JP2002285360A - Chemical polishing solution - Google Patents
Chemical polishing solutionInfo
- Publication number
- JP2002285360A JP2002285360A JP2001084308A JP2001084308A JP2002285360A JP 2002285360 A JP2002285360 A JP 2002285360A JP 2001084308 A JP2001084308 A JP 2001084308A JP 2001084308 A JP2001084308 A JP 2001084308A JP 2002285360 A JP2002285360 A JP 2002285360A
- Authority
- JP
- Japan
- Prior art keywords
- chemical polishing
- polishing liquid
- mass
- parts
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
- C23F3/03—Light metals with acidic solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、アルミニウムまた
はその合金に対して化学研磨を施すための化学研磨液に
関し、詳しくは硝酸を配合することなく、アルミニウム
及びその合金の表面を平滑化すると共に充分な光沢を付
与することができる化学研磨液に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical polishing liquid for chemically polishing aluminum or an alloy thereof, and more particularly to a method for smoothing the surface of aluminum and its alloy without adding nitric acid. The present invention relates to a chemical polishing liquid capable of imparting a high gloss.
【0002】[0002]
【従来の技術】従来、アルミニウムやその合金(以下、
総称して「アルミニウム等」という場合がある)の表面
を平滑化すると共に光沢を付与するための化学研磨液と
しては、一般的にはリン酸と硝酸とが配合されたものが
用いられてきた。このような化学研磨液によるアルミニ
ウム等の化学研磨の機構は、正確には解明されていはい
ないが、硝酸によるアルミニウムの酸化作用とリン酸に
よるアルミニウムの溶解作用によって化学研磨が進行す
るものと考えられている。2. Description of the Related Art Conventionally, aluminum and its alloys (hereinafter, referred to as aluminum)
As a chemical polishing liquid for smoothing the surface of the material and sometimes giving it a gloss, a mixture of phosphoric acid and nitric acid has been generally used. . Although the mechanism of chemical polishing of aluminum or the like by such a chemical polishing liquid is not precisely elucidated, it is considered that chemical polishing proceeds by the oxidizing action of aluminum by nitric acid and the dissolving action of aluminum by phosphoric acid. ing.
【0003】[0003]
【発明が解決しようとする課題】しかし、このような硝
酸を含む化学研磨液を用いる場合には、化学研磨の過程
において硝酸が分解して有毒な窒素酸化物が発生してし
まうものであり、またこのような硝酸の分解により液中
の硝酸濃度が減少してしまうため、化学研磨液中に硝酸
を補充して硝酸濃度を維持しなければならないものであ
った。また、アルミニウム製のファスナーの金具を布に
付けた状態で化学研磨を行うと、布の染色に用いられる
顔料が硝酸によって変色してしまう場合があった。However, when such a chemical polishing solution containing nitric acid is used, nitric acid is decomposed in the course of chemical polishing to generate toxic nitrogen oxides. In addition, since the concentration of nitric acid in the solution decreases due to such decomposition of nitric acid, the nitric acid concentration must be maintained by replenishing nitric acid in the chemical polishing solution. In addition, when chemical polishing is performed in a state where a metal fastener of aluminum is attached to a cloth, a pigment used for dyeing the cloth may be discolored by nitric acid in some cases.
【0004】このため、硝酸を含有しない化学研磨液の
開発が進められているが、このような硝酸を含有しない
化学研磨液では、アルミニウム等の表面を充分に研磨し
たり研磨面に充分な光沢を付与することはできないもの
であった。For this reason, development of a chemical polishing solution containing no nitric acid has been promoted. However, with such a chemical polishing solution containing no nitric acid, the surface of aluminum or the like is sufficiently polished or the polishing surface has a sufficient gloss. Cannot be given.
【0005】本発明は上記の点に鑑みてなされたもので
あり、硝酸を含有することなく、アルミニウムやその合
金の表面を化学研磨により平滑化すると共に化学研磨が
施された表面に充分な光沢を付与することができるアル
ミニウム又はその合金の化学研磨液を提供することを目
的とするものである。The present invention has been made in view of the above-mentioned points, and has been made to smoothen the surface of aluminum or its alloy by chemical polishing without containing nitric acid, and to impart sufficient gloss to the surface subjected to chemical polishing. It is an object of the present invention to provide a chemical polishing liquid for aluminum or an alloy thereof, which can impart the following.
【0006】[0006]
【課題を解決するための手段】本発明の請求項1に係る
化学研磨液は、アルミニウム又はその合金の化学研磨液
であって、硝酸を除く無機酸と、タングステン化合物と
を配合して成ることを特徴とするものである。The chemical polishing liquid according to claim 1 of the present invention is a chemical polishing liquid for aluminum or an alloy thereof, which is composed of an inorganic acid other than nitric acid and a tungsten compound. It is characterized by the following.
【0007】また請求項2の発明は、請求項1におい
て、無機酸として、リン酸及び硫酸を配合して成ること
を特徴とするものである。A second aspect of the present invention is characterized in that, in the first aspect, phosphoric acid and sulfuric acid are blended as the inorganic acid.
【0008】また請求項3の発明は、請求項1又は2に
おいて、銅イオンを含有して成ることを特徴とするもの
である。[0008] The invention of claim 3 is characterized in that, in claim 1 or 2, it contains copper ions.
【0009】また請求項4の発明は、請求項1乃至3の
いずれかにおいて、鉄イオンを含有して成ることを特徴
とするものである。A fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the composition contains iron ions.
【0010】また請求項5の発明は、請求項1乃至4の
いずれかにおいて、カルシウムイオン及びモリブデンイ
オンの少なくとも一方を含有して成ることを特徴とする
ものである。A fifth aspect of the present invention is characterized in that, in any one of the first to fourth aspects, at least one of a calcium ion and a molybdenum ion is contained.
【0011】また請求項6の発明は、請求項1乃至5の
いずれかにおいて、化学研磨液の総量100質量部に対
してタングステン化合物を金属タングステン換算で0.
01〜5.0質量部配合して成ることを特徴とするもの
である。According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the tungsten compound is added in an amount of 0.1 to 100 parts by mass of the total amount of the chemical polishing liquid in terms of metal tungsten.
It is characterized in that it is blended in an amount of from 0.01 to 5.0 parts by mass.
【0012】また請求項7の発明は、請求項3乃至6の
いずれかにおいて、化学研磨液の総量100質量部に対
して銅イオンを0.001〜0.1質量部配合して成る
ことを特徴とするものである。According to a seventh aspect of the present invention, in any one of the third to sixth aspects, 0.001 to 0.1 parts by mass of copper ion is blended with respect to 100 parts by mass of the total amount of the chemical polishing liquid. It is a feature.
【0013】また請求項8の発明は、請求項4乃至7の
いずれかにおいて、化学研磨液の総量100質量部に対
して鉄イオンを0.01〜0.50質量部配合して成る
ことを特徴とするものである。The invention of claim 8 is the invention according to any one of claims 4 to 7, wherein 0.01 to 0.50 parts by mass of iron ion is blended with respect to 100 parts by mass of the total amount of the chemical polishing liquid. It is a feature.
【0014】また請求項9の発明は、請求項2乃至8の
いずれかにおいて、化学研磨液の総量100質量部に対
してリン酸を70〜30質量部、硫酸を30〜70質量
部配合して成ることを特徴とするものである。According to a ninth aspect of the present invention, in any one of the second to eighth aspects, 70 to 30 parts by mass of phosphoric acid and 30 to 70 parts by mass of sulfuric acid are added to 100 parts by mass of the total amount of the chemical polishing liquid. It is characterized by comprising.
【0015】また請求項10の発明は、請求項1乃至9
のいずれかにおいて、メタリン酸ソーダを配合して成る
ことを特徴とするものである。[0015] The invention of claim 10 is the invention of claims 1 to 9
Any one of the above, wherein sodium metaphosphate is blended.
【0016】[0016]
【発明の実施の形態】以下、本発明の実施の形態を説明
する。Embodiments of the present invention will be described below.
【0017】本発明では無機酸を配合して化学研磨液を
調製するものであり、このとき硝酸は配合しないものと
する。そして更に本発明では化学研磨液中にタングステ
ン化合物を配合するものである。In the present invention, a chemical polishing liquid is prepared by blending an inorganic acid, and no nitric acid is blended at this time. Further, in the present invention, a tungsten compound is blended in the chemical polishing liquid.
【0018】タングステン化合物としては、例えばリン
タングステン酸やタングステン酸ナトリウム等を配合す
ることができ、その配合量は化学研磨液の総量100質
量部に対して、金属タングステン換算で0.01〜5.
0質量部とすることが好ましい。タングステン化合物の
配合量がこの範囲に満たないと、アルミニウム等の表面
に充分な光沢を付与することが困難となり、一方、配合
量がこの範囲を超えると化学研磨液中にタングステン化
合物の一部が溶解せずに沈殿する場合がある。As the tungsten compound, for example, phosphotungstic acid, sodium tungstate, or the like can be compounded, and the compounding amount is 0.01 to 5.0 in terms of metal tungsten, based on 100 parts by mass of the total amount of the chemical polishing liquid.
It is preferably 0 parts by mass. If the amount of the tungsten compound is less than this range, it is difficult to impart sufficient gloss to the surface of aluminum or the like, while if the amount of the tungsten compound exceeds this range, a part of the tungsten compound may be contained in the chemical polishing liquid. May precipitate without dissolving.
【0019】また、アルミニウムやその合金に対して更
なる光沢を付与するためには、化学研磨液に銅イオンを
配合させることが好ましい。このときは例えば化学研磨
液に硫酸銅を配合することにより、化学研磨液中に銅イ
オンを配合することができる。銅イオンの配合量は、化
学研磨液の総量100質量部に対して、金属銅換算で
0.001〜0.1質量部とすることが好ましい。銅イ
オンの配合量がこの範囲に満たないと、アルミニウム等
の表面の光沢を向上する効果が充分に得られず、一方、
配合量がこの範囲を超えると化学研磨処理後のアルミニ
ウム等の表面に黒色の析出が生じるおそれがある。Further, in order to impart further gloss to aluminum and its alloys, it is preferable to mix copper ions in the chemical polishing liquid. At this time, for example, copper sulfate can be compounded in the chemical polishing liquid by mixing copper sulfate in the chemical polishing liquid. It is preferable that the compounding amount of the copper ion is 0.001 to 0.1 parts by mass in terms of metallic copper based on 100 parts by mass of the total amount of the chemical polishing liquid. If the amount of the copper ion is less than this range, the effect of improving the gloss of the surface of aluminum or the like cannot be sufficiently obtained.
If the compounding amount exceeds this range, black precipitation may occur on the surface of aluminum or the like after the chemical polishing treatment.
【0020】また、アルミニウム等の表面に均一な光沢
を付与するためには、化学研磨液中に鉄イオンを配合す
ることが好ましい。このときは例えば化学研磨液に硫酸
第一鉄、硫酸第二鉄、リン酸鉄等を配合することによ
り、化学研磨液中に鉄イオンを配合することができる。
このとき鉄イオンとしては、特に3価の鉄イオンを用い
ると酸化力が向上し、光沢の均一性を更に向上すること
ができる。鉄イオンの配合量は、化学研磨液の総量10
0質量部に対して、金属鉄換算で0.01〜0.50質
量部とすることが好ましく、鉄イオンの配合量がこの範
囲に満たない場合や、配合量がこの範囲を超える場合に
は、アルミニウム等の表面の光沢にむらが生じるおそれ
がある。In order to impart uniform gloss to the surface of aluminum or the like, it is preferable to mix iron ions in the chemical polishing liquid. In this case, for example, by mixing ferrous sulfate, ferric sulfate, iron phosphate, and the like in the chemical polishing liquid, iron ions can be mixed in the chemical polishing liquid.
At this time, when a trivalent iron ion is used as the iron ion, the oxidizing power is improved, and the uniformity of gloss can be further improved. The compounding amount of iron ion is 10
With respect to 0 parts by mass, it is preferable to be 0.01 to 0.50 parts by mass in terms of metallic iron, and when the compounding amount of iron ions is less than this range or when the compounding amount exceeds this range. There is a possibility that the surface gloss of aluminum or the like becomes uneven.
【0021】更に、化学研磨液中には、他の種々の金属
イオンを配合することもできる。例えばカルシウムイオ
ンやモリブデンイオンを含有させると、化学研磨後のア
ルミニウム等の表面の更なる平滑化や光沢付与を達成す
ることができる。また、他にクロムイオン、ニッケルイ
オン、ナトリウムイオン等のような種々の金属イオンを
配合することもできるものであり、例えばナトリウムイ
オンはタングステン化合物としてタングステン酸ナトリ
ウムを配合する場合に必然的に配合される。Further, various other metal ions can be blended in the chemical polishing liquid. For example, when calcium ions or molybdenum ions are contained, the surface of aluminum or the like after chemical polishing can be further smoothed or glossed. In addition, various metal ions such as chromium ion, nickel ion, sodium ion and the like can also be blended. For example, sodium ion is inevitably blended when sodium tungstate is blended as a tungsten compound. You.
【0022】また、化学研磨液に配合される無機酸とし
ては、特にリン酸と硫酸とを併用することが好ましく、
このようにすると、化学研磨液は良好な研磨力を有する
と共に、連続的に研磨を行っても研磨力の持続性が高
く、また無機酸以外の上記の種々の成分を加える場合に
各成分を良好に溶解させることができる。リン酸及び硫
酸の配合量に関しては、アルミニウム等の平滑化や光沢
付与のためには、化学研磨液の総量100質量部に対し
てリン酸を70〜30質量部、硫酸を30〜70質量部
配合することが好ましい。このときリン酸及び硫酸は、
このような配合割合の範囲において、上記のタングステ
ン化合物や金属イオンの所望の配合量が確保できるよう
な、適宜の配合量で配合することができるものであり、
このようにタングステン化合物や金属イオンの配合量を
確保するためには、リン酸と硫酸の配合量の総量が、化
学研磨液の総量100質量部に対して60〜95質量部
の範囲となるようにすることが好ましい。ここで、リン
酸の配合量が上記の範囲を超える場合や硫酸の配合量が
上記の範囲に満たない場合には、研磨力の持続性が不足
したり、また研磨力が不足して充分な平滑化や光沢付与
ができなくなるおそれがあり、また逆にリン酸の配合量
が上記の範囲に満たない場合や硫酸の配合量が上記の範
囲を超える場合には、タングステン化合物等の溶解性が
低下して析出が生じたり、あるいは研磨力が過剰となっ
て研磨面が荒れてしまうことにより平滑化や光沢付与が
できなくなるおそれがある。As the inorganic acid to be added to the chemical polishing liquid, it is particularly preferable to use phosphoric acid and sulfuric acid together.
In this case, the chemical polishing liquid has a good polishing power, and the polishing power is high even when the polishing is performed continuously.When each of the above-mentioned various components other than the inorganic acid is added, the chemical polishing liquid is used. It can be dissolved well. Regarding the compounding amounts of phosphoric acid and sulfuric acid, for smoothing aluminum and the like and for imparting gloss, 70 to 30 parts by mass of phosphoric acid and 30 to 70 parts by mass of sulfuric acid with respect to 100 parts by mass of the total chemical polishing liquid. It is preferable to mix them. At this time, phosphoric acid and sulfuric acid are
In such a range of the compounding ratio, a desired compounding amount of the above-described tungsten compound or metal ion can be ensured, and the compound can be compounded in an appropriate compounding amount.
Thus, in order to ensure the compounding amount of the tungsten compound and the metal ion, the total amount of the phosphoric acid and the sulfuric acid is in the range of 60 to 95 parts by mass with respect to 100 parts by mass of the chemical polishing liquid. Is preferable. Here, when the compounding amount of the phosphoric acid exceeds the above range or the compounding amount of the sulfuric acid is less than the above range, the durability of the polishing force is insufficient, or the polishing force is insufficient. There is a risk that smoothing or glossing may not be possible, and conversely, if the compounding amount of phosphoric acid is less than the above range or if the compounding amount of sulfuric acid exceeds the above range, the solubility of the tungsten compound etc. There is a possibility that smoothing or glossing may not be possible due to a reduction in precipitation and an excessive polishing force resulting in a roughened polished surface.
【0023】また、化学研磨液中には、メタリン酸ナト
リウム等のメタリン酸塩を加えることもでき、この場合
にも化学研磨後のアルミニウム等の表面の更なる平滑化
や光沢付与を達成することができる。その理由は明確で
はないが、化学研磨液によるアルミニウム等の化学研磨
は、アルミニウム等の表面における比較的厚い表面層の
形成や、アルミニウム等の表面における金属イオンの分
布が関与していると考えられているため、メタリン酸塩
によって表面層の形成が促進されると共に、メタリン酸
に対して金属イオンがキレート結合することによりアル
ミニウム等の表面に金属イオンが分布することにより、
アルミニウム等の表面の研磨が促進されるものと思われ
る。またこのように金属イオンがキレート結合すること
により、化学研磨液中に金属イオンを配合する場合の溶
解性を向上して化学研磨液を安定化することができる。
メタリン酸塩としては、特にウルトラリン酸塩と呼ばれ
る無定型立体網目構造を有するものを用いると、更なる
平滑化や光沢付与を達成することができるものであり、
これはウルトラリン酸塩によってアルミニウム等の表面
における表面層の形成が更に促進されるためと考えられ
る。このようなメタリン酸塩(ウルトラリン酸塩)の平
均分子量は5000〜10000の範囲のものを用いる
ことが好ましい。Further, a metaphosphate such as sodium metaphosphate may be added to the chemical polishing liquid. In this case, the surface of aluminum or the like after the chemical polishing is further smoothed and gloss imparted. Can be. Although the reason is not clear, it is considered that the chemical polishing of aluminum or the like by the chemical polishing liquid involves the formation of a relatively thick surface layer on the surface of aluminum or the like and the distribution of metal ions on the surface of aluminum or the like. Because, the formation of the surface layer is promoted by the metaphosphate, and the metal ions are distributed on the surface of aluminum or the like by chelate bonding of the metal ions to metaphosphoric acid,
It is considered that polishing of the surface of aluminum or the like is promoted. In addition, by chelating the metal ions in this manner, the solubility when the metal ions are mixed in the chemical polishing liquid can be improved, and the chemical polishing liquid can be stabilized.
As the metaphosphate, especially when using a thing having an amorphous three-dimensional network structure called ultraphosphate, it is possible to achieve further smoothing and gloss imparting,
This is considered because the formation of a surface layer on the surface of aluminum or the like is further promoted by the ultraphosphate. The metaphosphate (ultraphosphate) preferably has an average molecular weight in the range of 5,000 to 10,000.
【0024】本発明に係る化学研磨液を調製するにあた
っては、上記に挙げた各成分を所定量配合し、撹拌混合
するものであり、それにより化学研磨液を得ることがで
きる。In preparing the chemical polishing liquid according to the present invention, a predetermined amount of each of the above-mentioned components is blended and agitated and mixed, whereby a chemical polishing liquid can be obtained.
【0025】このように調製される化学研磨液を用い、
この化学研磨液を加温した状態で、予め機械的研磨等が
施されると共に必要に応じて予熱されたアルミニウム等
を化学研磨液に浸漬することにより、アルミニウム等の
表面の化学研磨を行うことができる。このときの化学研
磨液の液温は、好ましくは60〜150℃とするもので
あり、化学研磨液の液温が60℃未満となると光沢を充
分に付与することが困難となり、また150℃を超える
と研磨面に荒れが生じやすくなる。特に液温を80〜1
20℃とすると、良好な研磨性を有すると共に充分な光
沢を付与することができる。また、化学研磨液への浸漬
時間はアルミニウム合金等の組成や寸法、予熱の有無、
液温等に応じて適宜設定されるものであるが、好ましく
は20〜240秒間の範囲から選択されるものである。
また、アルミニウム等の化学研磨液への浸漬時間を20
秒程度の短時間とすると共に、このアルミニウム等を化
学研磨液に適宜複数回浸漬すると、研磨面に特に優れた
光沢が得られる。Using the thus prepared chemical polishing liquid,
In a state where the chemical polishing liquid is heated, the surface of aluminum or the like is chemically polished by pre-mechanical polishing or the like and immersing preheated aluminum or the like in the chemical polishing liquid as necessary. Can be. The liquid temperature of the chemical polishing liquid at this time is preferably 60 to 150 ° C., and if the liquid temperature of the chemical polishing liquid is lower than 60 ° C., it becomes difficult to sufficiently impart gloss. If it exceeds, roughening tends to occur on the polished surface. Especially, the liquid temperature is 80 ~ 1
When the temperature is set to 20 ° C., it is possible to have good polishing properties and to impart sufficient gloss. The immersion time in the chemical polishing liquid depends on the composition and dimensions of the aluminum alloy, etc., whether or not there is preheating,
Although it is appropriately set according to the liquid temperature or the like, it is preferably selected from the range of 20 to 240 seconds.
Further, the immersion time in a chemical polishing liquid such as aluminum is set to 20.
When the aluminum or the like is immersed in a chemical polishing solution a plurality of times as appropriate as well as in a short time of about two seconds, particularly excellent gloss is obtained on the polished surface.
【0026】このように本発明の化学研磨液にてアルミ
ニウム等の化学研磨を行うと、優れた研磨力を有して表
面の充分な平滑化を行うと共に優れた光沢を付与するこ
とができるものであり、しかも液中には硝酸が配合され
ていないことから化学研磨の過程において硝酸の分解に
より有害な窒素酸化物が発生するようなことがなく、ま
た硝酸濃度を維持するために硝酸を液中に追加するよう
な必要もないものである。また、硝酸を用いていないた
めに、顔料を変色させるようなことがなく、例えばファ
スナーの金具を布に付いた状態で化学研磨する場合で
も、染色された布が変色するようなことがないものであ
る。As described above, when chemical polishing of aluminum or the like is performed with the chemical polishing liquid of the present invention, a material having excellent polishing power, capable of sufficiently smoothing the surface and providing excellent gloss can be provided. In addition, since nitric acid is not included in the solution, no harmful nitrogen oxides are generated by the decomposition of nitric acid during the chemical polishing process, and nitric acid is added to maintain the nitric acid concentration. There is no need to add them inside. In addition, since nitric acid is not used, the pigment does not discolor, and, for example, even when the fastener is attached to the cloth and chemically polished, the dyed cloth does not discolor. It is.
【0027】[0027]
【実施例】以下、本発明を実施例によって詳述する。The present invention will be described below in detail with reference to examples.
【0028】(実施例1〜23及び比較例)原料として
は、硫酸水溶液、リン酸水溶液、リン酸鉄水溶液、硫酸
銅、リンタングステン酸、硫酸カルシウム、モリブデン
酸アンモニウム、メタリン酸ナトリウム(ウルトラリン
酸ナトリウム;平均分子量7000)及び水を用い、所
定量の原料を配合混合して、下記表1,2に示すような
組成を有する化学研磨液を調製した。表中の配合量は化
学研磨液100質量部に対するものである。ここで、硫
酸銅及びリンタングステン酸は、水中に溶解させて水溶
液とした後、他の原料と混合した。Examples 1 to 23 and Comparative Examples As raw materials, aqueous sulfuric acid, aqueous phosphoric acid, aqueous iron phosphate, copper sulfate, phosphotungstic acid, calcium sulfate, ammonium molybdate, sodium metaphosphate (ultraphosphate Sodium; average molecular weight 7000) and water were used, and predetermined amounts of raw materials were mixed and mixed to prepare a chemical polishing liquid having a composition as shown in Tables 1 and 2 below. The compounding amounts in the table are based on 100 parts by mass of the chemical polishing liquid. Here, copper sulfate and phosphotungstic acid were dissolved in water to form an aqueous solution, and then mixed with other raw materials.
【0029】(研磨性評価試験)各実施例及び比較例の
化学研磨液中に、JIS規格で規定されるA1070、
A1050、A6063の各アルミニウム合金材からな
る試験片を浸漬して化学研磨を行った。このとき試験片
としては50mm×70mm×1mmの寸法を有するも
のを用い、この試験片を100℃に保持した500gの
化学研磨液中に60秒間浸漬するものとした。(Abrasiveness evaluation test) In the chemical polishing liquids of the respective examples and comparative examples, A1070 specified by JIS standards,
A test piece made of each of the aluminum alloy materials A1050 and A6063 was immersed and subjected to chemical polishing. At this time, a test piece having a size of 50 mm × 70 mm × 1 mm was used, and this test piece was immersed in 500 g of a chemical polishing liquid maintained at 100 ° C. for 60 seconds.
【0030】そして、化学研磨後の試験片につき、次の
ような評価を行った。The test pieces after the chemical polishing were evaluated as follows.
【0031】・研磨力評価 化学研磨後の試験片の重量を試験前の重量と比較し、次
の評価基準にて評価を行った。 ◎:重量減少率2%以上 ○:重量減少率1%以上2%未満 △:重量減少率0.1%以上1%未満 ×:重量減少率0.1%未満 ・光沢評価 化学研磨後の試験片の表面を目視にて観察し、次の評価
基準にて評価を行った。 ◎:優れた光沢を有する ○:良好な光沢を有する △:光沢がやや弱い ×:光沢が不充分 ・光沢ムラ評価 化学研磨後の試験片の表面に生じた斑点の個数を計数し
て、次の評価基準にて評価を行った。 ◎:斑点数0個 ○:斑点数1〜5個 △:斑点数6〜19個 ×:斑点数20個以上 以上の結果を表1,2に示す。Evaluation of polishing power The weight of the test piece after chemical polishing was compared with the weight before the test, and the evaluation was made according to the following evaluation criteria. :: Weight reduction rate of 2% or more ○: Weight reduction rate of 1% to less than 2% △: Weight reduction rate of 0.1% to less than 1% ×: Weight reduction rate of less than 0.1% ・ Gloss evaluation Test after chemical polishing The surface of the piece was visually observed and evaluated according to the following evaluation criteria. :: Excellent gloss ○: Good gloss △: Slightly weak ×: Insufficient gloss ・ Evaluation of gloss unevenness The number of spots generated on the surface of the test piece after chemical polishing was counted, and The evaluation was performed according to the following evaluation criteria. ◎: 0 spots ○: 1 to 5 spots Δ: 6 to 19 spots ×: 20 or more spots The above results are shown in Tables 1 and 2.
【0032】[0032]
【表1】 [Table 1]
【0033】[0033]
【表2】 [Table 2]
【0034】この結果から明らかなように、硫酸、リン
酸に加えてタングステン化合物を含む実施例1〜23で
は、タングステン化合物を含まない比較例と比べて、高
い研磨性を有し、また研磨後の試験片の光沢が向上して
いるものであった。As is clear from the results, Examples 1 to 23 containing a tungsten compound in addition to sulfuric acid and phosphoric acid have higher polishing properties than the comparative example containing no tungsten compound, and The test piece had an improved gloss.
【0035】また、リン酸と硫酸の配合量を固定して鉄
イオン、銅イオン及びタングステン化合物の配合量を変
動させた実施例1〜15では、タングステン化合物の配
合量が多い実施例12では化学研磨液中にタングステン
化合物が一部溶解せずに残存するものであり、またこの
配合量が少ない実施例11では若干光沢が低下するもの
であった。また鉄イオンの配合量が多い実施例10や、
逆に鉄イオンの配合量が少ない実施例9では、光沢に若
干のムラが発生するものであった。また、銅イオンの配
合量が少ない実施例13では光沢が若干低下するもので
あり、またこの配合量が多い実施例14では優れた光沢
は得られるものの、試験片の表面にわずかに黒色の析出
が生じた。In Examples 1 to 15 in which the compounding amounts of phosphoric acid and sulfuric acid were fixed and the compounding amounts of iron ion, copper ion and tungsten compound were varied, in Example 12 in which the compounding amount of the tungsten compound was large, Part of the tungsten compound remained without being dissolved in the polishing liquid, and in Example 11, where the blending amount was small, the gloss was slightly lowered. Example 10 with a large amount of iron ions,
Conversely, in Example 9 in which the amount of iron ions was small, slight unevenness was generated in gloss. In Example 13 in which the amount of copper ions was small, the gloss was slightly reduced. In Example 14 in which the amount of copper ions was large, excellent gloss was obtained, but a slight black deposit was observed on the surface of the test piece. Occurred.
【0036】また、硫酸とリン酸の配合量を変動させた
実施例15〜19では、硫酸の配合量が多いと共にリン
酸の配合量が少ない実施例19では研磨力は高いもの
の、光沢がやや劣り、またタングステン化合物が一部溶
解せずに残存するものであり、一方、硫酸の配合量が多
いと共にリン酸の配合量が多い実施例18では研磨力が
やや劣り、光沢も若干低下した。Further, in Examples 15 to 19 in which the amounts of sulfuric acid and phosphoric acid were varied, in Example 19 in which the amount of sulfuric acid was large and the amount of phosphoric acid was small, the polishing power was high, but the gloss was slightly high. In addition, the tungsten compound was partially insoluble and remained without being dissolved. On the other hand, in Example 18 in which the amount of sulfuric acid was large and the amount of phosphoric acid was large, the polishing power was slightly inferior and the gloss was slightly lowered.
【0037】更に、モリブデンイオン、カルシウムイオ
ン又はメタリン酸ソーダを配合した実施例20〜23で
は、研磨性及び光沢が更に向上すると共に、光沢にはム
ラがみられず、特に、モリブデンイオン、カルシウムイ
オン及びメタリン酸ソーダを配合した実施例23では、
研磨性及び光沢の向上と、光沢ムラの抑制とに著しい効
果がみられた。Further, in Examples 20 to 23 in which molybdenum ion, calcium ion or sodium metaphosphate was blended, the polishing properties and gloss were further improved, and the gloss was not uneven. And Example 23 in which sodium metaphosphate was blended,
A remarkable effect was observed in the improvement of the polishing properties and gloss and the suppression of uneven gloss.
【0038】(連続作業性評価試験)実施例15の化学
研磨液と、この化学研磨液に種々の濃度でアルミニウム
を溶解させた化学研磨液とを用意し、各化学研磨液にJ
IS規格で規定されるA1070及びA6063の各ア
ルミニウム合金材からなる試験片を浸漬して化学研磨を
行った。このとき試験片としてはA1070については
50mm×70mm×1mmの寸法を有するもの(9.
3〜9.4g)を、A6063については50mm×7
0mm×3mmの寸法を有するもの(27.0〜27.
2g)を、それぞれ用い、この試験片を100℃に保持
した500gの化学研磨液中に60秒間浸漬するものと
した。(Continuous workability evaluation test) The chemical polishing liquid of Example 15 and a chemical polishing liquid in which aluminum was dissolved at various concentrations in this chemical polishing liquid were prepared.
A test piece made of each of the aluminum alloy materials of A1070 and A6063 specified by the IS standard was immersed and subjected to chemical polishing. At this time, the test piece having a size of 50 mm × 70 mm × 1 mm for A1070 (9.
3 to 9.4 g), and 50 mm × 7 for A6063.
One having a size of 0 mm x 3 mm (27.0 to 27.
2 g) was used, and the test piece was immersed in 500 g of a chemical polishing solution maintained at 100 ° C. for 60 seconds.
【0039】そして、処理後の各試験片の重量を測定し
て、重量減少率、面積当たりの重量減量及び研磨厚みを
導出し、更に上記と同様の評価基準にて光沢性を評価し
た。この結果を表3に示す。The weight of each test piece after the treatment was measured to derive a weight loss rate, a weight loss per area, and a polished thickness, and the glossiness was evaluated according to the same evaluation criteria as described above. Table 3 shows the results.
【0040】[0040]
【表3】 [Table 3]
【0041】このように、化学研磨液中のアルミニウム
の溶解量が1.5質量%となるまで、化学研磨液は良好
な研磨性能を維持したものであり、化学研磨を連続的に
行うことにより化学研磨液中のアルミニウムの溶解量が
増大しても、化学研磨液中の成分を調整することなく長
時間連続的に化学研磨を行うことができることが確認さ
れた。As described above, the chemical polishing liquid maintains good polishing performance until the amount of aluminum dissolved in the chemical polishing liquid becomes 1.5% by mass. It has been confirmed that even if the amount of aluminum dissolved in the chemical polishing liquid increases, chemical polishing can be continuously performed for a long time without adjusting the components in the chemical polishing liquid.
【0042】[0042]
【発明の効果】上記のように本発明の請求項1に係る化
学研磨液は、アルミニウム又はその合金の化学研磨液で
あって、硝酸を除く無機酸と、タングステン化合物とを
配合したため、化学研磨液にアルミニウムやアルミニウ
ム合金を浸漬することにより化学研磨を行うと、表面を
研磨して平滑化を行うと共に研磨面に光沢を付与するこ
とができるものであり、しかも液中には硝酸が配合され
ていないことから化学研磨の過程において硝酸の分解に
より有害な窒素酸化物が発生するようなことがなく、ま
た硝酸濃度を維持するために硝酸を液中に追加するよう
な必要がなく、液の調整をすることなく長期間連続的に
化学研磨を行うことができるものである。As described above, the chemical polishing liquid according to the first aspect of the present invention is a chemical polishing liquid for aluminum or an alloy thereof, which contains an inorganic acid other than nitric acid and a tungsten compound. When chemical polishing is performed by immersing aluminum or aluminum alloy in a liquid, the surface can be polished and smoothed, and gloss can be given to the polished surface. Harmful nitrogen oxides are not generated by the decomposition of nitric acid during the chemical polishing process, and there is no need to add nitric acid to the solution to maintain the nitric acid concentration. Chemical polishing can be continuously performed for a long period of time without adjustment.
【0043】また請求項2の発明は、請求項1におい
て、無機酸として、リン酸及び硫酸の少なくとも一方を
配合するため、優れた研磨力を有すると共に研磨面に良
好な光沢を付与することができ、更に化学研磨液中にタ
ングステン化合物や他の金属イオン等の溶解性を向上し
て安定した化学研磨液を得ることができるものである。According to a second aspect of the present invention, in the first aspect, at least one of phosphoric acid and sulfuric acid is blended as the inorganic acid, so that it has excellent polishing power and can impart good gloss to the polished surface. In addition, the solubility of tungsten compounds and other metal ions in the chemical polishing liquid can be improved to obtain a stable chemical polishing liquid.
【0044】また請求項3の発明は、請求項1又は2に
おいて、銅イオンを含有するため、化学研磨によりアル
ミニウムやアルミニウム合金の表面に更に優れた光沢を
付与することができるものである。According to a third aspect of the present invention, in addition to the first or second aspect, since copper ions are contained, the surface of aluminum or an aluminum alloy can be made more excellent gloss by chemical polishing.
【0045】また請求項4の発明は、請求項1乃至3の
いずれかにおいて、鉄イオンを含有するため、化学研磨
後のアルミニウムやアルミニウム合金の表面に光沢のム
ラが発生することを抑制することができるものである。According to a fourth aspect of the present invention, in any one of the first to third aspects, since iron ions are contained, the occurrence of unevenness in gloss on the surface of aluminum or aluminum alloy after chemical polishing is suppressed. Can be done.
【0046】また請求項5の発明は、請求項1乃至4の
いずれかにおいて、カルシウムイオン及びモリブデンイ
オンの少なくとも一方を含有するため、化学研磨により
アルミニウムやアルミニウム合金の表面に更に優れた光
沢を付与することができるものである。According to a fifth aspect of the present invention, in any one of the first to fourth aspects, at least one of a calcium ion and a molybdenum ion is contained, so that the surface of aluminum or an aluminum alloy is imparted with further excellent gloss by chemical polishing. Is what you can do.
【0047】また請求項6の発明は、請求項1乃至5の
いずれかにおいて、化学研磨液の総量100質量部に対
してタングステン化合物を金属タングステン換算で0.
01〜5.0質量部配合したため、化学研磨後のアルミ
ニウムやアルミニウム合金の表面の光沢を更に向上する
ことができると共に、液中にタングステン化合物が一部
溶解せずに残存することを防止することができるもので
ある。According to a sixth aspect of the present invention, in any one of the first to fifth aspects, a tungsten compound is added in an amount of 0.1 to 0.1 parts by weight in terms of metal tungsten with respect to 100 parts by mass of the total amount of the chemical polishing liquid.
The addition of 01 to 5.0 parts by mass makes it possible to further improve the gloss of the surface of aluminum or an aluminum alloy after chemical polishing and to prevent the tungsten compound from remaining in the liquid without being partially dissolved. Can be done.
【0048】また請求項7の発明は、請求項3乃至6の
いずれかにおいて、化学研磨液の総量100質量部に対
して銅イオンを0.001〜0.1質量部配合したた
め、化学研磨後のアルミニウムやアルミニウム合金の表
面の光沢を更に向上することができると共に、黒色の析
出の発生を防止することができるものである。According to a seventh aspect of the present invention, in any one of the third to sixth aspects, 0.001 to 0.1 parts by mass of copper ions is added to 100 parts by mass of the total amount of the chemical polishing solution. In addition, the gloss of the surface of aluminum or an aluminum alloy can be further improved, and the occurrence of black precipitation can be prevented.
【0049】また請求項8の発明は、請求項4乃至7の
いずれかにおいて、化学研磨液の総量100質量部に対
して鉄イオンを0.01〜0.50質量部配合したた
め、化学研磨後のアルミニウムやアルミニウム合金の表
面に光沢のムラが発生することを更に抑制することがで
きるものである。The invention of claim 8 is characterized in that, in any of claims 4 to 7, 0.01 to 0.50 parts by mass of iron ions are blended with respect to 100 parts by mass of the total amount of the chemical polishing solution. This can further suppress the occurrence of unevenness in gloss on the surface of aluminum or aluminum alloy.
【0050】また請求項9の発明は、請求項2乃至8の
いずれかにおいて、化学研磨液の総量100質量部に対
してリン酸を70〜30質量部、硫酸を30〜70質量
部配合したため、化学研磨による研磨力を更に向上する
ことができるものである。According to a ninth aspect of the present invention, in any one of the second to eighth aspects, 70 to 30 parts by mass of phosphoric acid and 30 to 70 parts by mass of sulfuric acid are added to the total amount of 100 parts by mass of the chemical polishing liquid. In addition, the polishing power by chemical polishing can be further improved.
【0051】また請求項10の発明は、請求項1乃至9
のいずれかにおいて、メタリン酸ソーダを配合したた
め、化学研磨によりアルミニウムやアルミニウム合金の
表面に更に優れた光沢を付与することができ、また、化
学研磨液中にタングステン化合物や他の金属イオン等の
溶解性を向上して安定した化学研磨液を得ることができ
るものである。The tenth aspect of the present invention provides the first to ninth aspects.
In any one of the above, sodium metaphosphate is blended, so that the surface of aluminum or aluminum alloy can be provided with further excellent gloss by chemical polishing, and the dissolution of tungsten compounds and other metal ions in the chemical polishing liquid It is possible to obtain a stable chemical polishing liquid by improving the polishing property.
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4K057 WA04 WA09 WA18 WB05 WE03 WE04 WE30 WG03 ──────────────────────────────────────────────────続 き Continued from the front page F term (reference) 4K057 WA04 WA09 WA18 WB05 WE03 WE04 WE30 WG03
Claims (10)
であって、硝酸を除く無機酸と、タングステン化合物と
を配合して成ることを特徴とする化学研磨液。1. A chemical polishing liquid for aluminum or an alloy thereof, comprising an inorganic acid other than nitric acid and a tungsten compound.
て成ることを特徴とする請求項1に記載の化学研磨液。2. The chemical polishing liquid according to claim 1, wherein phosphoric acid and sulfuric acid are blended as the inorganic acid.
る請求項1又は2に記載の化学研磨液。3. The chemical polishing liquid according to claim 1, wherein the chemical polishing liquid contains copper ions.
る請求項1乃至3のいずれかに記載の化学研磨液。4. The chemical polishing liquid according to claim 1, wherein the chemical polishing liquid contains iron ions.
の少なくとも一方を含有して成ることを特徴とする請求
項1乃至4のいずれかに記載の化学研磨液。5. The chemical polishing liquid according to claim 1, comprising at least one of calcium ions and molybdenum ions.
タングステン化合物を金属タングステン換算で0.01
〜5.0質量部配合して成ることを特徴とする請求項1
乃至5のいずれかに記載の化学研磨液。6. A tungsten compound in an amount of 0.01 in terms of metal tungsten based on 100 parts by mass of the total amount of the chemical polishing liquid.
2. The composition according to claim 1, wherein the amount is from 5.0 to 5.0 parts by mass.
6. The chemical polishing liquid according to any one of items 1 to 5.
銅イオンを0.001〜0.1質量部配合して成ること
を特徴とする請求項3乃至6のいずれかに記載の化学研
磨液。7. The chemical polishing according to claim 3, wherein 0.001 to 0.1 parts by mass of copper ion is blended with respect to 100 parts by mass of the total amount of the chemical polishing liquid. liquid.
鉄イオンを0.01〜0.50質量部配合して成ること
を特徴とする請求項4乃至7のいずれかに記載の化学研
磨液。8. The chemical polishing according to claim 4, wherein 0.01 to 0.50 parts by mass of iron ions are blended with respect to 100 parts by mass of the total amount of the chemical polishing liquid. liquid.
リン酸を70〜30質量部、硫酸を30〜70質量部配
合して成ることを特徴とする請求項2乃至8のいずれか
に記載の化学研磨液。9. The method according to claim 2, wherein 70 to 30 parts by mass of phosphoric acid and 30 to 70 parts by mass of sulfuric acid are blended with respect to 100 parts by mass of the total amount of the chemical polishing liquid. The chemical polishing liquid as described.
を特徴とする請求項1乃至9のいずれかに記載の化学研
磨液。10. The chemical polishing liquid according to claim 1, wherein sodium metaphosphate is blended.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001084308A JP3629218B2 (en) | 2001-03-23 | 2001-03-23 | Chemical polishing liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001084308A JP3629218B2 (en) | 2001-03-23 | 2001-03-23 | Chemical polishing liquid |
Publications (2)
Publication Number | Publication Date |
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JP2002285360A true JP2002285360A (en) | 2002-10-03 |
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Cited By (7)
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JP2008266769A (en) * | 2006-12-15 | 2008-11-06 | Nippon Light Metal Co Ltd | Surface-treated aluminum material, and surface treatment method for aluminum material |
CN102747370A (en) * | 2012-06-26 | 2012-10-24 | 丽水学院 | Polishing solution for treating surface of high-silicon content aluminum alloy |
CN102817035A (en) * | 2012-09-10 | 2012-12-12 | 广州波耳化工材料有限公司 | Chemical polishing agent |
CN103361645A (en) * | 2013-06-24 | 2013-10-23 | 安徽华东光电技术研究所 | Chemical polishing solution and preparation method thereof and method for chemically polishing Kovar parts |
CN109295458A (en) * | 2018-11-07 | 2019-02-01 | 深圳市中科东明表面处理新材料技术有限公司 | The without phosphorus nitrogen-free polishing fluid of aluminium alloy and aluminium alloy surface treatment method |
KR102561637B1 (en) * | 2022-10-31 | 2023-07-31 | 주식회사 지에스켐텍 | Non-nitric acid based high gloss chemical polishing for aluminum material and chemical polishing method using them |
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CN102677064A (en) * | 2011-03-09 | 2012-09-19 | 汉达精密电子(昆山)有限公司 | Additive for two-acid polishing of aluminum alloy |
WO2019000442A1 (en) * | 2017-06-30 | 2019-01-03 | 深圳市恒兆智科技有限公司 | Polishing agent, aluminium alloy piece and polishing method therefor |
WO2019006608A1 (en) * | 2017-07-03 | 2019-01-10 | 深圳市宏昌发科技有限公司 | Passivator, method of surface passivation for metal-plated part and metal workpiece |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008266769A (en) * | 2006-12-15 | 2008-11-06 | Nippon Light Metal Co Ltd | Surface-treated aluminum material, and surface treatment method for aluminum material |
CN102747370A (en) * | 2012-06-26 | 2012-10-24 | 丽水学院 | Polishing solution for treating surface of high-silicon content aluminum alloy |
CN102817035A (en) * | 2012-09-10 | 2012-12-12 | 广州波耳化工材料有限公司 | Chemical polishing agent |
CN103361645A (en) * | 2013-06-24 | 2013-10-23 | 安徽华东光电技术研究所 | Chemical polishing solution and preparation method thereof and method for chemically polishing Kovar parts |
CN109295458A (en) * | 2018-11-07 | 2019-02-01 | 深圳市中科东明表面处理新材料技术有限公司 | The without phosphorus nitrogen-free polishing fluid of aluminium alloy and aluminium alloy surface treatment method |
EP4242346A1 (en) * | 2022-03-09 | 2023-09-13 | Politeknik Metal Sanayi Veticaret A.I. | Brightening solution for aluminium or aluminium alloy and process for brightening aluminium or aluminium alloy |
KR102561637B1 (en) * | 2022-10-31 | 2023-07-31 | 주식회사 지에스켐텍 | Non-nitric acid based high gloss chemical polishing for aluminum material and chemical polishing method using them |
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