JPH0457201B2 - - Google Patents

Description

[Detailed Description of the Invention] <Field of Application> The present invention is applicable to, for example, when measuring the roughness of the surface of a large object to be measured (workpiece) or the surface of a plate-shaped object. The present invention relates to a surface roughness measuring device that is small and lightweight so that it can be carried around.

<Prior Art> A surface roughness measuring machine is provided as a device for measuring minute irregularities on the surface of a workpiece, so-called surface roughness. This type of measuring machine is constructed with extremely high precision in order to measure and detect micron-level irregularities on the surface of a workpiece, and the environment in which it can be used is currently restricted. In general, the structure consists of a table on which a workpiece is stably placed, a column erected on the table, a drive body attached to the column so as to be movable up and down, and a drive body extending from the drive body. It is equipped with a probe consisting of a stylus that is supported and traces the surface of the workpiece, and is installed on a vibration isolation table. It is used by connecting to an external display device equipped with a mechanism via a signal cable.

In conventional measuring instruments such as those mentioned above, only the stylus part of the probe comes into contact with the workpiece, so the direction in which the stylus traces must match the tracing surface of the workpiece to measure the waviness and straightness of the workpiece. A reference guide for guiding the moving direction of the probe is provided in the drive main body so as to match the inclination of the workpiece surface with the tracing direction.

In addition, if the workpiece is large enough to be placed on the table, the workpiece is placed directly on the table for measurement, but if the workpiece is large or cannot be placed directly on the cable, a part of the workpiece is It is used to cut out and place it, or to transfer the part necessary for measurement and measure it indirectly.

<Problems to be solved by the present invention> In view of the accuracy of the device, the above-mentioned conventional measuring device can only be used in environments where the environment is controlled, such as in so-called measurement rooms or inspection rooms, and it cannot be used at production line sites. It was extremely inconvenient for simple use. Since this is a mechanism that enables the extraction of various measured values, the mechanism becomes complicated in order to maintain its accuracy.
Another reason is that the size of the measuring device itself is large, making it unsuitable for quick and easy use in the field.

In addition, in the case of large workpieces that cannot be placed on the table of the measuring machine, it takes time to prepare for measurement as mentioned above, and special dimensional jigs are also required. Regarding preparation, adjustment, etc., there were still many points that needed to be improved in terms of practicality.

<Means for Solving the Problems> The present invention has been provided in view of the above-mentioned conventional problems, and includes a casing formed in the shape of a rectangular tube, whose front and rear ends are closed by a front plate and a rear plate. a screw shaft that is rotated within the casing by a motor installed in the casing; a feed nut that is threaded onto the screw shaft and moves as the screw shaft is rotated; A slide shaft that is slidably supported and fixed to the feed nut toward the rear, and a connector that also serves as a connector that is connected to the rear end of the slide shaft via a first leaf spring that has a biasing force toward the workpiece measurement surface. a mounting portion; a pick-up case disposed within the casing; a skid having one end fixed to the pick-up case and the other end protruding forward from an opening in the front plate of the casing; a stylus lever that is biased toward the workpiece measurement surface via the leaf spring No. 2 and inserted through the skid; an inductance-type detector that is installed in the pick-up case and detects displacement of the stylus lever; electrically connected to the type detector,
A connector pin/mounting rod protrudes from the pick-up case and is removably connected to the connector/mounting part, and a connector pin/mounting rod is fixed to the tip of the stylus lever and exposed through the opening at the tip of the skid to make contact with the measurement surface of the workpiece. It consists of a stylus, and a signal cable for connecting an external terminal, one end of which is connected to a connector/mounting part inside the casing, and the other end of which is connected to an indicator outside the casing through the rear end surface of the casing. A stand adapter is attached to the rear plate, and the stand adapter includes a mounting plate detachably attached to the rear plate, and a support rod formed integrally with the mounting plate and gripped by an arm of the stand jig. It is characterized by becoming.

<Function> Place the bottom of the measuring machine on the workpiece so that the stylus of the measuring machine contacts the measuring part of the workpiece, and then turn on the drive switch on the drive control source side connected via the signal cable. A pick-up connecting the stylus is slid by a predetermined distance in its axial direction by a drive mechanism within the main body, and at this time, the stylus traces the surface of the workpiece and performs a displacement operation that follows the irregularities of the surface.

This displacement action causes a built-in transducer to generate a predetermined electrical signal, which is output to an external display connected via a signal cable, thereby displaying the measured roughness.

During this measurement work, if the surface of the workpiece that comes into contact with the measuring machine is a flat part, the bottom of the measuring machine body will come into contact with the flat part of the workpiece, and the workpiece will be placed in a stable state.
Measurement work can be performed without the stylus and main body wobbling. In addition, if it is difficult to perform the above measurement by touching the measuring machine to the workpiece, attach a stand adapter to the rear plate and hold the adapter in a stand jig such as a magnetic stand to stabilize the workpiece in space. The stylus can be supported by aligning the tracing surface of the stylus with the main body to maintain a stable posture.

<Example> Hereinafter, preferred examples of the present invention will be described based on the drawings. In FIGS. 1 to 4, reference numeral 1 denotes a casing of a main body A of the measuring instrument, which is formed into a prismatic shape and whose both ends are closed with a front plate 2 and a rear plate 3. The front plate 2 side is removably connected to a drive mechanism inside the casing, which will be described later. A pick-up 6 that projects outside the casing and a nose piece 7 that protects the measuring section are provided. 8 is the rear plate 3
It is a signal cable extending from the side to the outside of the casing, and one end is connected to the signal rods 6a, 6a from the pick-up 6 inside the casing and the motor part of the drive mechanism, and the other end is connected to the pick-up signal. A connection terminal (not shown) of a display device (not shown) equipped with a power supply mechanism, etc. that supplies current to the drive motor, etc. of the measuring instrument main body A, as well as a calculation display mechanism that processes and displays required roughness data, etc. ) is connected to the connector 9 connected to the connector.

In addition, the front plate 2 and the rear plate 3 have the side dimensions of the side portions of the casing 1 cross-sectional side length (the third
Slightly larger than the vertical dimension (in the diagram),
The bottom sides 2a and 3a are arranged so as to slightly protrude from the bottom surface of the casing, thereby closing the ends of the casing. 2b and 3b are V-shaped notches formed at the center of the bottom sides 2a and 3a of the front plate 2 and rear plate 3, and therefore, the bottom sides are connected to the flat part and the V-shaped notch.
A shaped notch is formed.

FIG. 2 is a perspective view showing a preferred shape of a stand adapter B to be attached to the rear plate 3 during use, which will be described later. The support rod 101 protrudes from the center of the mounting plate, forming a roughly stud-pin shape. As shown in FIG. 4, 102 is a recessed part that allows the signal cable 8 extending from the rear plate 3 to be avoided when it is attached to the rear plate 3, and 103 is a recessed part that can be attached to the rear plate 3 while avoiding the signal cable 8 extending from the rear plate 3. This is a mounting hole for screwing to the rear plate 3.

FIG. 3 shows the structure inside the casing 1.

In the figure, 10 is a drive motor, and a decelerator 11 and a flexible coupling 1 that absorbs some eccentricity due to installation errors and transmits drive.
A feed screw shaft 13 is coaxially connected via 2. 14 is a feed nut that is screwed onto the feed screw shaft 13 and is movable in the direction of the screw axis, and the nut has a slide shaft 15 that moves in a direction parallel to the screw shaft and is supported on the inner wall of the casing by its bearing 15a. At one end of the slide shaft 15, a joint block 16 and a leaf spring 17 are used to connect a pick-up that is substantially parallel to and extends in the same direction as the slide shaft 15 when the pick-up 6 is not connected. A connecting rod 18 is swingably attached. The slide shaft 15 is arranged so as to be movable substantially parallel to the bottom surface of the casing, specifically, to a virtual plane formed between the bottom sides 2a and 3a of the front plate 2 and the rear plate 3. The pick-up connecting rod 18 has the signal rods 6a, 6 of the pick-up 6 on its tip side.
A is formed into a mounting hole into which the signal cable 8 is removably inserted, and contacts (not shown) between the signal cable 8 and the signal rods 6a, 6a are provided in the hole.

Slide shaft 15 and pick-up connection rod 18
As is clear from the above and Fig. 3, the integral shape is U-shaped, which increases the length of the drive mechanism including the motor etc., and therefore prevents the main body from becoming longer. I'm trying to prevent it. In addition, since the connecting rod 18 can be swung by the leaf spring 17, when the connecting rod 18 is formed of one piece as the U-shaped integral shape, the reverse bending part (bottom part of the U-shape) etc. is made into a thin wall part to perform the leaf spring function. It is clear that the rod 18 side can be made to swing.

The pick-up 6 is swingably supported by a pick-up connecting rod 18 of the measuring instrument main body A, and inside thereof there is a ferrite plate facing an inductance-type displacement detector 61 fixed to the inner wall of the pick-up main body. A stylus lever 63 with a plate 62 attached to one end is provided with its intermediate portion supported by a plate spring 64 at the front end of the pickup body, and a downwardly directed stylus 4 is attached to the tip of the lever 63. A skid 5 through which the stylus lever 63 and stylus 4 are inserted at appropriate intervals is fixed to the front end of the pickup main body. When the stylus 4 is not in contact with the workpiece W, the stylus lever 63 is set by the leaf spring 64 and swings relative to the skid (pickup body) so that it slightly protrudes from the tip surface of the skid 5. It is supported as possible. Further, the inductance type detector 61 has its coil wire ends (not shown) connected to the signal rods 6a, 6a described above, and this allows the swinging of the stylus lever 63 during measurement, that is, the ferrite plate. The swinging displacement of the detector 62 changes the current of the detector 61, and this change is finally displayed on the display as the surface roughness of the workpiece.

The above-mentioned pick-up mechanism is powered by a motor 10.
Since it moves forward and backward in the axial direction by driving, it is preferable to move parallel to the slide shaft 15, which serves as a reference in the driving direction, from the viewpoint of measurement accuracy or convenience of operation. Therefore, the pick-up 6 is the workpiece W.
When in contact with the slide shaft 15, in other words, the sliding shaft 15 should be parallel to the virtual plane between the front plate 2 and the rear plate 3, which forms a plane parallel to the axis, and the tip surface of the skid 5 should be parallel to the virtual plane similar to the virtual plane. The dimensions and arrangement of the drive mechanism, pick-up, etc. are set so that the drive mechanism and pickup are located at a level position.

The nosepiece 7 is the pick-up 6 as mentioned above.
In particular, the skids that protrude to the outside mainly play a protective function, so they can be removed and used for mounted measurements as described below, but the bottom sides of the skids can be flattened and the bottoms of the front plate 2 and rear plate 3 mentioned above are used. By positioning the nose piece at approximately the same level as the virtual plane formed by the nosepiece, only the nosepiece portion can be safely brought into contact with the workpiece surface when measuring small-sized workpieces.

When measuring the surface roughness of a workpiece W with the above configuration, if the upper surface of the workpiece is a flat plate as shown in FIG. If a drive signal is applied from the display side that does not operate, the motor 10 will operate and the pickup 6 will be activated.
moves back and forth, and its stylus 4 traces the surface of the workpiece to detect surface roughness. Since the pick-up 6 advances and retreats approximately parallel to the bottom surface of the measuring machine main body, that is, the aforementioned virtual plane, the stylus 4 in contact with the surface of the workpiece W also moves approximately parallel, making it difficult for errors to occur. This means that measurements can be taken. In this case, since the skid 5 also traces the surface of the workpiece W, the amount of displacement of the stylus 4, which is displaced independently in relation to the skid, is determined by the so-called "waviness" component removed by the skid 5, that is, the surface roughness. You will get it as.

Next, in cases where the measuring machine mounting surface on the workpiece surface has a complex and large uneven shape, small parts, or when the measuring surface has a deep hole and is relatively narrow, the measuring machine body cannot be stably mounted. First, in the case of measurement work in which it is difficult to hold the measuring instrument by hand due to posture, it is attached to the rear body 3 of the measuring instrument main body A using screws or the like of a stand adapter B as shown in FIG. The support rod 101 of the adapter B is then gripped by a gripping arm of a stand jig such as a magnetic stand. Thereby, the measuring instrument main body A is fixedly supported by the stand jig via the stand adapter B. Therefore, stable and accurate measurement can be performed by aligning the supporting posture with the workpiece measurement surface and making the stylus 4 contact and trace the measurement surface. Even if the measurement surface is a pore, as long as the pore size is larger than the diametrical dimension of the measuring device main body A, the main body can be inserted into the hole to perform measurement.

Figures 5 and 6 respectively explain the case of measuring inside a hole and a small surface using the stand jig S. As mentioned above, it supports stably and can handle various shapes. An example of what can be done.

In addition, in the embodiment of the present invention, the measuring machine front plate 2
The bottom side of the rear plate 3 is made to protrude slightly from the bottom surface of the casing 1, and the bottom side is formed with flat parts 2a, 3a as well as V-shaped notches 2b, 3b in the center, so that, for example, a slightly uneven surface is formed. When measuring a flat part having a diameter, the main body can be stably placed using the two-point support by the protrusion, and in the case of a cylindrical workpiece, it can be stably placed by straddling the workpiece using the V-shaped notch.

However, in the case of the above-mentioned uneven surface, the measurement can be carried out without any practical problem by using the stand adapter B. That is, the pick-up stylus 4 responds to the pick-up body together with the skid 5, and the skid tip surface (work contact surface) through which the stylus is exposed generally forms an arcuate surface. Therefore, even if the main body A is slightly inclined, the relative position of the arc surface of the skid and the stylus does not cause an error large enough to cause a practical problem, and in the end, the position of the stylus can be adjusted by using the stand jig S using the stud adapter B. By using the support, stable contact can be achieved. Therefore, it is not necessary to make the front plate and the rear plate protrude as in the above embodiment. Also, in the case of a cylindrical workpiece, when measuring the axial direction of the workpiece, use the same method as when measuring a deep hole, and hold the measuring machine main body A in contact with and parallel to the cylindrical axis of the workpiece. Therefore, measurement work can be carried out without tracing the workpiece in a position shifted in the arc direction.

As described above, in any case, the above-mentioned configuration of the bottom portions of the front plate and the rear plate is not necessarily required to achieve the intended purpose of the present invention, but it can be used more easily by configuring it as described above. Not even.

<Effects> As described above, according to the present invention, it is possible to provide a highly practical mounted surface roughness measuring instrument that exhibits the following various effects.

In the present invention, a stand adapter that is held by an arm of a stand jig is attached to the rear plate of the casing, and the stand jig can support the measuring instrument body in space via the stand adapter, so that the measuring surface is Even if the shape of the measuring device does not allow the main body to be placed stably, stable measurements can be made by performing measurements with the measuring device main body supported in space.

In the present invention, since the skid is supported via the first leaf spring and the stylus lever is supported via the second leaf spring, the skid is supported by the first leaf spring due to the undulating surface shape. The surface roughness of workpieces with undulating surfaces can be accurately measured because the surface of the workpiece is absorbed by the following movement.

Since the present invention uses the second leaf spring as the swinging fulcrum of the stylus lever, the number of parts is reduced compared to the case where the shaft and spring of the swinging fulcrum are provided separately, making the pick-up more compact. There is a certain effect.

In the present invention, the pick-up case is moved using the slide shaft as a guide shaft, so even if there is play between the threaded rod and the feed nut, the feed of the pick-up is not affected.

In addition, since the slide shaft parallel to the screw shaft is used as the reference axis, the block can be moved by pressing it against the reference surface, making it lighter and more compact than the conventional method of driving the pick-up part. It is possible.

In the present invention, the slide shaft is attached to the feed nut with the slide shaft facing backward, and the pick-up is supported on the slide shaft via the first leaf spring. The length can be shortened.

In the present invention, since the connector pin/attachment rod on the pickup side is attached to the connector/attachment portion on the casing side, the pickup can be easily attached/detached and the device becomes compact.

Since the present invention uses an inductance type detector, the pickup is more compact than a conventional pickup using a transformer type detector.

[Brief explanation of the drawing]

The figures show an embodiment of the present invention, in which Fig. 1 is an exploded perspective view of the main body components of the surface roughness measuring machine, Fig. 2 is a perspective view of the stand adapter, and Fig. 3 is an internal structure of the measuring machine. 4 is a right sectional view of FIG. 3 showing the stand adapter attached state, and FIGS. 5 and 6 are measurement examples using the stand adapter and the stand jig. 1: Casing, 2: Front plate, 3: Rear plate, 2
a, 3a: base, 4: stylus, 5: skid, 6:
Pickup, 6a: Signal rod, 7: Nose piece, 8: Signal cable, 9: Connector, 10:
Motor, 11: Reducer, 12: Coupling, 1
3: Feed screw shaft, 14: Feed nut, 15: Slide shaft, 17: Leaf spring, 18: Pick-up connection rod, 61: Inductance type displacement detector, 6
2: Ferrite plate, 63: Stylus lever, 64: Leaf spring, 100: Mounting plate, 101: Support rod, 10
2: Relief part, 103: Mounting hole, A: Roughness measuring machine body, B: Stand adapter, S: Stand jig, W: Workpiece.

Claims (1)

[Claims] 1. A casing formed into a rectangular tube shape, whose front and rear ends are closed by a front plate and a rear plate, and a screw shaft that is rotationally driven within the casing by a motor provided within the casing. a feed nut that is threaded onto the screw shaft and moves as the screw shaft is rotated; a slide shaft that is slidably supported by the casing parallel to the screw shaft and fixed to the feed nut toward the rear; A connector/mounting part connected to the rear end of the slide shaft via a first leaf spring having a biasing force toward the workpiece measurement surface, a pick-up case disposed inside the casing, and one end fixed to the pick-up case. A skid whose other end protrudes forward from the opening in the front plate of the casing, and a skid that is swingably supported by the pick-up case and is biased toward the workpiece measurement surface via a second leaf spring, and is inserted through the skid. the stylus lever, which is electrically connected to the inductance type detector, and an inductance type detector provided in the pick-up case to detect the displacement of the stylus lever;
A connector pin/mounting rod protrudes from the pick-up case and is removably connected to the connector/mounting part, and a connector pin/mounting rod is fixed to the tip of the stylus lever and exposed through the opening at the tip of the skid to make contact with the measurement surface of the workpiece. It consists of a stylus, and a signal cable for connecting an external terminal, one end of which is connected to a connector/mounting part inside the casing, and the other end of which is connected to an indicator outside the casing through the rear end surface of the casing. A stand adapter is attached to the rear plate, and the stand adapter includes a mounting plate detachably attached to the rear plate, and a support rod formed integrally with the mounting plate and held by an arm of the stand jig. A mounted surface roughness measuring machine characterized by: