JP2002214704A - Projector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a projector constituted to avoid a risk that incident light is directly cast to a driving element by an easy method. SOLUTION: The optical axis FCL of a field lens 400 provided on the incident side of a liquid crystal panel 411 is shifted in parallel with the center axis FCL0 of light made incident on the lens 400 and the panel 411. The optical axis FCL of the lens 400 is shifted so that the incident angle of the light cast to the driving element may be small when the center axis FCL0 of the incident light is aligned with the optical axis FCL. Therefore, the oblique light is not cast to the driving element, so that the damage, the rupture and the malfunction of the driving element are not caused and the quality of a projected image is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projector having an active liquid crystal device.

[0002]

2. Description of the Related Art Active liquid crystal devices are often used in projectors. Such a liquid crystal device has a thin film transistor (TFT) or a diode as a driving element for each pixel, and forms an image by modulating incident light in accordance with image information (image signal). A general projector includes an illumination optical system including a polarization generating optical system that converts unbiased light emitted from a light source into a predetermined linearly polarized light and emits the linearly polarized light, and a linearly polarized light emitted from the illumination optical system. Color light separation optical system for separating light into three color lights of red, green and blue, three liquid crystal devices for modulating each color light according to image information (image signal), and a cross dichroic for synthesizing the modulated color lights A color light combining optical system comprising a prism,
And a projection optical system that projects the combined light onto a screen.

FIG. 22 is a perspective view from the light incident surface side of the liquid crystal device, and is an enlarged view of a part of the liquid crystal device. 23 and 24 are FF ′ of FIG. 21 respectively.
It is sectional drawing of the line and GG 'line. 22 to 2
In FIG. 4, only some of the constituent elements included in the liquid crystal device are schematically illustrated for easy understanding. The liquid crystal device includes a base substrate 1 made of glass or the like and a counter substrate 2.
And the liquid crystal 5 is sealed between them. A thin film transistor (TF) is provided on the surface of the base substrate 1 on the liquid crystal 5 side.
A driving element 3 including T) and a diode is formed. Further, in the liquid crystal device, a light-shielding mask 6 is formed in a matrix, and a portion other than the light-shielding mask 6 becomes the opening 4.

[0004]

Since the light incident on the opening 4 of this liquid crystal device has a certain spread, FIG.
As shown in FIG. 24, light B1 which is perpendicularly incident on the opening 4
In addition to B4, there are lights A1 to A4 and C1 to C4 which are obliquely incident without being blocked by the light shielding mask 6. Of the light A1 to A4 and C1 to C4 that are obliquely incident, the light C1, A2, and C that are incident in a direction away from the driving element 3.
Lights A1, C2, A3, and C4 traveling toward the driving element 3 are a problem, although light rays 3 and A4 do not cause much problems.
As shown in FIGS. 23 and 24, when the lights A1 and C4 hit the driving element 3, the driving element 3 is damaged,
This causes a problem such as deterioration or malfunction, resulting in deterioration of the quality of the projected image.

In particular, recently, efforts have been made to increase the aperture ratio of a liquid crystal device.
Increasingly, the risk of light hitting the driving element 3 increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and improves the quality of a projected image by avoiding the risk that incident light directly hits a driving element by an inexpensive and simple method. The purpose is to:

[0007]

A liquid crystal device according to the present invention comprises a light source, a liquid crystal device for modulating light emitted from the light source, and a projection lens for projecting light modulated by the liquid crystal device. A liquid crystal device, wherein the liquid crystal device has a base provided with a plurality of pixel electrodes arranged in a matrix and a driving element provided for each of the pixel electrodes and electrically connected to the pixel electrodes. Board and
A counter substrate provided with a light-blocking mask covering at least a part of the driving element; and a liquid crystal provided between the base substrate and the counter substrate. It is characterized in that the angle is regulated so as not to hit.

According to the present invention, the angle of light incident on the liquid crystal device is controlled so as not to impinge on the driving element, so that the driving element is not damaged, broken or malfunctioned. Therefore, the quality of the projected image can be improved.

In the projector of the present invention, when a condenser lens is provided on the light incident side of the liquid crystal device, the central axis of the light incident on the condenser lens coincides with the optical axis of the condenser lens. In such a case, by shifting the central axis and the optical axis of the condenser lens in parallel so as to reduce the incident angle of light impinging on the driving element, it is possible to regulate the angle of light incident on the liquid crystal device. It is. With this configuration, the above problem can be easily solved.

At this time, if the optical axis of the projection lens is shifted in the same direction as the optical axis of the condenser lens and parallel to the central axis of the light incident on the condenser lens, the modulated light Can be efficiently taken into the projection lens, so that the light use efficiency can be improved.

In the projector of the present invention, when a microlens array having a plurality of lenses corresponding to the pixel electrodes is provided on the light incident side of the base substrate, the light enters the microlens array. A center axis of light incident on the microlens array, the center axis of the microlens array being arranged to reduce an incident angle of light impinging on the driving element when the center axis of the light coincides with the center of the microlens array; , The angle of light incident on the liquid crystal device can be restricted. With this configuration, the above problem can be easily solved.

At this time, if the microlens array is provided on the counter substrate, the interface between the microlens array and the counter substrate can be reduced. Therefore, light loss at this interface can be prevented, and the light use efficiency can be improved.

Further, if the optical axis of the projection lens is shifted in the same direction as the optical axis of the microlens array in parallel with the central axis of the light incident on the microlens array, the modulated light can be shifted. Since the light can be efficiently taken into the projection lens, the light use efficiency can be increased. In addition, the phenomenon that the projected image is distorted into a trapezoid can be prevented.

Further, in the projector of the present invention,
Tilting the optical axis of the light source with respect to the normal of the counter substrate so as to reduce the angle of incidence of light impinging on the drive element when the normal of the counter substrate and the optical axis of the light source are parallel. Thereby, the angle of light incident on the liquid crystal device can be regulated.

At this time, if the optical axis of the projection lens is inclined in the same direction as the optical axis of the light source and parallel to the normal of the counter substrate, the modulated light can be efficiently projected into the projection lens. Since light can be taken into the light, it is possible to increase the light use efficiency.

At this time, a microlens array having a plurality of lenses corresponding to the pixel electrodes can be provided on the light incident side of the base substrate. As described above, when the microlenses are provided, if the optical axis of each microlens is shifted in parallel to the light source with respect to the center of each pixel of the liquid crystal device, incident light is blocked by the light shielding mask. Can be prevented, and a decrease in the brightness of the projected image can be reduced. Furthermore, if the microlens array is provided on the counter substrate,
It is possible to reduce the interface between the microlens array and the opposing substrate. Therefore, light loss at this interface can be prevented, and the light use efficiency can be further improved.

Further, in the projector of the present invention,
It is preferable that a central axis of light incident on the liquid crystal device coincides with a clear viewing direction of the liquid crystal device. When the central axis of the light incident on the liquid crystal device does not coincide with the clear viewing direction of the liquid crystal device, the light enters the liquid crystal device by providing a viewing angle compensation film on the light incident side or the light emission side of the liquid crystal device. It is preferable to make the central axis of light or light emitted from the liquid crystal device coincide with the clear viewing direction of the liquid crystal device. By adopting such a configuration, the contrast of the projected image can be increased, and the quality of the projected image can be further improved.

If the viewing angle compensating films are provided on both the light incident side and the light exit side of the liquid crystal device, the viewing angle dependency of the liquid crystal device is reduced, and the brightness and uniformity of the color tone of the projected image can be improved. Becomes

The liquid crystal device employed in the projector of the present invention is preferably a liquid crystal device having a thin film transistor as a driving element. In this case, the base substrate is further provided with a scanning line and a data line intersecting with the scanning line and located above the scanning line on the base substrate. Further, the driving element has a semiconductor layer connected to the data line and the scanning line, including a channel region, and located below the scanning line on the substrate.

Further, the projector according to the present invention can provide a color display in which a color separation optical system for separating light emitted from the light source into a plurality of color lights is provided between the light source and the liquid crystal device. It is possible to apply to. If the projector of the present invention is applied to a projector capable of such a color display, a clear color image can be provided.

In the case of a projector using such a color separation optical system, it is preferable that a plurality of liquid crystal devices are provided corresponding to the plurality of color lights. As described above, if a plurality of liquid crystal devices are provided, the resolution can be further increased, so that a clearer and higher quality color image can be provided.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. In the following description, unless otherwise specified, the traveling direction of light is the z direction, and the direction at 12 o'clock as viewed from the z direction is the y direction, and the direction at 3 o'clock is the x direction.

A. First, an embodiment of a projector is shown in FIG. FIG. 1 is a schematic plan view showing an optical system of the projector.

According to one embodiment of the projector 100, the light source device 20, the image forming optical system 3
0, and three main parts of the projection lens 40.
Also, the liquid crystal light valves 410R, 410G, 410B
Are respectively a liquid crystal panel 411R as a liquid crystal device,
411G, 411B and incident-side polarizing plates 412R, 412G, 41 disposed on the light incident surface side and the light exit surface side, respectively.
2B and output side polarizing plates 413R, 413G, 413B
And a liquid crystal light valve 410 for green light.
Liquid crystal light valve 410 for red and blue light other than G
R and 410B include λ / 2 retardation plates 414R and 414B on the light emission side, respectively. In the following description, the liquid crystal light valves 410R, 410G, and 410B are collectively referred to as “liquid crystal light valve 410” and the liquid crystal panel 4
11R, 411G, and 411B are collectively referred to as “Liquid crystal panel 4”.
11 "and the incident-side polarizing plates 412R, 412G, and 412B.
Are collectively referred to as a “polarizing plate 412” and an emission-side polarizing plate 413.
R, 413G, and 413B may be collectively referred to as “polarizing plate 413”.

The image forming optical system 30 includes an integrator optical system 300 described later, a dichroic mirror 382,
386, color light separation optical system 38 having reflection mirror 384
0, an incident side lens 392, a relay lens 396, and a relay optical system 390 having reflection mirrors 394, 398, three field lenses 400R, 400G, 400B as condenser lenses, and three liquid crystal light valves. 410R, 410G, 410B and a cross dichroic prism 420 as a color light combining optical system
And In the following description, the field lenses 400R, 400G, and 400B may be collectively referred to as a “field lens 400”.

The light source device 20 is disposed on the incident surface side of the first lens array 320 of the image forming optical system 30, and the projection lens 40 having a plurality of lenses therein has a zoom mechanism. Is disposed on the light exit surface side of the cross dichroic prism 420.

FIG. 2 is an explanatory view showing an illumination optical system for illuminating three liquid crystal panels which are illumination areas of the projector shown in FIG. The illumination optical system includes a light source 200 provided in the light source device 20 and an integrator optical system 300 provided in the image forming optical system 30. The integrator optical system 300 includes a first lens array 320, a second lens array 340, a light shielding plate 350, a polarization conversion element array 360, and a superimposing lens 370.

In FIG. 2, for ease of explanation,
Only major components for explaining the function of the illumination optical system are shown.

The light source 200 includes a light source lamp 210 and a concave mirror 212. Radial light beams (radiated light) emitted from the light source lamp 210 are reflected by the concave mirror 212 and emitted in the direction of the first lens array 320 as a light beam substantially parallel to the optical axis of the light source.

Here, a halogen lamp, a metal halide lamp, or a high-pressure mercury lamp can be used as the light source lamp 210, and a parabolic mirror or an elliptical mirror is preferably used as the concave mirror 212. When an elliptical mirror is used, a parallelizing lens is arranged on the exit side of the concave mirror 212.

FIG. 3 is a front view (A) and a side view (B) showing the appearance of the first lens array 320. This first
In the lens array 320, small lenses 321 having a rectangular outline are arranged in a matrix of N × 2 columns (here, N = 4) in the y direction and M rows (here, M = 10) in the x direction. The external shape of each small lens 321 viewed from the z direction is set to be substantially similar to the shape of each of the liquid crystal panels 411R, 411G, and 411B. For example, if the aspect ratio (ratio of horizontal and vertical dimensions) of the image forming area of the liquid crystal panel is 4: 3, each small lens 32
The aspect ratio of 1 is also set to 4: 3. As described above, the first lens array 320 has a function of dividing a substantially parallel light beam emitted from the light source lamp 210 into a plurality of partial light beams and emitting the light beams.

The second lens array 340 has a function of guiding a plurality of partial light beams emitted from the first lens array 320 to be condensed on the polarization separation films 366 of the two polarization conversion element arrays 361 and 362. And the same number of small lenses 341 as the number of lenses constituting the first lens array 320. Note that the first lens array 320 and the second
The direction of the lenses of the lens array 340 may be in either the + z direction or the -z direction, or may be different directions as shown in FIG.

The polarization conversion element array 360 constitutes a polarization generation optical system for generating linearly polarized light in order to efficiently use unbiased illumination light. In this case, as shown in FIG. Although the element arrays 361 and 362 are arranged symmetrically with respect to the optical axis, one polarization conversion element array arranged in the same direction may be used.
FIG. 4 is a perspective view showing the appearance of one polarization conversion element array 361. The polarization conversion element array 361 includes a polarization beam splitter array 363 composed of a plurality of polarization beam splitters, and a λ / 2 phase difference plate 364 selectively disposed on a part of the light exit surface of the polarization beam splitter array 363.
(Λ is the wavelength of light). The polarizing beam splitter array 363 has a shape in which a plurality of columnar translucent members 365 each having a parallelogram cross section are sequentially bonded. Polarized light separating films 366 and reflective films 367 are alternately formed on the interface of the light transmitting member 365. λ /
The two phase difference plate 364 is selectively attached to the x-direction mapped portion of the light exit surface of the polarization separation film 366 or the reflection film 367. In this example, a λ / 2 retardation plate 364 is attached to the x-direction mapped portion of the light exit surface of the polarization separation film 366. Note that a dielectric multilayer film is used for the polarization separation film 366, and a dielectric multilayer film or a metal film is used for the reflection film 367.

The polarization conversion element array 361 has a function of converting an incident light beam into one type of linearly polarized light (for example, s-polarized light or p-polarized light) and emitting the same. FIG. 5 is a schematic diagram illustrating the operation of the polarization conversion element array 361. When unbiased light including the s-polarized component and the p-polarized component is incident on the incident surface of the polarization conversion element array 361, the incident light is
First, the light is separated into s-polarized light and p-polarized light by the polarization separation film 366. The s-polarized light is reflected almost vertically by the polarization splitting film 366 and further reflected by the reflecting film 367 before being emitted. On the other hand, the p-polarized light is
66 as it is. A λ / 2 retardation plate 364 is disposed on the exit surface of the p-polarized light transmitted through the polarization separation film 366, and the p-polarized light is converted into s-polarized light and emitted. Therefore, most of the light that has passed through the polarization conversion element array 361 is emitted as s-polarized light. When the light emitted from the polarization conversion element array 361 is desired to be p-polarized light, the λ / 2 retardation plate 364 may be disposed on the emission surface from which the s-polarized light reflected by the reflection film 367 is emitted. Good. Also, as long as the polarization directions can be aligned,
A λ / 4 retardation plate may be used, or a desired retardation plate may be provided on both the exit planes of the P-polarized light and the S-polarized light.

In the polarization conversion element array 361, one adjacent polarization separation film 366 and one reflection film 36
7, and one block composed of one λ / 2 retardation plate 364 can be regarded as one polarization conversion element 368. In the polarization conversion element array 361, such polarization conversion elements 368 are arranged in a plurality of rows in the x direction.

The configuration of the polarization conversion element array 362 is exactly the same as that of the polarization conversion element array 361, and a description thereof will be omitted.

As shown in FIG. 2, the light shielding plate 350 is disposed on the light incident surface side of the polarization conversion element array 360 and functions to adjust the amount of light incident on the polarization separation film 366 from the first lens array 320. It is. Therefore, the light shielding portion 35
1 and the openings 352 are arranged in a stripe shape. That is, the light-shielding plate 350 corresponds to the light-incident surface of each of the translucent members 365 constituting the polarization conversion element array 360 (361, 362), and has a light-shielding portion 351 having substantially the same width as the light-incident surface width. Opening 3 for passing light
52 is a plate-like body formed alternately. Light shielding part 35
1 and the opening 352 are arranged such that the partial light beam emitted from the first lens array 320 enters only the polarization separation film 366 of the polarization conversion element array 360 and does not enter the reflection film 367.

As described above, the plurality of partial light beams emitted from the first lens array 320 are separated into two partial light beams for each partial light beam by the polarization conversion element array 360, and λ / 2 The phase difference plate 364 converts the light into substantially one type of linearly polarized light (s-polarized light and s-polarized light, or p-polarized light and p-polarized light) having the same wavelength phase. The plurality of partial light beams composed of one kind of linearly polarized light are overlapped on the illumination area of each liquid crystal light valve 410 by the overlap lens 370 shown in FIG. At this time, the intensity distribution of the light illuminating the illumination area is substantially uniform.

The illumination optical system configured as described above provides illumination light having a uniform polarization direction (for example, s-polarized light and s-polarized light).
And the color light separation optical system 380 and the relay optical system 3
90, each liquid crystal panel 411R, 411G, 41
Illuminate 1B.

The color light separating optical system 380 in the image forming optical system 30 has two dichroic mirrors 382, 38.
6 and a reflection mirror 384, and has a function of separating a light beam emitted from the illumination optical system into three color lights of red (R), green (G), and blue (B). The first dichroic mirror 382 transmits the red light component of the light emitted from the illumination optical system and reflects the blue light component and the green light component. The red light R transmitted through the first dichroic mirror 382 is reflected by the reflection mirror 384 and emitted to the cross dichroic prism 420.
The red light R reflected by the reflection mirror 384 further passes through a field lens (condenser lens) 400R and reaches a liquid crystal light valve 410R for red light. The field lens 400 </ b> R converts each partial light beam emitted from the first lens array 320 of the illumination optical system to be parallel to its central axis. Note that field lenses (condenser lenses) 400G, 400 provided on the light incident surface side of the other liquid crystal light valves 410G, 410B.
The same applies to B.

The green light G of the green light G and the blue light B reflected by the first dichroic mirror 382 is reflected by the second dichroic mirror 386 and emitted toward the cross dichroic prism 420. The green light G reflected by the second dichroic mirror 386 is
Further, the light reaches the liquid crystal light valve 410G for green light through the field lens 400G. On the other hand, the blue light B transmitted through the second dichroic mirror 386 is emitted from the color light separation optical system 380 and enters the relay optical system 390.

Blue light B incident on relay optical system 390
Is the incident side lens 39 provided in the relay optical system 390.
2. The light reaches the liquid crystal light valve 410B for blue light via the reflection mirror 394, the relay lens 396, the reflection mirror 398, and the field lens 400B. The reason why the relay optical system 390 is used for the blue light B is that the length of the optical path of the blue light B is longer than the length of the optical paths of the other color lights R and G. This is to prevent a decrease in the utilization efficiency. That is, the incident side lens 39
This is for transmitting the partial light beam incident on the lens 2 to the field lens 400B as it is.

As described above, the three liquid crystal light valves 410R and 410 are separated by the color light separation optical system 380.
Each color light incident on G, 410B is modulated according to given image information (image signal) to generate an image of each color light.

First, a liquid crystal light valve 410 for red light
R will be described.
Are a liquid crystal panel 411R, an incident side polarizing plate 412R,
An output side polarizing plate 413R and a λ / 2 phase difference plate 414R are provided. The incident-side polarizing plate 412R and the outgoing-side polarizing plate 413R are respectively attached to a glass substrate (not shown). In addition, the incident side polarizing plate 412R and the outgoing side polarizing plate 413R are arranged such that their polarization axes are orthogonal to each other. Accordingly, the incident-side polarizing plate 412R is a s-polarized light transmitting polarizer that transmits s-polarized light, and the output-side polarizing plate 413R is a p-polarized light transmitting polarizer that transmits p-polarized light.

The s-polarized red light R incident on the liquid crystal light valve 410R passes through the glass substrate (not shown) and the incident side polarizing plate 412R attached thereto almost as it is, and is incident on the liquid crystal panel 411R. I do. LCD panel 41
1R converts a part of the incident s-polarized light into p-polarized light,
Only the p-polarized light is transmitted through the glass substrate (not shown) by the emission-side polarizing plate 413R arranged on the light emission surface side. The p-polarized light transmitted through the emission-side polarizing plate 413R and the glass substrate as described above is incident on the λ / 2 retardation plate 414R, is converted into s-polarized light by the λ / 2 retardation plate 414R, and is cross-dichroic prism 420 Emitted to

The liquid crystal light valve 410G for green light is
A liquid crystal panel 411G, an incident-side polarizing plate 412G, and an outgoing-side polarizing plate 413G are provided. Incident side polarizing plate 412
G and the output side polarizing plate 413G are respectively attached to a glass substrate (not shown). In addition, the incident side polarizing plate 412G and the outgoing side polarizing plate 413G are arranged such that their polarization axes are orthogonal to each other.

The s-polarized green light G incident on the liquid crystal light valve 410G passes through the glass substrate (not shown) and the incident side polarizing plate 412G almost as it is, and
It is incident on 11G. The liquid crystal panel 411G receives incident s
A part of the polarized light is converted into p-polarized light, and only the p-polarized light is transmitted through the glass substrate (not shown) by the emission-side polarizing plate 413G disposed on the light emission surface side. This p-polarized light is emitted to the dichroic prism 420 as it is.

The liquid crystal light valve 410B for blue light is
The liquid crystal light valve 410R for red light has the same configuration as the liquid crystal light valve 410R.
, An output side polarizing plate 413B, and a λ / 2 phase difference plate 414B
And The operation of the liquid crystal light valve 410B is the same as that of the case of red light, and thus the description is omitted.

The cross dichroic prism 420
The three color light beams (modulated light beams) modulated by passing through the liquid crystal light valves 410R, 410G, and 410B are combined to generate a combined light representing a color image. In the cross dichroic prism 420, a red reflection film 421 and a blue reflection film 422 are formed in an approximately X-shape at an interface between four right-angle prisms. The red reflective film 421 is formed of a dielectric multilayer film that selectively reflects red light, and the blue reflective film 422 is formed of a dielectric multilayer film that selectively reflects blue light. The three color lights are combined by the red reflection film 421 and the blue reflection film 422 to generate combined light representing a color image.

The cross dichroic prism 42
Regarding the reflection characteristics of the two reflection films 421 and 422 formed at 0, s-polarized light is superior to p-polarized light, and conversely,
As for the transmission characteristics, the p-polarized light is superior to the s-polarized light, so that the light to be reflected by the two reflection films 421 and 422 is reflected by s.
The light to be transmitted through the two reflection films 421 and 422 is defined as p-polarized light. This is to increase the light use efficiency of the cross dichroic prism 420. Therefore, at least one λ /
2 Insert the phase difference plate. The location may be either before or after the liquid crystal light valve (incident side or outgoing side). Further, it may be used by attaching to a polarizing plate.

The combined light generated by the cross dichroic prism 420 is emitted toward the projection lens 40. The projection lens 40 magnifies and projects the combined light emitted from the cross dichroic prism 420 to display a color image on a screen (not shown).

B. Configuration of Liquid Crystal Panel Next, an example of a configuration of the liquid crystal panels 411R, 411G, and 411B will be described with reference to FIGS.

FIG. 6 is a plan view of the base substrate 510 constituting the liquid crystal panel 411 together with the components formed thereon viewed from the counter substrate 520 side.
FIG. 7 is a sectional view taken along line HH ′ of FIG. 6.

As shown in FIG. 7, the liquid crystal panel 411
Includes a base substrate 510 serving as a light emitting side substrate and a counter substrate 520 serving as a light incident side substrate. The base substrate 510 and the counter substrate 520 are fixed with a sealant 552. Base substrate 510 and counter substrate 52
A liquid crystal 550 is hermetically sealed in a space surrounded by 0 and the sealing material 552. The base substrate 510 is made of, for example, a quartz substrate, a glass substrate, or a silicon substrate, and the counter substrate 520 is made of, for example, a glass substrate or a quartz substrate. The liquid crystal 550 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed. The liquid crystal 550 assumes a predetermined alignment state by the alignment films 516 and 522 when no electric field is applied from the pixel electrode 59a, which will be described in detail later. The sealant 552 is an adhesive made of, for example, a photocurable resin or a thermosetting resin. In the sealing material 552,
A gap material, such as glass fiber or glass beads, for adjusting the distance between the two substrates to a predetermined value is mixed.

As shown in FIG. 6, the base substrate 510
A sealing material 552 is provided along the edge thereof, and a third light-shielding film 553 as a frame defining the periphery of the image display area is provided in parallel with the inside of the sealing material 552.
Examples of the material of the third light-shielding film 553 include a simple metal, an alloy, and a metal silicide containing at least one of opaque high melting point metals such as Ti, Cr, W, Ta, Mo, and Pb.

A data line driving circuit 501 for driving the data line 56a by supplying an image signal to the data line 56a at a predetermined timing is provided outside the sealing material 552.
The external circuit connection terminals 502 are provided along one side of the base substrate 510. Also, by supplying a scanning signal to the scanning line 53a at a predetermined timing, the scanning line 53a is supplied.
The scanning line driving circuit 504 for driving a is provided along two sides adjacent to this one side. If the delay of the scanning signal supplied to the scanning line 53a does not matter, it goes without saying that the scanning line driving circuit 504 may be provided on only one side. Further, the data line driving circuits 501 may be arranged on both sides along the sides of the image display area. Further, the base substrate 5
On the remaining one side, a plurality of wirings 50 for connecting between the scanning line driving circuits 504 provided on both sides of the image display area are provided.
5 are provided. At least one corner of the counter substrate 520 is provided with an upper / lower conductive member 506 for establishing electrical continuity between the base substrate 510 and the counter substrate 520. In addition, on the base substrate 510, in addition to the data line driving circuit 501, the scanning line driving circuit 504, etc., a sampling circuit for applying an image signal to the plurality of data lines 56a at a predetermined timing, a plurality of data lines 56a A precharge circuit for supplying a precharge signal of a predetermined voltage level prior to the image signal, an inspection circuit for inspecting the quality, defects, and the like of the electro-optical device during manufacturing or shipping. Good.

Instead of providing the data line driving circuit 501 and the scanning line driving circuit 504 on the base substrate 510, for example, a driving LSI mounted on a TAB (Tape Automated Bonding) substrate, You may make it electrically and mechanically connect via the provided anisotropic conductive film.

The area inside the third light-shielding film 553 becomes an image display area. FIG. 8 is an equivalent circuit of various elements, wiring, and the like constituting an image display area of the liquid crystal panel 411.
In the image display area of the liquid crystal panel 411, a plurality of pixel electrodes 59a are provided in a matrix. Further, a TFT 530 which is a driving element for controlling the pixel electrode 59a is formed for each pixel electrode 59a, and the data line 56a to which the image signals S1, S2,.
It is electrically connected to the source of the TFT 530.
Further, the scanning line 53a is electrically connected to the gate of the TFT 530, and is configured to apply the scanning signals G1, G2,..., Gm to the scanning line 53a at a predetermined timing. The pixel electrode 59a is electrically connected to the drain of the TFT 530. By closing the switch of the TFT 530 for a certain period, the image signals S1, S2,..., Sn supplied from the data line 56a can be written at a predetermined timing. The image signals S1, S2,..., Sn of a predetermined level written in the liquid crystal 550 (FIGS. 7 and 10) via the pixel electrode 59a are supplied to the counter substrate 520.
The counter electrode 521 (FIG. 7, FIG.
10) is held for a certain period. The liquid crystal 550 (FIGS. 7 and 10) modulates light by changing the orientation and order of the molecular assembly according to the applied voltage level, thereby enabling gray scale display. Here, in order to prevent the held image signal from leaking, the pixel electrode 59a and the counter electrode 52 are used.
1 (FIGS. 7 and 10), a storage capacitor 570 is provided in parallel with the liquid crystal capacitor formed between the storage capacitor 570 and the liquid crystal capacitor 570.

FIG. 9 is a plan view of a plurality of pixel groups adjacent to each other on the base substrate 510 on which data lines, scanning lines, pixel electrodes, etc. are formed. FIG. 10 is a cross-sectional view taken along the line II ′ of FIG. It is. In FIG. 10, the scale of each layer and each member is different so that each layer and each member have a size recognizable in the drawing.

As shown in FIGS. 9 and 10, on the base substrate 510, a plurality of transparent pixel electrodes 59a (contours are indicated by dotted lines 59a) are provided in a matrix. The pixel electrode 59a is made of, for example, ITO (In
It consists of a transparent conductive thin film such as a dium tin oxide film.

The data lines 56a, the scanning lines 53a, and the capacitance lines 53b extend along the vertical and horizontal boundaries of the pixel electrodes 59a.
Is provided. In the present embodiment, the data line 56a
Is formed of a light-shielding and conductive thin film such as a low-resistance metal film such as Al or an alloy film such as metal silicide.

The first interlayer insulating film 581 provided on the scanning lines 53a and the capacitance lines 53b has a high concentration source region 51
A contact hole 55 leading to d and a first contact hole 58a leading to the high-concentration drain region 51e are respectively formed. Note that the capacitance line 53b is formed so as to avoid the first contact hole 58a in a region intersecting with the data line 56a in which the first contact hole 58a is formed. That is, the capacitance line 53b is
The first contact hole 58a is configured to have no electrical contact.

On the first interlayer insulating film 581, a first barrier layer 580 connected to the high-concentration drain region 51e via the first contact hole 58a, and a contact hole 5
A second barrier layer 585 connected to the capacitance line 53b via the layer 18a is formed. The second barrier layer 585 is the same film as the first barrier layer 580, and is overlapped with a portion of the capacitance line 53b extending along the data line 56a. The second barrier layer 585 and the capacitance line 53b are electrically connected via a contact hole 518a. Specific materials for the first barrier layer 580 and the second barrier layer 585 include opaque refractory metals such as Ti, Cr, W, and the like.
A simple metal, an alloy, a metal silicide, or the like containing at least one of Ta, Mo, and Pb is included. If these are used, the refractory metal and the I that constitute the pixel electrode 59a are formed.
Even when the refractory metal is in contact with the TO film, the refractory metal does not corrode, so that good electrical connection can be established between the first barrier layer 580 and the pixel electrode 59a. However, the first barrier layer 580 and the second barrier layer 585 may be formed of a conductive polysilicon film. Even in this case, the function of increasing the storage capacity 570 and the relay function can be sufficiently exhibited. In this case, in particular, stress due to heat or the like is less likely to be generated between the first interlayer insulating film 581 and the first interlayer insulating film 581, which helps to prevent cracks.

First barrier layer 580 and second barrier layer 5
A second interlayer insulating film 54 is formed on 85.
The data line 56a is formed thereon.

Further, a third interlayer insulating film 57 having a second contact hole 58b to the first barrier layer 580 is formed on the data line 56a and the second interlayer insulating film 54. The pixel electrode 59a is provided with the third
It is provided on the upper surface of the interlayer insulating film 57.

At the position closest to the liquid crystal on the base substrate 510, there is provided an alignment film 516 on which a predetermined alignment process such as a rubbing process has been performed. The alignment film 516 is made of, for example, an organic thin film such as a polyimide thin film.

On the base substrate 510, the scanning lines 53
a and the data line 56a intersect, a TF in which the scanning line 53a is arranged to face the channel region 51a ', respectively.
T530 is formed. The TFT 530 includes a scanning line 53a forming a gate electrode, a channel region 51a 'of a semiconductor layer 51a in which a channel is formed by an electric field from the scanning line 53a, and an insulating thin film 52 insulating the scanning line 53a from the semiconductor layer 51a. A data line 56a forming a source electrode; a low-concentration source region 51b and a low-concentration drain region 51c of the semiconductor layer 51a; and a high-concentration source region 51d and a high-concentration drain region 51e of the semiconductor layer 51a.
And The semiconductor layer 51a is formed of a polysilicon film or the like. The channel region 51a 'is arranged corresponding to the intersection region between the scanning line 53a and the data line 56a. Further, a high concentration source region 51d, a low concentration source region 51b, and a channel region
a ′, the low-concentration drain region 51c and the high-concentration drain region 51e are arranged so as to overlap the data line 56a and to be covered by the data line. Scanning line 53a
The high-concentration source region 51d and the low-concentration source region 51b are arranged below the data line 56a extending to one side with the low-concentration drain region 51c and the high-concentration drain region below the data line 56a extending to the other side. 51e are arranged. The high concentration drain region 51e is connected to the pixel electrode 59a via the first contact hole 58a and the first barrier layer 580. On the other hand, the high concentration source region 5
1d is the data line 5 via the third contact hole 55.
6a. In the liquid crystal panels 411R, 411G, and 411B of the present embodiment, the first contact hole 58a and the third contact hole 55 are formed so as to overlap with the data line 56a serving as a non-display area, thereby reducing the aperture ratio due to the contact holes. And the occurrence of irregular asperities in the opening area of each pixel due to the presence of the contact holes. Further, by disposing a part of the semiconductor layer 51a so as to overlap the data line 56a, the data line 56a is used as a part of a light-shielding mask for preventing incident light from the counter substrate 520 from entering the TFT 530. I have.

As shown in FIGS. 9 and 10, on the base substrate 510, a storage capacitor 570 is formed. The storage capacitor 570 includes a capacitor line 53b as a second capacitor electrode.
, An insulating thin film 52, and a capacitance line 53 through the insulating thin film 52.
b and the first capacitance electrode 51f disposed opposite to the first capacitance electrode 51b. Further, the storage capacitor 570 includes a capacitor line 53b,
It is also constituted by the first interlayer insulating film 581 and a part of the first barrier layer 580 opposed to the capacitance line 53b via the first interlayer insulating film. As described above, the storage capacitor 570 is provided not only below the capacitance line 53b but also above the capacitance line 53b.
Therefore, a large storage capacity 570 can be formed by effectively using a limited area. Note that the capacitance line 53b is made of the same conductive polysilicon film as the scanning line 53a. The capacitance electrode 51f extends from the drain region 51e of the semiconductor layer 51a.
The capacitor line 53b includes a constant potential source such as a negative power source and a positive power source supplied to a peripheral circuit (eg, a scanning line driving circuit, a data line driving circuit, and the like) for driving the liquid crystal panel, a ground power source, and a counter electrode. Since the optimum constant potential is supplied from among the supplied constant potential sources, the first capacitor electrode 51f and the barrier layer 5
80, a stable storage capacity 570 can be constructed.

Further, as shown in FIG. 10, the base substrate 510 and the TFT
The first light-shielding film 511 is provided between the first light-shielding film 511. More specifically, as shown in FIG.
The first light-shielding film 511 is formed in a stripe shape along the scanning line 53a, and a portion intersecting with the data line 56a is formed wide downward in the figure. The channel region 51a ′ and its adjacent region are provided at positions that cover the channel region 51a ′ when viewed from the base substrate side.
The first light-shielding film 511 prevents reflected light and the like from the base substrate 510 from entering the channel region 51 a ′, the low-concentration source region 51 b, and the low-concentration drain region 51 c of the TFT 530, which are easily excited by light. This is provided in order to prevent the characteristics of the TFT 530 from changing due to the generation of a leak current caused by light. First light shielding film 511
Is a simple metal containing at least one of Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), and Pb (lead), which are preferably opaque refractory metals; It is composed of an alloy, a metal silicide, or the like. The first light shielding film 511 includes a negative power supply supplied to a peripheral circuit for driving the liquid crystal panel (for example, a scanning line driving circuit, a data line driving circuit, and the like), a constant potential source such as a positive power supply, a ground power supply, Among the constant potential sources supplied to the electrodes, it is preferable to electrically connect to an optimal constant potential. As described above, by fixing the first light-shielding film 511 to a constant potential, malfunction of the TFT 530 can be prevented.

Further, the first light shielding film 511 and the plurality of TFTs 5
A base insulating film 512 is provided between the base insulating film 512 and the base insulating film 512.
The base insulating film 512 is provided to electrically insulate the semiconductor layer 51 a forming the TFT 530 from the first light-shielding film 511. Further, the base insulating film 512 is formed over the entire surface of the base
530 also has a function as a base film. That is,
The TFT 530 has a function of preventing deterioration of the characteristics of the TFT 530 due to roughening of the surface of the base substrate 510 during polishing or contamination remaining after cleaning. The base insulating film 512 is made of, for example, NSG (non-doped silicate glass), PSG (phosphorus silicate glass), BSG (boron silicate glass), BP
It is made of a highly insulating glass such as SG (boron phosphorus silicate glass), a silicon oxide film, a silicon nitride film, or the like. Due to the base insulating film 512, the first light-shielding film 511 is TF
It is also possible to prevent a situation in which T530 and the like are contaminated.

Note that one pixel per pixel is provided on the counter substrate 520.
A microlens may be formed so as to correspond to one or a plurality of pixels. By doing so, the incident light can be collected inside the opening, so that the projected image can be brightened.

On the other hand, an opposing electrode 521 is provided on the opposing substrate 520 over the entire surface thereof.
Alignment film 52 that has been subjected to a predetermined alignment process such as a rubbing process
2 are provided. The counter electrode 521 is made of, for example, IT
It is made of a transparent conductive thin film such as an O film. Also, the alignment film 522
Consists of an organic thin film such as a polyimide thin film.

Further, as shown in FIG. 10, a second light-shielding film 523 constituting a part of a light-shielding mask is provided on the opposite substrate 520.
Is provided. The second light-shielding film 523 and the data line 56a described above prevent incident light from the counter substrate 520 from entering the TFT 530. Further, the second light shielding film 523 also has a function of improving the contrast ratio. As a material of the second light shielding film 523,
Similarly to the light-shielding film 511, T which is an opaque refractory metal is used.
A simple metal, an alloy, a metal silicide, or the like containing at least one of i, Cr, W, Ta, Mo, and Pb is included.

The TFT 530 preferably has the LDD structure as described above, but may have an offset structure in which impurities are not implanted in the low-concentration source region 51b and the low-concentration drain region 51c. Impurities are implanted at a high concentration by using the gate electrode as a mask as a mask, and a self-aligned T type in which the high concentration source region 51d and the high concentration drain region 51e are formed in a self-aligned manner.
It may be FT.

In the present embodiment, the TFT 530 has a single gate structure in which only one gate electrode composed of a part of the scanning line 53a is disposed between the high-concentration source region 51d and the high-concentration drain region 51e. May be provided with two or more gate electrodes. When a TFT is formed with a dual gate or a triple gate or more as described above, a leak current at a junction between a channel and a source / drain region can be prevented, and a current in an off state can be reduced. If at least one of these gate electrodes has an LDD structure or an offset structure, the off-state current can be further reduced, and a stable switching element can be obtained.

Further, in this embodiment, the example of the normal stagger type or coplanar type polysilicon TFT has been described. However, another type of TFT such as an inverse stagger type TFT or an amorphous silicon TFT may be used.

C. Angle control of incident light on a liquid crystal panel In the projector of this embodiment, FIGS.
As shown in (B), a field lens 400 which is a condenser lens provided on the incident side of the liquid crystal panel 411.
The optical axis FCL of the light incident on the central axis FCL0
, The angle of light incident on the liquid crystal panel 411 is regulated. The optical axis FCL of the field lens 400 is shifted so as to reduce the incident angle of the light hitting the TFT 530 when the central axis FCL0 of the light incident on the field lens 400 coincides with the optical axis FCL of the field lens 400. .

This situation is shown in FIGS. 12A and 12B.
This will be described with reference to FIG. FIGS. 12A and 12B are cross-sectional views corresponding to FIGS. 22 and 23 described above, respectively. The light-shielding mask 6 includes a second light-shielding film 523 (FIG. 10) formed on the opposite substrate 520 and the base substrate 5.
The data line 56a (FIG. 10) formed on the substrate 10 is combined with a portion functioning as a light-shielding mask, but is illustrated on the counter substrate 520 for simplicity of description.

Here, it is assumed that the case where the central axis FCL0 of the light incident on the field lens 400 coincides with the optical axis FCL of the field lens 400 is shown in FIGS. When the optical axis FCL of the field lens 400 is shifted as in the present embodiment, the light A in FIGS.
1 to A4, B1 to B4, C1 to C4 are respectively shown in FIG.
2 (A), light A1 ′ to A4 ′, B1 ′ to FIG.
B4 'and C1' to C4 'are incident at angles. As can be seen from the comparison of these figures, in the projector of the present embodiment, the optical axis F of the field lens 400 is
By shifting CL, when the central axis FCL0 of the light incident thereon coincides with the optical axis FCL of the field lens 400, the light A1, C impinging on the TFT 530
4 (indicated by dotted lines in FIGS. 12A and 23B), the incident angles α1 and α2 are reduced. As a result, light A
1, C4 are angles β1, β2 like light A1 ′, C4 ′.
(Β1 <α1, β2 <α2).
It will not hit FT530.

As described above, in the projector of this embodiment, the central axis FC of the light incident on the field lens 400 is
By shifting the central axis FCL0 and the optical axis FCL in parallel so as to reduce the incident angles α1 and α2 of the lights A1 and C4 hitting the TFT 530 when L0 and the optical axis FCL of the field lens 400 match. And the angle of light incident on the liquid crystal panel 411. With such a configuration, since oblique light does not hit the TFT 530, no damage, destruction, or malfunction of the TFT 530 is caused.

Further, as shown in FIG. 11B, the optical axis OCL of the projection lens 40 is
If the light is shifted in the same direction as the optical axis FCL in parallel with the central axis FCL0 of the incident light, the light use efficiency can be increased. Because the field lens 400
Of the liquid crystal panel 4 by shifting the optical axis FCL of
Since the light modulated by 11 and traveling toward the projection lens 40 is inclined toward the optical axis FCL, the optical axis OCL of the projection lens 40 is
Is shifted in the same direction as the optical axis FCL of the field lens 400, the modulated light can be efficiently taken into the projection lens 40.

D. Second Embodiment A second embodiment of the present invention will be described with reference to FIGS. 13, 14A and 14B. This embodiment is an example in which a microlens array 526 is provided on the incident side of the liquid crystal panel 411. Unlike the case of the first embodiment described above, instead of shifting the optical axis of the field lens 400, as shown in FIG. 13, the central axis FCL0 of light incident on the microlens array and the microlens array The angle of light incident on the liquid crystal panel 411 is restricted by shifting the center MCL. The other points are the same as in the first embodiment. Detailed description and illustration of the same parts as those in the first embodiment are omitted. 13 and FIG.
In FIG. 14A and FIG. 14B, the same parts as those in the first embodiment described above are denoted by the same reference numerals.

FIG. 13 is a diagram showing the relationship between the central axis FCLO of the incident light, the center MCL of the microlens array 526, and the optical axis OCL of the projection lens 40 in the second embodiment, FIGS. (B) is the same as FIG.
FIG. 14 is a sectional view corresponding to FIG. 2A and FIG.
FIG. 14A shows a case where the central axis FCL0 of light incident on the microlens array 526 and the center MCL of the microlens 526 are shifted, and FIG. 14B shows a comparative example (for the microlens array 526). (When the center axis FCL0 of the incident light coincides with the center MCL of the microlens 526).

In the present embodiment, as shown in FIGS. 13 and 14A, a microlens array 5 having a plurality of microlenses 527 is provided on the incident side of a liquid crystal panel 411.
26 are provided. Micro lens array 526
As shown in FIG. 14A, is bonded to the incident side of the counter substrate 520 with an adhesive 525. That is, the micro lens array 526 is
It is provided above.

Further, as shown in FIG. 13, the center MCL of the microlens array 526 is shifted with respect to the central axis FCL0 of the incident light. This situation is shown in FIG.
A specific description will be given with reference to FIG. Figure 1
As shown in FIG. 4B, the central axis FCL0 of light incident on the microlens array 526 and the microlens array 5
When the center MCL of the TFT 26 coincides, the TFT 53
It is assumed that light A hitting 0 exists. In the present embodiment, the center MCL of the microlens array 526 is shifted so as to reduce the incident angle α of the light A. As a result, the light A is incident at an angle β (β <α) like the light A ′ shown in FIG.

As described above, in the projector of this embodiment, when the central axis FCL0 of the light incident on the microlens array 526 coincides with the center MCL of the microlens array 526, the light A1 and A
In order to reduce the incident angles α1 and α2 of
By shifting CL0 and the center MCL of the microlens array 526, the angle of light incident on the liquid crystal panel 411 is regulated. With such a configuration, the same effect as that of the first embodiment described above can be obtained.

Further, as shown in FIG. 13, if the optical axis OCL of the projection lens 40 is shifted in the same direction as the center MCL of the microlens array 526 and parallel to the center axis FCL0 of the incident light, It is possible to increase the light use efficiency. Because the micro lens array 52
6, the light modulated by the liquid crystal panel 411 and directed toward the projection lens 40 is tilted toward the center MCL, so that the optical axis OC of the projection lens 40 is shifted.
This is because if L is shifted in the same direction as the center MCL of the microlens array 526, the modulated light can be efficiently taken into the projection lens 40. However, shifting the optical axis OCL of the projection lens 40 in this manner is not essential.

E. Third Embodiment A third embodiment of the present invention will be described with reference to FIGS. 15, 16A and 16B. This embodiment differs from the first embodiment described above in that instead of shifting the optical axis of the field lens 400, the light source 200
Of the liquid crystal panel 41 by tilting the optical axis OA of the liquid crystal panel 411 with respect to the normal line HCL0 of the opposite substrate 520 of the liquid crystal panel 411.
This is an example in which the angle of light incident on the light source 1 is restricted.
The other points are the same as in the first embodiment.
Detailed description and illustration of the same parts as those in the first embodiment are omitted. Note that FIG. 15, FIG. 16 (A), FIG.
In (B), parts common to the first embodiment described above are denoted by the same reference numerals.

FIG. 15 is a diagram showing the relationship between the normal line HCLO of the counter substrate 520, the optical axis OA of the light source 200, and the optical axis OCL of the projection lens 40 in the third embodiment.
(A) and FIG. 16 (B) correspond to FIG. 22 and FIG.
It is sectional drawing corresponding to FIG.

Here, the case where the optical axis OA of the light source 200 is parallel to the normal line HCL0 of the counter substrate 520 is shown in FIG.
2. Assume that FIG. When the optical axis OA of the light source is inclined with respect to the normal line HCL0 as in the present embodiment, the light beams A1 to A4, B1 to B4, and C1 to C4 in FIGS. Light A1 'to A in FIG.
4 ′, B1 ′ to B4 ′, and C1 ′ to C4 ′. As can be seen from the comparison between these figures, in the projector of the present embodiment, the light source 2 is tilted with respect to the normal line HCL0 so that the light source 2
When the optical axis OA of 00 is parallel to the normal line HCL0 of the counter substrate 520, the light beams A1 and C4 hit the TFT 530.
The incident angles α1 and α2 in FIGS. 16A and 16B are indicated by dotted lines. As a result, light A1,
C4 has angles β1, β2 (β
1 <α1, β2 <α2), and the TFT
530 will not be hit.

As described above, in the projector of this embodiment, the optical axis OA of the light source 200 is
Light A1, A2 hitting the TFT 350 when parallel to L0
Light source 200 such that incident angles α1, α2 of
Is tilted with respect to the normal line HCL0 of the counter substrate 520 to regulate the angle of light incident on the liquid crystal panel 411. With such a configuration, the same effect as that of the first embodiment described above can be obtained.

Further, as shown in FIG. 15, if the optical axis OCL of the projection lens 40 is shifted in the same direction as the optical axis OA of the light source 200 and parallel to the normal line HCL0 of the counter substrate 520, It is possible to increase the light use efficiency. This is because, by tilting the optical axis OA of the light source 200, the light modulated by the liquid crystal panel 411 and heading toward the projection lens 40 tilts, so that the optical axis OC of the projection lens 40 is tilted.
This is because if L is shifted in the same direction as the optical axis OA of the light source 200, the modulated light can be efficiently taken into the projection lens 40. Further, at this time, if the shift is made parallel to the normal line HCL0 of the counter substrate 520, the phenomenon that the projected image is distorted into a trapezoid can be prevented. However, shifting the optical axis OCL of the projection lens 40 in this manner is not essential.

Further, in the present embodiment, a microlens array 526 having a plurality of microlenses 527 may be provided on the incident side of the liquid crystal panel 411. FIG.
FIGS. 17A and 17B are cross-sectional views illustrating an example in which the microlens array 526 is provided on the incident side of the liquid crystal panel 411, and correspond to FIG. 12A described above. As shown in FIGS. 17A and 17B, the microlens array 526 has an adhesive 5 on the incident side of the opposing substrate 520.
25. That is, the microlens array 526 is provided on the counter substrate 520. As described above, even when the microlens array 526 is provided on the incident side of the liquid crystal panel 411, the above effect can be obtained. However, at this time, FIG.
As shown in (A), the optical axis M of the micro lens 527
If CL0 coincides with the center PCL of the pixel PX, a part of the incident light (the hatched part in the drawing) may be blocked by the light shielding mask 6. If a part of the incident light is blocked as described above, the projected image may be darkened. Therefore, as shown in FIG. 17B, the optical axis MCL0 of the micro lens 527 is set to the pixel PX.
Is shifted toward the light source 200 side with respect to the center PCL, it is possible to prevent the incident light from being blocked, and to reduce a decrease in the brightness of the projected image.

F. Fourth Embodiment In each of the above embodiments, the central axis FCL0 of the light incident on the liquid crystal panel 411 or the light emitted from the liquid crystal panel 411 (in the case of the third embodiment, the optical axis OA of the light source 200 is The liquid crystal light valve 410 corresponds to this.
Preferably coincides with the clear visual direction. Thereby, in addition to the effects obtained by the above embodiments, the contrast of the liquid crystal light valve 410 is improved, and as a result, the effect that the contrast of the projected image can be improved can be obtained. Here, when it is difficult to make the clear viewing direction of the liquid crystal light valve 410 coincide with the central axis FCL0, the use of a viewing angle compensation film (not shown) is effective. The viewing angle compensation film may be disposed on either the light incident side or the light exit side of the liquid crystal panel 411. However, the liquid crystal panel 411 and the polarizing plate 4 on the light incident side
12 or between the liquid crystal panel 411 and the polarizing plate 413 on the light emission side. The viewing angle compensation film may be attached to the polarizing plate 412 or 413, or may be attached to the counter substrate 520 or the base substrate 510.

FIGS. 18 to 20 show the viewing angle characteristics of the liquid crystal light valve 410 based on simulation results in order to show the effect of using the viewing angle compensation film. These figures show viewing angle characteristics when a voltage is applied in a normally white mode (a light is shut when a voltage is applied and light is transmitted when no voltage is applied) in a TN (twisted nematic) mode. The upper diagram shows the brightness distribution at the black level in the liquid crystal light valve 410, and the lower diagram shows the relationship between the angle in the vertical and horizontal directions and the brightness.

First, FIG. 18 shows the viewing angle characteristics in the case where the viewing angle compensation film is not used, that is, in the comparative example. The brightness changes extremely in the vertical and horizontal directions due to the change in the angle of the incident light. Further, there is an imbalance in the distribution of brightness.

On the other hand, FIG. 19 shows viewing angle characteristics when the viewing angle compensation film is arranged on the light incident side of the liquid crystal panel 411. The central axis FCL0 of light incident on the liquid crystal panel 411 by the viewing angle compensation film (this corresponds to the optical axis OA of the light source 200 in the case of the third embodiment).
Is matched with the clear viewing direction of the liquid crystal light valve 410, so that the brightness in the left-right direction does not depend on the angle of the incident light. The brightness distribution is also uniform in the left-right direction.

FIG. 20 shows viewing angle characteristics when the viewing angle compensation film is disposed on the light exit side of the liquid crystal panel 411. In this case, contrary to FIG. 19, the brightness in the vertical direction does not depend on the angle of the incident light, and the distribution of brightness is uniform in the vertical direction.

G. Fifth Embodiment In each of the above embodiments, a viewing angle compensation film may be disposed on the light incident side and the light exit side of the liquid crystal panel 411. Thereby, in addition to the effects obtained by the above embodiments, the viewing angle dependency of the liquid crystal light valve 410 is reduced, and as a result, the uniformity of the brightness and the color tone of the projected image can be improved. At this time, the viewing angle compensation film is composed of the liquid crystal panel 411 and the polarizing plate 41 on the light incident side.
2 and between the liquid crystal panel 411 and the polarizing plate 413 on the light emission side. The viewing angle compensation film may be attached to the polarizing plates 412 and 413, or may be attached to the counter substrate 520 or the base substrate 510.

FIG. 21 shows viewing angle characteristics when one viewing angle compensation film is disposed on each of the light incident side and the light emitting side of the liquid crystal panel 411. In this case, as compared with the case of the comparative example shown in FIG. 18, the brightness in the vertical and horizontal directions hardly depends on the angle of the incident light. Further, the distribution of brightness is well-balanced and uniform throughout.

H. Other Embodiments The present invention is not limited to the above-described examples and embodiments, and can be carried out in various modes without departing from the gist of the invention. Is also possible.

For example, in the above embodiment, the TFT 530 is used as the driving element, but a driving element formed of a thin film diode may be used instead of the TFT 530.

In the above embodiment, an example of a projector using three liquid crystal devices has been described. However, the present invention can be applied to a projector using one, two, or four or more liquid crystal devices. Can be.

Further, in the above embodiment, the case where the present invention is applied to a projector using a transmissive liquid crystal panel has been described. However, the present invention can be applied to a projector using a reflective liquid crystal panel. it can. here,
The “transmission type” means that the liquid crystal panel transmits light, and the “reflection type” means that the liquid crystal panel reflects light.

In a projector employing a reflective liquid crystal panel, a dichroic prism emits light in red,
In addition to being used as a color light separating unit that separates light into three colors of green and blue, it may also be used as a color light combining unit that combines modulated three colors of light and emits light in the same direction.

Further, as the projector, there are a front projector that projects from the direction in which the projected image is observed, and a rear projector that projects from the side opposite to the direction in which the projected image is observed. It is also applicable to

[0107]

As described above, according to the present invention, since the angle of light incident on the liquid crystal device does not impinge on the drive element, the drive element is prevented from being damaged, broken, or malfunctioned. Can be. Therefore, the quality of the projected image can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view showing an optical system of a projector according to the invention.

FIG. 2 is an explanatory diagram of an illumination optical system constituting the optical system of FIG. 1;

FIG. 3 is a front view (A) and a side view (B) of a first lens array constituting an illumination optical system.

FIG. 4 is a perspective view illustrating an appearance of a polarization conversion element array.

FIG. 5 is a schematic view illustrating the operation of a polarization conversion element array.

FIG. 6 is a plan view of a base substrate of the liquid crystal panel according to the embodiment of the present invention, as viewed from a counter substrate side.

FIG. 7 is a sectional view taken along line H-H ′ of FIG. 6;

FIG. 8 is an equivalent circuit diagram of various elements, wiring, and the like constituting an image display area of the liquid crystal panel according to the embodiment of the present invention.

FIG. 9 is a plan view of a pixel group on a base substrate of a liquid crystal panel according to the embodiment of the present invention.

FIG. 10 is a sectional view taken along the line I-I ′ of FIG. 9;

FIGS. 11A and 11B are plan views showing a first embodiment of the present invention.

FIGS. 12A and 12B are cross-sectional views illustrating the effect of the first embodiment of the present invention.

FIG. 13 is a plan view illustrating a second embodiment of the present invention.

FIG. 14A is a cross-sectional view for explaining effects of the second embodiment of the present invention. FIG. 14B is a cross-sectional view illustrating a comparative example.

FIG. 15 is a plan view illustrating a third embodiment of the present invention.

FIGS. 16A and 16B are cross-sectional views for explaining effects of the second embodiment of the present invention.

FIGS. 17A and 17B are cross-sectional views for explaining effects of the second embodiment of the present invention.

FIG. 18 is a diagram illustrating viewing angle characteristics of a liquid crystal light valve when a viewing angle compensation film is not used.

FIG. 19 is a diagram illustrating viewing angle characteristics of a liquid crystal light valve when a viewing angle compensation film is arranged on the light incident side.

FIG. 20 is a diagram showing viewing angle characteristics of a liquid crystal light valve when a viewing angle compensation film is arranged on the light exit side.

FIG. 21 is a diagram illustrating viewing angle characteristics of a liquid crystal light valve when viewing angle compensation films are arranged on a light incident side and a light emitting side.

FIG. 22 is a perspective view of a conventional liquid crystal device viewed from a light incident surface side.

FIG. 23 is an enlarged sectional view taken along line FF ′ of FIG. 6;

FIG. 24 is an enlarged sectional view taken along line GG ′ of FIG. 6;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Base substrate 2 Counter substrate 3 Drive element 4 Opening 5 Liquid crystal 6 Light-shielding mask 20 Light source device 30 Image forming optical system 40 Projection lens 100 Projector 200 Light source 210 Light source lamp 212 Concave mirror 300 Integrator optical system 320 First lens array 321 Small lens 340 Second lens array 341 Small lens 350 Light shield 351 Light shield 352 Opening 360, 361, 362 Polarization conversion element array 363 Polarization beam splitter array 364 λ / 2 phase plate 365 Light transmissive member 366 Polarization separation film 367 Reflection film 368 Polarization conversion element 370 Superposition lens 380 Color light separation optical system 382, 386 Dichroic mirror 384 Reflection mirror 390 Relay optical system 392 Incident lens 394, 398 Reflection mirror 396 Relay lens 400, 00R, 400G, 400B Field lens 410, 410R, 410G, 410B Liquid crystal light valve 411, 411R, 411G, 411B Liquid crystal panel 412, 412R, 412G, 412B Incident-side polarizing plate 413, 413R, 413G, 413B Exit-side polarizing plate 420 Cross Dichroic prism 51a Semiconductor layer 51a 'Channel region 51b Low-concentration source region 51c Low-concentration drain region 51d High-concentration source region 51e High-concentration drain region 51f First capacitance electrode 52 Insulating thin film 53a Scanning line 53b Capacity line 54 Second interlayer insulating film 55 Third contact hole 56a Data line 57 Third interlayer insulating film 58a First contact hole 59a Pixel electrode 501 Data line drive circuit 502 External circuit connection terminal 504 Scan line drive circuit 505 Wiring 506 Upper and lower conductive material 510 Base substrate 511 First light shielding film 512 Base insulating film 516 Alignment film 518a Contact hole 520 Counter substrate 521 Counter electrode 522 Alignment film 523 Second light shielding film 525 Adhesive 526 Micro lens array 527 Micro lens 530 Thin film transistor ( TFT) 550 Liquid crystal 552 Sealing material 553 Third light-shielding film 570 Storage capacitor 580 First barrier layer 581 First interlayer insulating film 585 Second barrier layer FCL Optical axis of field lens 400 FCL0 Optical axis of incident light Light of OCL projection lens 40 Axis MCL Center of microlens array OA Optical axis of light source 200 HCL0 Normal of counter substrate 520 MCL0 Optical axis of microlens 527 PX Pixel PCL Center of pixel PX A, A1-A4, B, B1-B4, C, C1- 4 light A ', A1'~A4', B ', B1'~B4', C ',
C1 ′ to C4 ′ Light α, α1, α2, β, β1, β2 Incident angles G1, G2,..., Gm Scanning signals S1, S2,.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G02B 7/00 G02B 7/00 B G02F 1/13 505 G02F 1/13 505 1/1335 1/1335 G03B 33 / 12 G03B 33/12 F term (reference) 2H042 AA15 AA28 CA06 CA08 CA14 CA17 2H043 AB02 AB10 2H049 BA02 BA06 BA42 BB03 BC22 2H088 EA14 EA15 EA19 HA08 HA13 HA16 HA18 HA20 HA21 HA24 HA25 MA01 2H091 FA05Z FAX FA08Z FAX FA29Z FA41Z LA15 LA16 MA07

Claims (18)

[Claims] 1. A projector comprising: a light source; a liquid crystal device that modulates light emitted from the light source; and a projection lens that projects light modulated by the liquid crystal device. A base substrate provided with a plurality of pixel electrodes arranged in a matrix and a driving element provided for each of the pixel electrodes and electrically connected to the pixel electrode; and at least a part of the driving element. And a liquid crystal provided between the base substrate and the counter substrate, wherein the light incident on the liquid crystal device is restricted to an angle such that the light does not hit the driving element. A projector characterized by being made. 2. The projector according to claim 1, further comprising: a condenser lens provided on a light incident side of the liquid crystal device, wherein a central axis of light incident on the condenser lens and an optical axis of the condenser lens are equal to each other. The angle of light incident on the liquid crystal device is regulated by shifting the central axis and the optical axis of the condenser lens in parallel so as to reduce the incident angle of light that strikes the driving element when the light is incident. A projector comprising: 3. The projector according to claim 2, wherein the optical axis of the projection lens shifts in the same direction as the optical axis of the condenser lens and parallel to the central axis of the light incident on the condenser lens. Projector. 4. The projector according to claim 1, further comprising: a microlens array provided with a plurality of lenses corresponding to the pixel electrodes on a light incident side of the base substrate, and entering the microlens array. When the central axis of light and the center of the microlens array coincide with each other, so as to reduce the incident angle of light that strikes the driving element,
A projector, wherein the angle of light incident on the liquid crystal device is restricted by shifting the center axis of light incident on the microlens array and the center of the microlens array. 5. The projector according to claim 4, wherein the microlens array is provided on the counter substrate. 6. The projector according to claim 4, wherein an optical axis of the projection lens is parallel to a center axis of light incident on the microlens array in a same direction as a center of the microlens array. Characterized in that the projector is shifted to 7. The projector according to claim 1, wherein an angle of incidence of light impinging on the driving element is reduced when a normal line of the counter substrate is parallel to an optical axis of the light source. A projector, wherein an angle of light incident on the liquid crystal device is restricted by inclining an optical axis with respect to a normal line of the counter substrate. 8. The projector according to claim 7, wherein an optical axis of the projection lens is shifted in the same direction as an optical axis of the light source and parallel to a normal to the counter substrate. Projector. 9. The projector according to claim 7, further comprising a microlens array provided with a plurality of lenses corresponding to the pixel electrodes on a light incident side of the base substrate. Projector. 10. The projector according to claim 9, wherein optical axes of the plurality of lenses are shifted in parallel to a side of the light source with respect to a center of a pixel of the liquid crystal device. projector. 11. The projector according to claim 9, wherein the microlens array is provided on the counter substrate. 12. The projector according to claim 1, wherein a central axis of light incident on the liquid crystal device coincides with a clear viewing direction of the liquid crystal device. 13. The projector according to claim 1, further comprising, on a light incident side of the liquid crystal device, a central axis of light incident on the liquid crystal device and a clear viewing direction of the liquid crystal device. A projector provided with a viewing angle compensation film to be matched. 14. The projector according to claim 1, further comprising: a light emitting side of the liquid crystal device, a central axis of light emitted from the liquid crystal device, and a clear viewing direction of the liquid crystal device. A projector provided with a viewing angle compensating film for matching 15. The projector according to claim 1, further comprising a viewing angle compensation film provided on each of a light incident side and a light exit side of the liquid crystal device. 16. The projector according to claim 1, wherein the base substrate further includes a scanning line, and the scanning line intersects the scanning line and is higher than the scanning line on the base substrate. And a driving line, wherein the driving element is connected to the data line and the scanning line, and has a semiconductor layer including a channel region and positioned below the scanning line on the substrate. A projector comprising: 17. The color separation optical system according to claim 1, wherein a light emitted from the light source is separated into a plurality of color lights between the light source and the liquid crystal device. The projector characterized by being provided with. 18. The projector according to claim 17, wherein a plurality of the liquid crystal devices are provided corresponding to the plurality of color lights.