JP2002216117A - Fingerprint detector in capacitance detection system - Google Patents

Fingerprint detector in capacitance detection system

Info

Publication number
JP2002216117A
JP2002216117A JP2001015622A JP2001015622A JP2002216117A JP 2002216117 A JP2002216117 A JP 2002216117A JP 2001015622 A JP2001015622 A JP 2001015622A JP 2001015622 A JP2001015622 A JP 2001015622A JP 2002216117 A JP2002216117 A JP 2002216117A
Authority
JP
Japan
Prior art keywords
wiring
lightning rod
detection
input
superposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001015622A
Other languages
Japanese (ja)
Inventor
Shuichi Oka
修一 岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2001015622A priority Critical patent/JP2002216117A/en
Publication of JP2002216117A publication Critical patent/JP2002216117A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a fingerprint detector in a capacitance detection system by which output of an electric charge from a detection electrode of the whole line and a detection electrode from the whole column is not inhibited and with high reliability in fingerprint detection. SOLUTION: A part with cross sectional area smaller than that in superposed areas with control wiring 22 and input/output wiring 23 among wiring 24 for lightning rod is provided on the non-superposed areas other than the superposed areas. Thus, current to exceed allowable quantity flows to the wiring 24 for lighting rod, the part with small cross sectional area on the non-superposed area is first bused among the wiring 24 for lighting rod. Consequently, no fusion is caused on the superposed area with the control wiring 22 and on the superposed area with the input/output wiring 23 among the wiring 24 for lighting rod and the control wiring 22 and the input/output wiring 23 arranged on the superposed areas are not destructed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本願の発明は、指と複数の検
出電極との間の静電容量を検出する静電容量検出方式の
指紋検出装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance detection type fingerprint detection device for detecting capacitance between a finger and a plurality of detection electrodes.

【0002】[0002]

【従来の技術】図2は指紋検出装置及びその使用方法を
示しており、この図2に示されている様に指紋検出装置
11上に指12が載せられることによって指紋が検出さ
れる。図3は、図2の部分拡大図であり、指紋検出の原
理を示している。半導体基板(図示せず)上の絶縁膜1
3上に複数の検出電極14が行列状に配されており、検
出電極14が保護膜15に覆われている。保護膜15上
に指12が載せられると、指紋の凹凸に応じた容量素子
16が指12の表面と検出電極14との間に形成され
る。
2. Description of the Related Art FIG. 2 shows a fingerprint detecting apparatus and a method of using the same. A fingerprint is detected by placing a finger 12 on a fingerprint detecting apparatus 11 as shown in FIG. FIG. 3 is a partially enlarged view of FIG. 2 and illustrates the principle of fingerprint detection. Insulating film 1 on semiconductor substrate (not shown)
A plurality of detection electrodes 14 are arranged in a matrix on 3, and the detection electrodes 14 are covered with a protective film 15. When the finger 12 is placed on the protective film 15, a capacitance element 16 corresponding to the unevenness of the fingerprint is formed between the surface of the finger 12 and the detection electrode 14.

【0003】指紋の凸部と検出電極14との間隔は指紋
の凹部と検出電極14との間隔よりも狭いので、指紋の
凸部に対応する容量素子16aの静電容量は指紋の凹部
に対応する容量素子16bの静電容量よりも大きい。従
って、夫々の検出電極14における静電容量が検出され
ることによって指紋が検出される。検出電極14におけ
る静電容量を検出するために、図5に示されている様に
夫々の検出電極14に接続されているスイッチング用の
複数のトランジスタ21が上述の半導体基板に設けられ
ており、制御配線22と入出力配線23とがトランジス
タ21に接続されている。
Since the distance between the convex portion of the fingerprint and the detecting electrode 14 is smaller than the distance between the concave portion of the fingerprint and the detecting electrode 14, the capacitance of the capacitor 16a corresponding to the convex portion of the fingerprint corresponds to the concave portion of the fingerprint. Larger than the capacitance of the capacitive element 16b. Therefore, the fingerprint is detected by detecting the capacitance of each detection electrode 14. In order to detect the capacitance of the detection electrode 14, a plurality of switching transistors 21 connected to the respective detection electrodes 14 are provided on the semiconductor substrate as shown in FIG. The control wiring 22 and the input / output wiring 23 are connected to the transistor 21.

【0004】保護膜15上に指12が載せられると、制
御配線22によって総てのトランジスタ21が導通状態
にされる。そして、夫々の容量素子16の静電容量に応
じた電荷が入出力配線23を介して検出電極14に蓄積
されると、制御配線22によって総てのトランジスタ2
1が非導通状態にされる。その後、各行の制御配線22
が順次に動作して、当該行における夫々の検出電極14
に蓄積されている電荷が入出力配線23を介して読み出
されることによって、夫々の検出電極14における静電
容量が検出される。
When the finger 12 is placed on the protective film 15, all the transistors 21 are turned on by the control wiring 22. When electric charges corresponding to the capacitances of the respective capacitance elements 16 are accumulated in the detection electrodes 14 via the input / output wirings 23, all the transistors 2 are controlled by the control wirings 22.
1 is turned off. Then, the control wiring 22 of each row
Operate sequentially, and the respective detection electrodes 14 in the row are operated.
Is read out via the input / output wiring 23, the capacitance of each detection electrode 14 is detected.

【0005】ところで、図2、3に示されている様に、
指紋の検出に際しては指紋検出装置11の表面に指12
を接触させ、指12が静電気を帯びている場合があるの
で、保護膜15には絶縁破壊耐性が要求される。保護膜
15の絶縁破壊耐性を高めるためには保護膜15を厚く
して保護膜15中の電界を弱めればよいが、保護膜15
を厚くすると容量素子16の静電容量が小さくなって、
指紋の検出感度が低下する。
By the way, as shown in FIGS.
When detecting a fingerprint, the finger 12 is placed on the surface of the fingerprint detecting device 11.
And the finger 12 may be charged with static electricity, so that the protective film 15 is required to have dielectric breakdown resistance. In order to increase the dielectric breakdown resistance of the protective film 15, the electric field in the protective film 15 may be weakened by increasing the thickness of the protective film 15.
When the thickness is increased, the capacitance of the capacitive element 16 decreases,
Fingerprint detection sensitivity decreases.

【0006】そこで、静電気を除去して指12の電位を
一定にするために、図4、5に示されている様に、検出
電極14の周辺に避雷針用配線24が格子状に配されて
いる従来例が知られている(米国特許第5325442
号公報)。このような従来例では、避雷針用配線24の
電位を検出電極14やトランジスタ21等とは別の例え
ば接地電位に固定しておけば、静電気を帯びた指12を
指紋検出装置11の表面に接触させても、避雷針用配線
24を介して指12の静電気が除去されるので、保護膜
15が破壊から保護される。
Therefore, in order to remove the static electricity and keep the potential of the finger 12 constant, lightning rod wires 24 are arranged in a grid pattern around the detection electrode 14 as shown in FIGS. There is known a conventional example (US Pat. No. 5,325,442).
No.). In such a conventional example, if the potential of the lightning rod wire 24 is fixed to, for example, a ground potential different from the detection electrode 14 and the transistor 21, the electrostatically charged finger 12 contacts the surface of the fingerprint detection device 11. Even if this is done, the static electricity of the finger 12 is removed via the lightning rod wiring 24, so that the protective film 15 is protected from destruction.

【0007】[0007]

【発明が解決しようとする課題】ところが、指12の帯
電量が多くて、許容量を超える電流が避雷針用配線24
に流れると、避雷針用配線24が溶断する。そして、避
雷針用配線24が溶断すると、避雷針用配線24の溶断
部のみならずその近接領域も破壊される。一方、図5に
示されている様に、上述の従来例における避雷針用配線
24では、その幅が均一であって断面積も均一であり、
その結果、避雷針用配線24の何れの部分の電気抵抗も
均一である。このため、許容量を超える電流が避雷針用
配線24に流れた場合に溶断を生じる部分が限定されて
おらず、避雷針用配線24のうちのどの部分で溶断が生
じるかを予測することができない。
However, when the charge amount of the finger 12 is large and the current exceeding the allowable amount is applied to the lightning rod wiring 24,
, The lightning rod wiring 24 is blown. Then, when the lightning rod wiring 24 is blown, not only the blown portion of the lightning rod wiring 24 but also the adjacent area is destroyed. On the other hand, as shown in FIG. 5, in the above-described conventional lightning rod wiring 24 in the conventional example, its width is uniform and its cross-sectional area is also uniform.
As a result, the electrical resistance of any part of the lightning rod wiring 24 is uniform. For this reason, the portion that causes fusing when a current exceeding the allowable amount flows through the lightning rod wire 24 is not limited, and it is not possible to predict which portion of the lightning rod wire 24 will cause fusing.

【0008】もし、避雷針用配線24のうちで制御配線
22との重畳領域や入出力配線23との重畳領域で溶断
が生じると、これらの重畳領域に配されている制御配線
22や入出力配線23も破壊される可能性がある。制御
配線22が破壊されると、この制御配線22に接続され
ている行全体の検出電極14からの電荷の読み出しが阻
害され、入出力配線23が破壊されると、この入出力配
線23に接続されている列全体の検出電極14からの電
荷の読み出しが阻害される。このため、上述の従来例に
おける避雷針用配線24では、指紋検出の信頼性が必ず
しも高くなかった。
If fusing occurs in the overlapping area with the control wiring 22 and the overlapping area with the input / output wiring 23 in the lightning rod wiring 24, the control wiring 22 and the input / output wiring arranged in these overlapping areas are provided. 23 may also be destroyed. When the control wiring 22 is destroyed, the reading of charges from the detection electrodes 14 in the entire row connected to the control wiring 22 is hindered, and when the input / output wiring 23 is broken, the connection to the input / output wiring 23 is made. The readout of the electric charges from the detection electrodes 14 in the entire column is disturbed. Therefore, the reliability of fingerprint detection is not always high in the lightning rod wiring 24 in the above-described conventional example.

【0009】従って、本願の発明は、行全体の検出電極
や列全体の検出電極からの電荷の読み出しが阻害され
ず、指紋検出の信頼性が高い静電容量検出方式の指紋検
出装置を提供することを目的としている。
Therefore, the invention of the present application provides a capacitance detection type fingerprint detection device which has high reliability in fingerprint detection without obstructing reading of charges from the detection electrodes of the entire row or the entire column. It is intended to be.

【0010】[0010]

【課題を解決するための手段】本願の発明による静電容
量検出方式の指紋検出装置では、避雷針用配線のうちで
制御配線との重畳領域及び入出力配線との重畳領域以外
の非重畳領域に、重畳領域における断面積よりも小さな
断面積を有する部分が設けられている。このため、許容
量を超える電流が避雷針用配線に流れると、避雷針用配
線のうちで非重畳領域における断面積の小さい部分つま
り電気抵抗の高い部分がまず溶断し、溶断が一旦生じる
と、溶断部分に隣接している部分には電流が最早流れな
い。従って、避雷針用配線のうちで溶断を生じる部分
が、制御配線及び入出力配線との非重畳領域における断
面積の小さい部分に限定される。
In the capacitance detection type fingerprint detecting device according to the present invention, a lightning rod for a lightning rod is provided in a non-overlapping area other than an overlapping area with a control wiring and an overlapping area with an input / output wiring. , A portion having a smaller cross-sectional area than the cross-sectional area in the overlapping region is provided. For this reason, when a current exceeding the allowable amount flows through the lightning rod, the part of the lightning rod that has a small cross-sectional area in the non-overlapping region, that is, the part with high electrical resistance, is blown first. The current no longer flows in the portion adjacent to. Therefore, the portion of the lightning rod wiring that causes fusing is limited to a portion having a small cross-sectional area in a non-overlapping region with the control wiring and the input / output wiring.

【0011】避雷針用配線が溶断すると、避雷針用配線
の溶断部のみならずその近接領域も破壊される。しか
し、避雷針用配線のうちで溶断を生じる部分が制御配線
及び入出力配線との非重畳領域における断面積の小さい
部分に限定されるので、許容量を超える電流が避雷針用
配線に流れても、避雷針用配線のうちで制御配線との重
畳領域及び入出力配線との重畳領域では溶断が生じなく
て、これらの重畳領域に配されている制御配線及び入出
力配線は破壊されない。
When the lightning rod wiring is blown, not only the blown portion of the lightning rod wiring but also the adjacent area is destroyed. However, since the portion of the lightning rod wiring that causes fusing is limited to a small cross-sectional area in a non-overlapping region with the control wiring and the input / output wiring, even if a current exceeding the allowable amount flows through the lightning rod wiring, Among the lightning rod wires, a fusing does not occur in an overlapping area with the control wiring and an overlapping area with the input / output wiring, and the control wiring and the input / output wiring arranged in these overlapping areas are not broken.

【0012】[0012]

【発明の実施の形態】以下、本願の発明の一実施形態
を、図1を参照しながら説明する。図1に示されている
様に、本実施形態の指紋検出装置11では、避雷針用配
線24の厚さは均一であるが幅は不均一である。即ち、
避雷針用配線24のうちで制御配線22との重畳領域及
び入出力配線23との重畳領域とそれらの近傍領域とで
は、避雷針用配線24の幅が相対的に広くて断面積も相
対的に大きく、上述の重畳領域から離隔している領域で
は、避雷針用配線24の幅が相対的に狭くて断面積も相
対的に小さい。これらの点を除いて、本実施形態の指紋
検出装置11も、図5に示されている一従来例の指紋検
出装置11と実質的に同様の構成を有している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. As shown in FIG. 1, in the fingerprint detecting device 11 of the present embodiment, the thickness of the lightning rod wire 24 is uniform, but the width is not uniform. That is,
Among the lightning rod wires 24, in the overlapping region with the control wiring 22 and the overlapping region with the input / output wiring 23 and the region near them, the width of the lightning rod 24 is relatively large and the cross-sectional area is relatively large. In a region separated from the above-mentioned overlapping region, the width of the lightning rod wire 24 is relatively narrow and the cross-sectional area is relatively small. Except for these points, the fingerprint detection device 11 of the present embodiment has substantially the same configuration as the fingerprint detection device 11 of the conventional example shown in FIG.

【0013】本実施形態の指紋検出装置11では、断面
積の相対的に小さい部分が避雷針用配線24に設けられ
ており、断面積の相対的に小さい部分で電気抵抗も相対
的に高い。このため、避雷針用配線24を電流が均一に
流れても、断面積の相対的に小さい部分で発熱量が相対
的に多い。この結果、指12の帯電量が多くて、許容量
を超える電流が避雷針用配線24に流れると、避雷針用
配線24のうちで断面積の相対的に小さい部分がまず溶
断し、溶断が一旦生じると、溶断部分に隣接している部
分には電流が最早流れない。
In the fingerprint detecting device 11 of the present embodiment, a portion having a relatively small cross-sectional area is provided in the lightning rod wiring 24, and a portion having a relatively small cross-sectional area has a relatively high electric resistance. For this reason, even if the current flows uniformly through the lightning rod wiring 24, the heat generation amount is relatively large in a portion having a relatively small cross-sectional area. As a result, when the charge amount of the finger 12 is large and a current exceeding the allowable amount flows to the lightning rod wiring 24, a portion of the lightning rod wiring 24 having a relatively small cross-sectional area is blown first, and the fusing occurs once. Then, current no longer flows in the portion adjacent to the fusing portion.

【0014】従って、避雷針用配線24のうちで溶断を
生じる部分が、制御配線22との重畳領域及び入出力配
線23との重畳領域から離隔している領域に限定され
る。このため、避雷針用配線24のうちで制御配線22
との重畳領域及び入出力配線23との重畳領域では溶断
が生じなくて、これらの重畳領域に配されている制御配
線22及び入出力配線23は破壊されない。この結果、
制御配線22に接続されている行全体の検出電極14か
らの電荷の読み出しも、入出力配線23に接続されてい
る列全体の検出電極14からの電荷の読み出しも阻害さ
れず、本実施形態の指紋検出装置11では指紋検出の信
頼性が高い。
Therefore, the portion of the lightning rod wire 24 that causes fusing is limited to a region that is separated from the overlapping region with the control wiring 22 and the overlapping region with the input / output wiring 23. For this reason, the control wiring 22 out of the lightning rod wiring 24
Fusing does not occur in the superimposed region of the control wiring 22 and the input / output wiring 23 and the input / output wiring 23 is not destroyed. As a result,
Reading of charges from the detection electrodes 14 in the entire row connected to the control wiring 22 and reading of charges from the detection electrodes 14 in the entire column connected to the input / output wiring 23 are not hindered. The fingerprint detection device 11 has high reliability in fingerprint detection.

【0015】以上の本実施形態の指紋検出装置11で
は、避雷針用配線24の幅が部分的に狭くなることによ
ってこの部分の断面積が小さくなっている。しかし、避
雷針用配線24の下地に段差部が設けられており、この
段差部において避雷針用配線24の厚さが薄くなること
によって断面積が小さくなっていてもよい。避雷針用配
線24の下地に段差部を設けるためには、例えば、図4
から明らかな様に、検出電極14同士の間隔を部分的に
広くすればよく、この部分の保護膜15に段差部が設け
られる。また、絶縁膜13よりも下層に段差部を設けて
もよい。
In the fingerprint detecting device 11 of the present embodiment described above, the cross-sectional area of this part is reduced by partially reducing the width of the lightning rod wiring 24. However, a step is provided under the lightning rod wiring 24, and the cross-sectional area may be reduced by reducing the thickness of the lightning rod wiring 24 at this step. In order to provide a step on the base of the lightning rod wiring 24, for example, FIG.
As is clear from FIG. 7, the interval between the detection electrodes 14 may be partially widened, and a step portion is provided in the protective film 15 in this portion. Further, a step may be provided below the insulating film 13.

【0016】なお、避雷針用配線24の幅を部分的に狭
くしたり、検出電極14同士の間隔を部分的に広くした
りするためには、避雷針用配線24や検出電極14をエ
ッチング等によってパターニングする際のマスクのパタ
ーンを変更するだけでよい。従って、本実施形態の指紋
検出装置11のための製造工程も製造コストも、図5に
示されている一従来例の指紋検出装置11に比べて増加
していない。
In order to partially narrow the width of the lightning rod wire 24 or partially widen the interval between the detection electrodes 14, the lightning rod wire 24 and the detection electrode 14 are patterned by etching or the like. It is only necessary to change the pattern of the mask when performing. Therefore, neither the manufacturing process nor the manufacturing cost for the fingerprint detection device 11 of the present embodiment is increased as compared with the fingerprint detection device 11 of the related art shown in FIG.

【0017】[0017]

【発明の効果】本願の発明による静電容量検出方式の指
紋検出装置では、許容量を超える電流が避雷針用配線に
流れても、制御配線及び入出力配線は破壊されない。こ
のため、行全体の検出電極や列全体の検出電極からの電
荷の読み出しが阻害されず、指紋検出の信頼性が高い。
In the capacitance detection type fingerprint detection device according to the present invention, the control wiring and the input / output wiring are not destroyed even if a current exceeding the allowable amount flows through the lightning rod wiring. For this reason, the reading of charges from the detection electrodes in the entire row and the columns is not hindered, and the reliability of fingerprint detection is high.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本願の発明の一実施形態の平面図である。FIG. 1 is a plan view of an embodiment of the present invention.

【図2】指紋検出装置及びその使用方法を示す側面図で
ある。
FIG. 2 is a side view showing a fingerprint detection device and a method of using the same.

【図3】指紋検出の原理を示しており、図2の部分拡大
図である。
FIG. 3 is a partial enlarged view of FIG. 2, showing the principle of fingerprint detection.

【図4】指紋検出装置における避雷針用配線を説明する
ための側断面図である。
FIG. 4 is a side cross-sectional view for explaining lightning rod wiring in the fingerprint detection device.

【図5】本願の発明の一従来例の平面図である。FIG. 5 is a plan view of a conventional example of the present invention.

【符号の説明】[Explanation of symbols]

11…指紋検出装置、14…検出電極、21…トランジ
スタ(スイッチ)、22…制御配線、23…入出力配
線、24…避雷針用配線
11 fingerprint detection device, 14 detection electrode, 21 transistor (switch), 22 control wiring, 23 input / output wiring, 24 wiring for lightning rod

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の検出電極とこれら複数の検出電極
に夫々接続されている複数のスイッチとが行列状に配さ
れており、前記スイッチの開閉を制御する制御配線と前
記検出電極に対して電荷を入出力する入出力配線とが前
記スイッチに接続されており、避雷針用配線が前記行列
に対応して格子状に配されており、前記スイッチ及び前
記入出力配線を介して前記検出電極から読み出される電
荷によって前記検出電極における静電容量を検出する静
電容量検出方式の指紋検出装置において、 前記避雷針用配線のうちで前記制御配線との第一の重畳
領域及び前記入出力配線との第二の重畳領域以外の非重
畳領域に、前記第一及び第二の重畳領域における断面積
よりも小さな断面積を有する部分が設けられている静電
容量検出方式の指紋検出装置。
A plurality of detection electrodes and a plurality of switches respectively connected to the plurality of detection electrodes are arranged in a matrix, and a control line for controlling opening and closing of the switches and a detection electrode are provided. An input / output wiring for inputting / outputting electric charges is connected to the switch, and a lightning rod wiring is arranged in a lattice shape corresponding to the matrix, and is connected to the detection electrode via the switch and the input / output wiring. In the capacitance detection type fingerprint detection device that detects the capacitance of the detection electrode based on the charge that is read, a first overlapping area with the control wiring and a second one with the input / output wiring among the lightning rod wires An electrostatic capacitance detection type fingerprint detection device, wherein a portion having a smaller cross-sectional area than the first and second superposed regions is provided in a non-superposed region other than the two superposed regions.
【請求項2】 前記非重畳領域において前記避雷針用配
線の幅が狭くなることによって前記断面積が小さくなっ
ている請求項1記載の静電容量検出方式の指紋検出装
置。
2. The electrostatic capacitance detection type fingerprint detection device according to claim 1, wherein the cross-sectional area is reduced by reducing the width of the lightning rod wire in the non-overlapping area.
【請求項3】 前記非重畳領域における前記避雷針用配
線の下地に段差部が設けられており、この段差部におい
て前記避雷針用配線の厚さが薄くなることによって前記
断面積が小さくなっている請求項1記載の静電容量検出
方式の指紋検出装置。
3. A light-emitting device according to claim 1, wherein a step is provided under the lightning rod in the non-overlapping region, and the cross-sectional area is reduced by reducing the thickness of the lightning rod at the step. Item 2. An electrostatic capacitance detection type fingerprint detection device according to item 1.
JP2001015622A 2001-01-24 2001-01-24 Fingerprint detector in capacitance detection system Pending JP2002216117A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001015622A JP2002216117A (en) 2001-01-24 2001-01-24 Fingerprint detector in capacitance detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001015622A JP2002216117A (en) 2001-01-24 2001-01-24 Fingerprint detector in capacitance detection system

Publications (1)

Publication Number Publication Date
JP2002216117A true JP2002216117A (en) 2002-08-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2002216117A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333268A (en) * 2003-05-07 2004-11-25 Sony Corp Surface shape recognition device and its manufacturing method
KR101770521B1 (en) 2016-08-26 2017-09-05 한양대학교 산학협력단 Capacitive in-cell touch panel structures and their readout methods

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333268A (en) * 2003-05-07 2004-11-25 Sony Corp Surface shape recognition device and its manufacturing method
JP4586335B2 (en) * 2003-05-07 2010-11-24 ソニー株式会社 Surface shape recognition apparatus and manufacturing method thereof
KR101770521B1 (en) 2016-08-26 2017-09-05 한양대학교 산학협력단 Capacitive in-cell touch panel structures and their readout methods
US11048368B2 (en) 2016-08-26 2021-06-29 Industry-University Cooperation Foundation Hanyang University Capacitive in-cell touch panel structures and readout method in the same

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