JP2002285132A - Method for laminating member and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To laminate a plurality of members without containing air bubbles in an adhesive resin when laminating the members with the resin. SOLUTION: The adhesive resin 33 is sprayed from a spraying part 48 on a microlens array pattern 36 formed on the surface of a plate-shaped microlens array 31. The adhesive resin 33 is then dropped from a nozzle 51 of a resin supplying part 49 on the sprayed adhesive resin 33. A small amount of the adhesive resin 33 is dropped on the surface of a glass substrate 32 by a resin supplying part 50. The glass substrate 32 is then reversed upside down to make the adhesive resin 33 hang from the undersurface of the glass substrate 32. The glass substrate 32 is superposed on the plate-shaped microlens array 31 to bring the adhesive resin 33 hung from the undersurface of the glass substrate 32 into contact with the adhesive resin 33 risen form the upper surface of the plate-shaped microlens array 31. The glass substrate 32 is then pressured to the plate-shaped microlens array 31 to stretch the adhesive resin 33 between the glass substrate 32 and the plate-shaped microlens array 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for bonding a plurality of members (for example, flat plates) via a resin. For example, the present invention relates to a member bonding method and apparatus optimal for use in manufacturing optical elements such as an optical low-pass filter, a Fresnel lens, and a microlens array (in particular, resin molding using a stamper).

[0002]

2. Description of the Related Art (First Conventional Example) As a method of manufacturing a microlens array by bonding two flat plates, there is a method of sandwiching a resin between two flat plates and bonding them.
For example, a microlens array is manufactured by bonding a flat plate using an ultraviolet curable resin as a resin and then irradiating ultraviolet rays to cure the adhesive resin and molding the resin or joining the two flat plates. Things.

More specifically, in this method, a microlens array is manufactured as shown in FIGS. First, as shown in FIG. 1A, a transparent ultraviolet curable resin 2 is dropped on a glass substrate 1 (flat plate). Next, as shown in FIG.
The stamper 3 (flat plate) formed with
The stamper 3 is pressed against the ultraviolet curable resin 2 and the stamper 3 shown in FIG.
The UV curable resin 2 is applied to the glass substrate 1 and the stamper 3 as shown in FIG.
To spread the ultraviolet curable resin 2 over the entire surface to be bonded. Thereafter, as shown in FIG. 1D, the ultraviolet curable resin 2 is irradiated with ultraviolet light through the glass substrate 1 by an ultraviolet lamp to cure the ultraviolet curable resin 2, and the glass substrate 1 and the stamper are interposed via the ultraviolet curable resin 2. Stick 3 together. Next, after the UV-curable resin 2 is completely cured, the stamper 3 is peeled off from the UV-curable resin 2.
As shown in FIG. 1E, a transparent resin layer 6 on which a lens pattern 5 (an inverted pattern of the lens pattern 4) is transferred is formed on the glass substrate 1.

Further, as shown in FIG. 2 (f), a transparent ultraviolet curable resin 8 having a different refractive index from that of the ultraviolet curable resin 2 is dropped on another glass substrate 7 (flat plate) to form a transparent resin layer. A glass substrate 1 (a flat plate) with the lower side 6 is placed on top of it, and the upper glass substrate 1 is pressed against the lower glass substrate 7 so as to be between the glass substrate 7 and the transparent resin layer 6 as shown in FIG. The ultraviolet curable resin 8 is spread. After this, FIG.
As shown in (h), the ultraviolet curing resin 8 is irradiated with ultraviolet light through the glass substrate 7 by an ultraviolet lamp to cure the ultraviolet curing resin 8. In this manner, the thin transparent resin layer 6 where the ultraviolet curing resin 2 is cured and the thin transparent resin layer 9 where the ultraviolet curing resin 8 is cured are sandwiched between the glass substrates 1 and 7, and the boundary between the transparent resin layers 6 and 9 is sandwiched. A minute lens pattern 10 is formed on the surface, and a lens array 11 as shown in FIG.

[0005] However, when the two flat plates, for example, the glass substrate 1 and the stamper 3 are bonded in this manner, bubbles are easily generated in the resin, for example, the ultraviolet curing resin 2 sandwiched between them. That is, the vicinity of the vertex of the ultraviolet curable resin 2 dropped on the glass substrate 1 does not have a single peak top but has a plurality of undulations as shown in FIG. Consists of a peak top. When the stamper 3 is superimposed on the UV-curable resin 2 having such a configuration, a space 12a is generated between the peak tops of the UV-curable resin 2 and the stamper 3, as shown in FIG. The air bubbles 12 are caught in the ultraviolet curable resin 2. Similarly, when the transparent resin layer 6 on the lower surface of the glass substrate 1 and the glass substrate 7 are bonded together via the ultraviolet curable resin 8, air bubbles are easily trapped in the ultraviolet curable resin 8.

As a result, a defective product has occurred in a product obtained by bonding two flat plates. For example, in the case of the lens array 11 as described above, the transparent resin layers 6, 9
Since the refractive index and the light transmittance are different from each other, the optical characteristics change at that portion, and a uniform light spot cannot be obtained.

(Second conventional example) Therefore, Japanese Patent Laid-Open No.
In the method disclosed in Japanese Patent No. 9076, a bonding method as shown in FIG. 4 is employed in order to prevent bubbles from being included in a resin for bonding flat plates.
By using this method, as shown in FIG. 4A, a resin applying portion 22 is provided on the joining surface of one flat plate 21 (a flat microlens array having a lens pattern formed by a resin layer).
A sufficient amount of the adhesive resin 23 is dropped from the nozzle of the resin applying section 25, and a small amount of the adhesive resin 23 is attached to the joining surface of the other flat plate 24 (glass substrate) from the nozzle of the resin applying section 25. Then, as shown in FIG. 4 (b), the flat plate 24 to which a small amount of the adhesive resin 23 is adhered is turned upside down to face the other flat plate 21, and the upper and lower flat plates 24, 21
Overlaid. At this time, the adhesive resin 23 hangs down from the upper flat plate 24, and the adhesive resin 23 hangs down from a part of the lower surface and the adhesive resin 2
When the flat plate 21 provided with No. 3 is overlaid, FIG.
As shown in FIG. 6, the adhesive resin 23 hanging down from the upper flat plate 24 and the adhesive resin 23 on the lower flat plate 21 are in point contact. Further, when the flat plates 21 and 24 are pressed together, the adhesive resin 23 is pushed and spread over the entire bonding of the flat plates 21 and 24. Finally, the adhesive resin 23 is irradiated with ultraviolet rays by an ultraviolet lamp 26 through the flat plate 24 to cure the adhesive resin 23 and join the flat plate 21 and the flat plate 24 as shown in FIG.

FIG. 5 shows the adhesive resin 23 attached to the flat plate 24 and hanging down by gravity and the adhesive resin 2 attached to the upper surface of the flat plate 21 in the steps of FIGS.
FIG. 3 is an enlarged cross-sectional view showing a state in which the contact area 3 contacts and the contact area between them increases. As shown in FIG. 5A, the adhesive resin 23 attached to the inverted flat plate 24 hangs down in an icicle shape by gravity to maintain a single peak-top shape, and in this state, the adhesive resin 23 first hangs down. The tip of 23 contacts the adhesive resin 23 attached to the flat plate 21 at one point A. At this time, the amount of the hanging adhesive resin 23 is small, and the lower end surface of the hanging adhesive resin 23 is smoothly rounded like a droplet due to gravity and surface tension, and no concave portion is formed on the lower end surface. Furthermore, the adhesive resin 2
3 has an adhesive resin 23 attached to the upper surface of the flat plate 21.
Since the area is smaller than the unevenness of the adhesive resin 2
3 No air bubbles are taken in at the moment of contact. When the adhesive resins 23 come into contact with each other in this way, as shown by the broken line B1 → broken line B2 → solid line B3 in FIG.
The contact surface between the flat plates 21 and 24 gradually spreads around while the interface of the adhesive resin 23 is smoothly deformed by the surface tension. In this manner, the adhesive resin 23 is spread over the entire surface of the bonding surface, and no air bubbles enter the adhesive resin 23.
1, 24 are joined.

Thus, according to this conventional method,
Without mixing air bubbles into the adhesive resin 23, the flat plate 2
1, 24 can be attached to each other, and the refractive index and the light transmittance are not made non-uniform due to the bubbles, so that an optical element or the like with good performance can be manufactured.

[0010]

However, even in the method of the second conventional example, the adhesive resin 23 is applied from the nozzle of the resin application section 22 to the flat plate 21 having a minute uneven surface 27 like a lens pattern of a microlens array. 4A and 6A, at the moment when the adhesive resin 23 comes into contact with the minute uneven surface 27, as shown in FIG. Adhesive resin 2 in concave portion sandwiched between convex portions
The gap 28 is formed between the gap 3 and the gap 3. Thereafter, as shown in FIG. 6C, the voids 28 grow into bubbles 29 in the adhesive resin 23.

As a result, a defective product occurs in a product in which two flat plates are bonded. For example, in an optical element in which a flat microlens array is bonded to a glass substrate, refraction occurs at a bubble portion or a void portion. Since the rate changes, there has been an inconvenience that a uniform focused spot cannot be obtained.

Similarly, as shown in FIG. 2, the glass substrate 1 is lowered with the transparent resin layer 6 facing downward, and
The ultraviolet curing resin 8 can also be made to hang down from the lower surface of the transparent resin layer 6 by the method of contacting the ultraviolet curing resin 8 above. In this case, as shown in FIG. 7A, an ultraviolet curable resin 8 is raised on the upper surface of a resin applying section 30 such as a dispenser, and this ultraviolet curable resin 8 is made of a transparent resin as shown in FIG. The lower surface of the layer 6 is brought into contact. Due to this contact, the ultraviolet curable resin 8 adheres to the lower surface of the transparent resin layer 6, and the ultraviolet curable resin 8 hangs down on the lower surface of the transparent resin layer 6. However, also in this case, since the ultraviolet curable resin 8 raised on the resin application portion 30 at the time of applying the resin directly contacts the concave / convex pattern, as shown in FIG. Air is trapped in between, creating a void 28, after which the void 28
As shown in FIG. 4D, bubbles 29 appear due to the wetting of the ultraviolet curable resin 8 and the transparent resin layer 6.

[0013]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a method of bonding a plurality of members (for example, flat plates) with a resin without entrapping air bubbles between the members or the resin.

Another object of the present invention is as follows.
An object of the present invention is to allow one of the members to be easily separated from the resin after the plurality of members are bonded with the resin.

A member bonding method according to the present invention is a method of bonding one member and the other member with a resin, wherein the resin is sprayed on at least one member in a mist state to bond the member to the other member. After the resin is applied, the member and the other member are bonded to each other with the resin interposed therebetween.

In the member bonding method according to the present invention, when one member and the other member are bonded with a resin, the resin is sprayed in a mist state. It is possible to prevent air bubbles from being generated by including a gap between the member and the member. Therefore, it is possible to prevent defects from occurring in the bonded members, and it is possible to prevent deterioration of optical characteristics due to bubbles in, for example, a manufacturing process of an optical component.

In particular, even when the resin application surface of the member has fine irregularities, the irregularities are filled with the sprayed resin, so that bubbles are less likely to be generated in the resin.

In the embodiment of the member bonding method according to the present invention, the resin is locally sprayed on the bonding surface of at least one of the members. In this embodiment,
Since the resin is locally applied to the bonding surface of the member by spraying, a sufficient amount of the resin can be sprayed on a part of the bonding surface in a short time and sufficiently wetted. Therefore, a high air bubble removing effect can be obtained by short-time spraying.

In another embodiment of the member bonding method according to the present invention, the resin is sprayed on a bonding surface of at least one member, and then the resin is coated on the resin by another coating means. I have. It is desirable that the area where the resin is sprayed is wider than the area where the resin is applied by another application means. Further, the resin to be sprayed and the resin to be applied by different application means may be the same resin or different resins, but using the same resin has better characteristics (for example, when manufacturing an optical element, Characteristics). In this embodiment, since the resin is applied on the sprayed resin by different application means, the amount of resin that needs to be applied by spraying can be reduced, the resin spraying time is shortened, and efficiency is improved. Can be. Further, when fine irregularities are present on the resin application surface of the member, the irregularities are filled with the sprayed resin, and it is possible to prevent bubbles from being generated when applying the resin by another applying means. .

In still another embodiment of the member bonding method according to the present invention, the surface of any one of the members on which the resin is sprayed has irregularities, and the particle diameter of the resin sprayed in the form of a mist is determined. It is smaller than the size of the irregularities. In this embodiment, the resin particles to be sprayed are finer than the irregularities on the resin sprayed surface, so that the resin can enter into the recesses on the sprayed surface, and even when fine irregularities are present on the application surface, the resin The resin can be adhered to the resin spray surface of the member without biting air bubbles therein.

In still another embodiment of the member bonding method according to the present invention, the resin applied to the lower surface of one member is made to hang down from the lower surface of the member and the resin applied to the upper surface of the other member. Is raised on the upper surface of the resin, and then the lower surface of one member and the upper surface of the other member are overlapped to bond the two members.

In this embodiment, the resin applied to the lower surface of one member is made to hang down from the lower surface of the member, and the resin applied to the upper surface of the other member is raised to the upper surface of the resin. Since the two parts are bonded together, the lower end of the resin that hangs down and the lower part of the resin at the time of bonding come into contact in a point-like manner, from which the resins flow and spread between the two members, causing air bubbles to form between the two members. It can be attached without including it. At this time, if the mist-like resin is locally sprayed on the upper flat plate, the resin easily hangs down, and the contact surfaces between the resins easily spread from the point-like contact state.

In still another embodiment of the member bonding method according to the present invention, one of the members has irregularities on at least one surface, and the surface of the member has the irregularities facing the lower surface side. After spraying the resin in the form of a mist, the resin is attached to the lower surface of one of the members by another application means from above the resin, and the resin is allowed to hang down. Need not be sprayed, and the resin spray time can be shortened.

Further, the member bonding apparatus according to the present invention comprises a means for holding one member, a means for holding the other member, and spraying resin in a mist state on the member held by at least one holding means. And a spraying means for performing the spraying. According to this member bonding apparatus,
Since the resin can be atomized and sprayed on the member by the spraying means, the member bonding method can be easily performed.

In an embodiment of the member bonding apparatus according to the present invention, a coating method different from the spraying means is used.
Since the apparatus further includes a resin applying means for applying resin to the member held by the holding member, it is possible to further apply resin after spraying the resin, thereby shortening the resin spraying time and reducing the amount of resin applied. It is possible to make the resin larger and make the resin hang down on the lower surface of the member as described above.

Further, another member bonding method according to the present invention is a method of bonding one member and the other member with a resin, wherein a fluorine-based solvent is sprayed on at least one member in a mist state. It is characterized in that the member and the other member are bonded via a resin.

In another member bonding method according to the present invention, at least one member is sprayed with a fluorinated solvent in a mist state, and then the member and the other member are bonded via a resin. Therefore, the releasability of the member and the resin is improved by the fluorine-based solvent, and after the members are bonded together with the resin, when one of the members is separated from the resin, the resin is not peeled off together with the member to be peeled. The member can be peeled off neatly. In addition, since the fluorine-based solvent is sprayed in the form of a mist, it can be applied uniformly, and even when the surface to which the fluorine-based solvent is applied has fine irregularities, the fluorine-based solvent is not caught by the air bubbles. A form solvent can be applied. Further, the life of the member can be extended by reducing the stress when the member is peeled off.

The above-described components of the present invention can be combined as arbitrarily as possible.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A member bonding method according to the present invention is a method for bonding two members, especially two flat plates, using an adhesive resin such as an ultraviolet curing resin. Even if there are minute irregularities on the surface, the adhesive resin is sprayed in a mist so as to fill the irregularities, and if necessary, the adhesive resin is applied to the resin spray location, and contacts with the adhesive resin dropped on the other member Then, two members are joined by applying pressure to the members. Alternatively, it is also possible to spray and bond the adhesive resin to both members in a mist state.

In this mist-like resin spraying, the resin may be sprayed on the bonding surface with the uneven surface facing upward, or the resin surface with the uneven surface may face downward. The resin may be sprayed on the bonding surface in a mist state. Also, the adhesive resin is not limited to the ultraviolet curable resin, and various other adhesive resins can be used. Note that the method of the present invention is also effective for joining two members having a smooth bonding surface. Hereinafter, embodiments of the present invention will be described in detail.

(First Embodiment) FIGS. 8A to 8F are schematic diagrams for explaining a member bonding method according to an embodiment of the present invention. In this embodiment, a flat microlens array 31 in which a microlens array pattern 36 is formed on a surface of a glass substrate 34 by a resin layer 35 and a glass substrate 32 are bonded together via an ultraviolet-curable adhesive resin 33 to form a microlens. A case where the array element 37 is manufactured will be described.

The spray unit 48 is made to face the bonding surface of the flat microlens array 31, and as shown in FIG.
8, the adhesive resin 33 is sprayed in the form of a mist, and the adhesive resin 33 is applied to a part or the entire surface of the flat microlens array 31 as shown in FIG. Here, the spray unit 4
The particle diameter of the adhesive resin 33 sprayed from 8 is smaller than the size (roughness) of the irregularities of the microlens array pattern 36. The adhesive resin 33 can be applied to the surface of the microlens array pattern 36 so that no void is formed by the unevenness of the lens array pattern 36.

Next, the resin applying section 49 is made to face the resin spray portion of the flat microlens array 31 and the resin applying section 50 is made to face the bonding surface of the glass substrate 32. As shown in FIG. 8C, the same adhesive resin 33 as the sprayed adhesive resin 33 is output from the nozzle 51 of the resin application section 49.
From the nozzle 52 of the resin application section 50 from the nozzle 52 of the resin applying section 50.
A small amount of the same adhesive resin 33 is dropped and adhered to the bonding surface of the glass substrate 32. The step of applying the adhesive resin 33 from the resin application unit 49 to the flat microlens array 31 may be omitted, but if the resin application unit 49 further attaches the adhesive resin 33 onto the spray adhesive resin 33, The time for spraying the resin by the spray unit 48 can be shortened.

Thereafter, as shown in FIG. 8D, the glass substrate 32 on which a small amount of the adhesive resin 33 is adhered is turned upside down to face the flat microlens array 31, and the upper and lower glass substrates 32 and Flat plate micro lens array 31
At this time, the adhesive resin 33 hangs down from the upper glass substrate 32, and the adhesive resin 3
When the glass substrate 32 on which the 3 is hung and the flat microlens array 31 provided with the adhesive resin 33 raised on a part or the whole of the upper surface are overlapped, as shown in FIG. The lower end of the hanging adhesive resin 33 contacts the adhesive resin 33 on the lower flat microlens array 31. Further, the flat microlens array 31 and the glass substrate 32 are suppressed, and the adhesive resin 33 is spread over the entire bonding surface of the flat microlens array 31 and the glass substrate 32. Finally, the adhesive resin 33 is irradiated with ultraviolet light by an ultraviolet lamp 38 through the glass substrate 32,
The adhesive resin 33 is cured, and the flat microlens array 31 and the glass substrate 32 are joined by the adhesive resin 33 as shown in FIG.

FIGS. 9 (a) to 9 (e) correspond to FIGS.
It is a figure explaining the process of (c) in detail. FIG. 9A shows a state immediately after the adhesive resin 33 is sprayed on the microlens array pattern 36 of the flat microlens array 31 by the spray unit 48. The adhesive resin 33 is sprayed in the form of a mist and is in a thinly raised state, and the fine irregularities of the microlens array pattern 36 are filled with the adhesive resin 33 sprayed in the form of a finer mist than the irregularities. No air bubbles are trapped between the adhesive resin 33 and the microlens array pattern 36. After the adhesive resin 33 is sprayed on a part of the microlens array pattern 36 until it rises, the adhesive resin 33 is dropped from the nozzle 51 of the resin application section 49 as shown in FIG. As shown in FIG.
The lower end of 3 contacts the adhesive resin 33 raised on the microlens array pattern 36 at one point. At this time, since the lower adhesive resin 33 fills the irregularities of the microlens array pattern 36 and is in a raised state, the adhesive resin 33 dropped from the nozzle 51
No bubbles are contained at the moment of contact. When the upper and lower adhesive resins 33 come into contact with each other, due to the surface tension of the adhesive resin 33, as shown in FIG.
The contact surface between 3 and the adhesive resin 33 dropped from the nozzle 51 of the resin application section 49 gradually spreads to the periphery. Thus,
Since the adhesive resin 33 spontaneously spreads on the minute irregularities of the microlens array pattern 36, when the adhesive resin 33 is added to the flat microlens array 31, when the adhesive resin 33 is between the adhesive resin 33 and the microlens array pattern 36 or the adhesive resin 33 No air bubbles enter inside.

8 (d) and (e), the glass substrate 32 is turned upside down, and the adhesive resin 33 is hung on the lower surface of the glass substrate 32 by gravity. At the time of bonding the lens array 31, as in the case of the second conventional example (see FIG. 5),
Flat microlens array 3 without biting air bubbles
1 and the glass substrate 32 are joined. That is, the adhesive resin 3 adhered to the glass substrate 32 (corresponding to the flat plate 24 in FIG. 5)
3 (corresponding to the adhesive resin 23 in FIG. 5) hangs down in an icicle shape by gravity to maintain a single peak-top shape, and the tip of the adhesive resin 33 that hangs down is a flat microlens array 31 (the flat plate 21 in FIG. 5). At one point with the adhesive resin 33 attached thereto. At this time, the amount of the adhesive resin 33 hanging down on the lower surface of the glass substrate 32 is small, and the lower end surface of the hanging adhesive resin 33 is smoothly rounded like a droplet by gravity and surface tension. No concave portion is formed on the lower end surface of 33. Further, the lower end of the adhesive resin 33 hanging down from the lower surface of the glass substrate 32 has a smaller area than the unevenness of the adhesive resin 33 attached to the upper surface of the flat microlens array 31. The bubbles do not bite at the moment of contact. When the upper and lower adhesive resins 33 come into contact with each other in this manner, the interface between the adhesive resin 33 attached to the flat microlens array 31 and the glass substrate 32 changes while the interface of the adhesive resin 33 is smoothly deformed by the surface tension of the adhesive resin 33. It gradually spreads to the surroundings (see the dashed line B1 → the dashed line B2 → the solid line B3 in FIG. 5B). As a result, the adhesive resin 33 is spread over the entire surface of the bonding surface between the flat microlens array 31 and the glass substrate 32, and the flat microlens array 31 and the glass substrate 32 are joined without mixing air bubbles into the adhesive resin 33. can do.

According to the member bonding method of the present invention,
As described above, the flat microlens array 31 and the glass substrate 32 are formed without mixing bubbles in the adhesive resin 33.
Can be bonded, and the refractive index and the light transmittance do not become non-uniform due to bubbles or voids, so that an optical element with good performance can be manufactured. In this embodiment, since the adhesive resin 33 is made to hang down using gravity, if the viscosity of the adhesive resin 33 attached to the glass substrate 32 is too low, the attached adhesive resin 33 falls down, and On the other hand, if the viscosity is too high, the lower end surface of the adhesive resin 33 will not be a smooth curved surface due to surface tension, but will have irregularities, and will generate bubbles at the time of contact. For this reason, it is preferable that the adhesive resin 33 has a high viscosity as long as the surface tension is not hindered so that the lower end surface of the hanging adhesive resin 33 is appropriately curved by surface tension. Further, the flat microlens array 31
The adhesive resin applied to the glass substrate 32 may be different from the adhesive resin applied to the glass substrate 32.

FIGS. 10A and 10B are a partially broken front view and a partially broken side view, respectively, showing an example of a member bonding apparatus 41 for carrying out the above member bonding method. The flat plate bonding device 41 includes two flat plate supporting portions 42 and 43 for supporting flat plates. One flat plate supporting portion 42 is fixed on a stage 44, and the other flat plate supporting portion 43 is attached to an apparatus main body 45. It is supported by a support shaft 47 inserted in the guide groove 46 provided, and is movable along the guide groove 46. The support shaft 47 is rotatable, and the flat plate supported by the flat plate support portion 43 can be turned upside down by rotating the support shaft 47.

The member bonding apparatus 41 includes a spray section 48 having a resin spray function, and can spray the adhesive resin on the flat plate bonding surface. Further, the member bonding apparatus 41 includes two resin applying sections 49 and 50 such as a fixed amount application type dispenser, and the adhesive resin can be dropped on a flat plate from the nozzle 51 of the resin applying section 49, The adhesive resin can also be dropped on the flat plate from the nozzle 52 of the resin applying section 50. The resin application sections 49 and 50 can move to near the upper surface of the stage 44. In addition, the member bonding apparatus 41 includes a pressing unit 53 for applying pressure to press the two flat plates.

Thus, the flat microlens array 31
The glass substrate 32 is bonded to the glass substrate 32 by the member bonding device 41 as follows. First, the spray unit 48
Is opposed to the upper surface of the flat microlens array 31 with the microlens array pattern 36 facing upward, and an adhesive resin (ultraviolet curable resin) 33 is sprayed on the upper surface of the microlens array pattern 36 in mist. 8 are filled with the adhesive resin 33 (FIG. 8).
(Steps (a) and (b)). Next, the flat microlens array 31 sprayed with the adhesive resin 33 is placed on the stage 44 and fixed to the upper surface of the stage 44 by the flat plate support 42. The flat microlens array 3
After the fixing unit 1 is fixed on the stage 44 by the flat plate supporting unit 42, the spraying unit 48 moves above the flat microlens array 31 on the stage 44 to spray the adhesive resin 33 in a mist. Good. Then, the glass substrate 3
2 is also set on the stage 44 and is supported by the flat plate support 43.

On the upper surface of the flat microlens array 31 and the upper surface of the glass substrate 32, an adhesive resin (ultraviolet curable resin) 33 is dropped from the nozzle 51 of the resin applying section 49 and the nozzle 52 of the resin applying section 50, respectively. 33 (step of FIG. 8C). At this time, a sufficient amount of adhesive resin 33 necessary for bonding is attached to the flat microlens array 31.
It is preferable to drop an amount necessary for causing the adhesive resin 33 to hang down on the glass substrate 32 in a dot-like manner.

Thereafter, as shown by a broken line in FIG. 10B, the flat plate supporting portion 43 supporting the glass substrate 32 is positioned above the flat microlens array 31 along the guide groove 46, and the supporting shaft 47 is moved. The glass substrate 32 is turned upside down by rotating (step of FIG. 8D). As a result, the adhesive resin 33 attached to the glass substrate 32 is suspended in a single icicle shape by gravity. While maintaining this state, the flat plate supporting portion 43 is lowered to bring the adhesive resin 33 hanging down on the lower surface of the glass substrate 32 into contact with the adhesive resin 33 dropped on the upper surface of the flat microlens array 31 (FIG. 8E). Process).

Then, the glass substrate 32 supported by the flat plate support portion 43 is gradually lowered, and the adhesive resin 33 is pushed and spread over the entire surface of the bonding surface between the glass substrate 32 and the flat microlens array 31. The glass substrate 32 is sufficiently pressed against the flat microlens array 31 by the pressure unit 53 and the parallelism between the flat microlens array 31 and the glass substrate 32 is obtained.

Finally, ultraviolet rays are irradiated by an ultraviolet lamp 38 to cure the adhesive resin 33 sandwiched between the flat microlens array 31 and the glass substrate 32.
The flat plate microlens array 31 and the glass substrate 32 are joined (step of FIG. 8F).

(Second Embodiment) FIGS. 11A and 11B are explanatory views showing a second embodiment of the present invention. In this embodiment, as shown in FIG. 11A, a part or the whole of the flat microlens array 31 with the microlens array pattern 36 facing upward is sprayed from the spray unit 48 onto the adhesive resin 3.
3 is sprayed in the form of a mist, and the unevenness of the microlens array pattern 36 is filled with the adhesive resin 33.
As shown in (b), by one resin application part 55,
The adhesive resin 33 is sequentially dropped on the flat microlens array 31 and the glass substrate 32.

The member bonding apparatus 54 includes a resin applying section 5
5 except that the resin applying section 55 is attached to the support section 56 so as to be rotatable in a plane. The adhesive resin 33 can be dripped from the nozzle 57 to both the flat microlens array 31 and the glass substrate 32. The resin supply path 58 is a supply path for supplying the adhesive resin 33 to the resin application section 55, and also serves as a mounting member for attaching the resin application section 55 to the support section 56.

In this embodiment, after the adhesive resin 33 is sprayed on the upper surface of the flat microlens array 31 in the form of a mist, the flat microlens array 31 and the glass substrate 32 are attached to the member bonding apparatus 54. set. Next, the adhesive resin 33 is dropped on the glass substrate 32 in a dot-like manner from the resin applying section 55, and then the resin applying section 55 is dropped.
Is rotated around the support portion 56, and the adhesive resin 33 is dropped on the flat microlens array 31. After the adhesive resin 33 is attached to the flat microlens array 31 and the glass substrate 32 in this manner, the glass substrate 32 is turned upside down in the same manner as shown in FIGS. And the glass substrate 32 are joined. Thereby, the flat microlens array 31 and the glass substrate 32
In this case, the bonding can be performed without causing bubbles in the adhesive resin 33. In addition, the structure of the member bonding device 54 can be simplified by using one resin applying portion 55 as described above.

(Third Embodiment) FIGS. 12A and 12B are explanatory views showing a third embodiment of the present invention. In this embodiment, as shown in FIG. 12A, a part or the whole of the flat microlens array 31 with the microlens array pattern 36 facing upward is sprayed from the spray unit 48 onto the adhesive resin 3.
12 is sprayed in the form of a mist, and the unevenness of the microlens array pattern 36 is filled with the adhesive resin 33.
As shown in (b), an adhesive resin 33 is applied to a glass substrate 32 and a flat microlens array 31 which are supported up and down by two resin applying portions 60 and 61, respectively.

The member bonding apparatus 59 is shown in FIG.
As shown in the figure, a resin dispenser 60 capable of adhering the adhesive resin 33 to the lower surface of the glass substrate 32 supported on the upper side and a dispenser-type resin capable of dropping the adhesive resin 33 on the upper surface of the flat microlens array 31 supported on the lower side And an application unit 61. The resin application section 60 has a cylindrical shape with an upper end opened, and the adhesive resin 33 is supplied by surface tension so as to swell from the upper end opening of the resin application section 60, and the swelling lowers the lower surface of the glass substrate 32. The contact makes the adhesive resin 33 transfer to the lower surface of the glass substrate 32. According to the resin application section 60, a part of the adhesive resin 33 raised on the upper surface can be transferred to the glass substrate 32, and a small amount of the adhesive resin 33 can be supplied with a simple structure.

In this embodiment, after the adhesive resin 33 is sprayed on the upper surface of the flat microlens array 31 in the form of mist, the flat microlens array 31 and the glass substrate 32 are attached to the member bonding apparatus 54. set. Next, the glass substrate 3 is
A small amount of adhesive resin 33 is attached to the lower surface of 2 in a dot-like manner, and a necessary and sufficient amount of adhesive resin 33 is dropped onto the flat microlens array 31 from the nozzle 62 of the resin application section 61. The adhesive resin 33 attached to the lower surface of the glass substrate 32 hangs down in a single icicle shape due to gravity, and the flat plate supporting portion 43 is lowered while maintaining this state, and comes into contact with the adhesive resin 33 attached to the upper surface of the flat microlens array 31. Let me do. Even with such a member bonding apparatus 59, the flat microlens array 31 and the glass substrate 32 can be bonded without causing air bubbles to enter the adhesive resin 33. In this member bonding apparatus 59, it is only necessary to newly add a resin applying section 60 capable of attaching the adhesive resin 33 to the lower surface of the glass substrate 32 to the conventional flat plate bonding apparatus. And can be easily manufactured.

(Fourth Embodiment) FIGS. 13A and 13B are explanatory views showing a fourth embodiment of the present invention. In this embodiment, as shown in FIG. 13A, a part or the whole of the flat microlens array 31 with the microlens array pattern 36 facing upward is sprayed from the spray unit 48 onto the adhesive resin 3.
13 is sprayed in the form of a mist, and the unevenness of the microlens array pattern 36 is filled with the adhesive resin 33.
As shown in (b), an adhesive resin 33 is attached to a glass substrate 32 and a flat microlens array 31 which are supported up and down so as to be opposed by a single resin application section 64.

In this member bonding apparatus 63,
The resin application section 64 has a cylindrical shape with an upper end opened, and a nozzle 62 is provided at the lower end. The adhesive resin 33 is supplied so as to swell from the upper end opening of the resin applying portion 64 by surface tension, and the adhesive resin 33 is attached to the lower surface of the glass substrate 32 in a dot-like manner from the swell. The adhesive resin 33 can be dropped on the upper surface of the array 31. In this flat plate bonding apparatus 63, since the adhesive resin 33 can be attached to the glass substrate 32 and the flat microlens array 31 by one resin applying section 64, compared with the member bonding apparatus 59 of the third embodiment. And the structure can be simplified.

(Fifth Embodiment) FIGS. 14A and 14B are explanatory views showing a fifth embodiment of the present invention. In this embodiment, as shown in FIG. 14A, a part or the entirety of the flat microlens array 31 with the microlens array pattern 36 facing upward is sprayed from the spray unit 48 onto the adhesive resin 3.
3 is sprayed in the form of a mist, and the unevenness of the microlens array pattern 36 is filled with the adhesive resin 33.
As shown in (b), the adhesive resin 33 is attached to the glass substrate 32 and the flat microlens array 31 by one resin applying portion 66 which can be turned upside down. The resin application section 66 is supported so as to be rotatable around the axis P. The resin application section 66 is turned upside down to adhere from the nozzle 67 to the lower surface of the glass substrate 32 and the upper surface of the flat microlens array 31. Resin 33
Can be attached. Even with such a structure, the structure can be completed by the single resin application unit 66, and the structure of the member bonding device 65 can be simplified.

(Sixth Embodiment) A member bonding apparatus 68 shown in FIG. 15 is a sixth embodiment of the present invention,
The glass substrate 32 and the flat plate microlens array 31 are supported by the flat plate supporting portions 43 and 42 so as to be opposed to each other, and the adhesive resin 33 is dropped on the resin storage portion 69 once. It adheres to the lower surface of the substrate 32.

The member bonding apparatus 68 includes two flat plate supporting portions 43 and 42 for vertically supporting the glass substrate 32 and the flat micro lens array 31 and two resin applying portions 49 and 50. . Two flat plate supports 4
The reference numerals 2 and 43 can support the flat microlens array 31 and the glass substrate 32 at positions where the bonding surfaces are shifted as shown in FIG. And flat plate micro lens array 3
1 can be moved in parallel so as to be able to oppose.
One of the resin applying portions 49 is provided on the upper surface of the flat microlens array 31 supported below the nozzle 51 by an adhesive resin 33.
Can be dropped. A plate-like resin reservoir 6 movable horizontally, below the other resin application unit 50.
9 is provided, the adhesive resin 33 is dropped once from the nozzle 52 into the resin reservoir 69, the resin reservoir 69 is moved, and the adhesive resin 33 which is dropped into the resin reservoir 69 and rises due to surface tension is applied to the glass substrate 32. Can be attached to the lower surface of the device.

The adhesive resin 33 is atomized and sprayed from the spray portion 48 onto a part or the whole of the flat microlens array 31 with the microlens array pattern 36 facing upward. 15A, the flat microlens array 31 and the glass substrate 32 are supported by the flat plate supporting portions 42 and 43, respectively, as shown in FIG. A necessary and sufficient amount of the adhesive resin 33 is dropped. In addition, resin application section 5
From 0, an appropriate amount of the adhesive resin 33 is dropped into the resin reservoir 69. Next, as shown in FIG. 15B, the flat plate supporting portion 42 or 43 is moved in parallel to make the flat microlens array 31 and the glass substrate 32 face each other. Also, the resin reservoir 69
To move a small amount of adhesive resin 33 on the lower surface of the glass substrate 32.
Are attached in a dot-like manner. The adhesive resin 33 adhered to the lower surface of the glass substrate 32 can hang down in a single icicle shape by gravity. Thus, the resin reservoir 69
By using, it is possible to prevent a large amount of the adhesive resin 33 from adhering to the lower surface of the glass substrate 32.

(Seventh Embodiment) A member bonding apparatus 70 shown in FIG. 16 is a seventh embodiment of the present invention, and is different from the sixth embodiment in that the number of resin application portions is reduced to one. is there. The member bonding device 70 includes the flat microlens array 31 and the glass substrate 32 at positions where the bonding surfaces are shifted in the same manner as the member bonding device 68 of FIG.
Plate supporting portions 42 and 43 that can support the
Is provided with one resin applying portion 49 disposed above the upper portion, and a dish-shaped resin reservoir portion 69 which can be moved in the horizontal direction. As shown in FIG. 16A, the resin application section 49
While the adhesive resin 33 can be dropped on the resin reservoir 69 moved just below the nozzle 51, FIG.
As shown in FIG.
The adhesive resin 33 can also be dropped on the upper surface of the flat microlens array 31 by leaving 9.

Then, the adhesive resin 33 is atomized and sprayed from the spray portion 48 onto a part or the whole of the flat microlens array 31 with the microlens array pattern 36 facing upward. After filling the irregularities, the resin reservoir 69 is positioned immediately below the nozzle 51 as shown in FIG. 16A, and an appropriate amount of the adhesive resin 33 is dropped onto the resin reservoir 69 from the resin application unit 49. Next, as shown in FIG.
To move a small amount of the adhesive resin 3 on the lower surface of the glass substrate 32.
3 is attached in the form of dots. A necessary and sufficient amount of the adhesive resin 33 is also dropped from the resin application section 49 onto the upper surface of the flat microlens array 31. After this, the flat plate support 42 or 43
In parallel, the flat microlens array 31 and the glass substrate 32 are opposed to each other, and the adhesive resin 33 attached to the glass substrate 32 is dripped onto the flat microlens array 31 in an icicle-like manner. 33. By providing one resin application section 49 in this way, the member bonding apparatus 68 of the sixth embodiment can be used.
As compared with the above, the configuration of the member bonding device 70 can be simplified. Further, compared to the sixth embodiment, one resin applying section 50 is not required, so that the member bonding apparatus 70 can be downsized.

In each of the above embodiments, the glass substrate 32 is bonded to the flat microlens array 31 with the adhesive resin 33 dropped and adhered to a part of the flat microlens array 31. Adhesive resin 3 on the entire surface
3 is sprayed, and the adhesive resin 33 is adhered to the entire surface of the flat microlens array 31.
The flat microlens array 31 and the glass substrate 32 can be joined while preventing air bubbles from being mixed into 3.

(Eighth Embodiment) FIGS. 17 and 18 are views for explaining a member bonding method according to an eighth embodiment of the present invention. Of these, FIGS. This shows a step of copying the lens array 31.
The flat plate shown in FIG. 17A is a stamper 71, which is obtained by transferring the microlens array pattern 36 from a master on which a prototype of the microlens array pattern 36 is formed. Is formed. The stamper 71 is made of a resin and has an appropriate flexibility.

In the step of duplicating the flat microlens array 31 by the stamper 71, first, as shown in FIG. 17A, a resin material 74 is sprayed upward from a spraying section 73 and sprayed. The resin material 74 is sprayed on a part or the whole of the inverted pattern 72 on the lower surface of the stamper 71 as shown in FIG. The resin material 74 is a transparent ultraviolet curable resin, but may be mixed with a fluorine-based solvent in order to improve the releasability from the stamper 71.

As shown in FIG. 17C, the nozzle 76 of the resin applying section 75 such as a dispenser is turned upward, and the resin is sprayed on the lower surface of the stamper 71 from above the resin material 74 sprayed by the resin applying section 75. A small amount of the same resin material 74 as above is adhered, and the resin material 74 hangs down on the lower surface of the stamper 71 like an icicle. Next, as shown in FIG. 17D, the nozzle 76 of the resin application section 75 is inverted downward, and the same resin material 74 is dropped on the upper surface of the base 77 in a necessary and sufficient amount. Here, the base material 77 is obtained by applying an adhesive resin layer 79 to the upper surface of a separator 78 made of a plastic sheet having ultraviolet transparency.

Thereafter, as shown in FIG. 17E, the stamper 71 is lowered, the stamper 71 is pressed against the substrate 77, and the resin material 74 on the lower surface of the stamper 71 is brought into contact with the resin material 74 on the upper surface of the substrate 77. Then, the stamper 71 is spread between the stamper 71 and the base material 77, and the parallelism between the stamper 71 and the base material 77 is obtained by pressing. Next, as shown in FIG. 17F, ultraviolet rays are irradiated on the ultraviolet-curable resin material 74 by an ultraviolet lamp or the like through the base material 77 to cure the resin material 74.

When the resin material 74 cures, it becomes a resin layer 80 on the surface of the substrate 77, and the microlens array pattern 36 is formed at the interface between the resin layer 80 and the stamper 71. When the resin layer 80 is completely cured, as shown in FIG. 17 (g), the stamper 71 is peeled from the resin layer 80 while curving, and the flat microlens array 31 as shown in FIG. 17 (h) is duplicated.

Next, FIGS. 18A to 18E are views showing steps of manufacturing a microlens array element using the flat microlens array 31 described above. First, FIG.
As shown in FIG.
The flat microlens array 31 is arranged with the lower side of the flat microlens array 31.
An adhesive resin 33 made of an ultraviolet curable resin is sprayed in a mist shape on a part or the entire lower surface of the microlens array pattern 36, and minute irregularities of the microlens array pattern 36 are filled with the adhesive resin 33. The adhesive resin 33 is a transparent resin having a different refractive index from the resin material 74.

Next, as shown in FIG. 18B, the nozzle 82 of the resin application section 81 such as a dispenser is turned upward, and the resin application section 81 starts the flat microlens array 31 from above the sprayed adhesive resin 33. A small amount of the same adhesive resin 33 as the resin is adhered to the lower surface of the flat microlens array 31, and the adhesive resin 33 hangs down from the lower surface of the flat microlens array 31 in an icicle shape. Further, as shown in FIG. 18C, the nozzle 82 of the resin application section 81 is turned downward, and the same adhesive resin 33 is dropped on the upper surface of the glass substrate 32 by a necessary and sufficient amount.

Thereafter, as shown in FIG. 18D, the flat microlens array 31 is lowered, the lower surface of the flat microlens array 31 is pressed against the glass substrate 32, and the adhesive resin 33 on the lower surface of the flat microlens array 31 is contacted. The adhesive resin 33 on the upper surface of the glass substrate 32 is brought into contact with and spread between the flat microlens array 31 and the glass substrate 32, and the parallelism between the flat microlens array 31 and the glass substrate 32 is obtained by pressing. Next, as shown in FIG. 18 (e), ultraviolet rays are irradiated to the ultraviolet-curable adhesive resin 33 through a glass substrate 32 by an ultraviolet lamp or the like, and the adhesive resin 33 is cured to obtain a microlens array element.

Thereafter, post-irradiation of ultraviolet rays is performed, and the microlens array element is baked at 85 ° C. for 1.2 hours to be fully cured. In this microlens array element, when the separator 78 is peeled off, the adhesive resin layer 79 is exposed, and the adhesive resin layer 79 can be directly attached to the surface of a liquid crystal display panel or the like.

Next, the technical background of this embodiment will be described in detail. When manufacturing a microlens array element, etc., usually, a plurality of concave and convex patterns are formed on a large flat microlens array (wafer), and after bonding this to a large glass substrate or a separator with a resin, It is cut into individual microlens array elements. For this reason, as shown in FIG. 19, a plurality of concavo-convex patterns 92 are formed in the coating material 91 such as the stamper 71 and the flat microlens array 31, and are formed on the surface of the coating material 91. Is the uneven pattern 92
Area 9 having no uneven pattern between pattern and uneven pattern 92
There are five. When the resin is applied to the material 91 from a nozzle such as a dispenser, if the resin is applied to an area 95 having no uneven pattern, such as a resin attachment area shown in FIG. It is difficult for gaps to be generated and for bubbles to be generated.

However, in order to obtain as many microlens array elements as possible from one coated material 91 to reduce costs, as shown in FIG.
It is necessary to provide a large number of uneven patterns 92 densely. Therefore, it becomes difficult to attach the resin to the region 95 having no uneven pattern, and the resin-attached region easily overlaps the uneven pattern 92. As a result, FIG.
As shown in (b), when the resin 93 supplied from the nozzle 94 such as a dispenser is attached to the concave / convex pattern 92,
Air is trapped between the concave portion 97 of the concave-convex pattern 92 and the resin 93, and a bubble 96 is generated in each concave portion 97 at the resin contact portion. Such bubbles 96 cause defects in optical characteristics such as a refractive index and a light transmittance, and cause a microlens array element to be cracked during ultrasonic cleaning, thereby lowering product yield. Was.

According to the results of various trials and errors in the process of arriving at the present invention, the manner of bubble generation depends on the bubble extinction time. In other words, even if bubbles are generated when the resin is applied to the material to be coated, there is no problem if the bubbles disappear after the bubbles are eliminated before the resin is cured by the irradiation of ultraviolet rays. When the resin to be discharged from the nozzle is applied to the stationary material to be applied 91, the bubble disappearance time is affected by the flow speed of the resin (or the air pressure at which the resin is fed), and the resin flow speed is reduced. It was found that the smaller the (air pressure), the shorter the bubble disappearance time.
In addition, it was also found that, when the coating material is applied to the coating material by approaching the coating material to a stationary nozzle, the bubble elimination time is shortened by reducing the approach speed of the coating material.

In the method of controlling the flow rate of the resin and the method of controlling the approaching speed of the material to be coated, the latter method was more effective. However, there was a limit in the precision of controlling the flow speed of the resin and the approach speed of the material to be coated. Further, since the viscosity of the resin changes with the temperature, the resin is easily affected by the ambient temperature.

Further, as a method of shortening the bubble extinction time when applying the resin to the material to be applied, a method of degassing the resin to give the resin itself a suction property was also effective.
However, it was found that even when the resin was degassed, the time for eliminating bubbles was short, just several seconds after the degassing treatment, and the time for eliminating bubbles was immediately increased. After applying the resin, the time required for the two flat plates to overlap and bring the resins into contact with each other is usually about 20 seconds, and the time required for applying the ultraviolet rays after the resin application is about 120 seconds. Did not actually take advantage of that effect.

On the other hand, it has been found that the method of spraying the resin in the form of a mist on the material to be coated as in the above embodiment is more effective in shortening the bubble elimination time than each of the above-mentioned comparison methods. . In particular, by devising the nozzle shape of the spraying unit for spraying the resin, the bubble disappearance time can be reduced to 0 seconds (that is, the generation of bubbles can be completely suppressed).
That is, as shown in FIG. 22A, when a straight cylindrical nozzle 94 is used, the resin 93 sprayed in a mist toward the material to be coated 91 spreads, so that the resin 93 is sprayed until it becomes completely wet. If you do not eliminate bubbles,
As shown in FIG. 2 (b), if a nozzle 94 having a tapered tip (for example, a conical shape) is used, the resin can be locally sprayed. And the effect of bubble extinction (ie, bubble elimination time 0)
Seconds).

(Ninth Embodiment) FIGS. 23A to 23E
FIGS. 24F to 24I are views for explaining a member bonding method according to the ninth embodiment of the present invention, and show a process of duplicating the flat microlens array 31 by the stamper 71. In the process of copying the flat microlens array 31 by the stamper 71, first, FIG.
As shown in (a), a fluorine-based solvent 98 is atomized and sprayed upward from a spraying section 99, and the entire surface of the lower surface of the stamper 71 is sprayed with the fluorine-based solvent 98 so that the surface of the reverse pattern 72 is swirled. Cover with.

Then, as shown in FIG. 23 (b), the resin material 74 is sprayed upward from the spray portion 73,
A resin material 74 is sprayed on a part or the entire lower surface of the stamper 71, and the resin material 74 is applied to the surface of the inverted pattern 72 as shown in FIG. 23C, and the unevenness of the inverted pattern 72 is filled with the resin material 74.

As shown in FIG. 23D, the nozzle 76 of the resin application section 75 such as a dispenser is turned upward, and the resin is sprayed on the lower surface of the stamper 71 from above the resin material 74 sprayed by the resin application section 75. A small amount of the same resin material 74 as above is adhered, and the resin material 74 hangs down on the lower surface of the stamper 71 like an icicle. Next, as shown in FIG. 23 (e), the nozzle 76 of the resin application section 75 is inverted downward, and the same resin material 74 is dropped on the upper surface of the base 77 in a necessary and sufficient amount.

Thereafter, as shown in FIG. 24 (f), the stamper 71 is lowered, the stamper 71 is pressed against the base material 77, and the resin material 74 on the lower surface of the stamper 71 is brought into contact with the resin material 74 on the upper surface of the base material 77. Then, the stamper 71 is spread between the stamper 71 and the base material 77, and the degree of parallelism between the stamper 71 and the base material 77 is obtained by pressing if necessary. Next, as shown in FIG. 24 (g), ultraviolet rays are irradiated to the ultraviolet-curable resin material 74 by an ultraviolet lamp or the like through the base material 77 to cure the resin material 74.

When the resin material 74 cures, it becomes a resin layer 80 on the surface of the substrate 77, and the microlens array pattern 36 is formed at the interface between the resin layer 80 and the stamper 71. When the resin layer 80 is completely cured, as shown in FIG. 24 (h), the stamper 71 is peeled from the resin layer 80 while curving, and the flat microlens array 31 as shown in FIG. 24 (i) is duplicated.

By spraying the fluorine-based solvent on the lower surface of the stamper 71 first, the stress at the time of peeling the stamper can be reduced. Therefore, when the stamper 71 is separated, a part of the cured resin
Can be prevented from being peeled off from the substrate 77 while being adhered to the stamper 71, and the stamper 71 can be peeled cleanly.
Also, a fluorine-based solvent 98 is sprayed on the lower surface of the stamper 71 by spraying.
Is applied, the fluorine-based solvent 98 can be applied uniformly, and the fluorine-based solvent 98 and the stamper 71 can be applied uniformly.
No air bubbles are caught between them.

(Structure of Spraying Apparatus) The structure of the spraying apparatus (spraying section 48) used in the member bonding apparatus of the present invention is not particularly limited. explain. FIG. 25 is a perspective view showing the structure of the spray device. On the surface of a piezoelectric substrate 101 made of a piezoelectric material such as lithium niobate single crystal, two comb-shaped interdigital transducers (IDTs) 10 are provided.
2 and 103 are provided.
A high frequency power supply 104 of about 6 MHz is connected to 103. In addition, an end of the piezoelectric substrate 101 is
5 is provided, and a mesh material 106 is arranged so as to correspond to a region between the interdigital transducers 102 and 103 and the vibration reflecting portion 105. The mesh member 106 is provided with a large number of fine holes 107 having a center value of the hole diameter distribution of 8 μm.

The spraying apparatus using the surface acoustic wave generating device utilizes a plate vibration caused by a bulk wave traveling inside as a vibration mode. Thus, FIG.
As shown in FIG. 3, when the resin 108 is continuously supplied to the surface of the piezoelectric substrate 101 and driven by the high-frequency power supply 104, the interdigital electrodes 102 and 103 generate electric signals on the surface of the piezoelectric substrate 101 by surface acoustic wave vibration (ultrasonic vibration). ). Due to the surface acoustic wave vibration, the piezoelectric substrate 10
The resin 108 that is in contact with the surface of the mesh material 106 is evaporated as fine particles 109, and only those that have passed through the fine holes 107 of the mesh material 106 are ejected from the spray device. As a result, the resin 108 has about 80% of all the spray particles as 1 to 8 μm.
m, and is sprayed on the material to be coated 91.

[0083]

According to the member bonding method and apparatus of the present invention, when bonding a plurality of members with a resin, the members can be bonded without entrapping air bubbles between the members or in the resin. Therefore, for example, in a process of manufacturing an optical component, it is possible to prevent abnormal light transmittance and refractive index due to bubbles.

According to another member bonding method of the present invention, the fluorine-based solvent is atomized and sprayed so that the members are easily separated from the resin after the members are bonded. Will be able to

[Brief description of the drawings]

1 (a) to 1 (e) are views showing a manufacturing process of a microlens array element according to a conventional example, which shows a process until a transparent resin layer is formed.

FIGS. 2 (f) to (i) are continuation diagrams of FIG. 1 and show steps from the formation of the transparent resin layer to the manufacture of the microlens array element.

FIGS. 3A and 3B are explanatory views showing, in an enlarged manner, a state in which a stamper comes into contact with an ultraviolet curable resin.

FIGS. 4A to 4D are diagrams illustrating another conventional method for bonding two flat plates with an adhesive resin.

FIG. 5 is an enlarged cross-sectional view showing a state in which the adhesive resin hanging down on the lower surface of the flat plate and the adhesive resin of the lower flat plate are in contact with each other and the contact area is increased.

FIGS. 6 (a), (b) and (c) are views for explaining a mechanism of generating bubbles in the adhesive resin in the step of FIG. 4 (a).

FIGS. 7A to 7D are diagrams illustrating a mechanism of generating bubbles in the ultraviolet curable resin when the ultraviolet curable resin is applied to the transparent resin layer on the lower surface of the glass substrate.

FIG. 8 is a first embodiment of the present invention, wherein (a) to
(F) is a schematic diagram showing a step of bonding a flat plate microlens array and a glass substrate with an adhesive resin.

FIGS. 9 (a) to 9 (e) are views for explaining a state in which an adhesive resin is further applied on the adhesive resin sprayed onto the flat microlens array.

FIGS. 10A and 10B are a partially broken front view and a partially broken side view showing an example of a member bonding apparatus for performing the member bonding method of FIG.

FIGS. 11A and 11B are diagrams for explaining a second embodiment of the present invention.

FIGS. 12A and 12B are diagrams illustrating a third embodiment of the present invention.

FIGS. 13A and 13B are diagrams illustrating a fourth embodiment of the present invention.

FIGS. 14A and 14B are diagrams illustrating a fifth embodiment of the present invention.

FIGS. 15A and 15B are diagrams illustrating a member bonding apparatus according to a sixth embodiment of the present invention.

FIGS. 16A and 16B are diagrams illustrating a member bonding apparatus according to a seventh embodiment of the present invention.

17 (a) to (h) are diagrams illustrating a process of replicating a flat microlens array in a member bonding method according to an eighth embodiment of the present invention.

FIG. 18 is a continuation view of FIG. 17, wherein (a) to (e) show steps of manufacturing a microlens array element by bonding a flat microlens array and a glass substrate.

FIG. 19 is a view showing a coating material formed by partitioning a plurality of uneven patterns.

FIG. 20 is a diagram showing a coating material densely formed by partitioning a plurality of uneven patterns.

FIGS. 21 (a) and (b) are views for explaining a state in which bubbles are generated between the uneven pattern and the resin when the resin supplied from the nozzle adheres to the uneven pattern.

FIG. 22A is a schematic view showing a state in which a resin is sprayed in a mist form from a straight cylindrical nozzle, and FIG. 22B is a view showing a state in which a resin is sprayed in a mist form from a nozzle having a tapered tip. It is a schematic diagram.

FIGS. 23A to 23E are diagrams illustrating a member bonding method according to a ninth embodiment of the present invention.

24 (f) to (i) are continuation diagrams of FIG. 23.

FIG. 25 is a perspective view showing the structure of the spray device.

FIG. 26 is a schematic cross-sectional view showing how a resin is sprayed from the spray device.

[Explanation of symbols]

 Reference Signs List 31 flat plate microlens array 32 glass substrate 33 adhesive resin 36 microlens array pattern 41 member bonding device 42 flat plate support unit 43 flat plate support unit 48 spray unit 49 resin application unit 50 resin application unit 71 stamper 73 spray unit 74 resin material 75 resin Giving part 77 Base material 80 Resin layer 81 Resin giving part

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C09J 5/00 C09J 5/00 G02B 3/00 G02B 3/00 AZ // B29L 11:00 B29L 11: 00 F term (reference) 4D075 AA01 AC01 AE03 BB46Y BB46Z BB69X DA06 DB13 DC21 EA05 EA21 EC30 4F211 AD04 AD05 AG03 AH74 TA03 TC01 TD11 TN45 TN60 TW33 TW34 4J040 DN071 EL051 KA03 MB03 MB09 PA25P

Claims (9)

[Claims] 1. A method of bonding one member and the other member with a resin, wherein the resin is applied to a bonding surface of the member by atomizing the resin on at least one member. A member bonding method, wherein a member and another member are bonded via a resin. 2. The member bonding method according to claim 1, wherein the resin is locally sprayed on a bonding surface of at least one of the members. 3. The member bonding method according to claim 1, wherein the resin is sprayed onto a bonding surface of at least one of the members, and then the resin is coated on the resin by another coating unit. Method. 4. A surface of any one of the members to which the resin is sprayed has irregularities, and a particle diameter of the resin sprayed in a mist is smaller than a size of the irregularities.
The member bonding method according to claim 1. 5. The resin applied to the lower surface of one member is made to hang down from the lower surface of the member, and the resin applied to the upper surface of the other member is raised to the upper surface of the resin. The member bonding method according to claim 1, wherein the lower member and the upper surface of the other member are overlapped to bond both members. 6. One of the members has at least one surface with irregularities, and the resin is sprayed on the lower surface of the member with the uneven surface of the one member facing the lower surface side, and then sprayed from above the resin. The member bonding method according to claim 5, wherein the resin is attached to the lower surface of one of the members by another coating means so that the resin hangs down. 7. A member comprising: means for holding one member; means for holding the other member; and spraying means for spraying the resin held in at least one holding means with a resin in a mist state. Laminating device. 8. The member bonding apparatus according to claim 7, further comprising a resin applying means for applying a resin to the member held by the holding member by a coating method different from the spraying means. 9. A method of bonding one member and the other member with a resin, wherein after spraying a fluorinated solvent into at least one member in a mist state, the member and the other member are interposed via a resin. A member bonding method characterized by bonding.