JP2002277753A - Inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To insert and pull out a mirror for guiding an image obtained by a microscopic head part to a relay lens in/from an optical axis. SOLUTION: A cylindrical slider 50 integrally provided with a mirror 32 on the optical axis a1 side of the microscopic head part 20 is moved in the optical axis a2 direction of an extended relay lens barrel with respect to a rely lens barrel 10 by the driving of a direct driving source 53, and the mirror 32 is set on the optical axis a1 of the head part 20 or the mirror 32 is removed from the optical axis a1 and retreated into the lens barrel 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus applied to an inspection object such as a glass substrate of a large liquid crystal display (LCD).

[0002]

2. Description of the Related Art In such a method of observing through a microscope as such an inspection, for example, as described in Japanese Patent Application Laid-Open Nos. 5-127088 and 10-111253, an objective optical system including an objective lens is used. The image of the test object is sent to the observation optical system including the eyepiece through the relay lens optical system, the objective lens is moved in one direction along the plane of the test object, and the stage on which the test object is mounted is mounted on the objective lens. In the other direction that intersects the one direction, so that the entire inspection object can be observed.

[0003]

In the above-mentioned microscope, a relay lens is incorporated by reflecting (deflecting) an image of an object to be inspected obtained by an objective optical system comprising an objective lens and an imaging lens by a reflecting mirror (mirror). The image is guided to an extension relay barrel, and the image of the inspection object transmitted by the relay lens optical system is visually observed through an eyepiece of the observation optical system. An imaging device such as a CCD camera is attached to the eyepiece tube of the observation optical system, and an image of the inspection object captured by the imaging device is displayed on a monitor and observed.

In particular, the size of a glass substrate of a liquid crystal display to be inspected has been increasing, and at present, 100
Some of them exceed 0 mm. In order to visually inspect such a large glass substrate, it is necessary to lengthen the extension relay barrel that transmits an image obtained by the objective optical system to the observation optical system. In order to lengthen the extension relay barrel, a plurality of relay lens optical systems for transmitting an image of the object to be inspected obtained by the objective optical system are required, and light transmittance is reduced by increasing the number of relay lenses.

As described above, the amount of light to be imaged via a plurality of relay lens optical systems is reduced, resulting in a dark image, which reduces the appearance, and is used in various measuring devices requiring an appropriate amount of light such as a spectrometer. The problem that it cannot tolerate.

Accordingly, an object of the present invention is to provide an inspection apparatus capable of inserting and removing a mirror for guiding an image obtained by a microscope head to a relay lens with respect to an optical axis.

[0007]

According to a first aspect of the present invention, there is provided a microscope head provided with an objective optical system for obtaining an image of an object to be inspected, and an image obtained by the microscope head is reconstructed. A first and a second relay lens optics having a plurality of relay lens optics for imaging and being rotatably insulated from each other via a relay connecting portion;
And an observation optical system whose position is fixed for observing the image re-formed by the first and second extension relay barrels, and obtained by the objective optical system. An optical path deflecting optical element for deflecting an image toward the first and second extension relay barrels; and an optical path deflection optical element at a tip end of the first or second extension relay barrel on the side where the microscope head is mounted. A moving holder for holding the optical element movably in the deflection direction; and a driving unit for moving the moving holder to a position where the optical path deflecting optical element is retracted from the optical axis of the microscope head. An inspection apparatus characterized by the following.

According to a second aspect of the present invention, in the inspection apparatus of the first aspect, the optical path deflecting optical element is a mirror or a prism.

According to a third aspect of the present invention, in the inspection apparatus according to the first aspect, various measuring devices are mounted on the optical axis of the microscope head portion where the optical path deflecting optical element is retracted.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 1 and 2 are configuration diagrams of the inspection apparatus. FIG. 1 is a side view, and FIG. 2 is a top view.

First, the structure of the inspection apparatus will be described. The fixed base 1 for the observation lens barrel is provided on the base of the inspection apparatus main body or on the column of the portal arm 49. On this fixed base 1,
The observation lens barrel 2 is fixed in position. An eyepiece tube section 3 is provided above the observation tube 2.

A rotatable relay connecting barrel 6 is connected to the side of the observation barrel 2 via a plurality of relay barrels, for example, three relay barrels 4, 5, and 5a. A plurality of relay barrels, for example, four relay barrels 7 to 10 are connected from the barrel 6.

The relay connection barrel 6 is composed of a first extension relay barrel connecting three relay barrels 4, 5, and 5a and a second extension relay barrel connecting four relay barrels 7 to 10. Are provided rotatably so that the angles formed by the relay barrels 4, 5, 5a and the relay barrels 7 to 10 can be changed mutually. This relay connection lens barrel 6
Consists of a first connecting portion 11 and a second connecting portion 12,
Relay barrels 4, 5, and 5a are connected to the first connecting portion 11, and relay barrels 7 to 10 are connected to the second connecting portion 12. These connecting portions 11 and 12 are provided rotatably with respect to each other, for example, via a ball bearing 13.

A movable sliding portion 15 is provided at the bottom of the second connecting portion 12 via a connecting support arm 14. The movable sliding portion 15 is rotatably provided, for example, via a ball bearing 19 with respect to a movable support 18 which moves on two linear guides 16 and 17 provided at a predetermined interval in parallel with each other. Have been. The moving support 18 is provided movably on the two linear guides 16 and 17 in the direction of arrow B as shown in FIG.
As shown in the drawing, the movable support 18 is provided so as to be movable in the direction of arrow C.

The two linear guides 16 and 17 are laid on the upper surface of a horizontal arm portion of a portal arm 49 that straddles a stage 48 that can move in one direction (the direction of arrow X).

A microscope head 20 constituting an objective optical system is provided at the tip of the relay barrel 10 constituting the second extension relay barrel. This microscope head 20
Has a plurality of objective lenses 21 and 22 attached to an electric revolver, and one of the objective lenses 21 and 22 is replaceable on the optical axis. The microscope head unit 20 includes the relay barrel 10
Is rotatably fitted via a fitting portion 24 to a holding body 23 provided at the tip of the.

The microscope head section 20 is mounted on a microscope head base 30 as shown in FIG. The microscope head base 30 is mounted on the two linear guides 16 and 17 and is movable in the same direction as the arrow B.

Therefore, for example, the microscope head base 30
Is reciprocated in the direction of arrow B shown in FIG. 2 by a driving unit (not shown), and the moving support 18 reciprocates along the linear guides 16 and 17 in conjunction with the reciprocation of the microscope head base 30. The moving sliding portion 15 reciprocates on the moving support 18 in the direction of arrow C in conjunction with the moving support 18. FIG. 3 is a diagram showing the microscope head unit 20 moving to the left in the drawing.

Next, the optical system will be described. On the optical axis a passing through the objective lens 21, an imaging lens 31 for imaging an image obtained by the objective lens 21 is provided on a holding body 23 provided at the tip of the second extension relay barrel. Have been. Since the image obtained by the objective lens 21 is shaped into parallel light and enters the image forming lens 31, the image formed by the image forming lens 31 is re-formed at the image forming position Q ₁ as a primary image. Form an image.

In the holder 23, a mirror 32 as an optical path deflecting optical element is disposed on the optical axis a. The mirror 32 reflects (deflects) an image formed by the imaging lens 31 toward each of the relay barrels 10 to 7 (second extended relay barrel). In the relay lens barrel 9,8, relay lenses constituting the first relay lens optical system for transmitting the imaged into an imaging position Q ₁ image on the imaging position Q ₂ by the imaging lens 31 33-34 Is provided. The operation of the mirror 32 does not change even if it is replaced with a prism.

Mirrors 36 and 37 are provided at positions opposing each other in the relay connection lens barrel 6, and the mirror 36 transfers an image from the relay lens 35 to the mirror 37.
The mirror 37 reflects the image from the mirror 36 toward the inside of each of the relay barrels 5a, 5 and 4. Relay barrel 7,5A, the 5, the first second relay lens optical system to transmit secondary image formed on the imaging position Q ₂ in the imaging position Q ₃ by the relay lens optical system Constituting relay lenses 35, 38a, 38 are provided.

In the observation lens barrel 2, a mirror 45 is provided on the optical axis a.
Is provided. This mirror 45 is used for the relay lens 3
The image from 9a is reflected toward the inside of the eyepiece tube part 3. A relay lens constituting a third relay lens optical system for transmitting the tertiary image formed at the image forming position Q3 by the second relay lens optical system to the image forming position of the eyepiece in the relay lens barrel 4. 39 and 39a are provided.

With these first to third relay lens optical systems, the primary images of the objective optical system are re-imaged in the imaging position Q ₂ , the imaging position Q ₃ , and the eyepiece.

Further, apertures 41 to 41 are provided on the image forming lens 31 side of the first to third relay lens optical systems, respectively.
44 are provided.

A mirror 45 is provided inside the observation lens barrel 2, and the relay lenses 33 to 35, 38a, 38, 3
9 and 39a are sent to the eyepiece 46 of the eyepiece tube 3.

On the other hand, a glass substrate 47 of a large liquid crystal display as an object to be inspected is mounted on a stage 48. The microscope head unit 20 reciprocates in the arrow Y direction, and the stage 48 on which the glass substrate 47 is mounted is moved in the arrow X direction orthogonal to the moving direction of the microscope head unit 20, so that the entire surface of the glass substrate 47 is observed. it can.

Next, the microscope head 20 and the holder 23
Will be described with reference to FIG.

The mirror 32 has an optical axis a ₁ between an image forming lens 31 for forming an image obtained by the microscope head unit 20 and an image forming position Q ₁ of a primary image formed by the image forming lens 31.
In the same the optical axis a ₂ of the optical axis a ₁ rotatable about axis and first relay lens optical system incorporated in the second extension relay barrel (relay lens 33-34) It is arranged so that it can be inserted and removed in the direction.

That is, the relay barrel 1 which is the tip of the second extension relay barrel to which the microscope head 2 is attached.
0, there is a cylindrical slider 5 as a cylindrical moving holder.
0 is provided movably. This cylindrical slider 50
Microscope mirror 32 to the optical axis a ₁ of the head portion 20 is provided obliquely at an angle 45 ° with respect to the optical axis a _1, and the primary image of the imaging position Q ₁ side in the aperture 51 of Is formed. Figure 5 is a view from the optical axis a ₂ direction of the relay lens barrel 10 and the cylindrical slider 50. A cylindrical slider 50 is movably provided on the inner peripheral side of the relay barrel 10, and a wear-resistant portion 52 made of, for example, a resin such as plastic is provided at a portion below the cylindrical slider 50 that contacts the relay barrel 10. ing.

A linear drive source 53 as a driving means for moving the cylindrical slider 50 with respect to the relay barrels 10, 9 is provided on the upper outside of the relay barrels 9, 10. The cylindrical slider 50 is connected to the drive shaft 54 of the linear drive source 53 via a connector 55. The linear motion drive source 53 has a one which linear motion of the drive shaft 54 to the optical axis a ₂ in the same direction. Therefore, the linear drive source 53 is
When the linear motion 4 is performed, the cylindrical slider 50 moves in the relay lens barrel 10 via the coupling body 55, and the mirror 32 is indicated by a solid line in FIG. becomes to or retracted or set on the optical axis a _1, or the mirror 32 from above the optical axis a ₁ as indicated by the two-dot chain line in FIG. 4 to the relay barrel 10 as.

The mirror 32 is connected to the optical axis a of the microscope head 20.
_As shown in FIG. 6, the click mechanism 56 provided corresponding to the setting position on the connecting body 5
5 stops at that position.

On the upper part of the holding member 23 provided at the tip of the relay barrel 10, various measuring devices such as CC
An imaging device 60 such as D is attached. That is,
When the mirror 32 is retracted into the relay barrel 10, the image from the objective lens 21 of the microscope head 20 goes straight through the imaging lens 31 and forms an image at an imaging position Q ₄ on the optical axis b. . Thus, the imaging device 60 is attached to the holding member 23 by matching on the optical axis b to image an image of the glass substrate 47 at the imaging position Q _4.

On the upper part of the holder 23, not only the imaging device 60 but also various measuring devices such as a spectrometer and an observation head for observing an image on the glass substrate 47 can be replaced and mounted.

Next, the operation of the device configured as described above will be described.

Glass substrate 47 for large liquid crystal display
When the microscope head base 30 is reciprocated in the direction of arrow B shown in FIG. 2 by, for example, a drive unit (not shown), the movable support 18 is interlocked with the reciprocation of the microscope head base 30. Are linear guides 16 and 17
Reciprocating in the direction of the arrow B along with the arrow, and the movable sliding portion 15 reciprocates in the direction of the arrow C on the movable support 18 in conjunction with the movable support 18, and the first and second extension relay mirrors. The tube is composed of the holder 23, the relay connection lens barrel 6, and the observation lens barrel 2.
Is rotated to bend at a predetermined angle. Thus, it is possible to scan the objective lens 21 in the Y direction without changing the optical path length from the eyepiece 46 to the objective lens 21.

By scanning the stage 48 in the X direction together with the scanning of the objective lens 21 in the Y direction, the entire surface of the glass substrate 47 is observed.

The objective lens 21 of the microscope head 20
Image of the glass substrate 47 obtained through is incident on the imaging lens 31 as parallel light, enters the relay lens barrel 10 is reflected by the mirror 32, forms an image at the imaging position Q ₁ as a primary image . Furthermore, the primary image is imaged at an imaging position Q ₂ by the relay lens 33-34 of the first relay lens optical system as a second image. This secondary image is formed as a tertiary image at the image forming position Q3 by the relay lens 35 of the second relay lens optical system, the mirrors 36 and 37 in the relay connection lens barrel 6, and the relay lenses 38a and 38. Is done. This tertiary image is transmitted to each relay lens 3 of the third relay lens optical system.
An image is formed in the eyepiece 46 of the observation optical system by the mirrors 45, 9, 39a.

Then, the image of the glass substrate 47 by the objective lens 21 is passed through the first and second extension relay lens barrels incorporating the first to third relay lens optical systems, and the observation lens barrel 2 is displayed.
The light is reflected by a mirror 45 inside, enters the eyepiece tube 3, and is observed through an eyepiece 46.

It is required that the image of the glass substrate 47 obtained by the microscope head unit 20 be directly taken by the imaging device 60 in accordance with the defect inspection of the glass substrate 47. In this case, the imaging device 60 is attached to the upper part of the holder 23.

On the other hand, the linear drive source 53 linearly operates the drive shaft 54. Since this linear motion is transmitted to the cylindrical slider 50 via the connecting body 55, the cylindrical slider 50
Moves in the relay barrel 10 and moves leftward in the drawing. Thereby, the mirror 32 is connected to the microscope head 2.
0 deviates from the optical axis a ₁ of retreats to relay barrel 10.

In this state, the image of the glass substrate 47 obtained by the microscope head 20 is formed by the imaging lens 31 in the image pickup device 60 on the optical axis b. However,
The imaging device 60 captures an image of the glass substrate 47 formed by the imaging lens 31.

When a spectrometer is attached to the upper part of the holder 23 instead of the imaging device 60, the spectrometer measures the spectrum of the image of the glass substrate 47 formed by the imaging lens 31.

In the defect inspection of the glass substrate 47, the microscope head unit 20 is replaced according to the type of the glass substrate 47 and the inspection method. Even when the microscope head unit 20 is replaced, the image of the glass substrate 47 obtained through the infinity objective lens 21 of the microscope head unit 20 is incident on the imaging lens 31 as parallel light, as described above. Therefore,
If the imaging lens 31 is arranged at the tip of the extension relay barrel, the image position in the relay lens optical system can be brought into focus, so that the image on the glass substrate 47 can be favorably observed through the eyepiece 46.

As described above, in one embodiment,
Moving the cylindrical slider 50 having a mirror 32 integrally with the optical axis a ₂ direction of extension relay barrel to the relay lens barrel 10 by the driving of the linear motion drive source 53 to the optical axis a ₁ side of the microscope head portion 20 And the mirror 32 to the optical axis a of the microscope head 20.
Or set on _1, or since so as to retract the relay barrel 10 of the mirror 32 removed from above the optical axis a _1, directly e.g. CC images obtained by the microscope head portion 20
The imaging device 60 such as a D camera or various measuring devices such as a spectrometer can perform imaging or spectroscopic measurement of the image, and can broaden the observation, inspection, and measurement of the glass substrate 47. In particular, even if the microscope head unit 20 and the imaging device 60 rotate with respect to the relay barrel 10 when the microscope head unit 20 that performs high-precision measurement reciprocates in the same direction as the arrow B, the microscope head Part 20
The imaging device 60 and the measuring devices on the optical axis b are not displaced from each other, and are hardly affected by aberration by the relay lens optical system, so that high-precision imaging can be performed.

In the line inspection of the liquid crystal display, it is desired that the image of the glass substrate 47 captured by the image pickup device 60 is displayed on a monitor and constantly observed, and only when there is a problem, it is visually observed with an eyepiece. I have. In this case, since the imaging device that is always used is attached to the microscope head unit 20, the light amount loss due to the relay lens optical system is eliminated, so that the voltage of the light source can be suppressed lower than when attached to the eyepiece tube unit. As a result, the life of the light source can be extended.

[0046] Also, when re-setting the mirror 32 on the optical axis a ₁ of the microscope head unit 20, since the click mechanism 56 provided corresponding to a position to re-set to stop in that position, to re-set It is not necessary to adjust the position of the mirror 32 at that time.

The present invention is not limited to the above-described embodiment, and can be variously modified in the practical stage without departing from the scope of the invention.

Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent features. For example, even if some components are deleted from all the components shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the problem described in the column of the effect of the invention can be solved. In the case where the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.

[0049]

As described above, according to the present invention, it is possible to provide an inspection apparatus capable of inserting and removing a mirror for guiding an image obtained by a microscope head to a relay lens with respect to an optical axis.

[Brief description of the drawings]

FIG. 1 is a side view showing a configuration of an embodiment of an inspection apparatus according to the present invention.

FIG. 2 is a configuration diagram showing one embodiment of the inspection apparatus according to the present invention, viewed from above.

FIG. 3 is a diagram showing a movement of a microscope head in an embodiment of the inspection apparatus according to the present invention.

FIG. 4 is a specific configuration diagram of a microscope head unit in one embodiment of the inspection device according to the present invention.

FIG. 5 is a view of a relay barrel and a cylindrical thruster according to an embodiment of the inspection apparatus according to the present invention, as viewed from the optical axis direction.

FIG. 6 is a configuration diagram of a click mechanism in an embodiment of the inspection device according to the present invention.

[Explanation of symbols]

1: Fixed stage 2: Observation lens barrel 3: Eyepiece tube part 4, 5, 5a, 7, 8, 9, 10: Relay lens tube 6: Relay connection lens tube part 11: Connection part 12: Connection part 13, 19 : Ball bearing 14: Connection support arm 15: Moving sliding part 16, 17: Linear guide 18: Moving support 20: Microscope head 21, 22: Objective lens 23: Holder 24: Fitting part 30: Microscope head Mount 31: imaging lens 32: mirror 33-35, 38, 38a, 39, 39a: relay lens 36, 37: mirror 40-44: aperture 46: eyepiece 47: glass substrate 48: stage 49: portal arm 50 : Cylinder slider 51: Aperture 52: Abrasion resistant part 53: Direct drive source 54: Drive shaft 55: Connected body 56: Click mechanism 60: Imaging device

Claims (3)

[Claims] 1. A relay comprising: a microscope head provided with an objective optical system for obtaining an image of an object to be inspected; and a plurality of relay lens optical systems for re-forming an image obtained by the microscope head. First and second extension relay barrels rotatably insulated from each other via a connecting portion, and a position for observing the image re-imaged by the first and second extension relay barrels. A fixed observation optical system, an optical path deflecting optical element for deflecting an image obtained by the objective optical system toward the first and second extension relay barrels, A moving holder for holding the optical path deflecting optical element at the distal end of the first or second extension relay barrel so as to be movable in the deflection direction; From the optical axis of the An inspection apparatus comprising: 2. The inspection apparatus according to claim 1, wherein the optical path deflecting optical element is a mirror or a prism. 3. The inspection apparatus according to claim 1, wherein various measuring devices are mounted on an optical axis of the microscope head portion in which the optical path deflecting optical element is retracted.