JP2002203520A - High-luminance light irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high-luminance light irradiation device wherein a supporting member to support a dielectric body barrier discharge lamp is made simpler and more light-weighted so as to facilitate an assembly and an exchange. SOLUTION: In the high-luminance light irradiation device having the dielectric body barrier discharge lamp 1, a light-transparent outer electrode 21 and an inner electrode 22, a metallic pipe 3 having a thinner outer diameter than an inner diameter of a dielectric body inner tube 12 and having a hole 37 opened in the vicinity of a tip end part in a radiation direction against a shaft line and inserted and penetrated into the dielectric body inner tube 12 of the dielectric body barrier discharge lamp 1, the first pinching member 4 sealing one end part of the dielectric body barrier discharge lamp 1 and coaxially retaining the metallic pipe 3 while sealing whose end part, and the second pinching member 5 retaining the other end part of the dielectric body barrier discharge lamp 1 and coaxially retaining a rear end part of the metallic pipe 3 are installed, and a flowing path of a cooling medium, consisting of a gap 32 between the dielectric body inner tube 12 and the metallic pipe 3, the hole 37 opened in the vicinity of the tip end part of the metallic pipe 3, and an internal space 33 of the metallic pipe 3 is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-intensity light irradiating apparatus using a dielectric-barrier discharge lamp which emits high-power ultraviolet light, and more particularly, to simplifying and reducing the weight of a supporting member to facilitate assembly and replacement. It is configured so as to make it easier.

[0002]

2. Description of the Related Art Dielectric barrier discharge lamps are used in various fields as an ultraviolet light source for curing an ultraviolet curable resin, purifying an exhaust gas, synthesizing a compound, and the like in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus.

As shown in FIG. 5, a conventional high-intensity light irradiating device has an ultraviolet-permeable dielectric outer tube 11 and a dielectric tube made of quartz glass or sapphire arranged concentrically. A dielectric barrier discharge lamp 1 having a discharge space 14 filled with a rare gas (argon, krypton, xenon, etc.) and surrounded by end walls 13 at both ends, and a net-like structure provided on the surface of a dielectric outer tube 11 A light-transmitting outer electrode 21 such as an electrode or a Nesa film, a spiral inner electrode 22 provided on the surface of the dielectric tube 12, and an AC power supply for applying an AC voltage between the outer electrode 21 and the inner electrode 22. (Not shown), and a plasma discharge is performed in the discharge space 14 through the layers of the dielectric tubes 11 and 12 to generate high-intensity ultraviolet rays.

In such a high-intensity light irradiating apparatus using such a conventional dielectric barrier discharge lamp 1, the discharge lamp 1
In order to cool the cooling medium (water,
(Air).

[0005] The discharge lamp 1 is provided with a cooling member and a support member 9 for supporting the discharge lamp 1 having the light-transmissive outer electrode 11 and the inner electrode 12.

[0006] The supporting member 9 supports the discharge lamp 1 to be supported.
A longer rod member 91 and two protrusions rising at both ends of the rod member 91 and having screw holes 93 parallel to the rod member 91.
92, a pressing member 94 that is screwed into the screw hole 93 of the two convex portions 92, and a sliding member 95 that is inserted through the pressing member 94 and has a through hole 96 and a flange 97 through which cooling water passes. Have been.

When the discharge lamp 1 is supported by such a support member 9, a pressing member is provided from outside the convex portions 92 on both sides.
The sliding member 95 is inserted into the through hole of the pressing member 94 from the inside, and the sliding member 95 is inserted into the through hole of the pressing member 94 via the sealing packing 5 provided on the flange 97 of the sliding member 95. Hold both ends.

Then, the pressing member 94 is further screwed in,
By pushing the sliding member 95 inward through the flange 97 and reducing the distance between the two sliding members 95, the discharge lamp 1
Adjust the pinching strength. In order to circulate the cooling water through the through holes 96 of these two sliding members 95, a supply / drain coupler 98 is provided.
Is connected to an AC power source, and the assembly is completed.

[0009]

The support member 9 for supporting the long discharge lamp 1 must not be deformed during operation, and is therefore mechanically rigid. Therefore, the supporting member 9 tends to be large and heavy.

When the discharge lamp 1 supported by such a large and heavy support member 9 is mounted on an applied device, the degree of freedom in design is limited, and the life of the discharge lamp 1 is reduced. There was a problem that it took time to exchange.

Therefore, the high-intensity light irradiation device of the present invention is:
It has been conceived to simplify and reduce the weight of the support member to facilitate assembly and replacement.

[0012]

According to the present invention, there is provided a high-intensity light irradiating apparatus which is surrounded by concentrically arranged light-transmitting dielectric outer tubes and dielectric tubes and end walls at both ends to remove a rare gas. A dielectric barrier discharge lamp having a filled discharge space, a light-transmitting outer electrode provided on the surface of the light-transmitting dielectric outer tube and an inner electrode provided on the dielectric tube, and an AC voltage applied to the outer electrode and the inner electrode. And an AC power supply for applying an AC power supply, the outer diameter of the dielectric tube inserted into the dielectric tube of the dielectric barrier discharge lamp is smaller than the inner diameter of the dielectric tube, and the axis is located near the tip with respect to the axis. A metal pipe having a hole drilled in a radial direction, a first holding member for sealing one end of the dielectric barrier discharge lamp and holding the metal pipe concentrically by sealing a tip end thereof, and a dielectric barrier discharge lamp. edge A second holding member for holding the rear end of the metal pipe concentrically, a gap between the dielectric pipe and the metal pipe, a hole formed near the tip of the metal pipe, and an inside of the metal pipe. A cooling medium flow passage formed of a space is formed.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION
As shown in the cross-sectional view of FIG.
And a discharge space 14 surrounded by a rare gas (eg, argon, krypton, xenon) surrounded by end walls 13 at both ends.
Barrier discharge lamp 1 having
A light-transmissive outer electrode 21 such as a mesh electrode or a Nesa film provided on the outer surface of 11, an inner electrode 22 provided on the inner surface of the dielectric tube 12, and between the outer electrode 21 and the inner electrode 22. An AC power source (not shown) for applying an AC voltage and a discharge lamp support member are provided.

(First Embodiment) A support member for supporting a discharge lamp 1 according to a first embodiment is inserted into a dielectric tube 12 of the discharge lamp 1 as shown in a longitudinal sectional view of FIG. A metal pipe 3 also serving as a current-carrying electrode having an outer diameter smaller than the inner diameter of the dielectric tube 12, a bolt 31 for sealing the tip of the metal pipe 3, and a through hole 35 at the center; And a first holding member 4 having a screw hole into which the bolt 31 is screwed, and holding the other end of the discharge lamp 1 therebetween. At the same time, the metal pipe 3 and the plug member 34 are inserted, and the second holding member 5 having a recess for receiving the flange 36 of the plug member 34, and the couplers 61 and 62 of the cooling medium fixed to the second holding member 5 are formed. Connection part with two screw holes 63 and 64 to be screwed 6 and by the constructed.

In the vicinity of the tip of the metal pipe 3, a plurality of holes 37 are formed in the radial direction with respect to the axis for circulating the cooling medium. Discharge lamp 1 of first holding member 4
On the surface sandwiching the end wall 13, a ring-shaped sealing packing
A circular groove 42 for mounting a 41 is formed, and a circular recess 52 for mounting a ring-shaped sealing packing 51 is formed on a surface of the second sandwiching member 5 sandwiching the end wall 13 of the discharge lamp 1. And a sleeve 53 is fitted. The inner electrode 22 provided on the inner surface of the dielectric tube 12 is provided with a lead 23 electrically connected to the metal pipe 3.

A gap 32 between the dielectric tube 12 of the discharge lamp 1 and the metal pipe 3, a plurality of holes 37 formed near the tip of the metal pipe 3, a space 33 inside the metal pipe 3, and a penetration of a plug member 34. In order to circulate the cooling medium through the hole 35, a gap 32 between the dielectric pipe 12 and the metal pipe 3 is provided in the second holding member 5.
A flow path 54 is formed between the screw member 63 and the screw hole 63 into which the coupler 61 is screwed, and the connecting member 6 has a flow path 66 between the through hole 35 of the plug member 34 and the screw hole 64 into which the coupler 62 is screwed. Is formed.

Next, the metal pipe 3 and the holding members 4, 5
A procedure for assembling the support member of the discharge lamp 1 using the method will be described.

(1) As shown in FIG. 2 (a), in the unconstrained state, a coil spring having a diameter larger than the inner diameter of the dielectric tube 12 of the discharge lamp 1 is narrowly constrained and the dielectric tube 12 is confined.
2B, the inner electrode 21 that is in contact with the inner surface of the dielectric tube 12 can be formed by the spring back as shown in FIG. 2B.

(2) As shown in FIG. 3 (a), a coil spring having a diameter smaller than the outer diameter of the ultraviolet-permeable dielectric outer tube 11 of the discharge lamp 1 in the non-constrained state is thickly constrained to form a dielectric outer tube. When it is fitted to the outside of the tube 11 and the constraint is released, as shown in FIG. 3 (b), the outer electrode 21 in contact with the surface of the dielectric outer tube 11 can be formed by the spring back.

(3) The metal pipe 3 having the front end sealed in advance with the bolt 31 and the plug member 34 connected to the rear end is inserted into the second holding member 5, and (4) the circular recess 52 of the second holding member 5 And after attaching the packing 51 for sealing to the outside of the sleeve 53,
(5) Insert the metal pipe 3 into the dielectric tube 12 of the discharge lamp 1.

(6) When the bolt 31 protruding from the tip of the discharge lamp 1 is screwed into the screw hole of the first holding member 4 in which the sealing packing 41 is mounted in the circular groove 42, the first holding member 4 and the 2 The distance between the holding member 5 and the discharge lamp 1 is reduced.
Can be clamped.

(7) The connecting member 6 is connected to the second holding member 5 via the packing 67. (8) Screw the couplers 61 and 62 into the two screw holes 63 and 64 of the coupling member 6 to
A hose for circulating a cooling medium is connected to 1, 62, and (9) the assembly is completed by connecting the outer electrode 21 of the discharge lamp 1 and the metal pipe 3 to an AC power supply.

The cooling medium flowing from one coupler 62 is
The fluid enters the gap 32 between the metal pipe 3 and the dielectric pipe 12 through the flow passage 66 of the coupling member 6, the through hole 35 of the plug member 34, the internal space 33 of the metal pipe 3, and the hole 37 of the metal pipe 3. It flows through 32 to cool the dielectric tube 12. Then, it is discharged from the other coupler 61 through the flow passage 54 of the second holding member 5.
Note that the same cooling effect can be obtained by flowing the cooling medium in the opposite direction.

Since the metal pipe 3 is present in the dielectric pipe 12, the cross-sectional area of the gap 32 between the metal pipe 3 and the dielectric pipe 12 is reduced, the flow rate of the cooling medium is increased, and the cooling efficiency is improved. Can be done.

When cooling water is used as the cooling medium, the inner electrode 12 is formed on the surface of the dielectric tube 12 of the discharge lamp 1.
Even if the cooling water 22 is not provided, it is sufficient to supply electricity to the metal pipe 3 because the cooling water has conductivity.

(Second Embodiment) As shown in the sectional view of FIG.
It is provided with an ultraviolet-transparent protective tube 15 for protecting the discharge lamp 1.

In order to attach the ultraviolet ray transmitting protective tube 15, a packing 7 is attached to the first holding member 4 and the second holding member 5.
Two rings 7 with circular grooves 73, 74 for fitting 5, 76
1, 72, a screw formed on the outer peripheral surface of the first holding member 4, and a cap 8 screwed into the screw.

Next, a procedure for attaching the ultraviolet ray transmitting protective tube 15 will be described.

(1) A circular groove is formed in the second holding member 5 of the high-intensity light irradiation device assembled according to the first embodiment.
74 is fitted with a second ring 72 fitted with a packing 76,
(2) The ultraviolet-permeable protective tube 15 is fitted, and (3) the first ring 71 having the packing 75 mounted in the circular groove 73 is fitted into the first holding member 4. When the cap 8 is screwed into the screw formed on the outer peripheral surface of the member 4, (5)
Between the two rings 71, 72 via the packings 75, 76,
The ultraviolet transparent protective tube 15 can be held concentrically with the discharge lamp 1.

The space between the ultraviolet ray transmitting protective tube 15 and the discharge lamp 1 is filled or circulated with a gas which does not absorb ultraviolet rays, for example, a nitrogen gas.

(Other Embodiments) As shown in the sectional view of FIG. 1, a dielectric barrier discharge lamp 1 according to a first embodiment has an ultraviolet-permeable dielectric outer tube 11 made of quartz glass or the like concentrically arranged. And dielectric body tube 12 and both end walls 13
And a discharge space 14 filled with a rare gas, and the dielectric outer tube 11 and the dielectric tube 12 are made of a quartz tube of the same material.

In the dielectric barrier discharge lamp according to the second embodiment, a quartz tube that transmits ultraviolet light having a wavelength of 200 nm or less is used as the dielectric outer tube 11, and the dielectric tube 12 is used as the dielectric tube 12.
Use a quartz tube that blocks ultraviolet rays of 200 nm or less.

As described above, the dielectric tube 12 has a wavelength of 200 n.
When a quartz tube that blocks ultraviolet rays of m or less is used, even if air is circulated as a cooling medium, ozone is not generated, so that the inner electrode 22 provided on the inner surface of the dielectric tube 12 is not oxidized. In addition, since a quartz tube that does not transmit ultraviolet rays having a wavelength of 200 nm or less is inexpensive, the cost can be reduced.

The outer electrode 21 provided on the outer surface of the dielectric outer tube 11 of the dielectric barrier discharge lamp 1 and the inner electrode 22 provided on the inner surface of the dielectric inner tube 12 of the dielectric barrier discharge lamp 1 are formed by increasing the temperature. If a bimetal whose diameter is reduced and the diameter of the inner electrode 22 is increased is used, the outer electrode 21 and the inner electrode 22 can always be brought into close contact with the tube wall even when the temperature changes.

[0035]

As is clear from the description based on the above embodiment, according to the high-intensity light irradiation device of the present invention, the number of parts of the supporting member for supporting the dielectric barrier discharge lamp while cooling it is small, The support member can be simplified and lightened, and assembling and replacement are extremely easy.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a high-intensity light irradiation device according to a first embodiment of the present invention;

FIG. 2 is a diagram showing a procedure for attaching an inner electrode to a dielectric tube of the dielectric barrier discharge lamp shown in FIG. 1;

FIG. 3 is a view showing a procedure for attaching an outer electrode to a dielectric outer tube of the dielectric barrier discharge lamp shown in FIG. 1;

FIG. 4 is a sectional view of an end portion showing a second embodiment of the high-intensity light irradiation device of the present invention;

FIG. 5 is a sectional view of an end showing an example of a state in which a conventional dielectric barrier discharge lamp is supported by a support member.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Dielectric barrier discharge lamp 3 Metal pipe 4 1st pinching member 5 2nd pinching member 6 Coupling member 8 Cap 11 Ultraviolet transparent dielectric outer tube 12 Dielectric tube 13 End wall 14 Discharge space 15 Ultraviolet transparent protective tube 21 Light transmission Outer electrode 22 Inner electrode 31 Bolt 32 Clearance 33 Internal space 34 Plug member 35 Through hole 37 Hole 41, 51 Seal packing 71, 72 Ring 73, 74 Circular groove 75, 76 Packing

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Norio Ishibashi 4896 Tamagawa Komido, Chino City, Nagano Prefecture Inside Oak Manufacturing Co., Ltd. (72) Inventor Shuichi Michiro 4896 Tamagawa Komido, Chino City, Nagano Prefecture Oak Corporation Inside the factory

Claims (4)

[Claims] 1. A light-transmitting dielectric outer tube and a dielectric tube arranged concentrically and end walls at both ends,
A dielectric barrier discharge lamp having a discharge space filled with a rare gas, a light-transmitting outer electrode provided on the surface of the light-transmitting dielectric outer tube and an inner electrode provided on the dielectric tube, and the outer electrode and A high-intensity light irradiating device including an AC power supply for applying an AC voltage to the inner electrode, wherein the outer diameter is smaller than the inner diameter of the dielectric tube inserted into the dielectric tube of the dielectric barrier discharge lamp; A metal pipe having a hole formed in the vicinity thereof in a radial direction with respect to an axis, a first pipe for sealing one end of the dielectric barrier discharge lamp and holding the tip of the metal pipe concentrically;
A holding member, and a second holding member for holding the other end of the dielectric barrier discharge lamp and concentrically holding a rear end of the metal pipe, wherein a second holding member is provided between the dielectric tube and the metal pipe. A high-luminance light irradiating device, wherein a cooling medium flow path comprising a gap, a hole formed near the tip of the metal pipe, and an internal space of the metal pipe is formed. 2. The high-intensity light irradiation device according to claim 1, wherein a dielectric material for attenuating ultraviolet light having a wavelength of 200 nm or less is used for a dielectric tube of the dielectric barrier discharge lamp. 3. The high-intensity light irradiation device according to claim 1, further comprising an ultraviolet-transparent protective tube held concentrically by the first holding member and the second holding member. 4. The high-intensity light irradiation device according to claim 1, wherein the inner electrode and the outer electrode are made of a bimetal deformable due to a rise in temperature, and the outer electrode and the inner electrode are always brought into close contact with the tube wall.