JP2002184206A - Lighting fixture, uniform lighting fixture, projection device using these, aligner and laser processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical system and an optical device using this for uniformly irradiating light emitted from a plurality of light sources realizing a compact constitution to radiate at the minimum angle of incidence. SOLUTION: In a laser array 11, laser emission parts 11a, 11b, 11c... are straightly arranged at an equal pitch and an outgoing light B1 is made a parallel luminous flux (luminous flux B2) regarding at least one direction by a cylindrical lens array 12. For example, in one embodiment of Fig. 1, the outgoing light B1 is made parallel in a direction parallel to the paper surface. The outgoing luminous flux B3 is converged to an incident side edge surface 14a of a kaleidoscope 14. A distribution of an in-plane strength of the luminous flux is uniformized in the kaleidoscope 14 and is radiated to a part 16 to be irradiated by a relay lens 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illumination optical device, an illumination optical system, and a projection device, an exposure device, and a laser processing device using the same, and more specifically, to a plurality of light emitting means using laser array light or the like. As a light source, a device applicable to an optical system that uniformly illuminates the light source with the light source light,
The present invention relates to a technology applicable to a projection device (projector), a stepper (exposure device), and the like.

[0002]

2. Description of the Related Art An optical system for uniformly illuminating an irradiated portion to be irradiated is suitable for, for example, a light-bulb type projection device using a liquid crystal display element, a stepper used for manufacturing semiconductors, and the like. In addition, there is a demand for an optical system that can be applied to various uses and has a high precision, a compact configuration, and a simple configuration. Further, for example, in the above-described light valve type projection device, the illumination optical system is set so that the maximum incident angle with respect to the light valve is as small as possible (that is, the light is incident on the surface of the light valve as perpendicularly as possible). It is desired to be done.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above situation, and uses a light emitting unit having a plurality of light sources realizing a compact structure, and irradiates light emitted from the plurality of light sources. An object of the present invention is to provide an illumination device for irradiating a surface uniformly and with a minimum incident angle to a surface to be irradiated, and a projection device, an exposure device, and a laser processing machine using the same.

[0004]

According to a first aspect of the present invention, there is provided a light-emitting means having a plurality of light-emitting portions, and each of the diffused light emitted from each of the light-emitting portions being formed on a plane orthogonal to the optical axis of the diffused light. Characterized by having parallel light converting means for making parallel light in at least one same direction and light collecting means for collecting a plurality of light fluxes emitted from the parallel light means in a predetermined light collecting range. It is.

[0005] The invention of claim 2 is characterized in that, in the invention of claim 1, the parallel light conversion means is constituted by lenses attached to respective light emitting portions of the light emitting means.

A third aspect of the present invention is characterized in that, in the first or second aspect of the invention, the light emitting means includes a laser light emitting section for emitting a laser beam.

According to a fourth aspect of the present invention, in the first aspect of the present invention, the light emitting means is configured such that the plurality of light emitting portions are arranged in an array in one direction, and the parallel light emitting means is provided. Is characterized in that light emitted from the plurality of light emitting units is made parallel to light in a direction coinciding with the array arrangement direction.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, a cylindrical lens array is used as the collimating means, and an array pitch of each of the cylindrical lens units constituting the cylindrical lens array is equal to the array of the light emitting units. It is characterized by being equal to the pitch.

According to a sixth aspect of the present invention, in the fifth aspect, the cylindrical lens array is provided with at least two lenses.
It is characterized by having at least one.

According to a seventh aspect of the present invention, in the fourth aspect of the present invention, a lenticular lens is used as the parallelizing means, and an array pitch of each microlens constituting the lenticular lens is equal to an array pitch of the light emitting section. It is characterized by being.

According to an eighth aspect of the present invention, in the seventh aspect of the invention, at least two or more lenticular lenses are provided.

According to a ninth aspect of the present invention, there is provided the illuminating device according to any one of the first to eighth aspects, and illumination light emitted from the illuminating device is received, and light in a plane orthogonal to the optical axis of the received light is provided. And an intensity distribution equalizing means for equalizing the intensity distribution, wherein light emitted from the intensity distribution equalizing means is controlled to illuminate an illumination target.

According to a tenth aspect, in the ninth aspect, a kaleidoscope is used as the intensity distribution uniforming means.

According to an eleventh aspect, in the ninth aspect, a homogenizer is used as the intensity distribution uniforming means.

In a twelfth aspect of the present invention, in the ninth aspect, a fly-eye lens is used as the intensity distribution uniforming means.

According to a thirteenth aspect of the present invention, there is provided a laser array having a plurality of laser light emitting units arranged in an array, and a cylindrical lens in an array arrangement direction of the laser arrays and having an array pitch equal to the array pitch of the laser light emitting units. , An array of cylindrical lenses, a kaleidoscope for uniformizing the intensity distribution of the luminous flux emitted from the cylindrical lens, and illuminating the illumination target by controlling the optical path of the light emitted from the kaleidoscope A cylindrical lens array, wherein the cylindrical lens array acts on diffused light emitted from each of the laser light emitting units, and emitted light emitted from the cylindrical lens array is directed in the array direction of the cylindrical lens. It is characterized in that it is configured to be parallel light.

According to a fourteenth aspect of the present invention, there is provided a laser array in which a plurality of laser light emitting units are arranged in an array, and a micro lens in an array arrangement direction of the laser array and an array pitch equal to the array pitch of the laser light emitting units. Are arranged in an array, a kaleidoscope for equalizing the intensity distribution of the luminous flux emitted from the lenticular lens, and an optical path of light emitted from the kaleidoscope is controlled to illuminate the illumination target. An illumination optical device having a relay lens, wherein the lenticular lens acts on diffused light emitted from each of the laser light emitting units, so that emitted light emitted from the lenticular lens is parallel to light in the array direction of the lenticular lens. It is characterized by being constituted so that it may become.

According to a fifteenth aspect of the present invention, there is provided a laser array having a plurality of laser light emitting units arranged in an array, and a cylindrical lens in an array arrangement direction of the laser arrays and having an array pitch equal to the array pitch of the laser light emitting units. Are arranged in an array, a homogenizer for equalizing the intensity distribution of a light beam emitted from the cylindrical lens array, and a relay for controlling an optical path of light emitted from the homogenizer to illuminate an illumination target. An illumination optical device having a lens, wherein the cylindrical lens array acts on diffused light emitted from each of the laser light emitting units, and emitted light emitted from the cylindrical lens array is parallel to an array direction of the cylindrical lens array. It is characterized by being configured to be light .

A sixteenth aspect of the present invention provides a laser array having a plurality of laser light emitting units arranged in an array, and a microlens in an array arrangement direction of the laser arrays and having an array pitch equal to the array pitch of the laser light emitting units. A lenticular lens in which an array is arranged, a homogenizer for equalizing the intensity distribution of a light beam emitted from the lenticular lens, and a relay lens for controlling an optical path of light emitted from the homogenizer and illuminating an illumination target. An illumination optical device having the lenticular lens,
The lenticular lens is configured to act on the diffused light emitted from each of the laser light emitting units so that the emitted light emitted from the lenticular lens becomes parallel light in the array direction of the lenticular lens.

A seventeenth aspect of the present invention provides a laser array having a plurality of laser light emitting units arranged in an array, and a cylindrical lens in an array arrangement direction of the laser arrays and having an array pitch equal to the array pitch of the laser light emitting units. , A fly-eye lens for equalizing the intensity distribution of a light beam emitted from the cylindrical lens array, and illumination optics for illuminating an illumination target with light emitted from the fly-eye lens The apparatus, wherein the cylindrical lens array acts on diffused light emitted from each of the laser light emitting units,
The light emitted from the cylindrical lens array is configured to be parallel to the array direction of the cylindrical lens array.

The invention of claim 18 provides a laser array in which a plurality of laser light emitting units are arranged in an array, and a micro lens having an array pitch in the array direction of the laser array and equal to the array pitch of the laser light emitting units. Are arranged in an array, a fly-eye lens for equalizing the intensity distribution of a light beam emitted from the lenticular lens, and an optical path of light emitted from the fly-eye lens is controlled to illuminate an illumination target. In the illumination optical device, the lenticular lens is configured to act on diffused light emitted from each of the laser light emitting units, so that emitted light emitted from the lenticular lens becomes parallel light in an array direction of the lenticular lens. It is characterized by having.

The invention of claim 19 is the invention of claims 13, 15,
The invention according to any one of the seventeenth aspects, wherein at least two or more of the cylindrical lens arrays are provided.

[0023] The twentieth aspect of the present invention provides the fourteenth aspect,
The invention according to any one of the eighteenth aspects, wherein at least two or more of the lenticular lens arrays are provided.

The invention of claim 21 is the invention of claims 9 to 20
And a light valve illuminated by the uniform illumination device, and a projection lens for projecting light emitted from the light valve.

According to a twenty-second aspect of the present invention, in any one of the ninth to twentieth aspects, a laser array is used as the light emitting means.
, A reticle, and a projection lens.

According to a twenty-third aspect of the present invention, any one of the ninth to twentieth aspects uses a laser array as the light emitting means.
And a condensing lens.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, essential components of the present invention will be described below with reference to the drawings. The configuration of the embodiment will be specifically described later with reference to the drawings again individually. The lighting device of the present invention includes a plurality of light emitting units 11a, 11
b, 11c, and the light emitting unit 11
a, 11b, and 11c, each of the diffused lights emitted from each of the parallel lights is converted into parallel light in at least one same direction on a plane orthogonal to the optical axis of the diffused light.
2 and a condensing means 13 ((31, 3) for converging a plurality of light fluxes emitted from the parallel light converting means 12 into a predetermined condensing range.
2, 33), (41), and (51)). Also,
In the above-described lighting device, the parallel light conversion means 12
As shown in the figure, the light emitting means may be constituted by a lens 12a attached to each light emitting portion 11a of the light emitting means. The light emitting means 11 can be constituted by laser light emitting units 11a, 11b, 11c that emit laser light.

The light emitting means includes a plurality of light emitting units 11.
a, 11b, 11c are arranged in an array in one direction, and the parallel light converting means 12 is configured to convert the light emitted from the plurality of light emitting units into parallel light in a direction coinciding with the array arrangement direction. Is done. In addition, the parallel light converting means 1
A cylindrical lens array is used as 2, and the array pitch of each of the cylindrical lens units constituting the cylindrical lens array is equal to the array pitch of the light emitting unit. Also, this cylindrical lens array,
At least two or more may be provided.

A lenticular lens is used as the collimating means 11, and the array pitch of each micro lens constituting the lenticular lens is made equal to the array pitch of the light emitting section. Further, at least two or more lenticular lenses may be provided.

A uniform illuminating device according to the present invention receives the illuminating light emitted from the illuminating device as described above, and makes the light intensity distribution in a plane orthogonal to the optical axis of the received light uniform. Intensity distribution uniforming means 14 ((4
2, 43), (52, 53)), and controls the light emitted from the intensity distribution uniforming means 14 to illuminate the illumination target.

(Embodiment 1) FIGS. 1 and 2 are views for explaining a first embodiment of the present invention. FIG. 1 shows a schematic top view of an illumination optical system, and FIG. FIGS. 1 and 2 show a laser array, 12 a cylindrical lens array, and 13
Is a condenser lens, 14 is a kaleidoscope, 15 is a relay lens, and 16 is an irradiated part. Laser array 1
The laser light emitting portions 11a, 11b, 11c,... Are linearly arranged at an equal pitch. Each emitted light B1 from each laser light emitting unit is emitted as diffused light. The emitted light B1 is converted into a parallel light flux in one direction by the cylindrical lens array 12. In the example of FIG. 1, the cylindrical lens array 12 emits the incident light beam as a light beam B2 that is collimated in a direction parallel to the paper surface. In this case, the parallel light beams B2 need not be strictly parallel. It is only necessary that adjacent light fluxes do not intersect with a large angle difference in the next condenser lens 13. That is, even if the emitted light beams B2 overlap to some extent, there is no problem if the angle difference is small.

Then, the light beam B3 emitted from the condenser lens 13 is transmitted to the incident side end face 1 of the kaleidoscope 14.
4a. The light beam traveling in the kaleidoscope 14 is reflected multiple times in the kaleidoscope 14,
At the emission end face 14b, the distribution of the in-plane intensity of the light beam is made uniform. The light beam having the uniformed intensity distribution is irradiated on the irradiated portion 16 by the relay lens 15.

The cylindrical lens array 12 may be replaced by a so-called lenticular lens. The cylindrical lens array 12 is a lens array having an array pitch substantially equal to the array pitch of the laser array 11, and may have a lens power in the laser array direction. Also when a lenticular lens is used, the microlens array pitch is set to be equal to the array pitch of the laser array 11 so as to operate similarly. By placing the cylindrical lens array 12 (or lenticular lens) on the optical path immediately after the laser array 11, for example, the lens array (2) in which the cylindrical lens array 11 is linearly arranged.
Fig. 1
As a result, the installation allowable range in the thickness direction of the paper is increased. That is, only the fine adjustment in the vertical direction in FIG.

The use of the cylindrical lens array (or lenticular lens) 12 makes it possible to
The fact that the maximum angle of incidence on 6 can be reduced will be described using the results of ray tracing calculations. 3A and 3B are diagrams for explaining the effect of the illumination optical system using the lenticular lens. FIG. 3A is a schematic configuration of the illumination optical system, and FIG. 3 is an enlarged view of a portion B in FIG. This is shown in FIG.

In the configuration shown in FIG. 3, a laser array including the light sources 11a and 11c is actually arranged as shown in FIG. 1, but the entire laser array 11 is illustrated in order to explain a characteristic optical path. Is omitted. That is, the illustrated light source 11a is located at the end of the laser array, the light source 11n is located at the center of the laser array 11, and the other light sources forming the laser array are not shown. Immediately after the laser light source 11a, a cylindrical lens array (or lenticular lens) 12 is arranged. In FIG. 3B, reference numeral 12a denotes one lens unit (cylindrical lens) constituting the cylindrical lens array 12, which is arrayed in the y direction similarly to the light sources 11a to 11n.

The light source array pitch of the laser array 11 and the array pitch of each lens of the cylindrical lens array 12 (or the array pitch of the microlenses of the lenticular lens) are the same, and in FIG.
Only one micro lens 12a constituting a lenticular portion (lenticular lens) corresponding to 1a is shown. In the lenticular lens 12, light emitted from each laser array is collimated in a direction parallel to the plane of the drawing.
In the lenticular lens 12, the emitted light is not completely collimated due to the spherical aberration of the lens, but a sufficient effect can be obtained with a certain amount of parallel light flux. The beam B2, which has been converted into a parallel light beam, is transmitted to the cylindrical lenses 21, 22, 23.
And reaches the incident side end face 14a of the kaleidoscope 14. In this case, the maximum incident angle on the incident side end face 14a is 12 °.

The cylindrical lens 21 functions to deflect the laser array light to the incident side end face 14 a of the kaleidoscope 14. Cylindrical lens 22, 2
Reference numeral 3 serves to converge the divergent beam in the thickness direction of the laser array (the thickness direction in the drawing) to the incident side end face 14a.

(Comparative Example) FIG. 4 is a diagram for explaining the operation of the optical system when the lenticular lens 12 is not provided in the configuration of FIG. FIG. 4 shows a light source 11 located at the end of the laser array in the optical system of FIG.
The light beam when the cylindrical lens array 12 immediately after a is deleted is shown. Divergent light B1 from light source 11a
Numeral 1 passes through the cylindrical lenses 21, 22, 23 and irradiates the incident side end face 14a of the kaleidoscope 14 at a maximum incident angle of 16 °. The light emitted from the exit side end face (not shown) of the kaleidoscope 14 is emitted at a maximum angle of 16 ° because the incident angle is maintained. Further, comparing FIG. 4 with FIG. 3, it is possible to make the caliber scope 14 smaller in diameter when the cylindrical lens array 12 is used. For a kaleidoscope with the same number of reflections, the smaller the caliber, the shorter the total length. Therefore, the illumination optical system can be made smaller by using a cylindrical lens array (or lenticular lens).

(Embodiment 2) FIGS. 5 and 6 are diagrams for explaining a second embodiment of the present invention. FIG. 5 shows a schematic top view of an illumination optical system, and FIG. The illumination optical system includes a lens array 11,
Cylindrical lens array 12, Callide scope 1
4, relay lens 15, cylindrical lenses 31, 3
Reference numeral 16 denotes an irradiated portion. Note that, similarly to the first embodiment, the cylindrical lens array 12 may be replaced with a lenticular lens. At this time, the array direction and array pitch of the microlenses of the lenticular lens are the same as the array configuration of the cylindrical lens, and both are configured to operate similarly. The present embodiment will be described as an embodiment using the cylindrical lens array 12.

The cylindrical lens array 12 has a cylindrical surface formed at a pitch substantially equal to the array pitch of the laser array 11, and has a lens power in the array direction of the laser array 11, as shown in FIG. Each laser array light B1 emitted and diverged by the cylindrical lens array 12 is converted into a parallel light beam only in the array direction. The parallel light beam B2 obtained in this case
Need not be strictly parallel. That is, it is sufficient that adjacent incident light beams in the next cylindrical lens 31 do not intersect with a large angle difference, and even if they overlap to some extent, there is no problem if the angle difference is small.

At least two or more cylindrical lenses are arranged on the optical path between the cylindrical lens array 12 and the kaleidoscope 14. 5 and 6 show an example in which three cylindrical lenses are formed (cylindrical lenses 31, 32, and 33). In this case, one cylindrical lens 32 having power in the array direction of the laser array 11 and two cylindrical lenses 31 and 33 having lens power in a direction orthogonal to the array direction of the laser array are arranged.

These cylindrical lenses 31, 32,
The operation of 33 will be described. First, as shown in FIG.
Regarding the light beam in the array direction of the laser array 11, since the cylindrical lenses 31 and 33 can be regarded as being the same as a parallel flat plate, the beam B2 converted into a parallel light beam only in the array direction passes through the cylindrical lens 31 as it is and becomes a light beam B21. The light enters the lens 32.
The incident light beam B21 is transmitted to the cylindrical lens 3
2 (light flux B22) and the cylindrical lens 3
3 (light flux B23) and reaches the incident side end face 14a of the kaleidoscope 14.

Next, as shown in FIG.
Since the cylindrical lens array 12 can be regarded as a parallel plate with respect to the beam in the direction orthogonal to the array direction, the luminous flux B1 diverged from each laser light emitting unit also diverges after passing through the cylindrical lens array 12 to become a luminous flux B2, The light is collimated by the cylindrical lens 31 (light flux B21), passes through the cylindrical lens 32 (light flux B22), and converges on the calliscope 14 by the cylindrical lens 33 (light flux B23). Luminous flux B21,
B22 does not need to be a parallel light beam in the vertical direction of FIG. 6 (that is, the direction orthogonal to the array direction of the laser array). Therefore, even if the cylindrical lenses 31 and 33 are replaced with a single cylindrical lens, and the single lens converges on the kaleidoscope, the effect of the present invention is not affected.

(Embodiment 3) FIGS. 7 and 8 are views for explaining a third embodiment of the present invention. FIG. 7 shows a schematic top view of an illumination optical system, and FIG. Each is shown together with the optical path, and the illumination optical system includes a laser array 11,
It comprises a cylindrical lens array (or lenticular lens) 12, a cylindrical lens 41, homogenizers 42 and 43, and cylindrical lenses 44 and 45. FIG. 16 is a top view (FIG. 16A) and a side view (FIG. 16A) showing the configuration of the laser irradiation apparatus described in Japanese Patent Application Laid-Open No. 9-234579 using the above homogenizer.
In (B)), this is an apparatus for irradiating a linear laser beam to a portion to be irradiated as a linear beam with improved uniformity. In this embodiment, a homogenizer 40 used in this optical system is used.
The laser array light is uniformly illuminated on the rectangular irradiation target portion by using a and 40b.

The operation of the cylindrical lens array 12 (or a lenticular lens that can be replaced with the same) is as described above, and a description thereof will be omitted. The cylindrical lens 41 converts the divergent beam component in the vertical direction in FIG. 8, that is, the direction orthogonal to the array direction of the laser array 11, into a parallel light beam (light beam B31). The homogenizer 42 equalizes the light beam of the laser array 11 in the array direction. Although the homogenizer 42 of the present embodiment has a configuration of five divisions, the greater the number of divisions, the more uniform the luminous flux. However, if the light incident on each lens array of the homogenizer 42 has the same intensity distribution in FIG. 7, the effect of the homogenizer cannot be obtained. For example, such a phenomenon occurs when the array pitch between the lenticular lens 12 and the homogenizer 42 has an integral multiple. The light (light fluxes B32 and B33) from the homogenizer 42 is applied to the cylindrical lens 4
4 collects the light in the irradiated portion 16 (light flux B34).

On the other hand, the intensity distribution of the light beam in the direction orthogonal to the array direction of the laser array 11 is made uniform by the homogenizer 43 as shown in FIG. That is, the diffused light component incident on the cylindrical lens 41 is converted into a parallel light beam (light beam B31), the light beam is split by the homogenizer 43, and each of the split light beams is condensed and further diverged after being focused. (Light flux B3
3), the irradiated part 16 by the cylindrical lens 45
It is superimposed on the light beam (light flux B34). Laser array 11
In the homogenizer 43 that controls the light flux in the direction perpendicular to the array direction, the greater the number of divisions, the higher the effect of uniformization.

By disposing the cylindrical lens array (lenticular lens) 12 immediately after the laser array 11, each array light in the array direction can be converted into a parallel light beam, and the effect of the homogenizer can be obtained. In addition, since the lens array is a cylindrical lens array (or a lenticular lens), there is a merit that installation accuracy is not required in a direction orthogonal to the eye direction of the laser array.

(Embodiment 4) FIGS. 9 and 10 are views for explaining a fourth embodiment of the present invention. FIG. 9 shows a schematic top view of an illumination optical system, and FIG. Each is shown together with the optical path, and the illumination optical system is a laser array 1
1, a cylindrical lens array (or lenticular lens) 12, a cylindrical lens 51, fly-eye lenses 52 and 53, and a condenser lens 54. In the illustrated embodiment, two fly-eye lenses 5
2 and 53, but the second fly-eye lens 5
3 is not always necessary and can be omitted. Also, the condenser lens 54 may be replaced with two cylindrical lenses each having a lens power direction orthogonal to each other. In this embodiment, as in the above embodiments, the cylindrical lens array can be replaced with a lenticular lens having the same function.

First, the operation relating to the light component in the array direction will be described with reference to FIG. The cylindrical lens array 12 has an array pitch substantially equal to the array pitch of the laser array 11. The operation is as described above. In the cylindrical lens array 12, the beam in the array direction of the laser array becomes a substantially parallel light flux B2, passes through the cylindrical lens 51 (light flux B41), and the light emitted from each array light source is collected by the first fly-eye lens 52. (Light flux B42). At the focal position of the first fly-eye lens 52, a second fly-eye lens 53 is arranged. The second fly-eye lens 53 is not necessary if the traveling direction of the light beam that has passed through the cylindrical lens array 12 in the plane of FIG. 9 is parallel to the axis of the first fly-eye lens 52. Also, the case where the light beam B1 emitted from the laser array 11 cannot be regarded as the light beam emitted from the point light source, the aberration of the cylindrical lens array 12, the
The light beam B41 is slightly inclined with respect to the first fly-eye lens 52 due to a pitch shift with respect to the laser array 11 at the time. In such a case, the light rays condensed from the respective lens units constituting the first fly-eye lens 52 do not converge at one point, and thus the second fly-eye lens 53 is required. The light beam emitted from the second fly-eye lens 53 is superimposed on the irradiated portion 16 by the condenser lens 54 (light beam B43).

Next, the operation relating to the light beam component in the direction orthogonal to the array direction of the laser array will be described with reference to FIG.
The light beam B1 emitted from the laser array 11 passes through the cylindrical lens array 12 to become a light beam B2, and is converted into a parallel light beam B41 by the cylindrical lens 51. As described above, the second fly-eye lens 53 is disposed at the focal length position of the first fly-eye lens 52, and the light beam (light beam B42) emitted from each lens unit of the first fly-eye lens 52 is converted to the second fly-eye lens. The light passes through each lens portion of the lens 53, is superimposed on the irradiated portion 16 by the condenser lens 54, and is made uniform in illuminance (light flux B43).

When the thickness of the light emitting portion of the laser array 11 (the thickness in the direction perpendicular to the array direction) is large, the light beam B41 is not always parallel to the optical axis of the first fly-eye lens 52, The light rays condensed from are not collected at one point. Therefore, the second fly-eye lens 53 is used. If the thickness of the light emitting portion of the laser array can be considered to be sufficiently small, the first fly-eye lens 52
The light beam (light beam B42) emitted from each lens portion is focused on almost one point, so that the second fly-eye lens 53 is not required. The use of the cylindrical lens array 12 has an advantage in that the laser array 11 is allowed to be installed in the thickness direction more widely.

(Embodiment 5) FIG. 11 is a view showing a schematic configuration of an embodiment of a projection apparatus according to the present invention together with an optical path. The projection apparatus is an illumination optical system according to any one of Embodiments 1 to 4. , A light valve, and a projection lens. The projection device of the configuration example shown in FIG.
r, 61g, 61b, color combining element 62, and light valve 6
5 and a projection lens 64. In the configuration shown in FIG. 11, the optical system of the third embodiment is used as the illumination optical systems 61r, 61g, and 61b, but any of the optical systems of the first to fourth embodiments is used as the illumination optical system as described above. May be.

As the color synthesizing element 62, for example, a dichroic prism can be used. Illumination optical system 61
When r, 61g, and 61b are red, green, and blue laser array light sources, respectively, the color combining element (dichroic prism) 62 reflects red by the dichroic film 62r and reflects blue by the dichroic film 62b. ,
In addition, both dichroic films 62r and 62b are configured to transmit green. As the light valve 65, for example, a liquid crystal element can be used. In the configuration of FIG. 11, the field lens 63 is used immediately before the light valve. The light transmitted through the light valve 65 is transmitted to the projection lens 6.
It works so that it can pass through the pupil of 4.

With the above configuration, the maximum incident angle of the light illuminating the light valve 65 is reduced as compared with the related art as described above. Therefore, in particular, a light such as a liquid crystal element whose contrast ratio changes depending on the incident angle. In the case of a bulb, the contrast ratio can be improved, and color unevenness and illuminance unevenness can be reduced.

FIG. 11 shows an example of the configuration using a single-plate light valve, but as shown in FIG.
A total of three light valves 6 corresponding to r, 61g and 61b
5r, 65g, and 65b may be used. Field lenses 63r, 63g, 63b are located immediately before each of the light valves 65r, 65g, 65b. The configuration of FIG. 12 has a longer optical path length between the projection lens 64 and the light valves 65r, 65g, 65b than the configuration of FIG. 11, so the back focus length of the projection lens 64 is smaller than that of the projection lens 64 of FIG. Must be longer than the back focus. Also in the projection device of the three-plate light valve, the contrast ratio can be improved and the color unevenness and the illuminance unevenness can be reduced as in the case of the single plate.

FIG. 14 is a view for explaining the structure of an exposure apparatus according to the present invention. In the figure, reference numeral 71 denotes a uniform illuminating device according to any one of claims 9 to 20;
Denotes a reticle, 73 denotes a projection lens, and 74 denotes a substrate stage. An exposure apparatus according to the present invention illuminates a reticle 72 with a uniform illumination optical device 71 according to any one of claims 9 to 20, and a pattern in which the pattern of the reticle 72 is placed on a substrate stage 74 by a projection lens 73. Is exposed.

FIG. 15 is a view for explaining the configuration of the laser beam machine according to the present invention. In FIG.
76 is a work. The laser beam machine according to the present invention focuses and processes the illumination light from the uniform illumination optical device according to any one of claims 9 to 20 onto a work 76 by a lens 75. The shape of the focused spot on the work 76 is the illumination system 71.
Is the same as the aspect ratio of the irradiated portion. By condensing the light, energy can be concentrated on a minute portion of the work, and surface processing and cutting can be performed. Also, the lens 75
Is replaced by a projection lens, or in an arrangement where the irradiated portion is the work 76 directly, uniform illumination can be performed over a wide range, so that it can also be used as laser annealing.

[0058]

As is apparent from the above description, according to the lighting apparatus of the present invention, a compact optical system is realized by using a plurality of light sources, and the diffused light from the light sources is converted into parallel light and collected. By doing so, it is possible to keep the maximum incident angle on the illumination target portion small, and thus it is possible to obtain an optical system having good characteristics even when applied to various uses.

According to the uniform illuminating device of the present invention, a simple and compact illuminating device capable of uniform illumination can be obtained by providing the above-mentioned illuminating device and means for making the light intensity distribution uniform. it can.

Further, by using the illumination device capable of uniform illumination as described above, a high quality and compact projection device, exposure device, laser processing device, and the like can be obtained. For example, in a projection device, the maximum incidence angle on the light valve is reduced, so that the contrast ratio,
Characteristics related to color unevenness, illuminance unevenness, and the like are improved.

[Brief description of the drawings]

FIG. 1 is a diagram for explaining a first embodiment of the present invention, and is a diagram showing a schematic top view of an illumination optical system.

FIG. 2 is a diagram for explaining a first embodiment of the present invention, and is a diagram showing a schematic side view of an illumination optical system.

FIG. 3 is a diagram for explaining an effect of an illumination optical system using a lenticular lens.

FIG. 4 is a diagram for explaining the operation of the optical system in the case where there is no lenticular lens in the configuration of FIG. 3;

FIG. 5 is a diagram for explaining a second embodiment of the present invention, and is a diagram illustrating a schematic top configuration of an illumination optical system.

FIG. 6 is a diagram for explaining a second embodiment of the present invention, and is a diagram illustrating a schematic side view of an illumination optical system.

FIG. 7 is a diagram for explaining a third embodiment of the present invention, and is a diagram showing a schematic top configuration of an illumination optical system.

FIG. 8 is a diagram for explaining a third embodiment of the present invention, and is a diagram illustrating a schematic side configuration of an illumination optical system.

FIG. 9 is a diagram for explaining the fourth embodiment of the present invention, and is a diagram showing a schematic top configuration of an illumination optical system.

FIG. 10 is a diagram for explaining a fourth embodiment of the present invention, and is a diagram illustrating a schematic side configuration of an illumination optical system.

FIG. 11 is a diagram showing a schematic configuration of an embodiment of a projection device according to the present invention together with an optical path.

FIG. 12 is a diagram showing a schematic configuration of a light source and a parallel light generating means together with an optical path in still another embodiment of the illumination device of the present invention.

FIG. 13 is a diagram illustrating a configuration example of a light emitting unit and a parallel light converting unit according to the present invention.

FIG. 14 is a diagram showing a conventional example of a homogenizer.

FIG. 15 is a view for explaining a configuration of a laser beam machine according to the present invention.

FIG. 16 is a diagram showing a schematic configuration of another embodiment of the projection device according to the present invention together with an optical path.

[Explanation of symbols]

11: Laser array, 12: Cylindrical lens array, 13: Condenser lens, 14: Calliscope, 15: Relay lens, 16: Irradiated part, 31, 3
2, 33, 41, 44, 45, 51 ... cylindrical lenses, 40a, 40b ... homogenizers, 42, 43 ... homogenizers, 52, 53 ... fly-eye lenses, 54 ... condenser lenses, 61r, 61g, 61b ... illumination optical systems, 62: color combining element, 62r, 62b: dichroic film, 63, 63r, 63g, 63b: field lens, 64: projection lens, 65, 65r, 65g, 65b
.., Light valve, 71, uniform illumination device, 72, reticle, 73, projection lens, 74, substrate stage, 75, lens, 76, work.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G02B 27/00 G03B 27/54 Z 5C058 G02F 1/13 505 G03F 7/20 521 5F073 1/13357 G09F 9 / 00 337Z 5G435 G03B 21/14 H01S 5/40 27/54 H04N 5/74 Z G03F 7/20 521 F21M 1/00 S G09F 9/00 337 G02B 27/00 V H01S 5/40 H04N 5/74 (72) Inventor Takanobu Osaka 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Company (72) Inventor Ikuo Kato 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Company (72) Inventor Yasuyuki Takiguchi 1-3-6 Nakamagome, Ota-ku, Tokyo F-term in Ricoh Co., Ltd. (reference) 2H088 EA14 EA15 HA13 HA24 HA25 HA26 HA28 MA02 MA04 2H091 FA26Z FA28Z FA29Z FA41Z FA46Z FA50Z FD06 LA17 LA18 MA07 2H109 AA13 AA29 AA96 DA12 3K042 AA01 BA09 BC08 BC09 BE02 4E068 CD01 CD12 CE08 5C058 AB06 EA05 EA12 AEB EA51 5A07 EA51 5A13 EA51 5A13 EA51 5A13 EA51 EE26 FF06 FF07 FF08 FF11 GG02 GG06 GG24 GG27 GG28 LL15

Claims (23)

[Claims] 1. A light emitting means having a plurality of light emitting portions, and each of the diffused light emitted from each of the light emitting portions is made parallel light in at least one same direction on a plane orthogonal to the optical axis of the diffused light. An illumination device comprising: a parallel light converting means; and a light collecting means for collecting a plurality of light beams emitted from the parallel light converting means into a predetermined light collecting range. 2. The lighting device according to claim 1, wherein said parallel light converting means is constituted by lenses attached to respective light emitting portions of said light emitting means. 3. The lighting device according to claim 1, wherein the light emitting means includes a laser light emitting unit that emits laser light. 4. The lighting device according to claim 1, wherein the light emitting unit is configured such that the plurality of light emitting units are arranged in an array in one direction. An illumination device configured to collimate light emitted from the plurality of light emitting units in a direction coinciding with the array arrangement direction. 5. The illumination device according to claim 4, wherein a cylindrical lens array is used as the parallel light converting means, and an array pitch of each of the cylindrical lens units constituting the cylindrical lens array is equal to an array pitch of the light emitting unit. A lighting device characterized by being equivalent. 6. The lighting device according to claim 5, further comprising at least two or more cylindrical lens arrays. 7. The illuminating device according to claim 4, wherein a lenticular lens is used as the parallel light converting means, and an array pitch of each micro lens constituting the lenticular lens is equal to an array pitch of the light emitting section. A lighting device, comprising: 8. The lighting device according to claim 7, wherein at least two or more lenticular lenses are provided. 9. An illumination device according to claim 1, which receives illumination light emitted from the illumination device,
An intensity distribution equalizing means for equalizing a light intensity distribution in a plane orthogonal to the optical axis of the received light, and illuminating an illumination target by controlling light emitted from the intensity distribution equalizing means. A uniform lighting device. 10. The uniform illuminating device according to claim 9, wherein a kaleidoscope is used as the intensity distribution uniforming means. 11. The uniform illumination device according to claim 9, wherein a homogenizer is used as said intensity distribution uniformizing means. 12. The uniform illumination device according to claim 9, wherein a fly-eye lens is used as said intensity distribution uniforming means. 13. A laser array in which a plurality of laser light emitting units are arranged in an array, and cylindrical lenses arranged in an array arrangement direction of the laser array at an array pitch equal to the array pitch of the laser light emitting units. A cylindrical lens array, a kaleidoscope for uniformizing the intensity distribution of a light beam emitted from the cylindrical lens, and a relay lens for controlling an optical path of light emitted from the kaleidoscope and illuminating an illumination target. An illumination optical device having the cylindrical lens array, wherein the cylindrical lens array acts on diffused light emitted from each of the laser light emitting units so that light emitted from the cylindrical lens array becomes parallel light in an array direction of the cylindrical lenses. A uniform illumination device characterized by being configured as described above. 14. A laser array in which a plurality of laser light emitting units are arranged in an array, and micro lenses are arrayed in an array arrangement direction of the laser array and at an array pitch equal to the array pitch of the laser light emitting units. A lenticular lens, a kaleidoscope for uniformizing the intensity distribution of a light beam emitted from the lenticular lens, and a relay lens for controlling an optical path of light emitted from the kaleidoscope to illuminate an illumination target. In the illumination optical device, the lenticular lens is configured to act on diffused light emitted from each of the laser light emitting units, so that emitted light emitted from the lenticular lens becomes parallel light in an array direction of the lenticular lens. A uniform illumination device, characterized in that: 15. A laser array in which a plurality of laser light emitting units are arranged in an array, and cylindrical lenses are arranged in an array arrangement direction of the laser array at an array pitch equal to the array pitch of the laser light emitting units. An illumination having a cylindrical lens array, a homogenizer for equalizing an intensity distribution of a light beam emitted from the cylindrical lens array, and a relay lens for controlling an optical path of light emitted from the homogenizer to illuminate an illumination target. In the optical device, the cylindrical lens array acts on diffused light emitted from each of the laser light emitting units so that light emitted from the cylindrical lens array becomes parallel light in an array direction of the cylindrical lens array. A uniform illuminating device characterized by being constituted. 16. A laser array in which a plurality of laser light emitting units are arranged in an array, and micro lenses are arrayed in an array arrangement direction of the laser array and at an array pitch equal to the array pitch of the laser light emitting units. Lenticular lens, a homogenizer for equalizing the intensity distribution of a light beam emitted from the lenticular lens, and a relay lens that controls an optical path of light emitted from the homogenizer and illuminates an illumination target. The lenticular lens is configured to act on diffused light emitted from each of the laser light emitting units so that emitted light emitted from the lenticular lens becomes parallel light in an array direction of the lenticular lens. Characteristic uniform lighting device. 17. A laser array comprising a plurality of laser light emitting units arranged in an array, and cylindrical lenses arranged in an array arrangement direction of the laser array at an array pitch equal to the array pitch of the laser light emitting units. A cylindrical lens array, a fly-eye lens for equalizing the intensity distribution of a light beam emitted from the cylindrical lens array, and an illumination optical device for illuminating an illumination target with light emitted from the fly-eye lens, The cylindrical lens array is configured to act on diffused light emitted from each of the laser light emitting units so that emitted light emitted from the cylindrical lens array becomes parallel light in the array direction of the cylindrical lens array. Characteristic uniform lighting device. 18. A laser array in which a plurality of laser light emitting units are arranged in an array, and microlenses are arrayed in an array arrangement direction of the laser array and at an array pitch equal to the array pitch of the laser light emitting units. A lenticular lens, a fly-eye lens for equalizing the intensity distribution of a light beam emitted from the lenticular lens, and an illumination optical device for controlling an optical path of light emitted from the fly-eye lens to illuminate an illumination target. The lenticular lens is configured to act on diffused light emitted from each of the laser light emitting units so that emitted light emitted from the lenticular lens becomes parallel light in an array direction of the lenticular lens. And a uniform lighting device. 19. The method according to claim 13, 15, or 17.
3. The uniform illumination device according to claim 1, further comprising at least two or more of the cylindrical lens arrays. 20. Any one of claims 14, 16, and 18
3. The uniform illumination device according to claim 1, further comprising at least two or more lenticular lens arrays. 21. At least a uniform illuminating device according to any one of claims 9 to 20, a light valve illuminated by the uniform illuminating device, and a projection lens for projecting light emitted from the light valve. A projection device comprising: 22. A uniform illuminating device according to claim 9, wherein a laser array is used as said light emitting means, a reticle, and a projection lens. Exposure equipment. 23. A uniform illuminating device according to claim 9, wherein a laser array is used as said light emitting means, and a converging lens. Laser processing machine.