JP2002224984A - Vacuum generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum generator that can break the vacuum immediately and can perform the suction and release operation of a work piece at high speed. SOLUTION: The vacuum generator includes a control unit 70 that controls on and off of the air feed of compressed air supplied from a supply port 10, a vacuum generation part that produces vacuum at the on status by injecting the compressed air fed into a cylinder 16 through a nozzle 18 and passing through a diffuser spool 20 and then discharging from an exhaust port 40, and a vacuum port 50 connected to the vacuum generation part. The diffuser spool 20 can be moved to the axis direction in the cylinder and together with that, a gap between the outer surface of the diffuser spool and the inside surface of the cylinder is formed to be an auxiliary path for the vacuum destruction. At the air feed on, the diffuser spool 20 moves to the advanced position by the pushing pressure of compressed air and the gap is closed and then the air is sucked from the vacuum port. At the air feed off, the diffuser spool moves to the backward position and the vacuum destruction becomes possible by passing through the exhaust port 40, the auxiliary path and an inner diameter part of the diffuser spool.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum generator used in a suction transfer device for sucking and transferring a work by air, and more particularly, to a vacuum generator capable of separating a work from a vacuum port at a high speed. .

[0002]

2. Description of the Related Art A vacuum generator for generating a vacuum by air is often used in a suction transfer device for sucking and transferring a work such as a part by air. These vacuum generators are equipped with a switching valve for ON / OFF control of the vacuum. When the vacuum is turned on, the work is suctioned by air and the vacuum is turned off.
There is a product that is formed so as to separate the work when the product is removed. In recent various manufacturing apparatuses, there has been a demand for shortening the cycle time and improving the working efficiency, so that it is also required to shorten the time required for attaching and detaching the work to and from the vacuum generator.

FIG. 5 is a sectional view showing the configuration of a conventional example of a vacuum generator used for attaching and detaching a work. Reference numeral 10 denotes a compressed air supply port, 40 denotes an exhaust port, and 50 denotes a vacuum port for sucking a work. Reference numeral 60 denotes a spool valve, which moves back and forth in the axial direction by the action of the pilot valve 70,
The communication between the first communication flow path connecting the supply port 10 side and the spool valve 60 and the second communication flow path connecting the spool valve 60 and the exhaust port 40 side is 0N-OFF depending on the front and rear movement position. It is configured to control. When the first communication channel 12 and the second communication channel 14 communicate with each other when a vacuum is generated (work suction), the first communication channel 12 and the second communication channel 14 are connected to each other.
The state where the communication flow path 14 is disconnected is when vacuum is released (work detachment).

Reference numeral 16 denotes a cylinder extending cylindrically from the main body of the vacuum generator. An exhaust port 40 is provided at the tip of the cylinder 16. Reference numeral 18 denotes a nozzle disposed in the cylinder 16, and reference numeral 20 denotes a diffuser spool disposed in front of the nozzle 18. The nozzle 18 is connected to the second communication channel 1
The compressed air sent from 4 is ejected at a high speed, and the vacuum port 50 side is evacuated to a vacuum. 52 is a cylinder extending cylindrically from the main body of the vacuum generator. Reference numeral 45 denotes a communication flow path that communicates between the cylinder 52 and the cylinder 16. The operation of sucking the work to the vacuum port 50 side is performed by the action of the compressed air ejected from the supply port 10 toward the exhaust port 40 through the nozzle 18 and the diffuser spool 20, and the cylinder 52 through the communication passage 45. This is due to air suction from

[0005]

In the vacuum generator shown in FIG. 5, the operation of releasing the work adsorbed on the vacuum port 50 side is performed by the pilot valve 70 connecting the spool valve 60 to the first communication flow path 12. This is performed by moving the second communication channel 14 to a position where the second communication channel 14 is shut off. That is, the injection of the compressed air is stopped by shutting off the first communication flow path 12 and the second communication flow path 14, and the vacuum is discharged from the exhaust port 40 side through the diffuser spool 20, the communication flow path 45, and the cylinder 52. It is destroyed and becomes atmospheric pressure, and the suction of the work is released. However, in the conventional vacuum generator as shown in FIG. 5, a diffuser spool having a small-diameter inner portion is arranged to efficiently generate a vacuum, so that the air flow is suppressed when the vacuum is broken. Therefore, there is a problem that it is difficult to perform vacuum breaking at high speed.

As described above, it is required that a work suction and transfer device using a vacuum generator be capable of sucking and releasing a work at a high speed. However, there is a problem that the detaching speed of the work is not always sufficient. Therefore, as a device for detaching a workpiece at a higher speed, a method of introducing a compressed air with a reduced flow rate using a flow control valve into a vacuum circuit to break the workpiece in vacuum when the workpiece is detached by vacuum destruction has been considered. I have.

FIG. 6 shows an example of a vacuum generator by a method in which compressed air is flowed into a vacuum circuit to release a workpiece when the workpiece is released by vacuum breaking. The provision of the supply port 10, the exhaust port 40, and the vacuum port 50, and the operation of operating the spool valve 60 by the pilot valve 70 to suction air from the vacuum port 50 are shown in FIG.
The same as the vacuum generator shown in FIG. 1, but a valve 80 for vacuum break is provided so that compressed air can be introduced into the cylinder 52 at the time of vacuum break. The difference is that the flow rate is adjusted.

As shown in FIG. 6, the method of introducing compressed air into the vacuum circuit at the time of vacuum breakage can increase the separation speed as compared with the method of simply returning to the atmospheric pressure. In such a case, it is difficult to adjust the flow rate appropriately so that the workpiece may be blown off at the time of vacuum break, and it is difficult to adjust the removal speed optimally. It is necessary to separately provide a control unit such as a solenoid valve for the control, and there is a problem that it is difficult to adjust the drive timing of these control units.

Accordingly, the present invention has been made to solve these problems, and an object of the present invention is to return a vacuum to atmospheric pressure to perform fine adjustment of a work without performing fine adjustment. Provided is a vacuum generator that enables the detaching operation to be performed stably and enables the work to be detached at a higher speed, thereby enabling efficient and stable adsorption and detachment of the work to be performed. What you want to do.

[0010]

The present invention has the following arrangement to achieve the above object. That is, a control unit that controls ON-OFF of the supply of the compressed air supplied from the supply port, and the compressed air that is supplied into the cylinder at the time of ON is ejected from the nozzle and discharged from the exhaust port via the diffuser spool. In a vacuum generator having a vacuum generating section for generating a vacuum by the vacuum generating section and a vacuum port communicating with the vacuum generating section, the diffuser spool is movably provided in the cylinder in the axial direction, and an outer peripheral surface of the diffuser spool is provided. A gap is provided between the inner surface of the cylinder and the auxiliary flow path for vacuum break at the time of vacuum break, and when the air supply is ON, the diffuser spool moves to the forward position by the pressing force of the compressed air, and the gap is The diffuser spool moves to the retracted position when the air is turned off and the diffuser spool is closed. The exhaust port, characterized in that was found arranged to be vacuum break through the supplementary passage and an inner diameter portion of the diffuser spool.

Further, the diffuser spool is urged in a direction to move the diffuser spool from the advance position to the retracted position, and when the air supply is ON, the diffuser spool is pressed against the urging force by the pressing force of the compressed air. A biasing means is provided for moving the diffuser spool to the retreat position by moving the diffuser spool to the retracted position by moving the diffuser spool to the forward position and when the air supply is OFF. Further, the auxiliary flow path is closed by contacting a stopper step formed on the inner peripheral surface of the cylinder at the forward position on the outer peripheral surface of the diffuser spool, and closing the auxiliary flow path at the retracted position on the inner peripheral surface of the cylinder. An air packing is provided so as to be separated from the formed stopper step and communicate the auxiliary flow path with the vacuum port. This turns on the compressed air
The diffuser spool moves back and forth with the -OFF operation, and the opening and closing of the auxiliary flow path is suitably performed. An air introduction port provided with a filter, which is separate from the exhaust port, is provided in communication with the auxiliary flow path of the diffuser spool. This prevents the introduction of a dirty atmosphere during vacuum breakage, and facilitates vacuum breakage at high speed. The control unit may further include a pilot valve for switching compressed air supplied from the supply port, and a spool valve may be moved forward and backward by a switching operation of compressed air by the pilot valve. Is provided to turn on and off the air supply to the air.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a vacuum generator according to the present invention will be described below in detail with reference to the accompanying drawings. 1 and 2 are cross-sectional views showing the internal structure of one embodiment of a vacuum generator. FIG. 1 shows a state when a vacuum is generated, and FIG. 2 shows a state when a vacuum is broken. The vacuum generator of the present embodiment is configured such that the work can be detached from the vacuum port side by a method of breaking the vacuum by returning to the atmospheric pressure, and the basic configuration is the same as the vacuum generator shown in FIG. In the following description, the same components as those of the conventional example are denoted by the same reference numerals.

The vacuum generator has, as connection ports, a supply port 10 connected to a compressed air source, and an exhaust port 4 for discharging compressed air sent from the supply port 10 into the main body.
0, and a vacuum port 50 on the side for adsorbing and releasing the work. In the present embodiment, the cylinders 16 and 52 are extended cylindrically from the main body, and the exhaust ports 40 and the vacuum ports 50 are provided at the ends of the cylinders 16 and 52. The supply port 10 and the vacuum port 50 are provided with collet chucks 10a and 50a for inserting and removing an air tube with one touch.

The switching between the generation of the vacuum and the breakage of the vacuum is performed by controlling the communication between the first communication channel 12 and the second communication channel 14 by the action of the spool valve 60 in the same manner as in the conventional apparatus. The spool valve 60 is arranged on the side of the supply port 10 with its axial direction parallel to the axial direction of the cylinder 16. Note that the axial direction of the spool valve 60 does not necessarily need to be parallel to the axial direction of the cylinder 16. The first communication channel 12 and the second communication channel 14 are provided to extend laterally from the supply port 10 and the cylinder 16 side, and the supply port 10, the cylinder 16 and the spool valve 60 are mounted. It communicates with the cylinder 61.

The spool valve 60 has an intermediate portion in the axial direction formed in the small-diameter portion 62, and an outer peripheral surface of the small-diameter portion 62 and the spool valve 6.
An air gap is formed between the cylinder portion 61 and the inner peripheral surface of the cylinder portion 61 on which the sliding member 0 slides. Reference numeral 64 denotes an air packing provided around an inclined step portion at the end of the small-diameter portion 62, and a step formed on the inner peripheral surfaces of the air packing 64 and the cylinder portion 61 by moving the spool valve 60 in the axial direction. 66 is formed so as to abut or separate therefrom. Spool valve 60
The operation of controlling the communication between the first communication flow path 12 and the second communication flow path 14 by moving the spool valve 60 in the axial direction to make the air packing 64 contact or separate from the stepped portion 66. It is by operation.

That is, when the spool valve 60 moves forward and the air packing 64 contacts the step 66 on the inner surface of the cylinder portion 61, the supply of compressed air from the supply port 10 is blocked, and the first connection is established. The flow path 12 and the second communication flow path 14 are in a state of being cut off. Further, when the spool valve 60 is retracted and the air packing 64 and the stepped portion 66 on the inner surface of the cylinder portion 61 are separated from each other, the compressed air supplied from the supply port 10 is supplied to the small diameter portion of the spool valve 60 and the cylinder portion 61. In this state, the fluid flows into the second communication flow path 14 through a gap with the inner peripheral surface of the first communication flow path, and the first communication flow path 12 and the second communication flow path 14 are in communication with each other. FIG. 1 shows a state in which the air packing 64 of the spool valve 60 is separated from the stepped portion 66 (a vacuum is generated), and FIG. 2 shows a state in which the air packing 64 of the spool valve 60 is in contact with the stepped portion 66 (vacuum breakage). .

The pilot valve 70 moves the spool valve 60 forward and backward between a forward position and a backward position. In the present embodiment, the compressed air acting on both ends of the spool valve 60 is switched by the pilot valve 70 to move the spool valve 60 forward and backward. In practice, the spool valve 60
A piston 68 having a larger diameter than the spool valve 60 is brought into contact with the front end face of the piston 68, and the compressed air acting on the front end face of the piston 68 and the rear end face of the spool valve 60 is switched by the pilot valve 70 to act on the front end face of the piston 68. The spool valve 60 is moved by the difference between the compressed air generated and the thrust of the compressed air acting on the rear end face of the spool valve 60.

Reference numeral 72 denotes an electromagnet, and 74 denotes an armature driven by the electromagnet 72. When the flow path to the front end face of the piston 68 is opened by the armature 74, the thrust acting on the front end of the spool valve 60 due to the compressed air is applied to the spool valve 60.
The spool valve 60 is retracted beyond the thrust acting on the rear end of the spool 68 (in a vacuum generation state), and when the flow path to the front end face of the piston 68 is closed, the thrust of the compressed air acting on the rear end face of the spool valve 60 causes The spool valve 60 moves forward (vacuum break state). As described above, the pilot valve 70 controls the switching of the compressed air and moves the spool valve 60 using the pressure of the compressed air. The method of moving the spool valve 60 forward and backward by using the pressing force of the compressed air is as follows.
There is an advantage that a large power is not required. The method of moving the spool valve 60 is of course not limited to this method.

The compressed air introduced into the cylinder 16 from the second communication passage 14 is narrowed by a nozzle 18 and injected toward the rear end of the diffuser spool 20 to generate a vacuum. 22 is a nozzle 18 and a diffuser spool 20
This is an air injection portion which is a gap between the rear end of the air injection portion. The nozzle 18 and the diffuser spool 20 are both cylinder 1
6 movably disposed in the axial direction. 24 is the nozzle 18
A sealing member provided on the outer surface of the second communication flow path 1
When compressed air is supplied from the nozzle 4, the inner peripheral surface of the cylinder 16 and the outer peripheral surface of the nozzle 18 are air-sealed by the seal member 24, and the nozzle 18 moves forward from the inner diameter of the nozzle 18 at the moved position. Compressed air is ejected.

The forward position of the diffuser spool 20 is as follows.
The front end side of the diffuser spool 20 (exhaust port 40
The air packing 26 mounted on the step portion 20c where the small-diameter portion 20a of the diffuser spool 20 is connected to the large-diameter portion 20b on the rear end side of the diffuser spool 20 comes into contact with a stopper step 16a formed on the inner peripheral surface of the cylinder 16. Are regulated by: The small-diameter portion 20a on the tip side of the diffuser spool 20
Is provided for forming an air gap between the outer peripheral surface of the diffuser spool 20 and the inner peripheral surface of the cylinder 16 to form an auxiliary flow path for vacuum breaking.

Reference numeral 28 denotes a spring as urging means mounted on the outer surface of the small diameter portion 20a of the diffuser spool 20. The spring 28 is disposed so as to resiliently move between a locking projection 16b formed on the inner surface of the cylinder 16 and a projection provided on the outer surface of the diffuser spool 20, and urges the diffuser spool 20 in a direction of constantly moving backward. It is provided as follows. Thereby, the diffuser spool 2
As long as 0 is not pushed forward, the diffuser spool 20 will move backward. Diffuser spool 20
The rear end face of the diffuser spool 20 is in contact with the nozzle 18, and the position when the diffuser spool 20 is retracted is regulated by the position where the rear end face of the nozzle 18 abuts on the end face of the stopper 19.

The cylinder 16 and the vacuum port 50 communicate with each other through a communication channel 45. A communication hole is opened on the outer peripheral surface of the diffuser spool 20 at a position near the vacuum generating section 22, and the cylinder 1 is connected to the cylinder 1 through the communication hole and the communication channel 45.
6 communicates with the vacuum port 50 side. The communication channel 45 is bent from the side of the cylinder 16 and communicates with the cylinder 52 on the vacuum port 50 side. Compressed air is injected from the nozzle 18 and the injected air sucks air from the cylinder 52 side. Reference numeral 35 denotes a silencer element for silencing a sound when compressed air flows, and is a cylinder 1
6 is provided on the inner peripheral surface on the distal end side. 40a is a cap for attaching and detaching the silencer element 35. Numeral 54 is a filter disposed inside the cylinder 52 on the vacuum port 50 side. The filter 54 has a function of protecting dirty air from entering the vacuum generator main body when suctioning air.

The vacuum generator according to the present embodiment performs the operation of adsorbing and releasing a work by the following operations. FIG. 1 shows a vacuum generation state in which the vacuum port 50 side sucks and supports a work. The vacuum generation state means that the spool valve 60 is moved to the retracted position by the pilot valve 70 as described above,
This is a state in which the first communication channel 12 and the second communication channel 14 communicate with each other, and compressed air from the supply port 10 is supplied to the nozzle 18 side. When the compressed air is supplied to the nozzle 18, the nozzle 18 and the diffuser spool 20 are pushed forward by the air pressure, and the air packing 26 of the diffuser spool 20 abuts on the stopper step 16 a of the cylinder 16. The diffuser spool 20 and the nozzle 1
8 is pushed forward by the diffuser spool 2
0, against the urging force of the spring 28 mounted on the outer surface of the
8 must be set to exceed the biasing force.

When the diffuser spool 20 is moved to the forward position and the air packing 26 is in contact with the stopper step 16a, the air flows only through the inner diameter portion of the diffuser spool 20, and the normal nozzle 18 and the diffuser spool 20 generate a vacuum. The action is performed. That is, air is sucked from the vacuum port 50 side by the high-speed jet flow from the nozzle 18 through the communication flow path 45, and the work can be sucked by air.

FIG. 2 shows the vacuum port 5
The operation state of detaching from the 0 side is shown. First, vacuum break
By controlling the pilot valve 70, the spool valve 60 is moved from the retracted position to the advanced position, and the air packing 64 of the spool valve 60 is brought into contact with the stepped portion 66. As a result, the first communication channel 12 and the second communication channel 14 are shut off, and the compressed air supplied from the supply port 10 is supplied to the nozzle 1
8 and the diffuser spool 20 are no longer fed into the cylinder 16 mounted. When the pressing force of the compressed air does not act on the nozzle 18 and the diffuser spool 20, the diffuser spool 20 is pushed to the retracted position by the urging force of the spring 28 mounted between the diffuser spool 20 and the locking projection 16 b on the inner surface of the cylinder 16. Moved and moved. FIG. 2 shows the diffuser spool 2
0 has moved to the retreat position.

The fact that the diffuser spool 20 moves to the retracted position means that the air packing 26 provided on the diffuser spool 20 is separated from the stopper step 16a provided on the inner surface of the cylinder 16, and the diffuser spool 2
This means that the space between the small-diameter portion 20a and the inner surface of the cylinder 16 communicates as the auxiliary flow path 30. That is, when the compressed air from the supply port 10 stops working in the cylinder 16, the air flows into the vacuum circuit from which the air has been sucked through the exhaust port 40, and the vacuum circuit is broken.
The work that has been sucked by the air is released. In the vacuum generator of the present embodiment, the operation in which the air flows into the vacuum circuit and breaks the vacuum is performed by the flow path broken from the inner diameter portion of the diffuser spool 20 via the communication flow path 45 and the diffuser spool 20. Since it is made by both of the flow paths broken through the auxiliary flow path 30 passing through the outer peripheral surface side,
The rise of the vacuum break is accelerated, and the vacuum break can be performed instantaneously.

In the vacuum generator using the conventional diffuser spool 20, only vacuum breakage via the inner diameter portion of the diffuser spool 20 can be performed, whereas in the vacuum generator of the present embodiment, the outer surface of the diffuser spool 20 The use of the auxiliary flow path 30 that allows the flow through the chamber enables a higher-speed vacuum break. Since the operation of moving the diffuser spool 20 is performed by the urging force of the spring 28, the diffuser spool 20 can be moved instantaneously, and there is an advantage that the diffuser spool 20 can be formed simply in structure. The silencer element 35 and the filter 52 use the flowing air at the time of vacuum break as clean air so that the work is not contaminated by air operation.

When vacuum suction is performed after vacuum breakage,
By controlling the pilot valve 70, the spool valve 60 may be moved from the forward position in FIG. 2 to the retracted position in FIG. 1, and the first communication channel 12 and the second communication channel 14 may be communicated. When the first communication channel 12 and the second communication channel 14 communicate with each other, both the nozzle 18 and the diffuser spool 20 move to the forward position against the urging force of the spring 28, and the auxiliary channel 30 It is closed and a vacuum is generated in which the compressed air is discharged through the inner diameter of the diffuser spool 20. In this way, a vacuum generation state and a vacuum break state are appropriately generated, and the suction and desorption operation of the work is performed.

FIG. 3 shows an air circuit diagram when the vacuum generator of the embodiment shown in FIGS. The drawing shows that the diffuser spool 20 moves to the vacuum breaking position at the time of vacuum breaking, and is vacuum-breaked by a circuit that is broken through the vacuum generating unit 100 and a circuit of another system by the diffuser spool 20. In the above-described embodiment, the introduction of the atmosphere through the auxiliary flow path 30 at the time of vacuum break is common to the exhaust port 40 used at the time of vacuum generation. However, FIG. 40 shows an example provided in a system different from 40. When air is introduced via the diffuser spool 20 at the time of vacuum break, it is not always necessary to introduce air from the exhaust port 40, and it is also possible to break air by introducing air from another system air inlet port. .

For example, the cylinder 1 on the exhaust port 40 side
6 is provided with an atmosphere introduction port for vacuum breaking, and a filter 52 is provided.
It is also possible to introduce the atmosphere from this atmosphere introduction port via a. By taking in the atmosphere through the filter 52a when vacuuming the vacuum circuit by taking in the atmosphere, it is possible to prevent the dirty air from entering the main body of the vacuum generator and prevent the function of the vacuum generator from deteriorating. Can be protected.

In the above embodiment, the vacuum breaking operation has been described as a system (passive system) in which the atmosphere is introduced from the exhaust port 40 to break the air. However, as shown in FIG. 6, compressed air is supplied to the vacuum circuit. It is also possible to apply the present invention to an apparatus for vacuum breakage by introduction.

[0032]

According to the vacuum generator of the present invention, as described above, by providing the diffuser spool movably in the axial direction in the cylinder, the diffuser spool moves to the vacuum breaking position at the time of vacuum breaking, and Since the atmosphere can be introduced into the vacuum circuit through the passage, the rise time of the vacuum break can be reduced,
Vacuum breakage can be performed at a higher speed than in the past, and a remarkable effect such as enabling a suction and transfer operation of a work to be performed at a higher speed and more efficiently is achieved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing the configuration (in a vacuum generation state) of one embodiment of a vacuum generator according to the present invention.

FIG. 2 is a cross-sectional view showing a configuration (a state at the time of vacuum breakage) of one embodiment of a vacuum generator according to the present invention.

FIG. 3 is an explanatory diagram showing an air circuit of the embodiment of the vacuum generator.

FIG. 4 is an explanatory diagram showing an air circuit of another embodiment of the vacuum generator.

FIG. 5 is a cross-sectional view showing a conventional configuration example of a vacuum generator.

FIG. 6 is a cross-sectional view showing another conventional configuration example of the vacuum generator.

[Explanation of symbols]

 Reference Signs List 10 supply port 12 first communication flow path 14 second communication flow path 16 cylinder 16a stopper step 16b locking projection 18 nozzle 20 diffuser spool 20a small-diameter portion 22 vacuum generating unit 24 seal member 26 air packing 28 spring 30 auxiliary flow Passage 35 Silencer element 40 Exhaust port 45 Communication channel 50 Vacuum port 52 Cylinder 60 Spool valve 64 Air packing 66 Stepped portion 68 Piston 70 Pilot valve

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Suminari Masawa 4088 Minamiminowa-mura, Kamiina-gun, Nagano F-term in Pisco Corporation (reference) 3C007 DS00 DS01 FS01 FS04 FU00 FU06 GU01 3F061 AA00 AA01 CA01 CA04 CC00 CC11 DC01

Claims (5)

[Claims] A control unit for controlling ON / OFF of the supply of compressed air supplied from a supply port, and an exhaust port which injects compressed air supplied into a cylinder when the nozzle is ON from a nozzle and passes through a diffuser spool. A vacuum generating unit for generating a vacuum by discharging from the vacuum generating unit, and a vacuum port provided with a vacuum port communicating with the vacuum generating unit, wherein the diffuser spool is movably provided in the cylinder in the axial direction, and the diffuser spool is A gap is provided between the outer peripheral surface and the inner surface of the cylinder as an auxiliary flow path for vacuum breaking at the time of vacuum breaking. When the air supply is ON, the diffuser spool moves to the forward position by the pressing force of the compressed air. The air gap is closed and air is sucked from the vacuum port. When the air supply is OFF, the diffuser spool is in the retracted position. A vacuum generator, wherein the vacuum generator is provided so as to be movable and break through a vacuum via the exhaust port, the auxiliary flow path, and the inner diameter portion of the diffuser spool. 2. A diffuser spool is biased in a direction to move the diffuser spool from the advance position to the retracted position, and when the air supply is ON, the diffuser spool is pressed against the biasing force by the pressing force of the compressed air. 2. The vacuum generator according to claim 1, further comprising: urging means for moving the diffuser spool to the retreat position by moving the diffuser spool to the retreat position when the air supply is OFF when the air supply is turned off. 3. An outer peripheral surface of the diffuser spool,
In the forward position, the auxiliary flow path is closed by contacting a stopper step formed on the inner peripheral surface of the cylinder. In the retracted position, the auxiliary passage is separated from the stopper step formed on the inner peripheral surface of the cylinder. 3. The vacuum generator according to claim 1, further comprising an air packing for communicating a flow path with the vacuum port. 4. The air introduction port provided with a filter, which is separate from the exhaust port and is provided in communication with an auxiliary flow path of the diffuser spool. Vacuum generator. 5. A control valve, comprising: a pilot valve for switching compressed air supplied from the supply port; and a switching operation of the compressed air by the pilot valve to move a spool valve forward and backward, and to supply the supply air according to a moving position of the spool valve. ON-OFF air supply from port to cylinder
The vacuum generator according to claim 1, 2, 3, or 4, wherein the vacuum generator is provided.