JP2002296105A - Method of judging fault locations and device for judging fault locations - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of judging fault locations and a device for judging fault locations which can judge rotating members faulty in a device having a plurality of rotating members which rotate at different rotational speeds. SOLUTION: A chassis 2 of a substrate treating device 1, which has a plurality of rotating members 3, 3S, 3M, 4, 4S, 7S, 7M, 5, 5S, 9S, 9M, 6S and 6M, is provided with a vibration meter 15. The vibration meter 15 has a vibration acceleration sensor or a vibration speed sensor, and a fast Fourier transformation analyzer. When judging faults, the rotating members 3S (3, 3M), 4S (4), 7S (7M), 5S (5), 9S (9M) and 6S (6M) are rotated at different rotational speeds, and a vibration spectrum of the chassis 2 is obtained with the vibration meter 15. Rotating members which rotate at a rotational speed corresponding to a frequency of a maximum amplitude are judged faulty.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for determining a failure location of an apparatus having a plurality of rotating members, such as a substrate processing apparatus, and an apparatus for determining a failure location of such an apparatus.

[0002]

2. Description of the Related Art For example, various rotating members are used in a substrate processing apparatus for performing processing using a processing liquid on various substrates to be processed such as a semiconductor wafer and a glass substrate for a liquid crystal display device. I have. For example, a spin chuck that holds and rotates the substrate horizontally, a blocking plate that is disposed above the spin chuck to prevent the processing liquid from re-adhering to the substrate, an arm that opens and closes the spin chuck, and the side of the substrate And a splash guard for preventing the processing liquid from scattering outside. These are driven to rotate, rotate in an arc, and are moved up and down by a worm that is driven to rotate.

There are cases where these are driven by being directly connected to a power source such as a motor, and cases where they are driven from a power source via transmission members such as belts and gears. During operation of the apparatus, it is possible to know that a failure has occurred in any of the plurality of rotating members (including the power source) due to, for example, abnormal vibration noise. The failure is caused by factors such as an increase in the eccentricity of the rotating member that has been improperly balanced at the time of mounting, a failure of the bearing, and foreign matter entering the seal portion. In this case, it is necessary to first know which rotating member is out of order, and to repair it according to the cause.

Conventionally, in repairing a failed rotating member, it is not always possible to know in advance which rotating member has failed, and work such as disassembling the apparatus and examining all rotating members is required. It was done.

[0005]

However, such work requires a considerable amount of man-hours and takes a long time. Further, if the failed rotating member cannot be identified, it becomes difficult to determine the cause of the failure. SUMMARY OF THE INVENTION An object of the present invention is to provide a failure location determination method that can determine a failed rotary member in an apparatus having a plurality of rotary members rotating at different rotational speeds.

Another object of the present invention is to provide a failure location determination device which can determine a failed rotation member of a device having a plurality of rotation members rotating at mutually different rotation speeds.

[0007]

Means for Solving the Problems and Effects of the Invention According to the first aspect of the present invention, there is provided a method for controlling a plurality of rotating members (3, 3S, 3M, 4, 4S, 7S, 7M, 5, 5).
5S, 9S, 9M, 6S, 6M, 21 and 22), wherein the method comprises the steps of: rotating the plurality of rotating members at different rotational speeds; A failure location determination method, comprising: measuring a frequency; and determining which of the plurality of rotation members has failed based on the measured frequency of the vibration. .

[0008] The alphanumeric characters in parentheses indicate corresponding components in the embodiment described later. Hereinafter, the same applies in this section. In the above device, each rotating member generates a vibration having a frequency corresponding to the rotation speed, and the vibration is transmitted to the device. Therefore, when the plurality of rotating members rotate at different rotational speeds, vibrations of different frequencies corresponding to the rotational speeds are generated in the apparatus in an overlapping manner.

The failed rotating member oscillates with a larger amplitude than in normal operation. Therefore, by examining the frequency component of the vibration occurring in the device and knowing the frequency component having an amplitude larger than that at the normal time, it is possible to know which rotary member has failed. When examining the magnitude of the amplitude, the relationship between the frequency and the amplitude when all the rotating members are normal may be measured in advance and compared with the relationship between the frequency and the amplitude when a failure occurs. .

If the location of the failure can be limited to some extent, it is not always necessary to measure the vibration frequency by making the rotation speeds of all the rotating members different. The frequency of the vibration of the device may be measured all the time, or may be measured only when it is considered that a failure has occurred.
That is, the means for measuring the frequency may be permanently installed in the device, or may be added to the device only when it is considered that a failure has occurred.

According to a second aspect of the present invention, the step of determining the failed rotating member is performed based on a frequency having a maximum amplitude among the measured frequencies. This is a location determination method. In many cases, the amplitude of vibration caused by a failed rotating member is larger than the amplitude of vibration caused by a non-failed rotating member. Therefore, it is possible to determine that the rotating member rotating at the rotation speed corresponding to the frequency of the maximum amplitude is out of order.

According to a third aspect of the present invention, in the step of determining a failed rotating member, the step of converting the frequency of the maximum amplitude into a rotating speed is performed, and the rotating member rotating at a rotating speed near this rotating speed is used. 3. The method according to claim 2, wherein a failure is determined. One rotation of the rotating member produces a corresponding one cycle of vibration in the device. The rotation speed of a power source such as a motor or a rotating member driven and driven by the power source is expressed in units such as rpm, and the frequency of vibration of the device measured by a vibrometer or the like is expressed in units such as Hz. You. These can be converted by unit conversion.

According to a fourth aspect of the present invention, the vibration generated in the device may be measured by a vibration acceleration sensor or a vibration speed sensor, and the determination based on the frequency of the maximum amplitude is performed by the vibration acceleration sensor or the vibration speed sensor. It may be performed based on a vibration spectrum derived by a fast Fourier transform (FFT) from the acceleration or velocity obtained by the sensor. The invention according to claim 5 is characterized in that the rotating member of the device always rotates at mutually different rotation speeds during normal operation of the device, and the failure point determination according to any one of claims 1 to 4, Is the way.

According to the present invention, the plurality of rotating members rotate at different rotational speeds during the normal operation of the device.
The failure location can be determined while the vehicle is operating normally.
The invention according to claim 6 is characterized in that the rotating member of the device is rotated at different rotational speeds when judging a fault location, the fault location determining method according to any one of claims 1 to 4. It is. If the rotation speed of two or more rotating members must be the same due to the configuration or function of the device, as in the present invention, the rotating members are rotated at different rotation speeds only at the time of failure location determination. You may. For example, when a plurality of rotating members are driven by a plurality of independent power sources, the rotating speeds of the rotating members can be made different from each other by controlling the rotating speed of each power source.

According to a seventh aspect of the present invention, there is provided the method of determining a fault location according to any one of the first to sixth aspects, wherein the different rotational speeds of the rotary members are not an integral multiple. When the two rotating members are driven via the transmission member, the rotation speed of these two rotating members is 1:
It is often designed to have an integral multiple such as 2 or 1: 3. Therefore, in such a case, the frequency of the vibration generated by these rotating members also has an integral multiple. On the other hand, the vibration generated by one rotating member includes not only a frequency corresponding to the rotation speed but also a component of a frequency that is an integral multiple such as twice or three times the frequency.

In such a case, for example, the frequency corresponding to the rotational speed of the failed rotating member may coincide with an integer multiple of the frequency corresponding to the rotational speed of the non-failed rotating member. Therefore, even if a frequency of vibration with a large amplitude is recognized, it is not always possible to determine which rotation member caused the vibration at that frequency. Even when the two rotating members are driven by a plurality of independent power sources, there is a similar problem when their rotation speeds are in integral multiples. The same applies when the number of rotating members is three or more.

According to the present invention, since the rotational speeds of the plurality of rotating members are not an integral multiple, the frequency of vibration corresponding to the rotational speed of the failed rotating member is determined by the rotational speed of the other rotating member. Does not overlap with the frequency corresponding to and the integral multiple thereof. Therefore, according to such a failure location determination method, a failed rotating member can be reliably determined. When a plurality of rotating members are driven and driven by one power source, the ratio of the rotation speed of each rotating member is an integer multiple depending on the configuration of the transmission member such as the pulley diameter ratio and the gear ratio. It can be configured not to. When a plurality of rotating members are driven by a plurality of power sources,
By appropriately setting the rotational speeds of the respective power sources, it is possible to configure so that the rotational speeds of the respective rotary members do not have a relationship of an integral multiple.

According to an eighth aspect of the present invention, there is provided an apparatus (15, 16) for judging a failure portion of a device having a plurality of rotating members rotating at different rotational speeds, wherein the vibration caused by the plurality of rotating members is provided. Vibration detection means (1)
7) and a vibration frequency analysis means (18) for analyzing data on vibration obtained by the vibration detection means. With this failure location determination device, the failure location determination method according to any one of claims 1 to 7 can be implemented.

According to a ninth aspect of the present invention, the vibration detecting means is a vibration acceleration sensor or a vibration speed sensor, and the vibration frequency analyzing means is a fast Fourier transform analyzer. This is a failure point determination device. With this failure location determination device, the failure location determination method described in claim 4 can be implemented.

[0020]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An embodiment of the present invention will be described in detail. FIG.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an illustrative partial perspective view showing a substrate processing apparatus that determines a failure location by a failure location determination method according to one embodiment of the present invention, and a failure location determination apparatus according to one embodiment of the present invention.

The substrate processing apparatus 1 supplies a processing liquid to a semiconductor wafer W, which is an example of a substrate to be processed, to perform processing. A spin chuck 3 that holds the semiconductor wafer W horizontally and is driven to rotate, and a blocking plate that is disposed above the spin chuck 3 and that prevents the processing liquid from re-adhering to the substrate W inside the substantially rectangular parallelepiped housing 2. 4, an arm 5 for opening and closing the spin chuck 3, and a splash guard 6 for preventing the processing liquid from scattering outside on the side of the semiconductor wafer W.

A motor 3M having a shaft 3S extending vertically is disposed below the spin chuck 3, and the spin chuck 3 is supported by the shaft 3S. The spin chuck 3 is directly driven to rotate by a motor 3M. The blocking plate 4 is disposed directly above the spin chuck 3 and in parallel with the spin chuck 3. Above the blocking plate 4, a shaft 4S extending vertically is provided.
At the side of the shaft 4S, a shaft 7 extending vertically
The motor 7M provided with S is arranged. Shaft 4S
Pulleys are fitted to the shaft 7S and the shaft 7S, respectively, and a belt 8 is stretched between these pulleys.
The blocking plate 4 is driven to rotate by the motor 7M. Due to the difference in the diameter of the pulley, the rotation speed of the shaft 4S is lower than the rotation speed of the shaft 7S, and these rotation speeds are configured not to be an integral multiple. During normal operation, the rotation speed of the spin chuck 3 and the rotation speed of the blocking plate 4 are set to be the same in order to stabilize the airflow in the space between the spin chuck 3 and the blocking plate 4. That is, the rotation speed of the shaft 3S and the shaft 4S
Is the same as the rotation speed.

A shaft 5S extending vertically is provided at one end of the arm 5, and a motor 9M having a shaft 9S extending vertically is provided beside the shaft 5S.
Is arranged. Pulleys are fitted to the shafts 5S and 9S, respectively, and a belt 10 is stretched between these pulleys. The arm 5 has a motor 9
It is rotated to draw an arc following M. Due to the difference in the diameter of the pulley, the rotation speed of the shaft 5S is lower than the rotation speed of the shaft 9, and these rotation speeds are configured not to be an integral multiple.

The splash guard 6 has a cylindrical shape (only a part is shown in FIG. 1), and is arranged so as to surround the spin chuck 3. The splash guard 6 is connected to the connection member 11. Below the connecting member 11, a motor 6M having a shaft 6S extending in the vertical direction is arranged. The shaft 6S is a bolt, and the connection member 11 has a nut and is screwed to the shaft 6S. The rotation of the motor 6M (the shaft 6S) causes the splash guard 6 to move up and down. During normal operation, the rotation speed of the motor 6M is the same as the rotation speed of the motor 9M.

During operation of the apparatus, each rotating member 3,
3S, 3M, 4, 4S, 7S, 7M, 5, 5S, 9S,
9M, 6S, and 6M generate vibration at a frequency corresponding to the rotation speed, and the vibration is transmitted to the housing 2. A vibrometer 15 is mounted near a corner on one side of the housing 2.
The vibration meter 15 includes a vibration acceleration sensor or a vibration speed sensor. This makes it possible to measure the acceleration or speed of vibration of the housing 2 at the mounting position of these sensors. The vibrometer 15 performs a fast Fourier transform (FF)
T) An analyzer is provided, a displacement is obtained based on the measured acceleration or velocity, and an amplitude for each frequency, that is, a vibration spectrum can be obtained from the waveform by FFT. The vibrometer 15 is connected to a personal computer (not shown) or the like, and data of a vibration spectrum obtained by the vibrometer 15 can be displayed on the personal computer or the like. Therefore, the result of measurement by the vibrometer 15 can be displayed at all times during the operation of the substrate processing apparatus 1.

Instead of always attaching the vibrometer 15 to the housing 2 to measure the vibration, only when it is considered that the rotating member is broken, a portable vibrometer 16 is attached to measure the vibration. It may be performed. The portable vibrometer 16
Pickup 17 for measuring vibration and pickup 17
And a main body 18 for performing arithmetic processing and displaying the measurement results based on the information measured in step (1). The pickup 17 includes a vibration acceleration sensor or a vibration speed sensor. The main body 18 includes an FFT analyzer, calculates displacement based on the measured acceleration or velocity, and calculates F
The vibration spectrum can be obtained by FT. The pickup 17 is provided with a magnet and can be firmly adsorbed on a magnetic material such as iron. The main body 18
A display is provided, and the display can display a vibration spectrum.

Hereinafter, assuming that the motor 3M is out of order,
A method for determining a failure location will be described. In the description, each rotating member 3, 3S, 3M, 4, 4S, 7S, 7M, 5, 5
S, 9S, 9M, 6S, 6M are shafts 3S, 4S,
Represented by 7S, 5S, 9S, 6S. Substrate processing equipment 1
For example, if an abnormal sound is generated during the operation of, it is understood that a failure may have occurred in any of the rotating members.
In such a case, it is necessary to identify and repair the failed part. Normally, a failed shaft produces larger amplitude vibrations than a non-failed shaft. Therefore, if the shaft that generates the vibration having the largest amplitude can be specified, it is possible to know which shaft has failed.

Then, each shaft 3S, 4S, 7
In order to relatively compare the amplitudes of vibrations caused by S, 5S, 9S, and 6S, all shafts 3S, 4S, 7S, 5S,
9S and 6S are simultaneously rotated. Then, the shafts 3S, 4S, 7S, 5S, 9 are provided in the housing 2 of the substrate processing apparatus 1.
Frequencies A, B,
The vibrations of C, D, E, and F are caused to overlap. This vibration
The vibration spectrum is obtained by measuring with the vibration meter 15 or the portable vibration meter 16.

FIG. 2 is a characteristic diagram showing a vibration spectrum of the substrate processing apparatus 1 during normal operation. Spin chuck 3
Since the rotation speed of (shaft 3S) and the rotation speed of blocking plate 4 (shaft 4S) are equal, frequency A and frequency B are equal. Since the rotation speed of the motor 9M (shaft 9S) is equal to the rotation speed of the motor 6M (shaft 6S), the frequency E and the frequency F are equal. Therefore, as shown in FIG. 2, the vibration spectrum of the housing 2 shows four peaks.

When the rotating member makes one rotation, the apparatus generates a corresponding one cycle of vibration. Therefore, the frequency of the peak of the vibration spectrum is obtained by converting the rotation speed of each rotating member into a unit. The rotation speed of a power source such as a motor or a rotating member driven and driven by the power source is conventionally expressed in units such as rpm. The frequency of vibration of the device measured by a vibrometer or the like is conventionally expressed in units such as Hz. These can be converted by unit conversion.

When the motor 3M is out of order, the frequency A
The peak of becomes large. From the vibration spectrum shown in FIG. 2, since the peaks of the frequencies A and C are high, the shaft 3
It is possible to know that a failure related to S or the shaft 4S has occurred. Further, in order to identify which of the shaft 3S and the shaft 4S has failed, the motor 3 is controlled so that the rotation speeds of the shafts 3S and 4S are different.
Adjust the rotation speed of M and 7M. In this case, the motor 7M
For example, the rotation speed during normal operation may be kept as it is, and only the rotation speed of the motor 3M may be shifted from the rotation speed during normal operation.

FIG. 3 is a characteristic diagram showing a vibration spectrum of the substrate processing apparatus 1 when the rotation speed of the rotating member is adjusted so that a failure location can be determined. In such a state, since the frequencies corresponding to the rotational speeds of the shafts 3S and 4S are different, their peaks are separated. And since the vibration of frequency A has a large amplitude,
It can be determined that a failure related to the shaft 3S has occurred.

Also, by comparing the vibration spectrum at the time of failure with the vibration spectrum at the time of normal operation, it is possible to know which shaft has a failure related thereto. That is, the shafts 3S, 4S, 7S, 5S, 9
When a failure has not occurred in any of S and 6S, the vibration spectrum of casing 2 is measured by adjusting the rotational speeds so that all of them differ. Then, at the time of failure, the vibration spectrum is measured under the same conditions and compared with the vibration spectrum at normal time. It can be seen that a failure has occurred in relation to the shaft corresponding to the frequency at which the amplitude is greater than in the normal case. According to this method, even if the amplitude of the vibration caused by the failed shaft is not the largest, the failed shaft can be specified.

If possible, all the rotating members may be configured to rotate at different rotational speeds in the normal operation state. Next, a description will be given of a method of determining a failure portion in consideration of a more detailed portion of the vibration spectrum. FIG. 4 is an illustrative view showing two shafts connected via a belt. Pulleys 23 and 24 are fitted to the shafts 21 and 22, respectively.
A belt 25 is stretched between the four. At this time, the ratio between the rotation speed of the shaft 21 and the rotation speed of the shaft 22 is equal to the ratio between the diameter of the pulley 24 and the diameter of the pulley 23. In general, two shafts having such a configuration are often configured such that the ratio of their rotational speeds is an integral multiple.

FIG. 5 is a characteristic diagram showing details of the vibration spectrum when the ratio of the rotational speeds of the two shafts 21 and 22 is 1: 3. Generally, the peak of the amplitude due to the rotation of a certain shaft appears not only at a frequency corresponding to the rotation speed of the shaft but also at a frequency that is an integral multiple of the frequency. In FIG. 5, a main peak due to the rotation of the shaft 21 appears at a frequency G corresponding to the rotation speed of the shaft 21, but peaks also appear at frequencies 2G and 3G that are integral multiples of that. On the other hand, the main peak due to the rotation of the shaft 22 appears at the frequency 3G because the rotation speed of the shaft 22 is three times the rotation speed of the shaft 21.

That is, the peak appearing at the frequency 3G is:
There is one caused by the shaft 21 and one caused by the shaft 22. Therefore, these shafts 21 and
If one of the two fails and the increase in amplitude due to the failure is not remarkable, it is not always possible to identify the failed shaft. FIG. 6 is a characteristic diagram showing details of the vibration spectrum when the ratio of the rotational speeds of the two shafts 21 and 22 is between 1: 2 and 1: 3.

In this case, the main peak due to the rotation of the shaft 22 appears between the frequencies 2G and 3G. Therefore, since each peak is caused by only one of the shafts 21 and 22,
If any one of the two has failed, it can be easily determined which one has failed. In FIG. 1, the relationship between shaft 7S and shaft 4S, and shaft 9S
The relationship between the rotation speed and the shaft 5S is such that the rotation speed is not an integral multiple.

In the case where the ratio of the rotational speeds of the two shafts 21 and 22 needs to be an integer multiple in normal use, the relationship between the integer multiples is determined only at the time of failure location determination, for example, by replacing a pulley. It may be removed. In the above embodiment, the transmission member is a belt, but the transmission member may be a gear. Further, in the above embodiment, the determination of the failure location is performed on all the rotating members. However, as long as the failure location can be limited due to abnormal sound or the like, the determination may be performed on only some of the rotating members. In addition, various design changes can be made within the scope of the matters described in the claims.

[Brief description of the drawings]

FIG. 1 is a schematic partial perspective view showing a substrate processing apparatus for determining a failure location by a failure location determination method according to one embodiment of the present invention, and a failure location determination apparatus according to one embodiment of the present invention. .

FIG. 2 is a characteristic diagram illustrating a vibration spectrum of the substrate processing apparatus during a normal operation.

FIG. 3 is a characteristic diagram illustrating a vibration spectrum of the substrate processing apparatus when the rotation speed of the rotating member is adjusted so that a failure location can be determined.

FIG. 4 is an illustrative view showing two shafts connected via a belt;

FIG. 5 is a characteristic diagram showing details of a vibration spectrum when a ratio of rotation speeds of two shafts is 1: 3.

FIG. 6 shows that the ratio of the rotational speeds of the two shafts is 1: 2 and 1:
FIG. 9 is a characteristic diagram showing details of a vibration spectrum when the vibration spectrum is between 3 and 3.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 3 Spin chuck 4 Blocking plate 5 Arm 6 Splash guard 7M, 9M Motor 3S, 4S, 5S, 6S, 7S, 9S, 21, 22
Shaft 15 Vibration meter 16 Portable vibration meter

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takashi Hara 4-chome, Horikawa-dori Teranouchi, Kamigyo-ku, Kyoto-shi, Kyoto, Japan 1F, Tenjin Kitamachi 1 Dainippon Screen Mfg. Co., Ltd. F-term (reference) 2G064 AA11 AB01 AB02 BA02 CC43

Claims (9)

[Claims] 1. A method for determining a failure location in a device having a plurality of rotating members, the method comprising: rotating the plurality of rotating members at different rotational speeds; measuring a frequency of vibration generated in the device; Determining which of the plurality of rotating members is out of order based on the frequency of the vibration that has been performed. 2. The method according to claim 1, wherein the step of determining the failed rotating member is performed based on a frequency having a maximum amplitude among the measured frequencies. 3. The step of determining a failed rotating member includes converting the frequency of the maximum amplitude into a rotational speed and determining that the rotating member rotating at a rotational speed near the rotational speed is defective. 3. The method according to claim 2, wherein: 4. The frequency of vibration generated in the device is measured by a vibration acceleration sensor or a vibration speed sensor, and the determination based on the frequency of the maximum amplitude is performed by the acceleration or speed obtained by the vibration acceleration sensor or the vibration speed sensor. The method according to claim 2 or 3, wherein the method is performed on the basis of a vibration spectrum derived by a fast Fourier transform. 5. The method according to claim 1, wherein said rotating member of said apparatus always rotates at different rotational speeds during normal operation of said apparatus. 6. A method according to claim 1, wherein said rotating member of said apparatus is rotated at different rotational speeds when judging a fault location. 7. The rotation speed of the rotating member, which is different from each other,
7. The method according to claim 1, wherein the relationship is not an integral multiple.
The method for determining a fault location according to any one of the above. 8. A device for determining a failure location of a device having a plurality of rotating members rotating at mutually different rotational speeds, wherein the vibration detecting means detects vibration caused by the plurality of rotating members; A vibration frequency analyzing means for analyzing data on vibration obtained by the means. 9. The fault location judging device according to claim 8, wherein said vibration detecting means is a vibration acceleration sensor or a vibration speed sensor, and said vibration frequency analyzing means is a fast Fourier transform analyzer.