JP2002277203A - Surface texture measuring machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a surface texture measuring machine at comparatively inexpensive manufacturing cost capable of easily obtaining degree of protrusion of a rod-shaped casing supporting a stylus from a measuring machine main body housing, i.e., traceability. SOLUTION: A rotatable arm member 52 is rotatably mounted to the rod- shaped casing 11 fixed to a slider 23 supported in the measuring machine main body housing 21 in such a way as to be moved forward and backward, and a stylus arm 53 with the stylus 13 at its tip is detachably fixed to the arm member 52 in the surface texture measuring machine. Visual observation memories 37 and 38 extended in the directions of forward and backward movements of the slider 23 are provided for the outer surface of the rod-shaped casing 11 exposed to the outside from a housing end plate 21B or the slider 23, and the traceable distance of the stylus 13 is displayed by the visual observation memories 37 and 38 in the surface texture measuring machine.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture measuring device for measuring the surface roughness, undulation, shape and the like of an object to be measured.
In particular, the present invention relates to a surface texture measuring instrument having a detector having a stylus at a tip.

[0002]

2. Description of the Related Art As is well known, in a surface texture measuring device having a detector having a stylus (sensor) at a tip, displacement of a stylus (stylus arm) is caused by moving a stylus along a work surface. Is taken as data. For example, in a small surface texture measuring device as disclosed in Japanese Patent Application No. 11-310941, when measuring the roughness of the work surface,
In many cases, the required trace distance could not be secured, and the measurement had to be repeated with the installation state of the surface texture measuring instrument changed.

[0003] That is, this small surface texture measuring device has a rotatable arm member rotatably mounted on a rod-shaped casing fixed to a slider supported in a housing so as to be able to move forward and backward, and has a stylus at the tip. Since the stylus arm is configured to be detachably fixed to the arm member,
In the case of normal roughness measurement of the work surface, the rod-shaped casing is advanced from the housing to the movable limit and pulled out, and the rod-shaped casing is retracted from the housing by a distance sufficiently larger than the backlash amount, and measurement of the retracted position is started. Since the workpiece surface is traced as a point, the retreat distance of the slider is sufficiently ensured, and the required trace distance can be measured without special confirmation.

However, when measuring the surface roughness of a specific surface position of a workpiece, it may be difficult to make the specific surface position coincide with the above-described measurement start point. For example, when the surface portion of the workpiece to be measured is very small, it is difficult to set the positional relationship between the workpiece and the housing containing the driving section of the rod-shaped casing by visual observation. For this reason, in the case of measuring such a small specific part, the measuring machine main body (housing) is mounted on the work in a state where the rod-shaped casing is once pulled out to the movable limit, and the stylus arm is moved while slowly retracting the rod-shaped casing. After observing the amount of displacement to find a specific part, and setting a measurement start position near the specific part, a necessary trace distance is measured from the measurement start position.

[0005]

However, in the case of a measurement in which the position to be measured cannot be visually confirmed, the distance from the movable limit of the rod-shaped casing to the above-described measurement start position is not constant, and the distance from the set measurement start position is not fixed. Since the remaining retreat distance of the slider supporting the rod-shaped casing cannot be specified, it is often necessary to find out that there is no necessary trace distance after starting the measurement, and to repeat the measurement itself. In other words, in order to perform the measurement itself again, the measuring device body (housing) is separated from the work and reset, and after a sufficient retreat distance is secured from the measurement start position of the rod-shaped casing, the measurement start operation described above is performed again. It has to be done, which makes the measurement task cumbersome.

Of course, the large surface texture measuring instrument has a linear scale indicating the current position in the trace direction of the slider on which the fine detector is mounted. Can be checked in advance. However, in the small surface texture measuring device as described above, there is no method for objectively indicating the current position of the rod-shaped casing (detector), and it has been impossible to avoid re-measurement.

An object of the present invention is to reduce the amount of protrusion of the rod-shaped casing supporting the stylus stylus from the housing of the measuring instrument main body, that is, the traceable distance in view of the current state of the conventional small surface texture measuring instrument as described above. The aim is to obtain a surface texture measuring instrument that can be easily known and inexpensive to manufacture.

[0008]

According to the present invention, a sensor for measuring the surface of a workpiece is fixed to a rod-like casing fixed to a slider which is supported in a main body housing of the measuring machine so as to be able to move forward and backward. In the surface texture measuring device, a visual memory is provided on an outer surface of the rod-shaped casing exposed to the outside from the housing end plate or the slider, and a visual memory extending in a moving direction of the slider is provided, and the traceable distance of the sensor is provided by the visual memory. Is proposed.

In the following description of a preferred embodiment of the present invention, 1) the visual memory is a scale sheet printed with a length scale on the surface and attached to the outer surface of the rod-shaped casing; 2) The configuration in which the visual memory is directly engraved or printed on the outer surface of the rod-shaped casing will be described.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall perspective view of a surface texture measuring apparatus according to an embodiment of the present invention, with a housing removed. In FIG. 1, a surface property measuring device includes a detector 10 for measuring the property of a measurement surface of an object to be measured, a measuring device main body housing 21 including a driving unit 20 for moving the detector 10 forward and backward along the measurement surface. Is provided. Drive unit 2
Reference numeral 0 denotes a slider guide 22 having a substantially gate-shaped cross section fixed in a box-shaped housing 21 in the longitudinal direction, and a slider 23 having the detector 10 attached to the slider guide 22 is slidably provided in the longitudinal direction. And a reciprocating mechanism 24 for reciprocating the slider 23 along the longitudinal direction.

The reciprocating mechanism 24 includes a feed screw shaft 25 disposed in the housing 21, a nut member 27 screwed to the feed screw shaft 25 and connected to the slider 23 via a connecting member 26, and a feed screw shaft. And a rotation drive mechanism 28 for rotating the drive 25. Feed screw shaft 25
Are arranged in parallel with the longitudinal direction of the slider guide 22,
Both ends are rotatably fixed to the housing 21 via bearings. The rotation drive mechanism 28 includes the feed screw shaft 25
, And first and second gears 30 and 31 for transmitting forward and reverse rotation of the motor to the feed screw shaft 25. The feed screw shaft 25 and the motor 29 are mounted on a mounting block 21 </ b> A provided inside the housing 21.

The inner surface of the slider 23 is formed in a U-shaped cross section, and one side surface of the inner surfaces facing each other is a first reference surface. The first reference surface is in contact with one outer surface (first reference surface 22A) of the slider guide 22.
In order to position the slider 23 and the slider guide 22 between the first reference surfaces, two positioning leaf springs 32 are attached to one side of the slider 23. A pad 33 for ensuring smooth sliding between the slider 23 and the slider guide 22 is attached to an open end of the positioning leaf spring 32. This pad 3
3 is formed using a material having a small friction coefficient such as Teflon.

The slider 23 has a second reference surface 23B, which is a surface perpendicular to the first reference surface, of the inner surface having a U-shaped cross section, and the second reference surface 23B is a first reference surface 22A of the slider guide 22. Outer surface (second reference surface 22B) orthogonal to
Contacted. 2, a holding block 34 for preventing the slider 23 from coming off is attached to an open end of the slider 23 (only one side is shown in FIG. 2) with a screw 34A.
The holding block 34 is provided with a positioning leaf spring 35 for fixing the second reference surface of the slider 23 to the second reference surface of the slider guide 22 with screws 35A. The positioning leaf spring 35 is provided with a pad 36 for ensuring smooth sliding between the slider 23 and the slider guide 22. The pad 36 is formed using a material having a small coefficient of friction such as Teflon (registered trademark).

FIG. 3 shows a connection structure between the detector 10 and the drive unit 20. In FIG. 3, the detector 10 is housed in the opening of the slider guide 22 along the longitudinal direction, and the distal end side is exposed from the end face of the driving unit 20. The detector 10 swingably supports a stylus 13 for surface texture measurement inside a detector main body 12 having a hollow rod-shaped casing 11, and a skid 14 covering the periphery of the tip of the stylus 13 is provided in a rod-shaped casing. 11 is attached.

In the illustrated embodiment, as shown in FIGS. 1 and 3, a visual memory extending in the longitudinal direction of the rod-shaped casing 11 is provided on the outer surface of the rod-shaped casing 11, and is provided from the housing end plate 21B. The remaining trace distance of the rod-shaped casing 11 can be known from the value indicated by the visual memory exposed to the outside. That is, the visual memory of the illustrated embodiment is a transparent scale sheet
7, a length scale 38 extending in the length direction of the rod-shaped casing 11 is printed.
The numbers “0 to 7” indicate the remaining trace distance, and “0”
The position is such that the rod-shaped casing 11 is
It is selected at a position that coincides with the opening edge of the housing end plate 21B when it is most retracted.

Therefore, in an arbitrary state of the rod-shaped casing 11 pulled out from the measuring instrument main body housing 21, the numerical value on the length scale 38 at which the opening edge of the housing end plate 21B, which is the reference point, coincides with the detector scale. This indicates the traceable distance of the stylus 13 which is a part.

In the case of a surface texture measuring machine having a structure in which the end of the slider guide 22 is exposed to the outside through the housing end plate 21B, the value indicated by the length scale 38 corresponds to the corresponding end of the slider guide 22. Is displayed as a reference point.

The visual memory according to the present invention may be a scale directly engraved or printed on the outer peripheral surface of the rod-shaped casing 11, but the outer peripheral surface provided with such an engraved or printed scale is previously formed into a geometric plane. May be done. Further, the scale sheet 37 may be attached to the outer surface of the flat rod-shaped casing 11 which has been processed in advance.

The detector main body 12 has a substantially cylindrical connector 12A at the base end thereof, and the connector 12A is detachably attached to the connector attaching member 40. The connector mounting member 40 includes a first leaf spring 41 and a second leaf spring 4.
2 and a coil spring 43 are connected to a driving unit side mounting member 44, and the driving unit side mounting member 44
4 attached. The connector mounting member 40 and the detector 10 are rotatable about the driving side mounting member 44, and the rotation range of the connector mounting member 40 and the detector 10 is regulated by a stopper 50 mounted on the holding block 34.

The connection structure between the connector mounting member 40 and the drive unit side mounting member 44 is shown in FIGS. 4 and 5 in an enlarged manner. In FIG. 4, a first leaf spring 41 and a second leaf spring 42 urge the detector 10 to rotate in one direction P in order to press the skid 14 against a measurement surface. Among them, the first leaf spring 41 has one end on the detector side fixed to the connector mounting member 40 and the other end fixed to the drive unit side mounting member 44. It functions as holding urging means for holding.

The second leaf spring 42 is arranged side by side with the first leaf spring 41 at a predetermined interval, and one end on the detector 10 side is attached to the connector attaching member 40 by attaching screws 45. A spacer 46 is interposed between one ends of the first leaf spring 41 and the second leaf spring 42, and these one ends are separated from each other by a predetermined distance. The second leaf spring 42 functions as a pressure urging unit that presses the detector 10 to the measurement surface side. The other end of the second leaf spring 42 is connected to the other of the first leaf spring 41. By approaching the end, a spring force is generated at one end of the second leaf spring 42, and the force with which the detector 10 is biased increases.

At the other end of the second leaf spring 42, an adjusting screw member 47 as an urging force control means is attached to a driving unit side mounting member 44.
Attached to. The adjusting screw member 47 is configured to sandwich the other end of the first leaf spring 41 and the other end of the second leaf spring 42 between the head 47A and the drive unit side mounting member 44. By adjusting the screwing amount, the other end of the second leaf spring 42 and the other end of the first leaf spring 41 are moved closer to or away from each other.

When the screwing amount of the adjusting screw member 47 is maximized, the other end of the second leaf spring 42 comes closest to (contacts with) the other end of the first leaf spring 41 and the detector 10 Is given a predetermined urging force. Then, the detector 10 rotates in the one direction, but the rotation is restricted by the stopper 50 (see FIG. 5). Here, the stopper 50 is connected to the detector 10.
Function in the biasing direction (rotation in the one direction) to perform skidless measurement. A ring 47 </ b> B for retaining is provided at the tip of the screw portion of the adjusting screw member 47.

The coil spring 43 is a compression spring having one end supported by the recess 40A of the connector mounting member 40 and the other end supported by the hole 44A of the driving unit side mounting member 44. The spring 43 is always connected to the connector mounting member 40.
In the direction away from the drive unit side mounting member 44 (detector 10
(In the direction of turning in one direction). A spring force adjusting screw 48 is screwed into the hole 44 </ b> A of the drive unit side mounting member 44, and the head of the spring force adjusting screw 48 abuts on the other end of the coil spring 43. By adjusting the screwing amount of the spring force adjusting screw 48, the length of the coil spring 43 is changed, and the biasing force is adjusted.

FIG. 6 shows the internal structure of the detector 10 of this embodiment.
To FIG. In FIG. 6 showing the entire configuration, the detector main body 12 supports a substantially prismatic arm member 52 rotatably (swinging) via a bearing portion 51 inside a rod-shaped casing 11, and a tip of the stylus 13. The stylus arm 53 is detachably attached to the arm member 52, and a detection unit 54 for detecting the amount of vertical movement of the stylus 13 is provided inside the rod-shaped casing 11. A skid 14 is detachably attached to the tip of the rod-shaped casing 11 by bolts 55.
Has a concave portion 14A for accommodating the stylus arm 53 from the center to the proximal end at the distal end portion thereof.

The stylus arm 53 has a stylus 13 at a distal end portion of a substantially shaft-shaped main body, and a base end portion thereof is attached to the arm member 52 by a stylus attachment 56. The stylus arm 53 extends along the longitudinal direction of the arm member 52.
Is attached. The stylus attachment 56 includes a spring member 56 </ b> A for holding the base end of the stylus arm 53 between the stylus arm 53 and a concave portion 52 </ b> A formed at the distal end of the arm member 52.
The stylus arm 53 can be inserted into and removed from the arm member 52.

The rod-shaped casing 11 has a cylindrical member 12A.
And a mounting block 57 provided inside the cylindrical member 12A. The cylindrical member 12A is fixed to the mounting block 57. Mounting block 57
And two detection coils 58 embedded in the mounting block 57 at a predetermined interval from each other, and two core lids 59 embedded in the arm member 52 so as to correspond to the detection coils 58, respectively. The detection unit 54 detects the amount of displacement of the arm member 52 accompanying the advance and retreat of the stylus 13 as the amount of displacement of the stylus 13.

The tip of the arm member 52 and the mounting block 5
7, a coil spring 60 for constantly biasing the stylus 13 toward the measurement surface is interposed. The tip of the stylus 13 is always a skid 14 by a coil spring 60.
Projecting from the front end portion. A spring force adjusting screw 61 is in contact with one end of the coil spring 60,
The spring force adjusting screw 61 is screwed to the mounting block 57. By adjusting the screwing amount of the spring force adjusting screw 61, the length of the coil spring 60 is changed, and the biasing force is adjusted.

A limit switch 62 is mounted on a portion of the mounting block 57 facing the skid 14. The limit switch 62 detects, via a bolt 55, whether or not the skid 14 is attached to or detached from the rod-shaped casing 12, and includes a detection plate 62A capable of abutting the tip of the bolt 55, and a detection plate 62A. And a switch body 62B for detecting that the bolt 55 has been pressed.

The switch body 62B is connected to a data processing circuit (not shown). When the tip of the bolt 55 comes into contact with the detection plate 62A, a measurement with skid is performed. A signal for disabling the function is sent to the data processing circuit, and the tip of the bolt 55 is
When it is not in contact with 2A, a signal for enabling the straightness correction function of the drive unit 20 is sent to the data processing circuit to perform skidless measurement. FIG. 6 shows a state in which the skid 14 is attached to the rod-shaped casing 11 with bolts 55, and the detection plate 62A is
2B.

A first balance weight 63 is provided on the base end side of the arm member 52, and a second balance weight 64 is provided on the stylus arm 53. These balance weights 63 and 64 balance the weight of the stylus arm 53 and the arm member 52 with the bearing 51 as a center. The first balance weight 63 is a substantially cylindrical weight body 6 disposed in a space between the base end of the arm member 52 and the mounting block 57.
5 and a screw portion 66 coaxially fixed to an end surface axis portion of the weight main body 65.
Is screwed into a female screw portion 52B formed to extend in the longitudinal direction of the arm member 52. First balance weight 65
Is adjustable in the axial direction by adjusting the screwing amount.

A positioning screw 67 for positioning the first balance weight 63 in the axial direction is attached to the arm member 52. The positioning screw 67 extends in a direction orthogonal to the female screw portion 52B. The second balance weight 64 has an inner peripheral portion having a stylus arm 5.
3 is a cylindrical member that is movable in the axial direction.

The detailed structure of the bearing 51 is shown in FIGS. In these figures, pivot shafts 68 are attached to both sides of the arm member 52, respectively. In the drawing, the pivot shaft 68 is formed from a single columnar member having conical portions formed at both ends and penetrating the arm member 52, and is prevented from rotating by a detent screw 69.
In the present embodiment, two pivot shafts may be fixed to both side surfaces of the arm member 52 by bonding or the like.

Ball bearings 70 are engaged with the distal ends of the pivot shafts 68, respectively. These ball bearings 7
0 comprises a cylindrical rod-shaped casing 71 and a bearing mechanism 72 having a plurality of balls, of which one ball bearing 70 is fixed to a mounting block 57 with a set screw 73 and the other is mounted. The ball bearing 70 is the mounting block 5
7 is provided slidably in the axial direction. The other ball bearing 7
0 is a cap 74 on the end face opposite to the pivot shaft 68.
One end of a leaf spring 75 for urging the ball bearing 70 toward the pivot shaft 68 is fixed to the cap 74 with an adhesive or the like. The other end of the leaf spring 75 is fixed to the mounting block 57 with two screws 76.

The operation of the present embodiment thus configured will be described. First, to perform skidless measurement, the skid 14 is removed from the rod-shaped casing 12, and a predetermined urging force is applied to the detector 10 by the adjusting screw member 47. As a result, the tip of the bolt 55 does not come into contact with the detection plate 62A, so that a skidless signal is output from the limit switch 62, whereby the straightness correction function of the drive unit 20 is performed in a data processing circuit (not shown). At the same time as switching to "valid", the calculation process is switched to surface shape calculation instead of surface roughness calculation. Further, when saving the data output from the detector 10,
The skidless signal is also stored.

On the other hand, in order to perform the measurement with skid, the skid 14 is attached to the rod-shaped casing 11 with the bolt 55, the screwing amount of the adjusting screw member 47 is loosened, and the urging force less than a predetermined value is applied to the detector 10. do it.
As a result, the tip of the bolt 55 comes into contact with the detection plate 62A, so that a signal indicating that skid is present is output from the limit switch 62, whereby the straightness correction function of the drive unit 20 is "invalid" in a data processing circuit (not shown). And the calculation process is switched to surface roughness calculation instead of surface shape calculation.
When the data output from is stored, the signal indicating skid presence is stored by tying.

In the case of measuring the surface roughness of the work, if the stylus 13 is kept in contact with the surface of the work, the length scale 38 provided on the outer surface of the rod-shaped casing 11 can be used.
Will show the approximate remaining traceable distance,
Since the measurer can determine in advance whether the expected trace distance can be obtained by visual observation of the length scale 38,
It is possible to avoid useless work in which the relationship between the workpiece and the surface texture measuring device has been changed after the start of the measurement. That is, by the opening edge of the housing end plate 21B, which is a reference point, and the length scale 38,
For example, when the value “4.5 cm” is displayed, the traceable distance in the retreating direction by the stylus 13 is about “4.5”.
Since the measurer can immediately know that the measurement is "cm", it is possible to judge whether measurement is possible immediately without performing trial measurement, and it is possible to efficiently measure without wasteful work.

It should be noted that the present invention is not limited to the above embodiment, and modifications and improvements as long as the object of the present invention can be achieved are included in the present invention. For example, in the above embodiment, the detection switch 62 is constituted by a limit switch, but the detection switch may be a switch using a piezoelectric element or the like. Furthermore, balance weight 63,
64 were prepared, but these balance weights 6
3, 64 may be used, or the second balance weight 6 may be used as the third balance weight.
A structure using the same structure as that of No. 4 may be used. Further, the balance weight 63 may be configured by a nut member screwed to a male screw projecting from the arm member 52 in the longitudinal direction.

Further, the urging means comprises the holding urging means 41 for mainly holding the detector 10 and the pressing urging means 42 for pressing the detector 10 to the measurement surface side. In the present invention, a single urging means may be provided or may not be provided. Even if the urging means is constituted by the holding urging means 41 and the pressing urging means 42, these urging means do not necessarily need to be constituted by leaf springs. For example, a coil spring may be used instead of a leaf spring. In addition, the adjusting screw member 47 is used as the urging force control means. However, the adjusting force of the urging means may be automatically adjusted using a motor and a gear mechanism.

Further, although it is not always necessary to provide the auxiliary biasing means 43, when the auxiliary biasing means 43 is provided, a leaf spring may be used instead of the coil spring.
Further, the slider 23 described in the above embodiment is
A configuration in which the slider is advanced and retracted by a slider guide formed of a rod-shaped member having a round shaft may be used.

Further, the movement of the detector 10 may be restricted by urging the detector 10 in the negative urging direction and pressing it against the connector mounting member 40. Further, the biasing force adjusting means may be a means for mutually fastening or fixing the connector mounting member 40 and the driving side mounting portion 44 to each other. Further, in the above-described embodiment, a stylus sensor is shown as a sensor, but a non-contact sensor may be used.

[0042]

As is apparent from the above description, according to the present invention, the traceable remaining distance of the rod-shaped casing of the detector to which the stylus is to be attached can be easily visually recognized with a relatively inexpensive and simple structure. Therefore, it is possible to prevent the measurement from being started from an inappropriate position. Therefore, according to the present invention, it is possible to improve the measurement efficiency by shortening the measurement setup and the measurement time, and to avoid the measurement surface being damaged by the stylus due to repeated trial measurement.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a surface texture measuring device according to the present invention with a housing removed.

FIG. 2 is a bottom view in a direction indicated by an arrow II shown in FIG.

FIG. 3 is a cross-sectional view of the surface texture measuring device.

FIG. 4 is an enlarged sectional view of a main part showing a biasing structure of the detector.

FIG. 5 is a sectional view similar to FIG. 4 when skidless measurement is performed.

FIG. 6 is a cross-sectional view of the detector in a plane parallel to FIG. 3;

FIG. 7 is an enlarged horizontal sectional view of a main part of the detector.

FIG. 8 is an enlarged sectional view taken along line VIII-VIII in FIG. 7;

[Explanation of symbols]

 Reference Signs List 10 detector 11 rod-shaped casing 13 stylus 14 skid 20 drive unit 21 housing 21B housing end plate 22 slider guide 23 slider 37 scale sheet 38 length scale 52 arm member 53 stylus arm 54 detection unit

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F062 AA62 AA66 BB05 DD04 DD08 DD09 DD10 DD11 EE01 EE62 FF03 FF09 FF25 GG66 HH05 HH08 HH14 HH21 HH33 HH37 2F069 AA54 AA57 AA60 DD24 GG02 MM03 MM03 GG03

Claims (3)

[Claims] 1. A surface texture measuring device for fixing a sensor for measuring a workpiece surface to a rod-like casing fixed to a slider supported in a measuring device main body housing so as to be able to move forward and backward. A surface memory extending on the outer surface of the rod-shaped casing exposed in the direction of movement of the slider, and displaying the traceable distance of the sensor by the visual memory. 2. The surface texture measuring device according to claim 1, wherein the visual memory is a scale sheet having a length scale printed on a surface thereof and attached to an outer surface of the rod-shaped casing. 3. The surface texture measuring device according to claim 1, wherein the visual memory is directly engraved or printed on an outer surface of the rod-shaped casing.