JP2002236263A5 - - Google Patents

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Publication number
JP2002236263A5
JP2002236263A5 JP2001032665A JP2001032665A JP2002236263A5 JP 2002236263 A5 JP2002236263 A5 JP 2002236263A5 JP 2001032665 A JP2001032665 A JP 2001032665A JP 2001032665 A JP2001032665 A JP 2001032665A JP 2002236263 A5 JP2002236263 A5 JP 2002236263A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001032665A
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Japanese (ja)
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JP4441134B2 (ja
JP2002236263A (ja
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Priority to JP2001032665A priority Critical patent/JP4441134B2/ja
Priority claimed from JP2001032665A external-priority patent/JP4441134B2/ja
Publication of JP2002236263A publication Critical patent/JP2002236263A/ja
Publication of JP2002236263A5 publication Critical patent/JP2002236263A5/ja
Application granted granted Critical
Publication of JP4441134B2 publication Critical patent/JP4441134B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001032665A 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ Expired - Fee Related JP4441134B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001032665A JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001032665A JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

Publications (3)

Publication Number Publication Date
JP2002236263A JP2002236263A (ja) 2002-08-23
JP2002236263A5 true JP2002236263A5 (enrdf_load_stackoverflow) 2008-03-06
JP4441134B2 JP4441134B2 (ja) 2010-03-31

Family

ID=18896547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001032665A Expired - Fee Related JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

Country Status (1)

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JP (1) JP4441134B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7368846B2 (en) 2002-11-06 2008-05-06 Matsushita Electric Industrial Co., Ltd. Microactuator with displacement sensing function and deformable mirror including the microactuator
CN100405122C (zh) * 2002-11-06 2008-07-23 松下电器产业株式会社 带有位移检测功能的微执行器
US7068409B2 (en) * 2004-03-31 2006-06-27 Lucent Technologies Inc. Tip-tilt-piston actuator
US7797757B2 (en) * 2006-08-15 2010-09-14 Georgia Tech Research Corporation Cantilevers with integrated actuators for probe microscopy
JP4979027B2 (ja) * 2009-02-10 2012-07-18 日本電信電話株式会社 Ｍｅｍｓ素子の製造方法およびｍｅｍｓ素子
JP5180161B2 (ja) * 2009-08-03 2013-04-10 日本電信電話株式会社 マイクロメカニカル構造体およびその製造方法

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