JP2002267828A - Device for manufacturing color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten manufacturing time in a device for manufacturing a color filter with an inkjet method by preventing accuracy of positioning of the inkjet head in relation to the substrate from lowering due to vibration generated in cleaning a cleaning unit to clean the inkjet head. SOLUTION: The cleaning unit to be used in cleaning the cleaning unit to clean the inkjet head is attached to the device via a shock absorber with a damping function. Thereby the vibration generated by a motion of a switch valve of the cleaning unit or by pulsation of a washing liquid supplied by the cleaning unit is absorbed by the shock absorber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing apparatus for manufacturing a color filter which is a component of a color liquid crystal display used in a color television, a personal computer, and the like by an ink jet method.

[0002]

2. Description of the Related Art In recent years, the development of personal computers,
In particular, with the development of portable personal computers, the demand for liquid crystal displays, especially color liquid crystal displays, is increasing. However, a significant cost reduction is required for further widespread use, and in particular, a cost reduction of a color filter having a high specific gravity is required.

[0003] As a method for producing a color filter, a dyeing method, a pigment dispersion method, an electrodeposition method and the like have been widely used.

In the dyeing method, a water-soluble polymer material layer as a material for dyeing is formed on a glass substrate, formed into a desired pattern by photolithography, and then the glass substrate is immersed in a dyeing bath. This is a method of obtaining a color filter having colored portions of the three colors by repeating the process of obtaining a colored pattern for each of R (red), G (green), and B (blue).

[0005] The pigment dispersion method is a process in which a photosensitive resin layer in which a pigment is dispersed on a glass substrate is formed, and a process of obtaining a monochromatic pattern by patterning the same is repeated for R, G, and B. This is a method for manufacturing a color filter having three colored portions.

The electrodeposition method is a process in which a transparent electrode pattern is formed on a glass substrate, and the glass substrate is immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution and the like to electrodeposit a monochromatic pattern. Is repeated for R, G, B,
This is a method for producing a color filter having the three colored portions.

[0007] Common to these methods are R,
It is necessary to repeat the same process three times in order to form colored portions of three colors G and B, and there are problems such as low yield and high cost due to the large number of processes. is there. Further, the electrodeposition method is difficult to apply to a TFT type (TFT, that is, an active matrix driving method using a thin film transistor for switching) liquid crystal element because the shape of a pattern that can be formed is limited.

In order to compensate for these problems, a technique has been proposed in which ink is ejected onto a glass substrate by an ink jet method to form a colored portion (Japanese Patent Laid-Open No. 59-1984).
-75205, JP-A-63-235901, JP-A-1-217320). The method of forming a colored portion by discharging ink on a substrate by an ink jet method includes R,
Since the colored portions of the three colors G and B can be formed in one step, significant simplification of the manufacturing process and cost reduction effects are expected.

Further, Japanese Patent Application Laid-Open No. 8-292317 discloses at least one set of ink jet heads for ejecting R, G, and B color inks, respectively, and a substrate on which a colored portion is formed by drawing by the ink jet head. A moving means for mounting and moving the ink jet head, a displacement detecting means for detecting a relative displacement between the substrate and the ink jet head, and a means for detecting a landing position of the ink discharged from the ink jet head on the substrate. A manufacturing apparatus and a manufacturing method for performing high-precision alignment between a substrate and an inkjet head based on a position detection result and a relative displacement detection result are disclosed.

[0010] In the technique using the ink jet system, it is necessary to clean the ink jet head, and it is essential to clean the cleaning unit which has become dirty by this cleaning. Japanese Patent Application Laid-Open No. 9-41835 discloses a configuration in which a means for cleaning an ink ejection surface of an inkjet head is provided in a color filter manufacturing apparatus using an inkjet method.

[0011]

However, in a conventional color filter manufacturing apparatus provided with a cleaning unit for an ink jet head and a cleaning means for the unit, the vibration caused by the pulsation of the cleaning liquid from the cleaning means to the cleaning unit causes a problem. There has been a problem that the inkjet head and the substrate vibrate, the accuracy of the relative positioning between the inkjet head and the substrate is reduced, and it becomes difficult to form a highly accurate colored portion. Therefore, in order to avoid the decrease in the alignment accuracy, the cleaning operation of the cleaning unit, the discharge and supply of the substrate, the alignment,
Each operation timing is set so that the coloring operation and the coloring operation do not overlap with each other in time, which is a factor that hinders a reduction in the manufacturing process time.

An object of the present invention is to solve the above problems, to provide a color filter manufacturing apparatus capable of shortening the manufacturing time of a color filter by an ink jet system and efficiently producing a high-definition color filter. .

[0013]

According to the present invention, there is provided a color filter manufacturing apparatus, comprising: moving means for moving an ink jet head relative to a substrate mounted thereunder; and cleaning means for cleaning the ink jet head. An apparatus for manufacturing a color filter by forming a colored portion on the substrate by ejecting ink while moving the inkjet head relative to the substrate, the cleaning device having a cleaning unit for cleaning the cleaning unit. And a vibration removing mechanism that absorbs vibration generated by the cleaning unit, wherein the cleaning unit supplies the cleaning unit with at least one of a cleaning liquid, clean air, and vacuum air. It is preferably applied to a device provided.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION The color filter manufacturing apparatus of the present invention has a vibration removing mechanism for absorbing the vibration generated by the cleaning means, so that the vibration generated by the cleaning operation of the cleaning means propagates to the ink jet head and the substrate. The feature is that it is prevented from doing so. Thus, according to the present invention, even when the cleaning operation of the cleaning unit is performed during the coloring operation when the substrate is supplied to or discharged from the apparatus, the inkjet head and the substrate can be positioned with high accuracy. Can be maintained, and each operation timing can be efficiently and freely set to manufacture a color filter in a shorter time.

Hereinafter, the present invention will be described with reference to embodiments.

FIG. 1 is a schematic diagram showing the configuration of an embodiment of the color filter manufacturing apparatus of the present invention. In the drawing, reference numeral 1 denotes a main body platen for mounting the apparatus, 2 denotes a vibration isolation table that supports the platen 1 and blocks external vibrations, and 3 denotes an XY stage provided on the platen 1 and that moves a large stroke. Reference numeral 4 denotes an ink jet head unit provided with an ink jet head for ejecting ink for each of R, G, and B. Reference numeral 5 denotes a substrate that forms a colored portion of a color filter. Detection optical system for
Denotes an optical system for Z detection for detecting the position of the substrate 5 in the Z direction, 8 denotes an optical system for detecting the impact position of the ink ejected from the ink jet head unit 4 on the substrate 5, and 9 denotes an optical system for detecting the impact position. Head position adjustment unit for adjusting the rotational position of the inkjet head unit 4 in the θ direction and the position in the direction (X direction) orthogonal to the scanning direction (Y direction), etc., 10 is a laser for length measurement, and 11 is for length measurement. A cleaning unit 12 for wiping the ink discharge nozzle surface of the ink jet head; a cap unit 13 for preventing the ink on the ink discharge nozzle surface of the ink jet head from drying; and 14 a cleaning unit. A cleaning unit 15 for cleaning the unit 12; Ppuyunitto 13 is a mobile system that is moved to the lower side of the ink jet head unit 4.

Next, the coloring operation of the color filter by the color filter manufacturing apparatus of FIG. 1 will be described with reference to the flowchart shown in FIG.

When manufacturing a color filter (when forming a colored portion)
, The substrate 5 is mounted on the XY stage 3 (S1), and the Z tilt adjustment mechanism of the XY stage 3 adjusts the surface of the substrate 5 so that the surface of the substrate 5 falls within the detection range (depth of focus) of the alignment detection optical system 6. The inclination is adjusted (S2).

Thereafter, the amounts of displacement in the three directions of X, Y and θ are detected by the alignment detecting optical system 6 so that the alignment mark on the substrate 5 comes to the reference position (S).
3). Here, the alignment detection optical system 6 is a CCD
The alignment mark is read by a sensor such as the one described above, and the image information obtained therefrom is analyzed by an image processing unit to calculate a shift amount. This detection may be performed by detecting a plurality of marks with a plurality of detection optical systems or by moving the stage with a single detection optical system. Based on this detection result, the deviation of the θ component is corrected by the θ adjustment mechanism of the XY stage 3, and the deviation in the X direction is corrected by adjusting the X position of the XY stage 3. The displacement in the Y direction (scanning direction of the inkjet head unit 4) is performed by adjusting the Y position of the XY stage 3 or controlling the timing of discharging the ink from the inkjet head unit 4 (S4).

Next, an alignment operation of the ink jet head unit 4 for coloring is performed (S5), and ink is ejected while the ink jet head unit 4 and the substrate 5 are relatively moved to perform a color scan (S6). After the completion of the coloring scan, the substrate 5 is discharged (S7) and the mounting operation (S7).
1) In parallel with the tilt adjustment of the substrate 5 (S2), a cleaning sequence of the inkjet head by the cleaning unit 12 is performed (S8). Subsequently, the cleaning unit 12 is cleaned by the cleaning unit 14 (S9). In the cleaning operation in S9, the cleaning unit 12 tests in advance how many times the inkjet head needs to be cleaned before it is necessary to perform cleaning, calculates a predetermined number of times of cleaning, and performs cleaning when the predetermined number of times has elapsed. The operation may be performed. Further, the cleaning operation may be performed after a predetermined time has elapsed.

Next, FIG. 3 shows a specific configuration example of the cleaning unit 12 that can be used in the present invention. In the figure, 30
Is a sponge-shaped blade for wiping the nozzle surface of each color head, 31 is a blade unit stage for moving the blade 30 in the vertical direction (A direction) and the front-back direction (B direction), and 32 is the wetness of the blade 30. This is a blade suction pipe for adjusting the pressure. In the head cleaning sequence, the cleaning unit 12 moves to a position below the inkjet head unit 4, where the blade unit stage 31 rises and moves back and forth. This is done by wiping the surface. In order to moisten the blade 30, the cleaning unit 14 applies a cleaning liquid to the blade 30, the dirt attached to the blade 30 is washed away, and the blade 30 is suctioned through a suction pipe 32 by a vacuum pump to obtain an appropriate wetness. Make it fit. The wetness of the blade is adjusted by controlling the suction time. Note that the cleaning liquid used here may be any liquid such as pure water or an organic solvent for cleaning dirt on the blade, and is not particularly limited in the present invention.

Next, FIG. 4 shows a configuration example of the cleaning unit 14 of FIG. FIG. 4 is a schematic diagram when the cleaning unit is cleaned by the cleaning unit, and the cleaning unit is a cleaning shower unit. In the cleaning unit of this example, a number of nozzles 41 and a switching valve 42 are formed in the main body structural member 40, supported by support members 43 and 44, and the support member 44 is fixed to the color filter manufacturing apparatus. The switching valve 42 is a shock absorber 45 having a vibration damping function as a vibration damping mechanism according to the present invention so as to prevent the vibration caused by the shock at the time of switching or the pulsation of the cleaning liquid from propagating to moving means such as the inkjet head and the XY stage 3. And is fixed to the main body structural member 40 via the. Switching valve 42
Is connected to a plurality of tubes 46, each of which is configured to be connected to an external supply source (not shown) of a cleaning liquid, clean air or vacuum air.
The cleaning liquid is supplied from an external supply source through a tube 46, and is supplied to a nozzle 41 via a switching valve 42.
Since a plurality of nozzles 41 are configured, the cleaning liquid is evenly applied to the blade. After the supply of the cleaning liquid is stopped, clean air is supplied to the nozzle 41 to blow off water droplets in the flow path from the switching valve 42 to the nozzle 41 and droplets at the tip of the nozzle 41. After that, switching between clean air and vacuum air is performed by another switching valve, and by connecting the path to the vacuum air source,
The flow path from the switching valve 42 to the nozzle 41 is set to a negative pressure so that the droplets that cannot be wiped off with the clean air do not fall from the nozzle 41.

Next, FIG. 5 is a schematic diagram showing another example of the cleaning unit at the time of cleaning the cleaning unit. The cleaning unit of the present example has a large number of nozzles 4
1 and a switching valve 42 are configured and supported by support members 43 and 44, and the support member 44 is fixed to the color filter manufacturing apparatus. The support member 43 is made of a functional member that does not propagate vibration due to the impact of the switching of the switching valve 42 or the pulsation of the cleaning liquid to the moving means such as the ink jet head and the XY stage 3, and an elastic body (plate spring, coil spring) having a low natural frequency. The shock absorber 47 having a vibration damping function is arranged around or part of the periphery of the main body structural member 40. That is, in this example, the support member 43 and the shock absorber 47 correspond to a vibration isolation mechanism according to the present invention. The other members have the same functions as the members denoted by the same reference numerals in FIG.

In the case where the vibration damping mechanism shown in FIGS. 4 and 5 was not provided, the vibration of the ink jet head was momentarily 2-3 μm when the switching valve 42 was operated. In the apparatus of the present invention, since the vibration does not occur, the cleaning operation by the cleaning unit can be performed during any of the operations from the mounting of the substrate (S1) to the discharging of the substrate (S7) shown in FIG. To be able to
The cleanliness of the cleaning unit is managed without any influence on the manufacturing tact time. More specifically, a cleaning operation time of about 10 seconds is not required, so that the process is reduced to 10 seconds.

The cleaning operation of the cleaning unit may be performed depending on the degree of contamination of the cleaning unit, and can be performed every predetermined number of substrates or every predetermined time.

[0026]

As described above, according to the present invention,
Since the vibration generated from the cleaning means of the cleaning means of the ink jet head does not propagate to the ink jet head and the substrate, the cleaning operation timing can be freely set by the cleaning means, and the production of the color filter can be performed without lowering the precision. The process time can be reduced. Therefore, it is possible to increase productivity and supply a high-definition color filter at lower cost.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an example of a color filter manufacturing apparatus of the present invention.

FIG. 2 is a flowchart of a coloring operation using the color filter manufacturing apparatus of FIG.

FIG. 3 is a diagram illustrating a configuration example of a cleaning unit that is a component of the color fill manufacturing apparatus of the present invention.

FIG. 4 is a schematic diagram of a cleaning unit according to a configuration example of the cleaning unit, which is a constituent member of the color fill manufacturing apparatus of the present invention, when cleaning is performed.

FIG. 5 is a schematic diagram of a cleaning unit according to another configuration example of the cleaning unit, which is a constituent member of the color fill manufacturing apparatus of the present invention, when cleaning is performed.

[Explanation of symbols]

 Reference Signs List 1 surface plate 2 anti-vibration table 3 XY stage 4 inkjet head unit 5 substrate 6 alignment detection optical system 7 Z detection optical system 8 landing position detection optical system 9 head position adjustment unit 10 laser for length measurement 11 for length measurement Ultra flat mirror 12 Cleaning unit 13 Cap unit 14 Cleaning unit 15 Drive system 30 Blade 31 Blade unit stage 32 Blade suction pipe 41 Nozzle 42 Switching valve 43, 44 Support members 45, 47 Shock absorber 46 Tube

Claims (2)

[Claims] A moving means for moving the ink jet head relative to a substrate placed thereunder; a cleaning means for cleaning the ink jet head; and a cleaning means for cleaning the cleaning means. An apparatus for manufacturing a color filter by ejecting ink while moving the ink jet head relative to a substrate to form a colored portion on the substrate, wherein the vibration generated by the cleaning means is absorbed. An apparatus for manufacturing a color filter, comprising: an anti-vibration mechanism. 2. The color filter manufacturing apparatus according to claim 1, wherein said cleaning means includes a mechanism for supplying at least one of a cleaning liquid, clean air, and vacuum air to said cleaning means.