JP2002264013A - Curved surface corrective polishing system, nc polishing device, nc program creating method for polishing optical component, nc program creating method for polishing, creating method for two-dimensional coordinate point group file for nc program, nc program creating method, automatic creating program for nc program, recording medium recorded with nc program for polishing, optical component or mold therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high-efficiency and high-accuracy corrective polishing system capable of easily converting a correction amount of undulation and a shape error as an NC program with high accuracy. SOLUTION: This curved surface corrective polishing system executes a curved surface polishing process for reducing the undulation and the shape error by a preprocess on the basis of a shape measurement result. The system has a position command point calculation part generating polishing-position command points at intervals necessary for operation of a machining machine along a tool contact track on a predetermined machined surface with required position accuracy under a speed command, such that the contact track is equally divided on the contact track passing the center of a machining area; a two-dimensional coordinate point group file showing the polishing-position command points in a two-dimensional coordinate system and a storage part storing the two-dimensional coordinate point group file; a shape estimation part extracting the undulate and the shape error; and a polishing amount calculation part outputting a polishing removal amount necessary for correction of the error in each the position command point.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing technique for a scanning lens and its mold used in a polygon scanner optical system of a laser beam printer, and an object of the present invention is to correct an error in pre-processing based on measurement data. It relates to a curved surface cutting technology or a curved surface grinding technology.

[0002]

2. Description of the Related Art Conventionally, as a method of polishing a free-form surface, a method of pressing a small-diameter tool with a constant force and traversing the tool has been conventionally used. There has been conventionally known a technique of changing the traverse speed according to the tool position to change the removal depth, thereby improving the shape accuracy of the curved surface or removing the undulation. As the means for determining the traverse conditions, many calculation methods have been proposed on the assumption that the removal depth by polishing is proportional to the tool residence time, which is the reciprocal of the traverse speed, and these methods are generally used.

[0003] As a polishing trajectory generation method for curved surface polishing, a region to be processed is defined by a rectangle in a two-dimensional plane coordinate system, and this is projected on a surface to be processed, and the projected region is filled with a tool contact surface. A method of setting such a polishing locus is known. For example, JP-A-6-83426, JP-A-9-323252, JP-A-10-315111
The technology disclosed in, for example, Japanese Unexamined Patent Application Publication No. 2000-163456 corresponds to this. The polishing locus here indicates a path along which the center point of the tool contact area moves. In order to generate this polishing locus,
A specific motion trajectory is given to the tool. If the surface to be machined has a plane or a radius of curvature that is sufficiently large with respect to the radius of curvature of the tool, the trajectory of the tool center and the trajectory of the tool contact area almost coincide with each other. It can be easily set.

However, in order to apply the shape correcting technique using the tool residence time to a free-form surface having a relatively small radius of curvature of tens of mm to tens of mmR, there are some problems in securing accuracy. is there. That is, a free-form surface having a relatively small radius of curvature of several tens mm to several tens mm
When polishing with a tool having a radius of curvature of m to tens of millimeters, an offset of the radius of curvature of the tool exists between the motion trajectory of the tool center and the polishing trajectory with a size that cannot be ignored, and the difference between the two trajectories is It appears as a big difference.

[0005] Therefore, even when a tool motion trajectory in which the tool center makes a linear motion is given, the contact trajectory is bent, and a problem arises in that the contact trajectory cannot be distributed at regular intervals. As a countermeasure, a vertical section is taken at the same pitch with respect to the curved surface to be processed, a polishing position command point for specifying a polishing locus is set on this cross-sectional curve, and the radius of curvature of the tool in the normal direction at each command point. A method has been adopted in which a tool position command point is calculated by offsetting a polishing position command point by an amount, and a tool motion trajectory is obtained. The coordinates of the tool position command point are used as it is as a machining NC program. According to the above means, the polishing locus density can be made uniform to some extent. However, since the polishing position command points are arranged on a straight line on the XY plane, the polishing locus density uniformity is limited. Is still an issue on the straight line of the XY axes, but not on the curved surface.

Since the density of the scanning lines causes surface roughness depending on places, it is not desirable for processing high-quality optical parts. Also, the density of the tool contact trajectory is a factor that changes the removal depth of polishing.In the method of reducing shape errors and undulations by controlling the residence time as described above, it is necessary to incorporate this effect into the algorithm for deriving the residence time. is there. Similarly, if the polishing position command points on the polishing trajectory vary in density, it is necessary to take the influence into the residence time distribution in the NC program for correction processing into account.

In view of the above problems in the prior art, the present invention provides a mechanism for easily and accurately converting a correction amount of a shape error and an undulation as an NC program, and realizes a highly efficient and highly accurate correction polishing system. The purpose is to let them. In addition, in the traverse polishing method of a free-form surface using a small-diameter polishing tool, a new NC program creation method for polishing is provided, and it is possible to easily generate a tool contact locus with a low density distribution on a curved surface and generate a polishing position command point. I do. In addition, it is assumed that a polishing position command point having small unevenness on a curved surface is assumed, and at the same time, a form in which the shape error and the undulation are expressed by discrete values of a two-dimensional array at the polishing position command point is corrected from this array data. It is possible to easily calculate a command value to the processing machine, such as a tool residence time required for processing.

[0008]

According to a first aspect of the present invention, there is provided a curved surface correction polishing system for achieving the above object.
In a curved surface correction polishing system that performs a curved surface polishing process for reducing a shape error and waviness due to pre-processing based on a shape measurement result, a processing machine determines a desired tool contact trajectory on a work surface by using this trajectory. A position command point calculation unit that generates a polishing position command point that equally divides the contact trajectory on a contact trajectory passing through the center of the processing area at intervals necessary to operate with position accuracy and speed command, A storage unit for storing a two-dimensional coordinate point group file and a two-dimensional coordinate point group file indicating polishing position command points in a two-dimensional plane coordinate system, a shape evaluation unit for extracting shape errors and undulations, and correcting the errors And a polishing amount calculating section for outputting a polishing removal amount necessary for each of the position command points.

According to a second aspect of the present invention, in order to achieve the above object, in the curved surface correction polishing system according to the first aspect, the polishing removal depth is changed according to the required removal amount at each of the position command points. Means for changing the feed rate of the tool, the number of revolutions of the tool, and the pressing force of the tool to change the polishing removal depth.

According to a third aspect of the present invention, in order to achieve the above object, in the curved surface correction polishing system according to the first or second aspect, an NC program is used for repair processing.
The program is characterized in that it has a format including a command value of any one of a feed rate, a reciprocal of the feed rate, a tool rotation speed, and a polishing load for each row for which a command for a polishing position is issued.

According to a fourth aspect of the present invention, in order to achieve the above object, in the curved surface correcting polishing system according to the third aspect, the polishing position command point in the NC program indicates a contact position of the tool with a two-dimensional plane coordinate. And the calculation of the normal vector of the surface to be processed or the center of curvature of the tool contour at the polishing position command point is performed by an NC command value decoding unit inside the processing apparatus.

According to a fifth aspect of the present invention, there is provided an NC polishing apparatus which uses the curved surface correction polishing system according to the third aspect of the present invention and operates according to the NC program.

According to a sixth aspect of the present invention, in order to achieve the above object, in the NC polishing apparatus of the fifth aspect, a normal line control for matching a normal line of a surface to be processed at a polishing position command point with a tool pressing direction. Is possible.

According to a seventh aspect of the present invention, there is provided an NC program creating method for polishing an optical component used in the curved surface correction polishing system according to the third aspect, in order to achieve the above object. The coordinates of the polishing position command point in the NC program are expressed in a two-dimensional plane coordinate system, and the two-dimensional plane coordinate system is set parallel to a plane indicating an optically effective area.

According to a eighth aspect of the present invention, there is provided an NC program creating method for polishing an optical component used in the curved surface correction polishing system according to the third aspect of the present invention. The command point is such that the center line parallel to either the long side or the short side of the rectangle representing the optical effective area is projected on the curved surface, and passes through a point that divides the obtained curve into equal lengths. A characteristic tool path is set.

According to a ninth aspect of the present invention, there is provided a method for creating an NC program for polishing used in the curved surface correction polishing system according to the fourth aspect of the present invention. With the area corresponding to the contact area of the tool as the unit area, the density of the tool position command points or the density of the tool path existing per unit area is calculated,
It is characterized in that it has a function of correcting the polishing removal amount at each point by the numerical value representing the density.

According to a tenth aspect of the present invention, there is provided a method for creating an NC program for polishing used in the curved surface correction polishing system according to the third aspect of the present invention, in order to achieve the above object, wherein a polishing position command for generating a tool path is provided. The interval between the points is characterized by being equal to or less than half the spatial wavelength of the undulation to be corrected.

According to the eleventh aspect of the present invention, there is provided a method for creating a two-dimensional coordinate point group file for an NC program, wherein the NC used in the curved surface correction polishing system of the first aspect is provided to achieve the above object.
This is a method of creating a two-dimensional coordinate point group file for a program, in which trajectories are set so that adjacent tool contact trajectories are at equal intervals as much as possible, and position command points on the trajectories are set as much as possible. It is characterized in that the interval is set.

According to a twelfth aspect of the present invention, there is provided an NC program creating method for use in the curved surface correction polishing system according to the second aspect, in order to achieve the above object. Is a tool that projects a center line parallel to either the long side or the short side of the rectangle representing the optically effective area on a curved surface and passes through a point that divides the obtained curve into equal lengths A two-dimensional coordinate point group file obtained by setting a path and a required polishing removal amount corresponding thereto are obtained, and a one-dimensional numerical array representing the polishing removal amount is multiplied by an arbitrary constant to obtain each contact point. , Is converted into one of the reciprocal of the tool feed speed, the tool rotation speed, and the tool pressing force, and is used as a control command value synchronized with tool scanning.

According to a thirteenth aspect of the present invention, in order to achieve the above object, in the curved surface correction polishing system according to any one of the first to third aspects, the linear motion axes are XYZ of three orthogonal axes, and When the rotational motion is the A axis and the rotation about the Y axis is the B axis, the polishing position command point for generating the tool trajectory is determined based on the normal vector at each point.
It is characterized in that a point at which the value of the axis or the B-axis component becomes constant is set, and a tool path passing through these points is generated.

According to a fourteenth aspect of the present invention, in order to achieve the above object, an NC program automatic creation program includes, as a function, any one of the NC program creation methods according to any one of the sixth to eleventh aspects. .

According to a fifteenth aspect of the present invention, a recording medium on which a polishing NC program is recorded is created by the polishing NC program creating method according to the ninth aspect of the present invention.

According to a sixteenth aspect of the present invention, there is provided a curved surface correction polishing system according to the first aspect, wherein the polishing removal amount calculating unit for outputting a required polishing removal amount at each point is provided. It has a function of outputting a normal direction component at a processing point and a component orthogonal to the plane coordinate system.

An optical component or a mold for the optical component according to claim 17 is manufactured by the curved surface correction polishing system according to claim 1 in order to achieve the above object.

[0025]

Embodiments and examples of the present invention will be described below with reference to the drawings. The present embodiment is an example in which undulation having an amplitude of 100 nm generated in a curved lens is removed by residence time control. In order to adopt a construction method that keeps the tool posture constant with respect to the machining point normal,
N that allows simultaneous control of four axes in the XYAB axis direction as shown in
C polishing machine was used. The present embodiment is composed of three elements: a new NC program creation procedure, a dedicated NC program format, and a method of converting a shape correction amount into a staying time using these NC program formats.

FIG. 1 shows a procedure for creating an NC program which is the first element. The feature here is that it is generated evenly on a curved surface by a simpler method than the polishing position command point. First, in step 1, the design of the curved surface is completed. The shape of an optical component such as a lens is expressed by a formula, and the description will be given below based on this assumption.

In step 2, a rectangle for designating a processing area is set on the curved surface. This is obtained by enlarging the outer periphery by several mm with respect to the effective area of the lens. This is because the boundary of the processing region is liable to be a defect and is avoided. X
It is a rectangle on the Y plane. In this case, the long side is set parallel to the X axis, and the short side is set parallel to the Y axis.

In step 3, this rectangle is projected on the surface to be processed. As a result, a boundary line 5 (indicated by reference numeral 5 in FIG. 2) indicating the processing region on the processing surface is generated.

In step 4, conditions for tool path generation are input. In this processing, as shown by the reference numeral 16 or 17 in FIG. 5, a trajectory for scanning in the Y direction, moving a small amount by one command point in the X direction, and performing Y scanning again is employed.
Enter the pitch of the polishing position command point in the direction. Particularly, the X pitch has a strong correlation with the roughness of the polished surface and is determined based on the shape of the polishing mark of the tool.

The above is the portion where the procedure is the same between the present invention and the conventional method. Hereinafter, the characteristic procedure of the present invention will be described.

In step 5b of FIG. 1, center lines 10 and 9 are set for the rectangle 4 for designating a processing area shown in FIG. This is similarly projected on the processing surface, and the curve 1 is drawn on the curved surface.
1 and 12 are obtained (FIG. 4). Then, the procedure 6b of FIG.
In, the direction to be divided with priority is determined. This is often used for those with severe undulation accuracy in the case of a scanning lens type. In this case, the X direction corresponds to the length of the lens. Therefore, with respect to the longitudinal center line 12 (FIG. 4 and FIG. 4), the dividing point
Was formed. Subsequently, in step 7b of FIG.
The cross-section of the plane 21 including 3 and orthogonal to the X axis and the curved surface indicated by the boundary line 5 is formed to form the cross-sectional curve 14. The same number of sectional curves 14 as the previously set division points 13 are formed (FIG. 4). In the shape of the present embodiment, the plane 21 orthogonal to the X axis is used to obtain the cross-sectional curve 13, but a plane orthogonal to the curve 12 may be used depending on the shape. The one where the density of the polishing position command point finally formed is smaller is selected. The division points 15 are set for all the cross-sectional curves 14 in the same manner. In the above steps, the division point 15 becomes the polishing position command point.

FIG. 4 is a XY plan view showing polishing position command points formed according to the present embodiment. Since they are arranged at regular intervals on a curved surface, in the XY plan view, the density is uneven in both the X and Y directions. on the other hand,
In the case of the conventional method, the polishing position command points 8 are equally spaced in the XY plane expression. Polishing position command points 15 and 8
And the polishing paths 17 and 1
6 can be formed.

The new format of the NC program and the method of calculating the residence time, which are the second and third elements of the present invention, will be described below with reference to FIG. In the new format, the polishing position command point is expressed by XY two-dimensional plane coordinates,
The residence time at each position is indicated by a parameter W. The major difference from the conventional method is that the polishing position command point can be directly input without calculating the offset of the tool, and XYAB
Is that only the XY coordinates, which are the minimum required in the NC program, are described in the four-axis control machining.
In the conventional method, it is necessary to calculate the offset for obtaining the center position of the curvature of the tool and to describe command values for the number of axes of the processing machine. Further, the derivation of the residence time for correcting the shape error is often performed using a complicated integral calculation. An equation to specify the curved surface was input to the processing machine in advance, and the offset calculation was performed inside the processing machine, making it possible.

The new format can be used for shape and swell evaluation by replacing the term W at the end of the line with the Z height indicating a shape error. By using the measurement evaluation file and the NC program in a common format in this way, it is possible to dramatically and easily generate an NC program for correction processing by feeding back error data. Specifically, it is only necessary to convert the above-mentioned sequence of Z heights into the residence time W. As described above, since the polishing position command points are evenly arranged on the curved surface, this conversion can be easily converted to W simply by multiplying the value of Z by a specific constant. This constant is determined by the shape of the processing mark of the polishing tool, the polishing conditions, the tool trajectory, the interval between the polishing position command points, and the like. It is something that can be done.

With the above-mentioned means, a curved lens type waviness removal experiment was carried out. The polishing tool 1 was a polyurethane foam having a tire shape as shown in FIG. 1, and diamond slurry was used as abrasive grains. The rotation axis is orthogonal to the pressing direction. Work surface is diamond cut N
i-plated surface. The processing area was 10 × 10 mm square. In the measurement evaluation of the cut surface, a 19-section curve in FIG. 7 was obtained, and a swell of about 100 nm in amplitude was found. The entire processing area was evaluated by a stylus type shape evaluator, and the waviness error was output on a curved surface in XYZ coordinates at a pitch of 0.1 mm. This is the same as the format on the right side of FIG. 6, except that the parameters differ between W and Z. The value of Z indicates the necessary removal amount at each point, and the unit is μm. Subsequently, Z of each row was multiplied by a conversion coefficient K = 3.2 obtained by a simulation, and converted to a residence time W. This file was used as it is as an NC program to carry out modified polishing.
The cross-sectional curve diagram 7-20 after processing is 41 nm in amplitude,
The swell was reduced to 40% before processing. N
The preparation period of the C program was reduced to 1/3 of the conventional one, and the efficiency as a process was relatively improved.

[0036]

According to the first aspect of the present invention, as described above, the polishing position command points are directly described in the NC program, the polishing position command points are set at equal intervals, and the position information is measured and evaluated. And the NC program for polishing have the same format.
From the removal amount required to correct the shape error and undulation,
It can be easily and accurately converted to the operation of the working machine, such as the tool residence time.

According to the second aspect of the present invention, as described above, the three parameters have a linear relationship with the polishing depth, and the required removal amount at each point can be determined by the operation of the processing machine simply by multiplying by a specific constant. Can be converted.

According to the third aspect of the present invention, as described above, at each of the polishing position command points, processing machine operation information necessary for removing a shape error or undulation is individually provided.
Even if the points are arbitrarily connected, the correction NC program can be easily created only by managing the order. In addition, the number of shape error data Z and the number of correction operations W match, and the delivery of the correction amount is easy.

According to the fourth and seventh aspects of the present invention, as described above, the measurement evaluation file and the NC program format for polishing can be shared, and the correction amount can be easily and accurately transferred to the NC program. it can.

According to the fifth aspect of the present invention, as described above, a modified polishing step using the present system can be performed.

According to the sixth aspect of the present invention, as described above, accurate load control and peripheral speed control of the tool at the processing point can be performed by keeping the tool posture constant with respect to the processing surface normal. And the improvement of the processing accuracy can be realized.

According to the eighth aspect of the present invention, as described above, it is difficult to arrange the polishing position command points accurately and evenly on a curved surface if the intervals between them are difficult to achieve unless the intervals are extremely small. It is necessary to give the highest priority to the center line parallel to the scanning direction in the scanning lens by specifying the priority order of the parts that maintain, but it is possible to minimize the malfunction of the optical function due to such unevenness. It becomes possible.

According to the ninth aspect of the present invention, as described above, since the nonuniformity of the polishing position command point cannot be completely avoided, the correction is performed based on the tool contact area when correcting it. The most effective modification can be made.

According to the tenth aspect of the present invention, as described above, when the undulation is evaluated by using the undulation amplitude, it is necessary to set the polishing position at least within the numerical range described. Is efficient in the point of shape evaluation.

According to the eleventh aspect of the present invention, as described above, the required removal amount at each point is multiplied by a fixed constant by uniformly arranging the polishing position command points in the length on the curved surface. Thus, it can be converted into a processing machine operation such as a residence time.

According to the twelfth aspect of the present invention, as described above, the required removal amount can be converted into the operation of the processing machine by a simple operation, and the correction processing can be performed efficiently.

According to the thirteenth aspect of the present invention, as described above, the simultaneous control associated with the traverse of the polishing tool when the described rule and the uniform arrangement of the polishing position command points can be compatible for a specific shape. , The number of axes can be reduced, and a reduction in machining errors due to the mechanical motion can be expected.

As described above, the invention according to claims 14 and 15 can be easily ported by converting the method into general-purpose software.

According to the sixteenth aspect of the present invention, as described above, the output of the present polishing system causes the XYZAB five-axis control and the XYAB four-axis control to keep the tool posture constant with respect to the processing point normal. , XYZ not including tilt control
It can be utilized in any of the three-axis control and the XY two-axis control.

According to the seventeenth aspect of the present invention, as described above, it is possible to realize shape accuracy and swell reduction which could not be achieved conventionally, and it is possible to produce parts with greatly improved optical performance.

[Brief description of the drawings]

FIG. 1 is a flowchart illustrating a procedure for creating an NC program for correcting a curved surface shape according to the present invention.

FIG. 2 is a procedure 2 in the NC program creating procedure of FIG. 1;
FIG. 6 is a perspective view illustrating a specific method of (3) and (3).

FIG. 3 is a diagram illustrating a specific method of procedures 6a and 7a according to a conventional method in the NC program creation procedure of FIG.

FIG. 4 is a diagram for explaining a specific method of procedures 5b, 6b and 7a according to the present invention in the NC program creating procedure of FIG. 1;

FIG. 5 is a diagram illustrating a difference between a polishing position command point generated by the procedure of the present invention and a position coordinate in the case of a conventional method.

FIG. 6 is a diagram showing an example of an NC program format used in the polishing system of the present invention.

FIG. 7 is a view showing a result of performing undulation removal processing on undulation on a curved surface using the polishing system of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Polishing tool 2 Polishing spindle 3 Curved lens mold 4 Rectangle for specifying processing area 5 Boundary of processing area 6 Plane orthogonal to X axis 7 Cross section curve in Y direction 8 Division point of equal pitch on Y axis 9 Processing area Short rectangular center line for designation of rectangle 10 Longitudinal center line of rectangular for processing area designation 11 Short center line 9 12 projected on curved surface 12 Long center line 10 13 projected on curved surface 13 Length of curve 12 Division point for equally dividing 14 Sectional curve in the Y-axis direction 15 Division point for equally dividing the length of the curve 14 Polishing trajectory according to the conventional method 17 Polishing trajectory according to the present invention 19 Cross-sectional curve showing the undulation of the machined surface before polishing 20 After polishing Sectional curve 21 showing undulation reduction effect 21 Plane passing through division point 13 and orthogonal to X axis

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C034 AA07 AA13 CA05 CB02 CB06 CB18 3C049 AA02 BA02 BB06 BB08 BB09 CA01 CA03 CB01 CB04 5H269 AB01 AB07 CC02 DD01 EE25 EE29 (54) [Title of Invention] Curved surface polishing system, NC Polishing apparatus, method for creating NC program for polishing optical components, method for creating NC program for polishing, method for creating two-dimensional coordinate point group file for NC program, method for creating NC program, automatic program for creating NC program, NC program for polishing Media, optical parts or their dies on which

Claims (17)

[Claims] In a curved surface correction polishing system for performing a curved surface polishing process for reducing a shape error and waviness due to pre-processing based on a shape measurement result, a processing machine is adapted to perform a predetermined tool contact trajectory on a surface to be processed. A position command point that generates a polishing position command point that divides the contact trajectory equally on the contact trajectory passing through the center of the processing area at intervals necessary to operate this trajectory with desired position accuracy and speed command An arithmetic unit, a storage unit for storing a two-dimensional coordinate point group file indicating the polishing position command point in a two-dimensional plane coordinate system and the two-dimensional coordinate point group file, a shape evaluation unit for extracting shape errors and undulations, A polishing amount calculation unit for outputting a polishing removal amount necessary for correcting the error at each of the position command points. 2. The curved surface correction polishing system according to claim 1, further comprising means for changing a polishing removal depth in accordance with a required removal amount at each of said position command points, wherein a tool feed speed, a tool rotation speed, and a tool are provided. A curved surface correction polishing system characterized in that any one of the pressing forces is changed to increase or decrease the polishing removal depth. 3. The curved surface correction polishing system according to claim 1, wherein an NC program is used for correction processing.
A curved surface correction polishing system characterized in that the C program has a format including a command value of any one of a feed rate, a reciprocal of the feed rate, a tool rotation speed, and a polishing load for each row for commanding a polishing position. 4. The curved surface correction polishing system according to claim 3, wherein the polishing position command point in the NC program is a format in which the contact position of the tool is directly described in two-dimensional plane coordinates, and the processing at the polishing position command point is performed. A curved surface correction polishing system characterized in that the calculation of the normal vector of the surface or the center of curvature of the tool contour is performed by an NC command value decoding unit inside the processing apparatus. 5. An NC polishing apparatus using the curved surface correction polishing system according to claim 3 and operating according to the NC program. 6. The NC polishing apparatus according to claim 5, wherein a normal line control for matching a normal line of the surface to be processed at a polishing position command point with a tool pressing direction is possible.
C polishing machine. 7. An NC program creating method for polishing an optical component used in the curved surface correction polishing system according to claim 3,
The polishing position command point in the NC program is expressed in coordinates in a two-dimensional plane coordinate system, and the two-dimensional plane coordinate system is set parallel to a plane indicating an optically effective area. NC program creation method for 8. An NC program creating method for polishing an optical component used in the curved surface correction polishing system according to claim 3,
The polishing position command point in the NC program projects a center line parallel to either a long side or a short side of a rectangle representing an optically effective area on a curved surface, and divides the obtained curve into equal lengths. A method for creating an NC program for polishing an optical component, comprising setting a tool path that passes through such a point. 9. A method for creating an NC program for polishing used in the curved surface correction polishing system according to claim 4, wherein an area corresponding to a contact area of a tool on a surface to be processed is defined as a unit area.
NC program for polishing characterized by having a function of calculating the density of the tool position command points or the density of tool trajectories existing per unit area and correcting the removal amount of polishing at each point by a numerical value representing the density. Method. 10. A method for creating an NC program for polishing used in the curved surface correction polishing system according to claim 3, wherein the interval between the polishing position command points for generating the tool trajectory is the spatial wavelength of the undulation to be corrected. A method for creating an NC program for polishing characterized by being 1/2 or less. 11. A method for creating a two-dimensional coordinate point group file for an NC program used in the curved surface correction polishing system according to claim 1, wherein trajectories are set such that adjacent tool contact trajectories are as evenly spaced as possible. A method for creating a two-dimensional coordinate point group file for an NC program, wherein position command points on a trajectory are set at equal intervals as much as possible. 12. An NC program creating method used in the curved surface correction polishing system according to claim 2, wherein the polishing position command point in the NC program is any one of a long side and a short side of a rectangle representing an optically effective area. A two-dimensional coordinate point group file obtained by projecting a center line parallel to the crab on a curved surface and setting a tool path that passes through a point that divides the obtained curve into equal lengths, and corresponding files The required polishing removal amount is obtained, and the reciprocal of the tool feed speed at each contact point is obtained by multiplying a one-dimensional numerical array representing the polishing removal amount by an arbitrary constant.
An NC program creating method, wherein the method is converted into one of a tool rotation speed and a tool pressing force and used as a control command value synchronized with tool scanning. 13. The curved surface correction polishing system according to claim 1, wherein the linear motion axis is XYZ of three orthogonal axes, the rotation about the X axis is A axis, and the rotation about the Y axis is B axis. In this case, the polishing position command point for generating the tool path is determined based on the normal vector at each point based on the above-mentioned A.
A point at which the value of the axis or the B-axis component is constant, and generating a tool path passing therethrough.
C program creation method. 14. The NC according to claim 6, wherein:
An automatic NC program creation program characterized by including any one of the program creation methods as a function. 15. A recording medium which records an NC program for polishing created by the method for creating an NC program for polishing according to claim 9. 16. The polishing system according to claim 1, wherein the polishing-removal-amount calculating unit for outputting the required polishing removal amount at each point outputs a normal direction component at the processing point and a component orthogonal to the plane coordinate system. A curved surface correction polishing system characterized by having a function to perform. 17. An optical component manufactured by the curved surface correction polishing system according to claim 1, or a mold thereof.