JP2002268145A - Projector with chart projecting function - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a projector which makes it possible to compare a projection image of an object with a reference chart without using any sheet type chart. SOLUTION: The projector which projects the image of the object on a projection surface 153 is equipped with an image display device 200 which displays a chart image 250 showing a chart so that it can be observed on the projection surface. The image display device 200 displays the chart image 250 so that the image can be rotated and displaced on a projection surface 550.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projector for projecting an image of an object when inspecting or measuring the object, and more particularly to a projector for comparing and contrasting an object image with a reference graphic called a chart. The present invention relates to a projector that can be used for performing measurement and the like.

[0002]

2. Description of the Related Art A projector comprises a screen, a mounting surface on which a target object (object to be measured) is mounted, an illumination section for illuminating the object to be mounted mounted on the mounting surface, and an illumination section. And a magnifying projection optical system for projecting a magnified image of the object to be measured illuminated on the screen on the screen.

[0003] As a method of making a pass / fail determination of the dimensions of a device under test using a projector, there is a comparative measurement called a chart measurement. This means that a sheet called a chart is pasted on the screen of the projector, and if the image of the DUT falls within the range of the engraved line indicating the dimensional tolerance of the DUT drawn on the chart, it is judged as pass. Is what you do.

[0004]

When a chart is measured by a projector, an operation of pasting a chart corresponding to an object to be measured on a screen is performed. In general, the chart is different for each device under test, so it is necessary to change the chart each time the device under test changes. In addition, even if the measurement target is the same, if the magnification is increased to ensure accuracy or the like, a corresponding chart must be prepared for each measurement location, that is, for each portion to be enlarged and projected. Of course, every time the magnification is changed or whenever the enlarged portion is changed, it is necessary to change the magnification to the corresponding chart.

[0005] In addition to the trouble of changing the chart, there is a problem of storage management of the chart itself. That is,
A plurality of charts are provided for each portion to be measured, for each magnification, and for each enlarged portion. Therefore, many charts exist. As a result, there is a problem in that it takes time and effort to save and manage the chart as the number of parts to be measured increases.

An object of the present invention is to provide a projector capable of comparing a projected image of an object (object to be measured) with a reference chart without using a sheet-like chart. .

[0007]

In order to achieve the above object, the present invention provides a projector for projecting an image of an object on a projection surface, comprising an image display device for displaying a chart image on the projection surface. The image display device is characterized in that the chart image can be rotated and displaced within the projection plane.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. In the following embodiment, an image of a target object (measured object) is projected, and an image of a reference figure (chart) is displayed so as to overlap the projected image.
A case in which the dimension measurement and inspection of the target object are performed will be described as an example. Of course, the invention is not limited to such measurements and inspections.

FIG. 1 is a diagram showing a configuration of a projector according to a first embodiment of the present invention. The projector shown in FIG. 1 includes a part of the original projection device 100 that projects an object to be measured, and an image display device 200 that displays a chart image showing a chart so as to be observable on a projection plane of the projection device.
Note that FIG. 1 illustrates both a state in which the screen 150 is viewed from the front and a state in which the screen 150 is viewed from the side, for convenience of description. This is the same for FIG.

The projection apparatus 100 includes an illumination system 110 for illuminating the object 500, a stage 120 for mounting the object 500, and an objective lens system 13 for capturing an image of the object.
0, a projection system 140 for projecting the object image formed by the objective lens system 130, a screen 150 for displaying a projected image of the object to be measured, and a chart image displayed on the screen 150 on the screen 150. And a chart image displacement instruction operation switch group 160 for receiving an instruction operation for displacing.

The illumination system 110 has an epi-illuminator 111 for epi-illumination and a trans-illuminator 112 for trans-illumination. The illumination light from the illumination system 110 is also used as a backlight for a liquid crystal display element 230 described later.

Although not shown, the stage 120 has an X
A feed mechanism in the Y direction is provided. In the present embodiment, an operation mechanism for performing a feed operation in each of the X and Y directions is provided. With this feed mechanism, the object to be measured can be positioned on the XY plane. Also, on stage 120,
Although not shown, a feed mechanism in the Z-axis direction that moves in the optical axis direction is provided. Thereby, the objective lens system 130 can be focused on the object to be measured. Stage 1
The device under test 500 is placed on the test surface 121 of the device 20.

The objective lens system 130 has an objective lens (not shown) and a half mirror 131 for epi-illumination. The objective lens system 130 is not limited to one type, and a plurality of lens systems having different magnifications may be prepared in advance, and may be mounted on, for example, a turret (not shown) and exchanged for use.

The projection system 140 enlarges the image of the DUT 500 formed by the objective lens system 130 and projects it on a screen 150. It comprises a small mirror 141 and a large mirror 143, and a projection lens system 142 interposed therebetween. Here, the mirrors 141 and 143 change the direction of the optical path, and can be increased or decreased as needed. Further, a prism may be added in order to establish a projection image.

The screen 150 includes a screen plate 151 for displaying a projection image projected by the projection system 140, and a screen frame 152 surrounding the screen plate 151. In the present embodiment, the screen plate 151 is
It is formed in a disk shape. Also, the screen frame 152
Is formed in an annular shape. This screen 150
In the present embodiment, as one device, the illumination system 110, the stage 120, and the objective lens system 13
0, and are provided in a common housing with the projection system 140.
Of course, the screen 150 can be provided separately from the housing that houses the objective lens system 130 and the like. The projection image 550 is projected and displayed on the projection surface 153 of the screen plate 151.

Chart image displacement instruction operation switch group 16
0 indicates that the chart image displayed on the projection surface 153 of the screen 150 is rotationally displaced on the screen 150,
And / or receiving an instruction operation for performing translational displacement (displacement due to linear movement).

For example, as shown in FIG. 4, as switches for instructing translational displacement, an X plus direction indication switch 161, a Y plus direction indication switch 162, an X minus direction indication switch 163, and a Y minus direction indication switch are provided. And a switch 164. These are button switches each having a key top on which an arrow-shaped symbol indicating the translation direction is shown. Each switch 161-1
Numeral 64 denotes a shape and an arrangement simulating the XY coordinate axes as a whole. Then, each of these switches 161-1
64 is connected to the XY movement detection circuit 165. The output of each of the switches 161-164 is supplied to an XY movement detection circuit 165.
, Which is pressed and detected, and output as information indicating the direction and amount of translational displacement. That is, the translation direction is detected by the pressed switch, and the displacement amount is detected by the pressing time or the number of times the switch is pressed. When switches in different directions are pressed, information indicating the respective detection directions and information indicating the amount of displacement for each are output.

The switch for indicating the rotation direction includes a clockwise rotation instruction switch 166 and a counterclockwise rotation instruction switch 167. These are configured by button switches each having a key top on which a curved arrow-shaped symbol indicating the rotation direction is displayed. Each switch 166
And 167 are arranged on the circumference in a shape imitating an arc as a whole. And these switches 166
And 167 are connected to a rotation detection circuit 168. The outputs of the switches 166 and 167 are processed by the rotation detection circuit 168 to detect which of them has been pressed and how much, and output as information indicating the direction of the rotational displacement and the amount of displacement. That is, the rotation direction (clockwise, counterclockwise) is detected by the pressed switch. The amount of displacement is detected based on the pressing time or the number of times of pressing the switch.

Each of the above-mentioned switches may be constituted by a pressure-sensitive switch, and the amount of displacement may be determined according to the pressing force.

A software key is displayed on a screen 150 as shown in FIG. 8, for example, instead of, or in addition to, the chart image displacement instruction operation switch group 160, thereby displaying the chart image. A displacement instruction may be input. That is, in FIG.
A chart image displacement instruction input receiving unit 270 is provided.
The chart image displacement instruction input receiving unit 270 includes an X-plus direction instruction input unit 271 and a Y-plus direction instruction input unit 27.
2. X minus direction instruction input unit 273, Y minus direction instruction input unit 274, and counterclockwise rotation instruction unit 2
77 and a clockwise rotation instruction unit 276 are displayed. Then, an operation input is performed by pointing one of the pointing units with the mouse pointer MP. Operation input processing is
Basically, the chart image displacement instruction operation switch group 16
0, XY movement detection circuit 165 and rotation detection circuit 168
The information processing apparatus 210 in FIG. 1 performs the same processing as the function described above by software processing.

In addition, the following can be performed instead of or in addition to the operation input method described above.

A: A part of the chart image is clicked with a mouse or the like and the mouse pointer is dragged to move or rotate the image in the dragging direction.
Instead of using a mouse, it may be operated using a trackball, an operation pad, or the like. b: Displacement operation may be instructed by providing and operating an operation switch (an instruction for inputting an angle value using a 10-key key, an instruction for inputting a rotation using a push button or a jog dial) outside the projector screen.

As shown in FIG. 1, the image display device 200 comprises a liquid crystal display device 230 and a display control device for displaying a chart image on the liquid crystal display device 230. The display control device comprises an information processing device 210. And a display drive circuit 220. The liquid crystal display element 230 is composed of, for example, a TFT color liquid crystal panel in which liquid crystal cells are arranged in a matrix. The present embodiment is a backlight-type liquid crystal display element that performs display by transmitted light. An image is displayed by allowing each liquid crystal cell to transmit or block light according to a display signal voltage applied from the outside. The liquid crystal display element 230 is arranged on the image plane of the objective lens system 130. The image displayed by the liquid crystal display element 230 is projected and displayed on the projection surface 153 of the screen 150 via the projection system 140. As a result, the projection image 550 of the device under test and the chart image 250 formed on the liquid crystal display element 230 are displayed on the projection surface 153. In this example, a common projection system 140 is used. However, the configuration may not be common. For example, all or a part of the projection system may be configured to use separate projection devices and image display devices.

The display drive circuit 220 is connected to the information processing device 21.
0 to generate a signal voltage for driving the liquid crystal display element 230 based on the image data from 0.
Drive.

The information processing device 210 is constituted by a general computer. For example, as shown in FIG. 2, an information processing device main body 211, a keyboard 212 and a mouse 2
13 and an external storage device 214 such as a hard disk device for storing programs, data, and the like. The information processing apparatus main body 211 includes a central processing unit (CPU) 211a that performs various processes, and a CPU 211a.
Read only memory (RO)
M) 211b and random access memory (RAM) 2
11c.

The information processing device 210 is connected to a chart image displacement instruction operation switch group 160, an original chart data holding device 300, a display drive circuit 220, and an encoder 241.

In the present embodiment, the original chart data holding device 300 stores original chart data, which is graphic data that is a reference to be compared with a measured object. The device 300 is configured by, for example, a CAD system. The original chart data includes, for example, design data of the device under test. A chart image is generated based on the design data. The original chart data is stored in a file for each DUT. In the present embodiment, the original chart data holding device 300 is provided independently, but the information processing device 210 may store the original chart data.

In this embodiment, a liquid crystal display element 230 is connected as a display device. However, a display device unique to the information processing device 210 may be separately connected. The chart image can be displayed on the display device. However, a projected image of the device under test is not displayed.

In this embodiment, a program to be executed by the information processing device 210 is installed in the external storage device 214. This program, for example,
It can be obtained by reading from a storage medium such as a CD-ROM or by downloading via a network. The function is constituted by a module as shown in FIG. 3, for example. That is, a chart display operation accepting process 2110 that performs a process for accepting an input operation on how to display a chart of a device under test and how to display the chart data, based on designated conditions, Chart data calculation processing 2120 for generating a target chart image, layout adjustment input receiving processing 2130 for receiving an instruction operation for changing the layout, posture, and the like of the displayed chart image, and instructions for layout adjustment The chart image is translated,
Chart image displacement processing 2140 for performing processing for performing displacement such as rotation.

The screen 1 is displayed by the image display device 200.
Although what is displayed in 50 differs depending on the data held in the original chart data, at least a chart image 250 is displayed. In addition, additional display of character data or the like can be performed. In the present embodiment, the additional display data can display the file name of the original chart data, the name of the device under test, the code, the application, and other notes. Character data and the like are displayed in the auxiliary display unit 260.
Can be displayed. Additional display unit 26
0 can be configured to provide a window on the screen plate 151 for display. In this way, the display position can be determined independently of the chart image. Also, by changing the size of the window,
The number of characters that can be displayed can be increased or decreased. Also,
It is also possible to divide the accompanying display data into a plurality of hierarchies and, correspondingly, to make the windows have a hierarchical structure so that data of different hierarchies can be viewed by selecting the windows. In addition, such an auxiliary display is displayed on the screen 1.
It may be displayed on a display device different from 50. By doing so, the measurement field of view can be expanded.

In this embodiment, the screen frame 152 is provided rotatably. The screen plate 151
May be rotatable together with the screen frame 152. Further, if a grid, crosshairs, coordinate axes, and the like are displayed in advance on the screen plate, it can be used to compare the coordinate axes with the displacement of the coordinate axes of the chart image.

A detector for detecting the direction of rotation and the amount of angular displacement of the screen frame 152 is provided. In the present embodiment, an encoder 241 is used as a detector. Of course, it is not limited to this. For example, the displacement may be detected using a potentiometer or the like. Encoder 2
41 generates information indicating the rotation direction and information indicating the rotation angle displacement amount based on the detected signal, and sends the information to the information processing apparatus main body 211.

Here, the encoder 241 has a function of detecting the direction and amount of rotation of the chart image.
Therefore, the same function as the clockwise rotation instruction switch 166 and the counterclockwise rotation instruction switch 167 of the chart image displacement instruction operation switch group 160 described above can be performed. That is, when the operator rotates the screen frame 152, the encoder 241 detects the rotation and acquires the rotation direction and the rotation displacement amount. In the present embodiment, regarding the rotational displacement, the chart image displacement operation instruction switch group 160
And the encoder 241 may be used. Moreover, you may use together.

Next, the operation of the projector according to the present embodiment, in particular, the operation of displaying a chart image will be further described with reference to FIGS.

First, an object 500 to be measured in the projector shown in FIG.
And focus on the objective lens to prepare for measurement. In this state, the device under test 500 is illuminated, for example, by epi-illumination from the epi-illuminator 111, and the device under test 500
Is reflected by the objective lens system 130 to form an image. Then, the light is projected onto the projection surface 153 of the screen plate 151 via the projection system 140. In this state, a projected image of the device under test can be seen.

Next, the measurement processing by the information processing device 210 is started. The information processing device 210 shown in FIG.
By executing the chart display operation receiving process 2110, first,
An original chart list is displayed (S2111). Here, the original chart list indicates that the information processing device 210
It is stored in the external storage device 214 in advance, and is displayed. Of course, the data may be read from the original chart data holding device 300 and displayed. The display of the original chart list is
For example, this is performed as shown in FIG. Liquid crystal display element 230
Then, data for generating the original chart list display screen is sent, and the original chart selection window 280 is displayed on the projection surface 153 of the screen 150. In the original chart selection window 280, for example, a message 281 “Please select an original chart” and a selection frame 282 are displayed.
An icon 284 indicating a plurality of files each storing the original chart data is displayed. In this state, it waits for selection by clicking the mouse 213 (S2112).

Here, when any of the original charts is selected, the data of the target chart is read from the file of the selected original chart, and an image is generated based on the data. Further, character data included in the file, such as the name of the file and other annotations, is displayed (S21).
13). That is, chart data calculation processing 2120 is executed. Here, the entire image of the object is displayed at the initially set size. Further, a message requesting input of display conditions is displayed for the chart data. That is, an instruction to display a display range, for example, display of the entirety, display of a part, or the like is received. In addition, a message indicating that the designation of the display magnification is accepted is displayed. The display of the portion can be designated by an operation such as enclosing a portion to be cut out with a frame in the chart image of the entire DUT. Further, in the case of an aggregate of a plurality of parts, it is also possible to specify only the part to be displayed and to display only that part.

For partial display, it is also possible to separately prepare chart data of a part in advance and select it to display only that part.

Thereafter, the information processing apparatus 210 executes a chart display operation receiving process 2110 to receive designation of a display range, a magnification, and the like (S2114). When the input is completed, or when there is a special key input indicating that no input is made, for example, an enter key is input, the designation reception ends (S2115).

The information processing apparatus 210 generates a designated chart image by the chart data calculation processing 2120, sends it to the liquid crystal display element 230, and displays it on the screen 150 (S2116). Then, for example, a message such as "Please confirm whether position correction and angle correction of the chart image are necessary" is displayed. Also, a message such as "Please input a correction instruction" is displayed. Here, the input of information on the displacement direction and the displacement amount regarding the translation or rotation from the chart image displacement instruction operation switch group 160 or the information on the displacement direction and the displacement amount regarding the rotation from the encoder 241 is awaited. When the information on the displacement direction and the displacement amount is input, it is accepted (S21).
17). The translation can be dealt with by displacing the object to be measured, and the chart image can be adjusted only by the rotational displacement.

Based on the received information on the displacement direction and the displacement amount, display of images and characters accompanying the translation and / or rotation displacement of the target chart image is processed (S2118).
Here, it is assumed that θ is detected as the amount of rotational displacement, and the chart image is rotationally displaced by θ accordingly.
The conversion process of the chart image in this case will be described with reference to FIG.

In this case, as shown in FIG. 5, an arbitrary point A in the chart image is rotated by θ, so that the XY coordinate of the point A is (X ₁ , Y ₁ ) Assuming that the XY coordinates of the moved point A ′ are (X ₂ , Y ₂ ), the point A
Is converted into polar coordinates. Assuming that the angle in polar coordinates is θ ₀ and the length in polar coordinates is r ₀ , the point A is

[0043] ^{_{θ 0 = tan -1 (Y 1}} / X 1) ...... (1) r 0 = √ (X 1 2 + Y 1 2) ...... (2)

Can be expressed as follows.

Thus, the coordinates (X ₂ , Y ₂ ) of the point A ′
Is

[0046] _{X 2 = r 0 cos (θ} 0 + θ) = √ (X 1 2 + Y 1 2) cos (tan -1 (Y 1 / X 1) + θ) ...... (3) Y 2 = r 0 sin ( _{θ 0 + θ) = √ (} X 1 2 + Y 1 2) sin (tan -1 (Y 1 / X 1) + θ) ...... (4)

Is calculated. In the liquid crystal display element, the display of the point A is rewritten to the display of the calculated point A '. In this way, the conversion process is performed for all points of the chart image (S2119).

This calculation is performed according to the input of the displacement instruction operation.
By calculating and displaying at any time, the screen frame 1
The chart image can be rotated in real time with the rotation operation of 52. Similarly, the chart image can be displaced and displayed in real time according to an instruction operation by the chart image displacement instruction operation switch group 160.

It should be noted that the display such as the auxiliary display section 260, which is not directly related to the displacement of the chart image, is not displaced. However, it goes without saying that the display position can be changed by dragging the additional display section 260 with the mouse pointer MP.

In this way, it is possible to make the position and the inclination of the chart image coincide with the position and the inclination of the projection image. In this state, the operator can perform dimension measurement, inspection, and the like by comparing and comparing the projected image with the chart image.

By the way, it may be necessary to change the projection condition for the same object to be measured or the like. In this case, it is possible to start over from the beginning, but it is inconvenient, so it is preferable to be able to deal with it. For example, the information processing device 210 allows the liquid crystal display device 230
Then, a control bar is displayed, a biweekly menu is displayed on the bar, and by selecting the menu, it is possible to proceed to the next state. Specifically, this can be dealt with by displaying an operation unit for selecting a change in the measurement condition of the device under test, an operation unit indicating the end of measurement, and the like. Also, here, an operation unit indicating the end of the displacement instruction operation, an operation unit returning to the selection of the original chart, and the like can be further displayed. These displays are displayed on the screen 150.

Assuming that there is such a display,
In the present embodiment, the information processing apparatus waits for an operation on the operation unit described above (S2120). Here, the mouse pointer M
When an instruction to the operation unit for selecting the change of the measurement condition of the device under test is input by P, step S2 in FIG.
The process returns to 114, and the process is repeated from there. On the other hand, when an instruction to the operation unit indicating the end of the measurement is input, the present process ends.

It should be noted that dimension characters representing dimensions may be added to the chart image. In this case, when what is described as shown in FIG. 9A is rotated by 90 ° as shown in FIG. 9B, the characters of dimensions B and D are turned upside down. As a result, it becomes difficult for an operator to read.
Similarly, when inverted by 180 °, all characters are vertically or horizontally inverted, making it difficult to read. So -45 ° -1
When rotating by 35 °, 45 ° to 135 °, only the characters written at an angle of 46 ° to 135 ° in the original chart data are subjected to the character reversing operation by the information processing device 210. Similarly, at the time of rotation from 136 ° to 225 °, the inversion operation of all characters is performed by the information processing device 210 to perform display. By performing such processing, the operator easily and quickly compares and determines the displayed chart image and the image of the device under test.

In the example described above, the encoder 24
1. A chart image displacement instruction switch group 160 is used to issue a chart image displacement instruction and to detect a displacement direction and a displacement amount. The present invention is not limited to this as described above. For example, in this embodiment,
The mouse pointer MP can be placed at an arbitrary position on the chart image, for example, at the position of a point A shown in FIG. 5, and the chart image can be translated and rotated by dragging with the mouse 213. The displacement direction and the displacement amount at this time are acquired for each of the translation displacement and the angular displacement, and the displacement processing of the chart image is performed.

In the above embodiment, the liquid crystal display element 230
Does not rotate, but converts the coordinates of the chart image to rotate. The present invention is not limited to this. It is sufficient that the projected image and the chart image can be relatively displaced. In the following second and third embodiments, the chart image is relatively displaced with respect to the projected image by rotating the liquid crystal display element. Note that, in addition to the configuration for rotating the liquid crystal display element, the chart image displacement instruction operation switch group 160 and / or the chart image displacement instruction input receiving unit 270 described above can be provided so that they can be used together. The embodiment shown in FIG. 10 and FIG.
This is an example. However, the chart image displacement instruction operation switch group 160 and the chart image displacement instruction input receiving unit 2
It is also possible to adopt a configuration in which neither is provided.

The embodiment shown in FIG. 10 has basically the same configuration as the embodiment shown in FIG. That is, the projector shown in FIG. 10 includes a part of the original projection device 100 that projects the object to be measured and an image display device 200 that displays a chart image showing a chart so as to be observable on the projection surface of the projection device. Prepare. Note that the same components as those used in the embodiment shown in FIG. 1 are denoted by the same reference numerals. The following description focuses on differences from the apparatus of FIG. 1, and duplicate description will be omitted as much as possible.

In the present embodiment, the liquid crystal display element 230
It is arranged to be rotatable about the optical axis of the objective lens system 130. An actuator 243 for rotating the liquid crystal display element 230 is connected. The actuator 243 is connected to a rotation drive circuit 242, and is driven and controlled by the rotation drive circuit 242.

On the other hand, the screen frame 152 is rotatably provided. An encoder 241 is provided on the screen frame 152 as a detector for detecting the rotational displacement of the screen frame 152. The encoder detects the rotation of the screen frame 152 and outputs information indicating the displacement direction and the displacement amount of the rotation. Rotation drive circuit 24
2 receives the information indicating the displacement direction and the displacement amount, generates a signal for causing the liquid crystal display element 230 to perform an equivalent rotational displacement based on the information, and sends the signal to the actuator 243.

As a result, the liquid crystal display element 230 is rotated by the actuator 243 at an angle equivalent to the rotation of the screen frame 152. Therefore, an image such as the chart image 250 displayed on the liquid crystal display element 230 is displaced by the same angle as the liquid crystal display element 230 rotates. As a result, the chart image 250 can be rotated mechanically and in real time with the rotation of the screen frame 152. Then, it is possible to perform an operation so as to eliminate the angular deviation from the projected image 550.

In this embodiment, a chart image displacement instruction operation switch group 160 is provided. Accordingly, this instructs the translation displacement and the rotation displacement by the screen frame 152.
It can be configured to be performed by turning. In addition, a configuration can be used in which the displacement caused by the rotation of the screen frame 152 is used for coarse movement adjustment and the chart image displacement instruction operation switch group 160 is used for fine displacement adjustment. In this case, the mechanical rotational displacement of the liquid crystal display element 230 and the rotational displacement due to the conversion of the chart image drawn on the liquid crystal display element 230 are mixed. Of course, the displacement by the chart image displacement instruction operation switch group 160 is
It is executed based on the calculation in the information processing device 210.

In this embodiment, the liquid crystal display element 23
Since the rotation itself is rotated, the display such as the auxiliary display section 260 displayed on the liquid crystal display element 230 is also rotated and displaced. Therefore, in order to make the additional display unit 260 stand still and display the information, the information from the encoder 241 is sent to the information processing device 210, and the coordinate conversion may be performed so as to rotate the information display device 260 in a direction opposite to the rotation direction. Good.

In the present embodiment, the operation of instructing the rotation of the liquid crystal display element 230 is not limited to the operation of rotating the screen frame 152. For example, the rotation operation may be performed by an operation of the chart image displacement instruction operation switch group 160 or an operation of the chart image displacement instruction input receiving unit illustrated in FIG. 8 described above. Further, the liquid crystal display element 230 may be configured to be able to be rotated by a manual operation directly or via a power transmission mechanism.

Next, a third embodiment shown in FIG. 11 will be described. The description will focus on the differences from the embodiment shown in FIGS.

That is, in this embodiment, the screen 15
0 and the liquid crystal display element 290 are arranged so as to overlap with each other. The liquid crystal display element 290 is provided rotatably with respect to the screen 150. Moreover, the liquid crystal display element 2
The element 30 has a large area. That is, the liquid crystal display element 29 is large enough to display a chart image of the same size as the projected image projected on the screen 150.
0 is used.

The projection apparatus 100 has a simple configuration, and includes an illumination system 110, a stage 120, a projection lens system 146, a small mirror 141, and a large mirror 143. Here, the projection lens system 146 has a half mirror 147 for epi-illumination.

The image display device 200 includes an information processing device 210 and a display drive circuit 220 as in the case of FIGS.
And a chart image displacement instruction operation switch group 160. The information processing device 210 is connected to the original chart data holding device 300.

According to the present embodiment, when an object to be measured is placed on the stage 120, an enlarged image is projected on the projection surface 153 of the screen 150 via the small mirror 141 and the large mirror 143 by the projection lens system 146. You. On the other hand, the information processing device 210 generates a chart image of the device under test and causes the liquid crystal display element 290 to display the chart image via the display drive circuit 220. Thus, the operator can observe the projected image and the chart image on the projection surface 153 of the screen 150 in a superimposed manner. Here, when there is a shift in the overlap between the projected image and the chart image, it is necessary to relatively displace the chart image and the projected image so that the positions and angles of the two are aligned. Therefore, the stage on which the non-measurement object is placed can be translated and displaced on the XY plane so as to be aligned with the chart image. Further, the chart image displacement instruction operation switch group 160 can instruct the translation displacement of the chart image.
Next, in order to rotate the chart image, the liquid crystal display element 290 is rotated so that the angle of the chart image is equal to the angle of the projected image. This makes it possible to displace the chart image and the projection image by a relative angle, thereby eliminating an angle shift. Note that the chart image displacement instruction operation switch group 160 can be used to make a rotational displacement. At this time, the operation can be divided into the coarse movement and the fine movement as in the embodiment of FIG.

In this embodiment, the liquid crystal display element 290 may be fixed, and the screen 150 may be rotatable. In this case, an encoder or the like may be provided as a detector for detecting the rotation of the screen, and the output of the encoder may be processed by the information processing device to rotate and rotate the chart image.

Further, in this embodiment, the liquid crystal display element 290 may be rotated by an actuator as in the embodiment shown in FIG. For example, the rotation operation may be performed by an operation of the chart image displacement instruction operation switch group 160 or an operation of the chart image displacement instruction input receiving unit illustrated in FIG. 8 described above. Further, the liquid crystal display element 290 may be configured to be able to be rotated by a manual operation directly or via a power transmission mechanism.

In each of the above-described embodiments, the individual sheets are not used as charts, but CAs.
A chart image is generated and displayed based on original chart data based on design data such as D. The original chart data is digital data, for example,
Can be managed in file format. Therefore, storage is easier than a sheet or the like. Also, even if there are many types, management is easy.

When comparing with a projected image, the position,
A displacement operation for adjusting the deviation such as the angle can be easily performed. One is to perform a process of displacing the chart image on the display element screen based on the relative displacement amount with respect to the projected image, so that the projected image and the chart image can be aligned and arranged. This makes it easy to arrange the projected image and the chart image in alignment. in this case,
The operation of instructing the rotational displacement can be performed, for example, by manually rotating the screen frame. In such a case, the operation by rotating the screen has the same operability as that of the conventional projector, so that an effect that the mastery of the operation becomes faster can be expected. In addition, since the outermost periphery of the screen of the projector is to be operated, it is easy to actually increase the resolution.

The operation for instructing the rotational displacement can be performed by, for example, an operation switch provided outside the screen. In this case, it is possible to cope with minute alignment not only in the rotation direction but also in the XY direction. Instead of a hardware switch, a switch symbol may be displayed on a display screen, and the switch symbol may be indicated by a pointing device. In this case, switches and the like for performing translational displacement and rotational displacement can be omitted.
Therefore, it is advantageous in terms of cost.

In the conventional projector, when the chart is pasted on the screen, the characters (title tolerance information) written on the chart rotate with the rotation of the screen, and it takes time for character recognition. However, in the present invention, if the rotation of character information or the like is optimized, recognition becomes easier.

In the case of inspecting a large object that cannot be placed on the stage, the present invention can be applied to projecting a chart image onto the object via a projection optical system and inspecting the object. In this case, the objective lens system, the illumination system, and the screen can be omitted.

[0075]

According to the present invention, a projected image of an object can be compared with a reference chart without using a sheet-like chart. Moreover, it can be easily performed.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram illustrating a configuration of a projector according to a first embodiment of the present invention.

FIG. 2 is a block diagram illustrating an outline of a hardware system configuration of an information processing apparatus used in the present invention.

FIG. 3 is an explanatory diagram illustrating an example of a functional configuration realized by the information processing device;

FIG. 4 is a block diagram illustrating an example of a configuration of a chart image displacement instruction operation switch group.

FIG. 5 is an explanatory diagram illustrating a display of a chart image on a projection surface of a screen and an example of a rotation operation thereof.

FIG. 6 is a flowchart illustrating a procedure of a chart image display process and a displacement operation process performed in the information processing apparatus.

FIG. 7 is an explanatory diagram showing an example of a screen for selecting an original chart for displaying a chart image.

FIG. 8 is an explanatory diagram illustrating a display example of a chart image and a chart image displacement instruction input accepting unit displayed on a screen by a liquid crystal display element.

FIGS. 9A and 9B are explanatory diagrams showing an example of reverse display of characters displayed along with a chart image.

FIG. 10 is an explanatory diagram showing a configuration of a projector according to a second embodiment of the present invention.

FIG. 11 is an explanatory diagram illustrating a configuration of a projector according to a third embodiment of the present invention.

[Explanation of symbols]

100: Projection device, 110: Illumination system, 111: Transmission illumination, 112: Epi-illumination, 120: Stage, 121: Test surface, 130: Objective lens system, 131: Half mirror,
140 Projection system, 141 Small mirror, 142 Projection lens system, 143 Large mirror, 150 Screen, 151
... Screen plate, 152 ... Screen frame, 153
... Projection plane, 160 ... Chart image displacement instruction operation switch group, 161 ... X plus direction instruction switch, 162 ... Y plus direction instruction switch, 163 ... X minus direction instruction switch, 164 ... Y minus direction instruction switch, 165
XY movement detection circuit 166 clockwise rotation instruction switch 167 counterclockwise rotation instruction switch 168 rotation detection circuit 200 image display device 210 information processing device 220 display drive circuit 230, 290: liquid crystal display element, 241: encoder, 242: rotation drive circuit,
243 ... actuator, 250 ... chart image, 26
0: additional display unit, 270: chart image displacement instruction input receiving unit, 271: X plus direction instruction input unit, 272 ... Y plus direction instruction input unit, 273 ... X minus direction instruction input unit, 274 ... Y minus direction instruction input Part, 275 ... XY
Movement detection circuit, 276... Counterclockwise rotation instructing section, 277
... clockwise rotation instructing section, 278 ... rotation detection circuit, 280
... Operation input unit, 300 ... Original chart data holding device

Claims (8)

[Claims] 1. A projector for projecting an image of an object on a projection surface, comprising: an image display device for displaying a chart image on the projection surface, wherein the image display device rotates the chart image in the projection surface. A projector capable of dynamic displacement. 2. The projector according to claim 1, wherein the image display device includes a display element for displaying the chart image, and display control for displaying the chart image on the display element based on image data. And a projector. 3. The projector according to claim 2, wherein the image display device includes a projection unit configured to project the chart image displayed on the display element onto the projection plane to display the chart image. A projector characterized in that: 4. The projector according to claim 2, wherein the image display device rotates and displaces the chart image displayed on the display element according to a given displacement direction and displacement amount. A projector comprising: 5. The projector according to claim 2, wherein the image display device includes a unit for rotating and displacing the display element in accordance with a given displacement direction and a given displacement amount. Machine. 6. The projector according to claim 5, further comprising a screen having the projection surface, wherein the screen is rotatable. 7. The projector according to claim 6, wherein a detecting unit that detects information indicating a rotation direction and a displacement amount of the screen, and the display element based on the information detected by the detecting unit. Means for rotating the projector. 8. The projector according to claim 5, further comprising a screen having a projection surface, wherein the display element is disposed so as to overlap with the screen, and is rotatably provided.