JP2002286967A - Method of manufacturing optical coupling circuit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical coupling circuit, a method that enables assembling man-hours to be shortened by reducing an operation for aligning the optical axis of an optical fiber with that of a lens. SOLUTION: In a first process (S101), there are formed parallelly to each other the first channel comprising a V-groove for positioning an optical fiber on the surface of a silicon semiconductor wafer, the second channel comprising a guide groove for positioning a substrate, and the third channel comprising a guide groove for positioning a lens. In a second process (S103), the silicon semiconductor wafer is cut on which the first, second and third channels are formed, disconnecting each part that constitutes the first fiber array, the second fiber array, and the lens substrate. Then, in a third process (S105), the part formed with the first channel is removed from the part constituting the disconnected lens substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing an optical coupling circuit for transmitting and receiving optical signals between optical fibers.

[0002]

2. Description of the Related Art As an optical coupling circuit of this type, for example, an optical coupling circuit disclosed in Japanese Patent Application Laid-Open No. H11-160569 is known. Japanese Patent Application Laid-Open No. 11-160569
An optical coupling circuit disclosed in Japanese Unexamined Patent Publication (Kokai) No. H11-20711 includes first and second optical fibers arranged such that end faces thereof face each other,
A first substrate to which the end of the first optical fiber is fixed; a second substrate to which the end of the second optical fiber is fixed;
And a third substrate provided between the first substrate and the second substrate. The third substrate includes a lens and an optical functional element ( For example, an optical isolator and / or an optical filter) and another lens corresponding to the above-described lens are provided.

The end of the first optical fiber is fixedly engaged with a V-groove formed on one surface of the first substrate. Second
The end of the optical fiber is fixed by engaging with a V-groove formed on one surface of the second substrate. Further, each lens is engaged with and fixed to a concave portion formed on one surface of the third substrate.

[0004]

By the way, in the optical coupling circuit having the above-mentioned configuration, the optical elements such as the optical fiber and the lens are fixed to separate substrates, respectively, and the substrates are aligned again. Must be fixed. Therefore, an extra assembling time is required for the step of joining the substrates, and an advanced assembling technique is required.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an optical coupling circuit capable of reducing the work of aligning the optical axis of an optical fiber with the optical axis of a lens and reducing the number of assembly steps. It is intended to provide a manufacturing method.

[0006]

According to a method of manufacturing an optical coupling circuit according to the present invention, a first substrate to which an end of one optical fiber is fixed and a first substrate to which an end of the other optical fiber is fixed. 2
And a third substrate provided between the first substrate and the second substrate, wherein the third substrate has a lens in a direction from one optical fiber toward the other optical fiber. And a method for manufacturing an optical coupling circuit in which an optical functional element and another lens corresponding to the lens are provided, wherein the optical coupling circuit is used to position an end of an optical fiber on a surface of a single material. A first groove forming a fiber positioning guide groove and a second groove forming a substrate positioning guide groove for positioning the first substrate, the second substrate, and the third substrate by engaging the guide pins. A first step of forming the second groove and a third groove constituting a lens positioning guide groove for positioning the lens in parallel with each other, a first groove, a second groove, And cutting the single material in which the third groove is formed,
A second step of separating the portion forming the second substrate from the portion forming the second substrate and the portion forming the third substrate; and forming the first groove from the portion forming the separated third substrate. And a third step of removing a portion where the stripe is formed.

In the method for manufacturing an optical coupling circuit according to the present invention,
In a first step, a first groove that forms an optical fiber positioning guide groove for positioning an end of an optical fiber is engaged with a surface of a single material, and a first pin is engaged with the first groove.
Substrate, a second substrate, and a second groove forming a substrate positioning guide groove for positioning the third substrate,
A third groove forming a lens positioning guide groove for positioning the lens is formed in parallel with each other. Then, in the second step, the first groove, the second groove,
And the single material on which the third groove is formed is cut,
A part forming the first substrate, a part forming the second substrate, and a part forming the third substrate are separated, and in a third step, a part forming the separated third substrate is The portion where the first groove is formed is removed. As described above, since the first groove, the second groove, and the third groove are processed and formed in the same process, the first substrate, the second substrate, and the third substrate are not processed. High-precision positioning becomes possible. Then, the first substrate, the second substrate, and the third
When the substrate is positioned, the optical axis of the optical fiber and the optical axis of the lens are substantially aligned,
It is not necessary to newly perform the alignment work between the optical axis of the optical fiber and the optical axis of the lens. As a result, the number of steps for assembling the optical coupling circuit can be reduced.

Further, in the method for manufacturing an optical coupling circuit according to the present invention, a portion constituting the separated first substrate,
For each of the part constituting the second substrate and the part constituting the third substrate, the first part located on the same column
It is preferable that an optical coupling circuit is configured by selecting a groove having the first groove, the second groove, and the third groove. In such a configuration, the first groove, the second groove, and the third groove
The first substrate, the second substrate, and the third substrate, each having exactly the same position and shape,
With this substrate, an optical coupling circuit can be formed. As a result, the positioning accuracy of the first substrate, the second substrate, and the third substrate can be further improved. In a state where the first substrate, the second substrate, and the third substrate are positioned by the guide pins, the optical axis of the optical fiber and the optical axis of the lens are more reliably aligned. be able to.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an optical coupling circuit according to the present invention will be described below in detail with reference to the drawings. In the embodiment described below, the optical coupling circuit of the present invention is provided with a 2 × 1 WDM (Wavelength Division Multiplexin).
g) This is an example applied to a filter.

First, the configuration of an optical coupling circuit according to an embodiment of the present invention will be described with reference to FIGS. Figure 1
Is a side view showing the optical coupling circuit according to the present embodiment,
FIG. 2 is a plan view showing the optical coupling circuit, and FIG.
FIG. 4 is a perspective view showing a state where a pressing member is removed in the same optical coupling circuit. FIG. 4 is a perspective view showing a holding member included in the optical coupling circuit according to the present embodiment.

The optical coupling circuit 1 includes a first fiber array (first substrate) 10 and a second
Fiber array (second substrate) 20, lens substrate (third substrate) 30, pressing member 40, pair of lenses 41, 4
2. It has an optical filter 43 as an optical functional element and a plurality of guide pins 44 and 45. Lens substrate 3
Numeral 0 is arranged on one side of the first fiber array 10 in series with the first fiber array 10. The second fiber array 20 is arranged in series with the first fiber array 10 and the lens substrate 30 on the side of the lens substrate 30 opposite to the first fiber array 10. The lens substrate 30 is provided between the first fiber array 10 and the second fiber array 20. The first fiber array 10, the second fiber array 20, and the lens substrate 30 are made of a low expansion material, for example, silicon (Si).

One surface (upper surface) of the first fiber array 10
A plurality (for example, three) of optical fiber positioning V-grooves (optical fiber positioning guide grooves) 11 extending in a direction parallel to the direction in which the substrates 10, 20, 30 are arranged. The optical fiber positioning V-groove 11 is for positioning and fixing the end of the optical fiber. In the present embodiment, the optical fibers 2 and 3 are fixed to each of the two optical fiber positioning V-grooves 11. After bonding the holding plate 12 to the first fiber array 10, each of the optical fibers 2 and 3 is
The optical fiber positioning V-groove 11 is inserted into the groove 11 and the end faces of the optical fibers 2 and 3 are positioned on the side of the first fiber array 10 of the optical fiber positioning V-groove 11. In a state of being sandwiched between the fixing member 13 and the fixing member 13, the fixing member 13 is fixed by an adhesive (for example, an epoxy resin adhesive). Alternatively, the optical fibers 2 and 3 are inserted between the holding plate 12 and the V-groove 11 for positioning the optical fiber so as to slightly protrude from the end face, and adhered while being sandwiched between the V-groove 11 for positioning the optical fiber and the fixing member 13. After fixing with an agent or the like, the end faces may be cut with a dicer or the like to align the end faces.

On one surface (upper surface) of the first fiber array 10, a substrate positioning guide groove 14 having a V-shaped cross section, extending in a direction parallel to the direction in which the substrates 10, 20, 30 are arranged. A pair is formed with the optical fiber positioning V-groove 11 interposed therebetween. This substrate positioning guide groove 14
Is for positioning the first fiber array 10, the second fiber array 20, and the lens substrate 30 by engaging the guide pins 44 and 45.

One surface (upper surface) of the second fiber array 20
Are formed with a plurality (for example, three) of optical fiber positioning V-grooves (optical fiber positioning guide grooves) 21 extending in a direction parallel to the direction in which the substrates 10, 20, and 30 are arranged. The optical fiber positioning V-groove 21 is for positioning and fixing the end of the optical fiber, like the optical fiber positioning V-groove 11. In the present embodiment, the optical fiber 4 is fixed to one optical fiber positioning V-groove 21. The optical fiber 4 is inserted into the optical fiber positioning V-groove 21 after the holding plate 22 is adhered to the second fiber array 20, and the optical fiber is placed on the side of the second fiber array 20 of the optical fiber positioning V-groove 21. 4 is located and the optical fiber positioning V
While being sandwiched between the groove 21 (second fiber array 20) and the fixing member 23, it is fixed with an adhesive (for example, an epoxy resin-based adhesive) or the like. Alternatively, the optical fiber 4 is inserted between the holding plate 22 and the V-groove 21 for positioning the optical fiber so as to slightly protrude from the end face, and the adhesive or the like is sandwiched between the V-groove 21 for positioning the optical fiber and the fixing member 23. Then, the end faces may be cut with a dicer or the like to align the end faces.

On one surface (upper surface) of the second fiber array 20, a substrate positioning guide groove 24 having a V-shaped cross section, extending in a direction parallel to the direction in which the substrates 10, 20, 30 are arranged. A pair is formed with the optical fiber positioning V-groove 21 interposed therebetween. This substrate positioning guide groove 24
Is for positioning the first fiber array 10, the second fiber array 20, and the lens substrate 30 by engaging the guide pins 44 and 45.

The lens substrate 3 of the first fiber array 10
The surface 15 facing the optical fiber 0 and the surface 25 facing the lens substrate 30 of the second fiber array 20 are coated with an anti-reflection film, and in the optical axis direction (optical waveguide direction) of the optical fibers 2, 3, and 4. It is formed obliquely so as to have a certain angle from a plane perpendicular to the plane. As a result, the signal light incident on each of the optical fibers 2, 3, and 4 is reflected on the surface 15 of the first fiber array 10 facing the lens substrate 30 or the surface 25 of the second fiber array 20 facing the lens substrate 30. The reflection can be suppressed, and even if the signal light is reflected, the reflected signal light can be prevented from re-entering the lenses 41 and 42.

One end (upper surface) of the lens substrate 30 on the first fiber array 10 side and the second fiber array 2
A lens positioning guide groove 31 is formed at each end on the zero side. The lens positioning guide groove 31 extends in a direction parallel to the direction in which the substrates 10, 20, and 30 are arranged, and is used for positioning the lenses 41 and. Each of the lenses 41 and 42 is a spherical lens (a so-called ball lens), and is fixed to the lens positioning guide groove 31 by an adhesive (for example, an epoxy resin adhesive).

On one surface (upper surface) of the lens substrate 30, a substrate positioning guide groove 33 having a V-shaped cross section and extending in a direction parallel to the direction in which the substrates 10, 20, 30 are arranged.
Are the lenses 41 and 42 (the lens positioning guide groove 3).
A pair is formed so as to sandwich 1). The guide grooves 44 and 45 engage with the guide grooves 33 for substrate positioning,
This is for positioning the fiber array 10, the second fiber array 20, and the lens substrate 30.

The optical filter 43 is disposed on one surface (upper surface) of the lens substrate 30 at a position between the pair of lenses 41 and 42. The optical filter 43 transmits signal light having a predetermined wavelength among the incident signal light and reflects signal light having a wavelength other than the predetermined wavelength, and is provided with an adhesive (for example, epoxy resin) on one surface of the lens substrate 30. The optical filter is mounted on an optical filter mounting member (optical functional element mounting member) 46 fixed by an adhesive or the like, and is fixed by an adhesive (for example, an epoxy resin adhesive). Optical filter 43
Is a position where the optical coupling efficiency at the end of each optical fiber is maximized. Note that the optical filter 43 may be directly fixed to one surface of the lens substrate 30 with an adhesive without using the optical filter mounting member 46.

The guide pins 44 and 45 are made of stainless steel (SUS) and are formed in a round bar shape (outer diameter is about 0.7 mm). The guide pins 44 and 45 are
The first fiber array 10 and the second fiber array 20 are engaged with the substrate positioning guide grooves 14, 24, and 33 formed in the fiber array 10, the second fiber array 20, and the lens substrate 30. And lens substrate 3
Mutual positioning between zeros is possible. In the present embodiment, the guide pins 44, 45 are fixed to the substrate positioning guide grooves 14, 24, 33 using a thermosetting resin.

The pressing member 40 is, as shown in FIG.
The cross section is formed in a substantially U-shape. This holding member 40
Are optical fibers 2 on the first fiber array 10, the second fiber array 20, and the lens substrate 30.
The optical paths formed between the optical fibers 2 and 3 and the optical fiber 4 (the first fiber array 10 and the second fiber array 20) so as not to interrupt the optical path formed between the optical fiber 3 and the optical fiber 4. , And one surface of the lens substrate 30). The pressing member 40 is fixed with the guide pins 44 and 45 sandwiched between the pressing member 40 and the lens substrate 30 as shown in FIG. In this manner, by fixing the guide pins 44 and 45 while sandwiching them between the holding member 40 and the lens substrate 30, the positioning and adjustment between the first fiber array 10 and the second fiber array 20 and the lens substrate 30 can be performed. At this time, even if a load is applied to press the first fiber array 10 and the second fiber array 20 against the guide pins 44 and 45, the pressing member 40 regulates the warpage of the guide pins 44 and 45. The guide pins 44 and 45
Is reduced. As a result, occurrence of fiber eccentricity is prevented, and accurate positioning and adjustment of the first fiber array 10, the second fiber array 20, and the lens substrate 30 can be easily performed.

The holding member 40 includes the first fiber array 1.
0, the second fiber array 20 and the lens substrate 30 are made of the same low expansion material, and the above-mentioned Si is used. As described above, the first fiber array 10, the second fiber array 20, the lens substrate 30, and the pressing member 40 are made of the same low expansion material (Si), so that the guide pins 44 and 45 are interposed therebetween. Will have the same coefficient of thermal expansion. Thereby, the guide pins 44, 45
Irrespective of the material, warpage deformation of the guide pins 44 and 45 due to thermal deformation when the environmental temperature changes is reduced.

The portion of the holding member 40 which comes into contact with the guide pins 44 and 45 is formed in a plane as shown in FIG. The holding member 40 has a hole 40a into which the optical filter 43 can be inserted. The position of the hole 40 a of the holding member 40 is determined by the optical filter 43 of the lens substrate 30.
Corresponds to the portion provided. The substrates 10, 2
If at least one of 0, 30 and the holding member 40 is made of a transparent material, the optical fibers 2, 3 and the lens 41,
The photo-curable adhesive can be used as the fixing adhesive for 42, which is simple.

Next, the operation of the optical coupling circuit 1 configured as described above will be described. The signal light emitted from the end face of the optical fiber 2 on the side of the second fiber array 20 becomes a parallel beam having a predetermined diameter after passing through the lens 41,
The light enters the optical filter 43. Of the signal light incident on the optical filter 43, the signal light of a predetermined wavelength passes through the optical filter 43 and enters the lens 42, and the signal light incident on the lens 42 is condensed by the lens 42 and guided to the optical fiber 4. I will On the other hand, the signal light having a wavelength other than the predetermined wavelength reflected by the optical filter 43 enters the lens 41 and
The signal light incident on 1 is condensed by the lens 41 and guided to the optical fiber 3.

Next, a method of manufacturing the optical coupling circuit 1 having the above-described configuration will be described with reference to FIG. FIG. 5 is a flowchart for explaining the method for manufacturing the optical coupling circuit according to the present embodiment.

First, silicon (Si) is used as a single material.
6 (for example, about 2 mm in thickness), and the surface of this silicon semiconductor wafer 51 is
As shown in FIG.
1, a second groove 62 forming the substrate positioning guide grooves 14, 24, 33, and a third groove 63 forming the lens positioning guide groove 31. Are formed in parallel with each other by using a known dicing technique or the like (S101: first step). At this time, a plurality of (three in this embodiment) first grooves 61, a pair of second grooves 62, and a pair of third grooves are formed on the surface of the silicon semiconductor wafer 51. The grooves 63 are formed as one set, and a plurality of sets of grooves are continuously formed. According to a dicing technique or the like used in a semiconductor device manufacturing process, the processing position accuracy of each continuously formed groove becomes extremely high.

In each set, the third groove 63
Are formed on both sides of the first groove 61 with the first groove 61 interposed therebetween. In addition, the second groove 62
Are formed with the first groove 61 and the third groove 63 interposed therebetween so as to be located outside the third groove 63. As a single material, a substrate made of a low expansion material such as quartz glass or ceramics may be used in addition to the silicon semiconductor wafer 51.

The depth of the first groove 61 is set in consideration of the outer diameters of the optical fibers 2, 3, and 4 to be fixed, and is set to, for example, about 80 μm. The depth of the second groove 62 is set in consideration of the outer diameter of the guide pins 44 and 45 to be engaged, and is set to, for example, about 400 μm. The depth of the third groove 63 is set in consideration of the outer diameters of the fixed lenses 41 and 42, and is set to, for example, about 1.5 mm.

Next, the first groove 61, the second groove 62,
Then, the silicon semiconductor wafer 51 on which the third groove 63 is formed is cut along a cutting line C shown in FIG. 6, and as shown in FIG. 7, the first fiber array 10 (first
Of the second fiber array 20 (second substrate) and the portion 73 of the lens substrate 30 (third substrate) are separated (S103: No. 3). Step 2). In the present embodiment, a portion 71 forming the first fiber array 10 and a second fiber array 20 are formed for three continuous substrate portions as viewed in the direction in which the grooves 61, 62, 63 extend. The substrate portion located between the portion 72 and the portion 72 is a portion 73 constituting the lens substrate 30.

As shown in FIGS. 8 and 9, a portion 71 constituting the separated first fiber array 10 is
The first groove 61 forms the optical fiber positioning V-groove 11, and the second groove 62 forms the substrate positioning guide groove 14. Similarly, the portion 72 constituting the separated second fiber array 20 is the first fiber array 20.
The optical fiber positioning V-groove 21 is formed by the groove 61, and the substrate positioning guide groove 2 is formed by the second groove 62.
4 will be configured.

Next, the portion where the first groove 61 is formed (the hatched portion in FIG. 10) is removed from the portion 73 constituting the separated lens substrate 30 (S105: third portion). Process). In the portion 73 of the lens substrate 30, the portion where the first groove 61 located between the pair of third grooves 63 is formed is removed. Guide groove 3 for lens positioning
1 will be configured. In the present embodiment, a portion located between the second groove 62 and the third groove 63 corresponding to the outer diameter of the lenses 41 and 42 is also removed.

The portion 73 constituting the lens substrate 30
In the optical filter mounting member (optical functional element mounting member)
A portion for disposing the 46 is formed (S107: fourth step). The part where the optical filter mounting member 46 is disposed is
It is formed by removing a central portion of the portion 73 constituting the lens substrate 30 by a predetermined depth.

A portion 71 (first fiber array 10) constituting the first fiber array 10 and a portion 72 (second fiber array 2) constituting the second fiber array 20
0) and the processing of each of the parts 73 (lens substrate 30) constituting the lens substrate 30 is completed, the first optical array 10, the second optical array 20, and the corresponding optical The components (the optical fibers 2, 3, 4, the lenses 41, 42, and the optical filter mounting member 46) are mounted (S109: fifth step).

In the first fiber array 10, as shown in FIGS. 3 and 12, after the holding plate 12 is bonded to the first fiber array 10,
The optical fiber 3 is inserted into the optical fiber positioning V-groove 11, and the inserted optical fibers 2 and 3 are fixed in a state where the ends of the optical fibers 2 and 3 are sandwiched by the fixing member 13.

In the second fiber array 20, as shown in FIG. 3, after the pressing plate 22 is adhered to the second fiber array 20, the optical fiber 4 is inserted into the V-groove 21 for positioning the optical fiber. Then, the end of the inserted optical fiber 4 is fixed in a state where it is sandwiched by the fixing member 23.

FIGS. 3 and 1 show the lens substrate 30.
As shown in FIG. 3, the lenses 41 and 42 are fixed to the lens positioning guide grooves 31 and the optical filter mounting member 46 is fixed at a position between the lenses 41 and 42.

Next, using the guide pins, the guide pins are inserted into the guide grooves 1 for positioning the substrate of the first fiber array 10.
4. The first fiber array 10, the second fiber array 20, and the second fiber array 20 are engaged with the substrate positioning guide groove 24 of the second fiber array 20 and the substrate positioning guide groove 33 of the lens substrate 30, respectively. And the lens substrate 30 to form the optical coupling circuit 1 (S1).
11: sixth step). At this time, the first fiber array 10 and the second fiber array 2 constituting the optical coupling circuit 1
0, and the first groove 61, the second groove 62, and the third groove 6 located on the same row as the lens substrate 30.
Portion 7 of First Fiber Array 10 Having 3
1 (the first fiber array 10) and the portion 72 (the second fiber array 2) constituting the second fiber array 20
0) and a portion 72 (lens substrate 30) constituting the lens substrate 30 are selected.

Thereafter, adjustments regarding the focal positions of the lenses 41 and 42 (position adjustments in the optical axis direction of the optical fibers 2, 3, and 4 of the first fiber array 10 and the second fiber array 20) are performed. A first fiber array 10,
The second fiber array 20, the lens substrate 30, and the holding member 40 are fixed. Then, after the optical filter 43 is inserted from the hole 40a of the holding member 40 to adjust the position, the optical filter 43 is fixed to the optical filter mounting member 46, and the optical coupling circuit 1 is fixed.
To complete.

As described above, in this embodiment, in the first step (S101), the first groove 61 forming the optical fiber positioning V-grooves 11 and 21 and the substrate are formed on the surface of the silicon semiconductor wafer 51. Positioning guide grooves 14, 2
The second groove 62 constituting the lens grooves 4 and 33 and the third groove 63 constituting the lens positioning guide groove 31 are formed in parallel with each other. Then, in the second step (S103), the silicon semiconductor wafer 51 on which the first groove 61, the second groove 62, and the third groove 63 are formed is cut, and the first fiber array is formed. Portion 71 of 10
And the part 72 forming the second fiber array 20 and the part 73 forming the lens substrate 30 are separated, and in the third step (S105), the separated lens substrate 3
The portion where the first groove 61 is formed is removed from the portion constituting 0. As described above, since the first groove 61, the second groove 62, and the third groove 63 are processed and formed in the same process, the first fiber array 10 and the second fiber array 20 are formed. And the lens substrate 30 can be positioned with high accuracy. When the first fiber array 10, the second fiber array 20, and the lens substrate 30 are positioned by the guide pins 44, 45, the optical axes of the optical fibers 2, 3, 4 and the lenses 41, 42 The optical axis is substantially aligned with the optical axis,
There is no need to perform alignment work between the optical axes 3 and 4 and the optical axes of the lenses 41 and 42. As a result, the number of steps for assembling the optical coupling circuit 1 can be reduced.

In the present embodiment, the portion 71 constituting the separated first fiber array 10 and the second
The first groove 61, the second groove 62, and the second groove 62, which are located on the same row, for the portion 72 configuring the fiber array 20 and the portion 73 configuring the lens substrate 30, respectively.
And the one having the third groove 63 are selected to constitute the optical coupling circuit 1, so that each of the first groove 61, the second groove 62, and the third groove 63 is The optical coupling circuit 1 can be composed of the first fiber array 10, the second fiber array 20, and the lens substrate 30, which have the same position and shape. As a result, the positioning accuracy of the first fiber array 10, the second fiber array 20, and the lens substrate 30 can be further improved. Further, the first fiber array 10 and the second fiber array 2 are guided by the guide pins 44 and 45.
0 and the lens substrate 30 are positioned,
The optical axes of the optical fibers 2, 3, 4 and the optical axes of the lenses 41, 42 can be more reliably aligned.

The present invention is not limited to the above-described embodiment, but includes the number of optical fibers 2, 3, and 4 fixed to the first fiber array 10 and the second fiber array 20, 20, 30 shapes and materials, each groove 6
The numbers of 1, 62, and 63 are not limited to those described above. Also, the optical functional element used is the optical filter 4.
For example, an optical isolator may be used instead of three. Further, the lenses 41, 4 used
The lens 2 is not limited to a spherical lens, and a columnar lens such as a gradient index lens may be used.

In the present embodiment, the portion 71 forming the first fiber array 10, the portion 72 forming the second fiber array 20, and the portion 73 forming the lens substrate 30 have the same shape. Although the interval of the cutting line C is set so as to be as described above, it is not limited thereto.
It can be set appropriately.

In the present embodiment, each groove 6
When viewed in the extending direction of the first fiber array 10, the portion 71 forming the first fiber array 10 and the second fiber array 2
The portion of the substrate located between the portion 72 constituting the lens substrate 30 and the portion 72 constituting the lens substrate 30 is the portion 73 constituting the lens substrate 30, but is not limited thereto. For example, a substrate portion located between the portion 73 forming the lens substrate 30 and the portion 72 forming the second fiber array 20 is referred to as a portion 71 forming the first fiber array 10, or the lens substrate 30 73 and the first fiber array 1
The substrate portion located between the portion 71 and the portion 71 constituting the second
May be used as the portion 72 constituting the fiber array 20 of the first embodiment.
0, a portion 72 of the second fiber array 20, and a portion 7 of the lens substrate 30.
Any one of the substrate portions 3 can be freely selected as appropriate.

In the present embodiment, the portion 71 constituting the separated first fiber array 10 and the second
The first groove 61, the second groove 62, and the second groove 62, which are located on the same row, for the portion 72 configuring the fiber array 20 and the portion 73 configuring the lens substrate 30, respectively.
The optical coupling circuit 1 is configured by selecting the optical coupling circuit 1 having the third groove 63, but is not limited thereto.
The processing position accuracy of each groove 61, 62, 63 formed by a dicing technique or the like used in a semiconductor device manufacturing process is extremely high. Thus, the first fiber array 61, the second groove 62, and the third groove 63 that are not located on the same row constitute the first fiber array 10 that is not located on the same row. Portion 71, second fiber array 2
Alternatively, the optical coupling circuit 1 may be configured by selecting the portion 72 that configures 0 and the lens substrate 30.

In the embodiment, an optical filter is used as the optical functional element of the present invention, and the optical coupling circuit 1 is a 2 × 1 WDM.
The filter is configured, but without being limited to this,
The present invention can be applied to various optical devices. For example, by using an optical isolator, an optical coupler, and a grating as the optical functional element, it is possible to form an optical component having a branching function according to the wavelength.

[0046]

As described above in detail, according to the present invention, it is possible to reduce the alignment work between the optical axis of the optical fiber and the optical axis of the lens, and to reduce the number of assembling steps. A method for manufacturing a coupling circuit can be provided.

[Brief description of the drawings]

FIG. 1 is a side view showing an optical coupling circuit according to an embodiment of the present invention.

FIG. 2 is a plan view showing an optical coupling circuit according to the embodiment of the present invention.

FIG. 3 shows an optical coupling circuit according to an embodiment of the present invention.
It is a perspective view showing the state where a presser member was removed.

FIG. 4 is a perspective view showing a pressing member included in the optical coupling circuit according to the embodiment of the present invention.

FIG. 5 is a flowchart illustrating a method for manufacturing an optical coupling circuit according to an embodiment of the present invention.

FIG. 6 is a plan view showing a state where first to third grooves are formed.

FIG. 7 shows a portion forming a first fiber array (first substrate), a portion forming a second fiber array (second substrate), and a portion forming a lens substrate (third substrate). FIG. 4 is a plan view showing a state in which is cut and separated.

FIG. 8 is a front view showing a portion constituting a first fiber array (first substrate).

FIG. 9 is a plan view showing a portion constituting a first fiber array (first substrate).

FIG. 10 is a front view showing a portion constituting a lens substrate (third substrate).

FIG. 11 is a plan view showing a portion constituting a lens substrate (third substrate).

FIG. 12 is a front view showing a first fiber array (first substrate) with an optical fiber placed thereon.

FIG. 13 is a front view showing a lens substrate (third substrate) on which a lens is mounted.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Optical coupling circuit, 2, 3, 4 ... Optical fiber, 10 ... 1st
Fiber array (first substrate), 11 ... V-groove for positioning optical fiber (Guide groove for positioning optical fiber), 14
... Guide grooves for substrate positioning, 20 ... Second fiber array (second substrate), 21 ... V grooves for optical fiber positioning (guide grooves for optical fiber positioning), 24 ... Guide grooves for substrate positioning, 30 ... Lens substrate (Third substrate), 31
... Lens positioning guide groove, 33 ... Substrate positioning guide groove, 41,42 ... Lens, 43 ... Optical filter (optical functional element), 44,45 ... Guide pin, 51 ... Silicon semiconductor wafer, 61 ... First groove , 62 ... second groove,
63: a third groove, 71: a part of a first fiber array, 72: a part of a second fiber array, 73: a part of a lens substrate, C: cutting line.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomomi Sano 1 Taya-machi, Sakae-ku, Yokohama-shi, Kanagawa Prefecture Sumitomo Electric Industries, Ltd. Yokohama Works (72) Inventor Mitsuaki Tamura 1-Taga-cho, Sakae-ku, Yokohama-shi, Kanagawa Sumitomo F-term (reference) in Yokohama, Ltd. 2H037 BA32 CA14 DA04 DA05 DA06 DA11 DA17

Claims (2)

[Claims] 1. A first substrate to which an end of one optical fiber is fixed, and a second substrate to which an end of another optical fiber is fixed.
And a third substrate provided between the first substrate and the second substrate, wherein the third substrate has a structure in which the one optical fiber is connected to the other optical fiber. A method for manufacturing an optical coupling circuit in which a lens, an optical functional element, and another lens corresponding to the lens are disposed in the order in which the optical fibers are disposed. A first groove forming an optical fiber positioning guide groove for positioning the portion, and a guide pin engaged with the first groove to position the first substrate, the second substrate, and the third substrate. A first step of forming a second groove forming a substrate positioning guide groove and a third groove forming a lens positioning guide groove for positioning the lens in parallel with each other; A first groove, the second groove, and the third groove; A second material that cuts the single material on which the stripe is formed, and separates a portion forming the first substrate, a portion forming the second substrate, and a portion forming the third substrate; A method of manufacturing an optical coupling circuit, comprising: a step of removing a portion in which the first groove is formed from a portion of the separated third substrate. 2. The separated part of the first substrate, the part of the second substrate, and the part of the third substrate, which are located on the same column. The optical coupling circuit according to claim 1, wherein the optical coupling circuit is configured by selecting one having the first groove, the second groove, and the third groove. Manufacturing method.