JP2002178341A5 - - Google Patents

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Publication number
JP2002178341A5
JP2002178341A5 JP2000381788A JP2000381788A JP2002178341A5 JP 2002178341 A5 JP2002178341 A5 JP 2002178341A5 JP 2000381788 A JP2000381788 A JP 2000381788A JP 2000381788 A JP2000381788 A JP 2000381788A JP 2002178341 A5 JP2002178341 A5 JP 2002178341A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000381788A
Other languages
Japanese (ja)
Other versions
JP2002178341A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000381788A priority Critical patent/JP2002178341A/ja
Priority claimed from JP2000381788A external-priority patent/JP2002178341A/ja
Publication of JP2002178341A publication Critical patent/JP2002178341A/ja
Publication of JP2002178341A5 publication Critical patent/JP2002178341A5/ja
Withdrawn legal-status Critical Current

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JP2000381788A 2000-12-15 2000-12-15 樹脂注型方法 Withdrawn JP2002178341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000381788A JP2002178341A (ja) 2000-12-15 2000-12-15 樹脂注型方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000381788A JP2002178341A (ja) 2000-12-15 2000-12-15 樹脂注型方法

Publications (2)

Publication Number Publication Date
JP2002178341A JP2002178341A (ja) 2002-06-26
JP2002178341A5 true JP2002178341A5 (enExample) 2008-01-24

Family

ID=18849727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000381788A Withdrawn JP2002178341A (ja) 2000-12-15 2000-12-15 樹脂注型方法

Country Status (1)

Country Link
JP (1) JP2002178341A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011160867A1 (en) 2010-06-23 2011-12-29 Asml Holding N.V. Pneumatic bearing with bonded polymer film wear surface and production method thereof

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