JP2002286752A - Probe instrument and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe instrument capable of removing the difficulty in arrangement or fixing to a probe holder and conducting stable electric measurement even with a microelectrode. SOLUTION: This probe instrument 12 for measuring electric characteristics in contact with an electrode of an electronic component is equipped with two probes 13, 14 having measuring terminals 2a, 2b; and a probe base part 15 for supporting the end part of the probe on the opposite side to the measuring terminal. Two probes 13, 14 are electrically insulated each other and assembled to the probe base part, and the measuring terminals 2a, 2b are bundled and deflected outward.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe instrument for measuring electrical characteristics of electronic components and a method of manufacturing the same, and more particularly, to a method for measuring multiple electronic components by a four-terminal method. The present invention relates to a probe instrument used for electrical measurement requiring a probe, and a method of manufacturing the same.

[0002]

2. Description of the Related Art A conventional probe 100 has a probe shaft 101 as shown in FIG. 5 showing a front view, FIG. 6 showing an enlarged view of a measuring terminal, and FIG. Has a measuring terminal 102 at its tip. An end of the probe shaft 101 opposite to the measurement terminal 102 is supported by a slit sleeve 105, and a barrel 104 is provided.
Is screwed into an inner screw of the slit sleeve 105 to form a probe base. The probe shaft 101 is urged or deflected outward by a coil spring (not shown) disposed in the barrel 104, whereby a required contact pressure between the measurement terminal 102 and the electrode 10 of the electronic component 9 is obtained. The position of the measuring terminal 102 can be adjusted by changing the screwing amount of the adjusting screw of the barrel 104.
A locking ring 106 is fitted around the outer periphery of the slit sleeve 105, and the slit sleeve 105 is fixed to a probe holder (not shown).

[0003]

When the electrical characteristics of the electronic component 9 are measured by the four-terminal method using the probe 100, it is necessary to use two probes 100 for one electrode 10 of the electronic component 9. is there. And two probes 10
The measurement terminals 102a and 102b are arranged so that the measurement terminals 102a and 102b do not contact each other.
0 must be touched. Therefore, in order to use the probe 100 to measure the electrical characteristics of multiple electronic components, for example, eight electronic components, eight units × two poles × two units =
Since 32 probes 100 are required, it is difficult to arrange and fix the probes 100 to the probe holder.

In addition, as shown in FIG. 7, when two probes 100 are arranged so that the measurement terminals 102a and 102b do not come into contact with each other and try to contact the minute electrode 10, the measurement terminals 102a and 102b May protrude from the electrode 10, making it impossible to measure stable electrical characteristics.

[0005] The present invention has been made in view of the above, and an object of the present invention is to eliminate the difficulty of arrangement and fixation to a probe holder, and to enable stable electrical measurement even with minute electrodes. It is to provide a probe instrument and a method of manufacturing the same.

[0006]

The present invention has the following configuration in order to solve the above-mentioned problems. The gist of the invention according to claim 1 is a probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, wherein two probes each having a measurement terminal and a probe on the opposite side to the measurement terminal are provided. A probe base for supporting an end of the probe, wherein the two probes are incorporated into the probe base while electrically insulating each other, and the measuring terminal is biased outward. Probe instrument, characterized in that it is formed as described above. The gist of the invention described in claim 2 is that the measuring terminal of each probe is formed such that a cross-sectional shape perpendicular to the axis of the probe has a semicircle composed of a straight line and a semicircular arc. Item 1 is a probe instrument according to Item 1. The gist of the invention according to claim 3 resides in the probe instrument according to claim 1 or 2, wherein the two probes have an insulating coating on portions facing each other. The gist of the invention according to claim 4 resides in the probe instrument according to any one of claims 1 to 3, wherein the two probes are slidably bundled with each other. . The gist of the invention according to claim 5 is that the two probes have a probe shaft connected to the measuring terminal, and the probe shaft has an insulating coating. In the probe instrument. The gist of the invention according to claim 6 is a method of manufacturing a probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, wherein two probes each having a measurement terminal are electrically connected to each other. The measuring terminals are slidably bundled in an electrically insulated manner, and the measuring terminals are incorporated in a probe base so as to be deflected outward. The gist of the invention according to claim 7 is a method of manufacturing a probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, wherein the measuring terminals of two probes each having a measuring terminal are connected. The cross-sectional shape perpendicular to the axis of the probe is formed so as to present a semicircle composed of a straight line and a semicircular arc, and the measurement terminals of the two probes are opposed to each other in a straight line portion of the measurement terminal in the cross section. And the two probes are electrically insulated from each other and the measurement terminals are slidably bundled together, and the two probes are biased outward. Is incorporated in the probe base.

[0007]

FIG. 1 is a front view, FIG. 2 is a cross-sectional view, FIG. 3 is an enlarged view of a measuring terminal, and FIG. 4 will be described. Since the electronic component 9 and the electrode 10 in FIG. 4 are substantially the same as those shown in FIG. 7, the same reference numerals are used.

A probe meter 12 for measuring an electrical characteristic by contacting an electrode 10 of an electronic component 9 has two probes 13 and 14 having measurement terminals 2a and 2b, respectively, and opposite to the measurement terminals 2a and 2b. And a probe base 15 for supporting the ends of the probes 13 and 14 on the side.

Each of the probes 13, 14 has a probe shaft 1a, 1b and a measuring terminal 2a, 2b at the tip of the probe shaft 1a, 1b. Two probes 1
The probe bases 1 and 3 are electrically insulated from each other, and
5, and each of the measuring terminals 2a and 2b is formed so as to be deflected outward.

Each of the probes 13 and 14 is a conventional probe 1
Similar to 00, it can be made of a conductive material. The end of the probe shaft 1a on the opposite side of the measurement terminal 2a of the probe 13 is inserted into the slit sleeve 5 and disposed in the barrel 4 in the figure where the upper insulating bush 8a, the coil spring 6, and the lower It penetrates through the insulating bush 8b.
Similarly, the end of the probe shaft 1b opposite to the measuring terminal 2b of the probe 14 is inserted into the slit sleeve 5, and the upper insulating bush 8a, the coil spring 6, It penetrates through the lower insulating bush 8b. Then, the barrel 4 is screwed into the slit sleeve 5. Probe shaft 1 of each probe 13 and 14
Each of a and 1b has a plunger 7 which penetrates the probe shafts 1a and 1b and is fixed between the insulating bush 8a and the coil spring 6. As a result, when the barrel 4 is screwed into the slit sleeve 5 and incorporated, the plunger 7
Are deflected upward in FIG. 2 by receiving the spring force of the coil spring 6, and as a result, the measuring terminals 2a and 2b are deflected outward. In this case, two measurement terminals 2a, 2
Since b receives the spring force of the coil spring 6 individually, it can move individually against the spring force of the coil spring 6.

In the probe meter 12, the probe base 15
The slit sleeve 5 and the barrel 4 which form the above-mentioned are common parts to the two probes 13 and 14. On the other hand, the insulating bush 8a, the plunger 7, the coil spring 6, and the insulating bush 8b are provided for each of the probes 13 and 14. Therefore, compared to the conventional probe 100 shown in FIG. 5, the two probes 13 and 14 can be arranged efficiently and can be electrically insulated from each other.

In the embodiment shown, the measuring terminals 2a, 2a of the probes 13, 14 are particularly evident from FIG.
b is formed so that the cross-sectional shape orthogonal to the axes of the probes 13 and 14 exhibits a semicircle composed of a straight line and a semicircular arc.

According to the shape of the probes 13 and 14,
The measurement terminals 2a and 2b of the probes 13 and 14 can be made thin.

It is preferable that the two probes 13 and 14 have an insulating coating on portions facing each other.

In order to keep the two probes 13 and 14 electrically insulated, the whole of each probe 13 and 14 may be covered with an insulating coating. However, if an insulating coating is applied to portions facing each other, the insulating coating has a minimum area, which is advantageous in terms of arrangement and cost.

The measuring terminals 2a and 2b of the two probes 13 and 14 are formed so that the cross-sectional shape perpendicular to the axis of the probes 13 and 14 exhibits a semicircle composed of a straight line and a semicircular arc. It is preferable that the straight portions in the cross section face each other via the insulating coating 2c.

This is the arrangement of FIG. 3 and FIG. 4. Since the cross-sectional area of the measuring terminals 2a and 2b is substantially the same as the cross-sectional area of the conventional probe 100 in both cases, it is in contact with the electrode 10 of the electronic component 9. The measured measurement terminals 2a and 2b do not protrude from the electrode 10, and stable measurement of electrical characteristics can be performed.

After the two probes 13 and 14 are supported by the probe base 15 as shown in FIG. 1, the measuring terminals 2a and 2b are bound by the joint sleeve 3 to form the probe meter 12. Bundled by the joining sleeve 3,
The measuring terminals 2a, 2b are arranged as close as possible, but their binding is such that the measuring terminals 2a, 2b can slide individually.

Probe shaft 1 of probes 13 and 14
The gaps a and 1b are large at the probe base 15 and the gaps between the measuring terminals 2a and 2b are insulative.
c, and the distance between the electrodes can be reduced. Therefore, in order to keep the probes 13 and 14 electrically insulated, the probe shafts 1a and 1a including the measuring terminals 2a and 2b are required.
In FIG. 1b, at least the contact part is insulated. FIG.
4 is suitable when two electrodes are insulated and used in such a narrow place.

The two probes 13 and 14 are individually slidably supported at the probe base 15 and bound at the measuring terminals 2a and 2b by the electrically insulated joining sleeve 3. It can slide. As a result, the two probes 13 and 14 can slide relative to each other.

When the electrode 10 of the electronic component 9 has minute irregularities, the two probes 13 and 14 are individually reduced, so that the measuring terminals 2a and 2b conform to the minute irregularities of the electrode 10 of the electronic component 9. This facilitates stable measurement.

An insulating coating can be applied to the probe shafts 1a, 1b connected to the measuring terminals 2a, 2b. This can prevent a short circuit caused by contact between the probe shafts 1a and 1b.

Referring to FIGS. 1 to 4 again, a method of manufacturing a probe meter 12 for measuring an electrical characteristic by contacting an electrode 10 of an electronic component 9 according to the present invention will be described with reference to FIGS. Probes 13, 1 having
4 are electrically insulated from each other and each measuring terminal 2
a and 2b are incorporated into the probe base 15 so as to be biased outward.

According to this method, two probes 13,
14 are electrically insulated and the measuring terminals 2a and 2b of the probes 13 and 14 are biased outward, so that even if the electrode 10 of the electronic component 9 has minute irregularities,
Since a and 2b are individually reduced and adapted to minute irregularities, the probe instrument 12 capable of performing stable measurement is obtained.

Another method of fabricating a probe instrument 12 for measuring an electrical property by contacting an electrode 10 of an electronic component 9 is as follows.
The inside 1aa of each of the measurement terminals 2a and 2b of the two probes 13 and 14 having the measurement terminals 2a and 2b, respectively, is replaced with a semicircle having a cross section orthogonal to the axis of the probes 13 and 14 consisting of a straight line and a semicircle. Forming to present, 2
The measurement terminals 2a and 2b of the probes 13 and 14 are arranged so that the linear portions of the measurement terminals 2a and 2b in the cross section face each other, and the two probes 13 and 1
4 are electrically insulated from each other and each measuring terminal 2a, 2
b so that the probe b is deflected outward.
3 and 14 into the probe base 15.

According to this method, since the inside 1aa of the measuring terminals 2a and 2b is polished to have a semicircular shape, accurate
The probe instrument 12 having the measurement terminals 2a and 2b having a small cross-sectional area is obtained. The probe meter 12 is particularly suitable for measuring multiple electronic components.

In the above embodiment, as shown in FIG. 3, the measuring terminals 2a and 2b are tapered toward the tip.
By doing so, the contact area of the electronic component 9 with the electrode 10 is reduced, so that the risk that the measuring terminals 2a, 2b protrude from the electrode is reduced, but the measuring terminals 2a, 2b are limited to such a shape. Not something. Further, the structure of the slit sleeve 5 and the barrel 4 is such that the two probes 13, 1
4 may be used as long as it can accommodate 4 in common.

When the probe instrument 12 is used, after the slit sleeve 5 is fixed, the screw of the barrel 4 is rotated to set the axial position of the measuring terminals 2a and 2b at the tips of the probes 13 and 14. The locking ring 16 prevents the barrel 4 from loosening from the slit sleeve 5 due to vibration or the like.

[0029]

According to the present invention, the two probes are supported by the probe base composed of the common slit sleeve and the barrel, so that the number of probe bases can be reduced to half as compared with the conventional probe. As a result, it is possible to eliminate the difficulty in arranging and fixing the probe holder. Further, according to the invention in which the probe has a semicircular measuring terminal, stable electric measurement can be performed even with a minute electrode.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a probe instrument according to the present invention.

FIG. 2 is a cross-sectional view showing a state where a joining sleeve of FIG. 1 is omitted.

FIG. 3 is an enlarged front view of a measurement terminal.

FIG. 4 is an enlarged plan view showing a use state.

FIG. 5 is a front view showing a conventional probe.

FIG. 6 is an enlarged front view of a measurement terminal.

FIG. 7 is an enlarged plan view showing a use state.

[Description of Signs] 1a, 1b Probe shaft 1aa Inside 2a, 2b Measurement terminal 2c Insulating coating 3 Joining sleeve 4 Barrel 5 Slot sleeve 6 Coil spring 7 Plunger 8a, 8b Insulating bush 9 Electronic component 10 Electrode 12 Probe meter 13, 14 Probe 15 Probe base 16 Lock ring 100 Probe 101 Probe shaft 102, 102a, 102b Measurement terminal 104 Barrel 105 Slot sleeve 106 Lock ring

Claims (7)

[Claims] 1. A probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, comprising: two probes each having a measurement terminal; and an end of the probe opposite to the measurement terminal. A probe base for supporting the probe, wherein the two probes are incorporated in the probe base while electrically insulating each other from each other, and are formed such that the measuring terminals are biased outward. A probe instrument, characterized in that: 2. The measuring terminal according to claim 1, wherein the measuring terminal of each probe is formed so that a cross-sectional shape orthogonal to an axis of the probe exhibits a semicircle composed of a straight line and a semicircular arc. Probe instrument. 3. The probe instrument according to claim 1, wherein the two probes have an insulating coating on portions facing each other. 4. The probe instrument according to claim 1, wherein the two probes are slidably bundled with each other. 5. The probe instrument according to claim 1, wherein the two probes have a probe shaft connected to the measurement terminal, and the probe shaft has an insulating coating. . 6. A method of manufacturing a probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, wherein two probes each having a measuring terminal are electrically insulated from each other. While bundling the measurement terminals slidably, and biasing each of the measurement terminals outward,
A method of manufacturing a probe instrument, wherein the method is incorporated into a probe base. 7. A method for manufacturing a probe instrument for measuring an electrical characteristic by contacting an electrode of an electronic component, wherein each of the measuring terminals of two probes each having a measuring terminal is connected to an axis of the probe. Forming a cross section orthogonal to form a semicircle consisting of a straight line and a semicircular arc, arranging the measurement terminals of the two probes so that the linear portions of the measurement terminals in the cross section face each other,
In addition, the two probes are electrically insulated from each other, the measuring terminals are slidably bundled, and the two probes are incorporated into the probe base so that the measuring terminals are deflected outward. A method for manufacturing a probe instrument, comprising: