JP2002213998A - Sensor attachment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an attachment device for mounting sensors or tubes for analytical measurement which detect air velocity, air temperature, humidity, pressure or the like in an air supply duct and a return duct for general or industrial air conditioning and an exhaust duct in a clean room. SOLUTION: The device consists of an attachment member 13 fixed at a certain position of a duct body wall 10 where a window hole 11 is provided, a supporting bar 20 inserted toward the inside of the duct through the attachment member 13, at least one of sensors 25 and 26 provided inside the duct by mounting at the end of the supporting bar 20, and a supporting bar holding means mounted on the attachment member 13 for selecting a length of the portion of the supporting bar 20 inserted inside the duct to provide the sensors at a certain position. The supporting bar holding means consists of an outside cover nut 30 threadedly engaged to a mail screw part of a second holding cylinder part 16 and a sleeve 33 mounted between an outer periphery 18 of the second holding cylinder part 16 and an inner periphery 32 of the outside cover nut 30 for holding the supporting bar 20 in a fastened state. It is possible to simply and securely mount the sensors inside the duct from the duct body, and to confirm the directivity of the sensors and the adjustment to the center portion of the duct from the outside of the duct, and construction can be carried out in a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air supply duct and a return air duct for general air conditioning and industrial air conditioning, a wind speed and air temperature in a device exhaust duct in a clean room of a semiconductor factory, and the like.
The present invention relates to a mounting device for installing a sensor for detecting humidity, pressure, etc., a tube for analysis and measurement, and the like.

[0002]

2. Description of the Related Art A sensor for detecting wind speed, wind temperature, humidity, pressure and the like in an apparatus exhaust duct in a clean room of a semiconductor factory or the like is mounted. These sensors are
Since it receives a large pressure due to the airflow without the duct, it is necessary to firmly fix it inside the duct.However, usually a hole is made in a predetermined position of the duct, a unit with the sensor support rod fixed to the plate is prepared, and It has been practiced to fix the back nut and pass the bolt from the outer surface of the unit toward the back nut. However, there is a disadvantage that attaching the sensor in such an operation requires a lot of labor and increases the cost. Further, in the case of a large duct, there is a problem that a wind speed distribution occurs in the duct, and the wind speed, temperature, humidity, pressure, and the like cannot be accurately detected only at the center point.

[0003]

SUMMARY OF THE INVENTION The present invention relates to an air supply duct and a return air duct for general air conditioning and industrial air conditioning, and an apparatus exhaust duct (acid exhaust, alkali exhaust, organic gas exhaust, general exhaust) in a clean room of a semiconductor factory. ) Wind speed, wind temperature,
Aims to provide a mounting device that can easily install various sensors that detect humidity, pressure, etc., and tubes for analysis and measurement, and install multiple sensors when wind speed distribution is likely to occur in large ducts. It is an object of the present invention to provide a mounting device capable of accurately detecting the mounting device.

[0004]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention makes it possible to easily attach sensors by opening a window at a predetermined position on a duct body wall, and to improve the directivity of the sensor and the inside of the duct. by adjusting the installation position of the confirmation from duct outside
The present invention relates to a sensor mounting device. That is, a mounting member fixed to the duct body wall at a predetermined position with a window hole, a support bar penetrating through the mounting member and inserted in a direction orthogonal to the duct flow path, and provided at the tip of the support bar. And at least one sensor provided, and a support bar holding means attached to the mounting member so as to select a length of the support bar extending in the duct and to install the sensor at a center or a predetermined position in the duct cross section. It is characterized by becoming.

The mounting member forms a holding cylinder having a support bar insertion hole at the center of the plate-like body, and the holding cylinder has a first holding cylinder portion extending toward the duct and a second male screw with an external thread projecting outward. The support bar holding means includes an outer cover nut screwed into the male screw portion of the second holding cylinder portion, and an outer cover nut inserted into the second holding cylinder portion after the support bar is inserted. A sleeve that is interposed between the outer edge of the second holding cylinder and the inner edge of the outer cover nut when screwed, and that holds the support bar in a tightened state; The mounting member has an insertion hole of a nipple-shaped joint body having a support bar insertion hole at the center of the plate-like body; the support bar holding means includes an inner cover nut screwed to one of the joint bodies. An outer cover nut screwed to the other of the joint body projecting to the outside of the mounting member, and an interposition between an outer edge of the joint body and an inner edge of the outer cover nut to hold the support bar in a tightened state. And a sleeve.

Further, according to the present invention, a mounting cylinder fixed in a direction perpendicular to the body wall by making a hole in a predetermined position of the duct body wall, and a sensor support bar inserted through the mounting cylinder and inserted into the duct. And at least one sensor provided at the tip of the support bar, a cap that closes the opening of the mounting cylinder after the support bar is inserted, and a cap formed at the support bar insertion portion of the cap,
And a means for holding a support bar so that the sensor is installed at a substantially central portion or a predetermined position of the flow path in the duct. The support bar holding means includes a cap having a first holding cylinder portion extending inward and a second holding cylinder portion with a male screw protruding outward, and an outer cover nut screwed into the second holding cylinder portion. When,
When the outer cover nut is screwed into the second holding cylinder after the support bar is inserted through the cap, the support bar is interposed between the outer edge of the second holding cylinder and the inner edge of the outer cover nut. And a sleeve for holding the sleeve in a tightened state. Further, as the support bar holding means, a nipple-shaped joint body inserted into the cap of the mounting cylinder, an inner cover nut screwed to one of the joint bodies with the cap interposed therebetween, and a joint body projecting outside the cap It comprises an outer cover nut screwed to the other, and a sleeve interposed between the outer edge of the joint body and the inner edge of the outer cover nut to hold the support bar in a tightened state.

The support bar is a hollow tube through which a lead wire from a sensor attached to the tip can be inserted. The support bar is provided on the longitudinal surface of the support bar at a center or a predetermined position in the duct from the support bar holding means. A display unit is provided for displaying the length reached or the length of advance in the cross section of the duct. In addition, when a sensor or the like is mounted on a large duct, a plurality of mounting members or mounting cylinders are provided at or near the same cross-sectional position of the duct body wall, and sensors for detecting wind speed, wind temperature, humidity, pressure, etc., and analytical measurement It is characterized by attaching a tube for use.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A sensor mounting device according to the present invention has a mounting member 13 fixed at a predetermined position of a duct body wall 10 with a window hole 11 formed therein, and a passage extending through the mounting member 13 and intersecting at right angles to the flow path in the duct. Support bar 20 inserted in the direction,
At least one sensor 25, 26 provided at the tip of
And a support bar holding means attached to the mounting member so as to select the length of the support bar 20 extending into the duct and to install the sensor at a predetermined position in the cross section of the duct.

FIG. 1 is a sectional view showing a state in which the sensor mounting device of the present invention is mounted on a rectangular duct 10. A window hole 11 is opened at a predetermined position on the duct body wall 10, and a plate-shaped mounting member 13 is fixed to the periphery of the window hole using an adhesive 12. At the center of the mounting member 13, a holding cylinder serving as a base portion of the sensor support bar holding means is provided. The holding cylinder comprises a first holding cylinder 15 extending toward the duct and a second holding cylinder 16 having an external thread 17 projecting outward, and has a hole 14 through which the sensor support bar 20 is inserted. are doing. The support bar holding means includes an outer cover nut 30 screwed into the male screw portion 17 of the second holding cylinder portion 16, and an outer cover nut 30 screwed into the second holding cylinder portion 16 after the support bar 20 is inserted. As a result, a sleeve 33 is interposed between the concave spherical outer edge 18 of the second holding cylinder 16 and the inner edge (inside slope) 32 of the outer cover nut 30 to hold the support bar 20 in a tightened state. Consists of The sleeve 33 is in the form of an abacus ball or a sphere having a support bar through hole in the center.

As described above, the support bar 20 is inserted into the holding cylinder and the sleeve, and the directivity of the sensor and the installation position in the duct are adjusted and confirmed. Outer edge 18 and outer cover nut 3
Since the support bar 20 is tightened by holding the sleeve 33 between the inner slope 32 and the inner slope 32, the reaction force against the bending load of the support bar 20 due to the wind pressure in the duct can be sufficiently supported. In the hollow portion 21 of the support bar 20, lead wires 27, 2 from sensors 25, 26 attached to the tip of the support bar are provided.
8 and guided to a measuring device (not shown). Further, on the surface in the longitudinal direction of the support bar 20, there are provided display portions 29, 29 for displaying a length from the support bar holding means to a central portion in the duct or a predetermined position, or an extension length in the duct cross section. In addition, in FIG. 1, 22 is a plug at the tip of the support bar,
23 is a sensor holding plate, 24 is a screw, and 80 is an air flow in the duct.

The mounting member 13 is made of vinyl chloride, stainless steel (SUS304, 316), aluminum or the like, and the cover nut 30 is made of polypropylene, polyether, fluororesin, stainless steel (SUS304, 316) or the like. The support bar 20 is made of bakelite, stainless steel (SUS30
4,316), made of vinyl chloride, PET resin, etc.
In addition to a wind speed / wind temperature sensor, a humidity sensor, a pressure sensor, various gas sensors, and an analysis tube for collecting various gases in a duct are used as sensors. The attachment sites of these sensors are exemplified as follows. Industrial air conditioning: Clean room for semiconductor and LCD manufacturing. Pharmaceutical plants: bio-clean rooms, draft chambers, etc. General air conditioning: offices, stores, dealing rooms, computer centers, etc.

FIG. 2 shows a hole 3 in the center of a plate-like mounting member 13.
4 is an enlarged longitudinal sectional view of an example in which a nipple-shaped joint main body 35 is provided by inserting the joint body 35. The nipple type joint main body 35 has a support bar insertion hole 14 inside. The inner cover nut 38 is screwed into the one male screw portion 36 of the joint body 35 with the mounting member 13 interposed therebetween, and the other male screw portion 3 of the joint body protrudes outside the mounting member.
7 is screwed with the outer cover nut 30. A sleeve 33 is interposed between the outer edge 18 of the external thread portion 37 and the inner slope 32 of the outer cover nut 30. Also in this example, the support bar 20 held by the joint body 30 by holding the sleeve 33 between the outer edge 18 of the joint body 35 and the inner slope 32 of the outer cover nut 30 by screwing the outer cover nut 30 is tightened. Therefore, the reaction force against the bending load of the support bar 20 due to the wind pressure in the duct can be sufficiently supported.

When mounting the sensor using the apparatus shown in FIG. 2, first, the inner cover nut 38, the mounting member 13, the nipple type joint main body 35, and the sleeve 33 are mounted on the support bar 20 to which the sensors 27 and 28 are mounted at the tips. And the outer cover nut 30 are sequentially inserted, the inner cover nut 38 is screwed into the outer cover nut 30 with the mounting member 13 interposed therebetween, and the outer cover nut 30 is lightly screwed into the male screw portion 37 of the nipple type joint main body 35 to be supported. The bar 20 is temporarily fixed. On the other hand, a window hole 11 is previously formed in a predetermined position of the duct body wall 10 in a factory or on site. Next, by using the display unit 33 of the support bar 25, the mounting length is determined so that the sensor is installed at a predetermined position in the duct cross section, and the sensor 27 in the duct 10 is determined.
After confirming the directivity of 28, the outer cover nut 30 is tightened to the male screw portion 37 of the nipple type joint main body 35. After this, an adhesive is applied to the periphery of the mounting member 13 or screwed to complete the mounting of the sensor to the duct. In the tightened state, a concave spherical outer edge 1 of the joint body 35 is screwed by the outer cover nut 30.
The sleeve 33 is held between the inner cover 8 and the inner slope 32 of the outer cover nut 30 to securely hold the sensor support bar 20.

FIG. 3 is a perspective view schematically showing a state where a plurality of sensors are attached to a large rectangular duct, and FIG. 4 is a front view of FIG. For relatively small ducts, see FIGS.
The length of the support bar 20 in the duct can be selected to mount the sensor at a predetermined position in the cross section of the duct.
(0x500 mm or more), a wind speed distribution is generated in the duct, and the wind speed, temperature, humidity, pressure, etc. cannot be accurately detected only at the center point. Attach sensors to detect wind speed, wind temperature, humidity, pressure, etc. That is, as shown in FIG.
A sensor mounting device 41 is provided at the center of one of the body walls of the large rectangular duct 40, and four sensor mounting devices 42 to 45 are provided from the left and right body walls at intervals above and below the central sensor mounting device 41. In the sensor mounting device 41 at the center, the sensors 24 and 25 are arranged at substantially the center of the duct by a support bar extending from the center of the body wall into the duct. The support bars of the upper, lower, left and right sensor mounting devices 42 to 45 are inserted into the duct shorter than the support bar of the sensor mounting device 41, and the respective sensors are arranged near four corners in the duct. In FIG. 3, the other sensor mounting devices 42 to 45 are provided at a position downstream of the central sensor mounting device 41. However, the present invention is not limited to the illustrated example. It may be provided slightly upstream or downstream in the vicinity of the device. In this case, there is a case where the wind speed is not accurately detected only at the center point due to the wind speed distribution in the large duct, but as described above, the accurate detection is achieved by mounting a plurality of sensors in the duct. can do.

FIG. 5 is a front view of a modified example of FIG. 4, in which a sensor mounting device 41 is provided at the center of one body wall of a large rectangular duct 40, and sensor mounting devices 46 and 47 are provided above and below the sensor mounting device at intervals. . In the sensor mounting device 41 at the center, the sensors 24 and 25 are arranged at substantially the center of the duct by a support bar extending into the duct from the center of the body wall as in FIG. The upper and lower support bars of the sensor mounting devices 46 and 47 are inserted into the duct longer than the support bar of the sensor mounting device 41, and two sets of four sensors each are arranged at four corners in the duct. Also in this case, even if there is a wind speed distribution in the duct, it can be accurately detected.

FIG. 6 is a longitudinal sectional view showing a state where the sensor mounting device of the present invention is mounted on a round duct. As shown, the duct 10
A window hole 51 is made in the body wall at a predetermined position, and a mounting cylinder 52 made of vinyl chloride or stainless steel is bonded or welded. A sensor support bar 20 inserted through the center of a cap 54 screwed to the opening surface of the mounting cylinder 52 in a direction orthogonal to the duct flow path is penetrated. The sensor 2 is provided at the tip of the support bar 20.
Attach 7, 28. The support bar insertion portion of the cap 54 has means for holding the support bar so that the sensor is installed at a predetermined position in the flow path in the duct.

The support bar holding means in FIG. 6 is a cap 54 having a first holding cylinder portion 56 extending inward and a second holding cylinder portion 57 having a male screw portion 58 protruding outward.
And the outer cover nut 30 screwed to the second holding cylinder portion 57
And a sleeve 33 interposed between the outer edge 18 of the second holding cylinder portion 57 and the inner edge 32 of the outer cover nut 21. In this case, after the support bar 20 is inserted through the cap 54 and the outer cover nut 30 is screwed into the second holding cylinder 57, the outer edge of the second holding cylinder 57 and the inner edge of the outer cover nut 30 are connected. The sleeve 33 interposed therebetween is pressed against the surface of the support bar 20 and tightened. The support bar 20 is held in a state where the sleeve 33 is reinforced by the first holding cylinder 56 and the second holding cylinder 57 of the cap 54. Therefore, the reaction force against the bending load of the support bar due to the wind pressure in the duct can be sufficiently supported as in the previous embodiment. In FIG. 6, 52a is an adhesive or welded portion of the mounting cylinder,
53 is a male screw part formed on the mounting cylinder 52, 55 is a female screw part formed on the inner surface of the flange of the cap 54, and 59 is a packing.

FIG. 7 is an enlarged longitudinal sectional view of another example using a nipple-shaped joint body similar to FIG. 2 when the sensor mounting device is installed in a round duct. The nipple type joint main body 35 has an inner cover nut 38 on one male thread portion 36.
And the outer cover nut 30 is screwed into the other male screw portion 37 of the joint body projecting outside the cap 60. Outer edge 18 of external thread portion 37 and outer cover nut 30
A sleeve 33 for holding the support bar 20 in a tightened state is interposed between the inner slope 32 and the inner slope 32. In the figure, reference numeral 61 denotes a hole formed in the center of the cap 60 for inserting the male screw portion 36 of the nipple type joint main body 35. Also in this example, the sleeve 33 is held and tightened between the outer edge 18 of the joint body 35 and the inner slope 32 of the outer cover nut 30 by screwing the outer cover nut 30, so that the support bar 20 can be firmly supported. it can.

FIG. 8 is a perspective view showing a state in which a plurality of sensors are attached to a large round duct, and FIG. 9 is a front view. In the case of a large round duct (for example, 800 mm in diameter), when a wind speed distribution is generated in the duct and the wind speed, temperature, humidity, pressure, and the like cannot be accurately detected only at the center point, the sensor mounting members 41 to 41 are attached to the duct body wall 70. 45 is provided radially to maintain high detection accuracy.

[0020]

As described above, according to the present invention, sensors and the like can be easily and reliably mounted in a duct, and the directivity of the sensor and adjustment to the center of the duct can be confirmed from outside the duct. Can be constructed in a short time. Also, it can be easily and securely attached to a small-diameter duct (75 to 400 mm in diameter), and the directivity of the sensor and adjustment to the center of the duct can be confirmed from outside the duct. In addition, construction can be performed in a short period of time, regardless of whether it is existing or new. Also, in the case of a large duct, when there is a wind speed distribution in the duct and it is not possible to accurately detect the wind speed etc. only at the center point, by installing multiple sensors at the same cross-sectional position of the duct body wall or near it, Can be detected.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a state where a sensor mounting device of the present invention is mounted on a rectangular duct.

FIG. 2 is an enlarged vertical sectional view of a modification of FIG.

FIG. 3 is a perspective view showing a state where a plurality of sensors are attached to a large rectangular duct.

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a front view of a modification of FIG. 4;

FIG. 6 is a longitudinal sectional view showing a state where the sensor mounting device of the present invention is mounted on a round duct.

FIG. 7 is a longitudinal sectional view of a modification of FIG. 6;

FIG. 8 is a perspective view showing a state where a plurality of sensors are attached to a large round duct.

FIG. 9 is a front view of FIG. 8;

[Explanation of symbols]

10 duct body wall 11 window hole
DESCRIPTION OF SYMBOLS 12 Adhesion part 13 Attachment member 14 Support bar insertion hole 15, 16 Holding cylinder part 17 Male screw part
18 Outer edge of male screw part 20 Support bar 21 Hollow part
22 Mekura stopper 23 Sensor holding plate 24 Screw
25, 26 Sensor 27, 28 Lead wire 29 Length indicator 30 Outer cover nut 31 Female thread
32 Inner edge 33 Sleeve 34, 61 Male screw part insertion hole 35 Nipple joint 36, 37
Male screw part 38 Inner cover nut 39 Female screw part 40 Large rectangular duct 41, 42, 43, 44, 45, 46, 47 Sensor mounting device 50 Round duct body wall 51 Window hole
52 Mounting tube 53 Female thread 54, 60 Cap
55 Female thread part 56, 57 Holding cylinder 58 Male thread part
59 Packing 70 Large round duct 80 Air flow

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[Procedure amendment]

[Submission date] January 23, 2001 (2001.1.2)
3)

[Procedure amendment 1]

[Document name to be amended] Drawing

[Correction target item name] All figures

[Correction method] Change

[Correction contents]

FIG. 3

FIG. 4

FIG. 5

FIG.

FIG. 2

FIG. 6

FIG. 7

FIG. 8

FIG. 9

Claims (8)

[Claims] 1. An air supply duct and return air duct for general air conditioning and industrial air conditioning, a sensor for detecting wind speed, wind temperature, humidity, pressure, etc. in a device exhaust duct in a clean room of a semiconductor factory, and a tube for analysis and measurement. A mounting member fixed to the duct body wall by opening a window hole at a predetermined position, and a support bar inserted through the mounting member and inserted in a direction orthogonal to the duct flow path. At least one sensor provided at the tip of the support bar, and the length of the support bar extending into the duct is selected, and the sensor is attached to the mounting member so as to install the sensor at the center or a predetermined position in the duct cross section. And a support bar holding means. 2. The mounting member has a support bar holding cylinder formed at the center of a plate-like body, the holding cylinder having a first holding cylinder portion extending toward the duct side and a second holding having a male screw projecting outward. The support bar holding means includes an outer cover nut screwed into the male screw portion of the second holding cylinder, and an outer cover nut screwed into the second holding cylinder after inserting the support bar. And a sleeve interposed between an outer edge of the second holding cylinder and an inner edge of the outer cover nut to hold the support bar in a tightened state. 2. The sensor mounting device according to 1. 3. The mounting member has an insertion hole of a nipple-shaped joint body having a support bar insertion hole at the center of the plate-like body, and the support bar holding means is screwed into one of the joint bodies. A cover nut, an outer cover nut screwed to the other of the joint body projecting outside the mounting member, and a support bar interposed between an outer edge of the joint body and an inner edge of the outer cover nut to tighten the support bar. The sensor mounting device according to claim 1, further comprising: a sleeve for holding the sensor. 4. An air supply duct and return air duct for general air conditioning and industrial air conditioning, a sensor for detecting wind speed, wind temperature, humidity, pressure, etc. in a device exhaust duct in a clean room of a semiconductor factory, and a tube for analysis and measurement. A mounting cylinder fixed in a direction perpendicular to the body wall by making a hole in a predetermined position of the duct body wall, and a sensor support bar inserted through the mounting cylinder and inserted into the duct. And at least one sensor provided at the tip of the support bar, a cap for closing the opening of the mounting cylinder after the support bar is inserted, and a sensor formed at the support bar insertion portion of the cap, wherein the sensor is located at the center in the duct cross section. Means for holding the support bar so as to be installed at a position or a predetermined position. 5. A cap having a first holding cylinder portion extending inward and a second holding cylinder portion with a male screw protruding outward, and a screw provided on the second holding cylinder portion. When the outer cover nut is screwed into the second holding cylinder after inserting the support bar into the cap, the outer cover nut is fitted between the outer edge of the second holding cylinder and the inner edge of the outer cover nut. 5. The sensor mounting device according to claim 4, further comprising: a sleeve interposed in the sleeve and holding the support bar in a tightened state. 6. The support bar holding means includes a nipple-shaped joint body inserted into a cap of a mounting cylinder, an inner cover nut screwed into one of the joint bodies with the cap interposed therebetween, and protrudes outside the cap. An outer cover nut screwed into the other end of the joint body, and a sleeve interposed between an outer edge of the joint body and an inner edge of the outer cover nut to hold the support bar in a tightened state, The sensor mounting device according to claim 4, wherein: 7. The support bar is a hollow tube through which a lead wire from a sensor attached to the tip can be inserted, and a center portion in a duct cross section from a support bar holding means is provided on a longitudinal surface of the support bar. A display unit for displaying a length reaching a predetermined position or a length of advance in a duct cross section is provided.
7. The sensor mounting device according to any one of claims 6 to 6. 8. In the case of a large duct, a plurality of attachment members or attachment cylinders are provided at or near the same cross-sectional position of the duct body wall, and sensors for detecting wind speed, wind temperature, humidity, pressure, etc. in the duct are provided. The sensor mounting device according to any one of claims 1 to 7, wherein a tube for analysis and measurement is mounted.