radius of curvature, and a finishing processing tool with an axis in a direction orthogonal to the rotation axis of the work as a rotation center axis or a swing center axis. The fine processing tool according to any one of claims 3 to 11, wherein a finishing tool driving mechanism that operates to finish a convex portion other than the fine concave portion formed on the surface to be processed of the work is provided independently of each other. Roughness processing device. 13. The concave portion machining tool drive mechanism operates in a state where the concave portion machining tool is located at a predetermined machining portion,
13. The micro-asperity processing apparatus according to claim 12, wherein the finishing tool driving mechanism switches and operates in a state where the finishing tool is located at a predetermined processing portion. 14. A tool holding portion is provided with a holding portion side engaging portion, and a concave portion machining tool driving mechanism and a finishing machining tool driving mechanism are provided with a driving mechanism side engaging portion, respectively. When the side engaging portion and the driving mechanism side engaging portion of the concave portion machining tool drive mechanism are engaged, a driving force is transmitted from the concave portion machining tool drive mechanism to the concave portion machining tool via the tool holding portion, and the tool A driving force is transmitted from the finishing tool driving mechanism to the finishing tool via the tool holding part in a state where the holding part side engaging part of the holding part and the driving mechanism side engaging part of the finishing tool driving mechanism are engaged. Claim 12 or 1
4. The fine unevenness processing apparatus according to 3. 15. The tool holding part of the tool holding part has a spline or serration, and the driving mechanism-side engaging part of the concave part machining tool drive mechanism and the finishing tool drive mechanism has a spline or serration. The holding portion is slid so that the holding portion-side engaging portion is indented by one of the driving mechanism-side engaging portion of the machining tool driving mechanism and the driving mechanism-side engaging portion of the finishing tool driving mechanism. 15. The fine unevenness processing apparatus according to claim 14, wherein a transmission system of the driving force is switched by engaging with the joining portion. 16. The cutting force applying means or pressing force applying means of the concave portion machining tool and the cutting force applying means or pressing force applying means of the finishing machining tool are arranged independently on the tool holding portion. 16. The fine unevenness processing apparatus according to any one of items 15 to 15. 17. A recess, a machining tool, a grinding tool, a cutting tool,
17. The fine unevenness processing apparatus according to claim 3, wherein any one of rolling, superfinishing, wrapping, and a tool having an electrical or chemical action added thereto is employed. 18. Finishing tools include grinding, cutting,
18. The fine unevenness processing apparatus according to claim 3, wherein any one of a super finish, a wrap, and a tool having an electric action or a chemical action added thereto is employed. 19. A coolant used in a step of forming a fine concave portion on a work surface of a work by a concave portion processing tool,
19. The fine unevenness processing apparatus according to claim 3, wherein a coolant used in a stage of performing a finish processing on a convex portion other than the fine concave portion of the work surface of the workpiece by the finishing processing tool is different. 20. The fine unevenness processing apparatus according to claim 19, wherein a mist-like coolant is supplied when a grinding, cutting and rolling tool is used as the recessed portion processing tool. 21. A workpiece in which a minute concave portion is formed on a surface to be processed at a processing position by a concave portion machining tool, and a convex portion other than the minute concave portion of the workpiece surface at a processing position by a finishing processing tool. 10. The fine unevenness processing apparatus according to claim 9, wherein a partition plate for preventing chips generated mutually and a coolant used for the processing from being scattered to a counterpart is disposed between the workpiece and the workpiece that has been subjected to the finishing processing.