JP2002222758A5 - - Google Patents
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- Publication number
- JP2002222758A5 JP2002222758A5 JP2001019522A JP2001019522A JP2002222758A5 JP 2002222758 A5 JP2002222758 A5 JP 2002222758A5 JP 2001019522 A JP2001019522 A JP 2001019522A JP 2001019522 A JP2001019522 A JP 2001019522A JP 2002222758 A5 JP2002222758 A5 JP 2002222758A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001019522A JP2002222758A (ja) | 2001-01-29 | 2001-01-29 | ステージ装置およびそれを用いた露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001019522A JP2002222758A (ja) | 2001-01-29 | 2001-01-29 | ステージ装置およびそれを用いた露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002222758A JP2002222758A (ja) | 2002-08-09 |
JP2002222758A5 true JP2002222758A5 (hu) | 2008-02-14 |
Family
ID=18885383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001019522A Withdrawn JP2002222758A (ja) | 2001-01-29 | 2001-01-29 | ステージ装置およびそれを用いた露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002222758A (hu) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1424767B1 (en) * | 2002-11-29 | 2013-05-22 | ASML Netherlands B.V. | Magnetic actuator under piezoelectric control |
TWI254356B (en) | 2002-11-29 | 2006-05-01 | Asml Netherlands Bv | Magnetic actuator under piezoelectric control |
JP5506207B2 (ja) * | 2009-02-24 | 2014-05-28 | キヤノン株式会社 | ステージ装置、露光装置及びデバイス製造方法 |
JP6559530B2 (ja) * | 2015-10-08 | 2019-08-14 | 株式会社ニューフレアテクノロジー | ステージ装置および荷電粒子ビーム描画装置 |
JP6886259B2 (ja) * | 2016-09-06 | 2021-06-16 | キヤノン株式会社 | 形成装置、及び物品製造方法 |
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2001
- 2001-01-29 JP JP2001019522A patent/JP2002222758A/ja not_active Withdrawn