JP2002255643A - Method of enhancing fracture toughness of surface of functional ceramic material - Google Patents
Method of enhancing fracture toughness of surface of functional ceramic materialInfo
- Publication number
- JP2002255643A JP2002255643A JP2001049087A JP2001049087A JP2002255643A JP 2002255643 A JP2002255643 A JP 2002255643A JP 2001049087 A JP2001049087 A JP 2001049087A JP 2001049087 A JP2001049087 A JP 2001049087A JP 2002255643 A JP2002255643 A JP 2002255643A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic material
- functional ceramic
- indenter
- functional
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910010293 ceramic material Inorganic materials 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 27
- 230000002708 enhancing effect Effects 0.000 title description 2
- 239000000919 ceramic Substances 0.000 claims abstract description 21
- 238000007373 indentation Methods 0.000 claims abstract description 18
- 238000000137 annealing Methods 0.000 claims abstract description 15
- 238000002844 melting Methods 0.000 claims abstract description 6
- 230000008018 melting Effects 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 20
- 239000007787 solid Substances 0.000 claims description 16
- 238000010304 firing Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000005728 strengthening Methods 0.000 abstract 1
- 230000035876 healing Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005480 shot peening Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【０００１】[0001]
【技術分野】本発明は，機能性セラミック材料の新規な
表面強靭化方法に関する。代表的な機能性セラミック材
料としては，ＰｂＺｒＯ3−ＰｂＴｉＯ3の固溶体（通
常，ＰＺＴと呼ばれる。）がある。TECHNICAL FIELD The present invention relates to a novel surface toughening method for a functional ceramic material. Exemplary functional ceramic material, there is a solid solution of PbZrO 3 -PbTiO 3 (commonly referred to as PZT.).
【０００２】[0002]
【従来技術】積層型の圧電素子としての機能性セラミッ
ク材料は，積層された複数の圧電体層と，これらの圧電
体層の間に介在し一層おきに交互に形成されている複数
の第１内部電極および第２内部電極とを有する。このよ
うな積層圧電素子は，両面に両内部電極が塗布されてい
るセラミックシートを交互に積層して焼結し，できあが
った焼結体をブロックに分割（ダイシング）するなどの
製造方法により製造されている。2. Description of the Related Art A functional ceramic material as a laminated piezoelectric element is composed of a plurality of stacked piezoelectric layers and a plurality of first piezoelectric layers interposed between the piezoelectric layers and formed alternately. An internal electrode and a second internal electrode. Such a laminated piezoelectric element is manufactured by a manufacturing method such as alternately stacking and sintering ceramic sheets having both internal electrodes coated on both surfaces, and dividing (dicing) the completed sintered body into blocks. ing.
【０００３】たとえば特開平４−１７９２８５号公報に
は，このような製造方法により製造されたブロックの両
側面に，露出している内部電極の端面を一層おきに絶縁
体で覆った後，残った内部電極の端面を導電性の外部電
極で接続する方法が，開示されている。こうして，圧電
体層および両内部電極の二つの側面にそれぞれ形成され
第１内部電極および第２内部電極にそれぞれ接続されて
いる第１外部電極および第２外部電極とを有する積層型
の圧電素子が製造される。For example, in Japanese Patent Application Laid-Open No. 4-179285, the end faces of the internal electrodes exposed on both sides of the block manufactured by such a manufacturing method are covered with an insulator every other layer and remain. A method of connecting the end faces of the internal electrodes with conductive external electrodes is disclosed. Thus, a laminated piezoelectric element having the first external electrode and the second external electrode formed on the piezoelectric layer and the two side surfaces of the two internal electrodes and connected to the first internal electrode and the second internal electrode, respectively, is obtained. Manufactured.
【０００４】ここで，セラミックスの強度を向上させる
方法としては，製造方法と添加物からのアプローチがあ
る。まず，製造方法からのアプローチでは，気孔率をな
るべく小さくする，すなわち焼結密度を増加させる，粒
成長を抑制する，セラミックス表面からの亀裂の進行を
防ぐ等の方法がある。特に，セラミック表面の亀裂を抑
える工夫をするのは，破壊は表面の亀裂から始まること
が多いことから，表面を鏡面研磨するなり，ガラスや樹
脂等で表面をコーティングすることによって強度の向上
が期待できることが知られている。Here, as a method for improving the strength of ceramics, there are approaches from a manufacturing method and an additive. First, in the approach from the manufacturing method, there are methods of reducing the porosity as much as possible, that is, increasing the sintering density, suppressing grain growth, and preventing the progress of cracks from the ceramic surface. In particular, measures to suppress cracks on the ceramic surface are that the fracture often starts with a crack on the surface, so the surface must be mirror-polished and the strength can be improved by coating the surface with glass or resin. It is known that it can be done.
【０００５】つぎに，添加物からのアプローチでは，誘
電率の向上，誘電率の温度依存性の改善，耐電圧特性の
向上，機械的強度の向上，電極材料とのマッチング，焼
結温度の低下等を目的として様々なドーパントが添加さ
れている。添加物により機械的な強度を向上すると，誘
電率など圧電特性が変化し，本来の機能性セラミック材
料の特性が変化し，アクチュエータ自体の構造までも見
直す必要があった。[0005] Next, in the approach from the additive, improvement of the dielectric constant, improvement of the temperature dependence of the dielectric constant, improvement of the withstand voltage characteristic, improvement of the mechanical strength, matching with the electrode material, reduction of the sintering temperature are considered. Various dopants are added for the purpose. When the mechanical strength is improved by the additive, the piezoelectric characteristics such as the dielectric constant change, the characteristics of the original functional ceramic material change, and it is necessary to review the structure of the actuator itself.
【０００６】[0006]
【解決しようとする課題】そこで，本発明の課題は機能
性セラミック材料において，誘電率など圧電特性を変化
させることなく，機能性セラミック材料の機械的な強
度，特に，表面の靭性を強化する方法を提供することで
ある。Accordingly, an object of the present invention is to provide a method for enhancing the mechanical strength of a functional ceramic material, particularly the surface toughness, without changing piezoelectric characteristics such as dielectric constant in the functional ceramic material. It is to provide.
【０００７】[0007]
【課題の解決手段】本発明（請求項１の発明）は，機能
性セラミック材料の表面に，室温において圧子を接触さ
せて微細圧痕を形成すると共に少なくともその近傍に微
小亀裂を形成した後，上記機能性セラミック材料の融点
の絶対温度をＴｍとした場合における０．５Ｔｍ以上Ｔ
ｍ未満の温度雰囲気中で上記微小亀裂の少なくとも一部
が消失するように単純焼鈍することを特徴とする機能性
セラミック材料の表面強靭化方法にある。According to the present invention (invention of claim 1), an indenter is brought into contact with the surface of a functional ceramic material at room temperature to form a fine indentation and to form a fine crack at least in the vicinity thereof. 0.5 Tm or more T when the absolute temperature of the melting point of the functional ceramic material is Tm
The present invention provides a method for toughening the surface of a functional ceramic material, characterized by performing simple annealing so that at least a part of the microcracks disappears in an atmosphere having a temperature of less than m.
【０００８】本発明者等は，機能性セラミック材料の表
面を強靱化する方法を鋭意検討する中で，機能性セラミ
ック材料の中に変形と共に転位などの格子欠陥を導入す
ることによって，強靭性を高めることができるのではな
いかと考え，種々の試みを行った。その中で，室温で微
小亀裂導入後，高温での単純焼鈍によって，亜粒界（転
位）を形成することができ，これにより強靱性を高める
ことができるのであろうということを見い出したのであ
る。The present inventors have been studying a method for toughening the surface of a functional ceramic material, and have introduced toughness by introducing lattice defects such as dislocations together with deformation into the functional ceramic material. We thought that it could be raised and made various attempts. Among them, they found that after the introduction of microcracks at room temperature, simple graining at high temperatures could form subgrain boundaries (dislocations), thereby increasing toughness. .
【０００９】[0009]
【発明の実施の形態】本発明をより詳細に説明する。上
記微細圧痕と微小亀裂を形成した後の加熱による単純焼
鈍（ヒーリングまたはアニーリング）は，０．５Ｔｍ
（但しＴｍは融点の絶対温度）以上Ｔｍ未満で行うこと
ができる。０．５Ｔｍ以上の塑性変形を起こす状態で格
子欠陥を導入する手段を適用しなければ，強靭化を達成
できないと思われていたものが，本発明では，微細圧痕
と微小亀裂を室温で形成した後に，単純焼鈍するだけで
機能性セラミック材料の強靭化を達成できる。DETAILED DESCRIPTION OF THE INVENTION The present invention will be described in more detail. Simple annealing (healing or annealing) by heating after the formation of the fine indentations and microcracks is 0.5 Tm
(Where Tm is the absolute temperature of the melting point) or more and less than Tm. Although it was thought that toughening could not be achieved without applying means for introducing lattice defects in a state where plastic deformation of 0.5 Tm or more was caused, in the present invention, fine indentations and microcracks were formed at room temperature. Later, toughening of the functional ceramic material can be achieved only by simple annealing.
【００１０】上記微小亀裂は，溝幅が０．００１〜１μ
ｍ，深さが０．１〜５０μｍであることが好ましい（請
求項２）。上記微細圧痕の溝幅の下限を０．００１μｍ
とすることが好ましいのは，ヒーリングによって導入さ
れる転位密度が本発明の目的を達成するには小さいから
であり，上限を１μｍとしたのはヒーリングに長時間を
要するからである。また，上記微小亀裂の深さは０．１
〜５０μｍとすることが好ましいが，これは表面部分の
剥離防止を図るためである。また，実験結果から，上記
微細圧痕は，５００〜１０，０００個／ｍｍ2の密度と
なるよう形成することが好ましい（請求項３）。The micro-crack has a groove width of 0.001 to 1 μm.
m, and the depth is preferably 0.1 to 50 μm. The lower limit of the groove width of the fine indentation is 0.001 μm
Is preferable because the dislocation density introduced by healing is small to achieve the object of the present invention, and the upper limit is set to 1 μm because healing requires a long time. The depth of the microcracks is 0.1
The thickness is preferably set to 50 μm in order to prevent peeling of the surface portion. From the experimental results, it is preferable that the fine indentations are formed so as to have a density of 500 to 10,000 / mm 2 (claim 3).
【００１１】ここで，上記微細圧痕を形成する圧子は，
後述するビッカース硬度計の圧子やショトピーニングに
用いられる固体粒子，あるいはその他のものも含み，上
記微細圧痕および微小亀裂を機械的処理によって形成で
きるものを総称するものである。また，上記微細圧痕お
よび微小亀裂の形成手段としては，上記のような微細圧
痕および微小亀裂が形成できる手段であればどのような
ものでも良いが，後述するごとく，ビッカース硬度計，
ショットピーニング（金属材料の表面に硬い粒子を打ち
付けて表面近傍だけを塑性変形させる方法に用いられて
いる技術である。）などを用いる手段を好ましいものと
して挙げることができる。[0011] Here, the indenter for forming the fine indentation is as follows.
It is a generic term for those which include the indenter of a Vickers hardness tester described later, solid particles used for shot peening, and others, and which can form the fine indentations and microcracks by mechanical treatment. The means for forming the fine indentations and micro-cracks may be any means capable of forming the fine indents and micro-cracks as described above.
Means such as shot peening (a technique used for hitting hard particles on the surface of a metal material and plastically deforming only the vicinity of the surface) and the like can be cited as preferable examples.
【００１２】すなわち，上記圧子は，荷重１００〜５０
０ｇを加えたビッカース硬度計の圧子を適用することが
できる（請求項４）。また，上記機能性セラミック材料
表面に上記圧子としての固体粒子を投射することにより
上記微細圧痕及び上記微小亀裂を形成することもできる
（請求項５）。特にショットピーニングによる微細圧痕
及び微細亀裂の形成は，本発明の工業化には有力な方法
である。That is, the indenter has a load of 100 to 50.
An indenter of a Vickers hardness meter to which 0 g is added can be applied (claim 4). Further, the fine indentations and the fine cracks can be formed by projecting the solid particles as the indenter on the surface of the functional ceramic material (claim 5). In particular, formation of fine indentations and fine cracks by shot peening is a powerful method for industrialization of the present invention.
【００１３】また，上記固体粒子の粒径は１μｍ以上で
あることが好ましい（請求項６）。これにより，上記微
細圧痕を容易に形成することができる。更に，上記固体
粒子は，０．０５ＭＰａ以上の搬送エアを用いて投射す
ることが好ましい（請求項７）。これにより，上記固体
粒子の衝突による上記微細圧痕の形成を容易に行うこと
ができる。It is preferable that the solid particles have a particle size of 1 μm or more. Thereby, the fine indentations can be easily formed. Furthermore, it is preferable that the solid particles are projected using a carrier air of 0.05 MPa or more (claim 7). This makes it possible to easily form the fine indentations due to the collision of the solid particles.
【００１４】また，上記方法を適用できる機能性セラミ
ック材料としては，チタン・ジルコン酸鉛（請求項
８），すなわちＰｂＺｒＯ3−ＰｂＴｉＯ3の固溶体（通
常，ＰＺＴと呼ばれる）を主体とした圧電／電歪セラミ
ックス，あるいは，ＢａＴｉＯ3（チタン酸バリウム）
などがある。The functional ceramic material to which the above method can be applied is a piezoelectric / electrode mainly composed of titanium / lead zirconate (claim 8), that is, a solid solution of PbZrO 3 -PbTiO 3 (usually called PZT). Strained ceramics or BaTiO 3 (barium titanate)
and so on.
【００１５】そして，上記機能性セラミック材料を単独
で表面の靱性を向上させることもできるし，複数の機能
性セラミック材料を積層した積層体の表面の強靱化も可
能である。すなわち，上記機能性セラミック材料が，圧
電セラミックスあるいは電歪セラミックスよりなる複数
層のセラミック層と，該セラミック層間に介在させた内
部電極層とを一体的に焼成してなる積層一体焼成型の電
気機械変換素子である場合にも，上記表面強靱化方法を
有効に活用することができる（請求項９）。すなわち，
上記積層一体焼成型の電気機械変換素子は，その耐久性
の向上が強く要請されている。この背景において，上記
表面強靱化方法を上記電気機械変換素子に適用すること
によって，電気機械変換素子全体の表面を強靱化するこ
とができ，耐久性を向上させることができるのである。The surface toughness can be improved by using the above-mentioned functional ceramic material alone, and the surface of a laminate in which a plurality of functional ceramic materials are laminated can be made tough. That is, a laminated monolithic electric machine in which the functional ceramic material is formed by integrally firing a plurality of ceramic layers made of piezoelectric ceramics or electrostrictive ceramics and an internal electrode layer interposed between the ceramic layers. Even in the case of a conversion element, the surface toughening method can be effectively used (claim 9). That is,
There is a strong demand for improvement in the durability of the electro-mechanical conversion element of the laminated integral firing type. In this background, by applying the surface toughening method to the electromechanical transducer, the surface of the entire electromechanical transducer can be toughened, and the durability can be improved.
【００１６】[0016]
【実施例】実施例１ 本例では，ＰＺＴを主体とした機能性セラミック材料の
表面に，室温において圧子を接触させて微細圧痕を形成
すると共に少なくともその近傍に微小亀裂を形成した。
その後，上記機能性セラミック材料の融点の絶対温度を
Ｔｍとした場合の０．５Ｔｍ以上Ｔｍ未満の温度雰囲気
中で上記微小亀裂の少なくとも一部が消失するように単
純焼鈍した。EXAMPLE 1 In this example, an indenter was brought into contact with the surface of a functional ceramic material mainly composed of PZT at room temperature to form a fine indentation and a microcrack was formed at least in the vicinity thereof.
Thereafter, simple annealing was performed in an atmosphere at a temperature of 0.5 Tm or more and less than Tm, where the absolute temperature of the melting point of the functional ceramic material was Tm, so that at least a part of the microcracks disappeared.
【００１７】本例は，特に，ショットピーニングを利用
して，上記機能性セラミック材料表面に上記圧子として
の固体粒子を投射する方法を適用した例である。すなわ
ち，図１に示すごとく，機能性セラミック材料３に対し
て，圧子としての固体粒子（投射材）２が表面に投射さ
れる。代表的な例として，多結晶ＰＺＴ表面に対して，
１００μｍのガラスビーズ投射材を０．２ＭＰａのエア
で搬送し，投射ノズル１（内径８ｍｍ）から投射した。This embodiment is an example in which shot particles are used to project the solid particles as the indenter onto the surface of the functional ceramic material. That is, as shown in FIG. 1, the solid particles (projection material) 2 as an indenter are projected on the surface of the functional ceramic material 3. As a typical example, for a polycrystalline PZT surface,
A 100 μm glass bead projecting material was conveyed by air of 0.2 MPa and projected from a projection nozzle 1 (inner diameter: 8 mm).
【００１８】機能性セラミック材料３に対してノズル１
までの距離が１００ｍｍの場合，投射範囲は直径２５ｍ
ｍ程度になるので，ノズル１を機能性セラミック材料に
対してＸＹ方向に移動させながら投射を行った。個体粒
子２の投射量は，およそ２００ｇ／ｍｉｎとした。Nozzle 1 for functional ceramic material 3
When the distance to is 100mm, the projection range is 25m in diameter
m, projection was performed while moving the nozzle 1 in the XY directions with respect to the functional ceramic material. The projection amount of the solid particles 2 was approximately 200 g / min.
【００１９】そして，本例では，上記圧子としての固体
粒子の投射後の単純焼鈍（アニール）温度を変化させ，
その温度と表面靭性値の関係を求めた。図２には，横軸
に単純焼鈍の温度を，縦軸に表面靱性値をとったグラフ
を示す。同図より知られるごとく，機能性セラミック材
料の融点Ｔｍに対して，０．５Ｔｍまでは，強靱化の効
果はなく，アニール温度が０．５Ｔｍを越えたあたりか
ら強靱化の効果が観察される。これは，上記固体粒子２
の投射により機能性セラミック材料３の表面に欠陥（転
位等）が導入され，アニール（単純焼鈍）により，前述
のヒーリングが起こるためと考えられる。In this embodiment, the simple annealing (annealing) temperature after the projection of the solid particles as the indenter is changed,
The relationship between the temperature and the surface toughness value was determined. FIG. 2 is a graph in which the horizontal axis represents the temperature of simple annealing and the vertical axis represents the surface toughness. As can be seen from the figure, the toughening effect is not observed up to 0.5 Tm with respect to the melting point Tm of the functional ceramic material, and the toughening effect is observed from around the annealing temperature exceeding 0.5 Tm. . This is the solid particles 2
It is considered that defects (dislocations and the like) are introduced into the surface of the functional ceramic material 3 by the projection of the material, and the above-described healing occurs by annealing (simple annealing).
【００２０】なお，破壊靱性は次の式を用いて算出する
ことができる。 ＫIC［破壊靭性（靭性強度）］＝０．０１６（Ｅ／Ｈ）
1/2（Ｐ／ｃ3/2），（但し，Ｅはヤング率，Ｈはビッカ
ース強度，Ｐは荷重，cは亀裂長さの半分である）に，
Ｅ＝２８６．７８Ｐａ，Ｈ＝１４１０，Ｐ＝０．９８
Ｎ，ｃ＝測定した微小亀裂の長さを代入することによっ
て靭性強度が求められる。The fracture toughness can be calculated using the following equation. K IC [fracture toughness (toughness strength)] = 0.016 (E / H)
1/2 (P / c 3/2 ), where E is Young's modulus, H is Vickers strength, P is load, and c is half of crack length.
E = 286.78 Pa, H = 1410, P = 0.98
The toughness is determined by substituting N, c = the length of the measured microcrack.
【００２１】このように，本例では，機能性セラミック
材料としてのＰＺＴを主体とした圧電／電歪セラミック
スの表面を十分に強靱化できることがわかる。Thus, in this example, it can be seen that the surface of a piezoelectric / electrostrictive ceramic mainly composed of PZT as a functional ceramic material can be sufficiently toughened.
【００２２】実施例２ 本例では，実施例１における機能性セラミック材料３に
代えて，積層一体焼成型の電気機械変換素子４に上記方
法を適用した例である。すなわち，本例では，図３に示
すごとく，機能性セラミック材料として，圧電セラミッ
クスあるいは電歪セラミックスよりなる複数層のセラミ
ック層４１と，該セラミック層４１間に介在させた内部
電極層５１，５２とを一体的に焼成してなる積層一体焼
成型の電気機械変換素子４を用いる。Embodiment 2 In this embodiment, the above method is applied to an electromechanical transducer 4 of a laminated integral firing type, instead of the functional ceramic material 3 in Embodiment 1. That is, in this example, as shown in FIG. 3, a plurality of ceramic layers 41 made of piezoelectric ceramics or electrostrictive ceramics as functional ceramic materials, and internal electrode layers 51 and 52 interposed between the ceramic layers 41 are formed. Are integrally fired, and a laminated integrated fired electromechanical transducer 4 is used.
【００２３】そして，図４に示すごとく，電気機械変換
素子４の外周面全体に実施例２と同条件でショットピー
ニング処理を施す。そして，その後，０．５Ｔｍ〜Ｔｍ
の間の温度で単純焼鈍す。これにより，表面の靱性が強
化された積層一体焼成型の電気機械変換素子４が得られ
る。Then, as shown in FIG. 4, the entire outer peripheral surface of the electromechanical transducer 4 is subjected to a shot peening process under the same conditions as in the second embodiment. And then, 0.5Tm to Tm
Simple annealing at a temperature between As a result, a laminated integrated firing type electromechanical transducer 4 having an enhanced surface toughness is obtained.
【図１】実施例２における，機能性セラミック材料に固
体粒子を投射している状態を示す説明図。FIG. 1 is an explanatory view showing a state in which solid particles are projected on a functional ceramic material in Example 2.
【図２】実施例２における，単純焼鈍温度と表面靱性値
との関係を示す説明図。FIG. 2 is an explanatory diagram showing a relationship between a simple annealing temperature and a surface toughness value in Example 2.
【図３】実施例３における，積層一体焼成型の電気機械
変換素子の構成を示す説明図。FIG. 3 is an explanatory view showing a configuration of a laminated integral firing type electromechanical conversion element according to a third embodiment.
【図４】実施例３における，電気機械変換素子に固体粒
子を投射している状態を示す説明図。FIG. 4 is an explanatory view showing a state in which solid particles are projected on the electromechanical transducer in the third embodiment.
１．．．投射ノズル， ２．．．固体粒子， ３．．．機能性セラミック材料， ４．．．積層一体型の電気機械変換素子， ４１．．．セラミック層， ５１，５２．．．内部電極層， 1. . . Projection nozzle, 2. . . 2. solid particles; . . Functional ceramic material, 4. . . 41. a layered electromechanical transducer; . . Ceramic layer, 51, 52. . . Internal electrode layer,
───────────────────────────────────────────────────── フロントページの続き (71)出願人 500443361 坂 公恭 愛知県春日井市高座台１丁目５番53 (72)発明者 川原 伸章 愛知県刈谷市昭和町１丁目１番地 株式会 社デンソー内 (72)発明者 原 邦彦 愛知県刈谷市昭和町１丁目１番地 株式会 社デンソー内 (72)発明者 坂 公恭 愛知県春日井市高座台１−５−53 (72)発明者 内村 勝次 愛知県豊川市穂ノ原三丁目一番 新東ブイ セラックス株式会社内 (72)発明者 伊澤 守康 愛知県西春日井郡西春町宇福寺神明51 新 東ブレーター株式会社内 Ｆターム(参考） 4G031 AA11 AA12 AA32 BA10 BA20 GA15 GA16 ────────────────────────────────────────────────── ─── Continuing from the front page (71) Applicant 500443361 Kimiyasu Saka 1-53-5 Kozadai, Kasugai-shi, Aichi (72) Inventor Shinsho Kawahara 1-1-1, Showa-cho, Kariya-shi, Aichi Pref. 72) Inventor Kunihiko Hara 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Inside DENSO Corporation (72) Inventor Kimitaka Saka 1-53-53 Takazadai, Kasugai-shi, Aichi Prefecture (72) Inventor Katsuji Uchimura Aichi Prefecture 3-72 Honohara, Toyokawa Shinto-buoy Ceralux Co., Ltd. (72) Inventor Moriyasu Izawa 51 Shinmei Ufuji Temple, Nishiharu-cho, Nishikasugai-gun, Aichi Prefecture F-term in New East Brater Co., Ltd. 4G031 AA11 AA12 AA32 BA10 BA20 GA15 GA16
Claims (9)
おいて圧子を接触させて微細圧痕を形成すると共に少な
くともその近傍に微小亀裂を形成した後，上記機能性セ
ラミック材料の融点の絶対温度をＴｍとした場合の，
０．５Ｔｍ以上Ｔｍ未満の温度雰囲気中で上記微小亀裂
の少なくとも一部が消失するように単純焼鈍することを
特徴とする機能性セラミック材料の表面強靭化方法。An indenter is brought into contact with the surface of a functional ceramic material at room temperature to form a fine indentation and to form a microcrack at least in the vicinity thereof. Then, the absolute temperature of the melting point of the functional ceramic material is defined as Tm. If you do
A method for toughening the surface of a functional ceramic material, comprising performing simple annealing in an atmosphere at a temperature of 0.5 Tm or more and less than Tm so that at least a part of the microcracks disappears.
幅が０．００１〜１μｍ，深さが０．１〜５０μｍであ
ることを特徴とする機能性セラミック材料の表面強靭化
方法。2. The method of claim 1, wherein the micro-cracks have a groove width of 0.001 to 1 μm and a depth of 0.1 to 50 μm.
は，５００〜１０，０００個／ｍｍ2の密度となるよう
形成することを特徴とする機能性セラミック材料の表面
強靭化方法。3. The method of claim 1, wherein the fine indentations are formed to have a density of 500 to 10,000 / mm 2 .
上記圧子は，荷重１００〜５００ｇを加えたビッカース
硬度計の圧子であることを特徴とする機能性セラミック
材料の表面強靭化方法。4. The method according to claim 1, wherein:
The method according to claim 1, wherein the indenter is an indenter of a Vickers hardness meter to which a load of 100 to 500 g is applied.
上記機能性セラミック材料表面に上記圧子としての固体
粒子を投射することにより上記微細圧痕及び上記微小亀
裂を形成することを特徴とする機能性セラミック材料の
表面強靭化方法。5. The method according to claim 1, wherein:
A method for toughening the surface of a functional ceramic material, wherein the fine indentations and the microcracks are formed by projecting the solid particles as the indenter on the surface of the functional ceramic material.
は１μｍ以上であることを特徴とする機能性セラミック
材料の表面強靭化方法。6. The method according to claim 5, wherein the particle diameter of the solid particles is 1 μm or more.
は，０．０５ＭＰａ以上の搬送エアを用いて投射するこ
とを特徴とする機能性セラミック材料の表面強靭化方
法。7. The method according to claim 5, wherein the solid particles are projected using a carrier air of 0.05 MPa or more.
上記機能性セラミック材料がチタン・ジルコン酸鉛であ
ることを特徴とする機能性セラミック材料の表面強靭化
方法。8. The method according to claim 1, wherein:
A method for toughening a surface of a functional ceramic material, wherein the functional ceramic material is titanium / zirconate lead.
上記機能性セラミック材料は，圧電セラミックスあるい
は電歪セラミックスよりなる複数層のセラミック層と，
該セラミック層間に介在させた内部電極層とを一体的に
焼成してなる積層一体焼成型の電気機械変換素子である
ことを特徴とする機能性セラミック材料。9. The method according to claim 1, wherein:
The functional ceramic material includes a plurality of ceramic layers made of piezoelectric ceramics or electrostrictive ceramics,
A functional ceramic material, which is a laminated integral firing type electromechanical conversion element obtained by integrally firing an internal electrode layer interposed between the ceramic layers.
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Cited By (1)
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|---|---|---|---|---|
| JP2012156493A (en) * | 2011-01-07 | 2012-08-16 | Canon Inc | Piezoelectric element, liquid ejection head, ultrasonic motor and dust removal device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001181099A (en) * | 1999-12-21 | 2001-07-03 | Japan Science & Technology Corp | Surface toughening method of brittle material |
| WO2002024605A1 (en) * | 2000-09-21 | 2002-03-28 | Sintokogio, Ltd. | Method for toughening modification of ceramic and ceramic product |
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2001
- 2001-02-23 JP JP2001049087A patent/JP2002255643A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001181099A (en) * | 1999-12-21 | 2001-07-03 | Japan Science & Technology Corp | Surface toughening method of brittle material |
| WO2002024605A1 (en) * | 2000-09-21 | 2002-03-28 | Sintokogio, Ltd. | Method for toughening modification of ceramic and ceramic product |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012156493A (en) * | 2011-01-07 | 2012-08-16 | Canon Inc | Piezoelectric element, liquid ejection head, ultrasonic motor and dust removal device |
| US9825213B2 (en) | 2011-01-07 | 2017-11-21 | Canon Kabushiki Kaisha | Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
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