JP2002197611A - Perpendicular magnetic recording head and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head capable of properly forming plated main magnetic pole layer from an insulating layer to a yoke layer, and increasing the passing efficiency of a magnetic flux from the yoke layer to the main magnetic pole layer, and its manufacturing method. SOLUTION: The front end surface 35a of a yoke layer 35 is formed to be a slant or a bent surface inclined from a lower surface to an upper surface in a height direction. Thus, the main magnetic pole layer 24 is properly plated and formed in a specified shape, and the passing efficiency of the magnetic flux from the yoke layer 35 to the main magnetic pole layer 24 is increased. Therefore, a perpendicular magnetic recording head capable of dealing with a higher recording density is manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording head for performing recording by applying a perpendicular magnetic field to a recording medium such as a disk having a hard film, and more particularly to a perpendicular magnetic recording head in which a main pole layer is formed from an insulating layer on a yoke layer. The present invention relates to a perpendicular magnetic recording head which can be appropriately formed by plating and can improve the efficiency of passing magnetic flux from the yoke layer to the main pole layer, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Perpendicular magnetic recording systems are known as devices for recording magnetic data at high density on recording media such as disks.
FIG. 27 is a sectional view showing a general structure of a perpendicular magnetic recording head used in the perpendicular magnetic recording system.

As shown in FIG. 27, a perpendicular magnetic recording head H of a perpendicular magnetic recording system is provided on a side end surface of a slider 1 which floats on a recording medium and moves or slides. The perpendicular magnetic recording head H is disposed between the non-magnetic film 2 and the non-magnetic coating film 3 on the side end surface 1a.

The perpendicular magnetic recording head H comprises an auxiliary magnetic pole layer 4 formed of a ferromagnetic material, and a main magnetic pole layer formed of the same ferromagnetic material formed on the auxiliary magnetic pole layer 4 at intervals. 5, the end face 4 of the auxiliary pole layer 4
a and the end face 5a of the main magnetic pole layer 5 appear on the surface Ha facing the recording medium M. The auxiliary magnetic pole layer 4 and the main magnetic pole layer 5 are magnetically connected to each other at a magnetic connecting portion 6 on the back side of the facing surface Ha.

A nonmagnetic insulating layer 7 made of an inorganic material such as Al ₂ O ₃ or SiO ₂ is located between the auxiliary magnetic pole layer 4 and the main magnetic pole layer 5. The end face 7a of the magnetic insulating layer 7 is the end face 4a of the auxiliary pole layer 4.
And the end face 5 a of the main magnetic pole layer 5.

In the non-magnetic insulating layer 7, Cu
A coil layer 8 made of a conductive material such as the above is buried.

As shown in FIG. 27, the end face 5 of the main magnetic pole layer 5
The thickness hw of “a” is smaller than the thickness hr of the end face 4 a of the auxiliary pole layer 4. As shown in the plan view of FIG. 28, the width of the end face 5a of the main magnetic pole layer 5 in the track width direction (the X direction in the drawing) is the track width Tw, and the width is the track width of the auxiliary magnetic pole layer 4. It is sufficiently smaller than the width dimension Wr of the end face 4a in the width direction.

A recording medium M on which magnetic recording is performed by the perpendicular magnetic recording head H moves in the Z direction with respect to the perpendicular magnetic recording head H, and has a hard film M on its surface.
The soft film Mb is provided inside a.

When a recording magnetic field is induced in the auxiliary magnetic pole layer 4 and the main magnetic pole layer 5 by energizing the coil layer 8,
The leakage recording magnetic field between the end face 4a of the auxiliary pole layer 4 and the end face 5a of the main pole layer 5 passes vertically through the hard film Ma of the recording medium M and passes through the soft film Mb. Here, as described above, the area of the end face 5a of the main magnetic pole layer 5 is sufficiently smaller than the area of the end face 4a of the auxiliary magnetic pole layer 4, so that the magnetic flux is generated at the portion facing the end face 5a of the main magnetic pole layer 5. φ concentrated, end face 5
Magnetic data is recorded by the magnetic flux φ on the hard film Ma at the portion where “a” faces.

As shown in the plan view of FIG. 28, the main magnetic pole layer 5 includes a narrow front region 5c having a length L1 in the height direction rearward from the facing surface Ha, and a narrow front region 5c. And a yoke portion 5b whose width in the track width direction (X direction in the drawing) gradually increases from the base end of 5c toward the rear in the height direction.

The length L1 of the front region 5c is made as short as possible, so that magnetic saturation in the front region 5c is reduced, and the magnetic flux flowing from the yoke portion 5c is transferred to the front end face 5a of the main magnetic pole layer 5. It is preferable because it can be generated in a concentrated manner.

However, if the length dimension L1 is too short, it is difficult to accurately form a fine pattern in the front region 5c, and the track width Tw of the front end face 5a may be formed to be wider than a predetermined value. Alternatively, as shown in FIG. 28, the width in the track width direction (X direction in the drawing) is formed so as to increase in the height direction (Y direction in the drawing), and the track width Tw and the shape of the front region 5c are controlled. Was very difficult.

The problem of such a shape change is largely due to a single layer in which the front region 5c of the main magnetic pole layer 5 and the yoke portion 5b are integrally formed.
Is formed separately from the front region 5c.

FIG. 29 is an improved longitudinal sectional view of the conventional perpendicular magnetic recording head shown in FIG. 27. A yoke layer 10 is formed on the nonmagnetic insulating layer 7 as shown in FIG. The front end face 10a of the yoke layer 10 is
It is located rearward in the height direction (the Y direction in the figure) from a, and rises vertically from the nonmagnetic insulating layer 7. As shown in FIG. 29, the main magnetic pole layer 5 extends from the nonmagnetic insulating layer 7 on the opposing surface Ha to the yoke layer 10.
Are formed. The perpendicular magnetic recording head shown in FIG. 29 has a plan shape as shown in FIG.
As shown in the figure, the yoke layer 10 is in the height direction (Y
The main magnetic pole layer 5 has a narrow front portion in which the front end face 5a is formed with the track width Tw. 5c and a rear region 5d whose width in the track width direction increases from the base end of the front region 5c.

As shown in FIGS. 29 and 30, the yoke layer 10
With the structure in which the main magnetic pole layer 5 is superimposed on the yoke layer 10 even if the length L2 of the front region 5c of the main magnetic pole layer 5 in the height direction (the Y direction in the drawing) is longer than in the related art. Is formed as close as possible to the facing surface Ha side, so that the magnetic flux from the yoke layer 10 can be appropriately guided to the front region 5c of the main pole layer 5 without the front region 5c reaching magnetic saturation. it can.

In the structure shown in FIG. 30, the front region 5c of the main magnetic pole layer 5 can be formed longer in the height direction, so that the pattern accuracy is improved and the front region 5c is formed with a predetermined track width Tw and a predetermined width. It was thought that it could be formed in shape.

[0017]

However, in the perpendicular magnetic recording head shown in FIG. 29, since the front end face 10a of the yoke layer 10 is formed to rise vertically from the upper surface of the non-magnetic insulating layer 7, the non-magnetic A large step is formed between the insulating layer 7 and the front end face 10a. For this reason, the following problems occurred during the step of forming the main magnetic pole layer 5. FIGS. 31 and 32 are one process charts showing a manufacturing method for forming the main magnetic pole layer 5.

As shown in FIG. 31, the nonmagnetic insulating layer 7
A non-magnetic insulating layer 7 is formed on the yoke layer 10.
A plating underlayer 11 is formed over the yoke layer 10 from above. This plating underlayer 11 is used as the main magnetic pole layer 5 in the next step.
This is a base for growing the plating. Further, a resist layer 12 is formed on the plating base layer 11.

As shown in FIG. 31, since the front end face 10a of the yoke layer 10 is formed so as to rise vertically from above the nonmagnetic insulating layer 7, there is a large gap between the front end face 10a and the nonmagnetic insulating layer 7. Step A occurs.

Therefore, the resist layer 12 applied from the nonmagnetic insulating layer 7 to the yoke layer 10 has a thickness H2 of the resist layer 12 applied on the yoke layer 10.
And a film thickness H3 of the resist layer 12 applied on the non-magnetic insulating layer 7.

In the next step shown in FIG. 32, a punch pattern 12a for forming the main magnetic pole layer 5 is formed on the resist layer 12 by exposure and development. Since the thickness of the resist layer 12 rapidly increases at the portion of the step A, the lower surface of the resist layer 12 applied to the portion of the step A is not properly exposed, and the portion of the step A is exposed. The undeveloped resist layer 12b tends to remain.

Next, even if an attempt is made to grow the main magnetic pole layer 5 by plating from the plating underlayer 11 exposed in the punched pattern 12a, if the resist layer 12b remains in the punched pattern 12a, that portion is Since the plating underlayer 11 is covered with the resist layer 12b, plating growth is not performed properly, and the main pole layer 5 having an extremely thin film thickness is formed on the resist layer 12b, Defective products are likely to be formed, for example, the main pole layer 5 is not formed.

If there is a large step A between the yoke layer 10 and the non-magnetic insulating layer 7 and there is a large difference in the thickness of the resist layer 12, the pattern accuracy of the punched pattern 12a is reduced. The front region 5c of the layer 5 cannot be formed with a predetermined track width Tw and a predetermined shape, and a perpendicular magnetic recording head that can cope with a narrow track cannot be manufactured.

The front end face 10a of the yoke layer 10 rises vertically from above the non-magnetic insulating layer 7, and the main magnetic pole layer 5
When the yoke layer 10 is formed in a substantially rectangular shape at a position where the yoke layer 10 overlaps with the main magnetic pole layer 5, the magnetic flux easily leaks from the front end face 10 a of the yoke layer 10. It is not guided, and the passage efficiency of the magnetic flux is reduced, and the recording density is reduced.

Accordingly, the present invention is to solve the above-mentioned conventional problems. By making the front end face of the yoke layer a gentle inclined surface or a curved surface, the main pole layer is moved from above the insulating layer to above the yoke layer. It is an object of the present invention to provide a perpendicular magnetic recording head which can be appropriately formed by plating and can improve the efficiency of passing magnetic flux from the yoke layer to the main pole layer, and a method of manufacturing the same.

[0026]

According to the present invention, an auxiliary magnetic pole layer and a main magnetic pole layer are spaced from each other on a surface facing a recording medium, and the auxiliary magnetic pole layer is located rearward in the height direction from the opposite surface. A coil layer for applying a recording magnetic field to the main magnetic pole layer, and a vertical magnetic field concentrated on the main magnetic pole layer, the vertical magnetic recording head for recording magnetic data on the recording medium; On the rear side, a connection layer rising from the auxiliary pole layer is provided, the coil layer is wound around the connection layer, the coil layer is covered with an insulating layer, and the insulating layer is A front end face on the facing surface side is located rearward in the height direction, and a yoke layer is formed in which the front end face is formed as an inclined surface or a curved surface inclined from the lower surface to the upper surface in the height direction. Connection layer and are magnetically connected,
A main pole layer is formed from the insulating layer on the facing surface to the yoke layer.

In the present invention, the front end face of the yoke layer includes:
An inclined surface or a curved surface inclined in the height direction is formed from the lower surface to the upper surface.

As described above, in the present invention, unlike the related art, the front end face of the yoke layer does not have a shape that rises as a vertical surface, but has a shape that rises in the height direction with a gentle slope or a curved surface. A resist layer used for forming the main pole layer from the insulating layer located in front of the yoke layer to the yoke layer can be formed with a substantially uniform film thickness, and therefore, a punch pattern formed on the resist layer can be formed. The resist layer inside can be removed by appropriately exposing and developing from the upper surface to the lower surface. Therefore, in the present invention, a resist pool does not occur in the punching pattern as in the related art, and a plating base layer for forming a main magnetic pole layer can be exposed on one surface in the punching pattern. The main pole layer can be appropriately formed by plating in a predetermined shape.

In the present invention, as described above, the front end face of the yoke layer is gently raised from the insulating layer so as to gradually increase in thickness, and the insulating layer used for forming the main magnetic pole layer is formed. Since the thickness of the resist layer from the layer to the yoke layer can be made substantially constant, the main pole layer can be formed with high pattern accuracy, and the front end face of the main pole layer can be formed with a predetermined track width Tw and a predetermined track width Tw. Easy to form with high precision in the shape of

In the present invention, when the front end face of the yoke layer has a gentle slope or a curved surface so that the thickness gradually increases in the height direction, the magnetic flux from the yoke layer is mainly The magnetic flux is smoothly guided to the pole layer, and the leakage of magnetic flux from the front end face can be suppressed more than before. That is, in the present invention, the efficiency of passing magnetic flux from the yoke layer to the main magnetic pole layer can be improved, and the magnetic flux can be concentrated on the main magnetic pole layer. Therefore, a perpendicular magnetic recording head excellent in high recording density can be provided. It is possible to manufacture.

In the present invention, it is preferable that the upper surface of the insulating layer and the upper surface of the connection layer are flattened surfaces that are flush with each other. Thereby, the yoke layer and the main magnetic pole layer can be formed with high pattern accuracy.

In the present invention, it is preferable that the front end face of the main magnetic pole layer appearing on the opposing face is formed in a shape in which a width dimension in a track width direction increases from a lower face toward an upper face. Preferably, both end surfaces of the front end surface are formed as inclined surfaces or curved surfaces.

In the present invention, it is preferable that the saturation magnetic flux density of the main magnetic pole layer is higher than the saturation magnetic flux density of the yoke layer. In the present invention, the main pole layer and the yoke layer can be formed separately. For this reason, it is possible to select a magnetic material having a higher saturation magnetic flux density than the yoke layer for the main magnetic pole layer, thereby concentrating magnetic flux on the main magnetic pole layer and appropriately coping with high recording density. It is possible to produce a possible perpendicular magnetic recording head.

Further, in the present invention, the cross-sectional area of the yoke layer at a position where the yoke layer and the main magnetic pole layer overlap with each other in a direction parallel to the opposing surface is a direction parallel to the opposing surface of the main magnetic pole layer. It is preferably larger than the cross-sectional area from. Thereby, it is possible to improve the efficiency of the passage of the magnetic flux from the yoke layer to the main pole layer.

The method of manufacturing a perpendicular magnetic recording head according to the present invention is characterized by including the following steps. (A) forming an auxiliary pole layer with a magnetic material; and (b)
A connection layer is formed on the auxiliary pole layer and in a height direction rearward of the surface facing the recording medium, and then, between the facing surface and the connection layer, a coil is formed on the auxiliary pole layer via an insulating base layer. (C) shaving the surface of the insulating layer so that the upper surface of the insulating layer and the upper surface of the connecting layer are flush with each other, and (E) forming a yoke layer-shaped plating base layer on the upper surface of the insulating layer and the upper surface of the connection layer, the front end surface of which is located rearward of the opposing surface in the height direction and extends to above the connection layer;
Forming a yoke layer by plating with a magnetic material on the plating base layer, wherein a front end surface of the yoke layer is formed as a slope or a curve inclined in a height direction from a lower surface to an upper surface; Forming a plating base layer on the yoke layer, forming a resist layer on the plating base layer, and forming a punch pattern on the resist layer from the insulating layer on the facing surface to the yoke layer. And (g) forming a main magnetic pole layer by plating with a magnetic material on the plating base layer exposed in the blanking pattern, and then removing the resist layer.

In the present invention, the plating underlayer for forming the yoke layer is formed on the insulating layer in the step (d), and the yoke layer is formed by plating on the plating underlayer in the step (e). I have. In the step (d), the periphery of the plating underlayer is not surrounded by a resist layer or the like, and only the plating underlayer is formed on the planarized insulating layer. The front end face of the yoke layer that grows by plating from the plating base layer without the surroundings grows rounded, and the front end face of the yoke layer is formed as an inclined surface or a curved surface inclined in the height direction from the lower surface to the upper surface. be able to.

In the present invention, since the front end surface of the yoke layer has a gentle slope or a curved surface, it is formed in the step (f) from the insulating layer in front of the yoke layer to the yoke layer. The thickness of the resist layer can be made substantially uniform.

For this reason, when forming a pattern for removing the main magnetic pole layer on the resist layer by exposure and development, the resist layer in the pattern for removal can be appropriately exposed and developed from the lower surface to the entire upper surface, and can be removed. Does not generate a resist pool as in the prior art.

Therefore, the plating underlayer for forming the main magnetic pole layer is appropriately exposed in the blanking pattern. Therefore, in the step (g), the main magnetic pole layer is appropriately formed on the plating underlayer in a predetermined shape. Plating growth.

In the present invention, in the step (d), it is preferable that the plating underlayer is formed by the following steps. (H) forming a plating underlayer on the insulating layer upper surface and the connection layer upper surface, and further forming a resist layer on the plating underlayer; and (i) a front end surface is located rearward in the height direction from the opposing surface. Removing the other resist layer while leaving a yoke layer-shaped resist layer extending over the connection layer; and (j) removing the plating underlayer not covered with the resist layer. Removing.

Alternatively, in the present invention, in the step (d), the plating underlayer may be formed by the following steps. (K) forming a resist layer on the upper surface of the insulating layer and the upper surface of the connection layer, and removing a yoke layer shape in which a front end face is located rearward in the height direction from the opposing surface on the resist layer and extends up to the connection layer; Forming a pattern on the resist layer, and (l) removing the resist layer after forming a plating underlayer by sputtering in the punched pattern.

According to the method of forming the plating underlayer,
The periphery of the plating underlayer is not surrounded by a resist layer or the like, and only the insulating layer is spread around the plating underlayer. Therefore, when the yoke layer is grown on the plating base layer by plating, the periphery of the yoke layer grows while being rounded, and the front end face of the yoke layer is inclined or curved in the height direction from the lower surface to the upper surface. It can be formed as a surface.

In the present invention, it is preferable that, in the step (f), a cutout pattern is formed in the resist layer in which at least the inner width dimension in the track width direction at the opposing surface extends from the lower surface to the upper surface.

As a result, the front end face of the main magnetic pole layer can be formed into a shape whose width gradually increases from the lower surface to the upper surface.

Further, in the present invention, it is preferable that, in the step (g), the plating base layer formed other than under the main pole layer is further removed.

[0046]

FIG. 1 is a longitudinal sectional view showing the structure of a magnetic head having a perpendicular magnetic recording head according to a first embodiment of the present invention.

The perpendicular magnetic recording head H shown in FIG. 1 applies a perpendicular magnetic field to the recording medium M to magnetize the hard film Ma of the recording medium M in the vertical direction.

The recording medium M is disk-shaped, and has a hard film Ma having a high residual magnetization on its surface and a soft film Mb having a high magnetic permeability inward. And rotated.

The slider 30 of the perpendicular magnetic recording head H
Is formed of a ceramic material such as Al ₂ O ₃ .TiC. When the facing surface 30a of the slider 30 faces the recording medium M and the recording medium M rotates, the slider 30 is moved by the airflow on the surface. Or the slider 30 slides on the recording medium M. In FIG. 1, the moving direction of the recording medium M with respect to the slider 30 is the illustrated Z direction. The perpendicular magnetic head H is provided on the trailing side end surface of the slider 30.

A side end surface 30b of the slider 30 has A
l ₂ O ₃ or the non-magnetic insulating layer 54 of an inorganic material such as SiO ₂ is formed, the reading portion H _R is formed on the nonmagnetic insulating layer.

[0051] The reading section H _R is lower shield layer 52 from the bottom, the gap layer 55, made of the magnetoresistive element 53 and the upper shield layer 51,. The magnetoresistance effect element 53 includes an anisotropic magnetoresistance effect (AMR) element, a giant magnetoresistance effect (GMR) element, and a tunnel type magnetoresistance effect (TMR).
(MR) element.

On the upper shield layer 51, Al ₂
Non-magnetic insulating layer 3 made of an inorganic material such as O ₃ or SiO ₂
1 is formed, and the perpendicular magnetic recording head H for recording of the present invention is provided on the nonmagnetic insulating layer 31. The perpendicular magnetic recording head H is covered with a protective layer 13 formed of an inorganic non-magnetic insulating material or the like. The surface H1a of the perpendicular magnetic recording head H facing the recording medium is:
The surface is substantially the same as the facing surface 30a of the slider 30.

In the perpendicular magnetic recording head H, the auxiliary magnetic pole layer 21 is formed by plating a ferromagnetic material such as permalloy (Ni-Fe). The upper shield layer 51 may also be used as the auxiliary magnetic pole layer 21. The nonmagnetic insulating layer 31 is formed below the auxiliary magnetic pole layer 21 (between the auxiliary magnetic pole layer 21 and the side end surface 30b of the slider 30) and around the auxiliary magnetic pole layer 21. Then, as shown in FIG. 1, the surface (upper surface) 21a of the auxiliary pole layer 21 and the surface (upper surface) of the nonmagnetic insulating layer 31
31a is located on the same plane.

As shown in FIG. 1, a connection layer 25 made of Ni—Fe or the like is formed on the surface 21a of the auxiliary magnetic pole layer 21 behind the opposing surface H1a in the height direction (Y direction in the drawing).

An insulating underlayer 26 of Al ₂ O ₃ or the like is formed on the surface 21 a of the auxiliary pole layer 21 and the surface 31 a of the nonmagnetic insulating layer 31 around the connection layer 25. A coil layer 27 is formed on the ground layer 26 using a conductive material such as Cu. The coil layer 27 is formed by a frame plating method or the like.
A spiral pattern is formed around the connection layer 25 so as to have a predetermined number of turns. On the connection end 27a on the winding center side of the coil layer 27, a bottom raising layer 77 also formed of a conductive material such as Cu is formed.

The coil layer 27 and the bottom raising layer 77 are
It is covered with an insulating layer 32 of an organic material such as a resist material, and further covered with an insulating layer 33.

The insulating layer 33 is preferably formed of an inorganic insulating material.
O, Al ₂ O ₃ , SiO ₂ , Ta ₂ O ₅ , TiO, AlN,
_{AlSiN, TiN, SiN, Si 3} N 4, NiO, W
At least one of O, WO ₃ , BN, CrN, and SiON can be selected.

The surface (upper surface) 25 of the connection layer 25
a, the surface (upper surface) 77a of the bottom raising layer 77 and the surface (upper surface) 33a of the insulating layer 33 are processed to be the same surface. Such a flattening process is performed using a CMP technique or the like as described in a manufacturing method described later.

In the first embodiment, a yoke layer 35 is formed on the insulating layer 33. As shown in FIG. 1, the front end surface 35a of the yoke layer 35 is
It is formed rearward in the height direction (the Y direction in the figure) from a. The base end 35c of the yoke layer 35 is formed on the upper surface of the connection layer 25, and the base end 35c and the connection layer 2
5 are magnetically connected. Since the insulating layer 33 below the yoke layer 35 is formed with a flat surface, the yoke layer 35 can be formed with high pattern accuracy.

In the present invention, the front end face 35a of the yoke layer 35 is an inclined surface or a curved surface inclined from the lower surface to the upper surface (Z direction in the drawing) in the height direction (Y direction in the drawing).

Further, as shown in FIG.
The lead layer 36 is formed on the surface 77a of the
From 6, the recording current can be supplied to the bottom raising layer 77 and the coil layer 27. The lead layer 36
Can be formed of the same material as the yoke layer 35, and the yoke layer 35 and the lead layer 36 can be simultaneously formed by plating.

Further, as shown in FIG.
The main magnetic pole layer 24 made of a magnetic material such as NiFe is formed from the insulating layer 33 located on the side of the facing surface H1a to the yoke layer 35 with a plating base layer 71 interposed therebetween. Further, the nonmagnetic layer 40 is
It is formed to be overlaid on top. And the main magnetic pole layer 2
4 and the front end surfaces 24a, 40a of the nonmagnetic layer 40 both emerge from the facing surface H1a.

In the embodiment shown in FIG. 1, the main magnetic pole layer 24 and the yoke layer 35 are formed to have a length L3 from the facing surface H1a to the height direction. The length L3 is not limited as long as the layer 35 partially overlaps and is magnetically connected. Therefore, the main magnetic pole layer 24 and the nonmagnetic layer 40
May be formed longer in the height direction, and may extend to the same position as the rear end face 35b of the yoke layer 35 as shown in FIG. 2, for example.

Note that, as shown in FIGS.
0 and the yoke layer 35 are covered with the protective layer 13.

When the non-magnetic layer 40 is overlaid on the main magnetic pole layer 24 as shown in FIGS.
4, the plating underlayer 71 can be removed without reducing the height dimension of the main magnetic pole layer 24, and the plating underlayer 71 is removed. At this time, the plating underlayer 7 is formed on both end surfaces of the main magnetic pole layer 24 in the track width direction (the X direction in the drawing).
Although the constituent material 1 may adhere, the adhered film can be removed without reducing the height of the main pole layer 24 in this case as well. The track width Tw of the main magnetic pole layer 24 is obtained by shaving both side end faces of the main magnetic pole layer 24.
And a perpendicular magnetic recording head capable of coping with a narrow track can be manufactured. Even in this case, the track width of the main pole layer 24 can be reduced without reducing the height of the main pole layer 24. Is possible.

The non-magnetic layer 40 is preferably formed of a non-magnetic metal material. The non-magnetic metal material includes NiP, NiCu, NiMn, NiW, NiB, P
d, Rh, Ru, Au, and Cu can be selected. Among them, it is preferable to select NiP. When the nonmagnetic layer 40 is NiP, in addition to the ease of continuous plating in manufacturing,
It has excellent heat resistance and good adhesion to the main magnetic pole layer 24. The hardness of the main magnetic pole layer 24 can be made equal to that of the main magnetic pole layer 24.
The processing amount of No. 4 can be made equal, and the workability can be improved.

The nonmagnetic layer 40 is a NiP alloy, and the concentration of the element P is preferably 8% by mass or more and 15% by mass or less. Thereby, it is possible to stably be non-magnetic against external factors such as heat generation. Also, N
The measurement of the alloy composition of the non-magnetic layer 40 such as an iP alloy is performed by SEM.
It can be specified by a combined X-ray analyzer, waveform dispersion type X-ray analyzer, or the like such as TEM or TEM.

The reason for selecting the non-magnetic metal material is that the non-magnetic layer 4 is formed on the main pole layer 24 to be plated.
This is because 0 can be continuously formed by plating and the manufacturing process can be simplified.

FIG. 3 is a longitudinal sectional view of a magnetic head equipped with a perpendicular magnetic recording head according to another embodiment of the present invention.

The embodiment shown in FIG. 3 differs from FIG. 1 in that the nonmagnetic layer 40 is not provided on the upper surface of the main magnetic pole layer 24. For this reason, in FIG. 3, the effect of providing the above-described nonmagnetic layer 40 cannot be obtained, but also in this embodiment, the front end face 35a of the yoke layer 35 extends in the height direction (Y direction in the figure) from the lower surface to the upper surface. The effect of the present invention, which will be described later, can be obtained by being formed with an inclined surface or a curved surface.

Next, the shapes of the front end faces 24a and 40a of the main pole layer 24 and the nonmagnetic layer 40 in FIGS. 1 and 2 will be described.

As shown in FIGS. 4 and 5, a plating base layer 71 is formed between the insulating layer 33 and the main magnetic pole layer 24. The main magnetic pole layer 24 is formed by plating and growing from the plating base layer 71.
The height dimension H1 of No. 4 is set to a predetermined value.

As shown in FIGS. 4 and 5, the main magnetic pole layer 24
Are formed in such a shape that the width dimension in the track width direction (X direction in the drawing) gradually increases from the lower surface to the upper surface (Z direction in the drawing). As shown in FIG. 4, it is preferable that the both end surfaces 24d, 24d are formed as inclined surfaces or curved surfaces as shown in FIG.

Further, as shown in FIGS. 4 and 5, the front end surface 40a of the nonmagnetic layer 40 formed on the main magnetic pole layer 24 also has a shape in which the width in the track width direction gradually increases from the lower surface to the upper surface. It is formed with. 4 and 5
As shown in the figure, both end faces 40d, 40d of the front end face 40a.
d is a continuous surface with both side end surfaces 24d and 40d of the main pole layer 24. Therefore, in FIG. 4, both side end surfaces 40d of the front end surface 40a of the yoke layer 40 are inclined surfaces, and in FIG. Both end surfaces 40d of the surface 40a are curved surfaces.

As shown in FIG. 4 and FIG.
The track width Tw is regulated by the width in the track width direction of the upper surface (trailing side end face) 24g of the upper surface 4.

Even when the nonmagnetic layer 40 is not overlaid on the main magnetic pole layer 24 as shown in FIG. 3, the front end face 24a of the main magnetic pole layer 24 extends from the lower surface to the upper surface in the track width direction (X direction in the drawing). ) Gradually widens, and at this time, both end surfaces 24d, 24d of the front end surface 24a are formed.
d is preferably an inclined surface or a curved surface.

As described above, the front end face 24 of the main magnetic pole layer 24
If both end surfaces 24d, 24d of a are inclined surfaces or curved surfaces, and the shape of the front end surface 24a is a substantially inverted trapezoidal shape,
When recording is actually performed on a recording medium, even if a skew angle is generated as shown by a broken line in FIG. 10, the end face 24d shown by (iii) does not greatly protrude laterally from the recording track width Tw1. . Therefore, the both end faces 24
Fringing due to d can be prevented, and off-track performance can be improved.

FIG. 33 is a front view of the conventional main magnetic pole layer 5 shown in FIG. 27 or FIG. 29. If the end face 5a of the main magnetic pole layer 5 is square or rectangular as shown in FIG. When the end face 5a of the magnetic pole layer 5 has a skew angle with respect to the moving tangent direction (Z direction in the drawing) of the recording medium, the side 5b of the main magnetic pole layer has an oblique leakage magnetic field within the track width Tw1 as shown by a broken line. And fringing F occurs, which causes a decrease in off-track performance.

Therefore, as in the present invention, the front end face 24a of the main magnetic pole layer 24 is preferably substantially inverted trapezoidal.

Next, the planar shape of the main magnetic pole layer 24 and the yoke layer 35 as viewed from directly above will be described below. The plan view described below can be applied to any of the perpendicular magnetic recording heads shown in FIGS.

As shown in the plan view of FIG. 6, the yoke layer 35 has a narrower width Wy in the track width direction in the front region 35d on the opposing surface H1a side, and has a smaller width in the track width direction in the rear region 35e. Is a planar shape that gradually increases. The main magnetic pole layer 24 is overlaid on the front region 35d. The width Wy of the front region 35d in the track width direction (X direction in the drawing) is equal to the track width T.
It is formed with a width dimension wider than w.

As shown in FIG. 6, the upper surface of the front end surface 24a (the end surface on the trailing side) of the main magnetic pole layer 24 is regulated by the track width Tw, and the width is maintained or slightly widened in the height direction. It is formed with a short length dimension toward.

In the present invention, it is necessary that the front end face 24a of the main magnetic pole layer 24 exposed on the facing surface H1a be larger than the area of the front end face 21b of the auxiliary magnetic pole layer 21, as shown in FIG. As described above, it is preferable that the width Wr of the auxiliary magnetic pole layer 21 in the track width direction is formed to have a width sufficiently larger than the track width Tw.

In FIG. 7, the yoke layer 35 does not have the front region 35d, but is in the height direction (Y direction in the drawing).
, The width dimension Wy gradually widens. The main magnetic pole layer 24 is overlaid on the yoke layer 35.

As shown in FIG. 7, the upper surface of the front end face 24a (the end face on the trailing side) of the main magnetic pole layer 24 is regulated by the track width Tw, and its width is maintained or slightly widened to increase in the height direction. It is formed with a short length toward the rear.

In FIG. 8, the shape of the yoke layer 35 is shown in FIG.
However, the rear region 24e of the main magnetic pole layer 24 has a shape in which the width dimension gradually increases.
And the yoke layer 35 overlap each other. However, the yoke layer 35 is further formed closer to the facing surface side H1a,
A part of the narrow front region 24f of the main magnetic pole layer 24 may also overlap the yoke layer 35. This makes it possible to smoothly introduce a magnetic flux from the yoke layer 35 to the main magnetic pole layer 24, and to manufacture a perpendicular magnetic recording head capable of coping with high recording density.

The yoke layer 35 may have a front region 35d as shown in FIG.

In FIG. 9, the shape of the yoke layer 35 is the same as that of FIGS. 7 and 8, except that the rear region 24e of the main magnetic pole layer 24 has a shape whose width is gradually increased. 24e is formed to extend long in the height direction (Y direction in the figure). The rear end of the rear area 24e is
As shown in FIG. 2, the yoke layer 35 may be extended to the same plane as the rear end face 35b.

The yoke layer 35 may have a front region 35d as shown in FIG. Further, the main pole layer 24 has a rear region 2 whose width is gradually increased.
4e is not formed and the track width Tw is increased in the height direction.
Alternatively, the narrow front region 24f slightly wider than the track width Tw in the height direction may be extended in the height direction.

In the plan views shown in FIGS. 6 to 9 described above, in each of the yoke layers 35, a region where the width dimension Wy gradually increases toward the height direction is formed. At the position where the main magnetic pole layer 24 and the main magnetic pole layer 24 overlap, the width of the yoke layer 35 in the track width direction is larger than the width of the main magnetic pole layer 24 in the track width direction.

The thickness of the yoke layer 35 is substantially equal to the thickness of the main pole layer 24, or the thickness of the yoke layer 35 is formed to be larger than the thickness of the main pole layer 24.

Therefore, at a position where the yoke layer 35 and the main magnetic pole layer 24 overlap, the cross-sectional area of the yoke layer 35 in a direction parallel to the opposing surface H1a is parallel to the opposing surface H1a of the main magnetic pole layer 24. It is larger than the cross-sectional area in any direction. As a result, the recording magnetic field can be appropriately guided from the yoke layer 35 to the main magnetic pole layer 24, the magnetic flux passage efficiency is improved, and the overwrite characteristics can be improved.

Also, as shown in FIG. 1 to FIG.
And the yoke layer 35 are separately formed, and the main pole layer 24 is overlapped on the yoke layer 35, and the narrow front region 24f of the main pole layer 24 is formed to be long. It is more preferable that the entire width dimension of the front region 24f can be formed with almost the track width Tw with high pattern accuracy. In such a case, by forming the yoke layer 35 as close to the opposing surface H1a as possible, magnetic saturation of the main magnetic pole layer 24 can be suppressed, and magnetic flux can be concentrated on the main magnetic pole layer 24.

FIGS. 6 to 9 are examples, and the plane shapes of the main pole layer 24 and the yoke layer 35 are not limited to these plane shapes. In the present invention, the main magnetic pole layer 2
4 and the yoke layer 35, the cross-sectional area of the yoke layer 35 in a direction parallel to the facing surface H <b> 1 a is:
The main pole layer 24 may be formed in any planar shape as long as it is larger than a cross-sectional area in a direction parallel to the facing surface H1a.

In the present invention, the front end face 3 of the yoke layer 35 in any of the embodiments shown in FIGS.
5a is formed as an inclined surface or a curved surface inclined in the height direction from the lower surface to the upper surface.

The method of forming such a front end face 35a will be described in detail in a later manufacturing method, whereby the following effects can be obtained.

That is, according to the present invention, the yoke layer 35 is placed on the insulating layer 33 located in front of the yoke layer 35.
When the main magnetic pole layer 24 is formed using a resist layer, a punch pattern for forming the main magnetic pole layer 24 is formed on the resist layer by exposure and development. If the surface 35a is a gentle slope or a curved surface, the resist layer formed from the insulating layer 33 to the yoke layer 35 can be formed with a substantially constant thickness. Exposure and development can be appropriately performed from the bottom to the bottom surface, and the resist pool does not occur in the punched pattern unlike the related art.

Therefore, in the present invention, the plating base layer 71 is exposed on one surface in the punched pattern, and the plating base layer 7 is exposed.
1, a main magnetic pole layer 24 having a predetermined shape can be plated and grown appropriately.

When the front end surface 35a of the yoke layer 35 is formed as a gentle slope or curved surface as described above, the thickness of the resist layer for forming the main magnetic pole layer 24 can be made substantially uniform. Since it can be formed, the pattern accuracy can be improved, so that the main magnetic pole layer 24 can be formed with high pattern accuracy.

In particular, as described above, the front end face 24a of the main magnetic pole layer 24, which appears on the facing surface H1a, has its upper surface (trailing side end face) regulated in the track width direction as the track width Tw. This track width Tw can be set to a predetermined size with high accuracy. Therefore, according to the present invention, it is possible to manufacture a perpendicular magnetic recording head that can cope with a narrow track.

In the present invention, since the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface, a magnetic flux is smoothly guided from the yoke layer 35 to the main pole layer 24. , The efficiency of passing magnetic flux can be improved. That is, in the present invention, the yoke layer 3
5, the magnetic flux leaking from the front end face 35a of the magnetic head 5 can be reduced, the magnetic flux can be appropriately concentrated on the main magnetic pole layer 24, and a perpendicular magnetic recording head that can appropriately cope with future high recording density can be manufactured. .

In the present invention, as described above, the upper surface 33a of the insulating layer 33 and the upper surface 25a of the connection layer 25 are formed by CMP.
It is a flattened surface made the same by technology or the like.

Therefore, the yoke layer 35 is formed on the insulating layer 33.
Further, the main magnetic pole layer 24 can be formed with high pattern accuracy.

In the present invention, since the main magnetic pole layer 24 and the yoke layer 35 can be formed separately, the main magnetic pole layer 24 and the yoke layer 35 can be formed of different magnetic materials. is there. In such a case, the main magnetic pole layer 2
It is preferable that the magnetic material is selected so that the saturation magnetic flux density of No. 4 is higher than the saturation magnetic flux density of the yoke layer 35.
If the main magnetic pole layer 24 is formed of a magnetic material having a higher saturation magnetic flux density than the yoke layer 35, a magnetic flux φ having a high density is perpendicularly applied to the hard film Ma from the main magnetic pole layer 24 having a small width Tw and a small thickness. The overwrite characteristics can be improved.

The main magnetic pole layer 24 and the yoke layer 35 are made of a magnetic material such as Ni—Fe, Co—Fe, or Ni—Fe—Co.
When the same magnetic material is selected for 5, it is possible to make a difference in the saturation magnetic flux density by changing the composition ratio.

In the perpendicular magnetic recording head shown in FIGS. 1 to 3, when a recording current is applied to the coil layer 27 via the lead layer 36, the auxiliary magnetic pole layer 21 and the yoke are caused by the current magnetic field of the current flowing through the coil layer 27. A recording magnetic field is induced in the layer 35. As shown in FIGS. 1 to 3, the facing surface H1a
Then, the front end face 24a of the main magnetic pole layer 24 and the auxiliary magnetic pole layer 2
The leakage recording magnetic field from the front end face 21b of the recording medium M passes through the hard film Ma of the recording medium M and passes through the soft film Mb. Since the area of the front end face 24a of the main magnetic pole layer 24 is sufficiently smaller than the area of the front end face 21b of the auxiliary magnetic pole layer 21, the magnetic flux φ of the leakage recording magnetic field concentrates on the front end face 24a of the main magnetic pole layer 24, The concentrated magnetic flux φ magnetizes the hard film Ma in the vertical direction, thereby recording magnetic data.

Next, a method for manufacturing the perpendicular magnetic recording head of the present invention will be described below. FIG. 11 to FIG. 26 are process diagrams showing the manufacturing process of the perpendicular magnetic recording head according to the present invention. FIGS. 11 to 13 show common manufacturing steps of the perpendicular magnetic recording head shown in FIGS.

In the step shown in FIG.
After the auxiliary pole layer 21 made of a magnetic material is formed thereon, the back of the auxiliary pole layer 21 in the height direction (Y direction in the drawing) is also filled with the non-magnetic insulating layer 31, and the auxiliary pole layer 21 and the non-magnetic insulating layer are further filled. The upper surface of 31 is flattened by using a CMP technique or the like.

Next, a connection layer 25 made of a magnetic material is formed by plating behind the auxiliary magnetic pole layer 21 in the height direction (Y direction in the drawing), and an inorganic insulating material is formed from the upper surface of the auxiliary magnetic pole layer 21 to the upper surface of the connection layer 25. To form an insulating underlayer 2
6 is formed.

Next, as shown in FIG.
6, a coil layer 27 is formed by frame plating, and a bottom raising layer 77 is formed by plating. At this time, the coil layer 27 is formed at a position sufficiently lower than the height of the connection layer 25. And the coil layer 2
The layer 7 and the bottom raising layer 77 are covered with an insulating layer 32 made of an organic material, and an inorganic insulating material is sputtered to form an insulating layer 33 covering all the layers.

Next, the respective layers formed in the state shown in FIG. 12 are polished from above in the figure by using the CMP technique or the like. This polishing is performed by the insulating layer 33 and the connection layer 25.
And a horizontal plane (LL) which traverses all of the raised layers 77.
Face).

As a result of the polishing, as shown in FIG. 13, the surface 25a of the connection layer 25 and the surface 33a of the insulating layer 33 are formed.
And the surface 77a of the bottom raising layer 77 is processed so as to be all the same.

The above is the manufacturing process common to the embodiments. Next, a method of manufacturing the perpendicular magnetic recording head having the structure shown in FIG. 1 will be described.

FIG. 14 is a plan view, and a plating base layer 72 is formed by sputtering on the entire surface of the flattened insulating layer 33. Next, a resist layer 80 is formed on the plating base layer 72. The resist layer 80 is left with a pattern 80a in the shape of the yoke layer 35, and the other resist layers are removed.
Depending on the type of the resist layer 80, there are a type in which the exposed and developed portions are removed and a type in which the unexposed and developed portions are removed. Is the pattern 80a
The remaining resist layer 80 is exposed and developed to remove that portion. When the resist layer 80 from which a portion that is not exposed and developed is used, the inside of the pattern 80a is exposed and developed, and the resist layer 80 that is not exposed and developed is removed. Thus, the resist layer 80 having the pattern 80a shown in FIG. 14 can be left.

Note that the pattern 80a is formed of the yoke layer 35.
Are formed, and a yoke pattern 80c in the region in which is formed, and a common pattern 80d for energizing plating located behind the yoke pattern 80c.

The pattern 80a has a front end face 8
0b is located behind the facing surface H1a in the height direction (Y direction in the figure), and the yoke pattern 80c of the pattern 80a is formed to extend to the connection layer 25.

Next, after the plating base layer 72 not covered by the resist layer 80 is removed by ion milling, the resist layer 80 is removed.

As a result, the plating base layer 72 having the shape of the pattern 80a is left on the insulating layer 33.

Next, FIG. 15 is a plan view. In this step,
The common pattern 80d is covered with a resist layer 76.
FIG. 18 shows a vertical sectional view at this time. Then, the yoke layer 35 is formed by plating on the plating base layer 72 of the yoke pattern 80c.

Alternatively, the yoke layer 35 may be formed by the following method. FIG. 16 is a plan view. In this step,
A resist layer 73 is formed on the insulating layer 33. Further, on the resist layer 73, a blanking pattern 73a having a planar shape of the yoke layer 35 is formed by exposure and development. The blanking pattern 73a is composed of a yoke pattern 73c in a region where the yoke layer 35 is formed, and a plating energizing common pattern 73d located behind the yoke pattern 73c. The punched pattern 73a has a front end surface 73b that is opposite to the facing surface H1.
The yoke pattern 73c of the cutout pattern 73a is formed to extend to the connection layer 25 behind the height a.

Then, a plating base layer 72 is formed by sputtering in the blanking pattern 73a, and the resist layer 73 is removed.

In the step shown in FIG. 17, the common pattern 73d is covered with a resist layer 74. FIG. 18 shows a vertical sectional view at this time. Then, the yoke layer 35 is grown by plating on the plating base layer 72 formed on the yoke pattern 73c not covered with the resist layer 74.

Next, after the steps of FIGS. 15 and 17, the resist layers 76 and 74 are removed, and the common pattern 80 is removed.
When the plating underlayer 72 on d and 73d is removed, a vertical sectional view of the perpendicular magnetic recording head at this point is as shown in FIG.

As shown in FIG. 19, the plating underlayer 7
The yoke layer 35 formed by plating on the front end face 3
5a has a gently rounded shape or a gentle slope. The reason why the front end face 35a has a gentle slope or a curved face is that the periphery of the plating base layer 72 on the yoke pattern 73c is not surrounded by a resist layer or the like at the time of the step of FIG. 15 or FIG. This is because the periphery of the yoke pattern 73c is open.

Looking at FIGS. 15 and 17 or FIG. 18 in detail, the periphery of the plating base layer 72 formed on the insulating layer 33 is the resist layers 74 and 76 except on the common pattern 75d. You can see that it is not surrounded by such as.

As described above, when the periphery of the plating underlayer 72 is not surrounded by the resist layer or the like and is open, the end surface of the yoke layer 35 that is to be plated and grown on the plating underlayer 72 is smoothly rounded. It grows while taking on it, and becomes an inclined surface or a curved surface.

In the present invention, it is sufficient that at least a region in front of the front end face 72b of the plating underlayer 72 is not covered with the resist layer. For example, both sides of the plating underlayer 72 in the track width direction (the X direction in the drawing) The end face may be covered with a resist layer. In this case, at least the yoke layer 35 formed by plating on the plating base layer 72 is formed as an inclined surface or a curved surface whose front end surface 35a is inclined in the height direction from the lower surface to the upper surface.

Although not shown in FIG. 19, it is preferable that the lead layer 36 is formed on the upper surface 77a of the bottom raising layer 77 by plating at the same step as that shown in FIGS.

FIG. 20 is a plan view. In this step, the yoke layer 35 and the insulating layer 33 extending therearound are formed.
A plating base layer 71 is formed thereon by sputtering, a resist layer 75 is formed thereon, and the main magnetic pole layer 2 is formed on the resist layer 75.
A blank pattern 75a for forming No. 4 is formed by exposure and development.

[0130] As shown in FIG.
The front end surface 75b of a is formed on the same plane as the opposing surface H1a, and the cutout pattern 75a is formed to extend over the yoke layer 35. In this step, the cut pattern 75a may be formed so that the rear end face 75d extends further rearward in the height direction (Y direction in the drawing) as shown by a dashed line.

FIG. 21 is a longitudinal sectional view of the perpendicular magnetic recording head taken along the line MM shown in FIG. 20 and viewed from the direction of the arrow.

As shown in FIG. 21, the resist layer 75
There is no resist pool in the punched pattern 75a formed as in the prior art, and the plating underlayer 71 is appropriately exposed in the punched pattern 75a.

This is because the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface as described above, and as a result, the yoke layer 35 extends from the insulating layer 33 in front of the yoke layer 35. The thickness of the resist layer 75 formed over the resist layer 75 can be made substantially uniform, and the resist layer 75 in the cutout pattern 75a formed on the resist layer 75 can be removed by appropriately exposing and developing from the upper surface to the lower surface. It has become.

Next, the resist layer 75 according to the present invention is used.
Has the shape shown in FIG. 22 when viewed from the facing surface H1a side.

[0135] As shown in FIG.
Inner end faces 75e, 7 of the cut pattern 75a formed in
5e is formed such that the width in the track width direction (X direction in the drawing) gradually increases from the lower surface to the upper surface (Z direction in the drawing). The inner end surface 75e may be formed as a curved surface as shown in FIG. 22, or may be formed as an inclined surface.

In order to form the cut pattern 75a having such a shape on the resist layer 75, the resist layer 75
Is applied, the punched pattern 75a is formed by exposure and development, and further, the inner side face 75e of the punched pattern 75a is dripped by heat treatment, whereby the inner side face 75 is formed.
e can be formed on an inclined surface or a curved surface.

Next, as shown in FIGS. 23 and 24, the main magnetic pole layer 24 is grown by plating on the plating base layer 71 exposed in the blanking pattern 75a. At this time, as shown in FIG. 23, the main magnetic pole layer 24 is plated and grown to a predetermined thickness H1.

Further, according to the present invention, N
A non-magnetic layer 40 made of a non-magnetic metal material such as iP is grown by plating. Then, the resist layer 75 is removed.

In the present invention, as shown in FIG. 21, there is no resist pool in the punched pattern 75a, and the plating underlayer 71 is appropriately exposed on the entire surface of the punched pattern 75a. Therefore, the main magnetic pole layer 24 can be appropriately plated and grown from the plating base layer 71 to form the main magnetic pole layer 24 having a predetermined shape.

In the present invention, since the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface, the resist layer 75 can be formed with a substantially uniform film thickness. It is easy to form the punched pattern 75a of the main magnetic pole layer 24 formed thereon with high precision.

In particular, the dimension in the track width direction of the upper surface (trailing side end surface) of the front end face 24a of the main magnetic pole layer 24 is regulated as a minute track width Tw. It is possible to manufacture a perpendicular magnetic recording head that can form the width Tw with a predetermined size and that can cope with a narrower track in the future.

FIG. 25 is a front view showing a state where the resist layer 75 has been removed. As shown in FIG. 25, on the plating base layer 71, the main pole layer 24 and the non-magnetic pole layer 24 whose both end surfaces are inclined or curved so that the width in the track width direction gradually increases from the lower surface to the upper surface. Magnetic layer 4
0 are stacked.

As shown in FIG. 25, since the plating base layer 71 is formed not only under the main pole layer 24 but also in other regions, the plating base layer 71 other than under the main pole layer 24 is formed. Must be removed.

In the step shown in FIG. 25, the plating base layer 71 formed other than under the main magnetic pole layer 24 is removed by anisotropic ion milling. At this time, the upper surface 40e of the nonmagnetic layer 40 is also shaved under the influence of the ion milling.

As shown in FIG. 26, a part of the plating base layer 71a that has been removed is reattached to both end surfaces 24d and 40d of the main magnetic pole layer 24 and the nonmagnetic layer 40 (arrow C). The adhering films 78 adhering to the both end surfaces,
78 is removed by anisotropic ion milling. Also at this time, the upper surface 40e of the nonmagnetic layer 40 is shaved under the influence of the ion milling. The plating base layer 71
The removal of the adhesion film 78 is particularly effective when the plating base layer 71 is formed of a magnetic material. This is because the track width Tw is increased when the adhesion film 78 is made of a magnetic material. On the other hand, when the adhesion film 78 is a non-magnetic plating material, it is not particularly necessary to remove the adhesion film 78. When the plating base layer 71 is formed within a range that does not affect the electrical characteristics, it is not particularly necessary to remove the plating base layer 71.

As described above, since the non-magnetic layer 40 is formed on the main magnetic pole layer 24 in the present invention, the non-magnetic layer 40 is removed when the plating underlayer 71 and the adhesion film 78 are removed by ion milling. The height dimension H1 of the main magnetic pole layer 24 does not decrease only by shaving the upper surface 40e of the main pole layer 40.

Further, both end surfaces 24d of the main magnetic pole layer 24,
Even when the end faces 40d on both sides of the nonmagnetic layer 40 are further cut by anisotropic ion milling to reduce the track width Tw determined by the width dimension of the upper surface (end face on the trailing side) 24g of the main magnetic pole layer 24, Non-magnetic layer 4 by ion milling
Although the upper surface 40e of the zero is shaved, the height dimension H1 of the main magnetic pole layer 24 does not decrease.

Therefore, when the non-magnetic layer 40 is formed on the main magnetic pole layer 24 as in the present invention, the height H1 of the main magnetic pole layer 24 is not reduced and is kept at a constant value. It is possible to realize the removal of the plating base layer 71a and the adhesion film 78 and the narrowing of the track while keeping the state.

In the present invention, the ion milling is performed at 45 ° to 70 ° with respect to the vertical direction with respect to the plating underlayer 71.
It is preferable to be performed at an angle inclined forward and backward. Note that 45
If the angle is not less than 60 ° and not more than 60 °, the removal of the plating base layer 71a and the adhesion film 78 and the narrowing of the track can be performed in one ion milling step, and the manufacturing process can be simplified.

However, the step of removing the plating base layer 71a, the step of removing the adhesion film 78, and the step of narrowing the track may be performed by ion milling having different milling angles.

In the present invention, the height dimension H1 of the main magnetic pole layer 24 is preferably not less than 0.25 μm and not more than 0.5 μm, and the track width Tw of the main magnetic pole layer 24 is preferably not more than 0.5 μm.
Is preferably 0.7 μm or less, more preferably 0.5 μm or less.

In the present invention, the plating underlayer 72 for forming the yoke layer 35 and the plating underlayer 71 for forming the main magnetic pole layer 24 may be made of a magnetic plating material or a nonmagnetic plating material. There may be. When a non-magnetic metal material such as Cu is used for the plating underlayer 71 for forming the main magnetic pole layer 24, the main magnetic pole layer 2
Since the plating base layer 71 may be left slightly extending to the lower part of the base 4, etching control can be facilitated as compared with the case where a magnetic plating material is used for the plating base layer 71.

In the case of manufacturing the perpendicular magnetic recording head shown in FIG.
The rear end face 75d of the punched pattern 75a formed in the above is further extended in the height direction (the Y direction in the drawing) (the area denoted by reference numeral 75c), and the rear end face 75d is connected to the rear end face 3 of the yoke layer 35.
What is necessary is just to make it 5b.

When the perpendicular magnetic recording head shown in FIG. 3 is manufactured, only the main magnetic pole layer 24 is grown by plating in the punched pattern 75a formed in the resist layer 75 in the steps shown in FIGS. Just do it.

In the present invention, the resist layer 75 shown in FIG.
The inner width dimension of the main pole layer 24 may not be formed so as to expand from the lower surface to the upper surface, and the front end surface 24a of the main magnetic pole layer 24 may be formed in a square or rectangular shape as in the related art. It is possible to obtain the effects of the invention.

[0156] In the embodiment shown in FIGS. 1 and 2, although the reading portion H _R is formed, which may not be formed.

[0157]

As described above, according to the present invention, the front end face of the yoke layer formed on the insulating layer is formed as a sloped surface or a curved surface inclined in the height direction from the lower surface to the upper surface.

For this reason, when the main magnetic pole layer formed from the insulating layer located forward of the yoke layer to the yoke layer is formed using the resist layer, the thickness of the resist layer is formed to be substantially uniform. Therefore, when a cut pattern for forming the main magnetic pole layer is formed on the resist layer by exposure and development, a resist pool does not occur in the cut pattern as in the related art.

Therefore, according to the present invention, it is possible to expose the plating underlayer on one surface in the punching pattern and to form a main pole layer of a predetermined shape on the plating underlayer by plating.

If the front end face of the yoke layer is formed as a gentle slope or a curved face as described above,
Since the thickness of the resist layer for forming the main magnetic pole layer can be formed to be substantially uniform, the pattern accuracy can be improved. Therefore, the main magnetic pole layer can be formed with high pattern accuracy. The front end face of the layer can be formed with a predetermined track width Tw and a predetermined shape.

According to the present invention, the front end face of the yoke layer has a gentle slope or a curved face.
Magnetic flux is smoothly guided from the yoke layer to the main magnetic pole layer, and the efficiency of magnetic flux passage can be improved. That is, in the present invention, a perpendicular magnetic recording head capable of reducing the magnetic flux leaking from the front end face of the yoke layer, appropriately concentrating the magnetic flux on the main magnetic pole layer, and appropriately coping with future high recording density is manufactured. can do.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a magnetic head including a perpendicular magnetic recording head according to a first embodiment of the present invention;

FIG. 2 is a longitudinal sectional view of a magnetic head including a perpendicular magnetic recording head according to a second embodiment of the present invention;

FIG. 3 is a longitudinal sectional view of a magnetic head including a perpendicular magnetic recording head according to a third embodiment of the present invention;

FIG. 4 is a partial front view of a perpendicular magnetic recording head according to the present invention,

FIG. 5 is another partial front view of the perpendicular magnetic recording head according to the present invention;

FIG. 6 is a plan view of the perpendicular magnetic recording head of FIGS. 1 to 3,

FIG. 7 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;

FIG. 8 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;

FIG. 9 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;

FIG. 10 is an explanatory diagram showing a state in which a skew angle has occurred in a magnetic head according to the present invention;

FIG. 11 is a process chart showing a method for manufacturing a perpendicular magnetic recording head according to the present invention;

FIG. 12 is a process chart performed after the step shown in FIG. 11;

13 is a process drawing performed after the step shown in FIG. 12,

14 is a view showing a step performed after the step shown in FIG. 13;

15 is a process chart performed after the step shown in FIG. 14,

FIG. 16 is a process chart performed next to the step shown in FIG. 13 instead of FIG. 14;

17 is a view showing a step performed after the step shown in FIG. 16;

FIG. 18 is a longitudinal sectional view at a stage where a yoke layer is not formed in the steps of FIGS. 15 and 17;

FIG. 19 is a longitudinal sectional view at a stage where a yoke layer is formed in the steps of FIGS. 15 and 17;

FIG. 20 is a process drawing performed after the step shown in FIGS. 15, 17, and 19;

FIG. 21 is a vertical cross-sectional view of the perpendicular magnetic recording head of FIG. 20, taken along line MM.

FIG. 22 is a front view of the perpendicular magnetic recording head shown in FIG. 20;

23 is a view showing a step performed after the step shown in FIG. 22;

FIG. 24 is a longitudinal sectional view of the perpendicular magnetic recording head at the time of the step of FIG. 23;

FIG. 25 is a view showing one step performed after the steps of FIGS. 23 and 24;

FIG. 26 is a process chart performed next to the step in FIG. 25;

FIG. 27 is a longitudinal sectional view showing the structure of a conventional perpendicular magnetic recording head;

FIG. 28 is a plan view of FIG. 27;

FIG. 29 is a longitudinal sectional view showing the structure of an improved conventional perpendicular magnetic recording head.

30 is a plan view of FIG. 29,

FIG. 31 is a process chart showing a method for manufacturing the perpendicular magnetic recording head of FIG. 29;

FIG. 32 is a process drawing performed after the step shown in FIG. 31;

FIG. 33 is an explanatory view showing a state in which a skew angle has occurred in a conventional magnetic head.

[Explanation of symbols]

 H Perpendicular magnetic recording head H1a Opposing surface M Recording medium Ma Hard film Mb Soft film 21 Auxiliary pole layer 24 Main pole layer 24a, 35a, 40a Front end face 25 Connection layer 27 Coil layer 33 Insulating layer 35 Yoke layer 40 Nonmagnetic layer 73, 74, 75, 76, 80 Resist layer 71, 72 Plating underlayer

Claims (11)

[Claims] 1. An auxiliary magnetic pole layer and a main magnetic pole layer are spaced from each other on a surface facing a recording medium, and recording is performed on the auxiliary magnetic pole layer and the main magnetic pole layer rearward in a height direction from the opposing surface. A perpendicular magnetic recording head that is provided with a coil layer that applies a magnetic field and records magnetic data on the recording medium by a perpendicular magnetic field concentrated on the main pole layer; rising from the auxiliary pole layer behind the facing surface in the height direction; A connection layer is provided, and the coil layer is wound around the connection layer. An upper surface of the coil layer is covered with an insulating layer, and a front end surface of the opposing surface side has a height on the insulating layer. A yoke layer which is located rearward in the direction and has a slope or a curved surface whose front end face is inclined in the height direction from the lower surface to the upper surface, and the base end of the yoke layer is magnetically connected to the connection layer. And which, perpendicular magnetic recording head, characterized in that the main magnetic pole layer is formed from the insulating layer in the opposing surface toward the yoke layer. 2. The perpendicular magnetic recording head according to claim 1, wherein the upper surface of the insulating layer and the upper surface of the connection layer are flattened surfaces that are flush with each other. 3. The vertical surface according to claim 1, wherein a front end face of the main magnetic pole layer appearing on the facing surface is formed in a shape in which a width dimension in a track width direction increases from a lower surface to an upper surface. Magnetic recording head. 4. The perpendicular magnetic recording head according to claim 3, wherein both end surfaces of the front end surface are formed as inclined surfaces or curved surfaces. 5. The perpendicular magnetic recording head according to claim 1, wherein a saturation magnetic flux density of the main magnetic pole layer is higher than a saturation magnetic flux density of the yoke layer. 6. A cross-sectional area of the yoke layer at a position where the yoke layer and the main magnetic pole layer overlap with each other in a direction parallel to the opposing surface is a cross-sectional area of the main magnetic pole layer from a direction parallel to the opposing surface. 6. The perpendicular magnetic recording head according to claim 1, wherein the perpendicular magnetic recording head is larger than an area. 7. A method for manufacturing a perpendicular magnetic recording head, comprising the following steps. (A) forming an auxiliary pole layer with a magnetic material; and (b)
A connection layer is formed on the auxiliary pole layer and in a height direction rearward of the surface facing the recording medium, and then, between the facing surface and the connection layer, a coil is formed on the auxiliary pole layer via an insulating base layer. (C) shaving the surface of the insulating layer so that the upper surface of the insulating layer and the upper surface of the connecting layer are flush with each other, and (E) forming a yoke layer-shaped plating base layer on the upper surface of the insulating layer and the upper surface of the connection layer, the front end surface of which is located rearward of the opposing surface in the height direction and extends to above the connection layer;
Forming a yoke layer by plating with a magnetic material on the plating base layer, wherein a front end surface of the yoke layer is formed as a slope or a curve inclined in a height direction from a lower surface to an upper surface; Forming a plating base layer on the yoke layer, forming a resist layer on the plating base layer, and forming a punch pattern on the resist layer from the insulating layer on the facing surface to the yoke layer. And (g) forming a main magnetic pole layer by plating with a magnetic material on the plating base layer exposed in the blanking pattern, and then removing the resist layer. 8. The method of manufacturing a perpendicular magnetic recording head according to claim 7, wherein in the step (d), a plating underlayer is formed in the following steps. (H) forming a plating underlayer on the insulating layer upper surface and the connection layer upper surface, and further forming a resist layer on the plating underlayer; and (i) a front end surface is located rearward in the height direction from the opposing surface. Removing the other resist layer while leaving a yoke layer-shaped resist layer extending over the connection layer; and (j) removing the plating underlayer not covered with the resist layer. Removing. 9. The method of manufacturing a perpendicular magnetic recording head according to claim 7, wherein in the step (d), a plating underlayer is formed in the following steps. (K) forming a resist layer on the upper surface of the insulating layer and the upper surface of the connection layer, and removing a yoke layer shape in which a front end face is located rearward in the height direction from the opposing surface on the resist layer and extends up to the connection layer; Forming a pattern on the resist layer, and (l) removing the resist layer after forming a plating underlayer by sputtering in the punched pattern. 10. The resist layer according to claim 7, wherein, in the step (f), a cutout pattern is formed in the resist layer in which at least the inner width dimension in the track width direction at the opposing surface extends from the lower surface to the upper surface. A manufacturing method of the perpendicular magnetic recording head according to the above. 11. The method of manufacturing a perpendicular magnetic recording head according to claim 7, wherein in said step (g), said plating underlayer formed other than under said main magnetic pole layer is further removed.