JP2002188741A - Electropneumatic regulator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electropneumatic regulator capable of slimming in thickness and being downsized. SOLUTION: Base plate parts 30, 31, 32, 33, 34, 35 including a control circuit and a wiring on respective plate surfaces and wiring parts 36, 37, 38, 39, 40 are provided on a flexible base plate 22 bendable to a plurality of plates. The flexible base plate 22 is bent at a predetermined position to be made to a stereoscopic form and is connected to a suction solenoid valve 23, an exhaust solenoid valve 24 and a pressure sensor 27. A case 20 is fitted to a flowing passage block 21. Then, each surface of the flexible base plate 22 is disposed in a gap of the suction solenoid valve 23, the exhaust solenoid valve 24, the flowing passage block 21 and the case 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electropneumatic regulator for adjusting air pressure entering an intake port and outputting air at a set pressure from an output port.

[0002]

2. Description of the Related Art Conventionally, pneumatic equipment has been used in various industrial fields because labor saving and automation are possible at low cost. For example, air pressure can always maintain a clean environment, and is therefore used in a production line or the like for semiconductor production or the like, which does not generate dust. As such a pneumatic device, for example, there is an electropneumatic regulator disclosed in Japanese Patent Application Laid-Open No. 9-101827, which will be described as a conventional technology.

FIG. 12 is a longitudinal sectional view of an electropneumatic regulator disclosed in Japanese Patent Application Laid-Open No. 9-101827. The flow path block 101 of the conventional electropneumatic regulator 100 includes:
Channel 1 that connects intake port 102 and output port 103
The valve body 105 is provided in the inside 04. Channel block 1
A pilot chamber 107 vertically divided by a diaphragm valve element 106 is provided at a substantially central portion of the air-conditioner 01. In the pilot chamber 107, an intake port 102 and an exhaust port 108 are provided with an intake electromagnetic valve 109 and an exhaust electromagnetic Valve 11
It communicates through 0. The upper end of the stem 111 inserted into the flow path block 101 is connected to the diaphragm valve element 106. Accordingly, when the intake solenoid valve 109 and the exhaust solenoid valve 110 are driven, a pressure change occurs in the pilot chamber 107, and the diaphragm valve body 10
6 is displaced. When the stem 111 moves up and down in accordance with the amount of displacement of the diaphragm valve element 106, the valve element 10
5 opens and closes the flow path 104.

The intake solenoid valve 109 and the exhaust solenoid valve 11
0 is connected to the circuit board 112 by a connector (not shown). The circuit board 112 includes a connector 113 for inputting a set pressure signal, a pressure sensor 114 for detecting the pressure of the output port 103, and a display 115 for displaying whether or not the air pressure output from the output port 103 is the set pressure. On the other hand, they are connected by a connector (not shown). Circuit board 11
2, a control circuit for controlling the intake solenoid valve 109 and the exhaust solenoid valve 110 based on the set pressure signal while detecting the pressure of the output port 103, and various circuits such as a circuit attached thereto are mounted. I have. The case 116 covers the flow path block 1 so as to cover such a circuit board 112.
01.

In such an electropneumatic regulator 100,
Electromagnetic noise generated from other external devices is
6, the intake electromagnetic valve 109 and the exhaust electromagnetic valve 110 may generate electromagnetic noise. These electromagnetic noises may cause the circuit board 112 to malfunction. Therefore, in general, a copper plate, an aluminum plate, or the like for shielding electromagnetic noise is disposed in the case 116.

[0006]

However, in the conventional electropneumatic regulator 100, as shown in FIG. 12, the intake solenoid valve 109, the exhaust solenoid valve 110, and the case 11
6, a certain amount of space is provided in order to dispose the circuit board 112 having a large thickness, so that there is a problem that the electropneumatic regulator 100 is enlarged accordingly. In addition, the electropneumatic regulator 100 may be used alone, or may be used by integrating a plurality of them. When a plurality of electropneumatic regulators 100 are integrated, the display 115
May be provided not on the side surface of the case 116 but on the front side of the case 116 (the side surface on which the output port 103 is provided) to make it easier to check the indicator 115 of each electropneumatic regulator 100. In this case, the display 1
The circuit board for 15 may be provided separately from the circuit board 112. Therefore, in this case, it is necessary to connect the circuit board for the display 115 and the circuit board 112 with wiring or a connector in the case 116, and a space for arranging the connector or the like must be provided. However, there is a problem that the electropneumatic regulator 100 is enlarged accordingly. In addition, in the conventional electropneumatic regulator 100, when a copper plate or an aluminum plate for electromagnetic noise suppression is provided, it is necessary to support the copper plate or the aluminum plate with a support member. Therefore, the circuit board 112
In addition to the arrangement space, a space for disposing a member for preventing electromagnetic noise and a support member thereof must be separately provided in the case 116.
However, there was a problem that the size became large.

Therefore, an electropneumatic regulator according to the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide an electropneumatic regulator that can be made thinner and smaller.

[0008]

In order to achieve the above object, the invention according to claim 1 comprises a flow path block having an output port for communicating an internal flow path to the outside, and a pair of flow path blocks for opening and closing the internal flow path. A solenoid valve, a circuit board including a control circuit for controlling both solenoid valves and other accessory circuits, and a pressure sensor for detecting air pressure at an output port,
Equipped with a case for accommodating both solenoid valves, a circuit board and a pressure sensor, the whole of the flow path block and the case forms a thin box shape in the width direction, and the control circuit controls both solenoid valves based on the detected air pressure In the electro-pneumatic regulator that adjusts the air pressure discharged from the output port to a predetermined set pressure, the circuit board is configured by a flexible board that can be folded into a plurality of board surfaces, To form a control circuit, an accessory circuit, and wiring for connecting the circuits, and to arrange the bent plate surfaces in a gap between the case and the solenoid valve, the pressure sensor, and the flow path block. And characterized in that:

According to the first aspect of the present invention having the above structure, by bending the flexible substrate, each of the plate surfaces on which the control circuit, the auxiliary circuit and the wiring are formed is three-dimensionally connected to each other. Is done. Since the flexible substrate is thin, each plate surface on which each circuit is formed is also relatively thin. By fitting the case to the flow path block so as to cover this flexible substrate,
Each plate surface of the flexible substrate is disposed in a gap between the pair of solenoid valves, the pressure sensor, and the flow path block and the case. Therefore, the space for arranging the flexible substrate including each circuit is small, and there is no need to provide a connector or the like for connecting each circuit. Therefore, it is not necessary to provide a space for a connector or the like in the case.

According to a second aspect of the present invention, there is provided a flow path block having an output port for connecting an internal flow path to the outside, a pair of solenoid valves for opening and closing the internal flow path, and a control for both the solenoid valves. A circuit board including the control circuit, an electromagnetic shielding member provided for the control circuit, a pressure sensor for detecting air pressure at an output port, and both the electromagnetic valve, the circuit board, the electromagnetic shielding member, and the pressure sensor are housed. A case is provided, and the whole is formed in a thin box shape in the width direction by the flow path block and the case, and the control circuit controls both solenoid valves based on the detected air pressure to reduce the air pressure discharged from the output port. In an electropneumatic regulator that adjusts to a predetermined set pressure, at least a part of a circuit board is formed of a bendable flexible board, and an electromagnetic And configuring the electromagnetic shielding member forming a 蔽皮 film, characterized in that a to opposed electromagnetic shielding member to the control circuit by bending the flexible substrate.

According to the second aspect of the present invention having the above structure, by bending the flexible substrate, the electromagnetic shielding member formed thereon is supported in a state of being opposed to the control circuit. By fitting the case to the flow path block, the electromagnetic shielding member is disposed in the case so as to overlap the control circuit. In this state, electromagnetic noise is shielded from the control circuit. Therefore, the space for disposing the electromagnetic shielding member is small.

According to a third aspect of the present invention, there is provided a flow path block having an output port for connecting an internal flow path to the outside, a pair of solenoid valves for opening and closing the internal flow path, and a control for both the solenoid valves. A circuit board including a control circuit and other accessory circuits, an electromagnetic shielding member provided at least for the control circuit, a pressure sensor for detecting air pressure at an output port, both electromagnetic valves, a circuit board, and an electromagnetic shielding member And a case for accommodating the pressure sensor, the flow path block and the case form a box shape that is thin in the width direction, and the control circuit controls both solenoid valves based on the detected air pressure. In the electropneumatic regulator which adjusts the air pressure discharged from the air to a predetermined set pressure, the circuit board is constituted by a flexible board which can be bent to a plurality of plate surfaces. On the different plate surfaces to be bent, control circuits, other accessory circuits and wiring for connecting between these circuits are formed, and an electromagnetic shielding film is formed to form an electromagnetic shielding member, and each bent The plate surface is disposed in a gap between the electromagnetic valve, the pressure sensor, and the flow path block and the case, and the electromagnetic shielding member is disposed at least to face the control circuit by bending the plate surface. .

According to the third aspect of the present invention having the above structure, by bending the flexible substrate, the respective plate surfaces on which the control circuit, the auxiliary circuit and the wiring are formed are three-dimensionally connected to each other. At the same time, the electromagnetic shielding member is supported in a state where it is opposed to the control circuit. Since the flexible board is thin, each board surface on which each circuit and the electromagnetic shielding member are formed is also relatively thin. By fitting the case to the flow path block so as to cover the flexible substrate, each plate surface of the flexible substrate is disposed in a gap between the pair of electromagnetic valves, the pressure sensor, and the flow path block and the case. The electromagnetic shielding member is disposed in the case so as to overlap with the control circuit, and shields the control circuit from electromagnetic noise. Therefore,
The space for arranging the flexible substrate including each circuit is small, and there is no need to provide a connector or the like for connecting each circuit. Therefore, it is not necessary to provide a space for a connector or the like in the case. Further, the space for disposing the electromagnetic shielding member is reduced.

According to a fourth aspect of the present invention, in any one of the first to third aspects, an electromagnetic shielding film is formed on an inner wall of the case. According to the invention described in claim 4 having the above configuration,
In addition to the effect of the invention according to any one of claims 1 to 3, the intrusion of external noise and the leakage of internal noise are shielded by the electromagnetic shielding film formed on the inner wall of the case.

[0015]

Next, an embodiment of an electropneumatic regulator according to the present invention will be described with reference to the drawings. FIG.
1 is a perspective view of a mounting structure of a manifold 1 according to the present embodiment. The manifold 1 has a plurality of electropneumatic regulators 2
Are arranged in parallel adjacent to each other and have support rails (DIN
On the rail (3) 3, it is integrated by being held between the intake / exhaust block 4 and the end block 5. The manifold 1 is fixed on the support rail 3 by an anchor 6. The intake / exhaust block 4, the electropneumatic regulator 2, and the end block 5 are generally connected at diagonal positions by a connection hook 7 and a slide hook 8 with their side surfaces joined to each other.

FIG. 2 is an exploded perspective view of the manifold 1. A main intake port 9, a main exhaust port 10, a connector 11, and a power supply connector 16 are provided on the front surface of the intake / exhaust block 4. On the side surfaces of the intake / exhaust block 4 and the electropneumatic regulator 2, a centralized intake passage 12 communicating with the main intake port 9 and a centralized exhaust passage 13 communicated with the main exhaust port 10 are provided. The centralized intake passage 12 and the centralized exhaust passage 13 are connected to each other by tubes 14 and 15, so that the air sucked into the electropneumatic regulator 2 flows and the air exhausted by the electropneumatic regulator 2 flows. A channel is formed.

FIG. 3 shows a case 20 of the electropneumatic regulator 2.
FIG. 4 is a perspective view of a state in which is removed from the flow path block 21, and FIG. As shown in FIGS. 3 and 4, the electropneumatic regulator 2 is configured by fitting a case 20 to a flow path block 21, and a flexible substrate 22 includes an intake electromagnetic valve 23, an exhaust electromagnetic valve 24, It is arranged in a gap between the road block 21 and the case 20.

The flow path block 21 is roughly divided into a strip-shaped lid surface section 21a for closing an opening of the case 20, and a flow path section 21b in which a flow path is formed and to which a fluid device and a control device are attached. I have. An output port 25 and an LED 26 are provided on the cover surface 21a.

On the other hand, the flow path portion 21b of the flow path block 21
Is formed in a step shape, and by attaching the intake solenoid valve 23 and the exhaust solenoid valve 24 sideways to the step,
The centralized intake passage 12 is connected to an output port 25 via an intake electromagnetic valve 23 and the exhaust passage 13 via an exhaust electromagnetic 24.
Up to the flow path. Thereby, both the height direction and the depth direction are compact, and there is no extra space between the flexible substrate 22 and the flexible substrate 22. As shown in FIG. 4, a flow passage communicating from the centralized intake flow passage 12 to the output port 25 via the intake electromagnetic valve 23 is formed in the flow passage portion 21b. A flow path up to the pressure sensor 27 and a flow path communicating with the centralized exhaust flow path 13 via the exhaust electromagnetic valve 24 are branched and formed. Inlet solenoid valve 23, exhaust solenoid valve 24
The flexible substrate 22 is connected to the pressure sensor 27.

FIG. 5 is an exploded view of the flexible substrate 22, FIG. 6 is a perspective view of the flexible substrate 22 in a bent state, FIG. 7 is a top view of FIG.
FIG. 7 is a rear view of FIG. 6. As shown in FIG. 5, the flexible substrate 22 cuts a flexible insulating film (for example, a polyimide plastic film or the like) into a predetermined shape, and folds the insulating film into a plurality of plate surfaces.
A conductor pattern is formed on each plate surface. In the present embodiment, it can be bent into 15 plate surfaces, and one surface of each plate surface (hereinafter referred to as “front surface”) has a pair of main substrate portions 30, 31. Sensor board part 32, bulb board parts 33 and 34, LED board part 3
5 are connected to the wiring portions 36, 37, 38, 39, 40, and the electromagnetic shielding members 41, 4 are provided.
2, 43 and 44 are provided in a state where they are connected to the pair of main board sections 30 and 31 and the valve board sections 33 and 34.

Here, a control circuit and the like for controlling the intake electromagnetic valve 23 and the exhaust electromagnetic valve 24 are formed on the main board portions 30 and 31 on the plate surface. Sensor board 3
Reference numeral 2 denotes a circuit for outputting a discharge pressure signal detected by the pressure sensor 27 (corresponding to “another accessory circuit” in the claims) and the like formed on a plate surface. The valve board portions 33 and 34 include the intake solenoid valve 23 and the exhaust solenoid valve 2.
A circuit (corresponding to “another accessory circuit” in the claims) for supplying a voltage of a predetermined pressure to the circuit board 4 is formed on the plate surface. The LED board unit 35 is connected to the output port 25.
A circuit (corresponding to “another accessory circuit” in the claims) and the like for displaying on the LED 26 whether or not the air pressure discharged from the LED is the set pressure are formed on the plate surface. Wiring part 3
In 6, 37, 38, 39, and 40, wirings for transmitting and receiving signals between the board portions to be connected are formed on the plate surface.
The electromagnetic shielding members 41, 42, 43, and 44 each have a copper foil formed on a plate surface as an electromagnetic shielding film that shields electromagnetic noise.

The flexible substrate 22 is a thin one, and each of the substrate portions 30, 31, 32, 33, 34, 35
Are provided with a thickness of about 1 mm on the plate surface of the flexible substrate 22, and the wiring portions 36, 37, 38, 39, 40 and the electromagnetic shielding members 41, 42, 43, 44 are provided on the plate surface of the flexible substrate 22. It is provided on top with a thickness of about 0.3 mm. Therefore, each plate surface is relatively thin.

The flexible board 22 is bent at a predetermined position so that each of the board sections 30, 31, 32, 33, 34, 35 has a wiring section 36, as shown in FIG.
While being three-dimensionally connected with 37, 38, 39, 40, the electromagnetic shielding members 41, 42, 43, 44
The main board sections 30 and 31 and the valve board sections 33 and 34 are arranged to face each other.

That is, as shown in FIGS. 5 to 8, the wiring section 36 and the pair of main board sections are arranged such that the pair of main board sections 30 and 31, the wiring sections 36 and 37 and the sensor board section 32 face outward. The connection parts A and B to the connection parts 30 and 31 and the connection parts C and D to the wiring part 37 and the main board part 31 and the sensor board part 32 are bent. Then, the wiring portion 38 is moved so that the valve substrate portion 33
And the connection portions E and F between the sensor substrate portion 32 and the valve substrate portion 33 are bent, and the electromagnetic shield member 43 is turned down to the back side of the valve substrate portion 33 so that the valve substrate portion 3
3 and the connecting portion G of the electromagnetic shielding member 43 is bent. Similarly, by bending the connection portions H, I, and J, the valve substrate portion 34 is bent toward the front surface of the sensor substrate portion 32 via the wiring portion 39, and the electromagnetic shielding member 4 is bent.
4 is folded on the valve substrate section 34. The wiring section 40
And the connecting portion K between the wiring portion 36 and the wiring portion 40 and the wiring portion 4 so that the LED board portion 35 is turned down to the back side of the wiring portion 36.
0 and the connection portion L of the LED board unit 35 are bent. Further, the electromagnetic shielding members 41 and 42 are attached to the main board units 30 and 31.
Electromagnetic shielding members 41, 4 so that
The connecting portions M and N between the 2 and the main board portions 30 and 31 are bent.

As a result, the pair of main board parts 30, 3
As shown in FIG. 6, a pair of main board parts 30 and 31 are opposed to each other, and the wiring parts 36 and 37 and the sensor board part 32 are opposed to each other. Take shape. Valve substrate part 33, valve substrate part 3
4 and the wiring portion 40 project in the same direction as shown in FIGS. 6 and 7, and the LED substrate portion 35 is bent downward. Then, the electromagnetic shielding members 41, 42, 43, 44
Are the main board parts 30, 3 as shown in FIG. 6 and FIG.
1 and the valve substrate portions 33 and 34.

The three-dimensional flexible board 22 has a sensor board 32 connected to the pressure sensor 27, a valve board 33 connected to the intake solenoid valve 23, and a valve board 34.
By connecting to the exhaust solenoid valve 24, it is attached to the fluid block 21.

The intake solenoid valve 23, the exhaust solenoid valve 24, and the flexible board 22 thus attached to the flow path block 21 are accommodated in the covered case 20, and the lid 21a of the flow path block 21 is closed. The case 20 is fitted so as to close the opening. Thereafter, screws are fastened to the flow path block 21 through the case 20 from the outside, so that the case 20 is integrated with the flow path block 21 so as not to come off, and the electropneumatic regulator 2 is assembled. At this time, the main board parts 30 and 31 of the flexible board 22, the wiring parts 36 and 37, the sensor board part 32 and the electromagnetic shielding members 41 and 42 are formed by the gap between the intake electromagnetic valve 23 and the exhaust electromagnetic valve 24 and the case 20. Placed in Further, the valve substrate portions 33 and 34, the electromagnetic shielding members 43 and 44
The wiring portions 38, 39, 40 are arranged in the gap between the case 20 and the intake electromagnetic valve 23 and the exhaust electromagnetic valve 24.
The LED board 35 is provided on the lid surface 21 a of the flow path block 21.
, And is disposed in the gap between the intake solenoid valve 23 and the flow path block 21 and the case 20.

Here, the inner wall of the case 20 is shielded by an electromagnetic shielding film 45 in order to prevent leakage of electromagnetic noise and intrusion of electromagnetic noise. Electromagnetic shielding film 45
Is formed to a thickness of about 20 μm by plating using copper plating and nickel plating, plating using electroless copper plating and electroless nickel plating, or plating using electroless nickel plating and phosphorus alloy plating.

Next, the electrical configuration of the electropneumatic regulator 2 will be described. FIG. 9 is a block diagram of the electropneumatic regulator 2. When the set pressure signal is supplied to the connector 11, the set pressure signal is input to the main board units 30 and 31 via a control board (not shown) inside the intake / exhaust block 4 to operate the electropneumatic regulator 2.

When a set pressure signal is output from a control device (not shown), the main board portions 30 and 31 move from the connector 11 to a control board (not shown) inside the intake / exhaust block 4.
The set pressure signal is input via. The sensor board unit 32 outputs the pressure of the output port 25 detected by the pressure sensor 27 to the main board units 30 and 31 as a discharge pressure signal. The main board sections 30 and 31 create control signals for controlling the opening and closing of the intake solenoid valve 23 and the exhaust solenoid valve 24 based on the difference signal between the set pressure signal and the discharge pressure signal, and send the control signals to the valve board. Output to the units 33 and 34. The valve substrates 33 and 34 supply predetermined signals to the intake solenoid valve 23 and the exhaust solenoid valve 24 according to the control signal.
The intake solenoid valve 23 and the exhaust solenoid valve 24 are driven so that a pressure proportional to the input signal is applied. Thereby, the pressure of the air discharged from the output port 25 is adjusted to the set pressure.

Further, the main board sections 30 and 31 determine whether or not the discharge pressure of the air discharged from the output port 25 is the set pressure based on the difference signal, and output the determination result to the LED board section 35. . The LED 26 emits a green signal when the discharge pressure is at the set pressure, and emits a red signal when the discharge pressure is not at the set pressure. Further, the main board units 30, 31
Processes the discharge pressure signal input from the sensor substrate unit 32, and outputs a monitor display signal for displaying the discharge pressure on the monitor to the monitor control device 50.

Here, inside the case 20, electromagnetic noise is generated by driving the intake solenoid valve 23 and the exhaust solenoid valve 24. On the other hand, outside the case 20, other devices and the like generate electromagnetic noise. However, the flexible board 22 includes an electromagnetic shielding member 41, which is disposed opposite to the main board sections 30, 31 and the valve board sections 33, 34.
These electromagnetic noises are shielded by 42, 43, 44 and an electromagnetic shielding film 45 provided in the case 20.

According to the electropneumatic regulator 2 of the present embodiment described above, as shown in FIG. 5, the board portions 30, 31, 32, 33, 34,
By providing 35 or the wiring portions 36, 37, 38, 39, and 40, the electric circuit, the wiring, and the like were dispersed on each plate surface.
As shown in FIGS. 6 to 8, the flexible substrate 22 is bent to be three-dimensional, and as shown in FIG. 4, the sensor substrate 32 is connected to the pressure sensor 27 and the valve substrates 33 and 34 By being connected to the intake electromagnetic valve 23 and the exhaust electromagnetic valve 24, it is attached to the flow path block 21 and housed in the case 20. Since the flexible board 22 is thin, the board sections 30, 31, 3
2, 33, 34, 35 and electromagnetic shielding members 41, 42, 4
The plate surface provided with 3, 44 becomes relatively thin. Therefore, by bending the flexible board 22, the main board sections 30, 31 and the electromagnetic shielding members 41, 42 face each other and overlap, and the valve board sections 33, 34, the electromagnetic shielding members 43, 44, and the wiring sections 38, 39. , 40 are opposed to each other and have a small thickness, and the respective plate surfaces of the flexible substrate 22 can be arranged in the gaps between the intake solenoid valve 23, the exhaust solenoid valve 24, and the flow path block 21 and the case 20. . Therefore, the space for arranging the flexible substrate 22 including each circuit can be reduced, and the electropneumatic regulator 2 can be made thinner and smaller.

The electropneumatic regulator 2 of the present embodiment
According to FIG. 5, as shown in FIG. 5 and FIG.
31, 32, 33, 34, 35 are wiring portions 36, 37, 3
Since they are interconnected by 8, 39 and 40, there is no need to connect the boards with a connector. Therefore, it is not necessary to provide a space for providing a connector in the case 20, so that the electropneumatic regulator 2 is thinned by that much,
The size can be reduced.

The electropneumatic regulator 2 of the present embodiment
According to FIG. 5, as shown in FIG.
2, 43, and 44 were provided on the plate surface of the flexible substrate 22, and the flexible substrate 22 itself was used as a noise suppression member. Therefore, as shown in FIGS. 6 and 8, the electromagnetic shielding members 41 and 42 are supported in a state where they are opposed to the main board portions 30 and 31 by bending the connection portions M and N, and the electromagnetic shielding members 43 and 42 are 44 is supported in a state where the connection portions G and J are bent so as to face the valve substrate portions 33 and 34. Therefore,
Since there is no need to provide a support member for supporting the electromagnetic shielding members 41, 42, 43, and 44 and a noise suppression member such as a copper plate or an aluminum plate separately from the flexible substrate 22, the electropneumatic regulator 2 is reduced in thickness and size. can do.

The electropneumatic regulator 2 of the present embodiment
According to FIG. 9, as shown in FIG. 9, the main board parts 30, 31 and the valve board parts 33, 34 of the flexible board 22
The electromagnetic noise is shielded by the electromagnetic shielding members 41, 42, 43, 44. In addition, the electromagnetic shielding film 45 formed in the case 20 prevents electromagnetic noise from entering from outside, and also prevents the electromagnetic noise generated by the intake electromagnetic valve 23 and the like from leaking to the outside. Therefore, the flexible substrate 22 functions without being affected by the electromagnetic noise. Therefore, the reliability of the control of the electropneumatic regulator 2 is improved.

Further, the electropneumatic regulator 2 of the present embodiment
According to this, since the electropneumatic regulator 2 is thin and small, as shown in FIG. 1, even if a plurality of electropneumatic regulators 2 are integrated, the manifold 1 becomes small. Even if the electropneumatic regulators 2 are thus made into manifolds, the electromagnetic shielding films 45 of the electropneumatic regulators 2 prevent leakage of noise and the like generated by driving the intake electromagnetic valve 23 and the exhaust electromagnetic valve 24. Therefore, the reliability of control of the manifold 1 can be ensured.

The present embodiment is merely an example, and does not limit the present invention in any way. Therefore, the present invention can of course be subjected to various modifications and improvements without departing from the gist thereof. That is, for example, in the above-described embodiment, the main board unit 31 and the sensor board unit 32 are connected by the wiring unit 37. However, as shown in FIG. 47 may be used. Further, as shown in FIG. 11, the projections 48 and the depressions 49 formed on the main board 31 and the sensor board 32 may be fitted and soldered. With such a configuration, the base material of the flexible substrate 22 can be used without waste.

Further, for example, in the above embodiment, the electropneumatic regulator 2 is integrated and used, but it may be used alone. In this case, an intake port, an exhaust port, and a connector may be provided on the front surface where the output port 25 is provided. This is because the wiring and piping extend only in one direction of the main body, and the installation space for the electropneumatic regulator 2 can be reduced.

For example, in the above embodiment, the electromagnetic shielding members 41, 42, 43,
44, the electromagnetic shielding members 41, 42, 43, 44
Can be omitted.

For example, in the above embodiment, the entire circuit board is the flexible board 22, and the electromagnetic shielding members 41, 42, 43,
44 were provided. However, only a part of the circuit board may be formed as the bendable flexible board 22, and the electromagnetic shielding members 41, 42, 43, and 44 may be provided on the bendable plate surface.

Further, for example, in the above embodiment, a circuit or the like is provided on one surface of the insulating film, but a circuit or the like may be provided on both surfaces. Further, in the above-described embodiment, fifteen plate surfaces are provided on the flexible substrate 22, but the present invention is not limited to this.

Further, in the above embodiment, the substrate 30,
31, 32, 33, 34, and 35 are flexible substrates 2
2 having a thickness of about 1 mm,
6, 37, 38, 39, 40 and electromagnetic shielding members 41, 4
The reference numerals 2, 43, and 44 are provided on the surface of the flexible substrate 22 with a thickness of about 0.3 mm, but are not limited thereto. Also, the electromagnetic shielding members 41, 42, 43,
44 is not limited to a copper foil, and a conductive material may be used.

[0044]

As described in detail above, according to the first aspect of the present invention, the space for disposing the flexible substrate can be reduced, so that the electropneumatic regulator can be made thinner and smaller. it can.

According to the second aspect of the present invention,
Since the space for disposing the flexible substrate and the electromagnetic shielding member can be reduced, the electropneumatic regulator can be made thinner and smaller.

According to the third aspect of the present invention, the space for disposing the flexible substrate and the electromagnetic shielding member can be reduced, so that the electropneumatic regulator can be made thinner and smaller.

According to the invention described in claim 4, in addition to the effect of the invention described in any one of claims 1 to 3, malfunction of each circuit including the control circuit can be prevented.
The reliability of the control of the electropneumatic regulator can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a manifold mounting structure according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of the manifold.

FIG. 3 is a perspective view showing a state where the electropneumatic regulator is disassembled into a flow path block and a case.

FIG. 4 is a vertical sectional view of the electropneumatic regulator.

FIG. 5 is a development view of the circuit board.

FIG. 6 is a perspective view showing a state where the circuit board is bent.

FIG. 7 is also a top view of FIG.

8 is a rear view of FIG. 6;

FIG. 9 is also a block diagram of an electropneumatic regulator.

FIG. 10 is a development view of a circuit board according to another embodiment of the present invention.

FIG. 11 is a development view of a circuit board according to another embodiment of the present invention.

FIG. 12 is a longitudinal sectional view of a conventional electropneumatic regulator.

[Explanation of symbols]

 2 Electro-pneumatic regulator 20 Case 21 Flow path block 22 Flexible board 23 Intake solenoid valve 24 Exhaust solenoid valve 25 Output port 27 Pressure sensor 41, 42, 43, 44 Electromagnetic shielding member 45 Electromagnetic shielding film

Continued on the front page (72) Inventor Haruhiro Matsunaga 850 Horinouchi-cho, Kasugai-shi, Aichi F-term (reference) 3K051 BB10 CC01 3H106 EE34 GB04 GC26

Claims (4)

[Claims] 1. A flow path block having an output port for communicating an internal flow path to the outside, a pair of solenoid valves for opening and closing the internal flow path, a control circuit for controlling the two electromagnetic valves, and other accessories. A circuit board including a circuit, a pressure sensor for detecting air pressure at the output port, and a case accommodating the two solenoid valves, the circuit board and the pressure sensor, and the flow path block and the case The whole is formed in a thin box shape in the width direction, and the control circuit controls the two solenoid valves based on the detected air pressure to adjust the air pressure discharged from the output port to a predetermined set pressure. In the empty regulator, the circuit board is formed of a flexible board that can be bent into a plurality of board surfaces; Forming a wiring for connecting the control circuit, the auxiliary circuit, and each of the circuits; and forming a gap between the two solenoid valves, the pressure sensor, and the flow path block and the case with the bent plate surfaces. An electro-pneumatic regulator characterized by comprising: 2. A circuit board including a flow path block having an output port for communicating an internal flow path to the outside, a pair of solenoid valves for opening and closing the internal flow path, and a control circuit for controlling the two solenoid valves. An electromagnetic shielding member provided for the control circuit; a pressure sensor for detecting air pressure at the output port; and a case accommodating the electromagnetic valves, the circuit board, the electromagnetic shielding member, and the pressure sensor. The flow path block and the case are formed in a thin box shape in the width direction as a whole, and the control circuit controls both the solenoid valves based on the detected air pressure. An electro-pneumatic regulator for adjusting the pressure of the discharged air to a predetermined set pressure, wherein at least a part of the circuit board is formed of a flexible board that can be bent. And forming an electromagnetic shielding film on the bendable plate surface to constitute the electromagnetic shielding member; and bending the flexible substrate to dispose the electromagnetic shielding member to face the control circuit. An electropneumatic regulator characterized by the following: 3. A flow path block having an output port for connecting an internal flow path to the outside, a pair of solenoid valves for opening and closing the internal flow path, a control circuit for controlling the two solenoid valves, and other accessories. A circuit board including a circuit, an electromagnetic shielding member provided at least for the control circuit, a pressure sensor for detecting air pressure at the output port, the two electromagnetic valves, the circuit board, the electromagnetic shielding member, and the A case accommodating a pressure sensor, wherein the whole of the flow path block and the case forms a thin box shape in the width direction, and the control circuit controls the two solenoid valves based on the detected air pressure. A pneumatic regulator that adjusts air pressure discharged from the output port to a predetermined set pressure, wherein the circuit board can be bent to a plurality of plate surfaces. A control circuit, other accessory circuits and wiring for connecting between the circuits, and an electromagnetic shielding film formed on the different plate surface to be bent, and the electromagnetic shielding film Configuring a member, and disposing each of the bent plate surfaces in a gap between the two solenoid valves, the pressure sensor and the flow path block and the case, and bending the plate surface to form the electromagnetic shielding member. At least facing the control circuit. 4. The electropneumatic regulator according to claim 1, wherein an electromagnetic shielding film is formed on an inner wall of the case.