JP2002295574A - Damping device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact and lightweight damping device that can have valid damping effect for very fine vibration acceleration. SOLUTION: The damping device has a fixed part secured on a damping object 1, bearings 14 permissible of relative motion on the fixed part in the plane 2 free-degree direction, and a movable part provided via a damping element 15. The fixed part has a frame- or box-shape fixture 5 and fixed magnets 8 mounted on the faces facing each other inside the fixture 5. The movable part has movable magnets 9 magnetomotive with the movable part and held apart from the magnets 8 with a predetermined gap.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration damping device for reducing vibration during steady operation of a semiconductor manufacturing device or the like.

[0002]

2. Description of the Related Art Generally, a semiconductor manufacturing apparatus has a mechanically movable portion inside. However, since the object to be handled is very small, there is a demand for minimizing vibration during steady operation. As one of the measures against the vibration, a passive vibration damping device is used.

An outline of a conventional passive vibration damping device will be described with reference to FIG. FIG. 7 schematically shows a method of installing a conventional passive vibration damping device, where (a) is a side view,
(B) is a plan view. In this example, a plurality of dynamic vibration absorbers 2 each having an additional mass 2a supported by an elastic element 2b and a damping element 2c in the vibration direction of the vibration damping object 1 are provided. Even in such a method, when the installation space for the dynamic vibration absorber 2 can be sufficiently secured, such as in a large building structure, the two-dimensional vibration can be reduced without any problem.

[0004]

In the conventional passive vibration damping device as described above, the vibration damping object 1 is a movable portion of a relatively small semiconductor manufacturing apparatus, and the vibration is relatively large. In this case, there is a problem that it is difficult to secure a required installation space for the vibration damping target 1 due to the increase in the size of the elastic element 2b and the damping element 2c. In addition, when applied to micro-vibration of the vibration damping object 1 during normal operation, a stable vibration-damping performance in a micro-vibration region is ensured due to a characteristic change due to friction caused by the movement of the additional mass 2a and a fatigue phenomenon of the elastic element 2b. There is a problem that is difficult.

The present invention has been made in view of the above circumstances, and has been made to reduce the size and weight of the vibration damping device and to obtain an effective vibration damping effect even for a very small vibration acceleration. It is an object to provide a vibration damping device that can be used.

[0006]

According to a first aspect of the present invention, there is provided a vibration damping device comprising: a fixed portion fixed to an object to be damped; A movable part provided via a bearing and a damping element allowing movement, the fixed part being a frame-shaped or box-shaped fixed member, and a fixed member attached to two opposing inner surfaces of the fixed member. And a movable part magnet which is held with a predetermined gap from the fixed part magnet and magnetically acts on the fixed part magnet.

In the vibration damping device according to the present invention, when the vibration damping object vibrates, the fixed portions of the vibration damping device fixed to the vibration damping object both vibrate, and the magnetic action between the fixed portion magnet and the movable portion magnet. Vibrating the movable part via (suction force, repulsion force). The vibration is reduced by adjusting the magnetic spring constant due to the magnetic action, the damping coefficient of the damping element provided in the fixed part, and the mass of the movable part according to the vibration conditions of the object to be damped. be able to. At this time, since the damping element is provided in the fixed portion, the magnetic spring constant and the damping coefficient can be adjusted independently.

The movable portion is supported by a bearing so as to freely vibrate in two degrees of freedom in the plane, so that even if the object to be damped vibrates in two directions of freedom, one movable portion can cope with the vibration. be able to. Thereby, the vibration damping device can be downsized.

Further, since the fixed portion magnet attached to the two facing surfaces of the fixed portion and the movable portion magnet attached to the movable portion attract each other, a large magnetic attraction force is not applied to the bearing. Can be adjusted to be small. Accordingly, the resistance force associated with the movement of the movable part of the vibration damping device is reduced, and the life of the bearing is prolonged. Therefore, it is possible to cope with microvibration of the vibration damping target and long-term operation.

According to a second aspect of the present invention, the damping element is made of a viscous material attached between the fixed part and the movable part. In the vibration damping device according to the present invention, for example, a damping force (damping coefficient) is generated when the movable portion vibrates by attaching a vibration isolating rubber between the fixed portion and the movable portion.
Can be obtained. Therefore, the vibration damping device can have a relatively simple structure, and its weight and size can be reduced.

According to a third aspect of the present invention, the damping element comprises a conductor plate attached to a movable portion, and a damping magnet attached to a fixed portion and electromagnetically acting on the conductor plate.

In the vibration damping device of the present invention, the electromagnetic force (eddy current loss) of the conductor plate moving with the movable portion and the damping magnet attached to the fixed portion causes a damping force (damping coefficient) when the movable portion vibrates. ) Can be obtained. That is, since the damping force can be obtained without contact, the spring constant and the damping coefficient can be designed and adjusted, respectively.

According to a fourth aspect of the present invention, the fixed portion has an airtight structure, and the damping element is made of a viscous fluid injected into the fixed portion. In the vibration damping device of the present invention, a damping force (a damping coefficient) can be obtained by the viscosity of the viscous fluid accompanying the movement of the movable part. Therefore, the vibration damping device can have a relatively simple structure. Also, even when applying the vibration damping device in vacuum, water or corrosive gas, the fixed part has an airtight structure and the viscous fluid is injected inside, so there is no problem of bearing wear or oxidation, Good damping performance can be maintained over a long period of time.

According to a fifth aspect of the present invention, there is provided a magnetic spring magnet device for adjusting a spring constant according to a moving direction of the movable portion. In the vibration damping device of the present invention, the spring constant of the vibration damping device can be adjusted to different values depending on the vibration direction in advance by the magnet device for the magnetic spring in accordance with the condition of the two-degree-of-freedom vibration of the vibration damping object in advance. As a result, adjustment workability is improved as compared with the case where the entire fixed part magnet or movable part magnet is replaced, and one vibration damping device can be applied to a vibration damping object having a wide frequency range. Becomes

According to a sixth aspect of the present invention, the fixed portion magnet and / or the movable portion magnet each comprise a predetermined number of magnet pieces, and the magnet device for a magnetic spring attaches and detaches the magnet pieces and the magnet pieces. And a magnet piece fixing portion to be attached as possible.

In the vibration damping device according to the present invention, the spring constant of the vibration damping device is changed by attaching and detaching the magnet piece to and from the magnet piece fixing portion and changing the distance between the fixed portion magnet and the movable portion magnet. The anisotropy can be adjusted. Thereby, the anisotropy of the spring constant can be adjusted relatively easily.

According to a seventh aspect of the present invention, a plurality of the magnet pieces are fixed side by side to a plate-like yoke, and the yoke is detachably attached to the magnet piece fixing portion. . In the vibration damping device of the present invention, even when the number of magnet pieces is large, it can be easily attached to and detached from the magnet piece fixing portion.

According to an eighth aspect of the present invention, the magnet piece mainly contributes to a spring constant in one predetermined direction and a Y piece mainly contributes to a spring constant in a direction orthogonal to the predetermined one direction. It is configured to include a direction magnet piece.

In the vibration damping device of the present invention, when adjusting the anisotropy of the spring constant, a relatively large adjustment amount can be obtained in one direction by attaching and detaching the X-direction magnet piece or the Y-direction magnet piece. It becomes possible. Thereby, adjustment of the anisotropy of the spring constant can be easily performed.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A vibration damping device according to a first embodiment of the present invention will be described below with reference to a longitudinal sectional view shown in FIG.
That is, the vibration damping device of the present embodiment has a frame-shaped or box-shaped fixed member 5 fixed to the vibration damping target 1, a middle-stage member 6 attached to the fixed member 5, and an inner side of the fixed member 5. A fixed portion back yoke 7 which is a ferromagnetic material attached to the upper and lower surfaces, respectively, fixed portion magnets 8 attached to the fixed portion back yoke 7 vertically and horizontally by bonding or the like;
A movable portion magnet 9 provided inside the fixed member 5 and opposed to each fixed portion magnet 8 and magnetically acting; a movable portion back yoke 10 for arranging and holding a predetermined number of the movable portion magnets 9 vertically and horizontally by bonding or the like; A movable part connecting member 12 that penetrates a hole 11 provided in the middle member 6 and connects the upper and lower movable back yokes 10; a predetermined number of seats 13 attached to the movable part back yoke 10; 6 includes a bearing 14 attached to a predetermined number, and an anti-vibration rubber 15 attached between the middle-stage member 6 and the movable-part back yoke 10.

In the vibration damping device according to the present embodiment thus configured, the movable portion magnet 9 and the movable portion back yoke 1
0, the movable part connecting member 12 and the seat 13 constitute the movable part 4 which vibrates integrally, and the seat 13 and the bearing 1
4 allows free vibration in the left-right direction and the front-rear direction (vertical direction on the paper) of FIG.

When the vibration damping object 1 vibrates in the horizontal direction in FIG. 1, a fixing member 5 fixed to the vibration damping object 1
The fixed portion back yoke 7 and the fixed portion magnet 8 both vibrate.
This vibration is caused by the magnetic action (magnetic attraction, repulsion) between the fixed part magnet 8 and the movable part magnet 9, the middle member 6 and the movable part magnet 9
Anti-vibration rubber 15 which is a kind of viscous material attached between
The movable section 4 is vibrated via the.

The fixed portion magnet 8 and the movable portion magnet 9 are configured to generate a restoring force proportional to the displacement of the movable portion 4 by using a magnetic field analysis or the like, so that the magnetic action (magnetic attraction force,
Repulsion) can be used as the magnetic spring constant.
Further, the vibration-proof rubber 15 can use its viscosity as a damping coefficient.

That is, in the present embodiment, the vibration damping object 1
Is equivalent to the configuration of a dynamic vibration absorber to which the movable part 4 is attached via a spring element and a damping element. Therefore, each constant must be designed and adjusted in advance in accordance with the vibration conditions of the vibration damping target 1. Thereby, the vibration can be reduced.

More specifically, although not shown, the size of the movable portion 4 can be adjusted by attaching and detaching an additional weight. Further, the spring constant can be adjusted by changing the shapes, dimensions, intervals, and number of the fixed part magnets 8 and the movable part magnets 9 and the distance between the fixed part magnets 8 and the movable part magnets 9. The damping coefficient can be adjusted by changing the material, size, and shape of the rubber cushion 15.

When the vibration damping object 1 vibrates at different frequencies not only in the left-right direction of FIG. 1 but also in the front-rear direction (perpendicular direction of the paper), as described above, the movable part 4 has two planes of freedom. Since the magnetic spring constant is supported so as to be freely vibrable in the directions, the magnetic spring constant is designed and adjusted in advance in accordance with the vibration conditions in the left-right direction and the front-rear direction, whereby a vibration damping effect can be obtained in both directions simultaneously. . In other words, one movable section 4 can effectively reduce vibration with respect to planar two-degree-of-freedom vibration.

More specifically, the attraction force of the fixed part magnet 8 and the movable part magnet 9 disposed on the upper part of the fixed member 5 and the attraction force of the lower fixed part magnet 8 and the movable part magnet 9 in the fixed member 5 are reduced. Adjustment is made so that the value obtained by adding the movable part 4 is balanced. At this time, the magnetic spring constant can be calculated as the sum of the respective spring constants of the upper and lower fixed part magnets 8 and the movable part magnets 9 of the fixed member 5. Can be adjusted.

Further, when the vibration damping device of the present embodiment is applied to micro-vibration of the vibration damping object 1 such as a semiconductor manufacturing device during a steady operation, the load on the seat 13 and the bearing 14 is minimized. The attraction force in the vertical direction (vertical direction on the paper) between the fixed part magnet 8 and the movable part magnet 9 arranged above and below the fixed member 5 is adjusted so as to minimize the resistance caused by the vibration of the movable part 4. , Good vibration damping performance can be obtained. Further, the fatigue life of the seat 13 and the bearing 14 is greatly improved, and a stable vibration damping effect can be obtained even for a long-time continuous operation.

Therefore, according to the present embodiment, it is possible to cope with the two-degree-of-freedom vibration of the object to be damped by the spring element using the magnet, so that the whole vibration damping device is reduced in size and weight. Can be achieved. Further, the use of the vibration damping rubber as the damping element allows the structure of the vibration damping device to be simplified, and the size and weight can be reduced. further,
Since the load on the seat 13 and the bearing 14 can be minimized, the resistance force associated with the vibration of the movable part 4 is also very small, and the vibration damping performance against minute vibrations can be improved. As a result, the life can be greatly improved, and a good vibration damping effect can be obtained even when the vibration damping object 1 is operated continuously for a long time.

Next, a vibration damping device according to a second embodiment of the present invention will be described with reference to FIG. The vibration damping device according to the present embodiment includes a fixing member 5 which is formed in a frame or a box and is fixed to the vibration damping target 1, a middle member 6 attached to the fixing member 5 by a predetermined number, and an inner side of the fixing member 5. A fixed portion back yoke 7 which is a ferromagnetic material attached to the upper and lower surfaces of the fixed portion, fixed portion magnets 8 attached to the fixed portion back yoke 7 vertically and horizontally by bonding or the like, and provided inside the fixed member 5. A movable part magnet 9 which opposes each fixed part magnet 8 and magnetically acts; a movable part back yoke 10 which arranges and holds a predetermined number of movable part magnets 9 vertically and horizontally by bonding or the like; , A movable part connecting member 12 for connecting the upper and lower movable part back yokes 10 and the copper plate 17, a predetermined number of seats 13 attached to the movable part back yoke 10, and a middle member 6. Take Bearings 14, a magnetically attenuating back yoke 18 positioned above and below the copper plate 17 and fixed to the fixing member 5. And a magnetic damping magnet 19 that attracts and holds the magnets.

In the vibration damping device of the present embodiment configured as described above, the movable part magnet 9 and the movable part back yoke 1
2, the movable portion connecting member 12, the seat 13, and the copper plate 17 constitute the movable portion 4 which vibrates integrally. Vibrates freely in the plane of two degrees of freedom.

When the vibration damping object 1 vibrates in the direction of two degrees of freedom in the plane, the spring element has the same configuration as that of the first embodiment and operates similarly. In addition, the same applies to a configuration capable of minimizing the load on the bearing 13 and the bearing 14, and the vibration damping performance against micro vibration and the life are improved.

With respect to the damping element, the copper plate 1 is caused by a magnetic action due to the relative motion between the copper plate 17 and the magnet 19 for magnetic attenuation.
An eddy current loss is generated in 7, and a damping force proportional to the relative movement speed can be obtained.

The magnetic attenuation coefficient is adjusted by changing the thickness of the copper plate 17, the shape, size, interval, number of the magnetic attenuation magnets 19, and the distance between the magnetic attenuation magnets 19 sandwiching the copper plate 17. Can be. Such adjustment can be dealt with by adjusting the number of magnetic damping magnets 19 and the length of the side in each direction, even when the vibration frequency of the vibration damping object 1 is different in each vibration direction. is there.

Therefore, the vibration damping device of the second embodiment also operates in the same manner as the vibration damping device of the first embodiment, and effectively vibrates the vibration damping object 1 in the plane with two degrees of freedom. Can be reduced.

According to this embodiment, the same effects as those of the first embodiment can be obtained, and since the magnet 19 for magnetic attenuation and the copper plate 17 are used as damping elements, the vibration damping object can be obtained. Even if the frequency differs depending on the vibration direction, the design is such that the damping coefficient is different in each direction.
Since the adjustment is possible, the vibration damping performance can be improved. In addition, since the damping force can be obtained without contact, independent design without affecting the spring constant,
Adjustment is possible.

Next, a vibration damping device according to a third embodiment of the present invention will be described with reference to FIG. The vibration damping device according to the present embodiment has a fixed member 5 fixed to the vibration damping target 1 in the form of a box having an airtight structure, a middle member 6 attached to the fixed member 5 by a predetermined number, and an inner side of the fixed member 5. A fixed portion back yoke 7 which is a ferromagnetic material attached to the upper and lower surfaces of the fixed portion, fixed portion magnets 8 attached to the fixed portion back yoke 7 vertically and horizontally by bonding or the like, and provided inside the fixed member 5. A movable part magnet 9 which opposes each fixed part magnet 8 and magnetically acts; a movable part back yoke 10 for arranging and supporting a predetermined number of movable part magnets 9 vertically and horizontally by bonding or the like; Movable part connecting member 12 for connecting and fixing between members
A predetermined number of seats 13 attached to the movable portion back yoke 10 and a bearing 1 attached to the middle member 6
4 and a viscous fluid 20 injected into the fixing member 5 having an airtight structure.

In the present embodiment configured as described above, the movable part magnet 9, the movable part back yoke 10, the movable part connecting member 12, and the seat 13 constitute the movable part 4 which vibrates integrally. The seat 13 and the bearing 14 allow the plane 2 to move in the left-right direction and the front-rear direction (vertical direction in the drawing) of FIG.
It can freely vibrate in the direction of freedom.

When the vibration damping object 1 vibrates in the plane of two degrees of freedom, the spring element has the same configuration as that of the first embodiment and operates in the same manner. The same applies to a configuration that can minimize the load on the seat 13 and the bearing 14, and it is possible to improve the vibration damping performance and the life of the vibration damping device against minute vibrations.

As for the damping element, the viscous fluid 20 injected into the inside of the fixed member 5 utilizes a viscous drag force (viscous damping coefficient) generated as the movable portion 4 moves.

This viscous damping coefficient can be adjusted by the viscosity of the viscous fluid 20, the shape and size of the movable portion 4, or the shape and size of a separately attached resistance plate (not shown). Such adjustment is performed even when the vibration frequency of the vibration damping object 1 is different in each vibration direction.
It is possible to respond by changing the dimensions and the like.

Therefore, the vibration damping device according to the third embodiment also operates in the same manner as the vibration damping devices according to the first and second embodiments, and effectively controls the object 1 to be damped. Vibration in the plane with two degrees of freedom can be reduced.

According to this embodiment, the same effects as those of the first and second embodiments can be obtained, and the viscous fluid 20 injected into the inside of the fixing member 5 is used as the damping element. By doing so, even when the vibration frequency varies depending on the vibration direction of the vibration damping target object 1, it is possible to adjust the vibration damping coefficient so as to have a different damping coefficient in each direction, so that the vibration damping performance can be improved. . In addition, since the damping force can be obtained in a non-contact manner, independent design and adjustment can be performed without affecting the spring constant. further,
Even when the vibration damping target 1 is in a vacuum, the fixing member 5 has an airtight structure and the viscous fluid 20 is injected therein, so that the receiving seat 13 and the bearing 14 are not worn and good for a long time. It is possible to maintain excellent vibration damping performance.

Next, a magnet device for a magnetic spring for adjusting the anisotropy of the spring constant in the vibration damping devices according to the first to third embodiments will be described. FIG. 4 is a plan view of the magnet device for a magnetic spring according to the first embodiment. The fixed member 5 or the movable portion connecting member of the vibration damping device according to the first to third embodiments shown in FIGS. A magnet piece fixing portion 21 attached to the magnet piece 12, a magnet piece back yoke 23 attached to the magnet piece fixing portion 21 by a magnet piece attaching screw 22, and a predetermined number of magnet pieces attached to the magnet piece back yoke 23 by adhesion or the like. It is composed of magnet pieces 24. One or both of the fixed part magnet 8 and the movable part magnet 9 are each constituted by a predetermined number of magnet pieces 24.

In the magnetic device for a magnetic spring according to the present embodiment configured as described above, when adjusting to obtain different spring constants in the horizontal direction and the vertical direction in FIG. Single back yoke 23
Is attached to or removed from the magnet piece fixing portion 21 as appropriate. Thereby, the ratio of the magnetic spring constant in the left-right direction and the vertical direction changes. Thereafter, by adjusting the interval between the fixed portion magnet 8 and the movable portion magnet 9 shown in FIGS. 1 to 3, it is possible to adjust to a required spring constant.

The magnet piece back yoke 23 is provided directly on the inner surface of the fixing member 5 shown in FIGS.
It is good also as a structure attached with. Also, the magnet piece 24
Instead of bonding and fixing a plurality of magnets to the magnet piece back yoke 23, multipolar magnetization may be performed on one magnet material using a magnetizing jig. The application of the magnet device for a magnetic spring of this embodiment is shown in FIG.
-Only the fixed part magnet 8 or only the movable part magnet 9 shown in Fig. 3 may be used, or both may be used.

According to this embodiment, the magnet piece back yoke 23 with the magnet piece 24 attached to the magnet piece fixing portion 21
Is attached so that it can be attached and detached, it is possible to relatively easily adjust the magnetic spring constant for different frequencies in the two directions of the vibration damping device. In addition, a large adjustment range of the magnetic spring constant can be obtained without replacing the whole of the fixed part magnet 8 or the movable part magnet 9.

Next, a second embodiment of the magnet device for a magnetic spring will be described with reference to FIG. That is, the magnet device for a magnetic spring of the present embodiment includes a magnet piece fixing portion 21 attached to the fixing member 5 or the movable portion connecting member 12 shown in FIGS. A groove portion 25 provided on the side, and a fitting portion 2 for attaching to the groove portion 25
6, a predetermined number of magnet piece back yokes 23, a predetermined number of magnet pieces 24 attached to the magnet piece back yoke 23 by adhesion or the like, and magnet side fixing screws 27 so as to press the side faces of the magnet piece back yoke 23. It is composed of a magnet side fixing part 28 fixed to the magnet piece fixing part 21.

In the magnetic device for a magnetic spring according to the present embodiment having the above-described configuration, when the adjustment for obtaining different spring constants in the left-right direction and the up-down direction in FIG. The magnet piece back yoke 23 is attached to and removed from the groove portion 25 by the fitting portion 26. The magnet piece back yoke 23 in the groove 25 is not shown, but is prepared in advance at an appropriate position of the magnet piece fixing section 21 so that the magnet side fixing section 28 is fixed to the screw section with the magnet side fixing screw 27. It does by doing.
Thereby, the ratio of the magnetic spring constant in the left-right direction and the vertical direction changes. Thereafter, the distance between the fixed part magnet 8 and the movable part magnet 9 shown in FIGS.

The backlash may be absorbed by interposing a leaf spring or the like between the magnet piece back yoke 23 and the magnet side surface fixing portion 28. The magnet piece 24 may be multipolar magnetized using a magnetizing jig on one magnet material instead of bonding and fixing a plurality of magnet pieces to the magnet piece back yoke 23. Further, the application of the magnet device for a magnetic spring of the present embodiment may be applied only to the fixed portion magnet 8 or only the movable portion magnet 9 shown in FIGS.

According to the present embodiment, the magnet piece back yoke 23 to which the magnet piece 24 is attached is detachably attached to the groove 25 of the magnet piece fixing portion 21. Adjustment of the magnetic spring constant for different frequencies in two directions can be performed relatively easily. In addition, a large adjustment range of the magnetic spring constant can be obtained without replacing the whole of the fixed part magnet 8 or the movable part magnet 9.

Next, a third embodiment of the magnet device for a magnetic spring will be described with reference to FIG. That is, the magnet device for a magnetic spring of the present embodiment includes a magnet piece fixing portion 21 attached to the fixing member 5 or the movable portion connecting member 12 shown in FIGS. X-direction back yoke 29 and Y
Back yoke 30 for direction and back yoke 29 for X direction
A predetermined number of X-direction magnet pieces 31 are bonded and fixed to the Y-direction, and a predetermined number of Y-direction magnet pieces 32 are bonded and fixed to the Y-direction back yoke 30.

In the magnetic device for a magnetic spring according to the present embodiment configured as described above, adjustment for obtaining different spring constants in the horizontal direction (hereinafter referred to as X direction) and the vertical direction (hereinafter referred to as Y direction) in FIG. In the case of implementation, the back yoke 29 for the X direction or the back yoke 30 for the Y direction is attached to the magnet piece fixing portion 21 with the magnet piece attaching screws 22 depending on which one of the X direction and the Y direction is desired to be largely adjusted. Or remove it. At this time, the X-direction magnet piece 31 is manufactured so that the magnetic spring constant in the X direction is large and the magnetic spring constant in the Y direction is small.
It is assumed that the direction magnet piece 32 is manufactured in the opposite manner. As a result, the ratio of the magnetic spring constants in the X direction and the Y direction changes with a relatively small amount of attachment and detachment work. Thereafter, the distance between the fixed part magnet 8 and the movable part magnet 9 shown in FIGS. 1 to 3 is adjusted to adjust to a predetermined spring constant.

This embodiment may be applied to the second embodiment. A plurality of X-direction magnet pieces 31 and Y-direction magnet pieces 32 are used as X-direction back yokes 29, Y.
Instead of being bonded and fixed to the directional back yoke 30, multi-pole magnetization may be performed on one magnet material using a magnetizing jig. Further, the application of the magnet device for a magnetic spring of the present embodiment may be applied to only the fixed portion magnet 8 or only the movable portion magnet 9 shown in FIGS.

According to the present embodiment, the X-direction back yoke 29 and the X-direction magnet piece 31 which mainly contribute to the X-direction magnetic spring constant, and the Y-direction Back yoke 30 for Y direction contributing to magnetic spring constant
Also, since the Y-direction magnet piece 32 is configured to be attachable and detachable, the adjustment of the magnetic spring constant for the different frequencies in the two directions of the vibration damping device can be easily performed with a relatively small amount of work. In addition, a large adjustment range of the magnetic spring constant can be obtained without replacing the whole of the fixed part magnet 8 or the movable part magnet 9.

[0056]

According to the present invention, it is possible to realize a vibration damping device which can reduce the size and weight of the vibration damping device and can obtain an effective vibration damping effect even with a very small vibration acceleration.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a vibration damping device according to a first embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a vibration damping device according to a second embodiment of the present invention.

FIG. 3 is a longitudinal sectional view showing a vibration damping device according to a third embodiment of the present invention.

FIG. 4 is a plan view showing a first example of a magnet device for a magnetic spring provided in the vibration damping device according to the embodiment of the present invention.

FIG. 5A is a plan view showing a second example of the magnet device for a magnetic spring provided in the vibration damping device according to the embodiment of the present invention,
Sectional drawing (b) which follows the bb line of (a).

FIG. 6 is a plan view showing a third embodiment of the magnet device for a magnetic spring provided in the vibration damping device according to the embodiment of the present invention.

7A and 7B are a side view and a plan view schematically showing a conventional vibration damping device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Vibration suppression object, 2 ... Dynamic vibration absorber, 2a ... Additional mass, 2b
... Elastic element, 2c ... Attenuation element, 4 ... Movable part, 5 ... Fixed member, 6 ... Medium stage member, 7 ... Fixed part back yoke, 8 ... Fixed part magnet, 9 ... Movable part magnet, 10 ... Movable part back yoke,
Reference numeral 11: hole portion, 12: movable portion connecting member, 13: receiving seat, 14
... bearings, 15 ... anti-vibration rubber, 17 ... copper plate, 18 ...
Back yoke for magnetic attenuation, 19 ... magnet for magnetic attenuation, 20
... viscous fluid, 21 ... magnet piece fixing part, 22 ... magnet piece mounting screw, 23 ... magnet piece back yoke, 24 ... magnet piece, 2
5 ... groove portion, 26 ... fitting portion, 27 ... magnet side surface fixing screw, 28 ... magnet side surface fixing portion, 29 ... X direction back yoke, 30 ... Y direction back yoke, 31 ... X direction magnet piece, 32 ... Magnetic piece for Y direction.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hiroshi Niwa 2-1 Ukishima-cho, Kawasaki-ku, Kawasaki-shi, Kanagawa Prefecture F-term in the Toshiba Hamakawasaki Plant (reference) 3J048 AA03 AC01 AC08 AD07 BA03 BE08 BE13 BF08 DA10 EA13

Claims (8)

[Claims] 1. A fixed part fixed to an object to be damped, and a movable part provided through a bearing and a damping element allowing relative movement of the fixed part in two planes of freedom. The portion includes a frame-shaped or box-shaped fixed member, and fixed portion magnets attached to two opposing inner surfaces of the fixed member, and the movable portion is separated from the fixed portion magnet via a predetermined gap. A vibration damping device comprising a movable portion magnet held and magnetically acting on the fixed portion magnet. 2. The vibration damping device according to claim 1, wherein said damping element is made of a viscous material attached between said fixed part and said movable part. 3. The damping element according to claim 1, wherein the damping element comprises a conductor plate attached to the movable portion, and a damping magnet attached to the fixed portion and electromagnetically acting on the conductor plate. Damping device. 4. The vibration damping device according to claim 1, wherein the fixed portion has an airtight structure, and the damping element is made of a viscous fluid injected into the fixed portion. 5. The vibration damping device according to claim 1, further comprising a magnet device for a magnetic spring for adjusting a spring constant according to a moving direction of the movable portion. 6. The fixed part magnet and / or the movable part magnet each includes a predetermined number of magnet pieces, and the magnetic spring magnet device includes a magnet piece and a magnet piece to which the magnet piece is detachably attached. The vibration damping device according to claim 5, further comprising a fixing portion. 7. The vibration damping device according to claim 6, wherein a plurality of the magnet pieces are fixedly arranged side by side on a plate-like yoke, and the yoke is detachably attached to the magnet piece fixing portion. . 8. The magnet piece for the X direction mainly contributing to the spring constant in one predetermined direction, and the magnet piece for the Y direction mainly contributing to the spring constant in the direction orthogonal to the predetermined one direction. 7. The vibration damping device according to claim 6, comprising: