JP2002264342A5 - - Google Patents

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JP2002264342A5
JP2002264342A5 JP2001385036A JP2001385036A JP2002264342A5 JP 2002264342 A5 JP2002264342 A5 JP 2002264342A5 JP 2001385036 A JP2001385036 A JP 2001385036A JP 2001385036 A JP2001385036 A JP 2001385036A JP 2002264342 A5 JP2002264342 A5 JP 2002264342A5
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Japan
Prior art keywords
channel
plating
piezoelectric body
manufacturing
electrode
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JP2001385036A
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JP2002264342A (en
JP3919077B2 (en
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Priority claimed from JP2001385036A external-priority patent/JP3919077B2/en
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Publication of JP2002264342A5 publication Critical patent/JP2002264342A5/ja
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Claims (6)

圧電体を含む部材にチャネルを形成し、前記圧電体に設けられた電極に電圧を印加して、前記圧電体を駆動することにより、前記チャネルからインクを噴射するインクジェットプリントヘッドを製造する方法であり、
複数のチャネル用の溝を有するチャネルプレートの少なくとも一側面と底面を、触媒を吸着させてメッキ処理して所望の膜厚より薄いメッキ薄膜を形成した後、前記メッキ薄膜の一部をレーザー光で除去し、その後、再びメッキ処理することにより、前記レーザー光で除去されなかったメッキ薄膜上にさらなるメッキ膜を形成し、これにより前記所望の膜厚の電極を形成することを特徴とするインクジェットプリントヘッドの製造方法。
A method of manufacturing an ink jet print head that ejects ink from the channel by forming a channel in a member including a piezoelectric body, applying a voltage to an electrode provided on the piezoelectric body, and driving the piezoelectric body. Yes,
At least one side surface and bottom surface of a channel plate having a plurality of channel grooves are subjected to plating treatment by adsorbing a catalyst to form a thin plating film having a thickness smaller than a desired thickness. Ink-jet printing characterized in that an additional plating film is formed on the plating thin film that has not been removed by the laser beam by removing and then plating again, thereby forming the electrode having the desired film thickness. Manufacturing method of the head.
圧電体を含む部材にチャネルを形成し、前記圧電体に設けられた電極に電圧を印加して、前記圧電体を駆動することにより、前記チャネルからインクを噴射するインクジェットプリントヘッドの製造方法であり、
複数のチャネル用の溝を有するチャネルプレートに触媒を吸着させた後、前記触媒の一部をレーザー光で除去し、その後、前記チャネルプレートの少なくとも側面と底面をメッキ処理することにより、前記レーザー光により除去されなかった触媒上に、前記電極としてのメッキ層を形成することを特徴とするインクジェットプリントヘッドの製造方法。
A method of manufacturing an ink jet print head in which a channel is formed in a member including a piezoelectric body, a voltage is applied to an electrode provided on the piezoelectric body, and the piezoelectric body is driven to eject ink from the channel. ,
After adsorbing a catalyst to a channel plate having a plurality of channel grooves, a part of the catalyst is removed with a laser beam, and then at least one side surface and a bottom surface of the channel plate are plated, thereby the laser A method of manufacturing an ink jet print head, comprising forming a plating layer as the electrode on a catalyst that has not been removed by light.
圧電体を含む部材でチャネルを形成し、前記圧電体に設けられた電極に電圧を印加して、前記圧電体を駆動することにより、前記チャネルからインクを噴射するインクジェットプリントヘッドを製造する方法であり、
複数のチャネル用の溝を有するチャネルプレートと、カバープレートとを接着してヘッドチップを形成した後、前記ヘッドチップに形成された筒状の複数のチャンネルの内壁と前記ヘッドチップにおける所定の外周面とに触媒を吸着させて前記電極としてのメッキ層を形成し、その後、前記外周面に形成されたメッキ層の一部をレーザー光で除去することにより、前記複数のチャンネルに対応した電極を前記ヘッドチップの外周面に形成することを特徴とするインクジェットプリントヘッドの製造方法。
A method for manufacturing an ink jet print head that ejects ink from the channel by forming a channel with a member including a piezoelectric body, applying a voltage to an electrode provided on the piezoelectric body, and driving the piezoelectric body. Yes,
After forming a head chip by bonding a channel plate having a plurality of channel grooves and a cover plate, inner walls of a plurality of cylindrical channels formed on the head chip and a predetermined outer peripheral surface of the head chip Then, a catalyst is adsorbed to form a plating layer as the electrode, and then a part of the plating layer formed on the outer peripheral surface is removed with a laser beam, so that the electrodes corresponding to the plurality of channels are A method of manufacturing an ink jet print head, comprising forming an outer peripheral surface of a head chip.
前記電極として形成されたメッキ層は、所望の電極膜厚よりも薄いメッキ膜厚であり、前記外周面に形成されたメッキ薄膜の一部をレーザー光で除去した後、再度、前記複数のチャンネルの内壁と前記所定の外周面とにメッキ処理することにより、前記レーザー光で除去されなかったメッキ薄膜上に、さらなるメッキ膜を形成し、これにより、前記電極として所望の膜厚のメッキ層を形成することを特徴とする請求項3に記載のインクジェットプリントヘッドの製造方法。The plating layer formed as the electrode has a plating film thickness smaller than a desired electrode film thickness, and after removing a part of the plating thin film formed on the outer peripheral surface with a laser beam, the plurality of channels are again formed. By plating the inner wall and the predetermined outer peripheral surface, a further plating film is formed on the plating thin film that has not been removed by the laser beam, thereby forming a plating layer having a desired film thickness as the electrode. The method of manufacturing an ink jet print head according to claim 3, wherein the ink jet print head is formed. 圧電体を含む部材でチャネルを形成し、前記圧電体に設けられた電極に電圧を印加して、前記圧電体を駆動することにより、前記チャネルからインクを噴射するインクジェットプリントヘッドを製造する方法であり、
複数のチャネル用の溝を有するチャネルプレートとカバープレートとを接着してヘッドチップを形成し、前記ヘッドチップに触媒を吸着させた後、レーザー光で前記ヘッドチップの外周面の一部の触媒を除去し、その後、前記複数のチヤンネルの内壁と前記所定の外周面とをメッキ処理することにより、前記レーザー光により除去されなかった触媒上に、前記電極としてのメッキ層を形成することを特徴とするインクジェットプリントヘッドの製造方法。
A method for manufacturing an ink jet print head that ejects ink from the channel by forming a channel with a member including a piezoelectric body, applying a voltage to an electrode provided on the piezoelectric body, and driving the piezoelectric body. Yes,
A head plate is formed by adhering a channel plate having a plurality of channel grooves and a cover plate, adsorbing the catalyst to the head chip, and then a part of the outer peripheral surface of the head chip is irradiated with laser light Removing and then plating the inner walls of the plurality of channels and the predetermined outer peripheral surface to form a plating layer as the electrode on the catalyst that has not been removed by the laser beam. A method for manufacturing an inkjet printhead.
前記電極が、ニッケルまたは銅であることを特徴とする請求項1乃至請求項5のいずれか1項に記載のインクジェットプリントヘッドの製造方法。6. The method of manufacturing an ink jet print head according to claim 1, wherein the electrode is nickel or copper.
JP2001385036A 2000-12-18 2001-12-18 Inkjet printhead manufacturing method Expired - Fee Related JP3919077B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001385036A JP3919077B2 (en) 2000-12-18 2001-12-18 Inkjet printhead manufacturing method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-384020 2000-12-18
JP2000384020 2000-12-18
JP2001385036A JP3919077B2 (en) 2000-12-18 2001-12-18 Inkjet printhead manufacturing method

Publications (3)

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JP2002264342A JP2002264342A (en) 2002-09-18
JP2002264342A5 true JP2002264342A5 (en) 2005-06-16
JP3919077B2 JP3919077B2 (en) 2007-05-23

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JP2001385036A Expired - Fee Related JP3919077B2 (en) 2000-12-18 2001-12-18 Inkjet printhead manufacturing method

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002283566A (en) * 2001-03-23 2002-10-03 Toshiba Tec Corp Ink jet printer head and its manufacturing method
JP4235521B2 (en) * 2003-09-24 2009-03-11 キヤノン株式会社 Image processing apparatus and display control method for image processing apparatus
JP2010069855A (en) * 2008-09-22 2010-04-02 Toshiba Tec Corp Method of manufacturing inkjet head
JP5427852B2 (en) 2011-08-23 2014-02-26 東芝テック株式会社 Inkjet head manufacturing method and inkjet head

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