JP2002222758A5 - - Google Patents
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- Publication number
- JP2002222758A5 JP2002222758A5 JP2001019522A JP2001019522A JP2002222758A5 JP 2002222758 A5 JP2002222758 A5 JP 2002222758A5 JP 2001019522 A JP2001019522 A JP 2001019522A JP 2001019522 A JP2001019522 A JP 2001019522A JP 2002222758 A5 JP2002222758 A5 JP 2002222758A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001019522A JP2002222758A (en) | 2001-01-29 | 2001-01-29 | Stage system and exposure apparatus using it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001019522A JP2002222758A (en) | 2001-01-29 | 2001-01-29 | Stage system and exposure apparatus using it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002222758A JP2002222758A (en) | 2002-08-09 |
| JP2002222758A5 true JP2002222758A5 (en) | 2008-02-14 |
Family
ID=18885383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001019522A Withdrawn JP2002222758A (en) | 2001-01-29 | 2001-01-29 | Stage system and exposure apparatus using it |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002222758A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1424767B1 (en) * | 2002-11-29 | 2013-05-22 | ASML Netherlands B.V. | Magnetic actuator under piezoelectric control |
| TWI254356B (en) | 2002-11-29 | 2006-05-01 | Asml Netherlands Bv | Magnetic actuator under piezoelectric control |
| JP5506207B2 (en) * | 2009-02-24 | 2014-05-28 | キヤノン株式会社 | Stage apparatus, exposure apparatus, and device manufacturing method |
| JP6559530B2 (en) * | 2015-10-08 | 2019-08-14 | 株式会社ニューフレアテクノロジー | Stage apparatus and charged particle beam drawing apparatus |
| JP6886259B2 (en) * | 2016-09-06 | 2021-06-16 | キヤノン株式会社 | Forming device and article manufacturing method |
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2001
- 2001-01-29 JP JP2001019522A patent/JP2002222758A/en not_active Withdrawn