JP2002260898A - Air jet type static eliminator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air jet type static eliminator which has small jet sound, can eliminate static to a distance with small amount of air, has less uneven static elimination with uniform jet pressure to a static eliminating surface, and keeps balance of plus and minus ion. SOLUTION: A plurality of jet orifices 12a having small bore are provided with same distances on a same circumference line at a top of a cap-shaped nozzle 8 containing a discharge needle 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air jet type static eliminator for jetting ions generated by discharge of a discharge needle together with air from a nozzle.

[0002]

2. Description of the Related Art As a conventional air injection type static eliminator, there is a gun type (pistol type) which can be operated by holding the static eliminator body with one hand. And the ions are intensively injected from one injection port.

[0003]

However, if there is only one injection port, the diameter of the injection port must be increased to, for example, a diameter of 8 mm in order to secure a required amount of air. Not only does the noise increase more than necessary, the injection noise is loud (for example, 97 dB), and particularly in places where severe working environment conditions are required, such as in a semiconductor manufacturing plant, the improvement has been desired. In addition, although the air consumption is large, the injection pressure on the surface to be neutralized is not uniform in a planar manner, resulting in uneven static elimination.

[0004] Therefore, an object of the present invention is to provide a small injection sound, a small amount of air to remove electricity to a distant place, a uniform ejection pressure on a surface to be removed, a small charge removal unevenness, and a plus / minus ion balance. An object of the present invention is to provide an air injection type static eliminator that can be achieved.

[0005]

According to the present invention, a discharge needle for applying a high voltage from a high voltage generating circuit incorporated in a static eliminator body and discharging the same is included in a cap-shaped nozzle, and ions generated by the discharge are contained. Is characterized in that a plurality of small-diameter injection ports are provided at the tip of the nozzle at equal intervals on the same circumferential line at the tip of the nozzle.

The static eliminator body has a gun shape that can be opened and closed by a trigger when used by hand and a box shape when installed and used.

[0007]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 to FIG. 4 show a first embodiment in which the static eliminator main body 1 has a gun type (pistol type) so that it can be operated by hand. As shown in FIG. 1, when the trigger 2 is pulled, the built-in valve 3 of the static eliminator body 1 is opened, and air is sent into the barrel portion 5 through a hose (not shown) connected to a connection port 4 at the bottom of the gun. It is supposed to be. At the tip of the barrel 5,
The extension cylinder 6 is detachably connected by screwing the male and female screws together, and a power supply box 7 having a built-in high-voltage generating circuit (not shown) is mounted on the extension cylinder 6. The female screw 6a at the end of the extension cylinder 6 is screwed with male and female screws to form a cap-shaped nozzle 8 of the first example.
Are detachably connected.

As shown in FIG. 2, a discharge needle 10 enclosed by a nozzle 8 is held at the center of a partition wall 9 provided integrally with the distal end of the extension tube 6. The partition 9 has a plurality of small holes 11 serving as air passages penetrating around the discharge needles 10.

FIGS. 5 and 6 show only the nozzle 8 of the first example. The nozzle 8 is formed of a synthetic resin, and has a male screw portion 8a screwed with the female screw portion 6a of the extension tube 6, a flange portion 8b, a cap portion 8c, and a truncated cone-shaped convex portion 8d.
A plurality of reinforcing ribs 8e are provided on the outer periphery of the cap portion 8c in parallel with the axis. At the tip of the cap portion 8c, a plurality of elongated ejection holes 12 are provided at equal intervals around the tip protrusion 8d, and the tip thereof is formed with small-diameter ejection holes 12a arranged at equal intervals on the same circumferential line. Has become.
The diameter of each injection port 12a is, for example, about 0.7 mm.

Although not shown inside the nozzle 8,
A metal piece serving as a ground electrode is attached to the discharge needle 10, and the discharge needle 10
When a high voltage is applied to the substrate, corona discharge occurs.

Since the gun-type static eliminator of the first embodiment is constructed as described above, the air entering the barrel portion 5 by pulling the trigger 2 and opening the valve 3 causes the air around the discharge needle 10 to move. It passes through the plurality of small holes 11 and enters the nozzle 8, where it branches into a plurality of elongated injection holes 12 with ions generated by the discharge of the discharge needle 10, and simultaneously from the small injection holes 12 a having a small diameter. It is injected.

[0013] Here, since the plurality of injection holes 12 are each elongated, it is possible to give a linear directivity to the air to be injected, and the injection holes 12a are small and arranged at equal intervals on the same circumferential line. Since it is provided, the injection noise is much smaller than in the case where injection is performed from a single injection port having a large diameter. In the case of injection from one injection port having a diameter of 8 mm, the value was about 97 dB, but dropped to 76 dB or less. In addition, since the air injected from each injection port 12a has linearity, even if the amount of air is small, static electricity can be removed to a distant place.・ The negative ion balance was good. Further, since the injection ports 12a are arranged at equal intervals around the tip protrusion 8d protruding from the center of the tip of the nozzle 6, the tip protrusion 8d prevents the jetted air from being mixed and becoming turbulent. it can.

FIGS. 7 to 9 show a second embodiment in which the static eliminator body 21 is box-shaped so as to be installed and used. The box-shaped static eliminator body 21 has a built-in high-voltage generating circuit (not shown). A connection port 22 for connecting a hose (not shown) protrudes from a rear wall of the static eliminator main body 21, and a female screw joint 2 screwed to the nozzle 8 is formed on a front wall of the static eliminator main body 21.
3 are protruded. The connection port 2 is provided inside the static eliminator body 21.
A pipe 24 communicating with 2 is provided therethrough. Discharge needle 10
The base end is held by the needle holder 25 at the front end of the pipe 24 at the front wall of the static eliminator body 21. The needle holder 25 has a plurality of small holes 26 radially provided as air passages communicating with the pipe 24. Nozzle 8
This is the same as the gun type of the first embodiment described above. The male thread 8a is screwed into the female screw joint 23 and connected to the static eliminator main body 21, thereby enclosing the discharge needle 10.

Therefore, the air that has entered the nozzle 8 through the pipe 24 and the small hole 26, as in the case of the gun type,
The ions generated by the discharge of the discharge needle 10 are simultaneously ejected from a plurality of ejection ports 12a having a small diameter.

FIGS. 10 and 11 show a second example of the nozzle. The nozzle 28 of the second example is made of metal such as stainless steel, and has a male screw portion 28a, a nut portion 28b, a cap portion 28c having a substantially frustoconical outer shape, and a plurality of tip convex portions 28d protruding from the tip thereof. I have. These tip protrusions 2
8d are radially arranged at equal intervals on the same circumferential line.
Then, from the inside of the cap portion 28c, each tip convex portion 28d
A plurality of elongated injection holes 32 extending straight up to the tip of the nozzle are formed at equal intervals on the same circumferential line, and the tip of each injection hole 32 is a small-diameter injection port 32a opened at the tip of each tip projection 28d. ing. The diameter of each injection port 32a is, for example, about 1.4 mm.

FIGS. 12 to 15 show a static eliminator of a third embodiment which is formed in a gun shape by using the nozzle 28 of the second embodiment. In this static eliminator, too, the external thread 28a of the nozzle 28 is screwed into the female thread 6a of the extension tube 6 of the gun-shaped static eliminator main body 1, and the nozzle 28 is connected to the tip of the extension tube 6 to discharge the discharge needle. 10 is also included, and the metal nozzle 28 also serves as a ground electrode for the discharge needle 10.

Also in the case of the static eliminator of the third embodiment, the air entering the barrel portion 5 by pulling the trigger 2 and opening the valve 3 passes through a plurality of small holes 11 around the discharge needle 10. After entering the nozzle 28, it is branched into a plurality of elongated injection holes 32 with ions generated by the discharge of the discharge needle 10, and injected simultaneously from a plurality of injection holes 32a having a small diameter.

FIGS. 16 to 18 show a static eliminator according to a fourth embodiment in a box shape using the nozzle 28 of the second example. Also in this static eliminator, the external thread 28a of the nozzle 28 is screwed into the female screw joint 23 of the box-shaped static eliminator main body 21, and the nozzle 28 is connected to the static eliminator main body 21, thereby similarly including the discharge needle 10. The metal nozzle 28 also serves as a ground electrode for the discharge needle 10.

Therefore, the static eliminator of the fourth embodiment is also shown in FIG.
8, the air entering the nozzle 28 through the pipe 24 and the small hole 26 is accompanied by ions generated by the discharge of the discharge needle 10, Are simultaneously injected from the injection port 32a.

[0021]

As described above, according to the present invention, a plurality of injection ports having a small diameter are provided at the tip of the nozzle at equal intervals on the same circumferential line, so that the injection sound is reduced and a small Static electricity can be removed to a distant place by air, and the injection pressure on the surface to be neutralized is uniform, there is little static electricity elimination, and a positive / negative ion balance can be achieved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a static eliminator according to a first embodiment of the present invention in which a nozzle of the first example is used and a main body of the static eliminator has a gun shape.

FIG. 2 is an enlarged sectional view of a main part of the above.

FIG. 3 is a side view of the same.

FIG. 4 is a front view of the same.

FIG. 5 is a perspective view of a first example nozzle.

6A and 6B show the same nozzle, FIG. 6A is a front view thereof, and FIG.
Is a side view, and (C) is a sectional view.

FIG. 7 is a sectional view showing a static eliminator according to a second embodiment of the present invention in which the nozzle of the first example is used and the main body of the static eliminator is box-shaped;

FIG. 8 is a side view of the same.

FIG. 9 is a front view of the same.

FIG. 10 is a perspective view of a second example nozzle.

FIG. 11 shows the nozzle, (A) is a front view thereof,
(B) is a side view, and (C) is a cross-sectional view.

FIG. 12 is a cross-sectional view showing a static eliminator according to a third embodiment of the present invention in which the nozzle of the second example is used and the main body of the static eliminator is a gun type.

FIG. 13 is an enlarged sectional view of a main part of the above.

FIG. 14 is a side view of the same.

FIG. 15 is a front view of the same.

FIG. 16 is a sectional view showing a static eliminator according to a fourth embodiment of the present invention in which the nozzle of the second example is used and the main body of the static eliminator is box-shaped;

FIG. 17 is a side view of the same.

FIG. 18 is a front view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Static eliminator main body 2 Trigger 3 Valve 4 Connection port 5 Barrel part 6 Extension cylinder 6a Female screw part 7 Power supply box 8 Nozzle 8a Male screw part 8b Flange part 8c Cap part 8d Tip convex part 8e Reinforcement rib 9 Partition wall 10 Discharge needle 11 Small hole 12 Injection hole 12a Injection port 21 Static eliminator main body 22 Connection port 23 Female screw joint 24 Pipe 25 Needle holder 26 Small hole 28 Nozzle 28a Male screw part 28b Nut part 28c Cap part 28d Tip convex part 32 Injection hole 32a Injection port

Claims (5)

[Claims] An air for injecting ions generated by the discharge together with air from a nozzle including a discharge needle for applying a high voltage from a high voltage generating circuit built in a main body of the static eliminator and discharging the same. In an injection type static eliminator, a plurality of injection ports having a small diameter are provided at equal intervals on the same circumferential line at the tip of the nozzle. 2. The air-jet type static eliminator according to claim 1, wherein the nozzle is integrally formed of resin. 3. The air-jet type static eliminator according to claim 1, wherein the nozzle is made of metal and serves also as a ground electrode for the discharge needle. 4. The discharger body according to claim 1, wherein said discharger body has a gun shape capable of opening and closing a valve of an air passage by a trigger.
4. The air injection type static eliminator according to 2 or 3. 5. The air-jet type static eliminator according to claim 1, wherein the static eliminator body is box-shaped.