JP2002250618A - Moving table control method and its device, and three- dimensional surface shape measuring method and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a moving table control method and its device, having a comparatively inexpensive moving mechanism of the moving table, capable of easily correcting movement error due to constitution, and to provide a three-dimensional surface shape measuring method and its device, capable of measuring the three-dimensional surface shape with high accuracy with a comparatively inexpensive constitution, by utilizing the control method and its device. SOLUTION: This control method has characteristics such that it three axes of three- dimensional orthogonal coordinates are an X-axis, a Y-axis and a Z-axis respectively are assumed as being virtual and a prescribed virtual plane parallel to both the X-axis and the Y-axis is defined as a virtual reference plane; the moving table is moved, so that a detection plane of the moving table having the detection plane is moved in approximate manner in the virtual reference plane; and that if a normal erected at a prescribed reference point on the virtual reference plane is defined as a reference normal and an arbitrary one point on the detection plane is defined as the detection point, the displacement in the Z-axis direction from the reference point, when the detection point becomes an intersection point with the reference normal by the movement of the moving table is detected as the movement displacement of the detection point.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motion table control method and apparatus, and a three-dimensional surface shape measurement method and apparatus.

[0002]

2. Description of the Related Art For example, in a three-dimensional surface shape measuring apparatus, when measuring the unevenness (shape) of the surface of an object to be measured,
The measurement object is placed on a fixed table fixed horizontally, for example, and a sensor (surface shape detection sensor) for detecting surface irregularities (shape) is scanned, or conversely, the surface shape detection sensor is moved to a predetermined position. For example, the measurement object is placed on a horizontally movable exercise table and moved so that the measurement point of the measurement object faces the detection (measurement) position. That is, in each method, the measurement is performed by relatively moving the measurement target and the surface shape detection sensor.

[0003]

When the movement table is moved (for example, horizontal movement) as in the latter case, the surface on which the object to be measured is placed (detection surface) is a predetermined virtual plane (for example, horizontal plane). It is ideal to move (move) in the interior, but actually, errors occur based on the configuration of the movement (movement) mechanism and the like, the accuracy thereof, and the like. The same applies to a motion table in another device such as an electronic component mounting device (so-called mounter), and an error occurs in the motion of the surface (detection surface) on which the electronic component, the board, and the like are placed. That is, in practice, the motion table is moved “approximately” in a predetermined virtual plane (for example, a horizontal plane), and the motion displacement (for example, in the vertical direction) is (vertical direction: (Up-down direction) It becomes a motion error. In addition, a small motion error (ie, motion accuracy) and the price of the motion mechanism are in a trade-off relationship. Inevitably, a motion error with a small motion error is expensive, and a low-cost motion error tends to have a large motion error. .

Accordingly, the present invention provides a motion table control method and apparatus capable of easily compensating for a motion error caused by the motion mechanism of the motion table, and an apparatus using the motion table. It is an object of the present invention to provide a three-dimensional surface shape measuring method and a three-dimensional surface shape measuring method capable of measuring a three-dimensional surface shape with high accuracy and relatively low cost.

[0005]

According to a first aspect of the present invention, there is provided a motion table control method, wherein three mutually orthogonal three-dimensional orthogonal coordinates are defined as an X axis, a Y axis, and a Z axis. When a predetermined virtual plane parallel to both of them is set as a virtual reference plane, a movement for moving the movement table such that the detection surface of the movement table having the detection surface moves approximately within the virtual reference plane. Table driving step, a normal set to a predetermined reference point in the virtual reference plane as a reference normal,
Any one point in the detection plane as a detection point, the displacement in the Z-axis direction from the reference point when the detection point becomes an intersection with the reference normal due to the movement of the motion table,
A detection point movement displacement detection step of detecting the movement as a movement displacement of the detection point.

According to a fifth aspect of the present invention, there is provided a motion table control apparatus, wherein three mutually orthogonal three-dimensional orthogonal coordinates are represented by X.
Axis, the Y axis and the Z axis, and when a predetermined virtual plane parallel to both the X axis and the Y axis is a virtual reference plane,
A movement table having a detection surface, a movement table driving means for moving the movement table so that the detection surface moves approximately in the virtual reference plane, and a movement table driving means for standing at a predetermined reference point in the virtual reference plane. The reference normal is defined as the reference normal, and any one point in the detection plane is defined as a detection point. The Z-axis direction when the detection point becomes an intersection with the reference normal due to the movement of the movement table. And a detection point movement displacement detecting means for detecting a displacement from the reference point as a movement displacement of the detection point.

In this exercise table control method and apparatus, the exercise table is moved such that the detection surface of the exercise table having the detection surface moves approximately within a virtual reference plane (a so-called XY plane). For this reason, if there is no error due to this motion, the detection surface of the motion table does not deviate from the virtual reference plane, but here it may be approximate (there may be an error). That is, while the exercise table is exercised, a normal established at a predetermined reference point in the virtual reference plane is set as a reference normal, and an arbitrary point on the detection plane is set as a detection point, and the detection point is set as a detection point of the exercise table. The displacement from the reference point in the Z-axis direction at the time of intersection with the reference normal due to the movement is detected as the movement displacement of the detection point. For this reason,
At least a movement displacement in the Z-axis direction of a detection point that has become a point on the reference normal can be detected, and thereby a movement error with respect to the virtual reference plane can be corrected. Accordingly, since an extremely high-precision motion mechanism is not required, the motion mechanism of the motion table can be relatively inexpensive, and a motion error due to the configuration can be easily corrected.

In the exercise table control method according to the first aspect, it is preferable that the exercise table control method further includes a movement displacement storing step of storing the detected movement displacement in association with the detection point.

Preferably, the motion table control device according to claim 5 further comprises a motion displacement storage means for storing the detected motion displacement in association with the detection point.

In this exercise table control method and apparatus, since the detected exercise displacement is stored in association with the detected point, it can be corrected at any time after the detection, and the motion error can be more easily corrected. .

Further, in the exercise table control method according to claim 1 or 2, it is preferable that the virtual reference plane is a horizontal plane.

Further, in the exercise table control device according to claim 5 or 6, it is preferable that the virtual reference plane is a horizontal plane.

In this exercise table control method and apparatus, since the virtual reference plane is a horizontal plane, the X axis and the Y axis are the vertical and horizontal axes on a horizontal plane parallel to (or the same as) the horizontal plane, and the Z axis is the vertical axis. Becomes The reference normal is a straight line in the Z-axis direction. The movement table is controlled so as to move approximately in a horizontal plane, and displacement when an arbitrary detection point becomes an intersection with a reference normal due to movement of the movement table,
That is, the displacement from the reference point in the vertical direction is detected as the motion displacement of the detection point. Therefore, it is possible to detect at least the vertical movement displacement of the detection point that has become one point on the reference normal, and thereby it is possible to correct the movement error with respect to the virtual reference plane (horizontal plane).

Further, in the exercise table control device according to any one of claims 5 to 7, the exercise table has two front and rear surfaces parallel to each other, and refers to a surface of the two front and back surfaces which is not the detection surface. The detection of the movement displacement of the detection point is performed by detecting a point in the reference plane which is an intersection with the reference normal at the same time as the detection point as a reference point, and detecting the displacement of the reference point. Is preferred.

In this exercise table control device, the exercise table has two front and back surfaces that are parallel to each other with a predetermined thickness or a predetermined interval, and uses the one of the two front and back surfaces that is not the detection surface as a reference surface. Thereby, the detection plane and the reference plane are parallel to each other.
Therefore, the motion displacement of an arbitrary detection point can be detected by detecting a displacement of the reference point at the same time as the detection point, using a point in the reference plane which is an intersection with the reference normal as a reference point. In this case, since the surface which is not the detection surface of the front and back surfaces is used as the reference surface, the motion displacement can be detected even if the detection surface side is used for another detection or measurement.

In the motion table control device according to any one of claims 5 to 7, a reference plate having a reference surface parallel to the detection surface is attached to the motion table, and the motion displacement of the detection point is detected. It is preferable that the reference point be a point in the reference plane, which is an intersection with the reference normal line at the same time as the detection point, and the displacement of the reference point be detected.

In this exercise table control device, a reference plate having a reference surface parallel to the detection surface is attached to the exercise table, whereby the detection surface and the reference surface become two parallel surfaces. The movement displacement of the detection point can be detected by using a point on the reference plane which is an intersection with the reference normal at the same time as the detection point as a reference point and detecting the displacement of the reference point.

Further, in the exercise table control device according to the ninth aspect, the reference plate is attached to a side of the front and back surfaces of the exercise table which is not the detection surface, and the reference plate is provided on a side which is not the detection table side. It is preferable to have a surface as the reference surface.

In this exercise table control device, a reference plate is attached to the other side of the front and back surfaces of the exercise table which is not the detection surface, and the reference plate has the non-detection surface as the reference surface. Even if the detection surface side of the exercise table is used for other detections or measurements, the motion displacement can be detected.

In the motion table control device according to any one of claims 5 to 10, the motion table driving means includes an X stage for moving the motion table in the X-axis direction, and an X stage for moving the motion table in the Y direction. And a Y stage for axial movement.

In this exercise table control device, the exercise table driving means has an X stage for moving the exercise table in the X-axis direction and a Y stage for moving the exercise table in the Y-axis direction. It can be freely moved on the virtual reference plane. In addition, X stage and Y
Even if a movement error occurs due to the kneading of the stage, etc., the detection point movement displacement detection means is configured to easily detect and correct the movement error, so strict accuracy is not required.
An X stage, a Y stage, and the like can be constructed at a relatively low cost.

The motion table control device according to any one of claims 5 to 11, wherein the detection point motion displacement detection means is capable of detecting the position of the surface of the partner on the reference normal line in a non-contact manner. It is preferred to have a meter.

In this motion table control device, the detection point motion displacement detection means has a non-contact type displacement meter capable of detecting the position of the surface of the partner on the reference normal line in a non-contact manner. Therefore, the position of the detection surface or reference surface of the motion table on the reference normal, that is, the position of the detection point or the reference point, can be easily detected, thereby easily detecting the movement displacement of the detection point.

Further, in the exercise table control device according to the twelfth aspect, the non-contact type displacement meter irradiates the surface of the other party on the reference normal line with irradiation light and receives reflected light corresponding to the irradiation light. An optical fiber displacement meter that detects the position of the surface of the other party is preferable.

In this motion table control device, the non-contact type displacement meter detects the position of the surface of the opponent by irradiating the surface of the opponent on the reference normal line with irradiation light and receiving the corresponding reflected light. It is an optical fiber displacement meter. In this type of optical fiber displacement meter, the distance to the measurement target surface can be obtained based on the change in the phase or light amount of the reflected light with respect to the irradiation light, and therefore, the position of the measurement target surface can be obtained from the relationship with its own position. . In this case, since the detection is performed by light irradiation and reflection, it can be detected without contact.

The movement table control device according to claim 13, wherein the optical fiber displacement meter has an irradiation fiber for irradiating the irradiation light and a plurality of light receiving fibers for receiving the reflected light, and the irradiation of the irradiation fiber. Surface and each light receiving surface of the plurality of light receiving fibers are arranged so that respective distances from the irradiation surface to each light receiving surface are different from each other, and the irradiation is performed based on a difference in the amount of light received from each light receiving surface. It is preferable that the differential type optical fiber displacement meter obtains a distance between a surface and the surface of the other party.

In this motion table control device, the optical fiber displacement meter is a so-called differential type optical fiber displacement meter.
In this case, it has an irradiating fiber for irradiating the irradiating light and a plurality of light receiving fibers for receiving the reflected light, and each irradiating surface of the irradiating fiber and each light receiving surface of the plurality of light receiving fibers are arranged from the irradiating surface to each light receiving surface. Since the distances are different from each other, the distance between the irradiation surface and the surface of the partner can be obtained based on the difference in the amount of light received from each light receiving surface. For this reason, the principle of the so-called differential type optical fiber displacement meter allows the distance to be determined without depending on the attenuation of light in the optical fiber due to the influence of the amount of incident light or bending or the reflectance of the mating surface, and this distance can be obtained. Based on this, the position of the other party's surface on the reference normal can be detected more accurately and without contact.

According to a fourth aspect of the present invention, there is provided a method for measuring a three-dimensional surface shape, comprising the steps of: contacting a back surface of an object to be measured with the detection surface; By moving, the intersection of the surface of the measurement object and the reference normal as a measurement point, based on the displacement of the measurement point from the reference point, surface shape information for detecting the shape information of the measurement point A detection step, and a shape information correction step of correcting shape information of the measurement point based on a motion displacement of the detection point which is an intersection with the reference normal at the same time as the measurement point. .

According to a fifteenth aspect of the present invention, in the three-dimensional surface shape measuring apparatus, the movement table is provided by bringing the back surface of the object to be measured into close contact with the means of any one of the fifth to fourteenth aspects. By moving, the intersection of the surface of the measurement object and the reference normal as a measurement point, based on the displacement of the measurement point from the reference point, surface shape information for detecting the shape information of the measurement point Detecting means, and shape information correcting means for correcting shape information of the measurement point based on a movement displacement of a detection point which is an intersection with the reference normal simultaneously with the measurement point. .

In this three-dimensional surface shape measuring method and apparatus, the intersection of the surface of the measuring object and the reference normal is set as the measuring point by moving the motion table with the back surface of the measuring object in close contact with the detection surface. The shape information of the measuring point is detected based on the displacement of the measuring point from the reference point. In this case, since the movement displacement of the detection point can be detected as described above in claims 1 to 3 or 5 to 14, the movement displacement of the detection point which is the intersection with the reference normal is detected simultaneously with the measurement point. Thus, the motion error on the reference normal can be easily corrected, and the motion mechanism of the motion table can be relatively inexpensive. Therefore, the three-dimensional surface shape measuring method and the three-dimensional surface shape measuring device can measure the three-dimensional surface shape with high accuracy and relatively low cost.

[0031]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a motion table control method and apparatus according to an embodiment of the present invention; FIG. This will be described in detail. This three-dimensional surface shape measuring device is also called a surface unevenness measuring device, and scans the surface of a measurement object to measure fine irregularities on the surface.

FIG. 1 shows a third embodiment according to the present invention.
It is a block diagram showing the whole composition of a three-dimensional surface profile measuring device. As shown in FIG. 1, the three-dimensional surface shape measuring device 1
A printing device (hereinafter, referred to as a “printer”) 6 such as a printer or plotter for externally printing measurement results and the like, including an operation unit 10, a control unit 20, and a measurement unit 50, and an external device such as a hard disk or a magneto-optical disk A storage device (hereinafter, represented by a “hard disk”) 7 or the like can be connected.

The operation unit 10 includes a display 3 such as a cathode ray tube and a liquid crystal for interfacing with a user, a keyboard 4, and a pointing device (hereinafter, represented by a "mouse") 5 such as a mouse, a digitizer, and a tablet. ing. The keyboard 4 includes a group of alphabet keys, a group of symbol keys, a group of numeric keys, a group of kana keys such as hiragana and katakana, and a group of character keys assigned as a group of external character keys for calling and selecting external characters. A function key group and the like for designating the operation mode and the like are arranged, and the function key group includes a function key assigned as a measurement start key described later.

The user can input various instructions and data for measurement by using the keyboard 4 and the mouse 5 on the operation screen of the display 3, and display and edit the input result and the processing result on the screen of the display 4. The user can check the measurement result on the screen display or output it to the printer 6 and check the print result. Further, the measurement result can be stored as a sheet of the print result or by storing it in the hard disk 7 as data.

The measuring unit 50 includes a surface shape displacement sensor PS
And a motion table unit 60 for horizontally moving a measurement target (target) TG, and a motion controller 51 for driving the motion table unit 60 according to a command from the control unit 20.
(And the drivers 52 and 53) and (analog) signals from the surface shape displacement sensor PS and the motion displacement sensor DS.
An AD conversion board having an AD converter or the like that performs D conversion and outputs it to the control unit 20 (hereinafter, simply referred to as “AD converter”)
55. This configuration and the like will be described later in more detail.

The control unit 20 includes a CPU 210, a ROM 22
0, character generator ROM (CG-ROM) 2
30, RAM 240, measuring unit (detection system) controller (DTC) 250, I / O controller (IOC) 26
0, equipped with a hard disk drive (HDD) 270,
They are connected to each other by an internal bus 260. The control unit 20 includes a power supply unit 290.

The power supply unit 290 includes a power supply unit 291
In addition, the power supply unit 291 is provided with a battery 292 made of a nickel-cadmium or alkaline dry battery, a storage battery, and the like, and an AC adapter connection port 293. After performing the process of step-down and stabilization, power is supplied to each part of the three-dimensional surface shape measuring apparatus 1.

The ROM 220 stores, in addition to a control program area 221 for storing a control program to be processed by the CPU 210, control data including data (or a table) such as sampling points (measurement points), relay points, and scanning trajectories by them. Control data area 2 for storing
22.

The CG-ROM 230 stores font data such as characters, symbols, and figures prepared for input / edit of the three-dimensional surface shape measuring apparatus 1 and receives code data for specifying the characters and the like. When this is done, the corresponding font data is output.

The RAM 240 includes a displacement data area 242 for storing displacement data in the X, Y, and Z directions inputted from the measuring section 50, and a correction data for storing correction data used for the correction thereof, in addition to the various register groups 241. Region 243,
It has areas such as a processing result data area 244 for storing data of correction processing and other processing results, and various buffer areas 245. The RAM 240 is backed up so as to retain stored data even when the power is turned off by operating a power key (not shown) on the keyboard 4, and is used as a work area for various control processes. .

In the IOC 260, a circuit for supplementing the function of the CPU 210 and handling an interface signal with a peripheral circuit or the like is built in, such as a gate array or a custom LSI. For example, a timer or the like for performing various timings is also incorporated as a function in the IOC 260. Therefore, the IOC 260 is connected to the display 3, the keyboard 4, the mouse 5, the printer 6, and the like. The IOC 260 receives various instructions and input data from the keyboard 4 and the mouse 5 as they are or processes them, and takes them into the internal bus 280. In conjunction, the CPU 21
For example, data or control signals output to the internal bus 280 from 0 or the like are output to the display 3 or the printer 6 as they are or processed, and various control signals and various data are input to and from these peripheral circuits and peripheral devices. Control the output.

The HDD 24 controls and drives the hard disk 7 in accordance with a command from the CPU 210 to control input and output of various control signals and various data with the hard disk 7.

The DTC 250 supplements the functions of the CPU 21 and incorporates a circuit for handling interface signals with the respective sections of the measuring section 50. The DTC 250 controls the respective sections of the measuring section 50, and performs input / output between them. Control. For this reason, the DTC 250 includes a digital / analog mixed cell array LSI in which analog circuits and the like are mixed in addition to the logic circuit cells, a flip-chip type chip-size multi-chip module having a plurality of bare chips mounted thereon, and the like. 50 connected to each part
In conjunction with or supplementing its function, the PU 210 controls them and controls input / output between them.

Then, the CPU 210 processes the font data from the CG-ROM 230 and various data in the RAM 240 by referring to the control data according to the control program in the ROM 220 by the above-described configuration.
In addition to transmitting and receiving various instructions and various data to and from the peripheral circuits and the like through the DTC 60 and controlling each unit of the measurement unit 50 through the DTC 250, the target T as a measurement result is obtained.
3D surface shape measuring device 1 for finding the surface shape of G
Take control of the whole.

The control unit 20 has an interface (DTC 250, motion controller 5) with the measurement unit 50.
1. By devising the configuration of the AD converter 54 and the like (for example, mounting it on an expansion board of a standard specification), the other configuration can be the same as that of a personal computer or a workstation. It is not necessary to be a dedicated (control) machine for the device 1 and it may be shared with a personal computer or the like used in another system. Conversely, a processor (MP) specialized for the three-dimensional surface shape measuring device 1
U) or the like. Therefore, in the present embodiment, the control unit 20 shown in FIG. 1 is a control unit also used as another system, and a part of the functions is also used as a function of the control unit CN of the three-dimensional surface shape measuring apparatus 1. I do.

For this reason, in FIG. 2, the control unit CN is indicated by a virtual line, and the whole is referred to as a three-dimensional surface shape measuring apparatus 1 and will be described below.
The measuring unit 50 of the three-dimensional surface shape measuring device 1 will be described in detail.

As shown in FIG. 2, the measuring section 50 includes a surface shape displacement sensor PS, a motion table section 60, and a control section C.
A motion controller 51 that drives the exercise table unit 60 in response to a command from the
1 in the exercise table unit 60 according to a command from
The output signals from the driver 52 and the driver 53 for driving the servo motor 63 and the Y servo motor 64, and the output signals from the surface shape displacement sensor PS and the motion displacement sensor DS are AD.
An AD converter 55 that converts the data and reports the converted data to the control unit 20 is provided.

The surface shape displacement sensor PS and the motion displacement sensor DS basically include a differential optical fiber displacement meter (laser displacement sensor) using laser light as a light source. Surface shape displacement sensor PS and motion displacement sensor DS
The respective detection centers are provided to face each other so as to coincide with the reference normal line L. These are further described below.

As shown in FIGS. 2 to 4, the exercise table section 60 includes an exercise table TB and a servo motor 67.
(X servo motor 63 and Y servo motor 64), and an X stage 61 and a Y stage 62 for horizontally moving the motion table TB. The X stage 61 and the Y stage 62 have a stage size of 1
Each of them is formed in a hollow shape of about 50 mm × 150 mm, is guided by a cross roller guide 70 having a rail length of about 150 mm, and moves (stage moves) via a ball screw shaft driven by a servo motor 67. In addition, a θ stage 68 for rotational movement is provided. stage 68 is also formed in a hollow shape, is guided by a cross roller ring 75 having an outer ring outer diameter of about 200 mm, and is similarly driven by a servomotor.

On the back (lower surface) of the X stage 61, a reference flat plate TC is provided. This reference plate TC
Is a rectangular flat plate having a thickness of about 50 mm × 50 mm and a thickness of about 10 mm, which is fixed to springs 71 at four places on the back surface of the X stage 61, and has four screws for parallelism with the reference surface (upper surface) of the X stage 61. 72. The surface (lower surface: smooth surface: reference surface described later) has a flatness of 1n.
m / Area, AI coating is applied to increase the reflectance.

The exercise table TB (and the target T
The displacement on the XY coordinates with respect to the surface shape displacement sensor PS (reference normal L) of G) is represented by an X linear scale 65 and a Y scale indicating the relative movement amount of the X stage 61 and the Y stage 62.
The motion controller 51 inputs a signal from the linear scale 66 and reports it to the control unit CN. Each linear scale 65 (and 66) has a scale length of about 90 mm (nominal reading length of about 50 mm) and an absolute displacement that can be measured, and has a resolution of about 0.1 μm to 0.5 μm.

The surface shape displacement sensor PS detects the height data (displacement on the Z coordinate) of each measurement point (sampling point) of the target TG, and detects the movement displacement sensor DS placed on the fiber folder 69. Is an exercise table TB
The height data (movement displacement in the vertical direction (Z-axis direction)) due to the horizontal movement (movement on the XY plane) of the reference plate TC is reported to the control unit CN via the AD converter 55. .

Next, a description will be given of a motion table control method employed in the three-dimensional surface shape measuring apparatus 1 of the present embodiment.

First, the principle of detecting a horizontal motion error (vertical motion displacement due to horizontal motion) of the motion table TB will be described. In the motion table unit (motion table control device) 60 of the three-dimensional surface shape measuring device 1, as shown in FIG. 5, the detection surface TF of the motion table TB is in principle approximated to a virtual reference plane (so-called XY plane). 1) Exercise the exercise table TB so as to exercise in the VF. For this reason, if there is no error due to this motion, the detection surface TF of the motion table TB does not deviate from the virtual reference plane VF, but it may be approximate here (may deviate slightly with an error).

That is, while moving the movement table TB, a normal line set at a predetermined reference point VP in the virtual reference plane VF is set as a reference normal line L, and an arbitrary point in the detection plane TF is set as a detection point TP0. And the detection point TP0 is the motion table TB
The displacement d from the reference point VP in the Z-axis direction at the point of intersection TVP with the reference normal L due to the movement of
It is detected as a motion displacement d of 0. For this reason, it is possible to detect the movement displacement d in the Z-axis direction of at least one detection point TP0 on the reference normal L, thereby correcting the movement error with respect to the virtual reference plane VF. Therefore, since an extremely high-precision motion mechanism is not required, the motion mechanism of the motion table TB can be relatively inexpensive, and the motion error due to the configuration can be easily corrected.

In the actual configuration of the motion table TB, the virtual reference plane VF is a horizontal plane, so that the X axis and the Y axis are the vertical axis and the horizontal axis on the horizontal plane parallel to (or the same as) the horizontal plane. , Z axis are vertical axes. The reference normal L is a straight line in the Z-axis direction. Exercise table TB
Is controlled so as to move approximately in a horizontal plane, and the displacement d from the reference point VP in the vertical direction when an arbitrary detection point TP0 becomes an intersection TVP with the reference normal L is calculated as the detection point TP0 Is detected as the motion displacement d. For this reason, at least the detection point TP0 (TV
P) vertical motion displacement d of P) can be detected, whereby
The motion error with respect to the virtual reference plane (horizontal plane) VF can be corrected.

In this case, for example, as shown in FIG. 6, detection points TP1 to TP16 and the like are defined on the exercise table TB, and when each of the detection points TP1 to TP16 becomes an intersection TVP with the reference normal L. By storing the detected movement displacement d in association with the detection points TP1 to TP16,
After the detection, the correction can be performed at any time, and the correction of the motion error is further facilitated.

In the above description, the exercise table TB
Although it has been described that the motion displacement at each detection point on the upper surface (detection surface) is directly detected, the motion table TB in the present embodiment is configured such that the front and back surfaces are parallel with a predetermined thickness or interval. The detection surface T of the front and back surfaces
If a surface other than F is set as a reference surface, any detection point TP0
Of the reference normal L at the same time as the detection point TP0.
A point on the reference plane that is the intersection with the reference point is set as a reference point, and the displacement of the reference point is detected, whereby the detection can be performed indirectly. In this case, the surface that is not the detection surface TF of the front and back surfaces is used as the reference surface. Therefore, even if the detection surface TF side is used for another detection or measurement (for example, surface shape measurement), the motion displacement d Can be detected.

The above-described principle is further developed and applied to the configuration of the exercise table section 60 of the present embodiment. Instead of using two parallel front and back surfaces of the exercise table TB, FIGS. 4 and the like, as described above, on the back (lower surface) of the exercise table TB (more precisely, the X stage 61),
A reference flat plate (reference plate) TC is attached.

This reference flat plate TC has a reference surface (the above-mentioned smooth surface: lower surface) parallel to the detection surface TF of the motion table TB, whereby the detection surface TF and the reference surface become two parallel surfaces. Therefore, the movement displacement d of an arbitrary detection point TP0 can be detected by using a point on the reference plane which is an intersection with the reference normal L at the same time as the detection point TP0 as a reference point and detecting the displacement of the reference point. . In this case, a reference substrate (reference plate) TC is attached to the back surface (the surface other than the detection surface TF: lower surface) of the exercise table TB, and the reference substrate (reference plate) T
C has a lower surface as a reference surface, so that the exercise table TB
The movement displacement d can be detected even if the detection surface TF side is used for other detection or measurement (for example, surface shape measurement).

In the exercise table section 60, the driving mechanism (exercise table driving means) of the exercise table TB is as follows.
Since it has an X stage 61 for moving the movement table TB in the X-axis direction and a Y stage 62 for moving the movement table TB in the Y-axis direction, the virtual reference plane T
You can move freely with F. Even if a motion error occurs due to kneading of the X stage 61 or the Y stage 62, the motion displacement sensor (detection point motion displacement detection means) DS detects the motion error and is configured to easily correct the motion error.
Strict precision is not required, so that the X stage 61, the Y stage 62, etc. can be constructed at relatively low cost.

Next, regarding the motion displacement sensor DS, as described above, the motion displacement sensor DS is an optical fiber displacement meter mounted on a fiber folder 69 made of a material (novinite) having a small coefficient of thermal expansion. This is a so-called differential optical fiber displacement meter.

In other words, the motion displacement sensor DS is a non-contact type displacement meter capable of detecting the position of the reference surface of the reference flat plate TC in a non-contact manner, and detects the detection surface TF of the motion table TB (specifically, the reference substrate TC Of the reference plane on the reference normal L can be easily detected.
A motion displacement d of 0 can be easily detected. Further, among the non-contact type displacement meters, an optical fiber displacement meter is used. The distance between the non-contact type displacement meter and the measurement target surface (here, the reference surface of the reference flat plate TC) is determined based on the change in the phase or the amount of reflected light with respect to the irradiation light. Since it is obtained, the position of the measurement target surface can be obtained from the relationship with its own position. Since the detection is performed by light irradiation and reflection, it can be detected without contact.

Further, among the optical fiber displacement meters, since it is a so-called differential type optical fiber displacement meter, detection can be performed more accurately. That is, it has an irradiating fiber for irradiating the irradiating light and a plurality of receiving fibers for receiving the reflected light, and the irradiating surface of the irradiating fiber and each receiving surface of the plurality of receiving fibers are arranged at respective distances from the irradiating surface to the respective receiving surfaces. Are arranged so as to be different from each other, so that the distance between the irradiation surface and the partner surface can be obtained based on the difference in the amount of light received from each light receiving surface. According to the principle, the distance can be obtained without depending on the attenuation of light in the optical fiber due to the influence of the amount of incident light or bending and the reflectance of the surface of the partner, and based on this distance, the surface of the partner on the reference normal L The position of (here, the reference surface of the reference flat plate TC) can be detected more accurately and without contact. The motion displacement sensor DS
Are fixed on the fiber folder 69, the inclination as a displacement meter is ± 0.5 ° or less, and the repetition accuracy is 5 nm or less.

Next, the measurement principle of measuring the surface shape of the target TG using the above-described motion table section 60, that is, the principle of measuring the surface shape in the three-dimensional surface shape measuring apparatus 1 will be described. The surface shape in this case is a state of unevenness of the surface, and indicates a vertical displacement of the surface when the target TG is placed on a horizontal plane.

First, for example, the scanning trajectory shown in FIG. 7A shows a scanning trajectory of a conventionally used raster scan type (measuring points and the order of measurement). In this measurement algorithm, the detection point TP1 → TP2 → TP
3 → TP4 → TP3 → TP2 → TP1 → TP5 → …… →
Scanning is performed in the order of TP16 → TP15 → TP14 → TP13.

In the case of the measurement according to this measurement algorithm, the three-dimensional surface shape measuring device 1 uses, for example, FIG.
As shown in the figure, the back surface of the target (measurement object) TG is brought into close contact with the detection surface TF of the movement table TB to move the movement table TB, and the front surface of the target TG and the reference normal L
The point of intersection is defined as each measurement point. In the illustrated example, the detection point TP1
Is the intersection TVP with the reference normal L, that is, the normal L set on the detection surface TF at the illustrated detection point TP1.
The intersection of the surface of the target TG and the reference normal L when 1 overlaps the reference normal L is defined as a measurement point SP1, and similarly, the normals L2, L3, and L2 at the detection points TP2, TP3, and TP4 are similarly determined.
When L4 overlaps the reference normal L, the intersection of the surface of the target TG and the reference normal L is measured at the measurement points SP2, SP3, SP
4 is assumed.

Here, assuming that there is no horizontal movement displacement, the detection surface TF shown in the drawing coincides with the virtual reference plane VF, so that the detection points TP1 to TP4 have the same height (Z coordinate), and the surface shape The displacement sensor PS (see FIG. 2) simply determines the height (Z coordinate) of each of the measurement points SP1 to SP4,
Shape information of the surface shape (a curve connecting SP1 to SP4) is obtained.

On the other hand, when there is a horizontal movement displacement, FIG.
The detection points TP1 to TP4 in (b) have the same height (Z coordinate)
Does not. Therefore, in the three-dimensional surface shape measuring device 1,
The height (Z coordinate) of the detection points TP1 to TP4 is detected by the motion displacement sensor DS (actually, the Z coordinate of the corresponding point of the reference substrate TC is detected and used), and detected by the surface shape displacement sensor PS. By obtaining a difference from the height (Z coordinate) of each of the measurement points SP1 to SP4, the shape information of the surface shape (curve connecting SP1 to SP4) of the target TG is obtained.

For example, FIG. 8 shows a part of the shape data obtained (measured) as surface (fine) shape information of the target TG, and the horizontal movement distance (horizontal axis:
It shows the displacement of the surface height of the target TG with respect to distance (unit: [μm]) (vertical axis: height: unit [μm]). Here, the reference substrate TC
Since the reference surface (i.e., the lower smooth surface) is a flat surface having a high optical smoothness, the optical flat (Op
This is called a “flat” and the target TG is a flat plate (disc).
k), and the fine surface shape (surface roughness) is measured.

FIG. 10A shows data before the motion error correction, and FIG. 10B shows the data after the motion error correction.
From the data shown in FIG.
ical Flat), that is, by subtracting the motion error due to horizontal motion displacement (swell, etc.),
As shown in FIG. 3B, the target TG (disk)
Only the surface shape (surface roughness) can be determined accurately.

As described above, the three-dimensional surface shape measuring device 1
Then, the intersection of the surface of the target TG and the reference normal L is set as a measurement point (for example, the measurement point SP1), and the shape information of the measurement point is detected based on the displacement of the measurement point from the reference point VP. Along with the detection point (for example, the detection point TP1 or the like)
Can be detected, the measurement point (for example, SP
1) Simultaneously, by detecting the movement displacement d of the detection point (for example, TP1) which is the intersection with the reference normal L, the movement error on the reference normal L can be easily corrected. The movement mechanism of the TB is relatively inexpensive.
Therefore, in the three-dimensional surface shape measuring method 1, the three-dimensional surface shape can be measured with high accuracy and a relatively inexpensive configuration.

Hereinafter, the surface shape measurement processing in the three-dimensional surface shape measurement apparatus 1, particularly the control processing flow, will be described.

First, the overall control flow of the three-dimensional surface shape measuring apparatus 1 will be described with reference to FIG. When the process is started by turning on the power or the like, as shown in FIG.
First, in order to return the three-dimensional surface profile measuring apparatus 1 to the state at the time of the previous power-off, initial settings such as restoring the saved control flags are performed (S1). Is displayed as an initial screen (S2). The subsequent processes in FIG. 9, that is, the branch for determining whether or not a key input is performed (S3) and the various interrupt processes (S4) are conceptually illustrated processes.

Actually, when the initial screen display (S2) is completed, a key input interrupt is permitted, and the state is maintained until a key input interrupt occurs (S3: No). When an interrupt occurs (S3: Yes), the process shifts to each interrupt process (S4), and when the interrupt process ends, the key input interrupt standby state is again performed (S3: No).
Becomes In the present embodiment, an interrupt process based on a key input or the like will be basically described. However, it is needless to say that other methods can be similarly used, such as managing an independent program for each process by a multitask process or the like. No.

Next, for example, when the user (here, the measurer) presses the measurement start key (function key assigned as) in the state (S3) after the above-described initial screen is displayed,
A measurement start key interrupt occurs, and a surface shape measurement process (hereinafter simply referred to as “measurement process”) is started as shown in FIG.

In the measurement process (S10), first, the origin is set and the scanning speed is set as the initial setting for the measurement preparation (S11). Then, the measurement data is acquired while performing the predetermined scanning (scanning). + Acquisition of measurement data: S12) After that, the error is corrected (S13), and the process (S10) is completed (S14).

In the above-described scan + measurement data acquisition (S12), first, data of the sampling point to be measured, the relay point, and the connection relation thereof are read (from the control data area 222 of the ROM 220), so that the scanning trajectory is obtained. It is set (S121). The sampling point here is
It is an index indicating a measurement point to be measured, and is an XY coordinate value of a measurement point at which shape data (height data: data indicating a Z coordinate) of the surface shape of the target TG is to be detected (measured).

The relay point is a point at which the scanning direction changes, and is an XY coordinate value of a point at which the servomotor 67 is temporarily stopped in order to change the movement (movement) direction of the movement table TB. In addition, the data of connection relationship (route data)
These are the data for connecting them to obtain the scanning trajectory, and these indicate (set) the measurement algorithm. Note that the connection relationship can be expressed simply by the order of appearance of the relay points, etc., and will be used hereafter.

For example, in the example of the measurement algorithm described above with reference to FIG. 7, the sampling points are the X points of the measurement points SP1 to SP4.
Y coordinate values, that is, XY coordinate values of the detection points TP1 to TP16. The relay points are detected points TP1, TP4, T
P1, TP5, TP8, TP5, TP9,..., TP1
6, XY coordinates of TP13. For this reason, if the detection points are connected in the order of the relay points, the aforementioned detection points TP1 → TP2 → T
P3 → TP4 → TP3 → …… → TP16 → TP15 → T
A scanning locus (scanning route) from P14 to TP13 is obtained.

When the setting of the scanning locus is completed (S12)
1), measurement data is acquired (S122). More specifically, at each set sampling point (XY coordinates at the time of measurement are hereinafter referred to as “x, y”), the height data (Z) of each measurement point on the surface of the target TG by the surface shape displacement sensor PS. The coordinate value: hereinafter referred to as “z1”) is detected, and the height data of the reference surface of the reference flat plate TC (Z coordinate value: hereinafter referred to as “z2”) is detected by the motion displacement sensor DS (S122). ). That is, at this point, the measurement result at that sampling point is referred to as “x, y, z1, z
2 ".

Therefore, after the measurement data acquisition (S122) is completed and the scanning + measurement data acquisition (S12) is completed, in the error correction processing (S13), the two at each sampling point (“x, y”) are obtained. Height data (“z1, z
2 ”), the height data in which the motion error has been corrected, that is, the target TG
(Corrected) shape data of the surface shape can be obtained.

In the above example, the measurement algorithm shown in FIG. 7 is used. However, the measurement algorithm shown in FIG. 7 first goes from the detection point TP1 to the detection point TP4 once.
The measurement is performed at each of the detection points TP2, TP3, and the like, and the same route is measured again in the opposite direction.
Moved to 5. In other words, the measurement is performed in the Y direction after reciprocating in the X direction, and this is because the movement displacement (error) in the forward route and the return route in the reciprocating motion in the X direction is easily offset. However, as described above, the three-dimensional surface shape measuring apparatus 1 measures the vertical shape (detection of z2) as well as the surface shape (detection of z1). There is no need to employ a measurement algorithm.

For this reason, for example, as shown in FIG. 11A, a measurement algorithm (scanning route: T
P1 →→ TP4 → TP8 → ... → TP5 → TP9 → ...
→ TP13), as shown in FIG. 3 (b), a measurement algorithm for measuring spirally (scanning route: TP1 →... → T
P4 → TP16 → TP13 → TP5 →…
→ TP7 → TP11 → TP10), as shown in FIG. 3 (c), a measurement algorithm for performing concentric square measurement (scanning route: TP1 →... TP4 →... TP16 →.
3 →… → TP1 → TP6 → TP7 → TP11 → TP10
Various measurement algorithms such as TP6) can be adopted.

By the way, in the measurement processing (S10) in the above-described embodiment (first embodiment), the origin and the scanning speed are set as the initial settings for the measurement preparation (S1).
1) After that, scanning + measurement data acquisition (S12) was performed. In this case, for example, if the set scanning speed is too high, depending on the object to be measured, the irregularities change drastically, making measurement impossible. In some cases, measurement cannot be performed with desired accuracy. Also, even if the set scanning speed is the same, if the set measurement points are too dense, the required measurement time cannot be secured,
Similarly, measurement failure and accuracy problems arise. On the other hand, if the number of measurement points is small, it is not possible to accurately measure the change in the unevenness, and if the scanning speed is reduced at the measurement points having the same density, the time required for the entire measurement increases.

Therefore, the above embodiment (first embodiment)
Similarly to the above, in addition to being able to correct the movement displacement (movement error) due to scanning, it is also possible to measure the surface shape with a scanning speed and measurement accuracy suitable for the surface shape of the measurement object.
The two-dimensional surface shape measurement will be described below as a second embodiment.

When a measurement start key interrupt occurs and the measurement process (S20) is started as shown in FIG. 12, in the measurement process (S20), first, the measurement preparation initial setting (S21)
Set the origin (origin preparation or return) as (S
211) Then, a target speed as a scanning speed is set (S212). That is, a target speed to be achieved when there is no problem in the measurability or accuracy of the measurement is set (S2).
12). Subsequently, scanning + measurement data acquisition is performed (S2
2) Then, the error is corrected (S23: S1 in FIG. 10).
3), and terminates the process (S20) (S24).

In the above-described scan + measurement data acquisition (S22), first, a scan trajectory is set (S221: the same as S121 in FIG. 10), as described above with reference to FIG.
Measurement data is obtained (S222).

However, this measurement data acquisition (S222)
First, it is determined whether or not all the measurement data has been acquired, that is, whether or not the measurement has been completed (S2221). If the measurement has been completed (S2221: Yes), the error correction process (S221)
Go to 3). Until the measurement is completed (S22
21: No) Then, the next stop position (the above-described relay point, which also serves as one of the sampling points in this case) is set (S2222).

When the setting of the next relay point (S2222) is completed, thereafter, until the set relay point is reached (that is, S2
228: Yes), and in parallel with the scanning, XY coordinates (x, y) and height data (z1, z2) of the current position at that time are acquired (S2223), and the current position is set to the sampling point Pi ( i = 1, 2,..., N: where N
XY coordinates (x, y) of the number of sampling points
“Pi (x, y)”) is determined (S
2224). If it is not the sampling point Pi (x, y) (S2224: No), since the scanning has reached the next time during that time, the XY coordinates and the height data (x, y, z1, z2) at that time are obtained. (S2223).

On the other hand, if it is the sampling point Pi (x, y) (S2224: Yes), the surface shape displacement sensor PS
It is determined whether or not an error signal is output from the CPU, that is, whether or not there is an error signal (S2225). If there is an error signal (S2225: Yes), the deceleration process (S222)
Perform 9). In other words, the scanning speed is reduced, but at the same time, the position is returned to the position before the occurrence of the error (S2229). If there is no error signal (if there is no error signal), the measurement result at the sampling point Pi (x, y) is expressed as “x, y, z1, z”.
2 ".

Here, the sampling point Pi (x,
As the difference between the two height data (z1, z2) in y), height data zi = z1-z in which the motion error has been corrected.
After obtaining 2, the measurement result may be stored as “x, y, zi”. In this case, the subsequent error correction processing (S2
3) can be omitted.

Then, the scanning speed is returned to the target speed (S2227). Subsequently, it is determined whether the measured sampling point is a relay point, that is, whether the measured sampling point has reached the set relay point (S2228). When the relay point has not been reached (S2228: No), the scanning speed is appropriately adjusted again (S2225) according to the presence or absence of the error signal (S2225).
2227, S2229), X at each point in time
The Y target and the height data (x, y, z1, z2) are acquired (S2223 to S2228), and when reaching the relay point (S22).
28: Yes), the servo motor 67 is stopped once, and it is determined whether or not the measurement is completed (S2221). Thereafter, measurement data is obtained (S222) by the same loop processing (S2221 to S2229) as described above. .

As described above, (3) in the second embodiment
In the (dimensional surface shape) measurement process (S20), a target speed as a scanning speed is set (initial setting) (S212), and N (N is an integer of 2 or more) predetermined measurement points before the start of measurement. As an arbitrary n-th (n is an integer satisfying 1 ≦ n ≦ N) sampling point (measurement point: n-th measurement point) Pn, measurement is performed at the sampling point Pn (S2
221 to S2226), if there is an error signal (S
2225: Yes), the scanning speed is reduced, and when there is no error signal (S2225: No), the next measurement is performed with the scanning speed as it is (or returned to the target speed).

That is, based on the measurement result (S2225) at the sampling point Pn, the scanning speed is adjusted for measurement at the next sampling point (measurement point) (S2227, S2229). Therefore, at the scanning speed according to the measurement result at the sampling point (n-th measurement point) Pn, that is, at the scanning speed suitable for the surface shape of the target (measurement target) TG, measurement at the next measurement point (surface shape measurement) It can be performed.

Further, in this case, when the measurement at the sampling point (the n-th measurement point) Pn cannot be performed with the predetermined accuracy, an error signal (adjustment required signal) for reporting the fact is generated. When generated (output), the scanning speed for measurement at the next measurement point is adjusted to be slow (S2229).

For example, a target (measurement target) TG is so uneven that the measurement accuracy cannot be ensured with respect to a set scanning speed, or a sampling point (measurement point) before
Since the portion where the required measurement time cannot be secured because of the high density is measured as the sampling point Pn, the scanning speed can be adjusted to be slow when the measurement with the predetermined accuracy cannot be performed. Measurement (surface shape measurement) at the next measurement point can be performed at a suitable scanning speed.

In this case, since the adjusted scanning speed can be returned to the original setting (S2227), the scanning speed is reduced only when it is necessary to lower (slow) the scanning speed, and otherwise the scanning speed is the highest. The scanning speed can be adjusted according to the surface shape of the target TG and the measurement accuracy as required.
Thereby, the surface shape can be measured with the scanning speed and the measurement accuracy suitable for the surface shape of the target TG.

Also, in the second embodiment, the first
Similarly to the embodiment, the motion displacement at each sampling point, that is, the motion displacement due to scanning at an arbitrary n-th sampling point (n-th measurement point) Pn is detected, and the sampling point (n-th measurement point) is detected based on the detected motion displacement. Point) P
n (S23), the mechanism for scanning (here, the movement mechanism of the movement table TB)
Is relatively inexpensive, and with its relatively inexpensive configuration,
A highly accurate measurement result can be obtained.

In the above example, it is determined whether or not there is an error signal (S2225).
225: Yes), in the deceleration processing (S2229)
As the scanning speed was reduced and returned to the position before the error occurred, that is, when the scanning speed was reduced (adjusted),
Original sampling at the next sampling point (nth measurement point)
Since the scanning speed was adjusted based on the measurement result (S2225) at the sampling Pn, the measurement at the sampling point Pn could be performed again as the next measurement point, and the measurement accuracy was improved by re-taking the data (re-measurement). it can.

By returning to the previous relay point (including the case where it matches the position before the error occurred) rather than returning to the position before the error occurred, re-measurement from the previous relay point can be performed. . On the other hand, when the sampling points are set in detail (finely and densely), the next measurement point is not returned to the position before the occurrence of the error, and the next measurement point is set to the next sampling point Pn + 1 (the (n + 1) th measurement point). Point). In this case, when no error has occurred (S2225: No)
Similarly, after the sampling point Pn, the sampling point P
Since the measurement at n + 1 is performed, the measurement can be sequentially performed on N sampling points (measurement points) P1 to PN.

In the above example, the scanning speed was adjusted based on whether or not an error signal was generated as a measurement result at the sampling point (n-th measurement point) Pn (S2225). n measurement point) With reference to the measurement value at the sampling point (measurement point) before performing the measurement at Pn, a measurement value difference that is a difference from the measurement value at the sampling point Pn is obtained, and based on the measurement value difference, The scanning speed can also be adjusted.

Here, when the measured value difference is large, there is a possibility that measurement becomes impossible or a predetermined measurement accuracy cannot be secured due to the performance of the surface shape displacement sensor (measuring point displacement meter) PS. In such a case, if an error signal is generated, it becomes the same as the above-described example. In this case, because of performance reasons, it is necessary to reduce the scanning speed in order to ensure the predetermined accuracy.

On the other hand, there is a possibility that the difference between the measured values is large due to the shortage of the number of measurement points to be measured, and the change in the unevenness cannot be measured accurately. In this case, in order to make the change in the irregularities more accurate, it is necessary to make the measurement points denser. However, if the measurement points are made denser, there is a possibility that a necessary measurement time may not be secured. Therefore, it is necessary to reduce the scanning speed.

In these cases, a measurement value difference which is a difference from the measurement value at the sampling point Pn is obtained by referring to the measurement value at the previous sampling point (measurement point), and the scanning speed is determined based on the measurement value difference. More specifically, if the measurement value difference is equal to or more than a predetermined value, the scanning speed for the measurement at the next measurement point is adjusted to be slow, so that the scanning speed suitable for the surface shape of the target TG is obtained. Thus, the surface shape measurement at the next measurement point can be performed.

In the case where the difference between the measured values is large due to the shortage of the number of sampling points (measuring points) to be measured, as in the latter case described above, when the measured value difference is equal to or larger than the predetermined value, It is also possible to add a supplementary sampling point (complementary measurement point) to be measured before the measurement at the sampling point (measurement point). In this case, the shortage of the sampling points can be compensated, and the change in the unevenness can be measured more accurately.

In the above-described embodiments (first and second embodiments), measurements at sampling points on a predetermined scanning trajectory are sequentially performed. However, as described above with reference to FIGS. Measurement algorithm can be adopted,
Measurements can be made according to a plurality of measurement algorithms, and the measurement results can be compared.

Incidentally, for example, the motion displacement sensor DS
Although it is placed on a structure (fiber folder 69) made of a material (novinite) having a small coefficient of thermal expansion, if the measurement is performed for a long time, thermal deformation or the like occurs during the measurement.
The same applies to the other parts of the motion table section 60. Even if the scanning speed is increased as much as possible to shorten the measurement time, the measurement displacement caused by heat (thermal deformation) or the like during the measurement time. (Measurement error: temporal displacement during measurement) occurs, which hinders improvement in measurement accuracy.

Then, the above-described embodiment (first embodiment,
As in the second embodiment, in addition to correcting the movement displacement (movement error) due to scanning, the time-dependent displacement during measurement is detected and corrected (time-dependent error) to further improve the measurement accuracy. Regarding possible three-dimensional surface shape measurement,
An embodiment will be described below.

When the measurement start key interrupt is generated and activated, as shown in FIG. 13, in this measurement processing (S30), measurement preparation initial setting (S31) is first performed. Here, as in the example of FIG. 10 (S11), the origin is set and the scanning speed is set. Note that, in the detailed measurement data acquisition (S3222) described later, the scanning speed can be adjusted according to the measurement result in the same manner as in the example of FIG. 12 (S221). In that case, (S212) Although the target speed is set, in the following example, the scanning speed is not adjusted (the same as in the example of FIG. 10), so the scanning speed is simply set here.

When the measurement preparation initial setting (S31) is completed, next, scanning + measurement data acquisition is performed (S32), and thereafter, the error is corrected (S33), and the processing (S30) is completed (S34).

In the above-described scan + measurement data acquisition (S32), first, a rough measurement is performed (S321), and then, a detailed measurement is performed (S322). Here, the rough measurement (S32
In both 1) and the detailed measurement (S322), basically, the scanning trajectory for the measurement is set and the measurement data is acquired. Therefore, each of the scanning and the measurement data acquisition in FIGS. S12, S22).

Therefore, an index (XY coordinate value) of a measurement point (coarse measurement point) in the rough measurement, that is, a point corresponding to a sampling point in the detailed measurement is hereinafter referred to as a “reference point”, The scanning trajectory for measurement at the measurement point) is called a “reference trajectory”.
In the rough measurement, first, the reference trajectory including the setting of the reference point is set (S3211), and the measurement data (rough measurement data) at the reference point, that is, the height data (z1, z2) at the reference point is converted to the reference point. XY coordinate value (x, y)
At the same time, the measurement result is acquired and stored as “x, y, z1, z2” (S3212).

When the rough measurement (S322) is completed, in the detailed measurement (S322), the scanning +
First, as in the measurement data acquisition (S12, S22),
A scanning trajectory (including the setting of a relay point and a sampling point) is set (S3221), and the measurement data (detailed measurement data) in the detailed measurement is similarly converted to the measurement result “x, y, z1, z2”. Is acquired and stored (S3
222).

When the detailed measurement (S322) is completed and the scan + measurement data acquisition (S32) is completed, in the error correction process (S33), first, a motion displacement (that is, a motion error) is corrected (S331). Then, the temporal displacement (that is, the temporal error) is corrected (S332), and when the error correction process (S33) ends, the entire process (S30) ends (S34).

The above-described motion displacement (error) correction (S331)
Then, the error correction processing (S1
3, S23), any n-th (n is 1 ≦ n ≦ N)
Where N is the number of sampling points, and among the measurement results “x, y, z1, z2” at the sampling point (n-th detailed measurement point) Pn (x, y), Height data (z = z1-z) corresponding to the difference, that is, the difference between the height data (z1) obtained by the surface shape displacement sensor PS and the height data (z2) obtained by the motion displacement sensor DS.
By obtaining 2), measurement data in which the motion error in the detailed measurement has been corrected (the detailed measurement data after the correction of the motion error) can be obtained.

Then, similarly, any m-th (m is 1 ≦
Integer where m ≦ M: where M is a reference point (m-th approximate measurement point) Tm (hereinafter, referred to as an m-th approximate measurement point) of XY coordinates (x, y) of the number of reference points.
“Tm (x, y)”)
1, z2 ”, height data (z = z1−z2) corresponding to the difference between the measurement values of the upper and lower sensors is obtained, so that the measurement data in which the movement error in the rough measurement is corrected (outline after the movement error correction) Measurement data).

As described above, also in the third embodiment, the motion displacement is detected and corrected, as in the first and second embodiments. Specifically, the reference point (m-th approximate measurement point) Tm at the time of the approximate measurement (S3212 of S322)
The motion displacement due to the scanning in (x, y) is detected as a roughly measured motion displacement, and detailed measurement is performed (S3222 of S322).
Sampling point (n-th detailed measurement point) Pn (x,
The movement displacement due to the scanning in y) is detected as the detailed measurement movement displacement, and the measured value (measurement data: specifically, at the reference point (m-th approximate measurement point) Tm (x, y) is detected based on the detected roughly measured movement displacement. Height data) and the measured value at the sampling point (n-th detailed measurement point) Pn (x, y) is corrected by the detected detailed measurement movement displacement (S3).
31).

That is, in both the rough measurement and the detailed measurement, the movement displacement due to the scanning is detected and the measured value is corrected by them, so that the error (movement error) due to the movement displacement can be corrected. (Here, the movement mechanism of the movement table TB) is relatively inexpensive, and with its relatively inexpensive configuration, highly accurate measurement results can be obtained.

As shown in FIG. 13, when the motion displacement (error) correction (S331) is completed, the next temporal displacement (error) correction (S332) corrects the error between the rough measurement and the detailed measurement. Hereinafter, this point will be described in detail.

In the (three-dimensional surface shape) measurement process (S30) in this embodiment, as described above, first, as rough measurement (S321), M measurement points (M is an integer of 2 or more) are set as reference points. (Approximate measurement points) (S321
1), measurement is performed at M reference points (S321)
2). Here, since the measurement is a rough measurement, the number M is preferably such that the measurement is completed while the temporal change such as thermal deformation is small, and is easy to refer to in subsequent detailed measurement, for example, the entire square and the center. It is preferable to set points.

For example, corresponding to the measurement algorithm described above with reference to FIGS. 7 and 11, as shown in FIG.
The XY coordinate values of P1, TP4, TP16, and TP13 are (M
=) If the four reference points T1 to T4 are set, the rough measurement can be completed only by obtaining four rough measurement data.

Subsequently, in the detailed measurement (S322), in the scan trajectory setting (S3221), N (N is M) including the above-mentioned M (the same sampling point as the reference point)
A measurement point of <N is an integer) is set as a sampling point (detailed measurement point). For example, (M) in FIG.
=), The 16 (N =) measurement points including the (M =) 4 as sampling points (detailed measurement points) P1 to P16, as described above with reference to FIGS. Set.
The timing of the setting of the detailed measurement point is based on the detailed measurement (specifically, the detailed measurement data acquisition process (S322
If it is before 2)), it may be before or after the rough measurement.

After the rough measurement (S321), the measurement at (N =) 16 sampling points (detailed measurement points) P1 to P16 is performed as the detailed measurement (S322) (S3222). In this case, (M =) 4 of (N =) 16 sampling points (detailed measurement points) P1 to P16
Are (M =) 4 reference points (approximate measurement points) T1 to T4
And the same point. Therefore, an arbitrary m-th reference point (m-th approximate measurement point) Tm (x, y) and an arbitrary n-th sampling point (n-th detailed measurement point) Pn (x, y) are the same point. , The difference between the measured values is determined as the temporal displacement of the sampling point (n-th detailed measurement point) Pn (x, y).

That is, the displacement (error) over time is corrected (S33).
In 2), first, N sampling points (detailed measurement points)
For M of P1 to PN, based on the measurement value of the rough measurement that is completed while the temporal change such as thermal deformation is small,
Since the difference between the measured values can be determined (detected) as a temporal displacement and corrected, the measurement accuracy can be improved.

In this measurement process (S30), N
N- of the remaining sampling points (detailed measurement points)
As for the M pieces, the correction is made based on the M pieces of temporal displacement. Hereinafter, this point will be described in detail.

For example, four detection points T shown in FIG.
Corresponding to P1, TP4, TP16, TP13 (M =)
Four reference points T1 to T4 are set (S3211), and FIG.
When (N =) 16 sampling points P1 to P16 are set (S3221) corresponding to the 16 detection points TP1 to TP16 shown in FIG. 1A, (N =) 16 sampling points (detailed measurement) (Point) (M =) 4 of P1 to P16
, That is, P1, P4, P16, and P13 are (M =)
The same points as the four reference points (approximate measurement points) T1 to T4.

In this case, as the rough measurement (S321),
(M =) Measurement data (approximate measurement data) at four reference points (approximate measurement points) T1 to T4 are acquired (S321).
2) As detailed measurement (S322), measurement data (detailed measurement data) at (N =) 16 sampling points (detailed measurement points) P1 to P16 is acquired (S322).
2). In this case, motion displacement (error) correction (S3
At 31), (M =) four rough measurement data after motion error correction and (N =) 16 detailed measurement data after motion error correction are obtained.

Subsequently, the temporal displacement (error) is corrected (S33).
In 2), first, the same data as the measurement data at the (M =) 4 sampling points P1, P4, P16, and P13 of the (N =) 16 (however, the detailed measurement data after the motion error correction) is used. Of the (M =) four reference points T1 to T4 (however, the approximate measurement data after the motion error correction) is obtained, and the difference between the measured data and the (M =) four sampling points P1, P4, P16 and P13 are determined as temporal displacements, and (M =) four sampling points P1, P4,
It is stored in association with P16 and P13.

Next, (M =) four sampling points P
The detailed measurement data after the motion error correction of 1, P4, P16, and P13 is corrected based on (M =) four temporal displacements.
That is, the difference between the measured values is determined (detected) as a temporal displacement based on the measured value of the rough measurement that is completed while the temporal change such as thermal deformation is small, and is corrected.

Next, the detailed measurement data after the motion error correction for the (N−M =) 12 sampling points P2, P3, P5 to P12, P14, and P15 are converted to the (M =) four sampling points P1 , P4, P16, P13.

In this case, the time-dependent displacement at a sampling point (detailed measurement point) located on a straight line connecting any two reference points (roughly measured points) is represented by two reference points (roughly measured points).
Is determined as the complementary temporal displacement based on the temporal displacement at, that is, based on the temporal displacement corresponding to the sampling point (detailed measurement point) that is the same as the two reference points (approximate measurement points). Since the sampling point (detailed measurement point) in this case is located on a straight line connecting the two points, its temporal displacement can be obtained by, for example, a linear approximation.
The correction of the measurement value is facilitated by linearly correcting the measurement result (measurement value) at the sampling point (detailed measurement point), and the improvement of the measurement accuracy is further facilitated.

For example, among the (N−M =) twelve sampling points P2, P3, P5 to P12, P14, and P15, the sampling point P2 is two reference points (approximate measurement points) T
1 and T2 (see FIGS. 11 (a) and 14 (a)), so two reference points (approximate measurement points)
Based on the temporal displacement of the sampling points (detailed measurement points) P1 and P4 which are the same points as T1 and T2, the temporal displacement at the sampling point P2 is obtained as a complementary temporal displacement to complement between them, for example, by linear approximation or the like. Can be corrected.

Similarly, the temporal displacement (complementary temporal displacement) of the sampling point P3 is, for example, the temporal displacement of the sampling points (detailed measuring points) P1 and P4 which are the same as the two reference points (approximate measuring points) T1 and T2. Based on the displacement, the complementary temporal displacement of the sampling points P6 and P11 is based on the temporal displacement of the sampling points (detailed measurement points) P1 and P16 which are the same as the two reference points (roughly measured points) T1 and T3. ,
The complementary temporal displacement of sampling points P7 and P10 is 2
Based on the temporal displacement of the sampling points (detailed measuring points) P4 and P13 which are the same as the reference points (approximate measuring points) T2 and T4, the complementary temporal displacements of the sampling points P14 and P15 are two reference points (Approximate measurement points) Sampling points (detailed measurement points) P16 and P1 which are the same as T3 and T4
For example, based on the time-dependent displacement of No. 3, linear correction can be performed by, for example, obtaining linear approximation.

As described above, the measurement processing (S
In 30), NM complementary temporal displacements corresponding to NM sampling points (detailed measurement points) excluding M, which are the same points as the M reference points (approximate measurement points), are determined. . In addition, since the measured values at the corresponding NM sampling points (detailed measurement points) are corrected based on the determined NM complementary temporal displacements, the NM measured values can be easily obtained. Can be corrected.

In this case, M reference points which are the same as the M reference points
For each of the remaining samples, the difference from the time of the approximate measurement can be directly determined as the temporal displacement, and based on them, the remaining temporal displacement can be determined for the remaining NM as the complementary temporal displacement. The temporal displacement corresponding to (measurement point) can be easily determined. Further, the M temporal displacements are:
Since the detailed measurement points are stored in association with the M detailed measurement points, the temporal displacement can be used at any time as long as the temporal displacement is determined (detected) and stored. As a result, the measured values at the N sampling points (detailed measurement points) can be easily corrected, and the measurement accuracy can be further improved.

In the scanning trajectory setting (S3221) in the detailed measurement (S322), as shown in FIG. 13, for example, by pressing a predetermined key of the function key group 32, the measurement path (that is, the scanning trajectory) is changed. Two types A
And B can be selected.

When the type A is selected, scanning locus data (including sampling points and relay points) is input or read (S32212), and measurement is performed at arbitrary discrete points based on the scanning locus data (S3222). Therefore, it is advantageous for relatively sparse flatness measurement and the like. As a feature, all sampling points may be used as relay points. In this case, the movement table TB is stopped at each point to acquire measurement data. (S3222). Note that the measurement algorithm described above with reference to FIGS. 7 and 11 can be adopted as a relay point only at the point at which a pause is made, and the scanning trajectory data that is input or read here is all of the set points. Can be handled as scanning locus data for the type B described below.

On the other hand, type B is advantageous for measuring a surface shape such as roughness. If this type B is selected, first, scanning locus data (including relay points) is input or read (S32213). Subsequently, the sampling points are set by dividing the relay points at equal intervals. For example, as illustrated, sampling points P1 to P8 and the like are set based on data of the relay points T1 to T4 and the like (S3221).
4).

In the case of this type B, NM sampling points (detailed measurement points) excluding M, which are the same points as the M reference points (approximate measurement points), are determined by any of the M reference points. Or 2
It is set to be a measurement point (complementary measurement point) that complements between the two. For example, in the example illustrated in FIG. 13, although in the middle, four (M =) sampling points P 1, P 4, and P (M =) are the same as the four (M =) reference points T 1 to T 4.
Except for 5, P8 (N−M = N = 8), the four sampling points (detailed measurement points) P2, P3, P6, P7 are
(M =) It is set to be a complementary measurement point that complements between any two of the four reference points T1 to T4.

When detailed measurement is performed by the measurement algorithm shown in FIG. 11A, for example, as shown in FIG. 14B, (M =) eight reference points T1 to T8 are used as a rough measurement (S3211). Is set (S3211), the approximate measurement data is acquired (S3212), and if the reference points T1 to T8 are used as relay points T1 to T8 as they are, the detection points TP1 to TP
16 among sampling points P1 to P16 corresponding to
(M =) The same points as the eight reference points T1 to T8 (M
=) 8 sampling points P1, P4, P5, P8, P
Excluding 9, P12, P13 and P16 (N = 16 means N
−M =) 8 sampling points (detailed measurement points) P2,
P3, P6, P7, P10, P11, P14, P15
Is set to be a complementary measurement point that complements any two of (M =) eight reference points T1 to T8.

For this reason, in the detailed measurement (S322), a detailed measurement can be performed (a measurement can be complemented), for example, by measuring an intermediate point which was not measured (cannot be measured) at the time of the rough measurement. Measurement accuracy can be improved. Also,
If the difference between the measurement values at the two reference points (also referred to as detailed measurement points) (approximate measurement points) (at the time of the approximate measurement and at the time of the detailed measurement) is defined as the time-dependent displacement thereof, the difference is determined based on the time-dependent displacement at the two points. Thus, it is possible to determine (estimate) the temporal displacement of the complementary measurement point that complements between the two approximate measurement points.

For example, FIG. 14B and FIG.
In the example of (a), (N−M =) eight sampling points (detailed measurement points) P2, P3, P6, P7, P10, P1
1, P14, P15, for example, sampling point P2
(And P3) is a complementary measurement point that complements between two reference points (approximate measurement points) T1 and T2 of (M =) eight reference points T1 to T8, and is not measured at the time of approximate measurement. Since the intermediate point is measured, detailed measurement can be performed (measurement can be complemented), and measurement accuracy as shape measurement can be improved. Other sampling points P6 (and P7), P10
(And P11) and P14 (and P15).

Also, for example, the above-mentioned sampling point P2
The temporal displacement (complementary temporal displacement) of (and P3) is complemented based on the temporal displacement of two reference points (approximate measurement points) T1 and T2 at both ends on a straight line where the sampling point P2 (and P3) is located. The temporal displacement can be determined (estimated) by, for example, linear approximation. Therefore, (N−M =) 8 sampling points (detailed measurement points) P2, P3, P6, P
The measurement results at 7, P10, P11, P14, and P15 can also be corrected for temporal displacement, and the measurement accuracy can be improved.

Further, FIG. 14 (b) and FIG.
In the example of (a), since the scanning trajectory in the detailed measurement (S322) is determined to be the same as the scanning trajectory in the rough measurement (S321), the detailed measurement (S322) uses the same measurement result as the rough measurement (S321). The measurement is complemented according to the scanning trajectory. For this reason, it is easy to detect temporal displacement during the measurement, and it is also easy to correct the measured value based on the temporal displacement, and it is easy to improve the measurement accuracy.

In the above example, the detailed measurement (S32
The scanning trajectory in 2) has (M =) eight reference points (approximate measurement points) T1 to T8, and eight (N−M =) sampling points except for (M =) eight which are the same points (details) Measurement point) P
2, P3, P6, P7, P10, P11, P14, P1
5 and eight (M =) sampling points P1, P4, P5, P8, P9, P1
2, It is determined that the time lapse from the measurement at P13 and P16 becomes short.

That is, the measurement of the NM number and the measurement of the M number are performed in an alternately close manner so that the passage of time does not become long. In the above-mentioned example, it is alternated approximately every two points. In this case, the temporal displacement of the M pieces is determined by the difference from the measured value at the time of the approximate measurement, and the temporal displacement of the NM pieces is also the time with the detailed measurement at the M points. If the elapsed time is short, it can be estimated that there is not much difference from the temporal displacements of the M pieces located in the vicinity thereof. Therefore, it is possible to improve the accuracy of detecting (determining) the temporal displacement of the NM pieces, and thereby The accuracy of the correction of the measurement value can be improved, and the measurement accuracy can be improved as a whole.

Further, FIG. 14A and FIG.
Is a measurement algorithm in the so-called rough measurement, but in addition to these, as shown in FIG. 3C, in the rough measurement, a point (reference point) T1 on the periphery (quadrilateral) and a diagonal line.
Various other methods such as measurement of T8 are also possible. Further, in the above-described example, FIGS.
Although the example in which (a) is combined is used, various algorithms can be considered as the measurement algorithm for the rough measurement and the measurement algorithm for the detailed measurement, and the combination thereof is arbitrary. Further, the concept of the rough measurement and the detailed measurement is extended, for example, as shown in FIG. 15, the rough measurement is performed stepwise, and the point to be measured and the previously measured point are alternately measured. It is also conceivable to correct the measurement data as needed.

In the above embodiment, the three-dimensional surface shape measuring apparatus has been described. However, the exercise table control method and the exercise apparatus according to the present invention are applicable to an electronic component mounting apparatus (so-called mounter) using the exercise table. The present invention can also be applied to control of a motion table in another device. Also,
As for the surface shape detection sensor and the like, not only the differential optical fiber displacement meter described above but also another type of displacement meter may be used. Of course, other changes can be made as appropriate without departing from the spirit of the present invention.

[0150]

As described above, in the exercise table control method and apparatus of the present invention, the exercise mechanism of the exercise table is relatively inexpensive, and the exercise error due to the configuration can be easily corrected. In the three-dimensional surface shape measuring method and apparatus according to the present invention, by utilizing them, 3
The effect is that the three-dimensional surface shape can be measured with high accuracy and at a relatively low cost.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating an overall configuration of a motion table control method and device thereof, and a three-dimensional surface shape measurement device and a three-dimensional surface shape measurement device to which the device is applied according to an embodiment of the present invention.

FIG. 2 is a block diagram mainly showing a configuration of a measuring unit of the three-dimensional surface shape measuring apparatus of FIG. 1;

FIG. 3 is an explanatory sectional view showing a schematic configuration of an exercise table unit in FIG. 2;

FIG. 4 is an explanatory diagram showing a configuration of an X stage in FIG. 3;

FIG. 5 is a principle explanatory view showing a principle of detecting a movement displacement of a movement table.

FIG. 6 is an explanatory diagram showing an example of setting detection points.

FIG. 7 is an explanatory diagram illustrating an example of a measurement algorithm and an example of a relationship between a target and a measurement point or a detection point.

FIG. 8 is an explanatory diagram showing an example of measurement data before and after motion error correction.

FIG. 9 is a flowchart showing a conceptual process of overall control of the three-dimensional surface shape measuring apparatus 1 of FIG. 1;

FIG. 10 is a flowchart illustrating a measurement process according to the first embodiment.

FIG. 11 is an explanatory diagram showing another example of the measurement algorithm.

FIG. 12 is a flowchart illustrating a measurement process according to the second embodiment.

FIG. 13 is a flowchart illustrating a measurement process according to the third embodiment.

FIG. 14 is an explanatory diagram illustrating an example of a measurement algorithm in the rough measurement.

FIG. 15 is an explanatory diagram showing still another example of the measurement algorithm in the detailed measurement different from FIGS. 7 and 11;

[Explanation of symbols]

 Reference Signs List 1 3D surface shape measuring device 20 Control unit 50 Measurement unit 60 Motion table unit 61 X stage 62 Y stage CN control unit d Motion displacement DS Motion displacement sensor L Reference normal L1 to L4 ... Normal Pi, P1 to P9 ... … Sampling point PS Surface shape displacement sensor SP1 to SP4 …… Measurement point TB Motion table TC Reference board TG target TF Detection surface TP0 to TP16 …… Detection point TVP intersection point VF Virtual reference plane VP Reference point

Claims (15)

[Claims] When three mutually orthogonal three-dimensional orthogonal coordinates are defined as an X axis, a Y axis and a Z axis, and a predetermined virtual plane parallel to both the X axis and the Y axis is defined as a virtual reference plane. A motion table driving step of moving the motion table so that the detection surface of the motion table having the detection surface moves approximately in the virtual reference plane; and setting the motion table to a predetermined reference point in the virtual reference plane. The reference normal is defined as a reference normal, and any one point in the detection plane is defined as a detection point. When the detection point becomes an intersection with the reference normal due to the movement of the movement table, A detection point movement displacement detecting step of detecting the displacement in the Z-axis direction as a movement displacement of the detection point. 2. The exercise table control method according to claim 1, further comprising a motion displacement storing step of storing the detected motion displacement in association with the detection point. 3. The exercise table control method according to claim 1, wherein the virtual reference plane is a horizontal plane. 4. The surface of the object to be measured by moving each of the steps according to any one of claims 1 to 3 and moving the exercise table by bringing the back surface of the object into contact with the detection surface. And the intersection of the reference normal and the measurement point, based on the displacement of the measurement point from the reference point, surface shape information detection step of detecting the shape information of the measurement point, simultaneously with the measurement point the reference method A shape information correction step of correcting the shape information of the measurement point based on a movement displacement of a detection point that is an intersection with a line. 5. When three axes orthogonal to each other in three-dimensional orthogonal coordinates are defined as an X axis, a Y axis and a Z axis, and a predetermined virtual plane parallel to both the X axis and the Y axis is defined as a virtual reference plane. A movement table having a detection surface; movement table driving means for moving the movement table so that the detection surface moves approximately in the virtual reference plane; and a predetermined reference point in the virtual reference plane. The established normal is defined as a reference normal, and any one point in the detection plane is defined as a detection point, and the Z-axis direction when the detected point becomes an intersection with the reference normal due to the movement of the movement table. And a detection point motion displacement detecting means for detecting a displacement from the reference point as a motion displacement of the detection point. 6. The motion table control device according to claim 5, further comprising a motion displacement storage unit that stores the detected motion displacement in association with the detection point. 7. The exercise table control device according to claim 5, wherein the virtual reference plane is a horizontal plane. 8. The motion table has two front and back surfaces parallel to each other, and a surface other than the detection surface of the two front and back surfaces is used as a reference surface. The method according to any one of claims 5 to 7, wherein a point in the reference plane, which is an intersection with the reference normal at the same time as the point, is set as a reference point, and the detection is performed by detecting a displacement of the reference point. The exercise table control device according to the above. 9. A reference plate having a reference surface parallel to the detection surface is attached to the movement table, and the detection of the movement displacement of the detection point is performed at the same time as the detection point at the intersection with the reference normal. 8. The exercise table control device according to claim 5, wherein a point in the reference plane is set as a reference point, and the movement is performed by detecting a displacement of the reference point. 10. The reference plate is attached to a side of the front and back surfaces of the exercise table that is not the detection surface, and has a surface that is not the exercise table side as the reference surface. The exercise table control device according to claim 9, wherein: 11. The exercise table driving means includes: X for moving the exercise table in the X-axis direction.
A stage, and a Y for moving the motion table in the Y-axis direction.
The exercise table control device according to claim 5, further comprising: a stage. 12. The apparatus according to claim 5, wherein said detection point movement displacement detection means has a non-contact type displacement meter capable of detecting a position of a surface of the other party on said reference normal line in a non-contact manner. The exercise table control device according to any one of the above. 13. The optical fiber for detecting the position of the surface of the partner by irradiating the surface of the partner on the reference normal line with irradiation light and receiving the reflected light corresponding thereto. Characterized by being a displacement meter,
The exercise table control device according to claim 12. 14. The optical fiber displacement meter has an irradiation fiber for irradiating the irradiation light and a plurality of light receiving fibers for receiving the reflected light, and an irradiation surface of the irradiation fiber and each light reception of the plurality of light receiving fibers. The surfaces are arranged such that the distances from the irradiation surface to the respective light receiving surfaces are different from each other, and the distance between the irradiation surface and the surface of the other party is determined based on the difference in the amount of light received from each light receiving surface. 14. The motion table control device according to claim 13, wherein the differential type optical fiber displacement meter is required. 15. The surface of the object to be measured by moving each of the means according to any one of claims 5 to 14 and moving the exercise table by bringing the back surface of the object to be in close contact with the detection surface. And the intersection of the reference normal as a measurement point, based on the displacement of the measurement point from the reference point, surface shape information detection means for detecting the shape information of the measurement point, the reference method simultaneously with the measurement point A three-dimensional surface shape measuring device, comprising: shape information correction means for correcting shape information of the measurement point based on a movement displacement of a detection point which is an intersection with a line.