JP2002267431A - Method and apparatus for detecting relative inclination between surfaces, surface-adjusting apparatus, and face- joining apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect a minute inclination between target planes of a work. SOLUTION: The relative inclination detection apparatus 10 between surfaces comprises a right-angled prism 12, a shutter 13, a convex lens 14, a beam splitter 15, a convex lens 16, and a CCD 17 along a horizontal light axis Ox. Works 50 and 60 are arranged on a vertical light axis Oz. While the shutter 13 breaks a first light path Pa and opens a second light path Pb, inspection light from a light source 18 passes through the beam splitter 15, becomes parallel light by the convex lens 14, passes through the second light path Pb and is reflected on a reflection surface 12b, is reflected on a target plane 65 of the work 60, and is reflected on a reflection surface 12b again, passes through the beam splitter 15, becomes a spot beam by the convex lens 16, and reaches the CCD 17. When the position of the shutter 13 is switched, a spot beam from the target plane 55 reaches the CCD 17. The relative position of the spot beam indicates the relative inclination between the target planes 55 and 65.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for detecting a minute inclination between two object planes of a workpiece, a surface adjusting device for eliminating the minute inclination and making the object plane parallel with high accuracy, and a parallel plane adjusting apparatus. The present invention relates to a surface joining apparatus for joining an object plane.

[0002]

2. Description of the Related Art When two workpieces, for example, two optical parts are laser-welded to each other, in order to ensure good welding, the planes to be joined of the optical parts are parallel to each other with high precision, that is, a plane. It is required to perform welding with the relative inclination between them eliminated.

The optical component welding apparatus disclosed in Japanese Patent Application Laid-Open No. 11-281864 has a float mechanism. The float mechanism includes a float receiver having a spherical receiving surface, and a float having a spherical surface corresponding to the receiving surface. The tilt of the float can be adjusted while floating by the air blowing pressure from the float receiver. When the first optical component is placed on the float and the second optical component is chucked above the first optical component and lowered by the elevating mechanism, the plane to be joined of the second optical component is joined to the first optical component. Hit the plane to be. At this time, if the planes to be joined are not parallel, the first optical component is tilted by being pushed by the second optical component, whereby the planes of the two components are parallel to each other and come into contact with the entire surface. Then, after fixing the float to the float receiver, both parts are welded to each other. However, at the time of the fixing, there is a possibility that the surfaces of the first and second optical components are relatively inclined though they are minute.

[0004]

Under the circumstances described above, in order to join two optical parts or the like with high parallelism, the inclination of the plane of each work is detected with high accuracy. It is indispensable to detect a minute relative tilt with high accuracy, but such a detection method and device have not been provided so far.

[0005]

According to the present invention, there is provided a method for detecting a relative inclination between surfaces, comprising the steps of: (a) arranging first and second works on a first reference optical axis and simultaneously setting a first work on the first work; Arranging the target plane and the second target plane of the second workpiece so as to be substantially orthogonal to the first reference optical axis; and (b) the intersection of the first reference optical axis and the second reference optical axis orthogonal to each other. And a reflecting member having first and second reflecting surfaces is disposed on the first reflecting surface.
(C) arranging the first and second reflecting surfaces at 45 ° with respect to the first and second reference optical axes while directing the second reflecting surface to the second target plane while directing the object to the target plane; Is selectively supplied to the first reflecting surface via a beam splitter, and the inspection light is converted into light parallel to the second reference optical axis in a process from the light source to the first reflecting surface. The inspection light reflected by the first reflecting surface is reflected by the first target plane, reflected by the first reflecting surface again, and further supplied to the image receiving surface of the image receiving means via the beam splitter. (1) converging inspection light composed of parallel light and supplying it as spot light to the image receiving surface in a process from the reflecting surface to the image receiving surface; and (d) applying the inspection light from the light source via the beam splitter to the above. Selectively supplying to the second reflecting surface In the process of moving the inspection light from the light source to the second reflection surface, the inspection light is converted into light parallel to the second reference optical axis, and the inspection light reflected on the second reflection surface is reflected on the second target plane, and the inspection light is reflected again. (2) reflected by the reflecting surface, further supplied to the image receiving surface via the beam splitter, and converged on the image receiving surface by converging inspection light composed of parallel light in a process from the second reflecting surface to the image receiving surface. Supplying as light,
(E) The position of the spot received on the image receiving surface when the inspection light is selectively supplied to the first reflection surface, and the position of the spot received on the image reception surface when the inspection light is selectively supplied to the second reflection surface. And detecting a minute relative inclination between the target surfaces of the first and second workpieces.

According to the present invention, first and second works are arranged on a first reference optical axis, and the first and second object planes of the first and second works opposed to each other are defined by the first reference work. In a state where they are arranged substantially perpendicular to the optical axis, these first and second
(B) the first and second reference optical axes are arranged at the intersection of the first reference optical axis and the second reference optical axis, which are orthogonal to each other. A second reflecting surface, wherein the first reflecting surface is directed to the first target plane, the second reflecting surface is directed to the second target plane,
A reflecting member in which the first and second reflecting surfaces form an angle of 45 ° with the first reference optical axis; (b) a beam splitter disposed on the second reference optical axis; and (c) an inspection light to the beam splitter. And the beam splitter
A light source that advances along the reference optical axis toward the first and second reflection surfaces of the reflection member; and (d) transmits the inspection light in the process of traveling from the light source to the first and second reflection surfaces of the reflection member. (E) an image receiving surface, on which the inspection light is reflected by the first and second reflecting surfaces of the reflecting member; Image receiving means which is reflected by the first and second object planes, is reflected by the first and second reflecting surfaces again, and reaches via the beam splitter; and (f) the inspection light is subjected to the first and second reflections Converging means for converting parallel light into spot light in the process from the surface to the image receiving surface; (g) a first optical path from the light source to the first reflecting surface;
An optical path switching means for interrupting one of the second optical paths to the reflecting surface and opening the other, and then opening the one to interrupt the other; and
Detecting means for receiving an image signal of the spot light received when the optical path is selected and the spot light received when the second optical path is selected, and detecting a relative position of the spot light.

In the above-mentioned relative inclination detecting device between surfaces,
Preferably, the collimator is disposed between the right-angle prism and the beam splitter on a second reference optical axis, and the optical path switching means is disposed between the collimator and the right-angle prism. More preferably, the optical path switching means includes a shutter and a shutter moving means for moving the shutter in a direction orthogonal to the second reference optical axis. More preferably, the detecting means includes a monitor for displaying a relative position between the spot light received when the first optical path is selected by the optical path switching means and the spot light received when the second optical path is selected.

The surface adjusting device of the present invention includes the relative inclination detecting device between the surfaces, and inclination adjusting means. The inclination adjusting means supports one of the first and second works, and The inclination of the work is adjusted based on the information on the relative position detected by the means, and the relative inclination of the first and second target planes is eliminated.

The surface joining apparatus of the present invention includes an apparatus moving means and a work moving means in addition to the surface adjusting apparatus including the relative inclination detecting apparatus between the surfaces and the inclination adjusting means. The apparatus for detecting the relative inclination between the surfaces is moved between an inspection position in which the reflection member is on the first reference optical axis and a non-inspection position in which the reflection member is off the first reference optical axis. The means joins the first and second target planes by moving the other of the first and second works toward the one of the works along the first reference optical axis.

[0010]

An embodiment of the present invention will be described below with reference to the drawings. The surface joining apparatus A of the present embodiment includes a first optical component 50 (first work) shown in FIG.
And a second optical component 60 (second work).

The surface joining apparatus A includes a base 1 and a biaxial swivel stage 2 (tilt adjusting means) mounted on the base 1.
And an X / Y stage 3 (optical axis adjusting means) mounted on the swivel stage 2, an elevating mechanism 4 (work moving means), and a relative inclination detecting device 10 between surfaces as main components. ing. Note that this relative inclination detecting device 1
0 and the swivel stage 2 constitute a surface adjustment device B.

The swivel stage 2 is arranged such that an object placed thereon is finely divided about an X axis (horizontal axis extending in the horizontal direction in FIG. 1) and a Y axis (horizontal axis extending in a direction perpendicular to the plane of FIG. 1). Although it is tilted, its detailed description is omitted because it is well known. XY stage 3
Is for horizontally moving an object placed thereon in the X-axis and Y-axis directions, but this is also well known, and a detailed description thereof will be omitted. The XY stage 3 is provided with a chuck (not shown) for fixing the first optical component 50.

The lifting mechanism 4 includes a ball screw mechanism, a motor for driving the ball screw mechanism, a chuck 4a slidably supported on a lifting table of the ball screw mechanism via a slide mechanism, and a chuck 4a. And a spring for urging it downward to be positioned at the bottom dead center.
The chuck 4a holds the second optical component 60. The set first optical component 50 and second optical component 60 are arranged on the vertical optical axis Oz (first reference optical axis).

In the body 11 of the detection device 10, a front end (an end close to the vertical optical axis Oz) and a rear end along a horizontal optical axis Ox (second reference optical axis) orthogonal to the vertical optical axis Oz. Toward (an end far from the vertical optical axis Oz), a right-angle prism 12 (reflection member), a shutter 13 (optical path switching means), a convex lens 14 (collimator means), a beam splitter 15, a convex lens 16 (convergence means), and an image sensor The CCD 17 (image receiving means) is disposed. Further, in the body 11, a laser diode light source 18 that emits laser light in the visible light region as inspection light is disposed on another vertical optical axis that intersects the horizontal optical axis Ox at right angles in the beam splitter 15. The horizontal optical axis O
x is parallel to the X axis, which is one of the reference coordinate axes for controlling the stages 2 and 3.

The detecting device 10 includes a device moving mechanism 20
By the (apparatus moving means), it is horizontally moved in the horizontal optical axis Ox direction between the inspection position and the non-inspection position. At the inspection position, the right-angle prism 12 is located at the intersection of the vertical optical axis Oz and the horizontal optical axis Ox, and at the non-inspection position, the right-angle prism 12 deviates from the vertical optical axis Oz.

The right-angle prism 12 has first and second reflecting surfaces 12a and 12b which cross at right angles. These reflecting surfaces 12a and 12b face the beam splitter 15 side, and their intersections are located on the horizontal optical axis Ox, and are inclined by 45 ° with respect to the vertical optical axis Oz and the horizontal optical axis Ox. The reflection surfaces 12a and 12b are on the vertical optical axis Oz at the inspection position, and
a faces downward and faces the first optical component 50, and the second reflection surface 12 b faces upward and faces the second optical component 60.

An optical path from the light source 18 to the right-angle prism 12 via the beam splitter 15 is a first reflection surface 12a.
And a second optical path Pb corresponding to the second reflection surface 12b. Between the right-angle prism 12 and the beam splitter 15, the optical paths Pa and Pb are vertically divided by a horizontal optical axis Ox. That is, the first optical path P
a is between the first reflection surface 12a and the beam splitter 15, and the second optical path Pb is between the second reflection surface 12b and the beam splitter 15.

The shutter 13 has a plate shape orthogonal to the horizontal optical axis Ox, and is moved vertically (in a direction parallel to the vertical optical axis Oz) by a shutter moving mechanism 19 (shutter moving means) incorporated in the body 11. ) To change the position. Shutter 13
Is located below the horizontal optical axis Ox, the first optical path Pa is blocked and the second optical path Pb is opened. When the shutter 13 is located above the horizontal optical axis Ox, the first optical path Pa
Is opened, and the second optical path Pb is cut off.

Further, the surface joining apparatus A of this embodiment includes a controller 30 and a monitor 40. The controller 30 is connected to the swivel stage 2, the XY stage 3, the elevating mechanism 4, the CCD 17, the light source 18, the shutter moving mechanism 19, the apparatus moving mechanism 20, the monitor 40, and the like via signal lines (not shown). . In the present embodiment, the controller 30 and the monitor 40 constitute a detecting unit.

Using the surface bonding apparatus A having the above structure,
A method of surface joining the second optical components 50 and 60 and further welding will be described. As shown in FIG. 1, the first optical component 50
Has a phototransistor 52 housed as a light receiving element in the interior space of a metallic body 51 and a ball lens 54 provided in a hole 53 at the center of the upper wall of the body 51. Body 5
The upper surface of 1 is the first target plane 55 to be joined.
On the other hand, the second optical component 60 is a metal cylindrical body 6.
1 and a ferrule 6 inserted and fixed in the body 61
And 2. The ferrule 62 has an optical fiber 6
Three terminals are supported. The lower surface of the body 61 becomes a second target plane 65 to be joined.

As shown in FIG. 1, the first optical component 50
Is mounted on a predetermined position of the XY stage 3 and fixed by a chuck, and the second optical component 60 is moved to the chuck 4 a of the lifting mechanism 4.
To be gripped. The set of these optical components 50 and 60
It is done automatically.

Next, the controller 30 drives the device moving mechanism 20 to horizontally move the relative inclination detecting device 10 between the surfaces from the non-inspection position to the inspection position in FIG. 12 is positioned between the optical components 50 and 60 on the vertical optical axis Oz as described above.

Next, the controller 30 drives the shutter moving mechanism 19 to move the shutter 14 in FIGS.
As shown in (A), the first optical path Pa is blocked and the second optical path Pb is opened. Further, the light source 18 is driven to emit the inspection light. The inspection light from the light source 18 is reflected by the beam splitter 15 and travels to the convex lens 14 along the horizontal optical axis Ox. The convex lens 14 converts the inspection light into parallel light parallel to the horizontal optical axis Ox.
Head for.

The inspection light that has become parallel light is blocked by the shutter 13 in the first optical path Pa, so that the right-angle prism 12
Does not reach the first reflecting surface 12a, but is supplied only to the second reflecting surface 12b via the second optical path Pb. The inspection light composed of the parallel light is reflected by the second reflection surface 12b and travels upward in parallel with the vertical optical axis Oz.
Is reflected by the second target plane 65, and again the second reflection surface 12b
Is reflected by As a result, the inspection light travels along the second optical path Pb along the horizontal optical axis Ox, passes through the beam splitter 15, and reaches the image receiving surface 17a of the CCD 17. The inspection light is a parallel light when it is re-reflected by the second reflection surface 12b, but converges by passing through the convex lenses 14 and 16, and becomes a CCD.
It becomes a spot light on the image receiving surface 17a of the device. The controller 30 performs image processing based on the image reception signal from the CCD 17, calculates and stores the center position (center of gravity) of the spot light.

Next, the controller 30 drives the shutter moving mechanism 19 to position the shutter 14 at a lower position as shown in FIG. 2B, thereby cutting off the second optical path Pb and changing the first optical path Pa. open. In this case, the inspection light from the light source 18 that has passed through the beam splitter 15 and the convex lens 14 is blocked by the shutter 13 in the second optical path Pb, and therefore does not reach the second reflection surface 12b of the right-angle prism 12, and the first optical path P
a, and is supplied only to the first reflection surface 12a. The inspection light composed of the parallel light is reflected by the first reflection surface 12a, goes downward in parallel with the vertical optical axis Oz, is reflected by the first target plane 55 of the first optical component 50, and is again subjected to the first reflection. Face 1
It is reflected at 2a. As a result, the inspection light has a horizontal optical axis Ox.
Along the first optical path Pa, and passes through the beam splitter 15 to reach the CCD 17. The inspection light is converged by passing through the convex lenses 14 and 16 in the same manner as described above, and the CCD 1
7 is spot light on the image receiving surface 17a. The controller 30 calculates and stores the position of the spot light based on the image receiving signal from the CCD 17.

The controller 30 displays the positions Sa and Sb of the two spot lights on the monitor 40 from the position information of the two spot lights corresponding to different positions of the shutter 13 as shown in FIG. In the present embodiment, the position Sb of the spot light from the second target surface 65 is displayed on the monitor 40 at the center of the screen, that is, at the intersection of the coordinate axes X ′ and Y ′. The x coordinate and the y coordinate of the position Sa of the spot light from the first target surface 55 indicate the relative positional relationship between the two spot positions Sa and Sb.

The two opposing object planes 55, 65 are shown in FIG.
In the case where is relatively inclined with respect to the horizontal X-axis at the center, it appears as a spot light position deviation in the direction orthogonal to the paper surface on the image receiving surface 17a, and appears on the monitor 40 as the x coordinate of the spot position Sa. Also, the target planes 55 and 6
In the case where 5 is relatively inclined about the horizontal Y axis in FIG. 1, it appears as a spot light position deviation in the vertical direction on the image receiving surface 17 a, and the spot position S on the monitor 40.
Appears as the y coordinate of a.

The controller 30 supplies the inspection light as shown in FIG. 2B, and causes the CCD 17 to receive the spot light from the first target plane 55, thereby obtaining information on the relative positional relationship of the spot light. Continue to get. In this process, the swivel stage 2 is controlled using the information on the relative positional relationship as feedback information, and the inclination of the first work 50 and the XY stage 3 is adjusted. More specifically, the first optical component 50 is tilted in the horizontal X-axis direction so that the x coordinate of the spot light position Sa becomes zero. Further, the first optical component 50 is tilted around the horizontal Y axis so that the y coordinate of the spot light position Sa becomes zero. Thus, the spot light position Sa matches the spot light position Sb, and as a result, the first target plane 55 and the second
The relative minute inclination of the target plane 65 is eliminated, and high-precision parallelism can be obtained.

Next, the controller 30 drives the apparatus moving mechanism 20 to move the surface detecting apparatus 10 to the non-inspection position. Next, another light source composed of a laser diode disposed at the base end of the optical fiber 63 is driven to emit laser light in the infrared region as test light. The test light travels further along the vertical optical axis Oz through the optical fiber 63 and reaches the photodiode 52 via the convex lens 54. The controller 30 uses the information on the amount of light detected by the photodiode 52 as feedback information,
Move the Y stage 3 to adjust the horizontal position of the first optical component 50. Thereby, the first and second optical components 50,
60 optical axes can be matched.

Next, the controller 30 drives the elevating mechanism 4 to lower the second optical component 60, and joins the second target plane 65 to the first target plane 55 as shown in FIG.
This joining is performed with pressure by the spring incorporated in the lifting mechanism 4. As described above, since the two object planes 55 and 65 are parallel with high accuracy, they can be joined over the entire surface. By welding a plurality of locations on the periphery of the target planes 55 and 65 which are surface-joined with high precision in this way, a good welding can be performed by using a YAG laser welding apparatus. This welding device forms a part of the joining device A, and has a plurality of irradiation heads 70 that are previously arranged at equal intervals around the vertical optical axis Oz.

The present invention is not limited to the above embodiment, and various modes can be adopted. In the detection method of the present invention, the order of setting the workpiece and moving the detection device to the inspection position may be reversed. Further, the order of the optical path switching may be reversed from that of the above embodiment. In the method and apparatus of the present invention, the relative inclination between the first and second target planes is detected in the form of the relative position of the spot light on the CCD. The inclination angle may be measured. The tilt adjustment may be performed based on this angle information.

In the present invention, the monitor may be omitted.
When a monitor is provided, the tilt of the first target plane may be adjusted by manually controlling the swivel stage so that the two spot light positions match while watching the monitor. Even when the monitor displays the two spot light images of the CCD as they are, it means that the relative inclination between the target surfaces has been detected. The monitor may numerically display the relative position of the spot light using x and y coordinates, or may display the tilt angle numerically.

A half mirror may be used as a beam splitter. Transmissive liquid crystal may be used as the shutter, and the upper and lower halves may be selectively transmitted. In FIG. 1, the positions of the CCD 17 and the light source 18 may be reversed.
The XY stage 3 and the swivel stage 2 may be upside down. The shutter may be disposed between the beam splitter and the light source. The collimator means may be arranged between the light source and the beam splitter.

[0034]

As described above, according to the detection method of the present invention, a minute relative inclination between the target planes can be detected with high accuracy. Further, according to the detection device of the present invention, by performing optical path switching by the optical path switching means, it is possible to detect a relative inclination between target surfaces with a simple configuration.

Further, by arranging the collimator between the right-angle prism and the beam splitter, and by arranging the optical-path switching between the optical-path switching unit and the right-angle prism, the optical path can be reliably switched. Further, the switching of the optical path can be stably performed by the movement of the shutter, and the loss of the light amount in the selected optical path can be eliminated. Further, by displaying the relative positional relationship on the monitor, the relative inclination between the target surfaces can be easily grasped.

Further, the surface adjusting device of the present invention can automatically cancel the relative inclination between the first and second target planes. Furthermore, the surface joining apparatus of the present invention can join the first and second target planes whose relative inclination has been eliminated.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a surface bonding apparatus according to an embodiment of the present invention.

FIGS. 2A and 2B are enlarged cross-sectional views illustrating the operation of a shutter in the apparatus, wherein FIG. 2A shows a state in which a first optical path is blocked and a second optical path is opened, and FIG. This shows a state where one optical path is opened.

FIG. 3 is an enlarged sectional view showing a state where first and second optical components joined by the same device are welded.

[Explanation of symbols]

 2 Swivel stage (tilt adjusting means) 4 Lifting mechanism (work moving means) 10 Relative tilt detecting device between surfaces 12 Right angle prism 12a First reflecting surface 12b Second reflecting surface 13 Shutter (optical path switching means) 14 Convex lens (Collimator means) 15) Beam splitter 14, 16 Convex lens (converging means) 17 CCD (image receiving means) 17a Image receiving surface 18 Light source 19 Shutter moving mechanism (shutter moving means) 20 Device moving mechanism (device moving means) 30 Controller (detecting means) 40 Monitor ( Detecting means) 50 first optical component (first work) 55 first target plane 60 second optical component (second work) 65 second target plane A surface joining device B surface adjusting device Oz vertical optical axis (first reference light) Axis) Ox horizontal optical axis (second reference optical axis) Pa first optical path Pb second optical path

Claims (7)

[Claims] (A) A first and a second work are arranged on a first reference optical axis, and a first target plane of the first work and a second target plane of the second work are defined by a first reference light. (B) arranging a reflecting member having first and second reflecting surfaces at an intersection of the first reference optical axis and the second reference optical axis orthogonal to each other; A first reflecting surface is directed toward the first target plane, a second reflecting surface is directed toward the second target plane, and the first and second reflecting surfaces are disposed at 45 ° with respect to the first and second reference optical axes. And (c) selectively supplying inspection light from a light source to the first reflection surface via a beam splitter, and in the process of supplying the inspection light from the light source to the first reflection surface, The inspection light reflected by the first reflecting surface is reflected by the first target plane, and the inspection light is reflected by the first reflecting surface. And reflected by the first reflecting surface, and further supplied to the image receiving surface of the image receiving means via the beam splitter. In the process from the first reflecting surface to the image receiving surface, the inspection light consisting of parallel light is converged and (D) selectively supplying inspection light from the light source to the second reflection surface via the beam splitter, and supplying the inspection light from the light source to the second reflection surface. In the process of reaching the surface, the light becomes parallel to the second reference optical axis,
The inspection light reflected by the reflecting surface is reflected by the second object plane, reflected again by the second reflecting surface, and further supplied to the image receiving surface via the beam splitter. In the process of reaching, the step of converging the inspection light consisting of parallel light and supplying it as spot light to the image receiving surface,
(E) The position of the spot received on the image receiving surface when the inspection light is selectively supplied to the first reflection surface, and the position of the spot received on the image reception surface when the inspection light is selectively supplied to the second reflection surface. Detecting a minute relative inclination between the target surfaces of the first and second workpieces. 2. A method according to claim 1, wherein the first and second workpieces are arranged on a first reference optical axis, and the first and second target planes of the first and second workpieces facing each other are aligned with the first reference optical axis. In a device that detects a minute relative inclination between these first and second target planes in a state of being disposed substantially orthogonal to
(A) The first and second reference optical axes are arranged at the intersection of the first and second reference optical axes, and are orthogonal to each other.
A second reflecting surface, the first reflecting surface is directed to the first target plane, the second reflecting surface is directed to the second target plane, and the first and second reflecting surfaces are connected to a first reference optical axis and a first reference optical axis. °, a beam splitter arranged on the second reference optical axis, and (c) an inspection light is emitted toward the beam splitter, and the second light is transmitted through the beam splitter. A light source that advances along the reference optical axis toward the first and second reflection surfaces of the reflection member; and (d) transmits the inspection light in the process of traveling from the light source to the first and second reflection surfaces of the reflection member. (E) an image receiving surface, on which the inspection light is reflected by the first and second reflecting surfaces of the reflecting member; The light is reflected by the first and second target planes, reflected by the first and second reflecting surfaces again, and reaches via the beam splitter. Image receiving means, (f) converging means for converting the inspection light from parallel light to spot light in the process of reaching the image receiving surface from the first and second reflecting surfaces, and (g) from the light source to the first reflecting surface. A first optical path and a second light path from the light source.
An optical path switching means for interrupting one of the second optical paths to the reflecting surface and opening the other, and then opening the one to interrupt the other; and
Detecting means for receiving an image signal of the spot light received when the optical path is selected and the spot light received when the second optical path is selected, and detecting a relative position of the spot light. A device for detecting relative inclination between surfaces. 3. The apparatus according to claim 2, wherein said collimator means is disposed on said second reference optical axis between said right-angle prism and said beam splitter, and said optical path switching means is provided between said collimator means and said right-angle prism. 3. The apparatus for detecting relative inclination between surfaces according to claim 2, wherein: 4. The relative distance between surfaces according to claim 3, wherein the optical path switching means includes a shutter and a shutter moving means for moving the shutter in a direction orthogonal to the second reference optical axis. Target inclination detection device. 5. The monitor according to claim 5, wherein said detecting means includes a monitor for displaying a relative position between the spot light received when the first optical path is selected by the optical path switching means and the spot light received when the second optical path is selected. The relative inclination detecting device between surfaces according to any one of claims 2 to 4, characterized in that: 6. A device for detecting relative inclination between surfaces according to claim 2, and inclination adjusting means, said inclination adjusting means supporting one of said first and second works. And
A surface adjustment device, wherein the inclination of the work is adjusted based on the information on the relative position detected by the detection means to eliminate the relative inclination of the first and second target planes. 7. The surface adjusting device according to claim 6, further comprising a relative inclination detecting device between the surfaces and an inclination adjusting means.
The apparatus includes a device moving unit and a work moving unit, wherein the device moving unit is configured to detect the relative inclination between the surfaces by using an inspection position in which the reflecting member is on the first reference optical axis, and the reflecting member to be in the first reference optical axis. The work moving means moves the other of the first and second works toward the one of the works along the first reference optical axis. A surface bonding apparatus for bonding first and second target planes.