JP2002208112A - Thin film magnetic head and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the magnetic field in the direction perpendicular to the surface of a recording medium, generated from a magnetic pole part. SOLUTION: A thin film magnetic head is provided with a first magnetic layer 8 and a second magnetic layer 14 (14A, 14B), a gap layers (9A-9C) provided between the first magnetic layer 8 and the second magnetic layer and a thin film coil 10, a part of which is provided between the first magnetic layer 8 and the second magnetic layer. The second magnetic layer 14 has a magnetic pole part layer 14A and a yoke part layer 14B. The yoke part layer 14B is magnetically connected with the both side surfaces in the width direction of the magnetic pole part layer 14A. In the section parallel to a medium facing surface and intersecting the part where the magnetic pole part layer 14A and the yoke part layer 14B are magnetically connected with each other, at least a part of the end part on the gap layer side of the yoke part layer 14B is disposed in the position nearer to the first magnetic layer 8 than the position of the end part on the gap layer side of the magnetic pole part layer 14A.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head having at least an inductive electromagnetic transducer for writing and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a recording system of a magnetic recording / reproducing apparatus, a direction of signal magnetization is determined by an in-plane direction (longitudinal direction) of a recording medium.
And a perpendicular magnetic recording system in which the direction of signal magnetization is perpendicular to the surface of the recording medium. Perpendicular magnetic recording is more efficient than longitudinal magnetic recording.
It is said that the recording medium is less susceptible to thermal fluctuations and can achieve a high linear recording density.

A thin film magnetic head for a longitudinal magnetic recording system is
In general, a medium facing surface (air bearing surface) facing a recording medium is magnetically coupled to each other, and first and second magnetic fields including magnetic pole portions facing each other via a gap on the medium facing surface side. The structure includes a layer and a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers.

On the other hand, a thin film magnetic head for the perpendicular magnetic recording system includes a ring head having the same structure as the thin film magnetic head for the longitudinal magnetic recording system, and a single main magnetic pole, which is perpendicular to the surface of the recording medium. There is a single pole head for applying a magnetic field. When a single-pole head is used, a two-layer medium in which a soft magnetic layer and a magnetic recording layer are laminated on a substrate is generally used as a recording medium.

[0005] With the recent increase in recording density, it has been desired to reduce the track width of a thin-film magnetic head. Therefore, it is desired that the width of the main pole is reduced in the single pole head. However, conventionally, there have been the following two problems that hinder the reduction of the width of the main pole.

The first problem is that the width of the main magnetic pole is set to, for example, 0.
It is difficult to pattern the main magnetic pole with high precision so as to be 5 μm or less. That is, the main magnetic pole is formed by, for example, an electroplating method (frame plating method) using a resist frame formed by a photolithography technique. However, conventionally, since the main magnetic pole is formed on the insulating layer that swells to cover the coil, the resist frame is also formed on the insulating layer having a large difference in height of unevenness. In this case, since it is difficult to make the thickness of the resist uniform, it is difficult to accurately pattern the resist frame. This makes it difficult to pattern the main pole with high precision.

A second problem is that when the width of the main pole is reduced, the magnetic flux is saturated before reaching the tip of the main pole, and the magnetic field generated from the tip of the main pole on the medium facing surface is reduced. That is.

Heretofore, there has been a similar problem in a thin film magnetic head for a longitudinal magnetic recording system. In order to solve this problem, in a thin-film magnetic head for a longitudinal magnetic recording system, one magnetic layer includes a magnetic pole portion exposed to a medium facing surface, and a width in the medium facing surface defines a track width. In many cases, the structure is divided into a layer and a yoke partial layer for guiding a magnetic flux to the magnetic pole partial layer. According to this structure, the magnetic flux can be efficiently guided to the tip of the magnetic pole portion by making the saturation magnetic flux density of the magnetic pole portion layer larger than the saturation magnetic flux density of the yoke partial layer, and the magnetic pole portion having a small width can be obtained. Can be formed.

Conventionally, in a thin-film magnetic head for a longitudinal magnetic recording system, when one of the magnetic layers is divided into a pole part layer and a yoke part layer, the magnetic coupling between the pole part layer and the yoke part layer is made. Was often performed only on the surface of the pole portion layer opposite to the gap. However, in this structure, since the area of the coupling portion between the magnetic pole portion layer and the yoke portion layer is small, the magnetic flux easily saturates at the coupling portion, and in particular, it is not possible to meet the recent demand for an increase in the write magnetic field. Therefore, Japanese Patent Application Laid-Open No. 11-102506,
As described in JP-A-57522 and JP-A-2000-67413, not only the surface of the pole portion layer opposite to the gap portion but also the side surface of the pole portion layer and the medium facing surface of the pole portion layer. A thin film magnetic head having a structure in which the magnetic pole portion layer and the yoke portion layer are magnetically coupled also on the opposite surface has been proposed.

On the other hand, a thin-film magnetic head for a perpendicular recording system is described in “Nikkei Electronics, September 25, 2000.
JP (No. 779), p. 206 ”in FIG.
An example of the structure of a single pole head is shown. Here, the configuration of the single pole head will be briefly described with reference to FIG. This single-pole head includes an auxiliary pole 108 also serving as a shield layer in the reproducing head, and an auxiliary pole 1
08, a thin film coil 110 formed on a position where the thin film coil 110 is to be formed, a thin film coil 110 formed on the insulating layer 109A, and a thin film coil 11
And an insulating layer 109B covering the first insulating layer 109. Insulating layer 109
In A, a contact hole 109a is formed at a position away from the medium facing surface (the right end surface in FIG. 50). The single-pole head further includes a connecting portion 114 formed of a magnetic material formed on the auxiliary magnetic pole 108 at a position where the contact hole 109a is formed, and a connecting portion 1 so as to cover the insulating layers 109A and 109B.
An insulating layer 109C formed around the insulating layer 14, a main pole 115 formed on the insulating layer 109C, and a protective layer 117 covering the main pole 115 are provided. Main magnetic pole 11
5 has one end exposed to the medium facing surface (the right end in FIG. 50), and the other end connected to the connecting portion 114.

A single pole head having a configuration similar to that shown in FIG. 50 is also disclosed in Japanese Patent Application Laid-Open No. 7-161119.

[0012]

In a head for a perpendicular magnetic recording system, it is important to increase a magnetic field in a direction perpendicular to the surface of a recording medium. However, each of the thin film magnetic heads disclosed in the above publications is structurally
It is a head for the longitudinal recording method and is not suitable for the perpendicular recording method. More specifically, in each of the thin-film magnetic heads disclosed in each publication, the length of the gap portion in the track direction is short, and the yoke partial layer is arranged so as to bypass the coil. Is magnetically connected to the surface opposite to the gap portion. Therefore, the thin-film magnetic heads disclosed in the publications have a problem that a magnetic field generated from a magnetic pole portion in a direction perpendicular to the surface of the recording medium is reduced.

On the other hand, in the single pole head for the perpendicular magnetic recording system as shown in FIG. 50, the magnetic layer constituting the main pole is thin and formed as a single layer. Therefore, in the single pole head having this structure, there is a problem that the magnetic flux is easily saturated in the middle of the magnetic layer constituting the main pole, and the magnetic field generated from the main pole on the medium facing surface is reduced. In this single pole head, the component of the magnetic field generated by the main pole at the medium facing surface in the direction perpendicular to the surface of the recording medium is compared with the component in the direction horizontal to the surface of the recording medium. In order to make the gap relatively large, it is necessary to increase the length of the gap portion, that is, the distance between the main magnetic pole and the auxiliary magnetic pole. Therefore, in this single-pole head, the distance between the coil and the main pole increases, and the main pole cannot efficiently absorb the magnetic field generated from the coil. There is a problem that the magnetic field generated from the main pole in the direction perpendicular to the surface of the recording medium is reduced. In addition, in this single-pole head, when the length of the gap portion is increased in order to increase the magnetic field in the direction perpendicular to the surface of the recording medium, the magnetic path length increases,
There is a problem that high frequency characteristics are deteriorated.

The present invention has been made in view of the above problems, and has as its object to provide a thin film magnetic head capable of increasing a magnetic field generated from a magnetic pole portion in a direction perpendicular to the surface of a recording medium. And a method for manufacturing the same.

[0015]

A thin-film magnetic head according to the present invention has a medium facing surface facing a recording medium, and magnetic poles disposed so as to face each other at a predetermined interval before and after in the traveling direction of the recording medium. A first and second magnetic layer magnetically coupled to each other at a position distant from the medium facing surface, the first and second magnetic layers comprising a nonmagnetic material; And a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers. The second magnetic layer includes a magnetic pole portion, and has a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke partial layer for magnetically connecting the magnetic pole portion layer and the first magnetic layer. The surface of the magnetic pole partial layer on the gap layer side is the second surface of the thin film coil. The yoke partial layer is disposed at a position more distant from the first magnetic layer than the surface on the side of the magnetic layer, and the yoke partial layer has a magnetic property with respect to the pole partial layer on at least a part of both side surfaces in the width direction of the pole partial layer. In the section parallel to the medium facing surface and intersecting with the magnetic connection portion between the pole portion layer and the yoke portion layer, at least a part of the gap layer side end of the yoke portion layer is Are located closer to the first magnetic layer than to the end on the gap layer side.

In the thin-film magnetic head according to the present invention, the surface of the pole portion layer on the gap layer side is arranged at a position farther from the first magnetic layer than the surface of the thin-film coil on the second magnetic layer side, and the yoke portion is formed. Since the layer is magnetically connected to the pole part layer on at least a part of both side surfaces in the width direction of the pole part layer, the recording magnetic field generated by the pole part on the medium facing surface The component in the direction perpendicular to the surface of the recording medium can be made relatively larger than the component in the direction horizontal to the surface of the recording medium. Further, in the present invention, at least a part of the end of the yoke portion layer on the gap layer side crosses the magnetic connection portion between the magnetic pole portion layer and the yoke portion layer and is parallel to the medium facing surface. Since the layer is located closer to the first magnetic layer than the end of the layer on the gap layer side, the distance between the yoke partial layer and the thin-film coil is reduced, thereby reducing the magnetic field generated from the thin-film coil. Can be efficiently absorbed.

In the thin-film magnetic head of the present invention, the yoke portion layer is further magnetically connected to the pole portion layer at at least a part of an end surface of the pole portion layer opposite to the medium facing surface. Is also good.

In the thin-film magnetic head according to the present invention,
In a cross section that intersects the magnetic connection between the pole part layer and the yoke part layer and is parallel to the medium facing surface, the end of the yoke part layer on the gap layer side gradually becomes the first magnetic material as the distance from the pole part layer increases. It may be close to the layer.

In the thin-film magnetic head of the present invention,
In a cross section that intersects the magnetic connection portion between the pole portion layer and the yoke portion layer and is parallel to the medium facing surface, the gap layer side end of the pole portion layer and the gap layer side end of the yoke portion layer have a step. And may be continuous.

In the thin-film magnetic head of the present invention,
At least a part of the connection surface between the pole portion layer and the yoke portion layer may be inclined with respect to a direction perpendicular to the surface of the pole portion layer on the gap layer side.

In the thin-film magnetic head of the present invention,
The thickness of the yoke portion layer may be greater than the thickness of the pole portion layer in a cross section that intersects the magnetic connection between the pole portion layer and the yoke portion layer and is parallel to the medium facing surface.

In the thin-film magnetic head of the present invention,
The yoke partial layer may be further magnetically connected to the pole partial layer on a surface of the pole partial layer opposite to the gap layer. In this case, the thin-film magnetic head further includes
A nonmagnetic layer in contact with the surface of the pole partial layer opposite to the gap layer; the yoke partial layer is adjacent to the surface of the pole partial layer opposite to the gap layer via the nonmagnetic layer; May be magnetically connected to the magnetic pole partial layer via the.

In the thin-film magnetic head of the present invention,
The yoke partial layer may be further magnetically connected to the pole partial layer on a surface of the pole partial layer on the gap layer side.

In the thin-film magnetic head of the present invention,
The saturation magnetic flux density of the pole part layer may be equal to or higher than the saturation magnetic flux density of the yoke part layer.

Further, the thin film magnetic head of the present invention further comprises:
A magnetoresistive element as a reproducing element may be provided.

Further, the thin-film magnetic head of the present invention may be used for a perpendicular magnetic recording system.

The method of manufacturing a thin-film magnetic head according to the present invention includes a medium facing surface facing a recording medium, and magnetic pole portions arranged so as to face each other at a predetermined interval before and after in the traveling direction of the recording medium. And a first and second magnetic layer magnetically connected to each other at a position distant from the medium facing surface, and a nonmagnetic material, provided between the first and second magnetic layers. A gap layer, and a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers. The layer includes a magnetic pole portion, and the width of the medium facing surface defines a track width. The thin film magnetic head includes a magnetic pole portion layer and a yoke partial layer for magnetically connecting the magnetic pole portion layer and the first magnetic layer. A method of manufacturing,
The method includes a step of forming a first magnetic layer, a step of forming a thin-film coil, a step of forming a gap layer, and a step of forming a second magnetic layer. The yoke portion layer is disposed at a position farther from the first magnetic layer than the surface of the thin film coil on the second magnetic layer side, and the yoke portion layer has a magnetic pole on at least a part of both widthwise side surfaces of the pole portion layer. At least one end of the yoke partial layer on the gap layer side in a cross section parallel to the magnetically connected portion between the magnetic pole partial layer and the yoke partial layer and parallel to the medium facing surface. The portion is arranged at a position closer to the first magnetic layer than the end of the pole portion layer on the gap layer side.

According to the method of manufacturing a thin film magnetic head of the present invention,
The surface of the magnetic pole partial layer on the gap layer side is located at a position farther from the first magnetic layer than the surface of the thin film coil on the second magnetic layer side, and the yoke partial layers are on both sides in the width direction of the magnetic pole partial layer. At least a part of the surface is magnetically connected to the pole portion layer, so that a component of a magnetic field generated by the pole portion in the medium facing surface in a direction perpendicular to the surface of the recording medium is removed. Therefore, it is possible to make the component relatively larger than the component in the direction horizontal to the surface of the recording medium. Also,
In the present invention, at least a part of the end of the yoke partial layer on the gap layer side in a cross section that intersects the magnetic connection portion between the magnetic pole partial layer and the yoke partial layer and is parallel to the medium facing surface,
Since the magnetic pole portion layer is located closer to the first magnetic layer than the end portion on the gap layer side, the distance between the yoke portion layer and the thin film coil is reduced, thereby generating the thin film coil. The magnetic field can be efficiently absorbed.

In the method of manufacturing a thin-film magnetic head of the present invention, the step of forming the second magnetic layer includes the steps of forming a layer to be etched made of a material constituting the pole portion layer on the gap layer; A step of forming a mask corresponding to the shape of the pole portion layer on the etching layer, and using the mask, by dry etching, selectively etching the layer to be etched to determine the outer shape of the pole portion layer, Etching a portion of the gap layer to determine the shape of the underlayer of the yoke partial layer near the magnetic connection between the pole portion layer and the yoke partial layer; Forming a portion.

The step of determining the outer shape of the magnetic pole partial layer and determining the shape of the underlayer of the yoke partial layer is as follows.
The shape of the underlayer may be determined so as to gradually approach the first magnetic layer as the distance from the magnetic pole partial layer increases.

In the step of determining the outer shape of the pole portion layer and determining the shape of the base of the yoke portion layer, at least a part of the surface of the pole portion layer connected to the yoke portion layer includes:
The outer shape of the pole portion layer may be determined so as to be inclined with respect to a direction perpendicular to the surface of the pole portion layer on the gap layer side.

[0032]

Embodiments of the present invention will be described below in detail with reference to the drawings. [First Embodiment] FIG. 1 is a sectional view showing a structure of a thin-film magnetic head according to a first embodiment of the present invention. FIG. 1 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. The arrow indicated by the symbol T in FIG. 1 indicates the traveling direction of the recording medium. FIG. 2 is a cross-sectional view showing an example of a cross section taken along line AA of FIG. 1, and FIG. 3 is a cross-sectional view showing another example of a cross section taken along line AA of FIG. FIG. 4 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. FIG. 5 is a front view showing the medium facing surface of the thin-film magnetic head shown in FIG.

As shown in FIGS. 1 to 3, the thin-film magnetic head according to the present embodiment has an AlTiC (Al ₂ O _3).
A substrate 1 made of a ceramic material such as TiC), an insulating layer 2 made of an insulating material such as alumina (Al ₂ O ₃ ) formed on the substrate 1, and an insulating layer 2 formed on the insulating layer 2 A lower shield layer 3 made of a magnetic material; an MR (magnetoresistive effect) element 5 as a reproducing element formed on the lower shield layer 3 via an insulating layer 4; And an upper shield layer 6 made of a magnetic material formed via the layer 4. The thicknesses of the lower shield layer 3 and the upper shield layer 6 are, for example, 1 to 2 respectively.
μm.

One end of the MR element 5 is disposed on a medium facing surface (air bearing surface) ABS. As the MR element 5, an element using a magnetosensitive film exhibiting a magnetoresistance effect, such as an AMR (anisotropic magnetoresistance effect) element, a GMR (giant magnetoresistance effect) element, or a TMR (tunnel magnetoresistance effect) element is used. be able to.

The thin-film magnetic head further includes a non-magnetic layer 7 formed on the upper shield layer 6, a first magnetic layer 8 made of a magnetic material formed on the non-magnetic layer 7, An insulating layer 9A formed on the first magnetic layer 8 at a position where the thin-film coil 10 is to be formed, a thin-film coil 10 formed on the insulating layer 9A, and at least between the windings of the thin-film coil 10. And a filled insulating layer 9B.
A contact hole 9a is formed in the insulating layer 9A at a position away from the medium facing surface ABS.

The thickness of the first magnetic layer 8 is, for example, 1 to 2 μm.
It is. The magnetic material constituting the first magnetic layer 8 may be, for example, an iron-nickel alloy, that is, permalloy, or a high saturation magnetic flux density material as described later. Further, the first magnetic layer 8 may be composed of two or more layers.

The insulating layer 9A is made of a non-conductive and non-magnetic material such as alumina, and has a thickness of, for example, 0.1 to 1 μm.
m.

The thin-film coil 10 is made of a conductive material such as copper, and its winding has a thickness of, for example, 0.3 to 2 μm. The number of turns of the thin-film coil 10 is arbitrary, and the pitch of the windings is also arbitrary.

The insulating layer 9B is made of a non-conductive and non-magnetic material having fluidity when formed. Specifically, the insulating layer 9B may be formed of, for example, an organic non-conductive non-magnetic material such as a photoresist (photosensitive resin) or a spin-on-glass (SOG) film made of coated glass. It may be formed.

The thin-film magnetic head further includes a connecting portion 14C made of a magnetic material formed on the first magnetic layer 8 at a position where the contact hole 9a is formed, a thin-film coil 10, an insulating layer 9A and an insulating layer. And an insulating layer 9C formed so as to cover 9B. The connecting portion 14C becomes a part of a second magnetic layer 14 described later. Thin film coil 10
Is wound around the connecting portion 14C.

The shape of the connecting portion 14C is, for example, 2
４4 μm, depth (length in the direction perpendicular to the medium facing surface ABS) 2-10 μm, and width 5-20 μm. The magnetic material forming the connecting portion 14C may be, for example, an iron-nickel alloy, that is, permalloy, or a high saturation magnetic flux density material as described later.

The insulating layer 9C has more corrosion resistance than the insulating layer 9B,
It is made of a non-conductive and non-magnetic material having excellent rigidity and insulation. As such a material, an inorganic non-conductive non-magnetic material such as alumina or silicon oxide (SiO ₂ ) can be used. The total thickness of the insulating layer 9A and the insulating layer 9C in the medium facing surface ABS is, for example, 2 to 4 μm.
m.

The insulating layers 9A, 9B and 9C constitute a gap layer 9 provided between the first magnetic layer 8 and a second magnetic layer 14 described later.

The thin-film magnetic head has a second magnetic layer 14 made of a magnetic material formed on the insulating layer 9C. The second magnetic layer 14 serves as the connection portion 14C, the pole portion layer 14A including the pole portion, and the yoke portion, and the pole portion layer 14A and the first magnetic layer 8 are connected via the connection portion 14C.
And a yoke portion layer 14B for magnetically connecting the two. The pole portion layer 14A is formed on the insulating layer 9C from the medium facing surface ABS to the connecting portion 14C. The surface of the magnetic pole portion layer 14A on the gap layer 9 side is arranged at a position farther from the first magnetic layer 8 than the surface of the thin-film coil 10 on the second magnetic layer 14 side. An end (hereinafter, referred to as an upper end) of the connecting portion 14C opposite to the first magnetic layer 8 is magnetically connected to a surface of the magnetic pole portion layer 14A on the gap layer 9 side.

The yoke partial layer 14B has a medium facing surface ABS.
It is formed on the insulating layer 9C from a predetermined position away from the connecting portion 14C. As shown in FIG. 2 or 3, the yoke portion layer 14B is magnetically connected to the pole portion layer 14A on both side surfaces in the width direction of the pole portion layer 14A.

In the present embodiment, as shown in FIG. 2 or FIG. 3, the yoke crosses the magnetic connection between the pole portion layer 14A and the yoke portion layer 14B and is parallel to the medium facing surface ABS. At least a part of the end of the partial layer 14B on the gap layer 9 side is arranged at a position closer to the first magnetic layer 8 than the end of the pole part layer 14A on the gap layer 9 side. In the example shown in FIG. 2, in the magnetically connected portion between the pole portion layer 14A and the yoke portion layer 14B in the cross section, the end of the yoke portion layer 14B on the gap layer 9 side is the gap of the pole portion layer 14A. It is arranged at a position closer to the first magnetic layer 8 than the end on the layer 9 side. That is,
In the cross section, a step is generated between the end of the pole portion layer 14A on the gap layer 9 side and the end of the yoke portion layer 14B on the gap layer 9 side. On the other hand, in the example shown in FIG. 3, in the cross section, the end of the pole portion layer 14A on the gap layer 9 side and the end of the yoke portion layer 14B on the gap layer 9 side are continuous without any step.

The thin-film magnetic head further includes a pole portion layer 14.
A non-magnetic layer 15 formed on A is provided. The nonmagnetic layer 15 is in contact with the entire surface of the pole portion layer 14A on the side opposite to the gap layer 9. The thin-film magnetic head further includes a protective layer 17 made of a non-conductive and non-magnetic material such as alumina and formed so as to cover the second magnetic layer 14.

The thickness of the magnetic pole portion layer 14A is preferably 0.1 to 0.8 μm, more preferably 0.1 to 0.8 μm.
0.3 μm.

As shown in FIG. 4, the pole portion layer 14A
Is a first portion 14A arranged on the medium facing surface ABS side.
_1, and a second portion 14A ₂ which are located away from the medium facing surface ABS than the first portion 14A _1. The first portion 14A ₁ is a pole portion of the second magnetic layer 14. Pole portion of the first magnetic layer 8 includes a portion with the gap layer 9 of the first magnetic layer 8 opposite to the first portion 14A _1.

The first portion 14A₁Is equal to the track width
It has a wide width. That is, the first portion 14A₁Medium
The width at the body facing surface ABS defines the track width.
You. Second part 14A_TwoOf the first portion 14A₁With
The first portion 14A at the boundary position ₁Equal to the width of
The greater the distance from the medium facing surface ABS, the larger
After it has become a certain size. Yoke partial layer 1
4B is the second part 14A_TwoOf the part with a fixed width
It is arranged so that it may contact both sides.

The first portion 14A ₁ of the width of the bearing surface ABS, that is, the track width is preferably 0.5μ
m, more preferably 0.3 μm or less.
The second portion 1 in the portion where the yoke portion layer 14B is in contact
The width of 4A ₂ is greater than the width of the first bearing surface (ABS) of the portion 14A _1, is, for example 2μm or more.

The thickness of the yoke partial layer 14B is, for example, 1 to
2 μm. The yoke partial layer 14B is formed as shown in FIG.
As shown in the figure, the magnetic pole portion layer 14A is magnetically connected to both side surfaces in the width direction. The end of the yoke partial layer 14B on the medium facing surface ABS side is disposed at a position separated from the medium facing surface ABS by, for example, 1.5 μm or more.

The saturation magnetic flux density of the pole portion layer 14A is equal to or higher than the saturation magnetic flux density of the yoke portion layer 14B. As the magnetic material forming the magnetic pole portion layer 14A, it is preferable to use a high saturation magnetic flux density material having a saturation magnetic flux density of 1.4T or more. As the high saturation magnetic flux density material, a material containing iron and nitrogen atoms, a material containing iron, zirconia and oxygen atoms,
For example, a material containing iron and nickel elements can be used. Specifically, as the high saturation magnetic flux density material, for example,
NiFe (Ni: 45% by weight, Fe: 55% by weight), F
eN and its compounds, Co-based amorphous alloys, Fe-C
o, Fe-M (including O (oxygen atom if necessary)), Fe-Co-M (O (oxygen atom if necessary)
Including. ) Can be used. Here, M is Ni, N, C, B, Si, A
It is at least one selected from l, Ti, Zr, Hf, Mo, Ta, Nb, and Cu (all chemical symbols).

As the magnetic material constituting the yoke partial layer 14B, for example, a material containing iron and nickel elements having a saturation magnetic flux density of about 1.0T can be used.
Such a material is excellent in corrosion resistance and has a high pole part layer 14.
It has higher resistance than the material constituting A. Further, the use of such a material facilitates the formation of the yoke partial layer 14B.

As the magnetic material forming the yoke partial layer 14B, a magnetic material having the same composition as the magnetic material forming the magnetic pole partial layer 14A can be used. In this case, in order to make the saturation magnetic flux density of the yoke partial layer 14B smaller than the saturation magnetic flux density of the magnetic pole partial layer 14A, as the magnetic material forming the yoke partial layer 14B, the magnetic material forming the magnetic pole partial layer 14A is used. It is preferable to use a material having a smaller composition ratio of iron atoms than a material.

The planar shape of the nonmagnetic layer 15 is the same as that of the pole portion layer 14A. The non-magnetic layer 15 is exposed on the ABS facing the medium. The thickness of the nonmagnetic layer 15 is preferably 0.5 μm or less. The non-magnetic layer 15
Can be omitted.

As a material constituting the nonmagnetic layer 15, for example, a material containing titanium or tantalum (including an alloy and an oxide), alumina or silicon oxide (SiO 2) is used.
₂ ) or other inorganic non-conductive non-magnetic materials can be used. When the pole portion layer 14A is formed by dry etching, the material forming the non-magnetic layer 15 includes a material forming the pole portion layer 14A and an insulating layer in the gap layer 9 which is in contact with the pole portion layer 14A. It is preferable to use a material having a lower etching rate for dry etching than the material constituting 9C. As such a material, for example, a material containing titanium or tantalum (including an alloy and an oxide) can be used.

As shown in FIG. 5, the shape of the surface of the magnetic pole portion layer 14A exposed on the medium facing surface ABS is the lower side disposed on the rear side in the traveling direction T of the recording medium (the air inflow end side of the slider). Is preferably a trapezoid smaller than the upper side. The angle formed by the surface of the pole portion layer 14A on the gap layer 9 side and the side of the surface of the pole portion layer 14A exposed to the medium facing surface ABS is preferably from 92 to 110 °.

As described above, the thin film magnetic head according to the present embodiment has the medium facing surface AB facing the recording medium.
S, a reproducing head, and a recording head (inductive electromagnetic transducer). The reproducing head has a lower shield layer 3 for shielding the MR element 5 and an upper part, which are arranged so that the MR element 5 serving as a reproducing element is partially opposed to the medium facing surface ABS with the MR element 5 interposed therebetween. The shield layer 6 is provided.

The recording head includes magnetic pole portions arranged at predetermined intervals before and after the recording medium in the traveling direction T on the medium facing surface ABS side so as to face each other.
First magnetic layer 8 and second magnetic layer 14 magnetically connected to each other at a position distant from medium facing surface ABS
And a gap layer 9 made of a non-magnetic material, provided between the first magnetic layer 8 and the second magnetic layer 14, and at least a part thereof is formed of the first magnetic layer 8 and the second magnetic layer 14. Between,
And a thin-film coil 10 provided insulated from the magnetic layers 8 and 14.

The second magnetic layer 14 includes a magnetic pole portion, and the magnetic pole portion layer 14A whose width at the medium facing surface ABS defines the track width, and the yoke portion, are connected to the magnetic pole portion layer 14A via the connecting portion 14C. It has a yoke portion layer 14B for magnetically connecting the first magnetic layer 8 and a connecting portion 14C. The yoke portion layer 14B is magnetically connected to both side surfaces in the width direction of the pole portion layer 14A. The saturation magnetic flux density of the pole part layer 14A is equal to or higher than the saturation magnetic flux density of the yoke part layer 14B.

According to the present embodiment, the second magnetic layer 14
Has the pole portion layer 14A and the yoke portion layer 14B, so that the track width can be reduced without reducing the strength of the magnetic field applied to the recording medium.

In this embodiment, the yoke partial layer 1
4B is formed of a material having a higher specific electrical resistivity than the magnetic pole partial layer 14A. Thereby, the head according to the present embodiment can reduce the eddy current generated in the second magnetic layer 14 and has a high frequency characteristic.

In the present embodiment, the pole part layer 14
The surface of the thin film coil 10 on the side of the gap layer 9 is located farther from the first magnetic layer 8 than the surface of the thin film coil 10 on the side of the second magnetic layer 14. Therefore, according to the present embodiment, the length of the gap layer 9 is increased, and the component in the direction perpendicular to the surface of the recording medium in the magnetic field generated from the magnetic pole portion at the medium facing surface ABS is recorded. This makes it possible to make the component relatively large compared to the component in the direction horizontal to the surface of the medium.

Further, according to the present embodiment, since the yoke portion layer 14B is magnetically connected to both side surfaces in the width direction of the pole portion layer 14A, the yoke portion layer 14B is generated from the pole portion in the medium facing surface ABS. The component of the magnetic field in the direction perpendicular to the surface of the recording medium can be made relatively larger than the component in the direction horizontal to the surface of the recording medium.

Also, in the present embodiment, FIG.
As shown in FIG.
In a cross section that intersects the magnetic connection portion B and is parallel to the medium facing surface ABS, at least a part of the end portion of the yoke portion layer 14B on the gap layer 9 side is an end of the pole portion layer 14A on the gap layer 9 side. The portion is located closer to the first magnetic layer 8 than the portion. Thereby, according to the present embodiment,
The distance between the yoke partial layer 14B and the thin film coil 10 is reduced, and the thin film coil 1 is
It becomes possible to efficiently absorb the magnetic field generated from zero.

From the above, according to the present embodiment, the magnetic field in the direction perpendicular to the surface of the recording medium, which is generated from the magnetic pole portion, can be increased. In the present embodiment, when a high saturation magnetic flux density material is used for the magnetic pole partial layer 14A, the magnetic field in the direction perpendicular to the surface of the recording medium can be particularly increased, so that the recording medium with a large coercive force can be used. Recording is also possible.

By the way, it intersects with the magnetic connection between the magnetic pole portion layer 14A and the yoke portion layer 14B, and the medium facing surface A
In a section parallel to the BS, at least a part of the end of the yoke part layer 14B on the gap layer 9 side is brought close to the first magnetic layer 8 so that a step is formed on the yoke part layer 14B. May cause magnetic flux leakage. On the other hand, in the present embodiment, as shown in FIG. 2 or FIG.
4B, the end of the yoke portion layer 14B on the gap layer 9 side in the cross section parallel to the medium facing surface gradually becomes closer to the first magnetic layer 8 as the distance from the pole portion layer 14A increases. It is approaching. Therefore, according to the present embodiment, the leakage of the magnetic flux in the yoke portion layer 14B can be prevented, and the magnetic field in the direction perpendicular to the surface of the recording medium can be further increased.

Further, in the example shown in FIG.
4A and the yoke portion layer 14B, a cross section parallel to the medium facing surface ABS and having an end on the gap layer 9 side of the pole portion layer 14A and the yoke portion layer 14B.
Of the gap layer 9 side. In this case, there is a possibility that magnetic flux leaks at a step between the yoke partial layer 14B and the magnetic pole partial layer 14A. On the other hand, in the example shown in FIG. 3, in the cross section, the end of the pole portion layer 14A on the gap layer 9 side and the yoke portion layer 1
The end of 4B on the gap layer 9 side is continuous without a step.
According to the example shown in FIG. 3, it is possible to prevent the leakage of the magnetic flux at the step portion between the yoke partial layer 14B and the magnetic pole partial layer 14A, and to increase the magnetic field in the direction perpendicular to the surface of the recording medium. Can be. Therefore, the example shown in FIG. 3 is more preferable than the example shown in FIG.

In the present embodiment, FIG. 2 or FIG.
As shown in FIG.
At least a part of the connection surface with B is inclined with respect to a direction perpendicular to the surface of the pole portion layer 14A on the gap layer 9 side.
Therefore, according to the present embodiment, the area of the connection surface is larger than that in the case where the connection surface is perpendicular to the surface of the pole portion layer 14A on the gap layer 9 side, and from the yoke portion layer 14B via the connection surface. The magnetic flux can be efficiently guided to the magnetic pole portion layer 14A.

In the present embodiment, the connection surface is preferably inclined such that the angle θ between the connection surface and the surface of the pole portion layer 14A on the gap layer 9 side exceeds 90 °. In the present embodiment, the medium facing surface ABS
The shape of the surface of the magnetic pole portion layer 14A that is exposed to the outside is preferably a trapezoidal shape in which the lower side disposed on the rear side (the air inflow end side of the slider) in the traveling direction T of the recording medium is smaller than the upper side. That is, it is preferable that an angle formed by each side of the pole portion layer 14A in the width direction of the surface of the pole portion layer 14A exposed on the medium facing surface with the surface of the pole portion layer 14A on the gap layer 9 side exceeds 90 °. . Thus, when the thin-film magnetic head is used in the perpendicular magnetic recording system, it is possible to suppress a change in the recording track width when a skew angle occurs. The angle between each side in the width direction of the pole portion layer 14A on both sides of the pole portion layer 14A and the surface of the pole portion layer 14A exposed on the medium facing surface is defined as: It is preferable that the angle is all 92 to 110 °.

Here, as shown in FIGS. 2 and 3,
The gap layer 9 of the yoke partial layer 14B is located on a straight line formed by the cross section of the line AA in FIG. 1 and the cross section including the connection surface between the yoke partial layer 14B and the magnetic pole partial layer 14A.
The position of the end opposite to the point a is point a, the position of the end of the pole portion layer 14A on the side opposite to the gap layer 9 is point b, and the position of the end of the pole portion layer 14A on the gap layer 9 side is point. c, the position of the end of the yoke portion layer 14B on the gap layer 9 side is point d.

In this embodiment, the yoke partial layer 14A crosses the magnetic connection portion between the magnetic pole partial layer 14A and the yoke partial layer 14B and is parallel to the medium facing surface ABS.
The thickness of B is larger than the thickness of the pole portion layer 14A. That is, in the cross section shown in FIG. 2 or FIG. 3, the length of the line segment ad is larger than the length of the line segment bc. With such a configuration, the yoke partial layer 14A is located near the connection between the magnetic pole partial layer 14A and the yoke partial layer 14B.
The saturation of the magnetic flux on the B side can be prevented. This makes it possible to efficiently guide the magnetic flux from the yoke partial layer 14B to the magnetic pole partial layer 14A. As a result, the magnetic flux generated from the end of the magnetic pole partial layer 14A on the medium facing surface side is perpendicular to the surface of the recording medium. It is possible to increase the magnetic field in various directions.

The thin-film magnetic head according to the present embodiment is suitable for use in a perpendicular magnetic recording system. When using this thin film magnetic head in the vertical magnetic recording method, the first portion 14A ₁ in the pole portion layer 14A of the second magnetic layer 14 becomes the main magnetic pole, the pole portion of the first magnetic layer 8 is an auxiliary magnetic pole . When the thin-film magnetic head according to the present embodiment is used for the perpendicular magnetic recording system, it is possible to use either a two-layer medium or a single-layer medium as a recording medium.

In the thin-film magnetic head according to the present embodiment, the magnetic field in the direction perpendicular to the surface of the recording medium is larger than the magnetic field in the longitudinal direction, and the magnetic energy generated by the head is efficiently transmitted to the recording medium. be able to. Therefore, according to the thin-film magnetic head, the recording medium is hardly affected by the thermal fluctuation, and the linear recording density can be increased.

As shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the first magnetic layer 8 is located on the rear side in the traveling direction T of the recording medium (on the air inflow end side of the slider including the thin-film magnetic head). ), And the second magnetic layer 14 is preferably disposed on the front side (the air outflow end side of the slider including the thin film magnetic head) in the traveling direction T of the recording medium. But,
When the thin-film magnetic head according to the present embodiment is used for the perpendicular magnetic recording system, the first magnetic layer 8 and the second magnetic layer 14
May be reversed from the above arrangement.

As shown in FIG. 4, in the thin-film magnetic head according to the present embodiment, the end of the yoke portion layer 14B on the medium facing surface ABS side is arranged at a position away from the medium facing surface ABS. ing. Thereby, the yoke partial layer 14
It is possible to prevent writing of information on the recording medium due to a magnetic field generated from the end of the medium facing surface B on the side of the medium facing surface ABS.

Further, as shown in FIG. 1, the thin-film magnetic head according to the present embodiment includes the non-magnetic layer 15 in contact with the entire surface of the pole portion layer 14A on the side opposite to the gap layer 9. . When the non-magnetic layer 15 is not provided, the magnetic pole partial layer 1
When the 4A is formed by dry etching or when the yoke portion layer 14B is formed by electroplating, the surface of the pole portion layer 14A on the side opposite to the gap layer 9 is damaged. Unevenness of about 0.3 μm occurs. In the present embodiment, since the nonmagnetic layer 15 is provided, the gap between the pole portion layer 14A and the yoke portion layer 14A can be reduced when the pole portion layer 14A is formed by dry etching or when the yoke portion layer 14B is formed by electroplating. The surface opposite to the layer 9 can be prevented from being damaged, and the surface can be made flat.

In the present embodiment, since the nonmagnetic layer 15 is exposed on the medium facing surface ABS, the medium facing surface AB
In S, the end of the pole portion layer 14A opposite to the gap layer 9 can be kept flat. Thus, the magnetic field generated from the pole portion layer 14A in the medium facing surface ABS can be made uniform in the direction intersecting the track. As a result, the linear recording density can be improved while suppressing the distortion of the bit pattern shape in the recording medium.

Further, the nonmagnetic layer 15 is replaced with the pole portion layer 14A.
And the material forming the gap layer 9 and the material forming the portion of the gap layer 9 which is in contact with the magnetic pole portion layer 14A, the material having a lower etching rate for dry etching is used to form the magnetic pole portion layer 14A by dry etching. At this time, it is possible to prevent the surface of the pole portion layer 14A on the side opposite to the gap layer 9 from being damaged.

As shown in FIG. 1, in the thin-film magnetic head according to this embodiment, the first
The portion disposed between the first magnetic layer 8 and the second magnetic layer 14 is located closer to the first magnetic layer 8 than to a position between the first magnetic layer 8 and the second magnetic layer 14. Have been. Thereby, the magnetic field generated from the thin-film coil 10 can be efficiently absorbed by the first magnetic layer 8 having a larger volume than the second magnetic layer 14, and compared with the case where the thin-film coil 10 is closer to the second magnetic layer 14. Thus, the magnetic field absorptivity in the first magnetic layer 8 and the second magnetic layer 14 can be increased.

Further, as shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the gap layer 9 is formed of a material having fluidity at the time of formation, and at least the thin-film coil 1 is formed.
A first portion (insulating layer 9B) filled between the 0 windings;
A second portion which is made of a material having better corrosion resistance, rigidity and insulation than the first portion, covers the thin film coil 10 and the first portion, and is in contact with the first magnetic layer 8 and the second magnetic layer 14 (Insulating layers 9A and 9C). The second portion of the gap layer 9 is exposed at the medium facing surface ABS. Although it is difficult to fill a non-magnetic material with no gap between the windings of the thin-film coil 10 by a sputtering method, it is easy when a non-magnetic material having fluidity such as an organic material is used. . However, organic materials have poor reliability in terms of resistance to dry etching, corrosion resistance, heat resistance, rigidity, and the like. In the present embodiment, as described above,
A first portion (insulating layer 9B) filled between the windings of the thin-film coil 10 is formed of a material having fluidity at the time of formation, and a material having better corrosion resistance, rigidity, and insulation than the first portion is formed. Since the second portion (insulating layers 9A and 9C) which covers the thin film coil 10 and the first portion and is in contact with the first magnetic layer 8 and the second magnetic layer 14 is formed, the thin film coil 10 The non-magnetic material can be filled without gaps between the windings, and the reliability of the gap layer 9 can be improved.

The thin-film magnetic head according to the present embodiment has an MR element 5 as a reproducing element. Thereby, the reproduction performance can be improved as compared with the case where the reproduction is performed using the induction type electromagnetic transducer. Also, MR
Since the element 5 is shielded by the shield layers 3 and 6, the resolution at the time of reproduction can be improved.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. 6, FIG. 8, FIG. 10, FIG. 12, FIG. 14, FIG. 16, FIG. 18, FIG. 20 and FIG. 22 show cross sections perpendicular to the medium facing surface and the surface of the substrate. 7, 9, 11, 13, 15, 17, 19, 21.
23 and FIG. 23 show cross sections corresponding to the cross section taken along line AA in FIG.

In the method of manufacturing a thin-film magnetic head according to the present embodiment, first, an insulating layer 2 is formed on a substrate 1. Next, the lower shield layer 3 is formed on the insulating layer 2. Next, an insulating film to be a part of the insulating layer 4 is formed on the lower shield layer 3, and the MR element 5 and the M
A lead (not shown) connected to the R element 5 is formed.
Next, the MR element 5 and the lead are covered with a new insulating film to be another part of the insulating layer 4, and the MR element 5 and the lead are embedded in the insulating layer 4.

Next, the upper shield layer 6 is formed on the insulating layer 4, and the nonmagnetic layer 7 is formed thereon. Next, a first magnetic layer 8 is formed on the non-magnetic layer 7 in a predetermined shape. Next, although not shown, the non-magnetic layer 7 and the first magnetic layer 8 are covered with a non-magnetic material such as alumina to form the first magnetic layer 8.
Is polished until the first magnetic layer 8 is exposed.
Is flattened. 6 to 23, the substrate 1 to the nonmagnetic layer 7 are omitted.

Next, as shown in FIGS. 6 and 7, a non-conductive and non-magnetic material such as alumina is sputtered on the first magnetic layer 8 to form an insulating layer 9A. next,
Using well-known photolithography technology and dry etching technology, at the position where the connecting portion 14C is to be formed,
A contact hole 9a is formed in the insulating layer 9A. next,
The thin-film coil 10 is formed on the insulating layer 9A by using a well-known photolithography technique and a film forming technique (for example, an electroplating method). Next, an insulating layer 9B filled at least between the windings of the thin-film coil 10 is formed by using a known photolithography technique.

Next, the first magnetic layer 8 is formed at a position where the contact hole 9a is formed by using a well-known photolithography technique and a film forming technique (for example, an electroplating method).
The connecting portion 14C is formed on the. The thickness of the connecting portion 14C is, for example, 2 to 4 μm. Next, an insulating layer 9C is formed using a sputtering method so as to cover the thin-film coil 10, the insulating layer 9A, the insulating layer 9B, and the connecting portion 14C. The thickness of the insulating layer 9C at this point may be a thickness that can sufficiently cover the connecting portion 14C, and is, for example, 5 μm.

Next, as shown in FIGS. 8 and 9, the insulating layer 9C and the connecting portion 1 are formed by using, for example, chemical mechanical polishing.
The upper surface of 4C is flattened. At this point, the first magnetic layer 8
The distance from the upper surface to the upper surfaces of the insulating layer 9C and the connecting portion 14C is, for example, 2 to 4 μm. The sum of the thicknesses of the insulating layer 9A and the insulating layer 9C in the medium facing surface is the gap length of the recording head (induction type electromagnetic transducer).

Next, as shown in FIGS. 10 and 11, on the insulating layer 9C and the connecting portion 14C, the layer to be etched 14Ae made of the material constituting the pole portion layer 14A is formed.
To form The thickness of the layer to be etched 14Ae is preferably 0.1 to 0.8 μm, more preferably 0.3 to 0.8 μm.
0.8 μm. The method of forming the layer 14Ae to be etched may be an electroplating method or a sputtering method. When the surface roughness of the layer 14Ae to be etched is large (for example, when the arithmetic average roughness Ra is 12 Å or more), the surface of the layer 14Ae to be etched is polished and flattened by chemical mechanical polishing or the like. Is preferred.

Next, a nonmagnetic layer 15e is formed on the layer to be etched 14Ae. The thickness of the nonmagnetic layer 15e is preferably set to 0.5 μm or less.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15e by sputtering. The thickness of this electrode layer is 0.1 μm or less, and the material is, for example, an iron-nickel alloy.

Next, as shown in FIGS. 12 and 13, a mask 32 for determining the shapes of the pole portion layer 14A and the non-magnetic layer 15 is formed on the electrode layer.
The thickness of the mask 32 is 0.3 to 4 μm, and the material is, for example, an iron-nickel alloy. The material of the mask 32 is preferably a material having excellent resistance to dry etching performed later. When the material of the mask 32 is an iron-nickel alloy, for example, a frame plating method is used as a method of forming the mask 32. Also, the mask 32
May be formed of a photoresist. In this case, the mask 32 is formed using a photolithography technique.

Next, as shown in FIGS. 14 and 15, the nonmagnetic layer 15e and the layer to be etched 14Ae are etched using the mask 32 by a dry etching technique such as ion milling. And the outer shape of the pole portion layer 14A, and the insulating layer 9C
Is partially etched to determine the shape of the base of the yoke partial layer 14B in the vicinity of the magnetic connection between the magnetic pole partial layer 14A and the yoke partial layer 14B. Further, by this etching, the width of the pole portion layer 14A on the medium facing surface may be defined so as to conform to the track width standard.

In the present embodiment, at the time of the above etching, at least a part of the end face (hereinafter, referred to as the rear end face) of the pole portion layer 14A opposite to the medium facing surface ABS and at least a part of both side faces are inclined. wear. At this time, the shape of the surface of the magnetic pole partial layer 14A exposed on the medium facing surface is also determined. For example, when ion milling is used as an etching method, the direction of ion irradiation is set in a direction perpendicular to the surface of the substrate (the surface of the nonmagnetic layer 15 and the magnetic pole partial layer 14A). There is a method of irradiating from an inclined direction. Each side in the width direction of the pole part layer 14A on the rear end face and both side faces of the pole part layer 14A and the surface of the pole part layer 14A exposed to the medium facing surface is the pole part layer 14A.
The angle between A and the surface on the gap layer 9 side is 92 to 11 in all cases.
It is preferably 0 °. In this case, the back end face and both side faces of the pole portion layer 14A are simultaneously formed by one etching,
In addition, the shape of the surface of the pole portion layer 14A exposed on the medium facing surface can be determined.

The etching is performed on the insulating layer 9C shown in FIG.
May be finished when the upper end of the slope coincides with the position where both side surfaces of the pole portion layer 14A intersect with the surface of the pole portion layer 14A on the gap layer 9 side. At this time, the mask 32
It may remain or may be removed if unnecessary. Also, by this etching, the upper surface of the base of the yoke portion layer 14B near the magnetic connection portion between the pole portion layer 14A and the yoke portion layer 14B gradually increases as the distance from the pole portion layer 14A increases. , The shape of the base is determined.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15 and the insulating layer 9C by sputtering. The thickness of this electrode layer is 0.1 μ
m or less, the material may be, for example, an iron-nickel alloy, and a Ti (titanium) film may be formed as a base.

Next, as shown in FIGS. 16 and 17, a resist frame 35 having a cavity corresponding to the shape of the yoke portion layer 14B is formed on the electrode layer by using a photoresist.

Next, as shown in FIGS. 18 and 19, using the resist frame 35, the yoke partial layer 14B is formed on the electrode layer by electroplating (frame plating). Next, the resist frame 35 is removed. The yoke partial layer 14B can be formed using a lift-off method, but the yoke partial layer 14B
It is most preferable to use an electroplating method in order to make the shape follow the shape of the base.

Next, although not shown, portions of the electrode layer other than those existing under the yoke portion layer 14B are removed by dry etching.

Next, as shown in FIGS. 20 and 21, a protective layer 17A is formed so as to cover the nonmagnetic layer 15 and the yoke partial layer 14B. The thickness of the protective layer 17A is preferably about 1.5 to 2 times the height difference of the unevenness on the laminated surface.

Next, as shown in FIGS. 22 and 23, the protective layer 17A is polished by, for example, chemical mechanical polishing until the non-magnetic layer 15 is exposed.
Of the surface of the non-magnetic layer 15 opposite to the gap layer 9 and the protective layer 17A at least in the vicinity of the portion magnetically connected to the pole portion layer 14A. Is flattened together with the upper surface.

Next, as shown in FIG. 1, a protective layer 17B is formed so as to cover the entire lamination surface. Next, the protective layer 1
Wiring, terminals, and the like are formed on 7B, the substrate is cut in units of sliders, the ABS of the medium facing surface is polished, and a flying rail is manufactured, thereby completing a thin-film magnetic head.

According to the method of manufacturing a thin-film magnetic head according to the present embodiment, the following actions and effects can be obtained in addition to the actions and effects similar to those of the thin-film magnetic head according to the present embodiment.

In the present embodiment, the layer to be etched 1
When the upper surface of the layer 14Ae to be etched is flattened by polishing after the step of forming the 4Ae, the end of the pole portion layer 14A opposite to the gap layer 9 on the medium facing surface ABS is completely removed. It can be planarized. As a result, the magnetic field generated by the magnetic pole portion layer 14A in the medium facing surface ABS can be made uniform in the direction intersecting the track. As a result, distortion of the bit pattern shape on the recording medium can be suppressed, and Can be improved.

In the present embodiment, before the step of forming the layer to be etched 14Ae, the insulating layer 9C serving as a base of the layer to be etched 14Ae and the connecting portion 1A are polished.
The upper surface of 4C is flattened. This makes it possible to flatten the end of the pole portion layer 14A on the gap layer 9 side in the medium facing surface ABS. In the case where the etching target layer 14Ae is formed by a sputtering method, the film thickness of the etching target layer 14Ae at the time of film formation is good,
In the medium facing surface ABS, the end of the pole portion layer 14A on the side opposite to the gap layer 9 can also be flattened. From these facts, the magnetic field generated from the magnetic pole partial layer 14A in the medium facing surface ABS can be made uniform in the direction intersecting the track. As a result, the distortion of the bit pattern shape in the recording medium can be suppressed, and The recording density can be improved.

In this embodiment, the step of forming the pole portion layer 14A includes forming the layer to be etched 14Ae, forming the nonmagnetic layer 15e on the layer to be etched 14Ae, and forming the layer on the nonmagnetic layer 15e. Then, a mask 32 corresponding to the shape of the pole portion layer 14A is formed, and the nonmagnetic layer 15e and the layer to be etched 14Ae are etched using the mask 32 to determine the outer shape of the pole portion layer 14A. Therefore, according to the present embodiment, the layer to be etched 1
Since the outer shape of the pole portion layer 14A can be determined while the upper surface of the 4Ae is protected by the non-magnetic layer 15e, the flatness of the end portion of the pole portion layer 14A opposite to the gap layer 9 on the medium facing surface is maintained. Can be.

In the present embodiment, the layer to be etched 14 is formed by dry etching using the mask 32.
Ae is selectively etched to determine the outer shape of the pole portion layer 14A, and a part of the insulating layer 9C is etched to form a yoke near the magnetic connection portion between the pole portion layer 14A and the yoke portion layer 14B. The shape of the base of the partial layer 14B is determined. Therefore, according to the present embodiment,
Briefly, the outer shape of the pole portion layer 14A and the pole portion layer 14A
Shape of the base of the yoke part layer 14B in the vicinity of the magnetic connection between the yoke part layer 14B and the yoke part layer 14B can be determined.

In the present embodiment, when the mask 32 having excellent resistance to dry etching is used, the mask 32 can be used even when the material forming the pole portion layer 14A has excellent resistance to dry etching. The outer shape of the pole portion layer 14A can be determined by the used dry etching.

In the present embodiment, in the step of forming the yoke portion layer 14B, the yoke portion layer 14B may be formed by electroplating. In this case, the yoke portion layer 14B can be easily formed, and the yoke portion layer 14B can be formed in a shape that closely follows the shape of the underlying layer.

In this embodiment, the surface of the pole portion layer 14A opposite to the gap layer 9 may be flattened together with the upper surface of the protective layer 17A without providing the nonmagnetic layer 15. In this case, the method of forming the pole portion layer 14A is not limited to the method described in the embodiment, and may be formed by, for example, a frame plating method. Further, the magnetic pole partial layer 1
In the step of flattening the surface of 4A opposite to the gap layer 9, the thickness of the pole portion layer 14A may be set within the range of the pole portion layer 14A described in the embodiment.

[Second Embodiment] Next, a second embodiment of the present invention will be described.
A thin film magnetic head according to the embodiment and a method for manufacturing the same will be described. First, the configuration of the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. FIG. 24 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 24 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. FIG.
In FIG. 4, the arrow indicated by the symbol T indicates the traveling direction of the recording medium. FIG. 25 is a sectional view taken along line BB of FIG.
FIG. 26 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

In the thin-film magnetic head according to the present embodiment,
The magnetic pole partial layer 14A extends from the medium facing surface ABS to a predetermined position between the medium facing surface ABS and the connecting portion 14C.
It is formed on the insulating layer 9C. In the present embodiment, the yoke portion layer 14B magnetically connects the upper end portion of the connection portion 14C and the rear end surface of the pole portion layer 14A. On the surface of the yoke partial layer 14B opposite to the gap layer 9, the vicinity of a portion magnetically connected to the magnetic pole partial layer 14A on the rear end surface and the both lateral sides in the width direction of the magnetic pole partial layer 14A is non-conductive. The surface of the magnetic layer 15 opposite to the gap layer 9 and the upper surface of the protective layer 17A are planarized.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. 27 to 32 show cross sections perpendicular to the medium facing surface and the surface of the substrate. 27 to 32, the substrate 1 to the nonmagnetic layer 7 are omitted.

In the method of manufacturing the thin-film magnetic head according to the present embodiment, as shown in FIGS. 10 and 11, a non-magnetic layer 15e is formed, and an electroplating method is formed on the non-magnetic layer 15e. Until the step of forming an electrode layer not shown,
This is the same as in the first embodiment.

In the present embodiment, as shown in FIG. 27, a mask 32 for determining the shapes of the pole portion layer 14A and the nonmagnetic layer 15 in the present embodiment is formed on the electrode layer. To form B in FIG. 24 in this state
A cross-sectional view corresponding to a cross section taken along line -B is similar to FIG.

Next, as shown in FIG.
And the non-magnetic layer 15e and the layer to be etched 14Ae by a dry etching technique such as ion milling.
Is etched to form the non-magnetic layer 15 and the pole portion layer 14.
Determine the outline of A. BB of FIG. 24 in this state
A cross-sectional view corresponding to the line cross-section is similar to FIG.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15 and the insulating layer 9C by sputtering.

Next, as shown in FIG. 29, the yoke partial layer 14B is
Frame 35 having a cavity corresponding to the shape of
To form A sectional view corresponding to the section taken along line BB of FIG. 24 in this state is the same as FIG.

Next, as shown in FIG. 30, a yoke portion layer 14B is formed on the electrode layer by an electroplating method (frame plating method) using a resist frame 35. Next, the resist frame 35 is removed. In addition,
The yoke partial layer 14B can be formed by a lift-off method, but it is most preferable to use an electroplating method in order to make the shape of the yoke partial layer 14B follow the shape of the base. A sectional view corresponding to the section taken along line BB of FIG. 24 in this state is similar to FIG.

Next, although not shown, portions of the electrode layer other than the portion under the yoke portion layer 14B are removed by dry etching.

Next, as shown in FIG. 31, the non-magnetic layer 1
5 and the yoke partial layer 14B.
To form A sectional view corresponding to the section taken along line BB of FIG. 24 in this state is similar to FIG.

Next, as shown in FIG. 32, the protective layer 17A is polished by, for example, chemical mechanical polishing until the nonmagnetic layer 15 is exposed, and the gap layer 9 of the yoke partial layer 14B is polished.
At least in the vicinity of the portion magnetically connected to the magnetic pole portion layer 14A on the surface on the opposite side to the nonmagnetic layer 15A.
Is flattened together with the surface opposite to the gap layer 9 and the upper surface of the protective layer 17A. BB of FIG. 24 in this state
A cross-sectional view corresponding to the line cross-section is similar to FIG.

Next, as shown in FIG. 24, a protective layer 17B is formed so as to cover the entire lamination surface. Next, wirings, terminals, and the like are formed on the protective layer 17B, the substrate is cut in units of sliders, polishing of the ABS facing the medium, preparation of flying rails, and the like are performed to complete the thin-film magnetic head.

In the present embodiment, the yoke partial layer 14B
Is not only on both side surfaces in the width direction of the pole part layer 14A, but also on the rear end face of the pole part layer 14A.
Are magnetically connected to Therefore, according to the present embodiment, the yoke partial layer 14B and the pole partial layer 14A
The area of the connection portion with the magnetic pole portion can be increased, and the magnetic flux can be efficiently guided from the yoke portion layer 14B to the magnetic pole portion layer 14A. Therefore, according to the present embodiment, it is possible to further increase the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium.

Further, in the present embodiment, the yoke partial layer 14B is formed by dry etching the layer to be etched 14Ae so as to have a gentle inclination from the rear end face of the pole part layer 14A to the upper end of the connecting part 14C. The shape of the base is determined. Therefore, by forming the yoke partial layer 14B on this base, it is possible to form a magnetic path connecting the connecting portion 14C and the magnetic pole partial layer 14A with the shortest distance. Thereby, according to the present embodiment, the magnetic path length can be shortened, and the high frequency characteristics can be improved.

Other configurations, operations and effects of the present embodiment are the same as those of the first embodiment.

[Third Embodiment] Next, a third embodiment of the present invention will be described.
A thin film magnetic head according to the embodiment and a method for manufacturing the same will be described. First, the configuration of the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. FIG. 33 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 33 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. FIG.
In FIG. 3, the arrow indicated by the symbol T indicates the traveling direction of the recording medium. FIG. 34 is a sectional view taken along line CC of FIG.
FIG. 35 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

In the thin-film magnetic head according to the present embodiment,
The yoke portion layer 14B is magnetically connected to the pole portion layer 14A on the rear end face and both side surfaces in the width direction of the pole portion layer 14A. Thus, it is adjacent to the surface of the pole portion layer 14A opposite to the gap layer 9 and is magnetically connected to the pole portion layer 14A via the nonmagnetic layer 15. The end of the yoke portion layer 14B on the medium facing surface ABS side is the medium facing surface AB.
It is arranged at a position distant from S by, for example, 1.5 μm or more.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described. In the method of manufacturing the thin-film magnetic head according to the present embodiment, as shown in FIG. 30, the yoke portion layer 14B is formed, the resist frame 35 is removed, and the yoke portion layer 14B is provided under the yoke portion layer 14B among the electrode layers. The steps up to the step of removing portions other than the portions to be performed by dry etching are the same as in the second embodiment. In the present embodiment, next, as shown in FIGS. 33 and 34, the same as the protective layer 17B in the first and second embodiments, so as to cover the nonmagnetic layer 15 and the yoke partial layer 14B. The protection layer 17 is formed. Next, wirings, terminals, and the like are formed on the protective layer 17, the substrate is cut in units of sliders, the ABS of the medium facing surface is polished, and a flying rail is manufactured to complete the thin-film magnetic head.

In this embodiment, a part of the yoke portion layer 14B on the medium facing surface ABS side is magnetically connected to the pole portion layer 14A via the nonmagnetic layer 15. Therefore, according to the present embodiment, the area of the portion where magnetic pole portion layer 14A and yoke portion layer 14B are magnetically connected to each other is increased, and magnetic flux can be more efficiently guided from yoke portion layer 14B to pole portion layer 14A. Will be possible.

In the present embodiment, the angle between the connection surface of the pole portion layer 14A and the yoke portion layer 14B and the surface of the pole portion layer 14A on the gap layer 9 side exceeds 90 °. It is preferable that they are inclined as follows. In this case, the area of the portion where the magnetic pole portion layer 14A and the yoke portion layer 14B are magnetically connected on the surface of the magnetic pole portion layer 14A opposite to the gap layer 9 increases, and It becomes possible to guide magnetic flux to 14A more efficiently.

Other structures, operations and effects of the present embodiment are the same as those of the second embodiment.

[Fourth Embodiment] Next, a fourth embodiment of the present invention will be described.
A thin film magnetic head according to the embodiment and a method for manufacturing the same will be described. First, the configuration of the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. FIG. 36 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 36 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. FIG.
In FIG. 6, the arrow indicated by the symbol T indicates the traveling direction of the recording medium. FIG. 37 is a sectional view taken along line DD of FIG.
FIG. 38 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

In the thin-film magnetic head according to the present embodiment,
The yoke portion layer 14B is magnetically connected to the pole portion layer 14A on both side surfaces in the width direction of the pole portion layer 14A, and is opposite to the gap layer 9 of the pole portion layer 14A via the nonmagnetic layer 15. And is magnetically connected to the pole portion layer 14A via the nonmagnetic layer 15. The end of the yoke portion layer 14B on the medium facing surface ABS side is disposed at a position separated from the medium facing surface ABS by, for example, 1.5 μm or more.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described. In the method of manufacturing the thin-film magnetic head according to the present embodiment, as shown in FIGS.
This is the same as in the first embodiment. In the present embodiment, next, as shown in FIG. 36 and FIG.
Protective layer 1 similar to protective layer 17B in the first and second embodiments so as to cover and yoke partial layer 14B.
7 is formed. Next, wirings, terminals, and the like are formed on the protective layer 17, and the substrate is cut in units of sliders.
The thin film magnetic head is completed by polishing S, fabricating a flying rail, and the like.

In the present embodiment, the yoke partial layer 14B
Are magnetically connected to the pole portion layer 14A via the nonmagnetic layer 15. Therefore, according to the present embodiment, the area of the portion where the magnetic pole portion layer 14A and the yoke portion layer 14B are magnetically connected to each other increases, and the magnetic flux can be more efficiently guided from the yoke portion layer 14B to the magnetic pole portion layer 14A. Will be possible.

Other configurations, operations and effects of the present embodiment are the same as those of the first embodiment.

[Fifth Embodiment] Next, a fifth embodiment of the present invention will be described.
A thin film magnetic head according to the embodiment and a method for manufacturing the same will be described. First, the configuration of the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. FIG. 39 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 39 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. FIG.
In FIG. 9, the arrow indicated by the symbol T indicates the traveling direction of the recording medium. FIG. 40 is a sectional view taken along line EE of FIG.
FIG. 41 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

In the thin-film magnetic head according to the present embodiment,
The yoke partial layer 14B is composed of the first magnetic layer 8 and the pole partial layer 1.
4A in contact with the surface of the gap layer 9 side, the first layer 14B ₁ that is magnetically connected to these, the first layer 14B ₁
And the second layer 14B magnetically connected to the rear end face and both side faces in the width direction of the magnetic pole portion layer 14A.
Includes ₂ and.

The first layer 14B ₁ of the yoke partial layer 14B is
The first magnetic layer 8 and the insulating layer 9 extend from the position where the contact hole 9a is formed toward the medium facing surface ABS to a position on the end surface of the insulating layer 9C opposite to the medium facing surface ABS.
B. The first layer 14B ₁ of the thickness at the position of the contact hole 9a is larger than the total thickness of the insulating layer 9A and the insulating layer 9B, is, for example 3μm or more. End of the first layer 14B ₁ of the bearing surface ABS side, a position away from the bearing surface ABS e.g. 1.5μm or more, the medium facing surface than the rear end surface of the pole portion layer 14A A
It is located near the BS. Magnetic material forming the first layer 14B _1, for example iron - may be a nickel-based alloy That Permalloy, or a high saturation magnetic flux density material.

[0142] upper surface of the portion of the bearing surface ABS side of the first layer 14B ₁ of the yoke portion layer 14B and the insulating layer 9C is flattened. Pole portion layer 14A is formed on the planarized top surface of the first layer 14B ₁ and the insulating layer 9C. Therefore, the first layer 1 of the yoke partial layer 14B
4B ₁ is in contact with and magnetically connected to a part of the surface of the pole portion layer 14A on the gap layer 9 side.

The second layer 14B ₂ of the yoke partial layer 14B is
It is disposed on the first layer 14B ₁ and the nonmagnetic layer 15. The second layer 14B _2, the first layer 14B ₁ and the magnetic pole portion layer 14
A is in contact with the rear end face of A and both side faces in the width direction, and is magnetically connected thereto. A part of the second layer 14B ₂ of bearing surface ABS side, adjacent to the top surface of the pole portion layer 14A through the non-magnetic layer 15, magnetically pole portion layer 14A through the non-magnetic layer 15 It is connected. The second layer 14B ₂ of the thickness of the yoke portion layer 14B is, for example 0.5
2 μm. Magnetic material forming the second layer 14B ₂ is
For example, an iron-nickel alloy, that is, permalloy, or a high saturation magnetic flux density material may be used.

The other structure of the thin-film magnetic head according to the present embodiment is the same as that of the third embodiment.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. 42 to 49 show cross sections perpendicular to the medium facing surface and the surface of the substrate. 42 to 49, the substrate 1 to the nonmagnetic layer 7 are omitted. The method of manufacturing the thin-film magnetic head according to the present embodiment is the same as that of the first embodiment up to the step of forming the insulating layer 9B.

In the present embodiment, next, as shown in FIG. 42, the contact hole 9 is formed by using a well-known photolithography technique and a film forming technique (for example, electroplating).
From a is formed position to a predetermined position toward the medium facing surface ABS, forming the first layer 14B ₁ of the yoke portion layer 14B on the first magnetic layer 8 and the insulating layer 9B. At this point, the shape of the first layer 14B _1, for example, a thickness 3μm
Above, depth (length in the direction perpendicular to the medium facing surface ABS)
Is 2 to 10 μm and the width is 5 to 20 μm.

[0147] Next, as shown in FIG. 43, by sputtering, the insulating layer 9A, an insulating layer 9C so as to cover the first layer 14B ₁ of the insulating layer 9B and the yoke portion layer 14B. At this point, the thickness of the insulating layer 9C is
The thickness should be at least ₁ .

Next, as shown in FIG. 44, the first layer 14B of the yoke partial layer 14B is
₁ by polishing the surface of the insulating layer 9C to expose the planarized upper surface of the insulating layer 9C and the first layer 14B _1. At this point, the distance from the upper surface of the first magnetic layer 8 to the upper surface of the insulating layer 9C is, for example, 3 to 6 μm.

Next, as shown in FIG. 45, the insulating layer 9C
And on the first layer 14B _1, to form the first embodiment and the same layer to be etched 14Ae and the non-magnetic layer 15e in this order.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15e by sputtering. The thickness of this electrode layer is 0.1 μm or less, and the material is, for example, an iron-nickel alloy.

Next, as shown in FIG. 46, a mask 32 for determining the shapes of the pole portion layer 14A and the non-magnetic layer 15 is formed on the electrode layer.

Next, as shown in FIG.
And the non-magnetic layer 15e and the layer to be etched 14Ae by a dry etching technique such as ion milling.
Is etched to form the non-magnetic layer 15 and the pole portion layer 14.
Determine the outline of A. As in the first embodiment, at the time of the above-mentioned etching, at least a part of the rear end face and both side faces of the pole part layer 14A may be inclined. At this time, the shape of the surface of the magnetic pole partial layer 14A exposed on the medium facing surface is also determined. The mask 32 may remain or may be removed if unnecessary.

[0153] Next, although not shown, the non-magnetic layer 15, on the first layer 14B ₁ of the insulating layer 9C and the yoke portion layer 14B, by a sputtering method to form the electrode layer for electroplating. The thickness of this electrode layer may be 0.1 μm or less, the material may be, for example, an iron-nickel alloy, and a Ti (titanium) film may be formed as a base.

Next, as shown in FIG. 48, the yoke partial layer 14B is
Forming a resist frame 35 having a gap portion corresponding to the second layer 14B ₂ shapes.

Next, as shown in FIG. 49, using the resist frame 35, the second yoke portion layer 14B is formed on the electrode layer by electroplating (frame plating).
Forming a layer 14B _2. Next, the resist frame 35 is removed.

[0156] Next, although not shown, of the electrode layer, to remove portions other than the portion below the second layer 14B ₂ of the yoke portion layer 14B by dry etching.

Next, as shown in FIG. 39, a protective layer 17 is formed so as to cover the second magnetic layer. Next, wirings, terminals, and the like are formed on the protective layer 17, the substrate is cut in units of sliders, the ABS of the medium facing surface is polished, and a flying rail is manufactured to complete the thin-film magnetic head.

In the present embodiment, the yoke partial layer 14B
Is magnetically connected to the pole part layer 14A on the rear end face and both side faces in the width direction of the pole part layer 14A in the same manner as in the third embodiment, and is opposite to the gap layer 9 of the pole part layer 14A. The surface is magnetically connected to the pole portion layer 14A via the nonmagnetic layer 15. Yoke partial layer 14B
Is magnetically connected to the pole portion layer 14A also on the surface of the pole portion layer 14A on the gap layer 9 side. Therefore, according to the present embodiment, it is possible to increase the area of the magnetic connection portion between the pole portion layer 14A and the yoke portion layer 14B, and as a result, the magnetic flux can be efficiently transferred from the yoke portion layer 14B to the pole portion layer. 14A.

The other structure, operation and effect of the present embodiment are the same as those of the third embodiment.

The present invention is not limited to the above embodiments, and various changes can be made.

[0161]

As described above, claims 1 to 1
In the thin-film magnetic head according to any one of the first to third aspects, the surface of the magnetic pole partial layer on the gap layer side is arranged at a position farther from the first magnetic layer than the surface of the thin-film coil on the second magnetic layer side, and the yoke Since the partial layer is magnetically connected to the pole partial layer on at least a part of both side surfaces in the width direction of the pole partial layer, of the magnetic field generated from the pole portion on the medium facing surface, The component in the direction perpendicular to the surface of the recording medium can be made relatively larger than the component in the direction horizontal to the surface of the recording medium. Further, in the present invention, at least a part of the end of the yoke portion layer on the gap layer side crosses the magnetic connection portion between the magnetic pole portion layer and the yoke portion layer and is parallel to the medium facing surface. Since the layer is located closer to the first magnetic layer than the end of the layer on the gap layer side, the distance between the yoke partial layer and the thin-film coil is reduced, thereby reducing the magnetic field generated from the thin-film coil. Can be efficiently absorbed.
From these facts, according to the present invention, there is an effect that the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium can be increased.

According to the thin-film magnetic head of the second aspect, the yoke partial layer further has a magnetic property with respect to the magnetic pole partial layer on at least a part of the end face of the magnetic pole partial layer opposite to the medium facing surface. The effect is that the magnetic field in the direction perpendicular to the surface of the recording medium, which is generated from the magnetic pole portion, can be further increased.

According to the thin-film magnetic head of the third aspect, in the section parallel to the magnetic connection portion between the magnetic pole portion layer and the yoke portion layer and parallel to the medium facing surface, the yoke portion layer is closer to the gap layer side. Is gradually approached to the first magnetic layer as the distance from the magnetic pole portion layer increases, so that leakage of magnetic flux in the yoke portion layer is prevented, and the magnetic field in the direction perpendicular to the surface of the recording medium is further increased. It has the effect of being able to do so.

According to the thin-film magnetic head of the fourth aspect, the magnetic pole connecting layer intersects the magnetic connection portion between the magnetic pole partial layer and the yoke partial layer and has a cross section parallel to the medium facing surface on the gap layer side of the magnetic pole partial layer. And the end of the yoke partial layer on the gap layer side is continuous without any step, so that leakage of magnetic flux between the yoke partial layer and the magnetic pole partial layer is prevented, and the end perpendicular to the surface of the recording medium. There is an effect that the magnetic field in the direction can be further increased.

According to the thin-film magnetic head of the fifth aspect, at least a part of the connection surface between the partial layer and the yoke partial layer is inclined with respect to the direction perpendicular to the surface of the pole part layer on the gap layer side. Therefore, the area of the connection surface is larger than when the connection surface is perpendicular to the surface of the pole portion layer on the gap layer side, and the magnetic flux is efficiently guided from the yoke portion layer to the pole portion layer via the connection surface. This has the effect that it becomes possible.

According to the thin-film magnetic head of the sixth aspect, the thickness of the yoke partial layer in the cross section which intersects with the magnetic connection between the magnetic pole partial layer and the yoke partial layer and is parallel to the medium facing surface is Since the thickness is larger than the thickness of the partial layer, saturation of magnetic flux on the yoke partial layer side can be prevented in the vicinity of the connection portion between the magnetic pole partial layer and the yoke partial layer. There is an effect that the magnetic field in the direction can be further increased.

According to the thin film magnetic head of the present invention, the yoke portion layer is further magnetically connected to the pole portion layer on a surface of the pole portion layer opposite to the gap layer. Therefore, the area of the portion where the magnetic pole portion layer and the yoke portion layer are magnetically connected to each other is increased, so that the magnetic flux can be more efficiently guided from the yoke portion layer to the magnetic pole portion layer.

According to the thin-film magnetic head of the present invention, the non-magnetic layer further includes a non-magnetic layer in contact with the entire surface of the pole portion layer on the side opposite to the gap layer. The magnetic pole part layer is adjacent to the surface of the magnetic pole part layer opposite to the gap layer through the magnetic layer, and is magnetically connected to the magnetic pole part layer through the non-magnetic layer. In addition, the thin film magnetic head can be prevented from being damaged in the manufacturing process, and its surface can be kept flat.
Therefore, according to the present invention, in the medium facing surface, the end of the pole portion layer opposite to the gap layer is kept flat, and the magnetic field generated by the pole portion layer in the medium facing surface is directed in a direction intersecting the track. About
As a result, there is an effect that the linear recording density can be improved while suppressing the distortion of the bit pattern shape in the recording medium.

According to the thin-film magnetic head of the ninth aspect, the yoke portion layer is further magnetically connected to the pole portion layer on the surface of the pole portion layer on the gap layer side. The area of the portion where the magnetic pole portion layer and the yoke portion layer are magnetically connected to each other is increased, and there is an effect that magnetic flux can be more efficiently guided from the yoke portion layer to the magnetic pole portion layer.

According to the thin-film magnetic head of the present invention, since the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, the saturation of the magnetic flux in the second magnetic layer can be reduced. This has the effect that it can be prevented.

Further, according to the thin-film magnetic head of the present invention, since the magnetoresistive effect element is provided as the reproducing element, the reproducing performance is improved as compared with the case where the reproducing is performed using the inductive electromagnetic transducer. The effect that it can be made to play is produced.

According to the thin-film magnetic head of the twelfth aspect, since this thin-film magnetic head is used for the perpendicular magnetic recording system, it is hardly affected by the thermal fluctuation of the recording medium, and the linear recording density is reduced. The effect that it can raise is produced.

In the method of manufacturing a thin-film magnetic head according to any one of the thirteenth to sixteenth aspects, the surface of the pole portion layer on the gap layer side is more than the surface of the thin-film coil on the second magnetic layer side. The yoke portion layer is magnetically connected to the pole portion layer on at least a part of both side surfaces in the width direction of the pole portion layer. In the magnetic field generated from the magnetic pole portion, a component in a direction perpendicular to the surface of the recording medium is
This makes it possible to make the component relatively larger than the component in the direction horizontal to the surface of the recording medium. Further, in the present invention, at least a part of the end of the yoke portion layer on the gap layer side crosses the magnetic connection portion between the magnetic pole portion layer and the yoke portion layer and is parallel to the medium facing surface. Since the layer is located closer to the first magnetic layer than the end of the layer on the gap layer side, the distance between the yoke partial layer and the thin film coil is reduced, thereby reducing the magnetic field generated from the thin film coil. It becomes possible to absorb efficiently. From these facts, according to the present invention, there is an effect that the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium can be increased.

According to the method of manufacturing a thin-film magnetic head of any one of claims 14 to 16, the outline of the pole part layer and the magnetic connection between the pole part layer and the yoke part layer can be easily obtained. The effect that the shape of the base of the yoke partial layer in the vicinity of can be determined.

Further, according to the method of manufacturing a thin film magnetic head of the present invention, the upper surface of the base of the yoke portion layer near the magnetic connection portion between the pole portion layer and the yoke portion layer is moved from the pole portion layer. The shape of the underlayer is determined so as to gradually approach the first magnetic layer as the distance increases, so that leakage of magnetic flux in the yoke partial layer is prevented and the magnetic field in the direction perpendicular to the surface of the recording medium is increased. This has the effect that it can be performed.

According to the method of manufacturing a thin-film magnetic head of the present invention, at least a part of the surface of the pole portion layer connected to the yoke portion layer is perpendicular to the surface of the pole portion layer on the gap layer side. Since the outer shape of the pole portion layer is determined so as to incline with respect to the direction, the surface of the pole portion layer connected to the yoke portion layer is perpendicular to the surface of the pole portion layer on the gap layer side, The area of the connection surface between the magnetic pole portion layer and the yoke portion layer is increased, so that there is an effect that the magnetic flux can be efficiently guided from the yoke portion layer to the magnetic pole portion layer via the connection surface.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a thin-film magnetic head according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing an example of a section taken along line AA of FIG.

FIG. 3 is a sectional view showing another example of a section taken along line AA of FIG. 1;

FIG. 4 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 1;

FIG. 5 is a front view showing a medium facing surface of the thin-film magnetic head shown in FIG. 1;

FIG. 6 is a sectional view showing one step in a method of manufacturing the thin-film magnetic head according to the first embodiment of the present invention.

7 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 6;

FIG. 8 is a sectional view showing a step following FIG. 6;

9 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 8;

FIG. 10 is a sectional view showing a step following the step shown in FIG. 8;

11 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 10;

FIG. 12 is a sectional view showing a step following FIG. 10;

13 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 12;

FIG. 14 is a sectional view showing a step following FIG. 12;

FIG. 15 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 14;

FIG. 16 is a sectional view showing a step following FIG. 15;

17 is a cross-sectional view corresponding to the cross section along the line AA in FIG. 1 in the state shown in FIG. 16;

FIG. 18 is a sectional view showing a step following FIG. 16;

19 is a sectional view corresponding to a section taken along line AA of FIG. 1 in the state shown in FIG. 18;

FIG. 20 is a sectional view showing a step following FIG. 18;

21 is a sectional view corresponding to a section taken along line AA of FIG. 1 in the state shown in FIG. 20;

FIG. 22 is a sectional view showing a step following FIG. 20;

23 is a cross-sectional view corresponding to a cross section taken along line AA of FIG. 1 in the state shown in FIG. 22;

FIG. 24 is a sectional view showing a configuration of a thin-film magnetic head according to a second embodiment of the invention.

FIG. 25 is a sectional view taken along line BB of FIG. 24;

FIG. 26 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 24;

FIG. 27 is a cross-sectional view showing one step in a method of manufacturing the thin-film magnetic head according to the second embodiment of the present invention.

FIG. 28 is a sectional view showing a step following FIG. 27;

FIG. 29 is a sectional view showing a step following FIG. 28;

FIG. 30 is a sectional view showing a step following FIG. 29;

FIG. 31 is a sectional view showing a step following FIG. 30;

FIG. 32 is a sectional view showing a step following FIG. 31;

FIG. 33 is a sectional view showing a configuration of a thin-film magnetic head according to a third embodiment of the present invention.

34 is a sectional view taken along line CC of FIG. 33.

FIG. 35 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 33;

FIG. 36 is a sectional view showing a configuration of a thin-film magnetic head according to a fourth embodiment of the invention.

FIG. 37 is a sectional view taken along line DD of FIG. 36;

FIG. 38 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 36;

FIG. 39 is a sectional view showing a configuration of a thin-film magnetic head according to a fifth embodiment of the present invention.

40 is a sectional view taken along line EE of FIG. 39.

FIG. 41 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 39;

FIG. 42 is a cross-sectional view showing a step in a method for manufacturing a thin-film magnetic head according to the fifth embodiment of the present invention.

FIG. 43 is a sectional view showing a step following the step shown in FIG. 42;

FIG. 44 is a sectional view showing a step following FIG. 43;

FIG. 45 is a sectional view showing a step following FIG. 44;

FIG. 46 is a sectional view showing a step following FIG. 45;

FIG. 47 is a sectional view showing a step following FIG. 46;

FIG. 48 is a sectional view showing a step following FIG. 47;

FIG. 49 is a sectional view showing a step following FIG. 48;

FIG. 50 is a sectional view showing an example of the configuration of a single-pole head.

[Explanation of symbols]

3 lower shield layer, 4 insulating layer, 5 MR element, 6
Upper shield layer, 7: non-magnetic layer, 8: first magnetic layer, 9
... Gap layer, 9A, 9B, 9C insulating layer, 10 thin film coil, 14 second magnetic layer, 14A magnetic pole partial layer, 1
4B: yoke partial layer; 14C: connecting portion; 15: non-magnetic layer.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tetsuya Roppongi 1-13-1, Nihonbashi, Chuo-ku, Tokyo TDC Corporation F term (reference) 5D033 AA01 BA08 BA22 BB43 DA31

Claims (16)

[Claims] 1. A medium facing surface facing a recording medium, and magnetic pole portions arranged so as to face each other at predetermined intervals before and after in the direction of travel of the recording medium, and apart from the medium facing surface. A first and a second magnetic layer magnetically coupled to each other at a position; a gap layer made of a non-magnetic material and provided between the first and the second magnetic layers; A portion between the first and second magnetic layers,
A thin-film coil provided in an insulated state with respect to the first and second magnetic layers, wherein the second magnetic layer includes a magnetic pole portion, and a width in a medium facing surface defines a track width. A thin-film magnetic head comprising: a pole portion layer; and a yoke portion layer that magnetically connects the pole portion layer and the first magnetic layer, wherein a surface of the pole portion layer on the gap layer side is The yoke partial layer is disposed at a position more distant from the first magnetic layer than the surface of the thin film coil on the second magnetic layer side, and the yoke partial layer is at least a part of both side surfaces in the width direction of the magnetic pole partial layer. A magnetically connected to the magnetic pole portion layer, and intersects a magnetic connection portion between the magnetic pole portion layer and the yoke portion layer, and in a cross section parallel to the medium facing surface, the gap of the yoke portion layer At least on the layer side end A thin-film magnetic head, wherein a part of the thin-film magnetic head is located closer to the first magnetic layer than an end of the pole portion layer on the gap layer side. 2. The magnetic disk according to claim 1, wherein the yoke partial layer is further magnetically connected to the magnetic pole partial layer on at least a part of an end face of the magnetic pole partial layer opposite to the medium facing surface. 2. The thin film magnetic head according to claim 1, wherein: 3. An end of the yoke portion layer on the gap layer side, which crosses a magnetic connection portion between the pole portion layer and the yoke portion layer and is parallel to the medium facing surface, As the layer moves away from the layer, the first
3. The thin-film magnetic head according to claim 1, wherein said thin-film magnetic head is closer to said magnetic layer. 4. A cross section of a magnetic connection portion between the pole portion layer and the yoke portion layer and parallel to a medium facing surface, wherein the end portion of the pole portion layer on the gap layer side and the yoke portion layer 4. The thin-film magnetic head according to claim 1, wherein the end on the gap layer side is continuous without a step. 5. A method according to claim 1, wherein at least a part of a connection surface between the pole portion layer and the yoke portion layer is inclined with respect to a direction perpendicular to a surface of the pole portion layer on the gap layer side. The thin-film magnetic head according to claim 1. 6. A thickness of the yoke portion layer is larger than a thickness of the pole portion layer in a cross section which intersects a magnetic connection portion between the pole portion layer and the yoke portion layer and is parallel to a medium facing surface. The thin-film magnetic head according to any one of claims 1 to 5, wherein 7. The magnetic head according to claim 7, wherein the yoke partial layer is further magnetically connected to the magnetic pole partial layer on a surface of the magnetic pole partial layer opposite to the gap layer. 7. The thin-film magnetic head according to any one of 1 to 6. 8. A non-magnetic layer which is in contact with a surface of the pole portion layer opposite to the gap layer, wherein the yoke portion layer is provided with the gap layer of the pole portion layer via the non-magnetic layer. 8. The thin-film magnetic head according to claim 7, wherein the thin-film magnetic head is adjacent to a surface on the opposite side to the magnetic pole and is magnetically connected to the magnetic pole partial layer via the nonmagnetic layer. 9. The yoke portion layer is further magnetically connected to the pole portion layer on a surface of the pole portion layer on the gap layer side. The thin-film magnetic head as described in the above. 10. The thin-film magnetic head according to claim 1, wherein a saturation magnetic flux density of the pole portion layer is equal to or higher than a saturation magnetic flux density of the yoke portion layer. 11. The thin-film magnetic head according to claim 1, further comprising a magnetoresistive element as a reproducing element. 12. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is used for a perpendicular magnetic recording system. 13. A medium facing surface facing a recording medium, and magnetic pole portions arranged to face each other with a predetermined interval before and after in the traveling direction of the recording medium, and apart from the medium facing surface. A first and second magnetic layer magnetically coupled to each other at a location; and a non-magnetic material;
A gap layer provided between the first magnetic layer and the second magnetic layer, at least a portion between the first and second magnetic layers, and a gap layer between the first and second magnetic layers; And a thin-film coil provided in an insulated state with respect to the second coil.
The magnetic layer includes a magnetic pole portion, and has a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke portion layer magnetically connecting the magnetic pole portion layer and the first magnetic layer. A method of manufacturing a thin-film magnetic head, comprising: forming the first magnetic layer; forming the thin-film coil; forming the gap layer; and forming the second magnetic layer Wherein the surface of the pole portion layer on the gap layer side is arranged at a position farther from the first magnetic layer than the surface of the thin-film coil on the second magnetic layer side, the yoke portion layer Is magnetically connected to the pole part layer at least in part of both side surfaces in the width direction of the pole part layer, and a magnetic connection part between the pole part layer and the yoke part layer. Intersection, cross section parallel to the medium facing surface Wherein at least a part of the end of the yoke partial layer on the gap layer side is arranged at a position closer to the first magnetic layer than the end of the magnetic pole partial layer on the gap layer side. Of manufacturing a thin film magnetic head. 14. The step of forming the second magnetic layer includes: forming a layer to be etched made of a material forming the pole portion layer on the gap layer; and forming a layer on the layer to be etched on the gap layer. Forming a mask corresponding to the shape of the pole portion layer, and using the mask, by dry etching, selectively etching the layer to be etched to determine the outer shape of the pole portion layer, Etching a part of the gap layer to determine a shape of a base of the yoke partial layer in the vicinity of a magnetic connection between the pole part layer and the yoke partial layer; 14. The method according to claim 13, further comprising the step of forming at least a part of a partial layer. 15. The step of determining the outer shape of the pole portion layer and determining the shape of the underlayer of the yoke portion layer includes the step of: determining whether the upper surface of the underlayer gradually moves away from the pole portion layer. 15. The method of manufacturing a thin-film magnetic head according to claim 14, wherein the shape of the underlayer is determined so as to approach. 16. The step of determining the outer shape of the pole portion layer and determining the shape of the underlayer of the yoke portion layer includes determining at least a part of a surface of the pole portion layer connected to the yoke portion layer, 16. The method according to claim 14, wherein the outer shape of the pole portion layer is determined so as to be inclined with respect to a direction perpendicular to the surface of the pole portion layer on the gap layer side.