JP2002276063A - Base-isolated floor structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a base-isolated floor structure using a base isolating device for preventing the fly of metal rust or particulates from a lubricant such as grease, causing no pollution in a space of a clean room. SOLUTION: The base-isolated floor structure comprises a foundation 1 as a lower structure, a base-isolated floor panel 12 located at the upper part of the foundation 1, and the base isolating device consisting of a base-isolation supporting device 20 arranged between the foundation 1 and the base-isolated floor panel 12, a damper 30, a restoring device 45 and an oil damper 50. The base isolating device 30 has a relative displacement portion to a base plate 31 fixed to at least the foundation 1, closed with a soft cover 42, the base isolating device 20 has at least a relative displacement portion covered with a cover 24, and the cover 24 has an exhaust duct 28 for exhausting air in an inner space to the outside.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration-isolating floor structure for protecting a precision instrument or the like from vibrations caused by an earthquake or wind.
In particular, the present invention relates to a vibration-isolating floor structure suitable for being installed in a clean room and a vibration-isolating floor structure composed of devices installed on a vibration-isolating floor supported by a vibration isolator.

[0002]

2. Description of the Related Art Conventionally, various floor vibration isolators have been put into practical use for important equipment such as computers and the like in order to protect the functions and the main body of the equipment from earthquakes. These floor vibration isolator devices are also used in facilities that produce semiconductors and in clean rooms of chemical-related facilities. As this type of floor vibration isolating device, there is a clean room vibration isolating floor structure described in JP-A-9-195556. According to the technology described in this publication, a relatively large waffle slab is supported on a gantry via a plurality of vibration isolation devices, and on this waffle slab, a vibration proof slab is placed through a floor opening of a clean room, Anti-vibration devices such as precision devices that dislike vibration are further installed on the vibration-isolation gantry.

In this vibration isolating floor structure, a predetermined gap is formed between a first vibration system composed of a girder, a small beam, a joist, and a grating, and a second vibration system composed of a waffle slab and a vibration isolator. Thus, they are insulated from each other. Vibration caused by the earthquake is suppressed by the vibration isolator on the vibration isolator, and the micro-vibration generated when the worker passes on the grating is:
It is not propagated to waffle slabs and seismic isolation racks,
Micro vibrations during the passage of workers are not propagated to the anti-vibration equipment.

[0004]

The floor vibration isolating structure having the above structure does not take measures against dust and chemical contamination with respect to the vibration isolating device. Fine particles generated by wear from the parts and fine particles generated from grease scatter in the clean room, lead of the lead damper used for the damper, oil of the oil damper, and wear powder from the frictional contact surface of the friction damper in the clean room. There is a risk of soiling the space.

The present invention has been made in view of such a problem, and an object of the present invention is to contaminate contaminants such as rust generated from members constituting a vibration isolating device and generate contaminants generated from the vibration isolating device. Vibration-isolated floor structure that does not pollute the space inside the clean room with contaminants such as fine particles that are generated, pollutants generated from equipment installed on the vibration-isolated floor, and contaminants generated from the vibration isolator An object of the present invention is to provide a vibration-isolating floor structure that does not pollute the space.

[0006]

In order to achieve the above object,
The vibration-isolating floor structure according to the present invention includes a lower structure, a vibration-isolating floor located above the lower structure, and a vibration-isolating device disposed between the lower structure and the vibration-isolating floor. The vibration isolator is characterized in that at least a portion relatively displaced from the lower structure is sealed with a flexible member. According to this configuration, contaminants such as metal fine powder generated from the vibration isolator and fine particles from the lubricating oil are sealed by the cover body and scattered in a space where the vibration isolator is installed (hereinafter, referred to as a vibration isolating space). Without providing the vibration isolating floor structure of the present invention in a clean room, the space in the clean room is not contaminated.

Further, another vibration-isolating floor structure according to the present invention comprises a lower structure, a vibration-isolating floor located above the lower structure, and a vibration-isolating floor disposed between the lower structure and the vibration-isolating floor. And a vibration isolating device, wherein the vibration isolating device covers at least a relative displacement portion with the lower structure with a cover body, and the cover body includes an exhaust duct that exhausts air in its internal space to the outside. I have. According to this configuration, even if the above-described contaminants are generated from the vibration isolator, these contaminants are covered with the cover body and exhausted to the outside, so that the vibration-isolation space is not contaminated,
When applied to a clean room, there is no contamination in the clean room.

Further, in a preferred specific embodiment of the vibration-isolating floor structure according to the present invention, the metal member constituting the vibration-isolating device and the vibration-isolating floor is made of a rust-proof material, a material having a surface protective layer, or a surface coating. It is characterized by being formed of a material having a film. According to this configuration, the metal member is formed of a rust-preventive member such as stainless steel and does not generate rust, and is formed of a material having a surface protective layer such as plating or a material having a surface coating film, and rust or the like is formed. It does not occur and does not contaminate the vibration isolation space, and is suitable for a clean room.

Another vibration-isolating floor structure according to the present invention comprises a lower structure, a vibration-isolating floor located above the lower structure, and a vibration-isolating device disposed between the lower structure and the vibration-isolating floor. And a device installed on the vibration-isolating floor, wherein the vibration-isolating device, the vibration-isolating floor and the device are sealed by a sealing material such as a cover body. Further, it is preferable that the metal member constituting the vibration isolator and the vibration isolating floor be formed of a rust-proof material, a material having a surface protective layer, or a material having a surface coating film. According to this configuration, even if contaminants such as rust are generated from the vibration isolator and other members and the contaminants are generated from the equipment, these contaminants are sealed by the sealing material and do not scatter, so that the clean room Does not pollute the internal space. In addition, by using a material having a rust preventive material, surface protective layer, surface coating film,
The contamination of the internal space of the sealing material can be reduced, and the equipment can be operated stably.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of a vibration isolating floor structure according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a sectional view of a main part of a vibration-isolated floor structure according to the present embodiment, and FIG.
2 is a detailed cross-sectional view of the vibration isolation bearing device of FIG. 1, FIG. 2 (b) is a cross-sectional view taken along line AA of FIG. 2 (a), and FIG. 3 (a) is a detailed cross-sectional view of the damping device of FIG. FIG. 3B is a sectional view taken along line BB of FIG. In FIGS. 1 to 3, a plurality of vibration-isolating bearing devices 20, damping devices 30, restoring devices 45, oil dampers 50, and the like are installed on a foundation 1 which is a lower structure formed of reinforced concrete or the like. On these vibration-isolating devices, a vibration-isolating floor support beam 10 as an upper structure is installed. The vibration-isolating floor support beam 10 is formed by vertically and horizontally welding an H-shaped steel formed of stainless steel, which is a rust-preventive material, and a plurality of vibration-isolating floor struts 11 are erected vertically. The vibration isolation device insulates, absorbs, or attenuates vibrations such as strong winds and traffic vibrations in addition to earthquake vibrations.

A plurality of vibration-isolating floor panels 12 are installed on the plurality of vibration-isolating floor supports 11 in a horizontal direction. Each of the vibration-isolating floor supports 11 has an adjuster whose length in the vertical direction can be adjusted, and can keep the horizontal of the vibration-isolating floor panel 12. In the present embodiment, the surface of the vibration-isolating floor support 11 is formed by a baking coating film of a powdery epoxy resin for the purpose of preventing rust. Such a solventless epoxy coating can prevent rust of metal, dust such as metal powder, and scattering of ions and molecular organic substances.

On the foundation 1, a fixed floor support 2 is erected vertically except for a portion of the vibration-isolated floor support beam 10, and the fixed floor support 2 is longer than the vibration-isolated floor support 11. Similarly, the length in the vertical direction can be adjusted, and a baking coating film is formed on the surface. The fixed floor panel 3 is fixed on the fixed floor support 2, and the fixed floor panel 3 is set to have the same horizontal level as the vibration-isolated floor panel 12.

Since the vibration-isolating floor panel 12 is relatively displaced in the horizontal direction with respect to the foundation 1 during, for example, an earthquake, an interval D corresponding to the design displacement is provided between the floor panel 12 and the fixed floor panel 3. The buffer panel 4 covers in the horizontal direction. The buffer panel 4 is formed of a band-shaped plate having a predetermined width.
The side is fixed to the vibration-isolating floor panel 12 side, and the other side is positioned on the fixed floor 3 panel with a slight gap in the vertical direction so as to be relatively displaceable, and fixed to the buffer panel 4 even at the maximum displacement. The width is set so that there is no gap between the floor panel 3 and the floor panel 3. On the vibration-isolating floor panel 12, precision equipment 5 such as computer equipment and production equipment that requires earthquake countermeasures is installed. The buffer panel 4 is formed of a stainless steel plate without forming a surface coating because the worker walks, and the end surface on the fixed floor panel 3 side is an inclined surface.

Referring to FIG. 2, the vibration isolating support device 20 will be described in detail. The anti-vibration bearing device 20 protects buildings, structures, equipment, and the like from earthquakes by isolating horizontal displacement of the lower structure caused by the earthquake during the earthquake without directly transmitting the displacement to the upper structure. The anti-vibration bearing device 20 of this embodiment is a sliding bearing-type insulating device, and includes a square base plate 21 and a columnar bearing body 22.
The support body 22 is fixed to the H-beam of the vibration-isolated floor support beam 10 by a plurality of adjustment shims 23 by bolting.

The upper surface of the base plate 21 and the support 22
Is formed with a smooth surface, has a very small coefficient of friction, and is coated with grease as a lubricating oil as required. For example, the base plate 21 is formed of stainless steel, the upper surface is a polished glossy surface, and the lower surface of the support body 22 is a smooth surface coated with Teflon (registered trademark). As described above, the support body 22 is slidably supported with respect to the base plate 21 so as to be freely displaceable relative to the base plate 21 during an earthquake. The vertical spacing between the floor panel and the fixed floor panel 3 is maintained at the same level.

The vibration-isolation bearing device 20 of this embodiment is further characterized by further comprising a cover 24. This cover 2
Reference numeral 4 is formed by sheet metal processing of a plate material such as stainless steel, and is formed by connecting two cover members 25 and 26 with a support plate 27. One cover member 25 has a shape in which three sides of the rectangular top plate hang down from the three sides of the same width, and a portion corresponding to another side of the top plate is open. The two cover members 25 and 26 are arranged so that the opening portions face each other, and are screwed to the support plate 27. The cover body 24 to which the two cover members are connected has a substantially square planar shape, has substantially the same shape as the base plate 21, and covers substantially the entirety of the vibration isolation support device 20. A space d is formed over the entire circumference between the lower end of the side of the cover body 24 and the base plate 21.

A circular opening is formed in the top plate of one cover member 25, and an exhaust duct 28 whose upper part is curved protrudes from the circular opening. Therefore, the exhaust duct 28 communicates with the internal space of the cover 24, and the upper end of the exhaust duct 28 communicates with an external exhaust device (not shown). Therefore, the air in the internal space of the cover body 24 can be exhausted to the outside by the exhaust device. The cover members 25 and 2 are provided on the support plate 27.
The screw for fixing 6 is formed of stainless steel.
Although the cover 24 has an example of a shape that covers substantially the entire vibration-isolation support device 20, the cover 24 may be smaller than the illustrated example and may have a shape that covers only the vicinity of the support 22 which is a relatively displaceable portion.
Further, it may be a large one that covers the entire area of the base plate 21 even at the time of the maximum displacement.

Next, the damping device 30 will be described in detail with reference to FIG. The damping device 30 attenuates the vibration energy of the earthquake during an earthquake, for example, and hangs from the base isolation beam 10 as the upper structure on the base plate 31 fixed on the foundation 1 as the lower structure. The friction member 32 is pressed to attenuate vibration energy by the frictional force. A rectangular substrate 33 fixed to the lower surface of the vibration-isolated floor support beam 10 is provided with a through hole at the center, and a square receiving plate 34 is screwed through a height adjusting shim 35 above the through hole. Is being worn. A cylindrical member 36 hangs down from the lower surface of the receiving plate 34, and the lower end of the cylindrical member faces the base plate 31 with a slight gap.

The friction member 32 is vertically movably positioned inside the cylindrical member 36, and the center bolt 37 connected to the friction member 32 passes through the upper receiving plate 34 to form a double nut 38 at the upper end. Have been. A compression spring 39 is mounted between the friction member 32 and the receiving plate 34 via a seat. The compression force of the compression spring 39 can be adjusted by the double nut 38. The friction member 32 presses the base plate 31 by the pressing force of the compression spring 39, and the friction member 3
When the base plate 31 and the base plate 2 are displaced relative to each other, it functions to attenuate the vibration energy by the above-mentioned pressing force. Therefore, the contact surface between the friction member 32 and the base plate 31 is not a smooth surface but contacts with a predetermined coefficient of friction.

On the lower surface of the substrate 33, a frame 40 formed of two angle members and two flat plates is provided on the outer peripheral side of the cylindrical member.
Is fixed. The frame 40 has a substantially square outer shape when viewed from above. A stop plate 41 is screwed along four outer peripheries of the square base plate 31. The stopper plate 41 and the frame body 40 are connected by a cover body 42 in which four sheet covers formed of a flexible polyethylene sheet are welded, and a relative displacement that is a contact portion between the friction member 32 and the base plate 31 is formed. Parts are sealed. The upper end of the cover 42 is attached to the frame
It is fixed at.

In this embodiment, as shown in FIG. 4 (a), the cover 42 is formed by welding the oblique sides of the four sheet covers to hermetically close the internal space and shut off the outside. The cover body 42 has a sufficient length so that it can be freely displaced when the base 1 and the vibration-isolated floor support beam 10 are displaced relative to each other, and is in a state of being uniformly curved in normal times. Frame body 40, stopper plate 41,
43 and components such as screws for screwing the cover body 42 together with them are formed of a rust preventive material such as stainless steel or a surface protective film such as a baked paint film or plating. Note that the cover body is not limited to the above-described shape, and as shown in FIG. 4B, has a mounting portion 44a for the upper frame 40 and a mounting portion 44b for the lower base plate 31, and an intermediate portion. May be formed in a bellows shape 44c so that the upper and lower mounting portions 44a and 44b can freely move relative to each other by a predetermined distance in the horizontal direction.

Returning to FIG. 1, the coil spring 45 as a restoring device for restoring the relative displacement between the foundation 1 and the vibration-isolated floor beam 10 will be described. The coil spring 45 is used for the foundation 1
And a receiving portion 47 hanging down from the lower surface of the vibration-isolated floor support beam 10. Coil spring 4
Reference numeral 5 denotes a tension spring, which is formed of stainless steel in this example. Further, the receiving portion 46 on the foundation 1 side and the receiving portion 47 on the vibration-isolated floor support beam 10 side are also formed of stainless steel.

The coil spring 45 and the receiving portions 46, 47
Is not limited to being formed of stainless steel, but may be formed of another rust-preventive material, or may be one protected by a rust-preventive coating or having a surface coating film and not emitting pollutants. Further, the engaging portion between the coil spring 45 and the receiving portions 46 and 47 may be covered with a cover body 48 shown by a two-dot chain line to enclose metal powder generated when the metals come into contact with each other. , Receiving portions 46 and 47 may be sealed together.

An oil damper 50 is installed between the foundation 1 and the vibration-isolated floor support beam 10 to attenuate the vibration energy of the earthquake from the relative displacement between the two. The oil damper 50 includes a piston that slides in the cylinder 51. For example, the cylinder is fixed to a base side, and a piston (not shown)
The piston rod 52 connected to the base is fixed to the vibration-isolated floor support beam 10. The fixed portion between the oil damper 50, the foundation 1 and the vibration-isolated floor support beam 10 is pin-joined so that the oil damper 50 can swing horizontally. Cylinder 5
A viscous body is filled in 1 and a piston moves in the viscous body with relative displacement to attenuate vibration energy. The oil damper 50 of the present example includes a bellows-like flexible cover body 53 that connects the distal end of the piston rod 52 and the proximal end of the cylinder 51. The cover body 53 is formed by expanding and contracting a polyethylene sheet in a bellows shape, and has a shape which does not hinder the expansion and contraction of the piston rod 52 and the cylinder 51.

In the illustrated example, the coil spring 45 and the oil damper 50 function in the X direction.
The anti-vibration floor support beam 10 has a depth in the horizontal Y direction orthogonal to the X direction, and a coil spring as a restoring device and an oil damper as a damping device functioning in the Y direction are not shown. The coil spring in the Y direction and the oil damper also have the same configuration as described above. The coil spring is formed of a rust-proof material, and the oil damper has a cover body that can expand and contract.

The operation of the vibration isolating floor structure of the present embodiment configured as described above will be described below. In the vibration-isolating floor structure according to the present invention, for example, when an earthquake occurs, the foundation 1 as the lower structure is displaced, and the fixed floor panel 3 supported on the foundation 1 by the fixed floor support 2 is also displaced together with the foundation 1. . When the base 1 is displaced, the base plate 21 of the vibration-isolation support device 20 is displaced together with the foundation 1, but the support 22 fixed to the vibration-isolated floor support beam 10 is stopped at that position, and the support 22
The base plate 21 and the base plate 21 are relatively displaced via a sliding surface with which they are in contact.

In this manner, the fixed floor panel 3
Is displaced with the displacement of the earthquake, but the vibration-isolated floor panel 12 is not displaced.
Since it does not transmit to zero, the precision equipment 5 is protected from the earthquake.
At this time, grease for improving slippage applied to the base plate 21 is scattered as fine particles, and the fine particles are scattered by the exhaust duct 2 for exhausting air in the internal space of the cover body 24.
It is sucked by 8 and discharged to the outside. When the exhaust device is operated, the air in the internal space of the cover body 24 is exhausted,
Space d between cover body 24 and base plate 21
And contaminants such as fine particles are continuously exhausted to the outside together with air.

Therefore, in a facility such as a clean room where dust and the like need to be removed, the vibration isolating support device 20 is preferable because contaminants such as fine particles are not scattered in the vibration isolating space. Further, even if dust adheres to the upper surface of the base plate 21, the dust can be exhausted to the outside by the exhaust duct 28, so that the polished glossy surface is less likely to be damaged, and the durability of the vibration isolation support device 20 can be improved.

When a relative displacement occurs between the foundation 1 and the vibration-isolated floor frame 10 during an earthquake, the damping device 30 causes the friction member 32
The base plate 31 moves. Friction member 32
Is pressed against the base plate 31 by the compression spring 39, so that vibration energy is converted into, for example, thermal energy and attenuated. Further, since the contact surface between the friction member 32 and the base plate 31 is not a smooth surface, the vibration energy is converted into mechanical energy at the time of relative displacement, and abrasion powder of both is generated. Therefore, contaminants such as abrasion powder do not scatter into the surrounding vibration-isolated space.

The coil spring 45, which is a restoring device, expands and contracts from an initial state due to a relative displacement at the time of an earthquake, and functions to return the foundation 1 and the vibration-isolated floor beam 10 to their original positions. The coil spring 45 is made of stainless steel and does not generate rust, so that fine powder such as metal rust does not scatter during expansion and contraction.
In addition, since the engaging portion between the coil spring 45 and the receiving portions 46 and 47 is covered with the cover 48, contaminants such as metal powder do not scatter.

In the oil damper 50, which is a damping device, the cylinder 51 and the piston rod 52 expand and contract from an initial state due to a relative displacement during an earthquake, a piston (not shown) moves in a viscous body, and vibrates due to viscous resistance at that time. Decreases energy. There is a possibility that metal fine particles or viscous fine particles may be scattered at the sliding contact portion between the cylinder and the piston.
3, the contaminants such as fine powder and fine particles do not scatter.

Further, the stainless steel is used as the H-shaped steel constituting the vibration-isolated floor support beam 10, so that rust does not occur, and rust fine particles do not float in the air. Even if a steel beam is used instead of stainless steel, the inside of the clean room can be formed by forming a surface coating with paint using a non-polluting material on the surface of the steel beam, or by forming a baking coating film on the surface. The scattering of the contaminating fine particles can be prevented.

As described above, in the vibration-isolated floor structure according to the present embodiment, the vibration-isolated floor support beam 10, the vibration-isolated floor strut 11, the fixed floor strut 2, the coil spring 45, and the like are formed of a rustproof material. Further, even if it is not a rust preventive material, since a surface coating film or a surface protective film is formed, contaminants due to rust and the like do not fly into the vibration-isolated space. The vibration-isolation support device 20 generates pollutants such as metal fine powder, but these contaminants are discharged to the outside by the exhaust duct 28, so that the vibration-isolation space is not contaminated.

The damping device 30, the coil spring 45, and the oil damper 50 generate contaminants such as metal fine powder and grease fine particles, which are sealed by the covers 42, 48, and 53 and scattered around. In addition, there is no scattering of ions and molecular organic substances of the organic solvent of the coating and outgas of the coating. For this reason, the vibration-isolating floor structure of the present embodiment is optimal for a clean room, and can maintain cleanliness without contaminating the internal space of the clean room.

Another embodiment of the present invention will be described in detail with reference to FIGS. FIG. 5 is a schematic perspective view showing another embodiment of the vibration-isolating floor structure according to the present invention, in which a portion above a vibration-isolating floor mounting beam is omitted and a part is cut away. FIG. 6 is a detailed perspective view of a main part of the restoring device of FIG. 5, and FIG. 7 is an operation explanatory diagram of the restoring device of FIG. This embodiment is characterized in that a restoration device is different from the above-described embodiment. The other substantially equivalent components are denoted by the same reference numerals, and detailed description is omitted.

In FIGS. 5 and 6, the vibration-isolated floor support beam 10 is H
Form steel is formed by welding vertically and horizontally, a vibration-isolating floor is installed on the upper part through a vibration-isolating floor support (not shown), and a fixed floor is installed from the foundation via a fixed floor support. The vibration-isolated floor support beam 10 is configured so that it can be displaced relative to the foundation by four vibration-isolation bearing devices 20. The movable part of the vibration-isolation support device is covered by a cover 24 fixed to the upper portion, and air in the internal space of the cover is exhausted to the outside by an exhaust duct (not shown). The oil damper 50, which is a damping device, has the cylinder 51 side fixed to the foundation by pin bonding, and the piston rod 52 side fixed to the lower surface of the H-section steel 10 by pin bonding.

The restoring device 60 which is a characteristic part of the present embodiment.
Will be described in detail. Restoring device 60 is the vibration-isolated floor support beam 1
On the lower surface of the H-shaped steel of No. 0, a frame 61 obtained by combining and welding angle materials in a cross-girder shape is bolted. The restoring device 60 includes a frame 61, four restricting members 65 located outside corners of the frame, four tension coil springs 70 connecting the four restricting members, a restricting member and a base anchor 63. And a wire 64 connecting the two.

Here, one of the four corner portions will be described in detail with reference to FIG. The frame 61 is fixed so that the vertical surface of the angle member is located outside, and a long hole 62 in the horizontal direction penetrates the vertical surface of the angle member outside the corner portion. The four regulating members 65 are located so as to be in contact with the outside of the four corners. The regulating member 65 includes two vertical surfaces 66 and 67 in contact with the angle member, and a horizontal surface 68 connecting the two vertical surfaces.
And a diagonal surface 69 fixed in the direction of 45 degrees between the two vertical surfaces. A mounting hole is formed in each of the two vertical surfaces 66 and 67. Connection holes are drilled.

A connecting shaft 71 is connected to both ends of the coil spring 70, and a tip portion of the connecting shaft 71 is formed with a thread portion.
A nut is screwed through the connecting shaft 71 through the long hole 62 of the frame 61 and the mounting hole of the regulating member 65. Therefore,
The restriction member 65 has a long hole 62 as shown by a two-dot chain line in FIG.
Can move along. The coil spring 70 is pretensioned when both ends are attached to the regulating member 65. The four coil springs 70 are incorporated in the frame 61 in such a state that the pretension is applied. An anchor 63 is fixed to a base surface on the outer peripheral side of the regulating member 65, and a wire 64 is connected between the anchor 63 and a diagonal surface 69 of the regulating member 65. Four coil springs 7
0, the frame 61, the four regulating members 65, the four wires 64, and the anchor portion 63 are all formed of stainless steel.

The operation of the restoration device 60 in this embodiment will be described with reference to FIGS. FIG. 7A shows a normal state, in which the four coil springs 70 are pretensioned, and the frame 61 is held at a predetermined position by the four wires 64. That is, the four regulating members 65 are in close contact with the four corners of the double-girder frame 61, and the four coil springs 70 are all the same length. When the foundation 1 moves, for example, to the left with respect to the frame 61 due to an earthquake or the like from the state of FIG. 7A, as shown in FIG. The two regulating members 65 on the left side are
1 and the upper and lower coil springs 70 are extended. Since the two right regulating members 65 are in contact with the frame 61, they stop at that position and the right wire 64 is slightly slackened. Thereafter, the upper and lower coil springs 70 draw the left regulating member 65, so that a restoring action is performed.

In the above description, when the frame 61 moves rightward from the state shown in FIG. 7 (a), the left regulating member 65 separates from the frame 61, and the upper and lower coil springs 70 expand and the frame 61 moves. Can be considered to be pulled back to the left, which has the effect of restoring when the two members move relative to each other. As described above, the restoring device 60 operates as described above when the foundation 1 moves to the left, but similarly, when the foundation 1 moves to the right, the restoring force acts in the opposite direction, and the restoring force is applied. The same applies to the case where the displacement is in the vertical direction, and a restoring action can be achieved for movement in any direction in the horizontal direction.

Next, still another embodiment of the vibration isolating floor structure according to the present invention will be described. FIG. 8 is a sectional view of a main part of the vibration isolating floor structure according to this embodiment. In addition, also in this embodiment,
About the structure substantially equivalent to the above-mentioned embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted. In FIG.
On the foundation 1, the vibration-isolated floor support beam 1 is provided via the vibration-isolation supporting device 80.
0 is supported, and a vibration-isolating floor panel 12 is supported by a plurality of vibration-isolating floor struts 11 on the upper part of the vibration-isolating floor support beam 10.
A fixed floor panel 13 is supported on an upper portion of the foundation 1 via a fixed floor support 2. In this example, no buffer panel is used between the vibration-isolating floor panel and the fixed floor panel.

In the vibration isolator of this embodiment, a plurality of vibration isolator bearings 80 using laminated rubber are used. The vibration isolation bearing device 80 is, for example, a laminated body 83 in which a large number of rubber and steel plates are laminated between an upper flange 81 and a lower flange 82, and a lead plug 84 is pressed into the center of the laminated body. The vibration-isolation bearing device 80 absorbs the relative displacement caused by an earthquake or the like by the laminated body 83 and restores the same, and attenuates it at the lead plug 84, and has a restoring function and an attenuating function. In the illustrated example, other restoring and attenuating devices are not used, but may be used in combination.

In the vibration isolating floor structure shown in FIG. 8, the vibration isolating floor panel 12 installed on the foundation 1 and the precision equipment 5 installed on the vibration isolating floor panel 12 are sealed with a sealing material. It is characterized by. A cover frame 85 made of a pipe or the like is fixed to the upper part of the vibration isolating floor panel 12, and the frame 85 has a shape slightly larger than the precision equipment 5 to be covered. Then, a cover body 86 as a sealing material is covered from the upper part of the frame 85 to one surface of the foundation, and the cover body 8
The lower end of 6 is fixed to the foundation 1 by a stopper plate 87. The cover body 86 has, for example, a sufficient slack portion 86a at the top of the foundation 1 so that the cover body 86 is not stretched when the base 1 and the vibration isolating floor panel 12 are relatively displaced during an earthquake or the like. I have. The cover body 86 is made of a relatively thick, high-strength flexible polyester sheet, a vinyl sheet, or the like.

According to this example, when an earthquake occurs,
, The vibration isolating floor panel 12 is relatively displaced to protect the precision equipment 5 on the vibration isolating floor panel 12 from the earthquake. At this time, the vibration-isolating support device 80 includes the upper flange 81 and the lower flange 8.
2 moves in parallel to absorb and attenuate the vibration, and fine dust and the like are generated from the laminate 83 and the lead plug 84. However, this fine dust does not go out of the inside of the cover body 86, and contaminants generated from the precision equipment 5 do not come out of the cover body 8 as well.
6. Sealed inside. As described above, when the vibration isolation floor panel 12 is installed in the clean room and the precision equipment 5 is installed on the vibration isolation floor panel 12, the vibration isolation support device 80 and the precision equipment 5
Contamination from the clean room can be avoided.

In this example, since the vibration-isolated floor support beam 10 is located inside the cover 86, even if rust is generated using a rusting material such as a steel frame, the rust remains in the space outside the cover. Although it does not scatter, it goes without saying that a rust preventive such as stainless steel may be used. Similarly, the anti-vibration floor support 11, the anti-vibration floor panel 12, and the frame 85 do not need to be provided with a rust preventive material. May be formed. Although the cover 86 is configured to be supported by the frame 85, an arm or the like may be protruded from the precision device 5 and the arm may support the cover, or may be directly covered by the device body. .

In the above-described embodiment, an example in which a sliding bearing type insulating device is used as the vibration isolation bearing device has been described. However, a ball bearing type having a large number of steel balls between a base plate and a bearing body is shown. The vibration-isolation bearing device may be changed as appropriate by using an insulation device using a cross linear bearing in which the blocks are connected so that the rails are orthogonal using two linear guides on which the blocks move directly on the rails. Is also good.

[0048]

As can be understood from the above description, in the vibration isolating floor structure of the present invention, the members constituting the vibration isolating device do not generate contaminants such as rust, and the vibration isolating device does not generate fine powder or fine particles caused by wear. Even if fine particles such as grease are generated, these contaminants are sealed and discharged to the outside through an exhaust duct, so that the space in which the vibration isolator is installed does not pollute. And the cleanliness can be kept high.

Further, according to the vibration isolating floor structure of the present invention, the members constituting the vibration isolating floor do not generate pollutants, and the vibration isolator does not scatter the pollutants. No pollution. In addition, since various contaminants generated from precision equipment installed on the vibration isolation floor are sealed with the cover body, when used in a clean room, the internal space will not be polluted.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of an embodiment of a vibration-isolating floor structure according to the present invention.

FIG. 2 (a) is a detailed sectional view of the vibration isolation bearing device of FIG. 1,
(B) is a sectional view taken along line AA of (a), and (c) is a perspective view of (b).

3A is a detailed sectional view of the damping device of FIG. 1, and FIG.
3A is a sectional view taken along line BB of FIG.

FIG. 4A is a perspective view of the cover body shown in FIGS.
(B) is a perspective view of another example of the cover body.

FIG. 5 is a perspective view of a main part of another embodiment of the vibration isolating floor structure according to the present invention.

FIG. 6 is a detailed perspective view showing a corner portion of the restoration device of FIG. 5;

7A and 7B are schematic diagrams for explaining the operation of the restoring device in FIG. 5, wherein FIG. 7A shows a normal state and FIG.

FIG. 8 is a sectional view of a main part showing still another embodiment of the vibration-isolating floor structure according to the present invention.

[Explanation of symbols]

1 foundation (substructure), 5 precision equipment, 10 base isolation beams, 11 base supports, 12 base panels,
20 vibration-isolation bearing device, 24 cover body, 2
8 exhaust duct, 30 damping device, 42, 44
Cover body, 45 coil spring (restoring device), 50 oil damper, 53 cover body, 60 restoring device,
80 vibration-isolation bearing device, 85 frames,
86 Cover body

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Teriya Minami 1-25-1, Nishishinjuku, Shinjuku-ku, Tokyo Taisei Corporation F-term (reference) 3J048 AA05 BE01 BE12 DA03 EA38

Claims (5)

[Claims] 1. A vibration isolator comprising a lower structure, a vibration isolating floor located above the lower structure, and a vibration isolator disposed between the lower structure and the vibration isolating floor. A floor structure, wherein the vibration-isolating device seals at least a portion relatively displaced from the lower structure with a flexible member. 2. A vibration isolator comprising a lower structure, a vibration isolating floor positioned above the lower structure, and a vibration isolator disposed between the lower structure and the vibration isolating floor. A floor structure, wherein the vibration isolation device covers at least a portion that is relatively displaced with the lower structure with a cover body, and the cover body includes an exhaust duct that exhausts air in its internal space to the outside. A vibration-isolated floor structure. 3. A metal member forming the vibration isolator and the vibration isolating floor is made of a rust-proof material, a material having a surface protective layer, or a material having a surface coating film.
Or the vibration-isolated floor structure according to 2. 4. A lower structure, a vibration-isolating floor located above the lower structure, a vibration-isolating device disposed between the lower structure and the vibration-isolating floor, and installed on the vibration-isolating floor. A vibration isolating floor structure comprising: a vibration isolating device, a vibration isolating floor, and a device that are hermetically sealed by a sealing material. 5. The metal member forming the vibration isolator and the vibration isolating floor is made of a rust-proof material, a material having a surface protective layer, or a material having a surface coating film.
The vibration-isolated floor structure described in.