JP2002258115A - Optical module - Google Patents

Optical module

Info

Publication number
JP2002258115A
JP2002258115A JP2001055716A JP2001055716A JP2002258115A JP 2002258115 A JP2002258115 A JP 2002258115A JP 2001055716 A JP2001055716 A JP 2001055716A JP 2001055716 A JP2001055716 A JP 2001055716A JP 2002258115 A JP2002258115 A JP 2002258115A
Authority
JP
Japan
Prior art keywords
light emitting
light
optical fiber
light receiving
emitting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001055716A
Other languages
Japanese (ja)
Inventor
Yuji Masuda
雄治 増田
Ryuji Yoneda
竜司 米田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2001055716A priority Critical patent/JP2002258115A/en
Publication of JP2002258115A publication Critical patent/JP2002258115A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Led Device Packages (AREA)
  • Semiconductor Lasers (AREA)
  • Light Receiving Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a highly versatile surface mount type optical module in which the intensity of outgoing light from a surface-emitting poetical element can surely be monitored with a simple structure, in which the optical axis is made parall to the surface of a substrate, and whose profile can be made low. SOLUTION: On a substrate 1, a chip carrier provided with a surface-emitting optical element 3, an optical fiber 5 whose end is obliquely machined for optically connecting one end to the optical element 3, and a light receiving element 4 for monitoring the output light of the optical element 3. The machined end face of the optical fiber 5 made to face the light receiving element 4, and the light receiving element 4 is disposed to be opposite to the surface-emitting optical element 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、基板上に配設した
発光素子に、光伝送用の光ファイバ及び前記発光素子の
出射光をモニタする受光素子をそれぞれ光接続させるよ
うに成した光モジュールに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical module in which an optical fiber for light transmission and a light receiving element for monitoring light emitted from the light emitting element are optically connected to a light emitting element disposed on a substrate. About.

【0002】[0002]

【従来の技術】現在まで、基板上に端面発光素子とこれ
に光接続(光結合)させる光ファイバを搭載した光モジ
ュールが多く提案されてきたが、端面発光素子から出射
される光のモードフィールド形状が真円ではないため、
レンズ等を介して光ファイバに光接続しても結合損失が
大きい。
2. Description of the Related Art Until now, many optical modules have been proposed in which an edge emitting device and an optical fiber for optically connecting (optical coupling) to the substrate are mounted on a substrate, but a mode field of light emitted from the edge emitting device has been proposed. Because the shape is not a perfect circle,
Even when optically connected to an optical fiber via a lens or the like, coupling loss is large.

【0003】また、モードフィールド形状を真円にする
ために、面発光素子を用いる光モジュールも提案されて
きたが、面発光素子は端面発光素子に比べ出射光の出力
をモニタすることが困難であり、モニタ情報から出射光
の制御を行なうことは困難であった。なお、面発光素子
の裏面にモニタ用受光素子を形成する方法も提案されて
いるが、素子の作製工程が複雑となる。
Further, an optical module using a surface light emitting element has been proposed in order to make the mode field shape a perfect circle. However, it is more difficult to monitor the output of the surface light emitting element than the edge light emitting element. Therefore, it is difficult to control the emitted light from the monitor information. Although a method of forming a monitor light receiving element on the back surface of the surface light emitting element has been proposed, the manufacturing process of the element becomes complicated.

【0004】従来の面発光素子を備えた光モジュールに
おける光出力のモニタ方法について説明する。図7に示
すように、同一のリードフレーム11上に搭載された面
発光素子3と受光素子4を、面発光素子3の出射光の波
長に対して透明な樹脂12で一体封止される。そして、
樹脂形成部には面発光素子3の光軸延長上に集光レンズ
6、及び集光レンズ6の周辺の光軸からずれた位置に、
漏洩光22即ち光ファイバに結合しない光を反射して受
光素子4へ入射させる反射ミラー7が形成される。この
ような構成により、面発光素子3から出射される光の強
度をモニタする構造にしていた(例えば、特開平10−
321900号公報を参照)。なお、図中21は結合
光、23は反射光である。
[0004] A method of monitoring the light output in a conventional optical module having a surface light emitting element will be described. As shown in FIG. 7, the surface light emitting element 3 and the light receiving element 4 mounted on the same lead frame 11 are integrally sealed with a resin 12 transparent to the wavelength of the light emitted from the surface light emitting element 3. And
The condensing lens 6 and the position deviated from the optical axis around the condensing lens 6 on the optical axis extension of the surface emitting element 3
The reflection mirror 7 that reflects the leaked light 22, that is, light that is not coupled to the optical fiber, and makes the light incident on the light receiving element 4 is formed. With such a configuration, the intensity of the light emitted from the surface light emitting element 3 is monitored (for example, see Japanese Unexamined Patent Application Publication No.
321900). In the figure, reference numeral 21 denotes coupling light, and reference numeral 23 denotes reflected light.

【0005】また、図8に示すように、面発光素子3の
光軸周辺の光軸からずれた位置に受光素子を配置し、面
発光素子3からの出射光の漏洩光22をモニタする構造
にしていた(例えば、特開平11−274650を参
照)。なお、図中13は金属キャップ(封止体)、14
はガラス窓、15はフェルール、16はフェルールホル
ダである。図7と同一構成については同一符号を付し説
明を省略する。
[0005] Further, as shown in FIG. 8, a light receiving element is arranged at a position deviated from the optical axis around the optical axis of the surface light emitting element 3 to monitor the leaked light 22 of the light emitted from the surface light emitting element 3. (For example, see Japanese Patent Application Laid-Open No. H11-274650). In the figure, 13 is a metal cap (sealed body), 14
Is a glass window, 15 is a ferrule, and 16 is a ferrule holder. The same components as those in FIG. 7 are denoted by the same reference numerals and description thereof is omitted.

【0006】また、基板表面に対して光軸が平行となる
ようにし、低背化が可能な汎用性の高い表面実装型の光
モジュールを提供することを目的として、図9に示すよ
うに基板1の表面に面発光素子3を搭載し、短部を斜め
加工し先端に反射ミラー7を施した光ファイバ5を発光
部上部に配置する方法も提案されている(例えば、特開
2000−292656参照)。なお、図7と同一構成
については同一符号を付し説明を省略する
Further, in order to provide a highly versatile surface-mount type optical module in which the optical axis is parallel to the substrate surface and the height can be reduced, as shown in FIG. A method has also been proposed in which a surface light emitting element 3 is mounted on the surface of a light emitting element 1 and an optical fiber 5 having a short portion obliquely processed and a reflection mirror 7 provided at the tip is disposed above the light emitting portion (for example, JP-A-2000-292656). reference). Note that the same components as those in FIG. 7 are denoted by the same reference numerals and description thereof is omitted.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、図7に
示す光モジュールでは、光ファイバ5に光を入射するに
は、面発光素子3を駆動させながら光軸調整をする必要
があり、また、図8に示す光モジュールでは、光ファイ
バ5に光を入射させ外部に光出力を取り出すためには、
光ファイバ5を保持する部品が必要になり、その構造が
非常に複雑となる。
However, in the optical module shown in FIG. 7, in order for light to enter the optical fiber 5, it is necessary to adjust the optical axis while driving the surface light emitting element 3. In the optical module shown in FIG. 8, in order to make light incident on the optical fiber 5 and take out light output to the outside,
A component for holding the optical fiber 5 is required, and the structure becomes very complicated.

【0008】また、図9に示す光モジュールでは、面発
光素子3からの出射出力をモニタすることができない。
また、光ファイバ5と面発光素子3は厳密な位置あわせ
が必要であるが、光ファイバは基板1に形成された溝に
より左右方向に制限されており微調整ができず、さらに
位置ずれの補正ができないという問題点があった。
In the optical module shown in FIG. 9, the output from the surface light emitting element 3 cannot be monitored.
Although the optical fiber 5 and the surface emitting element 3 need to be strictly aligned, the optical fiber is restricted in the left-right direction by a groove formed in the substrate 1 and cannot be finely adjusted. There was a problem that it was not possible.

【0009】本発明はこのような課題に鑑みてなされた
ものであり、簡単な構成で面発光素子3からの出力光の
強度を確実にモニタすることができ、基板1表面に対し
て光軸が平行となるようにし、しかも低背化が可能な汎
用性の高い表面実装型の光モジュールを提供することを
目的とする。
The present invention has been made in view of such a problem, and it is possible to reliably monitor the intensity of the output light from the surface light emitting element 3 with a simple configuration and to control the optical axis with respect to the surface of the substrate 1. It is an object of the present invention to provide a highly versatile surface-mount type optical module capable of reducing the height and making it parallel.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するため
に、本発明の光モジュールは、基板上に配設した発光素
子に、光ファイバ及び前記発光素子の出射光をモニタす
る受光素子をそれぞれ光接続させるように成し、前記光
ファイバの少なくとも光入射端部と前記受光素子とをキ
ャリア基体に固定するとともに、前記光ファイバの光入
射端部を前記発光素子の発光部と前記受光素子の受光部
との間に位置させたことを特徴とする。
In order to achieve the above object, an optical module according to the present invention comprises a light emitting element provided on a substrate, an optical fiber and a light receiving element for monitoring the light emitted from the light emitting element. An optical connection is made, and at least the light incident end of the optical fiber and the light receiving element are fixed to the carrier base, and the light incident end of the optical fiber is connected to the light emitting part of the light emitting element and the light receiving element. It is characterized by being located between the light receiving unit.

【0011】また、前記光ファイバの光入射端部が傾斜
面に形成され、該傾斜面が前記受光素子の受光部に対面
していることを特徴とする。また、前記発光素子が面発
光素子であることを特徴とする。さらに、前記基板及び
前記キャリア基体は単結晶シリコンで形成されているこ
とを特徴とする。
Further, a light incident end of the optical fiber is formed on an inclined surface, and the inclined surface faces a light receiving portion of the light receiving element. Further, the light emitting device is a surface light emitting device. Further, the substrate and the carrier base are formed of single crystal silicon.

【0012】[0012]

【発明の実施の形態】以下、本発明による光モジュール
の実施形態を模式的に示した図面に基づき詳細に説明す
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an optical module according to the present invention will be described below in detail with reference to the drawings schematically showing the embodiments.

【0013】図1、図2に示すように、シリコン単結晶
等の異方性エッチングが可能な材料から成る基板1上に
は、光ファイバ押さえ用溝31、面発光素子実装用段差
32、面発光素子実装用電極(不図示)、面発光素子駆
動用電極42、及びチップキャリア実装用電極43が形
成され、前記面発光素子実装用電極とチップキャリア実
装用電極43の実装部にはんだ51を形成する。
As shown in FIGS. 1 and 2, an optical fiber holding groove 31, a surface light emitting element mounting step 32, and a surface are formed on a substrate 1 made of a material capable of anisotropic etching such as silicon single crystal. A light emitting element mounting electrode (not shown), a surface light emitting element driving electrode 42, and a chip carrier mounting electrode 43 are formed. Solder 51 is mounted on a mounting portion of the surface light emitting element mounting electrode and the chip carrier mounting electrode 43. Form.

【0014】また、図3に示すキャリア基体であるチッ
プキャリア2は、基板1と同様な材料から成り、そのチ
ップキャリア2上には光ファイバ実装用溝33、受光素
子実装用段差34、受光素子実装用電極(不図示)、及
び受光素子駆動用電極45が形成され、受光素子実装用
電極の実装部にはんだ51を形成する。
A chip carrier 2, which is a carrier base shown in FIG. 3, is made of the same material as the substrate 1. On the chip carrier 2, an optical fiber mounting groove 33, a light receiving element mounting step 34, a light receiving element A mounting electrode (not shown) and a light receiving element driving electrode 45 are formed, and solder 51 is formed on a mounting portion of the light receiving element mounting electrode.

【0015】図4、図5に示すように、基板1上には面
発光素子3を実装し、チップキャリア2上に受光素子4
と光ファイバ5を実装する。また、前記面発光素子3は
前記基板1と、前記受光素子4は前記チップキャリア2
とそれぞれワイヤボンディングにて電気的接続を行う。
As shown in FIGS. 4 and 5, a surface light emitting element 3 is mounted on a substrate 1 and a light receiving element 4 is mounted on a chip carrier 2.
And the optical fiber 5 are mounted. Further, the surface light emitting element 3 includes the substrate 1 and the light receiving element 4 includes the chip carrier 2.
Are electrically connected by wire bonding.

【0016】このように、本発明の光モジュールは、基
板1上に配設した面発光素子3に、光ファイバ5及び面
発光素子3の出射光をモニタする受光素子4をそれぞれ
光接続させるように成し、光ファイバ5の少なくとも光
入射端部と受光素子3とをチップキャリア2に固定する
とともに、光ファイバ5の光入射端部を面発光素子3の
発光部と受光素子4の受光部との間に位置させている。
また、光ファイバ5の光入射端部が傾斜面に形成され、
該傾斜面が受光素子4の受光部に対面していることを特
徴とする。また、基板1及びチップキャリア2は特に単
結晶シリコンで形成されていることを特徴とする。
As described above, in the optical module of the present invention, the optical fiber 5 and the light receiving element 4 for monitoring the light emitted from the surface light emitting element 3 are optically connected to the surface light emitting element 3 disposed on the substrate 1. At least the light incident end of the optical fiber 5 and the light receiving element 3 are fixed to the chip carrier 2, and the light incident end of the optical fiber 5 is connected to the light emitting part of the surface light emitting element 3 and the light receiving part of the light receiving element 4. It is located between.
Also, the light incident end of the optical fiber 5 is formed on an inclined surface,
The inclined surface faces the light receiving portion of the light receiving element 4. Further, the substrate 1 and the chip carrier 2 are characterized in that they are particularly formed of single crystal silicon.

【0017】かくして、図6に示すように、基板1上に
チップキャリア2を実装することによって、面発光素子
3からの出射光のうちの結合光21は、チップキャリア
2上に実装した先端を斜めに形成した光ファイバ5の端
面にて反射され、光ファイバ5を通して外部へ取り出す
ことができる。また、光ファイバ5に結合しなかった漏
洩光22は受光素子4に入射して光出力がモニタされ
る。
Thus, as shown in FIG. 6, by mounting the chip carrier 2 on the substrate 1, the coupled light 21 of the light emitted from the surface light emitting element 3 has the tip mounted on the chip carrier 2. The light is reflected by the end face of the optical fiber 5 formed obliquely, and can be extracted to the outside through the optical fiber 5. Further, the leaked light 22 not coupled to the optical fiber 5 enters the light receiving element 4 and the light output is monitored.

【0018】以上詳述したように、本発明の光モジュー
ルによれば、基板1上の面発光素子実装用段差32底部
に面発光素子3を実装し、チップキャリア2上の光ファ
イバ実装用溝31に端面を斜めに加工した光ファイバ
5、及び受光素子実装用段差34底部に受光素子4を実
装し、基板1上にチップキャリア2を実装することによ
り、面発光素子3からの出射光は斜め加工された光ファ
イバ5の端面にて反射し光ファイバ5に光結合される。
As described in detail above, according to the optical module of the present invention, the surface light emitting element 3 is mounted on the bottom of the surface light emitting element mounting step 32 on the substrate 1, and the optical fiber mounting groove on the chip carrier 2. By mounting the light receiving element 4 on the bottom of the optical fiber 5 whose end face is obliquely processed and the light receiving element mounting step 34 and mounting the chip carrier 2 on the substrate 1, the light emitted from the surface light emitting element 3 The light is reflected by the end face of the optical fiber 5 that has been obliquely processed and optically coupled to the optical fiber 5.

【0019】また、光ファイバ5に結合されなかった出
射光は漏洩光22となり受光素子4に入射し、光出力を
モニタすることが可能となる。
Further, the outgoing light not coupled to the optical fiber 5 becomes the leak light 22 and enters the light receiving element 4 so that the light output can be monitored.

【0020】また、チップキャリア2上に受光素子4と
光ファイバ5を実装する構成をとることにより、最も位
置精度が必要な光ファイバ5と面発光素子3の位置あわ
せを行う時に、面発光素子3の発光点を基準に基板平面
と平行な面内に対して任意の方向で位置あわせをするこ
とが可能となり、基板1上に実装した面発光素子3の位
置ずれを補正することができる。これにより、面発光素
子3から出射した光を確実に光ファイバ5に結合させる
ことができる。これは基板に対して面発光素子3や光フ
ァイバ5を個別にアライメントするよりも、基板1とチ
ップキャリア2間の位置あわせをする方がはるかに容易
だからである。
Further, by adopting a structure in which the light receiving element 4 and the optical fiber 5 are mounted on the chip carrier 2, the surface light emitting element 3 can be aligned with the optical fiber 5 requiring the highest positional accuracy. Positioning can be performed in an arbitrary direction with respect to a plane parallel to the substrate plane with reference to the light emitting point No. 3, and the positional deviation of the surface light emitting element 3 mounted on the substrate 1 can be corrected. Thereby, the light emitted from the surface light emitting element 3 can be reliably coupled to the optical fiber 5. This is because it is much easier to position the substrate 1 and the chip carrier 2 than to individually align the surface light emitting element 3 and the optical fiber 5 with respect to the substrate.

【0021】また、基板1面に対して平行に光軸を配置
し、かつ容易に位置合わせできるので、簡単な構成で汎
用性の高い表面実装型の光モジュールを提供できる。
Further, since the optical axis is arranged parallel to the surface of the substrate 1 and can be easily aligned, a highly versatile surface mount type optical module having a simple configuration can be provided.

【0022】[0022]

【実施例】次に、本発明をより具体化した光モジュール
について説明する。
Next, an optical module embodying the present invention will be described.

【0023】先ず、図2に示すように、ミラー指数で
(100)面を主面とするシリコン単結晶から成る基板
1上に、光ファイバ押さえ用溝31、面発光素子搭載用
段差32をKOH水溶液によるシリコン単結晶の異方性
エッチングにて形成した。また、面発光素子実装用電極
41、面発光素子駆動用電気配線42、及びチップキャ
リア実装用電極43を、上層/下層の順でAu/Pt/
Tiにて基板1表面上に形成した。また、面発光素子実
装部及びチップキャリア実装部にはAu−Sn合金はん
だ51を形成した。
First, as shown in FIG. 2, a groove 31 for holding an optical fiber and a step 32 for mounting a surface light emitting element are formed on a substrate 1 made of silicon single crystal having a (100) plane as a principal surface with a Miller index. The silicon single crystal was formed by anisotropic etching using an aqueous solution. In addition, the surface light emitting element mounting electrode 41, the surface light emitting element driving electric wiring 42, and the chip carrier mounting electrode 43 are arranged in the order of Au / Pt /
It was formed on the surface of the substrate 1 with Ti. An Au-Sn alloy solder 51 was formed on the surface light emitting element mounting portion and the chip carrier mounting portion.

【0024】次に、図3に示すチップキャリア2も(1
00)面を主面とするシリコン単結晶から同様に光ファ
イバ実装用溝33、受光素子搭載用段差34をKOH水
溶液によるシリコン単結晶の異方性エッチングにて形成
した。また、受光素子実装用電極44及び駆動用電気配
線45を、上層/下層の順でAu/Pt/Tiにてチッ
プキャリア2上に形成した。また、受光素子実装部には
Au−Sn合金はんだ51を形成した。
Next, the chip carrier 2 shown in FIG.
Similarly, an optical fiber mounting groove 33 and a light receiving element mounting step 34 were formed by anisotropic etching of a silicon single crystal using a KOH aqueous solution from a silicon single crystal having the (00) plane as a main surface. Further, the light-receiving element mounting electrode 44 and the driving electric wiring 45 were formed on the chip carrier 2 with Au / Pt / Ti in the order of upper layer / lower layer. The Au-Sn alloy solder 51 was formed on the light receiving element mounting portion.

【0025】次に、面発光素子3を基板1上に形成した
面発光素子実装用段差32底部に実装し、電気的接続は
ワイヤボンディングにて行った。次に、受光素子4をチ
ップキャリア2上に形成した受光素子実装用段差34底
部に実装し、電気的接続はワイヤボンディングにて行
い、端面を45°に斜め加工した光ファイバ5をチップ
キャリア2上に形成した光ファイバ実装用溝33に実装
した。
Next, the surface light emitting element 3 was mounted on the bottom of the surface light emitting element mounting step 32 formed on the substrate 1, and electrical connection was made by wire bonding. Next, the light receiving element 4 is mounted on the bottom of the step 34 for mounting the light receiving element formed on the chip carrier 2, the electrical connection is performed by wire bonding, and the optical fiber 5 whose end face is obliquely processed to 45 ° is mounted on the chip carrier 2. It was mounted in the optical fiber mounting groove 33 formed above.

【0026】最後に、前記基板1上に形成したチップキ
ャリア実装用電極43に前記チップキャリア2上に形成
した受光素子駆動用電極45の形状が重なり合うように
実装した。
Finally, the chip carrier mounting electrode 43 formed on the substrate 1 was mounted so that the shape of the light receiving element driving electrode 45 formed on the chip carrier 2 was overlapped.

【0027】なお、本発明では1本の光ファイバと発光
素子とを光接続する例について説明したが、これに限定
されるものではなく、複数の光ファイバとこれらに対応
させる複数の発光素子とを光接続させるようにしてもよ
く、本発明の要旨を逸脱しない範囲で適宜変更し実施す
ることが可能である。
In the present invention, an example in which one optical fiber and a light emitting element are optically connected has been described. However, the present invention is not limited to this, and a plurality of optical fibers and a plurality of light emitting elements corresponding to them are required. May be optically connected, and can be appropriately changed and implemented without departing from the gist of the present invention.

【0028】[0028]

【発明の効果】光ファイバと発光素子を基板上に実装す
ると、発光素子の実装が位置ずれを起こしたとしても、
光ファイバはそれを搭載するV溝に沿ってしか調芯でき
ず、結果的に結合効率が下がるが、本発明の光モジュー
ルによれば、光ファイバとモニタ用受光素子をキャリア
基体に実装することによって、発光素子が位置ずれを起
こしても、キャリア基体ごと光ファイバを調芯すること
が可能となり、その結果、結合効率が向上する。
According to the present invention, when an optical fiber and a light emitting element are mounted on a substrate, even if the mounting of the light emitting element is displaced,
The optical fiber can be aligned only along the V-groove on which it is mounted, resulting in lower coupling efficiency. However, according to the optical module of the present invention, the optical fiber and the monitoring light receiving element must be mounted on the carrier base. Accordingly, even if the light emitting element is displaced, the optical fiber can be aligned with the carrier substrate, and as a result, the coupling efficiency is improved.

【0029】また、光ファイバの光入射端部が傾斜面に
形成され、該傾斜面が前記受光素子の受光部に対面して
いることで、基板面に対して垂直に出射された光を、基
板面に対して平行に光軸を変化することが可能となる。
Further, the light incident end of the optical fiber is formed on an inclined surface, and the inclined surface faces the light receiving portion of the light receiving element, so that light emitted perpendicularly to the substrate surface can be emitted. The optical axis can be changed parallel to the substrate surface.

【0030】また、発光素子が面発光素子であることに
より、面発光素子が表面実装型光モジュールにも適用が
可能となり汎用性の高い光モジュールを提供できる。
Further, since the light emitting device is a surface light emitting device, the surface light emitting device can be applied to a surface mount type optical module, and a highly versatile optical module can be provided.

【0031】さらに、基板とキャリア基体は、ともに単
結晶シリコンで形成されていることにより、異方性エッ
チング技術を用いることができ、これにより光ファイバ
実装用溝や、マーカー溝を精度よく形成可能となり、そ
の結果、各光デバイスの実装時の実装精度を上げること
ができ、また、基板とキャリア基体のアライメントの実
装精度を向上させることができる。
Further, since both the substrate and the carrier base are formed of single crystal silicon, anisotropic etching technology can be used, and thereby the optical fiber mounting groove and the marker groove can be formed with high precision. As a result, the mounting accuracy at the time of mounting each optical device can be improved, and the mounting accuracy of the alignment between the substrate and the carrier base can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る光モジュールの実施形態を模式的
に説明するための斜視図である。
FIG. 1 is a perspective view schematically illustrating an embodiment of an optical module according to the present invention.

【図2】本発明の基板を模式的に説明する図であり、
(a)は平面図、(b)は側面図である。
FIG. 2 is a diagram schematically illustrating a substrate of the present invention;
(A) is a plan view and (b) is a side view.

【図3】本発明のチップキャリアを模式的に説明する図
であり、(a)は平面図、(b)は側面図である。
3A and 3B are diagrams schematically illustrating a chip carrier of the present invention, wherein FIG. 3A is a plan view and FIG. 3B is a side view.

【図4】本発明の基板上に面発光素子を実装した様子を
模式的に説明する図であり、(a)は平面図、(b)は
側面図である。
4A and 4B are diagrams schematically illustrating a state in which a surface light emitting element is mounted on a substrate of the present invention, wherein FIG. 4A is a plan view and FIG. 4B is a side view.

【図5】本発明のチップキャリア上に受光素子、光ファ
イバを実装した様子を模式的に説明する図であり、
(a)は平面図、(b)は側面図である。
FIG. 5 is a diagram schematically illustrating a state in which a light receiving element and an optical fiber are mounted on a chip carrier of the present invention;
(A) is a plan view and (b) is a side view.

【図6】図4の基板上に図5のチップキャリアを実装し
た様子を模式的に説明する図であり、(a)は平面図、
(b)は側面図である。
6A and 6B are diagrams schematically illustrating a state in which the chip carrier of FIG. 5 is mounted on the substrate of FIG. 4; FIG.
(B) is a side view.

【図7】従来の光モジュールを説明する断面図である。FIG. 7 is a cross-sectional view illustrating a conventional optical module.

【図8】従来の光モジュールを説明する断面図である。FIG. 8 is a cross-sectional view illustrating a conventional optical module.

【図9】従来の光モジュールを説明する断面図である。FIG. 9 is a cross-sectional view illustrating a conventional optical module.

【符号の説明】[Explanation of symbols]

1:基板 2:チップキャリア(キャリア基体) 3:面発光素子(発光素子) 4:受光素子 5:光ファイバ 6:集光レンズ 7:反射ミラー 11:リードフレーム 12:樹脂 13:金属キャップ(封止体) 14:ガラス窓 15:フェルールホルダ 16:フェルール 21:結合光 22:漏洩光 23:反射光 31:光ファイバ押さえ用溝 32:面発光素子実装用溝 33:光ファイバ実装用溝 33:受光素子実装用溝 42:面発光素子駆動用電極 43:チップキャリア実装用電極 45:受光素子駆動用電極 51:はんだ 1: substrate 2: chip carrier (carrier base) 3: surface light emitting element (light emitting element) 4: light receiving element 5: optical fiber 6: condenser lens 7: reflection mirror 11: lead frame 12: resin 13: metal cap (sealed) Stopper 14: Glass window 15: Ferrule holder 16: Ferrule 21: Coupling light 22: Leakage light 23: Reflected light 31: Optical fiber holding groove 32: Surface light emitting element mounting groove 33: Optical fiber mounting groove 33: Groove for mounting light receiving element 42: Electrode for driving surface light emitting element 43: Electrode for mounting chip carrier 45: Electrode for driving light receiving element 51: Solder

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2H037 AA01 BA02 CA10 DA03 DA04 DA06 5F041 AA09 CA12 CA75 DA03 DA07 EE02 EE08 FF14 5F073 AB17 AB28 BA01 EA15 FA02 FA06 FA13 FA22 FA27 5F088 BA16 BB01 EA11 JA03 JA14 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H037 AA01 BA02 CA10 DA03 DA04 DA06 5F041 AA09 CA12 CA75 DA03 DA07 EE02 EE08 FF14 5F073 AB17 AB28 BA01 EA15 FA02 FA06 FA13 FA22 FA27 5F088 BA16 BB01 EA11 JA03 JA14

Claims (4)

【特許請求の範囲】[The claims] 【請求項1】 基板上に配設した発光素子に、光ファイ
バ及び前記発光素子の出射光をモニタする受光素子をそ
れぞれ光接続させるように成した光モジュールであっ
て、前記光ファイバの少なくとも光入射端部と前記受光
素子とをキャリア基体に固定するとともに、前記光ファ
イバの光入射端部を前記発光素子の発光部と前記受光素
子の受光部との間に位置させたことを特徴とする光モジ
ュール。
1. An optical module, wherein an optical fiber and a light receiving element for monitoring light emitted from the light emitting element are optically connected to a light emitting element disposed on a substrate, respectively. An incident end and the light receiving element are fixed to a carrier base, and a light incident end of the optical fiber is located between a light emitting part of the light emitting element and a light receiving part of the light receiving element. Optical module.
【請求項2】 前記光ファイバの光入射端部が傾斜面に
形成され、該傾斜面が前記受光素子の受光部に対面して
いることを特徴とする請求項1に記載の光モジュール。
2. The optical module according to claim 1, wherein a light incident end of the optical fiber is formed on an inclined surface, and the inclined surface faces a light receiving portion of the light receiving element.
【請求項3】 前記発光素子が面発光素子であることを
特徴とする請求項1に記載の光モジュール。
3. The optical module according to claim 1, wherein the light emitting device is a surface light emitting device.
【請求項4】 前記基板及び前記キャリア基体は単結晶
シリコンで形成されていることを特徴とする請求項1に
記載の光モジュール。
4. The optical module according to claim 1, wherein said substrate and said carrier base are made of single crystal silicon.
JP2001055716A 2001-02-28 2001-02-28 Optical module Pending JP2002258115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001055716A JP2002258115A (en) 2001-02-28 2001-02-28 Optical module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001055716A JP2002258115A (en) 2001-02-28 2001-02-28 Optical module

Publications (1)

Publication Number Publication Date
JP2002258115A true JP2002258115A (en) 2002-09-11

Family

ID=18915860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001055716A Pending JP2002258115A (en) 2001-02-28 2001-02-28 Optical module

Country Status (1)

Country Link
JP (1) JP2002258115A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004178755A (en) * 2002-11-29 2004-06-24 Hitachi Ltd Optical device, optical pickup, and optical disk unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004178755A (en) * 2002-11-29 2004-06-24 Hitachi Ltd Optical device, optical pickup, and optical disk unit

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