JP2002240298A - Method for manufacturing ink jet recording head, and ink jet recording head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet recording head having a high printing quality and a good yield, and an ink jet recording head. SOLUTION: The method for manufacturing the ink jet head includes a process of arranging an individual layer on a first substrate correspondingly to a part where an ink channel or the like is estimated to be formed, a process of curing on the first substrate, a curing resin in a non complete curing state on a second substrate, a process of arranging a wall member of the ink channel to cover the individual layer, and a process of removing the individual layer and forming the channel. In the manufacturing method or in the ink jet head, at least a part of the individual layer arranged to the part corresponding to the common ink chamber is formed to reach an end part of the first substrate, thereby preventing the curing resin in the non complete curing state from flowing into the ink channel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet recording head and an ink jet recording head, and more particularly, to driving a plurality of recording elements in accordance with an image signal input from the outside, causing ink to fly on a recording material, and printing. The present invention relates to a method for manufacturing an inkjet recording head for performing recording, and an inkjet recording head.

[0002]

2. Description of the Related Art Conventionally, as an ink jet recording head for driving a plurality of recording elements in accordance with an image signal input from the outside, causing ink to fly on a recording material and performing print recording, for example, FIG. (3) and (1) of FIG.
(8) are known. FIG. 5 is a schematic view for explaining a method of manufacturing such a conventional ink jet recording head, and FIG.
It is A 'sectional drawing.

In the following, according to FIGS. 5 and 6,
The method of manufacturing the above-described conventional inkjet recording head,
Description will be made in the order of steps. First, as shown in (1) of FIG. 5 and (1) of FIG. 6, the discharge pressure generating element 2 and the power supply wiring 3 (not shown after (2) of FIG. 6) are connected to the element by photolithography or the like. First substrate 1 formed by known means
Formed on top. Next, as shown in (2) of FIG. 6, on the substrate on which the discharge pressure generating element 2 and the power supply wiring 3 are provided, a liquid path is formed and a liquid chamber is formed. Is formed. FIG. 7 shows the upper surface of the first substrate 1 at this time. Next, as shown in (3) of FIG. 6, the first substrate is placed on a portion of the second substrate 7 (hereinafter, referred to as a top plate 7) other than the portion forming the ink liquid path, the liquid chamber, and the wall of the liquid chamber. Is applied to make a semi-cured state.

[0006] Next, as shown in FIG. 6 (4), a top plate 7 having an opening 6 is placed on at least a part of the liquid chamber scheduled portion, and heat is applied to the first hardening plate. The resin 5 is cured. Next, as shown in (5) in FIG.
Is filled with the second curable resin 8 through the opening 6 provided therein and is cured. Next, as shown in (6) of FIG. 6, it is fixed on a chuck table (not shown) provided in a processing device such as a dicing saw and provided on the first substrate 1 with a blade such as a diamond saw. So that the lowest point of the cutting edge falls within the range of the thickness of the removable solid layer 4 so as not to reach the supplied power supply wiring 3 and completely eliminate the second curable resin 8. The liquid chamber 9 is processed.

[0007] Next, as shown in FIG. 6 (7), the intended discharge port is formed on the first substrate 1 by the diamond saw or the like.
Is completely cut to the bottom of the nozzle to form a discharge port 11. Next, as shown in FIG. 6 (8), the removable first solid layer 4 is removed to form an ink liquid path 12. Through the above steps, an ink jet recording head is completed.

[0006]

However, in the above-mentioned conventional example, when the top plate 7 is placed in the above-mentioned step (4) of FIG. 6, the first curable resin 5 in a semi-cured state is removed. As shown in FIG. 8, there is a danger that the fluid flows and flows into a portion where the nozzle and the discharge port 11 are formed. When the first solid layer 4 and the first curable resin 5 are made of materials compatible with each other, the first curable resin 5 melts the first solid layer 4 and the end portions However, problems such as impairing the nozzle shape have arisen. As a result, an ink jet recording head having nozzles that cannot discharge ink and an ink jet recording head with poor print quality are formed, which causes a reduction in yield, a deterioration in print quality, and the like.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method of manufacturing an ink jet recording head which solves the above-mentioned problems of the conventional one and has high printing quality and good yield, and an ink jet recording head. .

[0008]

SUMMARY OF THE INVENTION The present invention, in order to solve the above-mentioned problems, provides a method for manufacturing an ink-jet recording head and an ink-jet recording head having the following constitutions (1) to (6). It is. (1) A plurality of ink paths communicating with discharge ports for discharging ink and having an energy generating element for discharging ink from the discharge ports, and a common ink chamber for the plurality of ink paths. A solid layer disposing step of forming an individual layer corresponding to these portions on the first substrate in order to form an ink passage including at least the first substrate; and a second layer in which a curable resin in a non-completely cured state is disposed. Disposing a substrate on the first substrate, curing the curable resin in the non-completely cured state, and providing a wall member of the ink passage so as to cover the solid layer; Removing the solid layer to form the passages, wherein the solid layer is disposed at a portion corresponding to the common ink chamber. Before It is formed so as to reach the end of the first substrate, and when arranging the second substrate on the first substrate, it is necessary to prevent the curable resin in the non-fully cured state from flowing into the ink path. A method for manufacturing an ink jet recording head, comprising: (2) The method for manufacturing an ink jet recording head according to (1), wherein a groove is formed at an end of the solid layer formed to reach an end of the first substrate. . (3) The method for manufacturing an ink jet recording head according to the above (1) or (2), wherein a thermosetting resin is used as the curable resin, and thermosetting is performed at a high temperature in a short time. (4) An ink jet recording head manufactured by the method for manufacturing an ink jet recording head according to any one of the above (1) to (3). (5) The inkjet recording head according to (4), wherein the energy generating element is a thermal energy element. (6) The ink jet recording head according to the above (4) or (5), wherein a large number of the discharge ports are provided corresponding to the width of the recording material.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In an embodiment of the present invention,
By applying the above configuration, for example, when disposing the second substrate on the first substrate, even when the curable resin is heat-cured at a high temperature in a short time, the resin is not covered with the ink. Since it is possible to prevent the ink from flowing into the road, it is possible to provide a method of manufacturing an ink jet recording head having high print quality and good yield, and an ink jet recording head.

[0010]

Embodiments of the present invention will be described below. [Embodiment 1] FIGS. 1, 3 and 4 show the configuration of Embodiment 1 of the present invention. FIG. 1 is a diagram showing the configuration of the upper surface of the first substrate in the manufacturing process of the ink jet recording head of the present embodiment, and FIG. 3 is a schematic diagram for explaining these manufacturing processes. 1, 3, and 4, the same components as those in FIGS. 5, 6, 7, and 8 which are conventional examples are denoted by the same reference numerals.

A method for manufacturing the ink jet recording head according to the first embodiment of the present invention will be described below with reference to these drawings. First, a method of manufacturing an ink jet recording head will be described in the order of steps with reference to FIG. 3 showing a cross section taken along the line AA ′ of FIG. 4, as shown in FIG. 3 (1) and FIG.
An ejection pressure generating element 2 and a power supply wiring 3 to the element (not shown after (2) in FIG. 3) are formed on a first substrate 1 formed by a known means such as photolithography.
As a material of the first substrate 1, a substrate such as a single crystal Si, a polycrystal Si, a metal such as aluminum or stainless steel, or a ceramic can be used. In the present embodiment, aluminum is used.

Next, as shown in FIG. 3 (2), a liquid path is formed on the substrate on which the discharge pressure generating element 2 and the power supply wiring 3 are provided, and the liquid path is removed at a site where a liquid chamber to be communicated therewith is to be formed. A possible first solid layer 4 is formed. FIG. 1 shows the upper surface of the first substrate 1 at this time. The first solid layer 4 is removed after a later-described process, and the remaining space becomes at least a part of a liquid path and a liquid chamber. As a specific forming means of the first solid layer 4, for example, Tokyo Ohka Co., Ltd.
After applying a positive type photoresist, PMER-AR900, manufactured by well-known means such as spin coating, it is formed by exposure and development. In recent years, the nozzle density has been increased to 600 DPI or 1
A nozzle of 200 DPI or the like is required. In this embodiment, for example, in the case of 600 DPI, the thickness of the solid layer is 10 to 20 [μm] and 1200 DP.
In the case of I, the thickness is about 5 to 10 [μm].

Next, as shown in FIG.
The first curable resin 5 is applied to a portion of the substrate 7 (hereinafter, referred to as a top plate 7) other than the portions constituting the ink liquid path, the liquid chamber, and the wall of the liquid chamber, to be in a semi-cured state. Although the material of the top plate 7 is not particularly limited, a material having a coefficient of thermal expansion close to that of the first substrate 1 is desirable, and aluminum is used for the first substrate 1 as in this embodiment. In such a case, aluminum or a resin containing a filler having a coefficient of thermal expansion matched to aluminum is used. The material of the first curable resin 5 is not particularly limited, and any of a photocurable resin, a thermosetting resin, and a thermoplastic resin can be used. In this example, 100 parts by weight of Epicoat 828 parts by weight manufactured by Yuka Shell Epoxy Co., Ltd. and 6010 parts by weight of Fuji Cure by Fuji Chemical Industry Co., Ltd. were mixed.
Epoxy cold-setting resin was used.

Next, as shown in FIG. 3D, a top plate 7 having an opening 6 is placed on at least a part of the liquid chamber scheduled portion, and the first hardening is performed by applying heat. The conductive resin 5 is cured. When the first curable resin 5 is cured at a temperature of 30 ° C. for 24 hours, it is not compatible with the first solid layer 4 (PMER-AR900),
In order to shorten the process time, it is necessary to cure the first solid layer 4 at a temperature of 80 ° C. for 1 hour in a short time.
(PMER-AR900). Therefore, under the condition of 80 ° C. for one hour, in the pattern of the first solid layer 4 as in the above-described conventional example as shown in FIG. 7, the first curable resin 5 before curing flows into the nozzle side. Have done
It is compatible with the first solid layer 4 and impairs the nozzle shape.

However, in the method of manufacturing an ink jet recording head of the present embodiment, the rear end of the nozzle of the solid layer 4 extends to both ends of the first substrate 1 as shown in FIG. In this part, the first curable resin 5 described in the conventional example is used.
Can be prevented from flowing into the nozzle portion. as a result,
Even under the short-time curing conditions of the first curable resin 5 in which the compatibility between the first solid layer 4 and the first curable resin 5 can occur,
The loss of the nozzle shape can be prevented.

Next, as shown in FIG. 3 (5), the second curable resin 8 is filled through the opening 6 provided in the top plate 7. In the present embodiment, the same material as the first curable resin 5 is used for the second curable resin 8. After filling the second curable resin 8, it is placed in an oven at 30 ° C. for 24 hours to cure the second curable resin 8. In the present embodiment, the above-mentioned epoxy-based thermosetting resin was used as the second curable resin 8, but the material is not particularly limited, and other photo-curable resins or thermosetting resins may be used. Also, a thermoplastic resin can be suitably used.

Next, the liquid chamber 9 is formed by cutting. As shown in (6) of FIG. 3, it is fixed on a chuck table 10 (not shown) provided in a processing device such as a dicing saw and provided on the first substrate 1 by a cutting tool such as a diamond saw. The liquid is set so that the lowest point of the cutting edge falls within the range of the thickness of the removable solid layer 4 so that the second hardening resin 8 does not completely reach the power supply wiring 3 and the second hardening resin 8 completely disappears. Processing of the chamber 9 is performed.

Next, as shown in FIG. 4 (7), the discharge port planned portion is formed on the first substrate 1 by the diamond saw or the like.
Is completely cut to the bottom of the nozzle to form a discharge port 11. Next, as shown in (8) of FIG. 3, the removable first solid layer 4 is dissolved and removed with an organic solvent such as ethyl cellosolve or an alkaline aqueous solution to form an ink liquid path 12.

Through the above steps, an ink jet recording head is completed. As described above, according to this embodiment, since the pattern of the first solid layer 4 extends to the end of the first substrate 1, the second curable resin 8 flows into the nozzle portion. In addition, it is possible to prevent the nozzle shape from being damaged.

[Embodiment 2] FIG. 2 shows the structure of the upper surface of a first substrate in a process of manufacturing an ink jet recording head according to Embodiment 2 of the present invention. This embodiment is different from the first embodiment in that the first solid layer 4 extending to the end of the first substrate 1 is formed.
The point is that the pattern has a groove. By adopting such a configuration, a part of the second curable resin 8 flowing toward the nozzle portion is caused to flow into this groove, so that the nozzle portion is more effectively compared with the configuration of the first embodiment. It is possible to prevent the inflow of the second curable resin 8 into the second resin.

[0021]

As described above, according to the present invention, in the manufacturing process of an ink jet recording head, a recording head can be formed without damaging the nozzles at the ends of the recording head, and a high yield of the ink jet recording head can be obtained. A method of manufacturing a recording head and an ink jet recording head with high print quality can be realized.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a configuration of an upper surface of a first substrate in a manufacturing process of an inkjet recording head according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a configuration of an upper surface of a first substrate in a manufacturing process of an inkjet recording head according to a second embodiment of the present invention.

FIG. 3 is a cross-sectional view for explaining the method for manufacturing the ink jet recording head according to the first embodiment of the present invention.

FIG. 4 is a schematic diagram for explaining a method for manufacturing an ink jet recording head in Embodiment 1 of the present invention.

FIG. 5 is a schematic diagram for explaining a conventional method for manufacturing an ink jet recording head.

FIG. 6 is a cross-sectional view for explaining a conventional method for manufacturing an ink jet recording head.

FIG. 7 is a diagram illustrating a configuration of an upper surface of a first substrate in a manufacturing process of a conventional inkjet recording head.

FIG. 8 is a schematic diagram for explaining a state in which a first curable resin in a semi-cured state flows and flows into a nozzle or the like in a conventional example.

[Explanation of symbols]

 1: First substrate 2: Discharge pressure generating element 3: Power supply wiring 4: First solid layer 5: First curable resin 6: Opening 7: Second substrate (top plate) 8: Second Curable resin 9: Liquid chamber 11: Discharge port 12: Ink liquid flow path

Continuation of the front page (72) Inventor Junji Yasuda 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Toshio Suzuki 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. F-term (reference) 2C057 AF93 AG12 AG46 AP21 AP22 AP37 AP57 AQ02 AQ06 AQ10 BA03 BA13

Claims (6)

[Claims] A plurality of ink passages communicating with an ink discharge port for discharging ink and having an energy generating element for discharging ink from the discharge port; and a common ink chamber for the plurality of ink paths. Forming an ink passage including at least a solid layer on the first substrate, the solid layer being provided corresponding to these portions, Disposing a second substrate on the first substrate and curing the curable resin in the non-fully cured state; and providing a wall member for the ink passage so as to cover the solid layer. And a solid layer removing step of forming the passage by removing the solid layer, wherein at least one of the solid layers disposed at a portion corresponding to the common ink chamber. one Forming a portion so as to reach an end of the first substrate, and when disposing the second substrate on the first substrate, the curable resin in a non-completely cured state passes through the ink path. A method for manufacturing an ink jet recording head, comprising preventing the inflow. 2. The ink-jet recording head according to claim 1, wherein a groove is formed at an end of the solid layer formed so as to reach an end of the first substrate. Method. 3. The method according to claim 1, wherein a thermosetting resin is used as the curable resin, and the thermosetting resin is thermoset at a high temperature in a short time.
A method for manufacturing an ink jet recording head according to claim 2. 4. An ink jet recording head manufactured by the method for manufacturing an ink jet recording head according to claim 1. 5. The ink jet recording head according to claim 4, wherein said energy generating element is a thermal energy element. 6. The ink jet recording head according to claim 4, wherein a large number of said discharge ports are provided corresponding to the width of the recording material.