JP2002298339A - Thin film magnetic tape manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance use efficiency of a magnetic metal material. SOLUTION: First and second cooling can rolls 16, 17 are arranged by being mutually approximated, one evaporation source 18 to supply steam flow 19a of the magnetic metal material is installed in the lower direction of the first and second can rolls, first and second minimum incident angle regulation masks 28, 26 are provided in the vicinity of the first and second cooling can rolls 16, 17 respectively, one maximum incident angle regulation mask 25 is provided in the upper direction of an interval between the first and second cooling can rolls 16, 17, a nonmagnetic ground film is formed on a base film 12 as progressively increasing an incident angle of vapor flow 19a of the magnetic metal material to the base film 12 on the upstream side in a track, a ferromagnetic metal thin film is further formed on the nonmagnetic ground film as progressively reducing the incident angle of the vapor flow of the magnetic metal material to the base film 12 on the downstream side in the track.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a thin-film magnetic tape for forming a non-magnetic base film and a ferromagnetic metal thin film on a base film.

[0002]

2. Description of the Related Art In recent years, magnetic tapes applied to digital video tape recorders and the like are required to be formed by depositing a ferromagnetic metal film using an oblique deposition method in order to achieve a higher density. Tape is attracting attention. Furthermore,
With the advent of (G) MR (magnetoresistive) heads, there is also a movement to mount this (G) MR head on digital video tape recorders and the like. In order to improve the SN ratio, the thickness of the ferromagnetic metal film is further increased. It is urgently necessary to reduce the film thickness. However, when a thin-film magnetic tape is manufactured by reducing the thickness of the ferromagnetic metal film over the conventional length, a magnetostatic property is deteriorated by using only the ferromagnetic metal thin film, which is a problem. In order to solve this problem, it has been proposed to provide a non-magnetic base film such as CoO under a ferromagnetic metal thin film (magnetic film).

Therefore, as one example of a method of manufacturing this type of medium, a method of manufacturing a magnetic recording medium disclosed in Japanese Patent Application Laid-Open No. 61-198429 discloses a method of manufacturing a magnetic recording medium on a tape-shaped non-magnetic substrate that moves continuously in a vacuum atmosphere. In forming a non-magnetic underlayer and a ferromagnetic metal thin film, a non-magnetic metal or metal oxide vapor stream is obliquely incident on the substrate, and the non-magnetic underlayer is formed while gradually increasing the incident angle. In order to improve the magnetic properties and durability, the ferromagnetic metal vapor flow is obliquely incident on the substrate on which the non-magnetic underlayer is formed, and the ferromagnetic metal thin film is formed while gradually decreasing the incident angle. I have.

FIG. 5 is a configuration diagram showing a configuration of an apparatus used in a conventional method of manufacturing a magnetic recording medium.

The apparatus 100 used in the conventional method for manufacturing a magnetic recording medium shown in FIG.
98429, which will be briefly described with reference to the publication.

The above-described apparatus 100 is provided with a first vacuum chamber 101 for forming a non-magnetic base film on a tape-shaped non-magnetic substrate 102, and is connected to the first vacuum chamber 101 so that a tape is formed. A second vacuum chamber 111 for further forming a ferromagnetic metal thin film on the nonmagnetic base film formed on the non-magnetic base 102 is provided.

First, a plurality of constituent members for forming a non-magnetic base film on a tape-shaped non-magnetic base 102 are provided in a first vacuum chamber 101.

That is, a tape-shaped non-magnetic substrate 102 is wound around a supply roll 103 in the first vacuum chamber 101, and the tape-shaped non-magnetic substrate 102 sent out from the supply roll 103 includes a plurality of guide rollers. It is sent to a cylindrical first cooling can roll 105 rotatably provided in the vacuum chamber 101 through 104.

A first evaporation source 106 made of a non-magnetic metal or metal oxide is installed at the lower left of the first cooling can roll 105 in the figure. 106a is a tape-shaped non-magnetic substrate 1 running along the first cooling can roll 105
02 is obliquely incident.

In the vicinity of the first cooling can roll 105, the minimum incident angle θmin at the time of film formation on the non-magnetic base film from upstream to downstream along the running path of the tape-shaped non-magnetic substrate 102 is set. The first minimum incident angle regulating mask 107 for regulating the first evaporation source 10 and the first maximum incident angle regulating mask 108 for regulating the maximum incident angle θmax.
6 are provided. Further, a first gas introduction mechanism 109 is provided between the first cooling can roll 105 and the first minimum incident angle regulating mask 107. Then, the first vapor flow 106 to the tape-shaped non-magnetic substrate 102
a while gradually increasing the angle of incidence of a.
A non-magnetic underlayer is formed on the substrate 02.

Thereafter, the tape-shaped non-magnetic substrate 102 on which the non-magnetic underlayer is formed is sent through a plurality of guide rollers 104 into a second vacuum chamber 111, and the second vacuum chamber 111 A plurality of constituent members for further forming a ferromagnetic metal thin film on a non-magnetic base film formed on the tape-shaped non-magnetic base 102 are provided therein.

That is, in the second vacuum chamber 111, a tape-shaped non-magnetic substrate 102 on which a non-magnetic base film is formed in the first vacuum chamber 101 has a cylindrical shape provided rotatably in the vacuum chamber 111. Is sent to the second cooling can roll 112.

At the lower right of the second cooling can roll 112 in the figure, a second evaporation source 113 charged with a ferromagnetic metal is installed. From this evaporation source 113, a second vapor flow 113a is generated. The light is obliquely incident on the non-magnetic base film on the tape-shaped non-magnetic substrate 102 running along the second cooling can roll 112.

In the vicinity of the second cooling can roll 112, the maximum incident angle θmax at the time of applying the film to the ferromagnetic metal thin film from the upstream to the downstream along the running path of the tape-shaped non-magnetic base 102 is set. The second maximum incidence angle restriction mask 114 for restricting and the first minimum incident angle restriction mask 115 for restricting the minimum incident angle θmin are the second evaporation source 1.
13, and a second gas introduction mechanism 116 is provided between the second cooling can roll 112 and the second minimum incident angle regulating mask 115. Then, the second vapor flow 113 to the tape-shaped non-magnetic substrate 102
a tape-shaped non-magnetic substrate 1 while gradually decreasing the incident angle
Further, a ferromagnetic metal thin film is further formed on the non-magnetic base film formed on the non-magnetic base film 02.

Thereafter, the tape-shaped non-magnetic substrate 102 on which the non-magnetic base film and the ferromagnetic metal thin film are formed is passed through a plurality of guide rollers 104 and is taken up by a take-up roll 117 provided in a second vacuum chamber 111. Has been wound up.

[0016]

By using the above-described apparatus 100, the tape-shaped non-magnetic substrate 102 is run once in one direction, and the non-magnetic base film and the ferromagnetic When the metal thin film is formed, the non-magnetic undercoat film is formed by the first vapor flow 106 a from the first evaporation source 106.
The ferromagnetic metal thin film is formed while gradually decreasing the incident angle with respect to the second vapor flow 113a from the second evaporation source 113, while the incident angle is gradually increased. Although it is disclosed that the magnetic properties and durability can be improved, in the above-mentioned embodiment in the publication, tin is used as a non-magnetic base film on the tape-shaped non-magnetic substrate 102 by using 50 tin.
After that, a cobalt-nickel (Ni: 20 wt%) magnetic thin film was deposited as a ferromagnetic metal thin film to a thickness of 16 nm.
It is deposited to a thickness of 0 nm. As described above, when the film forming material of the non-magnetic base film is different from the film forming material of the ferromagnetic metal thin film, two evaporation sources 106 and 113 are required. Underlayer and Co-
When a CoO magnetic metal thin film or the like is formed, a Co magnetic metal material can be used as an evaporation source. Therefore, having two evaporation sources cannot effectively utilize a film forming material.

Further, a CoO non-magnetic underlayer and a Co-Co
When an O magnetic metal thin film or the like is formed, the CoO non-magnetic metal thin film is further isolated so that the magnetic interaction between the particles of the Co—CoO magnetic metal thin film is reduced more effectively. At present, a method for forming a good magnetic underlayer has not been found.

Further, since two cooling can rolls 105 and 112 having substantially the same diameter are mounted in the apparatus 100, there is a problem that the apparatus 100 is enlarged.

[0019]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a first invention is to make a base film run in one direction along a rotatable cooling can roll in a vacuum chamber. A non-magnetic undercoat film is formed on the base film while gradually increasing the incident angle of the magnetic metal vapor stream to the base film on the upstream side of the traveling path, and further on the downstream side of the traveling path. An apparatus for manufacturing a thin-film magnetic tape, wherein a ferromagnetic metal thin film is formed on the nonmagnetic underlayer film while gradually decreasing an incident angle of the magnetic metal material vapor stream to the base film, wherein the base film A first cooling can roll for forming the non-magnetic base film on the base film while traveling along the base film; and a non-magnetic base film approaching the first cooling can roll. Was deposited A second cooling can roll for forming the ferromagnetic metal thin film on the non-magnetic base film while running along the base film, and a lower portion between the first and second cooling can rolls. An evaporation source installed to supply the magnetic metal material vapor stream;
A first oxygen introduction pipe for spraying a predetermined amount of oxygen gas onto the magnetic metal vapor stream from the one evaporation source to form the non-magnetic undercoat film on the cooling can roll side; The ferromagnetic metal thin film is formed by spraying the magnetic metal vapor stream from the one evaporation source with an oxygen gas whose amount is smaller than that of the predetermined amount of oxygen gas, toward the second cooling can roll side. A second oxygen introduction pipe for forming a film, first and second minimum incident angle regulating masks respectively provided near the first and second cooling can rolls with the one evaporation source interposed therebetween, and An apparatus for manufacturing a thin-film magnetic tape, comprising: one maximum incident angle regulating mask provided above between first and second cooling can rolls.

According to a second aspect of the present invention, a base film is run in one direction along a rotatable cooling can roll in a vacuum chamber, and an evaporant vapor stream flows to the base film on an upstream side of a running path. A non-magnetic base film is formed on the base film while gradually increasing the incident angle of the magnetic film, and the incident angle of the magnetic metal material vapor flow to the base film is gradually reduced on the downstream side of the traveling path. In a thin film magnetic tape manufacturing apparatus configured to form a ferromagnetic metal thin film on a non-magnetic base film, the non-magnetic base film is formed on the base film while running along the base film. Further, one cooling can roll for forming the ferromagnetic metal thin film on the non-magnetic base film, and a cooling can roll near the one cooling can roll on the upstream side in the traveling path and provided downstream in order. A first minimum incident angle restricting mask, a first maximum incident angle restricting mask, and an evaporating material vapor stream disposed below the first minimum incident angle restricting mask and the first maximum incident angle restricting mask; A first evaporation source for supplying air, a second maximum incident angle regulating mask and a second minimum incident angle, which are sequentially provided downstream in the vicinity of the one cooling can roll on the downstream side in the traveling path. A regulating mask, and a second evaporation source provided below the second maximum incident angle regulating mask and the second minimum incident angle regulating mask, for supplying the magnetic metal material vapor flow. An apparatus for manufacturing a thin-film magnetic tape, comprising:

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a thin-film magnetic tape manufacturing apparatus according to the present invention will be described below with reference to FIGS.
Embodiment> and <Second Embodiment> will be described in detail in this order.

<First Embodiment> FIG. 1 is a block diagram showing the configuration of a thin-film magnetic tape manufacturing apparatus according to a first embodiment of the present invention.
FIG. 2 is a schematic view schematically showing a growth process of a non-magnetic under film and a growth particle of a magnetic thin film in a thin film magnetic tape manufactured by using the thin film magnetic tape manufacturing apparatus according to the first embodiment of the present invention. FIG. 3 is a configuration diagram for explaining a modification in which the thin-film magnetic tape manufacturing apparatus of the first embodiment according to the present invention is partially modified.

As shown in FIG. 1, a thin-film magnetic tape manufacturing apparatus 10A according to a first embodiment of the present invention is configured to apply an oblique deposition method, and a vacuum pump 11A (not shown) Is maintained in a vacuum state.

A supply roll 13 for winding a base film 12 serving as a medium material of the thin-film magnetic tape and a take-up roll 14 are rotatably provided on the left and right sides of the vacuum chamber 11A with a space therebetween. Have been. At this time, the base film 12 generally uses a PET (polyethylene terephthalate) film having a thickness of about 6.4 μm.

A plurality of guide rollers 15 are provided between the supply roll 13 and the take-up roll 14.
Are arranged at appropriate positions along a predetermined traveling path.

Between the supply roll 13 and the take-up roll 14, the base film 12 is moved in one direction along the small-diameter outer peripheral surface on the upstream side of the running path of the base film 12. A first cooling can roll (hereinafter referred to as a small-diameter cooling can roll) 16 for forming a non-magnetic base film on the base film 12 is rotatably provided in the direction of an arrow, For forming a ferromagnetic metal thin film further on the non-magnetic base film while running the base film 12 having the non-magnetic base film formed on the downstream side in one direction along the large-diameter outer peripheral surface. A second cooling can roll (hereinafter, referred to as a large diameter cooling can roll) 17 is rotatably provided in the direction of the arrow, and the two cooling can rolls 16 and 17 approach each other at a slight distance from each other, and are evacuated. Tank 1 It is juxtaposed on the left and right around the substantially central portion in the A. In addition, both cooling can rolls 16, 17
A cooler (not shown) is installed in the inside to suppress deformation and the like of the base film 12 due to a rise in temperature during vapor deposition.

Then, the base film 12 wound around the supply roll 13 is sent to a small-diameter cooling can roll 16 through a plurality of guide rollers 15, and the small-diameter cooling can roll 16 forms a non-magnetic undercoat on the base film 12. A base film is formed, and thereafter, the base film 12 is sent to a large-diameter cooling can roll 17 through a plurality of guide rollers 15, and the large-diameter cooling can roll 17 is used to form a ferromagnetic metal film on a non-magnetic base film. After the thin film is formed, the film is wound on a winding roll 14 through a plurality of guide rollers 15. Therefore, as the base film 12 travels once in one direction, a non-magnetic underlayer and a ferromagnetic metal thin film are formed as in the conventional example.

At this time, since the base film 12 travels at a constant speed from the supply roll 13 toward the take-up roll 14, the rotation speed of both cooling can rolls 16 and 17 is equal to the traveling speed of the base film 12. Is set according to the diameter of each cooling can roll 16, 17.

One evaporation source is provided below the small-diameter cooling can roll 16 and the large-diameter cooling can roll 17. In the first embodiment, MgO (magnesia) is used as a crucible material. ), One crucible 18 formed in a box shape is installed, and the crucible 18 contains Co.
A (pure Co) magnetic metal material 19 is accommodated. On this occasion,
The Co magnetic metal material 19 accommodated in the crucible 18 is a film-forming material that can be used for both the non-magnetic base film and the ferromagnetic metal thin film, and may be any film-forming material that can be used for both films. By providing only one evaporation source, the film forming material can be effectively used.

Further, on the left side wall 11a of the vacuum chamber 11A,
A pierce-type electron gun 20 for melting and evaporating the Co magnetic metal material 19 accommodated in the crucible 18 into a Co vapor 19a is attached to the crucible 18 obliquely below.
In the following description, the reference numeral 19a is referred to as “Co vapor (magnetic metal material vapor)” or “Co vapor flow (magnetic metal material vapor flow)” depending on the situation of the preceding and following description. This will be described separately for each case.

The above-described piercing type electron gun 20 is a crucible 1
8 toward the Co magnetic metal material 19 in the electron beam 20a.
The Co vapor 19a, which is obtained by melting and evaporating the Co magnetic metal material 19 with the electron beam 20a, is converted into a small-diameter cooling can roll 16 and a large-diameter cooling can roll 17.
Is deposited on the side of the base film 12 running along.

At this time, the electron beam 20a emitted from the pierce-type electron gun 20 is applied to a deflection magnet 21 attached to the pierce-type electron gun 20 to apply a deflecting magnetic field to the orbit.
And a deflection magnet 22 provided near the crucible 18. Therefore, by scanning the electron beam 20a in the longitudinal direction of the crucible 18, the Co vapor flow 19a
Are generated along the width direction of the base film 12.

Below the small diameter cooling can roll 16, the minimum incident angle θmin at the time of coating the film on the non-magnetic underlayer is described.
A first minimum incident angle restricting mask 23 for restricting the first oxygen gas introduction pipe 2 between the cooling can roll 16 and the first minimum incident angle restricting mask 23.
4 is attached. Then, a predetermined amount of oxygen gas O ₂ is injected from a plurality of holes (not shown) formed in the first oxygen gas introduction pipe 24, and a predetermined amount of oxygen gas O ₂ is injected into the Co vapor stream 19 a evaporated from the crucible 18. gas _{O 2} is blown.

At this time, in order to form the Co vapor 19a evaporated from the inside of the crucible 18 on the base film 12 as a CoO non-magnetic base film, the first oxygen gas introduction pipe 2
By setting the amount of oxygen gas O ₂ introduced into the substrate 4 to a predetermined amount or more as described later, the Co vapor 19a is oxidized by the oxygen gas O ₂ and formed as a CoO non-magnetic underlayer film on the base film 12. Is done. Here, the amount of oxygen gas O ₂ introduced was changed by a preliminary experiment, and the vibrating magnetometer (V
CoO nonmagnetic underlayer is preset a predetermined amount of oxygen gas O ₂ is not magnetized by SM).

In addition, the maximum incidence when the film is applied to the non-magnetic base film and the ferromagnetic metal thin film is located above the gap formed between the small-diameter cooling can roll 16 and the large-diameter cooling can roll 17. A maximum incident angle restricting mask 25 for restricting the angle θmax is provided.

Below the large-diameter cooling can roll 17, a minimum incident angle θmi when the ferromagnetic metal thin film is applied is formed.
A second minimum incident angle restricting mask 26 for restricting n is provided. Therefore, the first and second minimum incident angle regulating masks 23 and 26 are provided in a substantially C-shape in the vicinity of the cooling can rolls 16 and 17 with one crucible 18 interposed therebetween. Further, a second oxygen gas introduction pipe 27 is attached between the large-diameter cooling can roll 17 and the second minimum incident angle regulating mask 26. Then, a predetermined amount of oxygen gas O is supplied from the plurality of holes (not shown) formed in the second oxygen gas introduction pipe 27 by the first oxygen gas introduction pipe 24.
Oxygen gas O ₂ with a reduced amount of gas by a large margin than ₂ is injected, oxygen gas O ₂ with a reduced amount of gas is blown to Co vapor stream 19a evaporated from the crucible 18.

The oxygen gas O from the oxygen introduction pipe 24
₂ and the oxygen gas O ₂ from the oxygen introduction pipe 27, by extending the lower part of the maximum incident angle regulating mask 25 toward the lower crucible 18 side, the respective oxygen introduction pipes 24, 27
The oxygen gas O ₂ is separated by the small-sized cooling can roll 16 and the large-sized cooling can roll 17.

As described above, on the upstream side of the traveling path of the base film 12, the first minimum incident angle regulating mask 23 and the maximum incident angle are arranged in the vicinity of the small-diameter cooling can roll 16 toward the downstream of the traveling path of the base film 12. A restricting mask 25 is provided. Further, on the downstream side of the traveling path of the base film 12, the maximum incident angle regulating mask 25 and the second incident angle regulating mask 25 are arranged in the vicinity of the large-diameter cooling can roll 17 toward the downstream of the traveling path of the base film 12. And the minimum incident angle regulating mask 26 is provided, and in this case, the maximum incident angle regulating mask 25 is shared.

Here, the first embodiment will be specifically described. The small diameter cooling can roll 16 has a diameter of 150 mm and a width of 260 mm, and the large diameter cooling can roll 17 has a diameter of 300 mm.
mm, width 260 mm, thickness of base film 12 is 6.
4 μm PET, width 200 mm, film formation area width 150
mm. The Co magnetic metal material 19 in the crucible 18
The piercing electron gun 20 having a maximum output of 30 kW was used for melting and evaporating. Each of the masks (shielding plates) 23, 25, and 26 is made of stainless steel having a thickness of 4 to 7 mm and surrounds the outer periphery of the film forming area while being cooled with water. A supply machine (not shown) was provided so that a constant amount of Co magnetic metal material 19 was continuously supplied from one end of the crucible 18. The oxygen gas introduction pipes 24 and 27 each have a loop shape with a single gas introduction port, and are formed by piercing fine holes of φ0.5 mm in a φ1 / 4 ”stainless steel pipe at a pitch of 3 mm. ,
The blowout micropores were arranged so as to be parallel to the width direction of the base film 12 toward the steam flow incident portion. The minimum incident angle θmin by the first and second minimum incident angle regulating masks 23 and 26 was set to about 45 degrees.

The base wound around the supply roll 13
The film 12 has a small diameter via a plurality of guide rollers 15.
First minimum angle of incidence control along the cooling can roll 16
From the mask 23 side to the maximum incident angle control mask 25 side
On the way from the oxygen gas introduction pipe 24
Degree oxygen gas O₂100-200 ccm
Purity oxygen gas O₂Co vapor evaporated from inside the crucible 18 at
19a is completely oxidized and both masks 23, 25
When passing through the gap, Co vapor to the base film 12
While gradually increasing the incident angle of the stream 19a,
A CoO non-magnetic base film having a thickness of about 0.07 μm
Was formed. At this time, high purity oxygen gas O ₂Introduce 1
When set to 00 to 200 ccm, the CoO non-magnetic base
In a preliminary experiment, it was confirmed that the film was not magnetized by a vibrating magnetometer (V
SM).

Incidentally, the Co vapor stream 19a was applied to the base film 1
When the film is formed on the base film 12, whether or not the film becomes nonmagnetic is determined not at the stage of the Co vapor flow 19 a but at the stage of forming the film on the base film 12.

At this time, as shown in FIG.
The grown particles (columns) of the non-magnetic base film are densely adhered on the minimum incident angle θmin side by the first minimum incident angle regulating mask 23 to coarse on the maximum incident angle θmax side by the maximum incident angle regulating mask 25. Since the film is formed on the base film 12 while shifting to the adhered state, the surface layer portion of the grown particles (columns) of the CoO non-magnetic underlayer is in a coarsely adhered state, thereby increasing isolation.

Thereafter, the base film 12 on which the CoO non-magnetic underlayer is formed is moved from the maximum incident angle regulating mask 25 side to the second minimum incident angle regulating mask 26 along the cooling can roll 17 having a large diameter. During the traveling, the amount of the high-purity oxygen gas O ₂ from the oxygen gas introduction pipe 27 was reduced to a large amount as compared with the non-magnetic underlayer film formation, and 20 ccm was introduced to the Co vapor 19 a evaporated from the crucible 18. The CoO non-magnetic base film formed on the base film 12 while gradually decreasing the angle of incidence of the Co vapor flow 19a on the base film 12 while providing the base film 12 with magnetism while passing between the masks 25 and 26. Further, a Co-CoO magnetic metal thin film (ferromagnetic metal thin film) was formed to a thickness of approximately 0.05 μm over a processing length of 1000 m.

At this time, as shown in FIG.
The grown particles (columns) of the O magnetic metal thin film are changed from a rough attachment state on the maximum incident angle θmax side by the maximum incident angle restricting mask 25 to a dense state on the minimum incident angle θmin side by the second minimum incident angle restricting mask 26. Since the film is formed on the CoO non-magnetic underlayer film which has increased in isolation while shifting to the adhered state, the growth particles (columns) of the Co—CoO magnetic metal thin film are further isolated and increased in size at the same time. Become As a result, the magnetic interaction between the particles of the Co—CoO magnetic metal thin film is more effectively reduced, and the Co—CoO
It has been found that the axis of easy magnetization of the magnetic metal thin film is also easy to be aligned in the direction parallel to the film surface, and thus the coercive force Hc and the squareness ratio Rs are greatly improved.

Then, the CoO non-magnetic underlayer and the Co-Co
The time required for forming the O magnetic metal thin film is 45 minutes. Also, C calculated from the amount of Co supplied to the crucible 18
o The utilization efficiency of the magnetic metal material 19 was about 24%. still,
Here, the utilization efficiency indicates a film formation amount with respect to an evaporation amount, and the utilization efficiency depends on a mask opening area.

In the first embodiment, the size of the apparatus 10A can be reduced by using the cooling can roll 16 having a small diameter and the cooling can roll 17 having a large diameter, and the CoO non-magnetic base film and the Co-CoO magnetic By sharing the Co magnetic metal material 19 accommodated in one crucible 18 when forming a metal thin film, the utilization efficiency of the Co magnetic metal material 19 can be increased.

Next, a modified example in which the first embodiment is partially modified will be briefly described with reference to FIG. In this modification, only the points different from the first embodiment will be described, and the same components as those in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted, and only the illustration will be made.

As shown in FIG. 3, in a thin-film magnetic tape manufacturing apparatus 10B according to a modified example in which the first embodiment is partially modified, the vacuum chamber 11B is formed larger than the vacuum chamber 11A of the first embodiment. . This embodiment differs from the first embodiment in that two large-diameter cooling can rolls 17 and 17 are arranged in parallel between a supply roll 13 and a take-up roll 14 provided on the left and right in the vacuum chamber 11B. . At this time, the base fill 1
The cooling can roll 17 provided on the upstream side in the traveling path of No. 2 is for a CoO non-magnetic underlayer, while the cooling can roll 17 provided on the downstream side of the traveling path of the base fill 12 on the right side in the drawing is a Co-roll. For CoO magnetic metal thin film.

Here, a modified example in which the first embodiment is partially modified will be specifically described. The two large diameter cooling can rolls 17 have a diameter of 300 mm and a width of 260 mm.
The difference from the first embodiment is that a large-diameter cooling can roll 17 is used on the CoO non-magnetic underlayer side.

Then, a CoO non-magnetic underlayer and Co-C
The mask opening area caused by the diameter of the cooling can roll 17 provided on the upstream side is taken into consideration so that the oO magnetic metal thin film has the same thickness and the same processing length as those of the first embodiment. When the running speed of the fill 12 and the gas amount of the high-purity oxygen gas O ₂ from the oxygen gas introduction pipes 24 and 27 are set in advance, the crucible can be formed by using a large-diameter cooling can roll 17 on the CoO non-magnetic underlayer film side. The utilization efficiency of the Co magnetic metal material 19 calculated from the amount of Co supplied to 18 was about 28%, and the processing time was 40 minutes, all of which could be improved from the first embodiment.

In this modification, although the size of the apparatus 10B is larger than that of the first embodiment, the utilization efficiency of the Co magnetic metal material 19 can be made larger than that of the first embodiment, and the processing time is longer than that of the first embodiment. Can be shortened. Of course, the modified device 10B
Is used, as in the first embodiment, the growth particles (columns) of the CoO non-magnetic underlayer are formed while shifting from the densely attached state to the coarsely attached state, while the Co—CoO magnetic metal Since the growth particles (columns) of the thin film are formed while shifting from the rough adhesion state to the dense adhesion state, the growth particles (columns) of the Co—CoO magnetic metal thin film are further isolated. At the same time, because of miniaturization, good magnetostatic characteristics can be obtained.

<Second Embodiment> FIG. 4 is a configuration diagram showing the configuration of a thin-film magnetic tape manufacturing apparatus according to a second embodiment of the present invention.

As shown in FIG. 4, the thin film magnetic tape manufacturing apparatus 30 according to the second embodiment of the present invention is also configured to apply the oblique deposition method, and the inside of the vacuum chamber 31 is a vacuum pump (not shown). Is maintained in a vacuum state.

A supply roll 33 for winding a base film 32 as a medium material of the thin-film magnetic tape and a take-up roll 34 are provided below the vacuum chamber 31 so as to be rotatable close to each other. Have been.

A plurality of guide rollers 35 are provided between the supply roll 33 and the take-up roll 34.
Are arranged at appropriate positions along a predetermined traveling path.

Further, the supply roll 3 is located above the vacuum tank 31.
One large-diameter cooling can roll 36 is provided between the roll 3 and the winding roll 34 so as to be rotatable in the direction of the arrow. In the second embodiment, in particular, one large-diameter cooling can roll 36 is replaced with the large-diameter cooling can roll 1 described in the first embodiment.
7 (Fig. 1) (300mm in diameter and 260m in width)
m), the device 30 can be made much smaller than in the first embodiment and the conventional example.

Then, the base film 32 wound around the supply roll 33 is sent to one large-diameter cooling can roll 36 through a plurality of guide rollers 35, and then wound up through the plurality of guide rollers 35. It is adapted to be wound around a roll 34.

A plurality of constituent members for forming a non-magnetic undercoat film on the base film 32 are provided on the right side of the large-diameter cooling can roll 36 in the drawing and on the upstream side in the running path of the base film 32. ing.

That is, a first evaporation source is provided at the lower right of the cooling can roll 36, and a Co magnetic metal material 38 is housed in a first crucible 37 formed in a box shape.

On the right side wall 31a of the vacuum chamber 31, there is provided a first piercing type electron gun 39 for melting and evaporating the Co magnetic metal material 38 contained in the first crucible 37 into Co vapor 38a. It is attached toward the crucible 37 obliquely below. In the following description, the reference numeral 38a is referred to as “Co vapor” depending on the situation before and after the description,
This will be described separately for the case of describing “Co vapor flow”.

The pierce-type electron gun 39 described above comprises a crucible 3
7 toward the Co magnetic metal material 38 in the electron beam 39a.
The electron beam 39a melts the Co magnetic metal material 38 and deposits Co vapor 38a on the side of the base film 32 running along the cooling can roll 36. At this time, the electron beam 39a emitted from the first piercing type electron gun 39 is
It is controlled by the deflection magnet 41.

Further, a first minimum incident angle restricting mask 42 for restricting the minimum angle of incidence θmin at the time of applying a film to the nonmagnetic base film is provided below the right side of the cooling can roll 36,
Further, a first oxygen gas introduction pipe 43 is attached between the cooling can roll 36 and the first minimum incident angle regulating mask 42. Then, the first oxygen gas introduction pipe 4
A predetermined amount of oxygen gas O ₂ is injected from a plurality of holes (not shown) formed in
Oxygen gas O ₂ with a predetermined amount of steam flow 38a is blown. Thus, C in oxygen gas O ₂ with a predetermined amount of the above
o The steam 38a is oxidized to form CoO on the base film 32.
A non-magnetic underlayer is formed.

In the vicinity of the central portion on the right side of the cooling can roll 36, a first maximum incident angle restricting mask 44 for restricting the maximum incident angle θmax when a film is applied to the non-magnetic underlayer is provided. The first maximum incident angle restricting mask 44 is provided downstream of the first minimum incident angle restricting mask 42.

On the other hand, on the left side of the large-sized cooling can roll 36 in the drawing, on the downstream side of the running path of the base film 32, a ferromagnetic metal thin film is further formed on a non-magnetic base film formed on the base film 32. A plurality of constituent members for forming a film are provided substantially symmetrically with the constituent member on the right side.

That is, a second evaporation source is provided at the lower left of the cooling can roll 36, and here, a Co magnetic metal material 46 is accommodated in a second crucible 45 formed in a box shape.

On the left side wall 31b of the vacuum chamber 31, there is provided a second piercing electron gun 47 for melting and evaporating the Co magnetic metal material 46 housed in the second crucible 45 into Co vapor 46a. It is attached toward the crucible 45 obliquely below. In the following description, the reference numeral 46a is referred to as “Co vapor” depending on the situation before and after the description,
This will be described separately for the case of describing “Co vapor flow”.

The pierce type electron gun 47 described above is also used for the crucible 4
5 toward the Co magnetic metal material 46 in the electron beam 47a.
The electron beam 47a melts the Co magnetic metal material 46 and deposits Co vapor 46a on the base film 32 running along the cooling can roll 36. At this time, the electron beam 47a emitted from the second piercing type electron gun 47 is
It is controlled by the deflection magnet 49.

In the vicinity of the central portion on the left side of the cooling can roll 36, a second maximum incident angle restricting mask 50 for restricting the maximum incident angle θmax at the time of coating the ferromagnetic metal thin film is provided. In addition, the second minimum incident angle regulation for regulating the minimum angle of incidence θmin at the time of coating the ferromagnetic metal thin film on the lower right side of the cooling can roll 36 downstream of the second maximum incident angle regulation mask 50. A mask 51 is provided, and a second oxygen gas introduction pipe 5 is provided between the cooling can roll 36 and the second minimum incident angle regulating mask 51.
2 are installed. Then, the first oxygen gas is introduced through a plurality of holes (not shown) formed in the second oxygen gas introduction pipe 52.
A predetermined amount of oxygen gas O ₂ through the oxygen gas introduction pipe 43
Is injected oxygen gas O ₂ with a reduced amount of gas by a large margin than oxygen gas O ₂ with a reduced amount of gas is blown to Co vapor stream 46a evaporated from the crucible 45.

Here, one large-diameter cooling can roll 3
6 is a large-diameter cooling can roll 17 described in the first embodiment.
When the diameter is set to 300 mm and the width is set to 260 mm as shown in FIG. 1, the base film 32 wound around the supply roll 33 is passed through a plurality of guide rollers 35 along one cooling can roll 36. In the course of traveling from the minimum incident angle regulating mask 42 side to the first maximum incident angle regulating mask 44 side, the oxygen gas introduction pipe 43
The high purity oxygen gas _{O 2} was introduced 100～200Ccm, the Co vapor 38a evaporated from the crucible 37 inside this high-purity oxygen gas _{O 2} with is completely oxidized, when passing between the two masks 42 and 44 from the base While gradually increasing the angle of incidence of the Co vapor stream 38a on the film 32, a CoO non-magnetic underlayer
A film was formed with a thickness of μm. At this time, when the introduction amount of the high-purity oxygen gas O ₂ is set to 100 to 200 ccm, the CoO
Preliminary experiments confirmed with a vibrating magnetometer (VSM) that no magnetization occurred in the non-magnetic underlayer.

At this time, similarly to the first embodiment described with reference to FIG. 2, the growth particles (columns) of the CoO non-magnetic underlayer are reduced by the minimum incident angle θmin by the first minimum incident angle regulating mask 42. The film is formed on the base film 32 while shifting from the densely attached state on the side to the coarsely attached state on the side of the maximum incident angle θmax by the first maximum incident angle regulating mask 44. Since the surface layer portion of the growing particle (column) is in a rough attached state, isolation is increased.

Thereafter, the base film 32 on which the CoO non-magnetic underlayer is formed is moved from the second maximum incident angle regulating mask 50 side to the second minimum incident angle regulating mask 51 side along one cooling can roll 36. In the course of traveling, the gas amount of the high-purity oxygen gas O ₂ from the oxygen gas introduction pipe 52 was reduced to 30 ccm from that at the time of forming the nonmagnetic underlayer film.
The Co vapor 46a introduced from the inside of the crucible 45 is provided with magnetism, and when passing between the masks 50 and 51, the Co vapor flow 46a to the base film 32 is formed.
a while gradually decreasing the incident angle of
Co-Co is further deposited on the CoO non-magnetic underlayer deposited on
O magnetic metal thin film (ferromagnetic metal thin film) processing length 1000m
Was formed at a thickness of about 0.05 μm over the entire surface.

At this time, as described with reference to FIG. 2 in the first embodiment, the grown particles (columns) of the Co—CoO magnetic metal thin film are subjected to the maximum incident angle θmax by the second maximum incident angle regulating mask 50. The film is formed on the CoO non-magnetic underlayer film which has increased isolation while shifting from the rough attachment state on the side to the dense attachment state on the side of the minimum incident angle θmin by the second minimum incident angle regulating mask 51. Accordingly, the growth particles (columns) of the Co—CoO magnetic metal thin film are further isolated and further miniaturized. As a result, the magnetic interaction between the particles of the Co—CoO magnetic metal thin film is more effectively reduced, and the axis of easy magnetization of the Co—CoO magnetic metal thin film is easily aligned in the direction parallel to the film surface. And a large improvement in the squareness ratio Rs.

In the second embodiment, since two evaporation sources are provided for one cooling can roll 36, a non-magnetic base film and a non-magnetic base film are formed on a tape-shaped non-magnetic base as described in the conventional example. When sequentially forming the ferromagnetic metal thin film, different film forming materials can be used. In this case, a non-magnetic metal or a vaporized material such as a metal oxide or a magnetic metal is used for the non-magnetic base film. What is necessary is just to provide a first evaporation source for supplying the evaporation flow and a second evaporation source for supplying the magnetic metal material evaporation flow to the ferromagnetic metal thin film.

[0074]

According to the thin-film magnetic tape manufacturing apparatus of the present invention described in detail above, according to the first aspect, the base film is moved in one direction along a rotatable cooling can roll in a vacuum chamber. A non-magnetic base film is formed on the base film while gradually increasing the angle of incidence of the magnetic metal vapor stream to the base film on the upstream side of the traveling path, and further on the base film on the downstream side of the traveling path. When forming a ferromagnetic metal thin film on a non-magnetic base film while gradually reducing the incident angle of the magnetic metal vapor flow, the first and second cooling can rolls are provided close to each other, particularly in a vacuum layer. , This first,
One evaporation source for supplying a magnetic metal material vapor flow is installed below the second cooling can rolls, and accordingly,
In the vicinity of each cooling can roll with one evaporation source in between,
A second minimum incident angle regulating mask is provided, and
Since one maximum incident angle regulating mask is provided between the first and second cooling can rolls, the non-magnetic undercoat film and the ferromagnetic metal thin film share the magnetic metal material vapor flow from one evaporation source. By doing so, the utilization efficiency of the magnetic metal material can be increased.

Further, since the surface layer of the grown particles (columns) of the non-magnetic base film formed on the base film is in a coarsely adhered state, isolation is increased, and the ferromagnetic metal film formed on the non-magnetic base film is increased. The growing particles (columns) of the thin film are further isolated and further miniaturized, so that the magnetic interaction between the particles of the ferromagnetic metal thin film is more effectively reduced and the ferromagnetic metal thin film Since the axis of easy magnetization is easily aligned in the direction parallel to the film surface, it is possible to greatly improve the coercive force and the squareness ratio.

According to a second aspect of the present invention, the base film is caused to travel in one direction along a rotatable cooling can roll in a vacuum chamber, and the vapor flow of the evaporant to the base film is upstream on the traveling path. A non-magnetic underlayer is formed on the base film while gradually increasing the incident angle of the magnetic metal material vapor flow to the base film on the downstream side of the running path while gradually decreasing the non-magnetic under film. When depositing a ferromagnetic metal thin film on the ground film, one cooling can roll is provided especially in the running path of the base film, and this cooling can roll is centered on the base film on the upstream side of the running path. Since a non-magnetic base film is formed, and a ferromagnetic metal thin film is formed on the non-magnetic base film on the downstream side of the traveling path, the size of the apparatus can be reduced by providing one cooling can roll. Can be achieved, and Cost of the apparatus also becomes possible.

Further, the characteristics of the growth particles (columns) of the non-magnetic base film formed on the base film and the growth particles (columns) of the ferromagnetic metal thin film formed on the non-magnetic base film are as described above. The same effect as described in 1 can be obtained.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a configuration of a thin-film magnetic tape manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram schematically showing a growth process of non-magnetic underlayer and magnetic thin film growth particles in a thin film magnetic tape manufactured by using the thin film magnetic tape manufacturing apparatus according to the first embodiment of the present invention. is there.

FIG. 3 is a configuration diagram for explaining a modification in which the thin-film magnetic tape manufacturing apparatus according to the first embodiment of the present invention is partially modified.

FIG. 4 is a configuration diagram showing a configuration of a thin-film magnetic tape manufacturing apparatus according to a second embodiment of the present invention.

FIG. 5 is a configuration diagram showing a configuration of an apparatus used in a conventional method for manufacturing a magnetic recording medium.

[Explanation of symbols]

10A: Thin film magnetic tape manufacturing apparatus of the first embodiment, 10B
... A thin-film magnetic tape manufacturing apparatus according to a modification of the first embodiment, 11A. Vacuum chamber (first embodiment). 11B (modification of the first embodiment). 12 base film. 1 cooling can roll (small diameter cooling can roll), 1
7 ... second cooling can roll (large cooling can roll), 18 ... one evaporation source (one crucible), 19 ... C
o Magnetic metal material, 19a ... Co vapor or Co vapor flow, 23
... First minimum incident angle restricting mask, 25... Maximum incident angle restricting mask, 26... Second minimum incident angle restricting mask, 30... Thin film magnetic tape manufacturing apparatus of the second embodiment, 31.
2 ... base film, 36 ... cooling can roll, 37 ...
A first evaporation source (first crucible), 38 ... Co magnetic metal material, 38a ... Co vapor or Co vapor flow, 42 ... first minimum incident angle regulating mask, 44 ... first maximum incident angle regulating mask, 45: second evaporation source (second crucible), 46: Co
Magnetic metal material, 46a ... Co vapor or Co vapor flow, 50 ...
Second maximum incident angle limiting mask, 51... Second minimum incident angle limiting mask.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5D112 AA03 AA05 BB05 BD03 FA02 FB02 FB13 FB24 FB25 FB28

Claims (2)

[Claims] 1. A base film is run in one direction along a rotatable cooling can roll in a vacuum chamber, and an incident angle of a magnetic metal material vapor flow to the base film is gradually increased on an upstream side of a running path. Forming a non-magnetic undercoat film on the base film while increasing the non-magnetic undercoat film while gradually decreasing an incident angle of the magnetic metal material vapor flow to the base film on a downstream side of a traveling path; A thin-film magnetic tape manufacturing apparatus configured to form a ferromagnetic metal thin film thereon, wherein the non-magnetic base film is formed on the base film while running along the base film. First
And a ferromagnetic metal thin film on the non-magnetic base film while running along the base film on which the non-magnetic base film is formed while approaching the first cooling can roll. A second cooling can roll for forming a film, and one evaporation source provided below the first and second cooling can rolls for supplying the magnetic metal material vapor flow; A first oxygen introduction pipe for spraying a predetermined amount of oxygen gas onto the magnetic metal vapor stream from the one evaporation source to form the non-magnetic undercoat film on one cooling can roll side; The second cooling can roll side, the magnetic metal material vapor flow from the one evaporation source is blown with an oxygen gas, a gas amount of which is smaller than the predetermined amount of oxygen gas, to blow the ferromagnetic metal thin film. Second for film formation An oxygen introduction pipe, first and second minimum incident angle regulating masks respectively provided near the first and second cooling can rolls with the one evaporation source interposed therebetween, and the first and second cooling cans. An apparatus for manufacturing a thin film magnetic tape, comprising: one maximum incident angle regulating mask provided above between rolls. 2. A base film is made to travel in one direction along a rotatable cooling can roll in a vacuum chamber, and an incident angle of an evaporant vapor stream to the base film is gradually increased on an upstream side of a traveling path. Forming a non-magnetic base film on the base film while further reducing the incident angle of the magnetic metal vapor flow to the base film on the downstream side of the traveling path while gradually decreasing the incident angle on the non-magnetic base film. In a thin-film magnetic tape manufacturing apparatus configured to form a ferromagnetic metal thin film, the non-magnetic base film is formed on the base film while running along the base film; One cooling can roll for forming the ferromagnetic metal thin film on the base film, and a first minimum incidence provided in the downstream order near the one cooling can roll on the upstream side in the traveling path. Corner A first mask and a first maximum incident angle regulating mask; and a second mask provided between the first minimum incident angle regulating mask and the first maximum incident angle regulating mask for supplying the vaporized material vapor flow. A second maximum incident angle regulating mask and a second minimum incident angle regulating mask which are sequentially provided downstream in the vicinity of the one cooling can roll on the downstream side in the traveling path, and A second evaporation source provided below the second maximum incidence angle regulating mask and the second minimum incidence angle regulating mask, for supplying the magnetic metal material vapor flow. Magnetic tape manufacturing equipment.