JP2002289435A - Air-core coil and production method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air-core coil which is easy to be handled alone, miniatur ized and inexpensive and improves performance, and to provide a production method therefor. SOLUTION: In the air-core coil, both terminals of the coil are embedded in a packaging base, and the packaging base, with the both terminal of the coil embedded is formed integrally to keep constant the conductor interval of the coil. In the production method for the cir-core coil, the coil is embedded in a packaging base material applied on a substrate, the packaging base is formed by removing the unused part of the packaging base by etching. After the solidification of the packaging base, the base is released from the substrate so that the coil can be produced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air-core coil used for high-frequency equipment, and more particularly, to a small-sized and high-performance air-core coil for a circuit board.

[0002]

2. Description of the Related Art Conventionally, when an air-core coil is mounted on a mounting base, both ends of the air-core coil are fixed one by one with an adhesive.

[0003]

In the conventional method, mounting the air-core coil to the mounting base requires a complicated work. In addition, since the conductor spacing of the air-core coil is air-core during installation, the air-core coil is likely to be out of order, and this inconsistency causes variations in performance. Therefore, when manufacturing, storing, transporting, or bonding an air-core coil, sufficient care has been required for its handling.

An object of the present invention is to provide a high-performance air-core coil which is easy to handle and can be mass-produced, and a method of manufacturing the same.

[0005]

According to a first aspect of the present invention, there is provided an air-core coil wherein both ends of the coil are embedded in a mounting base.

According to a second aspect of the present invention, in the air-core coil according to the first aspect, the mounting base portions on both ends of the coil in which both ends of the coil are embedded have a predetermined conductor interval between the coils. It is characterized by being formed integrally with each other so as to keep the distance.

[0007] The third aspect of the present invention is the first or second aspect.
, The mounting base is a resist in which only a portion serving as a mounting base remains and other portions are removed.

[0008] The invention of claim 4 is the first to third aspects of the present invention.
In the air-core coil according to any one of the above, the coil is characterized in that the core used in forming the coil is held without being pulled out.

The invention according to claim 5 is the invention according to claims 1 to 4.
In the air-core coil described in any one of the above, the coil is characterized in that the coil holds a core material capable of obtaining a self-resonant frequency equivalent to that of the air-core.

The invention of claim 6 is the invention of claim 4 or claim 5.
Wherein the core material is an optical fiber.

According to a seventh aspect of the present invention, in the method of manufacturing an air-core coil in which both ends of the coil are embedded in the mounting base, a step of applying the mounting base material to the substrate; A step of embedding the coil, a step of removing an unnecessary portion of the mounting base material by etching to form a mounting base, and a step of peeling the mounting base from the substrate after the formed mounting base is solidified. It is characterized by including.

According to an eighth aspect of the present invention, there is provided a method of manufacturing an air-core coil in which both ends of a coil are embedded in a mounting base, wherein a step of applying a mounting base material to a substrate; A step of embedding a coil material having a length equivalent to a plurality of unit coil lengths, and a step of removing an unnecessary portion of the mounting base material by etching the coil material for each unit coil length to form a mounting base. A step of cutting the coil material for each unit coil length after the formed mounting base is solidified, and a step of peeling the mounting base in which both ends of the unit coil are embedded from the substrate. And

According to a ninth aspect of the present invention, in the method of manufacturing an air-core coil according to the eighth aspect, a plurality of coil members having a length corresponding to a plurality of unit coil lengths are arranged and manufactured simultaneously. .

According to a tenth aspect of the present invention, in the method of manufacturing an air-core coil according to any one of the eighth and ninth aspects, the step of cutting the coil material for each unit coil length comprises the steps of: Is performed before the mounting base in which is embedded is peeled from the substrate.

According to an eleventh aspect of the present invention, in the method of manufacturing an air-core coil according to any one of the seventh to tenth aspects,
The mounting base portions at both ends of the coil in which both ends of the coil are embedded are formed integrally with each other so as to keep a conductor interval of the coil at a predetermined distance.

According to a twelfth aspect of the present invention, in the method for manufacturing an air-core coil according to the seventh aspect, the coil is held without being pulled out of the core used in forming the coil.

According to a thirteenth aspect of the present invention, in the method of manufacturing an air-core coil according to any one of the eighth to eleventh aspects,
The coil material is characterized in that the core material used in forming the coil material is held without being pulled out, and is cut when the coil material is cut for each unit coil length.

According to a fourteenth aspect of the present invention, in the method for manufacturing an air core coil according to the twelfth or thirteenth aspect, the core material is formed of a material capable of obtaining a resonance frequency equivalent to that of the air core. I do.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Embodiment 1
The air-core coil has a configuration in which both ends of the coil are embedded in the mounting base and the coil is integrated with the mounting base. This will be described with reference to FIGS. FIG. 1 is a perspective view of an air-core coil, and FIG. 2 is a longitudinal sectional view of FIG. Figure 1
In the figure, reference numeral 1 denotes a coil, and 2 denotes a mounting base.
The coil 1 is a so-called air-core coil formed by winding a conductor around an appropriate core material (not shown) at a predetermined interval to form a coil, and then extracting the core material.

The mounting base 2 is made of a resist such as SU
In other words, any material can be used, such as a negative resist such as -8, a photosensitive resin, or the like, that is, a material that can leave only a portion of the mounting base 2 in a desired form and remove other unnecessary portions of the mounting base material. Good. In this case, the connection base of the coil, that is, the mounting base portion in which the both ends of the coil are respectively embedded (refers to the portion of the mounting base material in which both connection ends of the coil are embedded, and is present at both ends of the coil) Are formed integrally with each other so as to keep the conductor interval of the coil constant. Thereby, the conductor spacing of the coil 1 is kept constant by the mounting base 2. Therefore, it is preferable that the mounting base is made of a relatively strong material, and its form is such that the conductor spacing of the coil can be kept constant.

In the first embodiment, a negative resist is used as the mounting base 2, and the negative resist is formed in a rectangular frame shape, and the coil 1 is formed so that two opposing sides penetrate from the inside to the outside of the frame. Are buried, and the main body of the coil 1 is located inside the frame. As described above, by forming the mounting base 2 so that the respective practical base portions on both ends of the coil 1 are integrated with each other, the length between both ends of the coil 1 is made constant as described above. Therefore, the conductor spacing of the coil 1 can be kept constant, and an air-core coil having no variation in performance can be provided. It should be noted that the shape for integrating the respective practical base portions on both ends of the coil 1 is not limited to this rectangular frame shape, but may be any suitable shape according to the use environment.

Embodiment 2 FIG. In the second embodiment, the coil 1
Is a method of manufacturing an air-core coil according to the first embodiment, in which both ends of the coil are embedded in a negative resist formed as a mounting base 2. This will be described with reference to FIGS. FIG. 3 is a longitudinal sectional view showing the manufacturing method.

In FIG. 3, first, a negative resist 4 as a mounting base material is applied to a flat surface of the substrate 3 to an appropriate thickness (hereinafter, also referred to as an application step). In this case, the substrate 3 may be a substrate constituting a semiconductor element, or may be another suitable flat plate or a container having a flat bottom.

Next, a coil is embedded in the applied negative resist 4 (hereinafter, also referred to as an embedding step). In this case, the applied negative resist 4 needs to be applied to such a thickness that both end portions of the coil 1 to be embedded are buried.

Next, an unnecessary portion of the applied negative resist 4, that is, an unnecessary mounting base material, that is, an unnecessary portion of an imaginary line portion in FIG. 3 in this example is removed by etching to form a mounting base 2 (hereinafter, referred to as a mounting base 2). , Removal step). In this case, by exposing and developing using a mask (not shown) on which an arbitrary pattern is printed in advance, the remaining negative resist 4 becomes the mounting base 2.

Finally, after the negative resist 4 as the mounting base 2 is solidified, the negative resist, that is, the mounting base 2 left from the substrate 3 is peeled off (hereinafter also referred to as a peeling step). Thus, the first embodiment as shown in FIG.
The air-core coil with the mounting base is manufactured.

According to the first and second embodiments,
Since the coil 1 is fixed to the mounting base 2 in which the negative resist portions whose both ends are embedded and fixed are fixed to the mounting base 2 integrated with each other, variations in the conductor spacing of the coil 1 are less likely to occur, and the self-resonant frequency at high frequencies It is possible to provide an air-core coil having a high performance, a large inductance value, and a stable performance. In addition, since the air-core coils of Embodiments 1 and 2 have both ends already embedded in the mounting base 2, the work of individually bonding the coil ends to the mounting base as in the related art has been required. Since the production process can be simplified at the point where it disappears, productivity can be improved,
A low-cost, high-performance air core coil can be provided as a part.

Embodiment 3 In the third embodiment, in the manufacturing method of the second embodiment, a coil material having a length equal to a plurality of coils of an arbitrary length (hereinafter, also referred to as a unit coil length) of a coil configured as a single part is used. Embedded in a negative resist as a mounting base material applied to a substrate having a relatively wide flat surface, and after the negative resist remaining as the mounting base 2 is solidified by etching, the coil material is removed for each unit coil length. 2 shows a method of manufacturing a plurality of air-core coils at the same time. This will be described with reference to FIG. FIG. 4 is a plan view. Incidentally, reference numerals 7 and 8 in the drawing indicate cutting lines.

Next, the steps of the manufacturing method according to the third embodiment will be described. Coating Step The coating step is a step of coating the substrate 3 with the negative resist 4 as a mounting base material, and is the same as in the second embodiment. However, the substrate 3 in this case requires an area corresponding to the size of the coil material 5 having a length corresponding to a plurality of unit coil lengths.

Embedding Step The embedding step is a step of embedding a coil material 5 having a length corresponding to a plurality of unit coil lengths into the negative resist 4 applied to the substrate 3. This is the same as in Embodiment 2.

Removal Step The removal step is a step of removing unnecessary portions of the resist 4 by etching the coil material 5 for each unit coil length to form the mounting base 6. This is the same as in the second embodiment.

Cutting Step The cutting step is a step of cutting the coil material 5 for each unit coil length, and is a necessary step in the third embodiment.

Peeling Step The peeling step is a step of peeling the negative resist as the mounting base 6 in which the both ends of the unit coil are embedded, that is, the mounting base with the air-core coil from the substrate 3. This is the same as Embodiment 2 described above.

Through the above-described steps, an air core coil as a plurality of parts can be obtained from one coil material 5 at the same time. In the third embodiment, the coil material 5 is cut into unit coil lengths after the negative resist 4 left by the etching is solidified and before a peeling step described later. May be performed after the negative resist as above is peeled from the substrate 3.

Embodiment 4 FIG. In the fourth embodiment, in the manufacturing method of the third embodiment, a plurality of coil materials having a length corresponding to a plurality of unit coil lengths are arranged and embedded in a negative resist applied to a substrate having a relatively wide flat surface. Then, etching is performed for each unit coil length, and after the negative resist left as a mounting base is solidified, the plurality of coil materials are cut for each unit coil length, and at the same time, the above-described embodiment is used. This is a method of simultaneously manufacturing a plurality of air-core coils of more than three. FIG. 5 is a plan view.

As shown in FIG. 5, in this example, the substrate (3)
The three coil members 5, 5, and 5 are embedded in parallel in a negative resist as a mounting base applied to the substrate. Other manufacturing steps are substantially the same as in the third embodiment. Note that reference numerals 7 to 10 in FIG. 5 indicate cutting lines.

Embodiment 5 Embodiment 5 is an air-core coil configured or manufactured as in Embodiments 1 to 4 above, while holding a core material having a self-resonant frequency equivalent to that of the air-core. This will be described with reference to FIGS. 6 is a perspective view, and FIG. 7 is a longitudinal sectional view of FIG.

In FIGS. 6 and 7, reference numeral 12 in the figures denotes a core material held by the coil 13. In this example, an optical fiber is used as the core material. This heartwood 1
No. 2 must be formed of a material capable of obtaining a resonance frequency equivalent to that when the coil 13 is an air core. As such a core material, a quartz material having a small dielectric constant is preferably used.

The core material 12 is used in the process of manufacturing an air core coil. After the coil is formed, the dielectric constant of air is 1 and the air core is small, and the air core has better characteristics. In the fifth embodiment, the core 12 used for forming the coil 13 is not pulled out, but is held by the coil 13 as it is. Also, such a heartwood 1
As shown in FIGS. 8 and 9, the method of manufacturing the air-core coil holding No. 2 may be handled in the same manner as the coil material 5 described in the third and fourth embodiments. The manufacturing method is the same as in the first embodiment. In FIGS. 8 and 9, reference numeral 11 denotes a support frame for supporting both ends of the arranged coil members 13, and reference numeral 14 denotes a mounting base.

According to the fifth embodiment, the coil 13
Is kept wound around the core material 12, so that the conductor interval of the air-core coil can be maintained more reliably than in the air-core coils according to the first to fourth embodiments, and the variation is further reduced. An air core coil can be provided. Further, since an optical fiber is used as the core material 12, it is not necessary to remove the core material 12 from the coil 13, it is easy to maintain the conductor interval, and if the frequency is as high as about 20 GHz, the coil has a high self-resonant frequency and an inductance value. It is possible to provide an air-core coil having a large size and less variation as an easy-to-handle part.

In each of the above embodiments, the mounting base is manufactured by a different process as in the prior art, and thereafter, there is no need to bond the air-core coil. Since the work step of bonding to the substrate can be omitted, productivity can be significantly improved.
Also, the coils 1 and 13 may be not only copper wires but also gold wires or aluminum wires.
The shape of the coil may be any shape such as a cylindrical, quadrangular, hexagonal or conical shape of the core material 12 to be wound. In addition, although the coil 1 is shown as a single-wound coil, it may be multi-wound.

[0042]

According to the first to fourteenth aspects of the present invention, there is provided a low-cost, high-performance air-core coil which is easy to handle as a single item, has little variation in products, and a method of manufacturing the same. be able to. In addition, since both ends of the coil are fixed by the integrally formed mounting base, a constant spacing between the conductors of the coil can be maintained, and a mounting base that can increase the self-resonant frequency at a high frequency. Provided with the air-core coil. or,
As in the past, both ends of the air core coil were used as mounting bases.
The troublesome work of bonding one by one becomes unnecessary.

According to each of the seventh to fourteenth aspects of the present invention, an air-core coil in which both ends of the coil are fixed by an integrally formed mounting base can be efficiently mass-produced at one time. Can be.

According to the twelfth to fourteenth aspects of the present invention, all of the coils are wound around a core material having substantially no electric action, and both ends of the coil are integrally formed. Since it is fixed to the mounting base formed in a uniform manner, it is possible to provide an air-core coil in which the conductor spacing of the coil is kept constant, so that the self-resonant frequency is high at a high frequency, the inductance value is large, and the It is possible to provide an air-core coil with a small number. Also, for example, 20GH
In the case of high frequency of about z, by using a silica-based core such as an optical fiber for the core material, it is possible to obtain the same resonance frequency as the air core. An air core coil can be provided as a part.

[Brief description of the drawings]

FIG. 1 is a perspective view of an air-core coil according to a first embodiment.

FIG. 2 is a longitudinal sectional view of the air core coil of FIG.

FIG. 3 is a longitudinal sectional view illustrating a method of manufacturing the air-core coil according to the second embodiment.

FIG. 4 is a plan view illustrating a method for manufacturing an air-core coil according to a third embodiment.

FIG. 5 is a plan view showing a method for manufacturing an air-core coil according to a fourth embodiment.

FIG. 6 is a perspective view of an air-core coil according to a fifth embodiment.

FIG. 7 is a longitudinal sectional view of the air-core coil of FIG. 6;

FIG. 8 is a plan view showing a manufacturing method according to a sixth embodiment.

FIG. 9 is a plan view showing the manufacturing method according to the sixth embodiment.

[Explanation of symbols]

1, 13 coil, 2 mounting base, 3 substrate, 4,
14 Negative resist (base for mounting), 5 cores, 6,
7, 8, 9, 10 cutting line, 11 support frames, 12 cores.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor, Tsukasa Miyatake 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) 5E062 FF01 FF03 FF09 5E070 AA01 AB01 AB06 BA01 CA02 CA13 CA03 DB03

Claims (14)

[Claims] 1. An air-core coil wherein both ends of the coil are embedded in a mounting base. 2. The air-core coil according to claim 1, wherein the mounting base portions at both ends of the coil are formed integrally with each other so as to keep a conductor interval of the coil at a predetermined distance. 3. The air-core coil according to claim 1, wherein the mounting base is a resist in which only a portion serving as the mounting base remains and other portions are removed. 4. The air-core coil according to claim 1, wherein the core material used for forming the coil is held without being pulled out. 5. The air-core coil according to claim 1, wherein the coil holds a core material having a self-resonant frequency equivalent to that of the air-core. 6. The air-core coil according to claim 4, wherein the core material is an optical fiber. 7. A method of manufacturing an air-core coil in which both ends of a coil are embedded in a mounting base, a step of applying a mounting base material to a substrate, and a step of embedding the coil in the applied mounting base material. Forming a mounting base by removing unnecessary portions of the mounting base material by etching, and removing the mounting base from the substrate after the formed mounting base is solidified. Manufacturing method of air core coil. 8. A method of manufacturing an air-core coil in which both ends of a coil are embedded in a mounting base, a step of applying a mounting base material to a substrate, and a step of applying a unit coil length to the applied mounting base material. A step of embedding a coil material of a plurality of lengths, a step of removing the unnecessary portion of the mounting base material by etching the coil material for each unit coil length, and forming a mounting base, After the solidification base is solidified, a step of cutting the coil material for each unit coil length, and a step of peeling the mounting base in which both end portions of the unit coil are embedded from the substrate, Manufacturing method of core coil. 9. The method of manufacturing an air-core coil according to claim 8, wherein a plurality of coil materials having a length corresponding to a plurality of unit coil lengths are arranged and manufactured at the same time. 10. The method according to claim 8, wherein the step of cutting the coil material for each unit coil length is performed before the mounting base in which both ends of the unit coil are embedded is peeled from the substrate. 9. The method for manufacturing an air-core coil according to any one of items 9 to 9. 11. The mounting base portions at both ends of the coil, in which both ends of the coil are embedded, are formed integrally with each other so as to keep the conductor interval of the coil constant. A method for manufacturing an air-core coil according to claim 10. 12. The method of manufacturing an air-core coil according to claim 7, wherein the coil is held without being pulled out of the core material used in forming the coil. 13. The coil material is characterized in that the core material used for forming the coil material is held without being pulled out, and is cut when the coil material is cut for each unit coil length. The method for manufacturing an air-core coil according to any one of claims 8 to 11. 14. The method for manufacturing an air-core coil according to claim 12, wherein the core material is formed of a material having a resonance frequency equivalent to that of the air-core.