JP2002299719A - Method and device for manufacturing laminated piezoelectric transformer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and device, by which a high reliability laminated piezoelectric transformer can be manufactured at a reduced manufacturing cost through a reduced number of manufacturing steps. SOLUTION: The method comprises a first step of forming at least an input electrode in a prescribed area of a ceramic green sheet, a second step of forming a laminated piezoelectric element, by cutting the green sheet into pieces of a desired dimension and integrally baking the pieces, after the pieces are superimposed upon another, and a third step of forming edge electrodes for outside connection, by partially applying paste of an electrode material to one edge of the crystal element by means for a mediating jig. The method also comprises a fourth step of polarizing a prescribed area of the crystal element.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a multilayer piezoelectric transformer and an apparatus for manufacturing the same, and more particularly, to a method of forming an electrode on a side end of the multilayer piezoelectric transformer and an apparatus for applying an electrode paste material. Things.

[0002]

2. Description of the Related Art A piezoelectric transformer has a relatively simple structure.
It can be reduced in size and height, and has recently been used for inverters for backlighting liquid crystal displays, high-voltage power supplies, and the like. Such electronic devices are rapidly becoming smaller and thinner, and piezoelectric transformers used are also being made smaller and thinner, so that the boost ratio, the step-down ratio, and the efficiency ratio must be increased. And a laminated piezoelectric transformer that can simplify the configuration of the driving circuit.

Here, the laminated piezoelectric transformer will be described with reference to the drawings. A description will be given of a Rosen-type laminated piezoelectric transformer driven in the λ mode as an example. FIG. 15 is an exploded perspective view. FIG. 16 is a sectional view taken along line AA in FIG.
FIG. 17 is a sectional view taken along line BB of FIG.

[0004] The laminated piezoelectric transformer 1 is made of a PZT piezoelectric ceramic plate, has a slender rectangular parallelepiped shape as a whole, and is divided into a driving portion 1A and a power generation portion 1B near a central portion in the long side direction. The multilayer piezoelectric transformer 1 has a configuration in which the piezoelectric elements 1a are stacked, for example, in nine layers. In the driving portion, the first input electrodes 11a or the second input electrodes 12a are alternately provided on the respective piezoelectric elements 1a. A plurality is formed. The second input electrode 12a is exposed on the lower surface side of the lowermost piezoelectric element 1a, and the first input electrode 11a is exposed on the upper surface side of the uppermost piezoelectric element 1a. In addition, each piezoelectric element 1a is subjected to polarization processing in a direction facing each other. First input electrode 11
The sets of “a” are commonly connected to each other to form one input electrode 11, and the sets of the second input electrodes 12 a are commonly connected to each other to form the other input electrode 12. These two input electrodes are alternately provided as input common electrodes 111 and 12.
1 form an independent electrode as a pair of input electrodes 11 and 12. Note that these input common electrodes 111 and 121 are formed by the multilayer piezoelectric transformer 1.
In the vicinity of the vibrating node on one side.

[0005] An output electrode 13 is formed on the longitudinal end surface of the power generation portion 1B, and each polarization process is performed from the drive portion to the output electrode at the end portion. Each of the electrodes is made of, for example, silver or silver palladium. When an AC voltage is applied to the input electrode, strong mechanical vibration occurs, and a voltage transforming action is obtained.

In the conventional method of manufacturing each electrode of the laminated piezoelectric transformer having the above-described structure, the first input electrode or the second input electrode is provided in a predetermined region on the piezoelectric element (ceramic green sheet) 1a before firing. An input electrode is formed by a screen printing method, and is laminated and fired integrally to obtain a laminated piezoelectric transformer element. Thereafter, the four side end faces of the laminated piezoelectric transformer element are subjected to plane polishing, and the input common electrodes 111 and 11 are attached to the plane polished side end faces.
2. The output electrode 13 is formed by the same screen printing method as described above.

[0007]

However, in the prior art, since the electrodes on the side end faces of the multilayer piezoelectric transformer are formed by the screen printing method, as a pre-process, the side end faces of the multilayer piezoelectric transformer are uneven and uneven. It was necessary to polish the surface in order to obtain the same. This is because, in a laminated piezoelectric element obtained by laminating and integrally firing a plurality of piezoelectric elements (ceramic green sheets), subtle deviations when the piezoelectric elements are superimposed, subtle dimensional errors of each piezoelectric element, Alternatively, unevenness is inevitably formed on the side end surface of the laminated piezoelectric element due to a difference in thermal distortion of each piezoelectric element at the time of firing, but in the electrode formation by screen printing, the surface on which the electrode is formed is formed. This is because if there is no planar accuracy, there is a problem that the electrode is likely to be shifted or interrupted.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an electrode on a side end face of a laminated piezoelectric transformer can be formed accurately and very easily without performing flat polishing of the side end face of the laminated piezoelectric transformer. An object of the present invention is to provide a method of manufacturing a multilayer piezoelectric transformer having high reliability while achieving a reduction in the number of manufacturing steps and manufacturing costs, and an apparatus for manufacturing the same.

[0009]

SUMMARY OF THE INVENTION Therefore, a method of manufacturing a multilayer piezoelectric transformer according to the present invention is a method of manufacturing a multilayer piezoelectric transformer, wherein at least an input electrode is formed in a predetermined region on a ceramic green sheet. And a second step of cutting the ceramic green sheets into desired dimensions, overlapping and integrally firing to form a laminated piezoelectric transformer element, and applying an electrode paste material to the laminated piezoelectric transformer element. A third part of forming a side end electrode for external connection by applying to a part of the side end with an intermediate jig.
And a fourth step in which a predetermined region of the multilayer piezoelectric transformer element is subjected to polarization processing.

According to the above-described manufacturing method, even if the side end of the laminated piezoelectric transformer element after integrally firing has a slight unevenness or irregularity, the electrode paste material is applied to the side end of the laminated piezoelectric transformer by an intermediate jig. By coating, the side electrode for external connection (the common electrode for input and the electrode on the output side) can be formed stably without being affected by the unevenness of the surface of the side end. Therefore, the step of polishing the side end face, which is indispensable in the past, can be omitted. Further, it becomes easy to form electrodes not only on the flat portion but also on the corner portion and the twill portion of the multilayer piezoelectric transformer element.

As a specific manufacturing method, a first step of forming at least an input electrode in a predetermined region on a ceramic green sheet, and cutting the ceramic green sheet into a desired size, overlapping and firing integrally. A second step of forming a multilayer piezoelectric transformer element, and immersing a part of a side end of the multilayer piezoelectric transformer element in an electrode paste material pool portion in which an electrode paste material is pooled in a container, thereby forming an external device. Third to form side electrode for connection
And a fourth step in which a predetermined region of the multilayer piezoelectric transformer element is subjected to polarization processing.

According to the above-mentioned manufacturing method, even if the side end of the laminated piezoelectric transformer element after integral firing is slightly uneven or irregular, one of the side ends of the laminated piezoelectric transformer element is located in the electrode paste material reservoir. By immersing the part, the application area and the application amount of the electrode paste material become uniform, and the side end electrode for external connection (input) is easily and stably without being affected by the unevenness of the side end surface. (A common electrode and an output-side end face electrode). Therefore, it is possible to prevent displacement and interruption of the end face electrode, and to omit the step of polishing the side end face which is indispensable in the past.

Further, as another specific manufacturing method, a first step of forming at least an input electrode in a predetermined region on the ceramic green sheet, and cutting the ceramic green sheet into a desired size, and superimposing the ceramic green sheet to form an integrated body By baking, the second step of forming the laminated piezoelectric transformer element, and by contacting a roller coated with an electrode paste material to a part of the side end of the laminated piezoelectric transformer element, for external connection The method includes a third step of forming a side end electrode, and a fourth step in which a predetermined region of the multilayer piezoelectric transformer element is polarized.

According to the above-mentioned manufacturing method, even if the side end of the laminated piezoelectric transformer element after integrally firing has a slight unevenness or irregularity, the electrode paste material is applied to the laminated piezoelectric transformer with extremely high accuracy by a roller. By applying and infiltrating the side end of the electrode paste material, the application area and the application amount of the electrode paste material become uniform, and furthermore, it is simpler and more stable for external connection without being adversely affected by the unevenness of the side end surface. Side end electrodes (input common electrode and output side end face electrode) can be formed. Therefore, it is possible to prevent the side end electrodes from being displaced or interrupted, and to omit the step of polishing the side end surface which is indispensable in the past.

Further, the width of the roller is configured in accordance with the width of the side electrode, and a side electrode for external connection to the laminated piezoelectric transformer element is formed.

According to the above-described manufacturing method, in addition to the above-described functions and effects, by adjusting the width of the roller, the application area and application amount of the electrode paste material applied at a time is adjusted, and the width of the side end electrode is adjusted. It can be controlled very easily.
In particular, even a side electrode having a small width can be formed with extremely high precision.

The method for manufacturing the external connection side end electrode according to the present invention is suitable for forming an input common electrode or an output side end surface electrode.

According to the present invention, there is provided an apparatus for manufacturing a laminated piezoelectric transformer, wherein a side end electrode is formed on a part of a side end of the laminated piezoelectric transformer. A roller for applying the electrode paste material to the side end of the transformer, an electrode paste material supply unit for supplying the electrode paste material to the roller, and the electrode paste material supplied on the roller is uniformly extended with a certain thickness dimension, And a squeegee for storing excess electrode paste material.

By using the above-mentioned manufacturing apparatus, the electrode paste material supplied from the electrode paste material supply section is always adjusted to a constant thickness by the squeegee and applied to the roller. Because it can be applied and penetrated to the side edges, the effect of surface irregularities is reduced, and the application area and application amount are uniform,
It is possible to form simple, stable and highly accurate side electrodes for external connection (input common electrode and output side face electrode). Therefore, it is possible to provide a highly reliable multilayer piezoelectric transformer manufacturing apparatus with improved yield, which prevents displacement or interruption of the side end electrodes.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In a first embodiment of the present invention, a Rosen-type laminated piezoelectric transformer driven in a λ mode will be described as an example. FIG. 1 is an exploded perspective view. FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a sectional view taken along the line BB of FIG. Note that the same parts as those in the conventional example are denoted by the same reference numerals.

The laminated piezoelectric transformer 1 is made of a PZT-based piezoelectric ceramic plate, has a slender rectangular parallelepiped shape as a whole, and is divided into a driving portion 1A and a power generation portion 1B around a central portion in the long side direction. The multilayer piezoelectric transformer 1 has a configuration in which the piezoelectric elements 1a are stacked, for example, in nine layers. In the driving portion, the first input electrodes 11a or the second input electrodes 12a are alternately provided on the respective piezoelectric elements 1a. A plurality is formed. The second input electrode 12a is exposed on the lower surface side of the lowermost piezoelectric element 1a, and the first input electrode 11a is exposed on the upper surface side of the uppermost piezoelectric element 1a. In addition, each piezoelectric element 1a is subjected to polarization processing in a direction facing each other. First input electrode 11
The sets of “a” are commonly connected to each other to form one input electrode 11, and the sets of the second input electrodes 12 a are commonly connected to each other to form the other input electrode 12. These two input electrodes are alternately provided as input common electrodes 111 and 12.
1 form an independent electrode as a pair of input electrodes 11 and 12.

In the power generating portion, a plurality of first output electrodes 13a or a plurality of second output electrodes 13b are alternately formed at the ends of the main surfaces of the piezoelectric elements 1a facing the input electrodes 11a and 12a. ing. The second output electrode 13b is exposed on the lower surface of the lowermost piezoelectric element 1a, and the first output electrode 13a is exposed on the upper surface of the uppermost piezoelectric element 1a. An output-side end face electrode 13 is formed at a longitudinal end of the power generation portion, and each polarization process is performed from the drive portion toward the output electrode at the end. Each of the electrodes is made of, for example, silver or silver palladium. When an AC voltage is applied to the input electrode, strong mechanical vibration occurs, and a voltage transforming action is obtained.

Next, a method of manufacturing the above-mentioned laminated piezoelectric transformer will be described with reference to FIG. On the upper surface of the ceramic green sheet, two types of output electrode and input electrode patterns G1 and G2 are formed by screen printing. For G3, a pattern of G1 is formed on the upper surface side of the ceramic green sheet, and a pattern corresponding to G2 is formed on the lower surface side by screen printing. The ceramic green sheet is cut in accordance with the outer dimensions of the main surface of the piezoelectric transformer. Of the cut green sheets, the G1 electrode pattern and the G2 electrode pattern are alternately overlapped from the upper surface, and the green sheet is placed at the bottom. G3
By stacking and laminating the electrode patterns having the above-mentioned electrode patterns and firing them integrally, the multilayer piezoelectric transformer element Z1 is formed. An output-side end face electrode and an input common electrode are respectively formed at one end of the laminated piezoelectric transformer element Z1 in the long side direction and at the input electrode extension portions on both end faces in the short side direction. These external connection side end electrodes are brought into contact with a part of the side end of the laminated piezoelectric transformer element Z1 while rotating a roller coated with an electrode paste material such as silver, which will be described later, to apply and permeate. It is formed. The input electrode region of the multilayer piezoelectric transformer element Z1 is polarized in the thickness direction and the output electrode region is polarized in the longitudinal direction, thereby completing the multilayer piezoelectric transformer of the present invention.

Here, an electrode forming apparatus using the above roller will be described with reference to FIG. The roller R has an application area R1 on the circumference thereof where the electrode paste material P is applied. The roller R is driven by a driving means M such as a motor via a driving transmission means B such as a belt attached thereto. The coating region R is configured to be rotatable.
1 is immersed in the electrode paste material pool T.
Note that a dispenser may be used as the electrode paste supply unit without being limited to the pool. The squeegee S has a stock surface S1 formed at a specific edge angle, and is arranged close to the application region R1 of the roller at a certain distance. The squeegee S is configured so that the distance from the roller R can be finely adjusted by a micrometer (not shown). Further, a carrier K is arranged on the lateral side of the roller R, and a carrier jig K1 for arranging a plurality of laminated piezoelectric transformer elements Z1 is installed on the carrier.

With the above configuration, the electrode paste material P applied from the pool T to the roller R moves by the rotation of the roller, and is stretched to the gap between the squeegee S and the roller R, and is uniformly applied to the entire roller R. Is applied uniformly to the thickness of Then, the electrode paste material P protruding beyond the gap between the squeegee S and the roller R is stopped by being hooked on the edge of the squeegee and is stocked on the stock surface S1. The carrier K includes a multilayer piezoelectric transformer element Z
1 are arranged in a state of being arranged using a carrier jig K1, and when one of the stacked piezoelectric transformer elements Z1 of the carrier jig K1 is moved to an application area approaching the roller R and stopped, the Accordingly, the carrier jig K1 moves in the lateral direction, and applies the electrode paste material P to the long side direction side end (in the case of forming the output side end face electrode) of the multilayer piezoelectric transformer element Z1. After the application of the electrode paste material P, the carrier jig K1 moves in the reverse lateral direction, and the carrier jig K1 slides to move the next multilayer piezoelectric transformer element Z1 to the application area again. The above series of steps is performed in a nitrogen atmosphere or by covering a portion other than the roller in contact with the multilayer piezoelectric transformer element Z1 with a cover C, thereby preventing oxidation of a metal contained in the electrode paste material and further improving reliability. can do.

The second embodiment will be described with reference to an example of a center drive type laminated piezoelectric transformer driven in a λ / 2 mode. FIG. 6 is an exploded perspective view. FIG. 7 is a sectional view taken along line AA of FIG. 6, and FIG. 8 is a sectional view taken along line BB of FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and a part of the description is omitted.

The piezoelectric transformer element 7 is made of a PZT-based piezoelectric ceramic plate, and has an elongated rectangular parallelepiped shape as a whole.
A drive portion 7A is formed near the center in the long side direction, and power generation portions 7B and 7C are formed on both sides thereof. The piezoelectric transformer element 7 has a configuration in which, for example, 11 layers of piezoelectric elements 7a are laminated, and in the driving portion, a plurality of first input electrodes 71a or second input electrodes 72a are alternately provided on each of the piezoelectric elements 7a. Is formed. Then, the lower surface side of the lowermost piezoelectric element 7a and the uppermost piezoelectric element 7a
No input electrode is formed on the upper surface side of each of them, and has an electrodeless surface 75a. Each of the piezoelectric elements 7a except for the lowermost piezoelectric element and the uppermost piezoelectric element is subjected to a polarization process in a direction facing each other. First input electrode 71
The sets of “a” are commonly connected to each other to form one input electrode 71, and the sets of the second input electrodes 72 a are commonly connected to each other to form the other input electrode 72. These two input electrodes are alternately provided as input common electrodes 711, 72.
1 form an independent electrode as a pair of input electrodes 71 and 72.

Output electrodes 73 and 74 are formed on both longitudinal ends of the power generation portions 7B and 7C, respectively.
Each polarization process is performed from the drive portion at the center to the output electrodes at both ends. Each of the electrodes is made of, for example, silver or silver palladium. The polarization in the longitudinal direction may be opposite to the direction from both ends to the center, or may be the same direction from one end to the other end in the longitudinal direction. When an AC voltage is applied to the input electrode, strong mechanical vibration occurs, and a voltage transforming action is obtained.

Next, a method of manufacturing the above-mentioned laminated piezoelectric transformer will be described with reference to FIG. On the upper surface of the ceramic green sheet, two types of input electrode patterns G5 and G6 are formed by screen printing. For G4, no input electrode is formed on the upper and lower surfaces of the ceramic green sheet. The ceramic green sheet is cut in accordance with the outer dimensions of the main surface of the piezoelectric transformer. Of the cut green sheets, the G5 electrode pattern and the G6 electrode pattern are alternately overlapped from the upper surface, and the green sheet is formed on the uppermost portion. G4
Are laminated and baked integrally to form a laminated piezoelectric transformer element Z7. An output electrode and an input common electrode are formed on both sides of the multilayer piezoelectric transformer element Z7 in the long side direction and on the input electrode extension portions on both end faces in the short side direction, respectively. These side connection electrodes for external connection are formed by contacting a part of the side end of the multilayer piezoelectric transformer element while rotating a roller coated with the above-mentioned electrode paste material such as silver, and applying and permeating the coating. Is done. The input electrode region of the multilayer piezoelectric transformer element Z7 is polarized in the thickness direction, and the output electrode region is polarized in the longitudinal direction, thereby completing the multilayer piezoelectric transformer of the present invention.

In the third embodiment, a Rosen-type laminated piezoelectric transformer driven in the λ mode will be described as an example. FIG. 10 is an exploded perspective view. FIG. 11 shows A-
FIG. 12 is a sectional view taken along line A, and FIG. 12 is a sectional view taken along line BB in FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and a part of the description is omitted.

The laminated piezoelectric transformer 1 is made of a PZT-based piezoelectric ceramic plate, has a slender rectangular parallelepiped shape as a whole, and is divided into a driving portion 1A and a power generation portion 1B near a central portion in the long side direction. The multilayer piezoelectric transformer 1 has a configuration in which the piezoelectric elements 1a are stacked, for example, in nine layers. In the driving portion, the first input electrodes 11a or the second input electrodes 12a are alternately provided on the respective piezoelectric elements 1a. A plurality is formed. The second input electrode 12a is exposed on the lower surface side of the lowermost piezoelectric element 1a, and the first input electrode 11a is exposed on the upper surface side of the uppermost piezoelectric element 1a. In addition, each piezoelectric element 1a is subjected to polarization processing in a direction facing each other. First input electrode 11
The sets of “a” are commonly connected to each other to form one input electrode 11, and the sets of the second input electrodes 12 a are commonly connected to each other to form the other input electrode 12. These two input electrodes are alternately provided as input common electrodes 112 and 12.
2 form a pair of input electrodes 11 and 12 and form independent electrodes.

In the power generation section, an output side end face electrode 13 is formed at the longitudinal end, and each polarization process is performed from the drive section toward the output electrode at the end. Each of the electrodes is made of, for example, silver or silver palladium. When an AC voltage is applied to the input electrode, strong mechanical vibration occurs, and a voltage transforming action is obtained.

Next, a method of manufacturing the above-mentioned laminated piezoelectric transformer will be described with reference to FIG. On the upper surface side of the ceramic green sheet, two types of input electrode patterns G7 and G8 are formed by a screen printing method. For G9, a pattern of G7 is formed on the upper surface side of the ceramic green sheet, and a pattern corresponding to G8 is formed on the lower surface side by screen printing. The ceramic green sheet is cut in accordance with the outer dimensions of the main surface of the piezoelectric transformer. Of the cut green sheets, the G7 electrode pattern and the G8 electrode pattern are alternately overlapped from the upper surface, and the green sheet is formed at the bottom. G9
By stacking and laminating the electrode patterns having the above-mentioned electrode patterns and firing them integrally, the multilayer piezoelectric transformer element Z1 is formed. One end of the laminated piezoelectric transformer element Z1 in the long side direction and an input electrode extension portion of a side end portion facing the one end,
An output side end face electrode and an input common electrode are formed respectively.
These side electrodes for external connection are formed by immersing a part of the side end of the laminated piezoelectric transformer element Z1 in an electrode paste material storage portion in which an electrode paste material such as silver described later is stored in a container. It is formed. The input electrode region of the multilayer piezoelectric transformer element Z1 is polarized in the thickness direction and the output electrode region is polarized in the longitudinal direction, thereby completing the multilayer piezoelectric transformer of the present invention.

Here, an electrode forming apparatus using the above-mentioned electrode paste material pool will be described with reference to FIG. A carrier K is arranged in the upper surface direction with respect to the electrode paste material reservoir T, and a carrier jig K1 for arranging a plurality of laminated piezoelectric transformer elements Z1 is installed on the carrier K. When one of the stacked piezoelectric transformer elements Z1 of the fixture K1 is moved to the application region above the electrode paste material reservoir and stopped, the carrier jig K1 is moved downward, and the stacked jig K1 is moved downward. The electrode paste material P is applied by immersing the long-side end of the piezoelectric transformer element Z1 (in the case of forming the output-side end face electrode). After the application of the electrode paste material P, the carrier jig K1 moves upward, and the carrier jig K1
Slides to move the next multilayer piezoelectric transformer element Z1 again to the application area. The above series of steps is performed in a nitrogen atmosphere, or by covering a portion other than the portion where the laminated piezoelectric transformer element Z1 is immersed with the cover C, thereby preventing oxidation of the metal contained in the electrode paste material and further improving reliability. can do.

In the above embodiment, a roller, a pool or the like is disclosed as a mediating jig for applying the electrode paste material. However, the electrode paste material may be applied using a sponge-like or brush-like application tool.

[0036]

According to the first aspect of the present invention, the electrode paste material is transmitted to the side ends of the laminated piezoelectric transformer even if the side ends of the laminated piezoelectric transformer element after integral firing are slightly uneven or irregular. By applying with a jig, the side electrodes for external connection (input common electrode and output side face electrode) can be stably applied without being affected by the unevenness of the side surface.
Can be formed. Therefore, the step of polishing the side end face, which is indispensable in the past, can be omitted. Further, it becomes easy to form electrodes not only on the flat portion but also on the corner portion and the twill portion of the multilayer piezoelectric transformer element.

According to the second aspect of the present invention, even if the side end of the laminated piezoelectric transformer element after integral firing is slightly uneven or irregular, the side end of the laminated piezoelectric transformer element is stored in the electrode paste material reservoir. By immersing a part thereof, the application area and the application amount of the electrode paste material become uniform, and the side end electrode for external connection (input) can be easily and stably without being adversely affected by the unevenness of the side end surface. Common electrode and output side end face electrode). Therefore, it is possible to prevent displacement and interruption of the end face electrode, and to omit the step of polishing the side end face which is indispensable in the past.

According to the third aspect of the present invention, even if the side ends of the laminated piezoelectric transformer element after integrally firing have some unevenness or irregularity, the electrode paste material is applied to the laminated piezoelectric transformer element with extremely high accuracy by a roller. By applying to the side edges of the transformer and allowing it to penetrate, the application area and application amount of the electrode paste material becomes uniform, and the external connection surface is easily and stably used without being adversely affected by the unevenness of the side end surfaces. (The common electrode for input and the electrode on the output side) can be formed. Therefore, it is possible to prevent the side end electrodes from being displaced or interrupted, and to omit the step of polishing the side end surface which is indispensable in the past.

According to the present invention, in addition to the above-mentioned functions and effects, by adjusting the width of the roller, the application area and the application amount of the electrode paste material applied at one time are adjusted, and the width of the side end electrode is adjusted. Can be controlled very easily.
In particular, even a side electrode having a small width can be formed with extremely high precision.

According to claim 5, it is possible to provide a method for manufacturing a laminated piezoelectric transformer suitable for forming an input common electrode or an output side end face electrode.

According to the sixth aspect of the present invention, by using the manufacturing apparatus of the present invention, the electrode paste material supplied from the electrode paste material supply unit is always adjusted to a constant thickness by the squeegee and applied to the roller. Since it can be applied and penetrated to the side end of the laminated piezoelectric transformer, which is an object, the effects of surface irregularities are reduced, and the application area and application amount are uniform, making it easier, more stable, and more accurate with external connections Side end electrodes (input common electrode and output side end face electrode) can be formed. Therefore, it is possible to provide a highly reliable multilayer piezoelectric transformer manufacturing apparatus with improved yield, which prevents displacement or interruption of the side end electrodes.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a first embodiment.

FIG. 2 is a sectional view taken along the line AA of FIG. 1;

FIG. 3 is a sectional view taken along the line BB of FIG. 1;

FIG. 4 is a diagram showing a manufacturing method according to the first embodiment.

FIG. 5 is a view showing an electrode forming apparatus of the present invention.

FIG. 6 is an exploded perspective view showing a second embodiment.

FIG. 7 is a sectional view taken along the line AA in FIG. 6;

FIG. 8 is a sectional view taken along the line BB of FIG. 6;

FIG. 9 is a diagram showing a manufacturing method according to a second embodiment.

FIG. 10 is an exploded perspective view showing a third embodiment.

FIG. 11 is a sectional view taken along the line AA of FIG. 10;

FIG. 12 is a sectional view taken along the line BB in FIG. 10;

FIG. 13 is a diagram showing a manufacturing method according to a third embodiment.

FIG. 14 is a view showing an electrode forming apparatus according to a third embodiment of the present invention.

FIG. 15 is an exploded perspective view showing a conventional embodiment.

FIG. 16 is a sectional view taken along the line AA of FIG. 10;

FIG. 17 is a sectional view taken along the line BB of FIG. 10;

[Explanation of symbols]

 1, 7 ... piezoelectric transformer element 11, 12, 71, 72 ... input electrode 13, 13a, 73, 74 ... output electrode

Claims (6)

[Claims] 1. A method of manufacturing a laminated piezoelectric transformer, comprising: a first step of forming at least an input electrode in a predetermined region on a ceramic green sheet; and cutting the ceramic green sheet into a desired size.
A second step of forming a laminated piezoelectric transformer element by overlapping and integrally firing, and applying an electrode paste material to a part of a side end of the laminated piezoelectric transformer element with an intermediate jig, thereby forming an external part. A method of manufacturing a multilayer piezoelectric transformer, comprising: a third step of forming a side electrode for connection; and a fourth step of performing a polarization process on a predetermined region of the multilayer piezoelectric transformer element. 2. A method of manufacturing a laminated piezoelectric transformer, comprising: a first step of forming at least an input electrode in a predetermined area on a ceramic green sheet; and cutting the ceramic green sheet into a desired size.
A second step of forming a laminated piezoelectric transformer element by superimposing and integrally firing the laminated piezoelectric transformer element; and forming one side end of the laminated piezoelectric transformer element in an electrode paste material storage portion in which the electrode paste material is stored in a container. A multilayer piezoelectric transformer comprising: a third step of forming side electrodes for external connection by immersing a portion; and a fourth step of performing a polarization process on a predetermined region of the multilayer piezoelectric transformer element. Manufacturing method. 3. A method of manufacturing a laminated piezoelectric transformer, comprising: a first step of forming at least an input electrode in a predetermined area on a ceramic green sheet; and cutting the ceramic green sheet into a desired size.
A second step of forming a laminated piezoelectric transformer element by overlapping and integrally firing, and by contacting a roller coated with an electrode paste material to a part of a side end of the laminated piezoelectric transformer element, A method for manufacturing a multilayer piezoelectric transformer, comprising: a third step of forming side end electrodes for external connection; and a fourth step of performing polarization processing on a predetermined region of the multilayer piezoelectric transformer element. 4. The roller according to claim 3, wherein the width of the roller is configured in accordance with the width of the side electrode, and a side electrode for external connection to the laminated piezoelectric transformer element is formed. A manufacturing method of the multilayer piezoelectric transformer according to the above. 5. A method of manufacturing a laminated piezoelectric transformer, wherein the side electrode for external connection forms at least one of an input common electrode and an output side end face electrode. A method for manufacturing a multilayer piezoelectric transformer according to claim 1. 6. A laminated piezoelectric transformer manufacturing apparatus in which a side end electrode is formed on a part of a side end of the laminated piezoelectric transformer, wherein a roller for applying an electrode paste material to a side end of the laminated piezoelectric transformer. An electrode paste material supply unit for supplying an electrode paste material to the roller, and a squeegee for uniformly extending the electrode paste material supplied on the roller with a certain thickness, and for storing excess electrode paste material. An apparatus for manufacturing a laminated piezoelectric transformer, comprising: