JP2002214429A - Fabry-perot filter - Google Patents
Fabry-perot filterInfo
- Publication number
- JP2002214429A JP2002214429A JP2001009957A JP2001009957A JP2002214429A JP 2002214429 A JP2002214429 A JP 2002214429A JP 2001009957 A JP2001009957 A JP 2001009957A JP 2001009957 A JP2001009957 A JP 2001009957A JP 2002214429 A JP2002214429 A JP 2002214429A
- Authority
- JP
- Japan
- Prior art keywords
- fabry
- mirror
- movable mirror
- perot filter
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光を波長選択的に
透過させる波長選択フィルタとして使用されるファブリ
ペローフィルタに関する。[0001] 1. Field of the Invention [0002] The present invention relates to a Fabry-Perot filter used as a wavelength selection filter for transmitting light in a wavelength-selective manner.
【０００２】[0002]
【０００３】ファブリペローフィルタは、基板上に形成
される反射率の高い固定鏡と可動鏡との間にギャップを
形成させ、互いに向かい合わせた光学フィルタであり、
光（例えば赤外線）を波長選択的に透過させる波長選択
フィルタとして使用される。A Fabry-Perot filter is an optical filter in which a gap is formed between a fixed mirror and a movable mirror having high reflectivity formed on a substrate and face each other.
It is used as a wavelength selection filter that selectively transmits light (for example, infrared light).
【０００４】図２は従来のファブリペローフィルタの縦
断面図である。ファブリペローフィルタは、図２（ａ）
に示すように、例えばシリコンの基板１上に例えば多結
晶シリコンの薄膜からなる固定鏡２を形成した後、固定
鏡２上に例えばシリコン酸化膜からなる犠牲層３を縦断
面形状が略台形となるように形成し、この犠牲層３上に
例えば多結晶シリコンやシリコン窒化膜の単層またはそ
れらが複合された薄膜からなる可動鏡４を形成した後、
図２（ｂ）において、犠牲層３をエッチングにより除去
して固定鏡２と可動鏡４との間に犠牲層３の厚さに相当
するギャップ５を形成する。FIG. 2 is a longitudinal sectional view of a conventional Fabry-Perot filter. The Fabry-Perot filter is shown in FIG.
As shown in FIG. 1, after a fixed mirror 2 made of, for example, a polycrystalline silicon thin film is formed on a silicon substrate 1, for example, a sacrificial layer 3 made of, for example, a silicon oxide film is After the movable mirror 4 is formed on the sacrificial layer 3, for example, a single layer of a polycrystalline silicon or a silicon nitride film or a thin film in which they are combined,
In FIG. 2B, the sacrifice layer 3 is removed by etching to form a gap 5 between the fixed mirror 2 and the movable mirror 4 corresponding to the thickness of the sacrifice layer 3.
【０００５】この場合、可動鏡４の縦断面形状が略台形
の犠牲層３の非平行部３ａ上に相当する部分には支持部
４ａが形成され、可動鏡４はこの支持部４ａにより支持
されて固定鏡３に対向配置されている。In this case, a supporting portion 4a is formed at a portion corresponding to the non-parallel portion 3a of the sacrificial layer 3 having a substantially trapezoidal longitudinal sectional shape, and the movable mirror 4 is supported by the supporting portion 4a. And is disposed to face the fixed mirror 3.
【０００６】[0006]
【発明が解決しようとする課題】しかし、ファブリペロ
ーフィルタの初期ギャップは犠牲層３の厚さに相当する
ように設計されており、その設計値を確保するには薄膜
である可動鏡４を浮いた状態で自立させる必要がある
が、可動鏡４を支持している支持部４ａは非常に薄くそ
の強度が低いため、図３に示すように膜の引張り応力に
よって支持部４ａがたわみ、ファブリペローフィルタの
初期ギャップが設計よりも小さくなってしまうという問
題点があった。However, the initial gap of the Fabry-Perot filter is designed so as to correspond to the thickness of the sacrificial layer 3. To secure the designed value, the movable mirror 4 which is a thin film is floated. The supporting portion 4a supporting the movable mirror 4 is very thin and has a low strength, so that the supporting portion 4a is bent by the tensile stress of the film as shown in FIG. There is a problem that the initial gap of the filter is smaller than designed.
【０００７】本発明は、前述した事情に鑑みてなされた
もので、支持部のたわみを防止して犠牲層の厚さに相当
する初期ギャップの設計値を確保することができるファ
ブリペローフィルタを提供することにある。The present invention has been made in view of the above-mentioned circumstances, and provides a Fabry-Perot filter capable of preventing a deflection of a support portion and securing a design value of an initial gap corresponding to a thickness of a sacrificial layer. Is to do.
【０００８】[0008]
【課題を解決するための手段】本発明の請求項１におい
ては、基板上に形成される固定鏡と、この固定鏡上に縦
断面形状を略台形とする犠牲層を介して形成されこの犠
牲層を除去することにより前記略台形の犠牲層の非平行
部上に形成される支持部により支持されて前記固定鏡と
の間にギャップを形成した状態で前記固定鏡に対向配置
される可動鏡とを有し、前記可動鏡を前記固定鏡に対し
て変位させることにより前記ギャップの長さを可変とし
たファブリペローフィルタにおいて、前記可動鏡の前記
支持部上に前記支持部を補強する補強膜を設けたことを
特徴とするファブリペローフィルタである。According to a first aspect of the present invention, there is provided a fixed mirror formed on a substrate and a sacrificial layer formed on the fixed mirror via a sacrificial layer having a substantially trapezoidal vertical cross section. A movable mirror which is supported by a support portion formed on a non-parallel portion of the substantially trapezoidal sacrificial layer by removing a layer, and is arranged to face the fixed mirror with a gap formed between the movable mirror and the fixed mirror. A Fabry-Perot filter in which the length of the gap is variable by displacing the movable mirror with respect to the fixed mirror, a reinforcing film for reinforcing the support on the support of the movable mirror And a Fabry-Perot filter.
【０００９】本発明の請求項２においては、前記補強膜
は、薄膜が複数回積層されてなる積層膜からなることを
特徴とする請求項１記載のファブリペローフィルタであ
る。According to a second aspect of the present invention, in the Fabry-Perot filter according to the first aspect, the reinforcing film is formed of a laminated film formed by laminating a plurality of thin films.
【００１０】[0010]
【発明の実施の形態】次に、本発明の実施例について図
面を用いて説明する。尚、以下の図面において、図２及
び図３と重複する部分は同一番号を付してその説明は適
宜に省略する。図１は本発明によるファブリペローフィ
ルタの縦断面図である。Next, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same parts as those in FIGS. 2 and 3 are denoted by the same reference numerals, and description thereof will be omitted as appropriate. FIG. 1 is a longitudinal sectional view of a Fabry-Perot filter according to the present invention.
【００１１】図１（ａ）において、ファブリペローフィ
ルタは、可動鏡４を形成した後、可動鏡４上に薄膜とし
て例えば多結晶シリコン膜６ａ，６ｂ，６ｃ，６ｄが順
次積層された積層膜により補強膜６を形成し、可動鏡４
の支持部４ａが補強膜６により被服されるようにパター
ニングする。In FIG. 1A, after a movable mirror 4 is formed, a Fabry-Perot filter is formed by a laminated film in which, for example, polycrystalline silicon films 6a, 6b, 6c and 6d are sequentially laminated as a thin film on the movable mirror 4. The reinforcing film 6 is formed, and the movable mirror 4 is formed.
Is patterned so that the supporting portion 4a is covered with the reinforcing film 6.
【００１２】そして図１（ｂ）において、犠牲層３をエ
ッチングにより除去して固定鏡２と可動鏡４との間に犠
牲層３の厚さに相当するギャップ５を形成する。この場
合、可動鏡４の支持部４ａは補強膜６によりその強度が
補強されているので、支持部４ａは可動膜４の引張り応
力に対向してたわむことなく可動鏡４を支持することが
でき、犠牲層３の厚さに相当する初期ギャップの設計値
を確保することができる。In FIG. 1B, the sacrifice layer 3 is removed by etching to form a gap 5 between the fixed mirror 2 and the movable mirror 4 corresponding to the thickness of the sacrifice layer 3. In this case, since the strength of the support portion 4a of the movable mirror 4 is reinforced by the reinforcing film 6, the support portion 4a can support the movable mirror 4 without bending against the tensile stress of the movable film 4. In addition, a design value of the initial gap corresponding to the thickness of the sacrificial layer 3 can be secured.
【００１３】[0013]
【発明の効果】以上説明したように、本発明によれば、
可動鏡の支持部の強度を補強する補強膜を支持部上に形
成したので、支持部のたわみを防止して犠牲層の厚さに
相当する初期ギャップの設計値を確保することができる
ファブリペローフィルタを提供することができる。As described above, according to the present invention,
A Fabry-Perot that can secure the initial gap design value equivalent to the thickness of the sacrificial layer by preventing the deflection of the support part by forming a reinforcing film on the support part that reinforces the strength of the support part of the movable mirror A filter can be provided.
【００１４】[0014]
【図１】本発明によるファブリペローフィルタの縦断面
図である。FIG. 1 is a longitudinal sectional view of a Fabry-Perot filter according to the present invention.
【図２】従来のファブリペローフィルタの縦断面図であ
る。FIG. 2 is a longitudinal sectional view of a conventional Fabry-Perot filter.
【図３】従来のファブリペローフィルタの問題点を説明
する図である。FIG. 3 is a diagram illustrating a problem of a conventional Fabry-Perot filter.
１ 基板 ２ 固定鏡 ３ 犠牲層 ３ａ 非平行部 ４ 可動鏡 ４ａ 支持部 ５ ギャップ ６ 補強膜 ６ａ，６ｂ，６ｃ，６ｄ 多結晶シリコン膜 DESCRIPTION OF SYMBOLS 1 Substrate 2 Fixed mirror 3 Sacrificial layer 3a Non-parallel part 4 Movable mirror 4a Support part 5 Gap 6 Reinforcement film 6a, 6b, 6c, 6d Polycrystalline silicon film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 原 仁 東京都武蔵野市中町２丁目９番32号 横河 電機株式会社内 Ｆターム(参考） 2H048 GA04 GA09 GA13 GA30 GA51 GA60 GA61 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hitoshi Hara 2-93-2 Nakamachi, Musashino-shi, Tokyo F-term in Yokogawa Electric Corporation (reference) 2H048 GA04 GA09 GA13 GA30 GA51 GA60 GA61
Claims (2)
上に縦断面形状を略台形とする犠牲層を介して形成され
この犠牲層を除去することにより前記略台形の犠牲層の
非平行部上に形成される支持部により支持されて前記固
定鏡との間にギャップを形成した状態で前記固定鏡に対
向配置される可動鏡とを有し、前記可動鏡を前記固定鏡
に対して変位させることにより前記ギャップの長さを可
変としたファブリペローフィルタにおいて、 前記可動鏡の前記支持部上に前記支持部を補強する補強
膜を設けたことを特徴とするファブリペローフィルタ。1. A substantially fixed trapezoidal sacrifice layer is formed by removing a sacrifice layer formed on a fixed mirror formed on a substrate and a sacrifice layer having a substantially trapezoidal longitudinal section on the fixed mirror. A movable mirror supported by a support portion formed on the non-parallel portion and disposed to face the fixed mirror in a state where a gap is formed between the movable mirror and the fixed mirror. A Fabry-Perot filter in which the length of the gap is variable by displacing the gap with respect to the movable mirror, wherein a reinforcing film for reinforcing the supporting portion is provided on the supporting portion of the movable mirror.
る積層膜からなることを特徴とする請求項１記載のファ
ブリペローフィルタ。2. The Fabry-Perot filter according to claim 1, wherein said reinforcing film comprises a laminated film formed by laminating a plurality of thin films.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001009957A JP2002214429A (en) | 2001-01-18 | 2001-01-18 | Fabry-perot filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001009957A JP2002214429A (en) | 2001-01-18 | 2001-01-18 | Fabry-perot filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002214429A true JP2002214429A (en) | 2002-07-31 |
Family
ID=18877360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001009957A Pending JP2002214429A (en) | 2001-01-18 | 2001-01-18 | Fabry-perot filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002214429A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100411328B1 (en) * | 2001-12-21 | 2003-12-18 | 한국과학기술원 | Tunable optical filter |
| KR100453975B1 (en) * | 2002-10-25 | 2004-10-20 | 전자부품연구원 | Micro Fabry-Perot filter driven by magnetic force and gas analysis apparatus using the same |
| JP2008134388A (en) * | 2006-11-28 | 2008-06-12 | Denso Corp | Optical multilayer film mirror and fabry-perot interferometer equipped with the same |
-
2001
- 2001-01-18 JP JP2001009957A patent/JP2002214429A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100411328B1 (en) * | 2001-12-21 | 2003-12-18 | 한국과학기술원 | Tunable optical filter |
| KR100453975B1 (en) * | 2002-10-25 | 2004-10-20 | 전자부품연구원 | Micro Fabry-Perot filter driven by magnetic force and gas analysis apparatus using the same |
| JP2008134388A (en) * | 2006-11-28 | 2008-06-12 | Denso Corp | Optical multilayer film mirror and fabry-perot interferometer equipped with the same |
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