JP2002243960A - Polymer-made filter type multichannel wavelength multiplexing and branching device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter type multichannel wavelength multiplexing and branching device having excellent light transmissivity and workability in an optical communication wavelength. SOLUTION: A polymer crossed optical waveguide circuit 2 is formed of a plurality of optical waveguides provided on a substrate 6, and a cladding part 8 to cover the optical waveguides. Filter insertion grooves 9, 10, and 11 are provided in the crossing portions of the optical waveguides, and dielectric multilayer film filters 3, 4, and 5 are inserted into the grooves, respectively. The optical waveguides and the cladding part 8 of the polymer crossed optical waveguide circuit 2 are formed of a polyimide fluoride.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter type multi-channel polymer wavelength multiplexer / demultiplexer used for optical communication and the like.

[0002]

2. Description of the Related Art Research and development of waveguide type optical devices have been actively pursued in order to advance optical communication systems. Above all, a filter type multi-channel wavelength multiplexer / demultiplexer can multiplex / demultiplex a specific wavelength, and thus does not require a complicated optical waveguide design. Therefore, the filter type multi-channel wavelength multiplexer / demultiplexer is expected to be applied to a wavelength division multiplexing system.

[0003] In general, application of an optical waveguide to an optical device requires various conditions such as ease of fabrication, control of the refractive index of the optical waveguide material, and heat resistance. At present, quartz is most often used as an optical waveguide material, and the optical waveguide has a low optical loss of 0.1 dB / cm or less at a wavelength of 1.3 mm. However, since the manufacturing process is complicated and there are problems such as difficulty in increasing the area, it is difficult to obtain a filter-type multi-channel wavelength multiplexer / demultiplexer excellent in economy and versatility.

On the other hand, since a polymer optical waveguide can be formed by a spin coating method, it can be easily manufactured as compared with a quartz optical waveguide. Further, since the polymer optical waveguide is more flexible than the silica-based optical waveguide, cutting of the filter insertion groove is relatively easy, and excess loss of the insertion groove can be reduced. Further, since the cutting speed can be increased, productivity can be improved. However, heretofore, there has been no filter-type multi-channel wavelength multiplexer / demultiplexer made of a polymer material having excellent heat resistance that can withstand practical use and excellent light transmittance in an optical communication wavelength band.

[0005]

As described above, among the conventional filter type multi-channel wavelength multiplexer / demultiplexers using quartz as an optical waveguide material, the manufacturing process is complicated and the area is increased. There was a problem that was difficult. On the other hand, a material using a polymer material has a problem that heat resistance that can withstand practical use and light transmittance in an optical communication wavelength band cannot be obtained.

The inventors of the present invention have conducted intensive studies from these viewpoints. As a result, when polyimide is used as the polymer material, heat resistance is excellent, and the wavelength is 1.3 μm band and 1.55 μm.
The present inventors have found that a wavelength multiplexer / demultiplexer having low loss in the m band and excellent workability can be manufactured, and have completed the present invention.

SUMMARY OF THE INVENTION The present invention has been made based on the above-mentioned conventional problems and the results of the study. It is an object of the present invention to provide a filter-type multi-channel wavelength combining unit having excellent light transmittance and processability at an optical communication wavelength. It is to provide a wave device.

[0008]

According to a first aspect of the present invention, there is provided a wavelength multiplexer / demultiplexer for use in wavelength division multiplexing communication, wherein a plurality of optical waveguides provided on a substrate are provided. A polymer crossed optical waveguide circuit having a cladding portion to be covered and a filter insertion groove provided at an intersection of the optical waveguide, and a dielectric multilayer filter inserted into the filter insertion groove, wherein the optical waveguide and the clad are provided. Both or one of the parts is formed of polyimide.

[0009] The second invention is the above-mentioned first invention, wherein:
At least one of the optical waveguide and the cladding is formed of fluorinated polyimide.

According to a third aspect of the present invention, in the first or second aspect, the substrate material of the dielectric multilayer filter is polyimide.

[0011] In a fourth aspect based on the third aspect,
At least one of the dielectric multilayer filters is an edge filter (a long wavelength transmission filter) that transmits a specific wavelength or more and reflects a wavelength below the specific wavelength.

[0012] In a fifth aspect based on the third aspect,
At least one of the dielectric multilayer filters is an edge filter (short wavelength transmission filter) that reflects a specific wavelength or more and transmits a wavelength below the specific wavelength.

In the present invention, the polyimide used as the cladding and core material of the polymer crossed optical waveguide circuit, particularly the fluorinated polyimide, is used in the near infrared region, which is an optical communication wavelength band.
In particular, since it is transparent at wavelengths around 1.3 and 1.55 μm and has high heat resistance of 300 ° C. or more, a filter-type multi-channel polymer wavelength multiplexer / demultiplexer having the best long-term stability can be obtained. .

The fluorinated polyimide can be produced from a fluorinated tetracarboxylic acid or a derivative thereof and a diamine, from a tetracarboxylic acid or a derivative thereof and a fluorinated diamine, or from a fluorinated tetracarboxylic acid or a derivative thereof and a fluorinated diamine. it can. These fluorinated polyimides can be used not only alone, but also fluorinated polyimide copolymers and those obtained by adding additives and the like as necessary.

Among the above-mentioned fluorinated polyimides, those having a good balance of light transmittance and heat resistance include 2,2-
Fluorinated polyimide synthesized from bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride (6FDA) and diamine, or a copolymer thereof, and 1,
4-bis (3,4-dicarboxytrifluorophenoxy) tetrafluorobenzene dianhydride (10FEDA)
And a fluorinated polyimide synthesized from a diamine or a copolymer thereof.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. FIG. 1 is a perspective view showing a first embodiment of a filter type multi-channel polymer wavelength multiplexer / demultiplexer according to the present invention. In FIG. 1, a filter-type multi-channel polymer wavelength multiplexer / demultiplexer (hereinafter abbreviated as a wavelength multiplexer / demultiplexer) used for wavelength division multiplexing communication is denoted by reference numeral 1 as a whole, and includes four channels (7A to 7D). ) And three dielectric multilayer filters 3,
4 and 5.

The polymer crossed optical waveguide circuit 2 includes a core portion (waveguide) provided on a substrate 6 for guiding light and a cladding portion 8 covering the waveguide. The waveguides are formed continuously in the cladding portion 8, and filter insertion grooves 9, 10, and 11 are respectively provided at the intersections of the waveguides, and these grooves are provided in these grooves. ,
5 has been inserted.

The polymer crossed optical waveguide circuit 2 is manufactured by using a fluorinated polyimide made of a polymer as a material of the waveguide and the cladding portion 8 and using silicon as a material of the substrate 6. And four output ports 13, 14, 15, and 16.

Each of the dielectric multilayer filters 3, 4, 5
Have different transmission wavelength ranges, are inserted into the filter insertion grooves 9, 10, and 11, and are fixed by a UV curable resin. The dielectric multilayer filter used here 3,
Reference numerals 4 and 5 denote bandpass filters that transmit light having wavelengths of 1.2, 1.3 and 1.4 μm, respectively.

The filter insertion grooves 9, 10, 11 are
The groove width is formed by a dicing saw to be about 20 μm.

Next, the manufacturing process of the wavelength multiplexer / demultiplexer 1 shown in FIG. 1 will be described. 2 (a) to 2 (g) are views showing a process for manufacturing a polymer crossed optical waveguide circuit. In the present embodiment, 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride ( 6FDA) and 2,2'-bis (trifluoromethyl) -4,4'-diaminobiphenyl (TFD
Polyimide synthesized from B) (6FDA / TFDB)
And 6FDA and 4,4'-oxydianiline (4,4
4'-ODA) synthesized polyimide (6FDA /
4,4'-ODA) (copolymerization ratio includes 1: 0).

First, (6FDA / TFDB) :( 6FDA / TFDB):
A 15 wt% solution of a fluorinated polyamic acid, which is a precursor of a fluorinated polyimide copolymer having a copolymerization ratio of DA / 4,4′-ODA) of 1: 0, is spin-coated on a silicon substrate 6 (FIG. 9A). After coating, 380 in oven
Heating at 1 ° C. for 1 hour to perform imidization,
12 (refractive index is nTE at a wavelength of 1.3 μm; 1.52
0, nTM; nTE at 1.510, 1.55 μm;
1.58, nTM; 1.508) was formed (FIG. (B)).

Next, on the lower cladding layer 112, (6F
DA / TFDB): A 15 wt% solution of fluorinated polyamic acid, which is a precursor of a fluorinated polyimide copolymer having a copolymerization ratio of (6FDA / 4,4′-ODA) of 4: 6, in DMAc at 15 wt%, was heated and imidized. Spin coating was performed so that the film thickness became 8 mm. Thereafter, the core layer (waveguide) 113 is heated in an oven at 380 ° C. for one hour to perform imidization and guide light, and the refractive index is nT at a wavelength of 1.3 μm.
E; 1.538, nTM; 1.531, 1.55 μm, nTE; 1.538, nTM; 1.530) were formed (FIG. (C)).

Next, after a photoresist was spin-coated on the core layer 113, the Cr mask pattern 114 of the crossed optical waveguide was transferred to the resist by a photolithographic method (FIG. 4D).

Next, a mask pattern 114 of an intersecting optical waveguide was formed on the core layer 113 by developing the photoresist (FIG. 4E). Mask pattern 114
The core layer 113 on which was formed was etched by RIE (reactive ion etching) using an oxygen gas to form a core pattern 115 (FIG. (F)).

Next, a 15 wt% solution of fluorinated polyamic acid, which is the same precursor of the fluorinated polyimide copolymer as that of the lower cladding layer 112, in DMAc is spin-coated on the core pattern 115, and then heated at 380 ° C. in an oven. 1
Heating was carried out for imidization for a time to form an upper cladding layer 116 having the same refractive index as the lower cladding layer 112 (FIG. 9G). Thus, a polymer cross-linked optical waveguide circuit 2 made of fluorinated polyimide was manufactured.

The above-described filter insertion grooves 9, 10, and 11 are formed by a dicing saw at the intersections of the optical waveguides of the polymer crossed optical waveguide circuit 2 formed by such a method, and the respective filter insertion grooves 9, 10, and 10 are formed. The four-channel wavelength multiplexer / demultiplexer 1 shown in FIG. 1 was manufactured by inserting and fixing the dielectric multilayer filters 3, 4, and 5 having different transmission wavelength ranges into 11 respectively.

Next, the optical characteristics of the wavelength multiplexer / demultiplexer 1 were measured. Wavelength 1.2, 1.3, 1.4, 1.5 μm 4
When multiplexed light 20 having a wavelength was incident from the input port 12, only light 21 having a wavelength of 1.2 μm included in the multiplexed light 20 passed through the dielectric multilayer filter 3 and exited from the output port 13. Light other than this wavelength (wavelengths 1.3, 1.4,
The combined light 22) having three wavelengths of 1.5 μm was reflected by the dielectric multilayer filter 3 and reached the dielectric multilayer filter 4. Next, light 2 having a wavelength of 1.3 μm contained in the multiplexed light 22
Only 3 passes through the dielectric multilayer filter 4 and the output port 1
4 out. Light other than this wavelength (wavelengths 1.4, 1..
The combined light 24) having two wavelengths of 5 μm was reflected by the dielectric multilayer filter 4 and reached the dielectric multilayer filter 5. Next, the light 25 having a wavelength of 1.4 μm included in the combined light 24 is
The light 26 having a wavelength of 1.5 μm was transmitted through the dielectric multilayer filter 5 and emitted from the output port 15, reflected by the dielectric multilayer filter 5 and emitted from the output port 16.

As described above, the multiplexed light 20 incident from the input port 12 is demultiplexed by the wavelength multiplexer / demultiplexer 1 and output from the output port 1
Lights 21, 1.3 μm 23, 1.4 μm light 25, 1.
Light 5 of 5 μm was emitted. The insertion loss is 6 dB or less for all ports, and the crosstalk between each port is -2.
It was 5 dB or less.

In the evaluation of the optical characteristics in this embodiment, the function as a demultiplexer was shown. However, when used as a multiplexer, the light propagation direction is only reversed, and the performance is exactly the same. Needless to say. In addition, the dielectric multilayer filter 3, which is inserted into the filter insertion grooves 9, 10, 11
Reference numerals 4 and 5 are not limited to the bandpass filters shown in the present embodiment, and any type can be used.

FIG. 3 is a perspective view of a wavelength multiplexer / demultiplexer according to a second embodiment of the present invention. In the drawings, the same components and portions as those of the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

In FIG. 3, a wavelength multiplexer / demultiplexer indicated generally by reference numeral 30 comprises a four-channel (7A to 7D) polymer crossed optical waveguide circuit 32 formed on a polyimide substrate 31;
The three filter insertion grooves 9, 10, 11 provided at the intersections of the waveguides of the polymer crossed optical waveguide circuit 32, and the transmission wavelength range inserted and fixed in each of the filter insertion grooves 9, 10, 11 respectively. It is composed of three different dielectric multilayer filters 3, 4, and 5. The polymer crossed optical waveguide circuit 32 is manufactured by using a fluorinated polyimide made of a polymer as a material of the waveguide and the cladding portion 8, and has one input port 12 and four output ports 13, 14, 1.
5 and 16. That is, the present embodiment is different from the above-described embodiment in that the polymer crossed optical waveguide circuit 32 is manufactured using the polyimide substrate 31 instead of the silicon substrate 6.

The dielectric multilayer filters 3, 4, 5 are:
These bandpass filters transmit light having wavelengths of 1.2, 1.3, and 1.4 μm, respectively. In this embodiment, since the polyimide substrate is used as the substrate material of the filter, the thickness of each of the dielectric multilayer filters 3, 4, and 5 is about 17
Very thin, about μm. For this reason, the filter insertion groove 9,
The groove width of the grooves 10 and 11 can be made as thin as about 20 μm, and the excess loss due to the filter can be reduced. further,
Since the substrate material is polyimide, which is the same as the material of the waveguide, the refractive index is close, and the reflection loss caused by the refractive index difference at the waveguide / filter interface can be reduced.

The optical characteristics of the wavelength multiplexer / demultiplexer 30 were measured. When the multiplexed light 20 having four wavelengths of 1.2, 1.3, 1.4, and 1.5 μm is input from the input port 12, the wavelength multiplexing / demultiplexing device 30 as in the first embodiment described above. The light 21 having a wavelength of 1.2 μm 21 and the light 23 having a wavelength of 1.3 μm 23, 1.
The light 25 of 4 μm and the light 26 of 1.5 μm were respectively emitted. In addition, since the dielectric multilayer filters 3, 4, and 5 use a thin polyimide substrate as a substrate material,
The insertion loss was reduced to less than 4 dB at all ports. The crosstalk between the ports was -25 dB or less.

In the evaluation of the optical characteristics in the present embodiment, the function as a demultiplexer was shown. However, when used as a multiplexer, the light propagation direction is only reversed, and the performance is exactly the same. Needless to say. Further, the bandpass filters 3, 4, and 4 inserted into the filter insertion grooves 9, 10, 11 are provided.
5 is not limited to the one shown in the present embodiment, and any one can be used.

FIG. 4 is a perspective view of a wavelength multiplexer / demultiplexer according to a third embodiment of the present invention. The wavelength multiplexer / demultiplexer indicated by reference numeral 50 is composed of a four-channel polymer crossed optical waveguide circuit 52 formed on a polyimide substrate 31 and three polymer crossed optical waveguide circuits 52 provided at intersections of the polymer crossed optical waveguide circuit 52. Filter insertion grooves 9, 10, 11 and each filter insertion groove 9, 10,
11 is composed of three dielectric multilayer filters 54, 55 and 56 having different transmission wavelength ranges respectively inserted therein. The polymer crossed optical waveguide circuit 52 is manufactured by using a fluorinated polyimide made of a polymer as a material of the waveguide and the cladding portion 8, and has one input port 57 and four output ports 58, 59, 60, 61. have. Each of the dielectric multilayer filters 54, 55, 56 has a wavelength of 1.
An edge filter (1.4 / 1.5 μm edge filter) having a boundary wavelength between the transmission band and the reflection band between 4 μm and 1.5 μm, and a transmission band and a reflection band between the wavelengths 1.2 μm and 1.3 μm. Edge filter having a boundary wavelength (1.2 / 1.3 μm edge filter), wavelength 1.3 μm
This is an edge filter (1.3 / 1.4 μm edge filter) in which a boundary wavelength between the transmission band and the reflection band exists between m and 1.4 μm. These filters are fixed to the filter insertion grooves by UV curing resin.

The dielectric multilayer filters 54, 55, and 56 used in this embodiment have a very thin film thickness of about 17 μm because polyimide is used as a substrate material. Therefore, the width of the filter insertion grooves 9, 10, 11 is set to 20 μm.
It is possible to reduce the excess loss due to the filter. Furthermore, since the substrate material is polyimide, which is the same as the waveguide material, the refractive index is close, and the reflection loss caused by the refractive index difference at the waveguide / filter interface can be reduced.

The optical characteristics of the manufactured wavelength multiplexer / demultiplexer 50 were measured. Wavelength 1.2, 1.3, 1.4, 1.5 μm 4
When the multiplexed light 20 having the wavelength was input from the input port 57, only the light 63 having a wavelength of 1.5 μm contained in the multiplexed light 20 was reflected by the dielectric multilayer filter 54 and emitted from the output port 58. Light other than this wavelength (wavelengths 1.2, 1.3,
The multiplexed light 64) having three wavelengths of 1.4 μm passed through the dielectric multilayer filter 54 and reached the dielectric multilayer filter 55. Next, only the light 65 having a wavelength of 1.2 μm contained in the combined light 64 passed through the dielectric multilayer filter 55 and exited from the output port 59. Light other than this wavelength (wavelength 1.3,
The combined light 66) having two wavelengths of 1.4 μm was reflected by the dielectric multilayer filter 55 and reached the dielectric multilayer filter 56. Next, the 1.3 μm wavelength light 67 included in the multiplexed light 66 passes through the dielectric multilayer filter 56 and exits from the output port 61, and the 1.5 μm wavelength light 68 passes through the dielectric multilayer filter 56. The light was reflected and emitted from the output port 60, respectively.

As described above, the multiplexed light 20 incident from the input port 57 is demultiplexed by the wavelength multiplexer / demultiplexer 50, and the light 63 of 1.5 μm wavelength is output from the output ports 58, 59, 60, 61.
1.2 μm light 65, 1.3 μm light 67, 1.4 μm
Of light 68 were respectively emitted. The insertion loss is due to the application of the thin dielectric multilayer filters 54, 55, 56,
Edge filters were used as the dielectric multilayer filters 54, 55, and 56, and the groove width was shortened. This was reduced to 3.5 dB or less at all ports. The crosstalk between each port was -25 dB or less.

In the evaluation of the optical characteristics in the present embodiment, the function as a demultiplexer was shown. However, when used as a multiplexer, the light propagation direction is only reversed, and the performance is exactly the same. Needless to say. In addition, the dielectric multilayer filter 3, which is inserted into the filter insertion grooves 9, 10, 11
Reference numerals 4 and 5 are not limited to the edge filters shown in the present embodiment, and any types can be used.

In the above embodiment, fluorinated polyimide was used as the polymer material of the waveguide and cladding of the wavelength multiplexer / demultiplexer, and silicon and polyimide were used as the materials of the substrates 6 and 31. Is not limited to this, and it goes without saying that other materials may be used. For example, AI, indium phosphide, gallium arsenide, gallium nitride, glass, or the like can be used as the substrate material.

In the above-described embodiment, the number of channels of the wavelength multiplexer / demultiplexer is 4 ch, and 1.2, 1.3, 1.4, 1.5 μm is used as the wavelength of the multiplexed / demultiplexed light. However, it goes without saying that other combinations of the number of channels and other wavelengths may be used. For example, a wideband wavelength division communication system (WWDM)
iplexer) 1.3 to 1.5 μm used in access systems
By changing the type of the dielectric multilayer filter used, such as light having a wavelength interval of 15 to 20 nm in the band, multiplexing / demultiplexing at any wavelength can be performed.

[0043]

As described above, the filter type multi-channel polymer wavelength multiplexer / demultiplexer according to the present invention uses polyimide having high heat resistance as a waveguide material and uses polyimide as a dielectric multilayer filter. Thus, a low-loss filter-type multi-channel polyimide wavelength multiplexer / demultiplexer can be provided. As a result, a filter type multi-channel polymer wavelength multiplexer / demultiplexer excellent in economy and versatility can be manufactured, and can be applied to a wavelength division multiplexing communication system used for an access system or a LAN.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of a filter type multi-channel polymer wavelength multiplexer / demultiplexer according to the present invention.

FIGS. 2 (a) to 2 (g) are views showing a process of manufacturing a polymer crossed optical waveguide circuit using fluorinated polyimide.

FIG. 3 is a perspective view showing a second embodiment of the present invention.

FIG. 4 is a perspective view showing a third embodiment of the present invention.

[Explanation of symbols]

1. Filter type multi-channel polymer wavelength multiplexer / demultiplexer 2.
Polymer crossed optical waveguide circuit, 3, 4, 5 ... dielectric multilayer filter (bandpass filter), 6 ... substrate, 8 ... clad part, 9, 10, 11 ... filter insertion groove, 12 ... input port, 13, 14, 15, 16 ... output port, 20 ... 4 wavelength combined light, 21 ... 1.2 µm light, 23 ... 1.3 µm
Light, 25 ... 1.4 μm light, 26 ... 1.5 μm light,
30, 50: wavelength multiplexer / demultiplexer, 54, 55, 56: dielectric multilayer filter (edge filter), 112: lower cladding layer, 113: core layer, 114: mask pattern, 1
15: core pattern of crossed optical waveguide; 116: upper cladding layer; 117: polymer crossed optical waveguide circuit.

Continued on the front page (72) Inventor Makoto Hikita 2-1-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo NTT Advanced Technology Corporation (72) Inventor Naomi Kawakami Nishi-Shinjuku, Shinjuku-ku, Tokyo Inside of NTT Advanced Technology Co., Ltd. (72) Inventor Emiko Keii Inside of NTT Advanced Technology Co., Ltd. 2-1-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo (72) Inventor Ayako Kudo 2-1-1, Nishishinjuku, Shinjuku-ku, Tokyo NTT Advanced Technology Corporation (72) Inventor Kenji Kurihara 2-1-1, Nishishinjuku, Shinjuku-ku, Tokyo No. NTT Advanced Technology Co., Ltd. (72) Inventor Toru Matsuura 2-1-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo NTT Advanced Technology Co., Ltd. (72) Invention Akatsuki Tomaru Nishishinjuku 2 No. 1-1 Inside NTT Advanced Technology Co., Ltd. (72) Inventor Fumio Yamamoto 2-1-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo Inside NTT Advanced Technology Co., Ltd. F term (reference) 2H047 KA03 KA12 LA18 PA02 PA15 PA24 PA28 QA05 RA08 TA31 TA43 TA44

Claims (5)

[Claims] 1. A wavelength multiplexer / demultiplexer used for wavelength division multiplexing communication, comprising: a plurality of optical waveguides provided on a substrate; a cladding portion covering the optical waveguide; and a filter insertion groove provided at an intersection of the optical waveguides. A filter comprising: a polymer crossed optical waveguide circuit having the same; and a dielectric multilayer film filter inserted into the filter insertion groove, wherein both or one of the optical waveguide and the clad portion is formed of polyimide. Type multi-channel polymer wavelength multiplexer / demultiplexer. 2. The filter type multi-channel polymer wavelength multiplexer / demultiplexer according to claim 1, wherein at least one of the optical waveguide and the clad portion is formed of fluorinated polyimide. Molecular wavelength multiplexer / demultiplexer. 3. The filter type multi-channel polymer wavelength multiplexer / demultiplexer according to claim 1, wherein a substrate material of said dielectric multilayer filter is polyimide. Duplexer. 4. The filter type multi-channel polymer wavelength multiplexer / demultiplexer according to claim 3, wherein at least one of the dielectric multilayer filters transmits a specific wavelength or more and reflects a wavelength less than the specific wavelength. (Long-wavelength transmission filter). 5. The filter type multi-channel polymer wavelength multiplexer / demultiplexer according to claim 3, wherein at least one of the dielectric multilayer filters reflects a specific wavelength or more and transmits a wavelength less than the specific wavelength. A filter-type multi-channel polymer wavelength multiplexer / demultiplexer, which is a (short wavelength transmission filter).