JP2002178185A - Processing head shaft feed mechanism of optical axis movement type laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing head shaft feed mechanism of an optical axis movement type laser beam machine which enables shaft feed of a high speed, high accuracy and long stroke and has good accessibility to a work table. SOLUTION: This processing head shaft feed mechanism is for the optical axis movement type laser beam machine 1 which is provided with a Y-axis carriage movably and positionally with an X-axis carriage 7, is freely movably provided with the X-axis carriage at an X-axis guide rail 17 disposed at a bed 3 and adopts a rack and pinion drive system for a driving means of the X-axis carriage. The processing head shaft feed mechanism is constituted by providing the right and left flanks of the bed with an X-axis rack 29 and a Y-axis guide rail, providing a right leg 7 of the X-axis carriage with an X-axis drive motor, providing this motor with a first shaft 31 rotationally driven by the right side rack 29r, providing the left leg 71 of the X-axis carriage with a second shaft 57 having a third pinion 71 engaging the left side rack 29l and providing the second shaft with a driving force transmission means for transmitting the revolution of the first shaft by reverse rotation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machining head axis feed mechanism of an optical axis moving type laser beam machine.

[0002]

2. Description of the Related Art FIGS. 12A and 12B show a typical example of a shaft feed mechanism of a processing head of a conventional optical axis moving laser beam machine. FIG. 12A shows an example in which two ball screws are used for a feed mechanism of an X-axis carriage of an optical axis moving type laser beam machine, and FIG. 12B shows an example in which one ball screw is used. .

More specifically, in the example shown in FIG. 12A, an X-axis carriage 205 is movably provided on two X-axis guide rails 203 arranged on both sides of a work table 201. Is provided so as to be moved and positioned by two ball screws 209 rotated and driven by one X-axis drive motor 207. The two ball screws are arranged on both sides of the work table 201 and near the inside of the two X-axis guide rails 203.

The example of FIG. 12B has the same configuration as that of FIG. 12A, except that the two ball screws 209 in the example of FIG. Note that FIG.
12A and 12B, the X-axis carriage 205 includes:
A Y-axis carriage (not shown) capable of moving and positioning in the Y-axis direction is provided, and the Y-axis carriage is provided with a processing head 211 for focusing a laser beam on a work.

FIGS. 13A and 13B show a typical example of a structure of an X-axis carriage in an axis feed mechanism of a processing head of a conventional optical axis moving laser beam machine.

FIG. 13A shows that both sides of a main body frame 301 are raised above the upper surface of a work table 303, and an X-axis guide rail 305 and a rack 307 are provided on the upper surfaces of both side walls of the main body frame 301. A horizontal beam-shaped X-axis carriage 309 is movably provided on the X-axis guide rail 305, and two pinion gears 315 which are rotationally driven by an X-axis drive motor 311 and connected to a torque tube 313 are connected to the two racks 307. Respectively. The X-axis carriage 309 has a Y-axis carriage provided with a laser processing head 316 (not shown).
Is provided.

In FIG. 13B, an X-axis carriage 411 formed in a rectangular frame structure is movably provided on two X-axis guide rails 415 provided on a base frame 413. The X-axis carriage 411 is screwed to the bottom of the frame structure, and is provided so as to be moved and positioned in the X-axis direction by a single ball screw 417 that is rotationally driven by an X-axis drive motor (not shown). . Ball screw 4
Reference numeral 17 is located below a work table 419 provided on the base frame 413. The X-axis carriage 411 is provided with a Y-axis carriage (not shown) provided with a laser processing head 412.

FIG. 14 shows an example of a dust-proof structure of a drive section of an X-axis carriage in an optical axis moving type laser beam machine of the type shown in FIG. 13 (a). 13 (a) are assigned the same reference numerals.

As shown in FIG. 14, both sides of the main body frame 301 are raised up to the vicinity of the upper surface of the work table 303, and X-axis guide rails 305 and racks 315 are provided on the upper surfaces of both side walls of the main body frame 301. A horizontal beam-shaped X-axis carriage 309 is movably provided on the rail 305, and a pinion 319 driven to rotate by an X-axis drive motor 317 is engaged with the rack 315.

The above-described X-axis guide rail 305 and rack 3
15 is provided with a bellows 321 for covering the upper surface thereof and a cover 32 for protecting the side surface of the pinion 319.
3 are provided.

[0011]

In the optical axis moving type laser beam machine of the example shown in FIG. 12 (a), the space for the driving part is large and the accessibility to the work table is poor.
In addition, there is a limit to the moving distance at which high-precision feeding is possible due to the twist of the ball screw.

In the example shown in FIG. 12B, since the X-axis carriage moves in one direction, the left and right speeds during the movement of the X-axis carriage cannot be synchronized, and high-speed feeding cannot be performed. FIG. 13B shows an example in which a ball screw is arranged at the center in order to avoid the problem of one-sided feeding. However, a single ball screw requires a large driving force to move.

In the structure of the X-axis carriage of the optical axis moving type laser beam machine shown in FIG. 13 (a), both sides of the main frame are raised above the upper surface of the work table. It is difficult to access (access) the upper surface of the work table from the side surface of the main body frame.

Further, since the two pinion gears are connected by a torque tube in order to synchronize the rotations of the two pinion gears, the inertia (moment of inertia) of the drive shaft increases and the time constant during acceleration / deceleration increases. .

In the example shown in FIG. 13B, high-speed feeding is difficult because the weight of the X-axis carriage is large. Also, as in the example of FIG. 12A, there is a limit on the moving distance at which high-precision feeding is possible.

In the dustproof structure of the drive unit of the X-axis carriage shown in FIG. 14, the bellows provided on the X-axis guide rail and the rack part may be burned out by spatter generated during processing.
If spatter is deposited on the folds of the bellows, it may cause damage.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a high-speed, high-precision, long-stroke axis feed, and a close access to a work table. An object of the present invention is to provide a machining head axis feed mechanism of an optical axis moving type laser beam machine with good operability.

[0018]

According to a first aspect of the present invention, there is provided a machining head axis feed mechanism for an optical axis moving type laser beam machine, wherein a Y axis carriage provided with a machining head is connected to an X axis carriage. Is provided so that it can be moved and positioned.
In an optical axis moving type laser beam machine using an axis carriage movably provided on a pair of X-axis guide rails provided on the base and using a driving method by a rack and a pinion as a driving means of the X-axis carriage, X on each side
An X-axis provided with the rack extended in the axial direction and an X-axis guide rail vertically adjacent to each other, and having a pinion on a right leg at one end of the X-axis carriage for engaging with the right rack of the racks; A drive motor is provided, and a first shaft that is rotatably driven by a pinion engaged with the right rack is provided, and a pinion that engages with a left rack of the rack is provided on a left leg of the other end of the X-axis carriage. The gist of the invention is that a second shaft is provided and a driving force transmitting means for transmitting the rotation of the first shaft in a reverse direction to the second shaft is provided.

According to a second aspect of the present invention, there is provided a machining head axis feed mechanism for an optical axis moving type laser beam machine, wherein the driving force transmitting means is provided. Is provided with an intermediate shaft close to the first shaft and substantially parallel to the first shaft, and provided with a rotationally-adjustable rotating body that supports a shaft end of one side of the intermediate shaft; Almost the middle part is supported with a self-aligning bearing that can tilt the axis,
An idle gear that engages with a gear provided on the first shaft is provided between the self-aligning bearing and the rotating body, and a drive pulley is provided at the other shaft end of the intermediate shaft. The gist is that a belt for transmitting rotation is provided between the driven shaft and the driven pulley provided on the second shaft.

According to a third aspect of the present invention, there is provided a machining head axis feed mechanism for an optical axis moving type laser beam machine according to the first or second aspect. Seal belts for covering the rack, the surface of the X-axis guide rail, and the side surfaces of the X-axis carriage legs are provided on both left and right sides of the base, and a belt guide for guiding the seal belt to the legs of the X-axis carriage is provided. In addition, the gist is that an upper surface cover covering a space formed between the base and the upper portion of the seal belt and a lower surface cover covering a space formed between the base and the lower portion of the seal belt are provided. Is what you do.

According to a fourth aspect of the present invention, there is provided a machining head axis feed mechanism for an optical axis moving type laser beam machine according to the third aspect, wherein the seal belt end portion is provided at the end of the seal belt. And a belt tensioner for applying an appropriate tension to the seal belt.

According to a fifth aspect of the present invention, there is provided a machining head axis feeding mechanism for an optical axis moving type laser beam machine according to the third or fourth aspect. The gist is that a sealing material for sealing between the upper cover and the seal belt is provided on the upper cover, and a sealing material for sealing between the lower cover and the seal belt is provided on the lower cover.

[0023]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing the entire optical axis moving type laser beam machine according to the present invention. For convenience of explanation, FIG.
The left-right direction is referred to as the front-rear direction, and the left-right direction is the name as viewed from the front direction defined above.

Referring to FIG. 1, FIG. 2 and FIG. 3, a work table 5 is provided on the base 3 of the optical axis moving type laser beam machine 1. An X-axis carriage 7 that can move and position in the X-axis direction is provided above the base 3. X
On the shaft carriage 7, a Y-axis carriage 11 provided with a processing head 9 for condensing and irradiating a laser beam onto a work W mounted on the work table 5 in the Y-axis direction (perpendicular to the X-axis direction).
It is provided movably.

A laser beam is guided from the laser oscillator 13 provided behind the X-axis carriage 7 to the processing head 9 via an optical system (not shown) such as a bend mirror.

As shown in FIGS. 7 and 8, the X-axis carriage 7 has a box-like beam section 7a having an internal space extending horizontally in the Y-axis direction, and a beam section 7a. And left and right legs 7 (l, r) that hang down from both ends of the base 3. Under the legs 7 (l, r), both sides of the base 3 extend horizontally in the X-axis direction. A plurality (two in the embodiment) engaging with the X-axis guide rail 17 (l, r) provided so as to be provided.
21 with linear motion bearing 19 of
(L, r) is provided.

An X-axis drive motor 23 is provided on the upper surface of the right housing 21r. A first pinion 27 provided on the output shaft of the X-axis drive motor via a speed reducer 25 is provided on the right side of the base 3. Is engaged with the right rack 29r provided at the right side.

As shown in FIGS. 6 and 7, an X-axis drive motor 23 provided on the right leg 7r so that the right leg 7r and the left leg 7l of the X-axis carriage 7 can move synchronously. A driving force transmitting means 30 for transmitting the driving force to the left leg 71 is provided. Hereinafter, the driving force transmitting means 30 will be described.

The right leg 7r of the X-axis carriage 7 has
A first shaft 31 extending in the vertical direction is provided. The first shaft 31 has a first bearing unit 33 provided below the right leg 7r, and a second bearing fixed by a plurality of bolts 34 inside the beam 7a of the X-axis carriage 7 above the right leg 7r. The unit 35 is rotatably supported by the unit 35.

A second pinion 37 which engages with the right rack 29r is fixed to a lower shaft end of the first shaft 31 by a known shaft fixing member 39 such as a spanning ring.
On the other hand, a gear 41 is fixed to the upper end of the first shaft 31 located in the space inside the second bearing unit 35 by the same shaft fixing member 39 as described above.

As shown in FIGS. 7, 9 and 10, the second bearing unit 35 is provided with an intermediate shaft 43 parallel to the first shaft 31. The intermediate shaft 43 has the gear 41
Is provided with an idle gear 53 that engages with. A drive pulley 5 composed of a toothed pulley is provided at the upper end of the intermediate shaft 43.
5 is fixed by a shaft fixing member 39. Further, the second bearing unit 35 is provided with a backlash adjusting means 40 for reducing the backlash between the gear 41 and the idle gear 53. Hereinafter, the backlash adjusting means 40 will be described.

The backlash adjusting means 40 includes a rotating body 4
A bearing 47 for supporting the lower portion of the intermediate shaft 43 is provided at a position eccentric from the center of rotation of the rotary shaft 5, and the rotating body 45 is fitted to the second bearing unit 35 so as to be adjustable in rotation. The intermediate portion is supported by a self-aligning ball bearing 49 capable of tilting the shaft.
An idle gear 53 that engages with a gear 41 provided on the first shaft 31 is provided between the second bearing unit 35 and the two adjustment bolts 51 that can rotate and fix the rotating body 45. A second shaft 57 substantially parallel to the first shaft 31 is provided on the left leg 71 of the X-axis carriage 7 having the provided structure. The second shaft 57 is connected to the beam 7a.
, A driven pulley shaft 61 rotatably supported by a third bearing unit 59 provided on the left leg portion 71, a pinion shaft 65 rotatably supported by a fourth bearing unit 63 provided on the left leg 71, and a driven pulley shaft 61 And a universal joint 67 connecting the pinion shaft 65 and the pinion shaft 65.

A driven pulley 69 composed of a toothed pulley similar to the driving pulley 55 is fixed to the driven pulley shaft 61 by a shaft fixing member 39. On the other hand, a third pinion 71 that engages with a left rack 291 provided on the left side surface of the base 3 is fixed to the pinion shaft 65 by a shaft fixing member 39. A toothed belt 73 is wound around the driving pulley 55 and the driven pulley 69.

The third bearing unit 59 is provided integrally with a cylindrical base 60, and the cylindrical base 60 is provided with a plurality of bolts 72 on the left leg 71 of the X-axis carriage 7.
The mounting position is fixed so as to be adjustable. Further, in order to adjust the distance between the intermediate shaft 43 and the driven pulley shaft 61, a block member 76 fixed to the left leg portion 7l with a bolt 74 is provided. A threaded pull-in bolt 78 is supported substantially horizontally.

In the above configuration, an NC device (not shown)
If the X-axis drive motor 23 is appropriately rotated under the control of
The first pinion 27 engaged with the right rack 29r provided on the side surface of the base 3 rotates, and the X-axis carriage 7 can be moved to a desired position by being guided by the X-axis guide rails 17 (l, r). it can.

When the X-axis carriage 7 moves, the first shaft 3 is moved by the second pinion 37 engaged with the right rack 29r.
1 is rotated. The rotation of the first shaft 31 is transmitted to the idle gear 53 via a gear 41 provided above the first shaft 31.
Is transmitted to The rotation of the idle gear 53 provided on the intermediate shaft 43 is transmitted to a drive pulley 55 provided above the intermediate shaft 43.

The rotation of the driving pulley 55 described above is transmitted to a second shaft 57 provided on the left leg 71 of the X-axis carriage 7, and is engaged with a left rack 291 provided below the second shaft 57. It is transmitted to the third pinion 71. The rotation direction of the third pinion 71 is opposite to that of the second pinion 37 due to the idle gear 53.

Therefore, the driving force of the X-axis driving motor 23 is transmitted to the third pinion 71 by the driving force transmitting means 30 described above.
The X-axis carriage 7
The right and left can follow and synchronize with each other without being delayed by the right leg 7r on the drive side.

In the driving force transmitting means 30, the final stage speed ratio from the second pinion 37 to the third pinion 71 is set to be 1/1.

When adjusting the backlash between the gear 41 and the idle gear 53 in the aforementioned driving force transmitting means 30, for example, the adjusting bolt 51b provided on the second bearing unit 35 is loosened, and the adjusting bolt 51a is moved forward. Then, the rotating body 45 rotates clockwise (in FIG. 9),
The backlash can be adjusted to an appropriate value by changing the distance between the intermediate shaft 43 and the first shaft 31.

Since the upper part of the intermediate shaft 43 is supported by the self-aligning ball bearing 49, slight inclination of the intermediate shaft 43 is allowed. When the backlash adjustment is completed, the adjustment bolts 51a, 51b are attached to the lock nuts 52a, 52b.
By fixing the distance between the shafts, the distance between the axes can be fixed.

When adjusting the distance between the intermediate shaft 43 and the driven pulley shaft 61 of the second shaft 57, the position of the base 60 is adjusted by using the pull-in bolt 78. it can.

Referring again to FIG. 1 to FIG.
The flat and flexible seal belt 75 for protecting the rack 29 (l, r) and the X-axis guide rail 17 (l, r) provided on both sides of the
It is provided on the leg 7 (l, r) of the shaft carriage 7.

As shown in FIG. 11, one end of the seal belt 75 is fixed to a belt tensioner 77 provided on the rear side surface of the base 3 and the other end is connected to a belt fixing portion 79 provided on the front side surface of the base 3. It is fixed with bolts.

The belt tensioner 77 includes a belt clamp 81 for clamping the seal belt 75 and the base 3.
Provided movably along the side surface of the guide plate 82 provided in the
A bracket 83 is provided behind (upward in FIG. 11) the belt clamp 81, and a shoulder bolt 8 is inserted through a fool hole (not shown) provided in the bracket 83.
5 is screwed to the rear end of the belt clamp 81 and fixedly provided with a nut 88, and a tension adjusting nut 87 screwed to a screw portion between the bracket 83 and the head of the shoulder bolt 85 is screwed. In addition, an elastic machine 89 for applying tension to the seal belt 75 is provided between the tension adjusting nut 87 and the head of the shoulder bolt 85.

The leg 7 of the X-axis carriage 7
(L, r) is provided with the trapezoidal housing 21 (l, r) when viewed from above as shown in FIG. A seal belt 75 (l, r) is attached to the housing 21 (l, r).
Four guide rollers 91 (a, b) of intermediate height are rotatably supported on the housing 21 (l, r) so as to pass through the outer periphery of the housing 21 (l, r).

As shown in FIGS. 3 and 4, a space formed between the base 3 and the upper portion of the seal belt 75 (l, r) is provided above the rack 29 (l, r). An upper cover 93 (l, r) for covering and protecting the rack 29 (l, r) and the X-axis guide rail 17 (l, r) from dust such as spatter is attached to the base 3. A flange 95 bent downward in the vertical direction is provided at the tip of the upper surface cover 93 (l, r), and a sealing material 97 filling the gap with the seal belt 75 is provided on the surface of the flange 95. It is stuck.

Below the X-axis guide rails 17 (l, r), similarly to the top cover 93, a space formed between the base 3 and the lower portion of the seal belt 75 (l, r). The lower cover 99 (l, r) covering the base 3
It is installed on the side. Also, the lower cover 99 (l,
r) Flange part 1 bent at the top in the vertical direction at the top
A seal member 97 that fills the gap with the seal belt 75 is fixed to the surface of the flange portion 101, similarly to the upper surface cover 93.

With the above configuration, the X-axis driving portion (the rack 29) of the X-axis carriage 7 which is most likely to be contaminated by sputtering is
The first pinion 27 of the X-axis drive motor 23, the second pinion 37 of the driving force transmitting means 30, and the third pinion 71
), The seal belt 75 and the upper and lower cover (9)
3, 99).

The tension of the seal belt 75 can always be maintained at the best tension by adjusting the tension adjusting nut 87 of the belt tensioner 77.

[0052]

According to the first aspect of the present invention, an X-axis drive motor having a pinion which engages with one side of a rack provided on both sides of a base is provided on the right leg of one end of the X-axis carriage. A first shaft rotatably driven by a pinion engaged with the rack is provided, and a second shaft including a pinion engaged with the other side of the rack is provided on a left leg of the other end of the X-axis carriage. And the driving force transmitting means for transmitting the rotation of the first shaft in the reverse direction to the second shaft is provided, so that the left leg on the driven side is synchronized with the right and left without delay with the right leg on the driving side, so that the left leg is accurately synchronized. It can be moved quickly and quickly.

Further, since the X-axis feed mechanism is provided with an X-axis guide rail on the side surface of the base and uses a rack and pinion drive system which engages with a rack provided on the side surface of the base, the X-axis feed mechanism is different from the feed screw drive system. There is no limitation on the moving distance due to the twist of the feed screw.

According to the second aspect of the present invention, in the driving force transmitting means for transmitting the rotation of the first shaft in the reverse direction to the second shaft,
Since the backlash adjusting mechanism between the idle gear and the gear for reversing the rotation of the first shaft is provided, and the belt drive is used as the rotation transmission means between the first shaft and the second shaft,
Since the inertia of the drive shaft is small, acceleration and deceleration can be performed at high speed, and highly accurate positioning can be performed. Further, since the backlash of the driving force transmitting means can be appropriately reduced, high-precision axial feed is possible.

According to the third or fifth aspect of the present invention, no matter where the X-axis carriage 7 moves, the X-axis driving portion of the X-axis carriage that is most liable to be contaminated by sputtering is protected. be able to.

An X-axis guide is provided on the side of the base,
The use of a flat seal belt instead of the bellows for the cover of the X-axis guide portion facilitates the transfer of the material into and out of the upper surface of the work table.

According to the fourth aspect of the present invention, the tension of the seal belt can always be maintained at the optimum tension by appropriately adjusting the belt tensioner.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an entire optical axis moving type laser beam machine according to the present invention.

FIG. 2 is a view taken along the line AA in FIG. 1;

FIG. 3 is a partial cross-sectional view taken along a line CC in FIG. 2;

FIG. 4 is an enlarged view of a part P in FIG. 3;

FIG. 5 is a partial cross-sectional view taken along a line BB in FIG. 2;

FIG. 6 is a sectional view taken along the line DD in FIG. 1;

FIG. 7 is an enlarged view of a part of FIG.

FIG. 8 is a view as seen from an arrow E in FIG. 6;

FIG. 9 is a sectional view taken along the line GG in FIG. 7;

FIG. 10 is a view as seen from the direction of arrow F in FIG. 6;

FIG. 11 is an enlarged view of a portion Q in FIG. 2;

FIG. 12 is a view showing a typical example of an axis feed mechanism of a processing head of a conventional optical axis moving laser processing machine.

FIG. 13 is a view showing a typical example of a structure of an X-axis carriage in a shaft feed mechanism of a processing head of a conventional optical axis moving laser processing machine.

FIG. 14 is a view showing an example of a dust-proof structure of a drive unit of an X-axis carriage in a conventional optical axis moving laser beam machine.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Optical axis moving type laser beam machine 3 Base 5 Work table 7 X-axis carriage 7a Beam 7 (l, r) Leg 9 Processing head 11 Y-axis carriage 13 Laser oscillator 17 (l, r) X-axis guide rail 19 Linear motion bearing 21 (l, r) housing 23 X-axis drive motor 25 reducer 27 first pinion 29 (l, r) rack 30 driving force transmitting means 31 first shaft 33 first bearing unit 34, 72, 74 bolt 35 Second bearing unit 37 Second pinion 39 Shaft fixing member 40 Backlash adjusting means 41 Gear 43 Intermediate shaft 45 Rotating body 47 Bearing 49 Self-aligning ball bearing 51 (a, b) Adjusting bolt 52 (a, b) Lock nut 53 Idle gear 55 drive pulley 57 second shaft 59 third bearing unit 60 base 61 driven pulley shaft 63 fourth bearing unit 65 pinion shaft 67 universal joint 69 driven pulley 71 third pinion 73 toothed belt 75 (l, r) seal belt 76 block member 77 belt tensioner 78 pull-in bolt 79 belt fixing portion 81 belt clamp 82 guide plate 83 Bracket 85 Shoulder bolt 87 Tension adjusting nut 89 Ammunition 91 (a, b) Guide roller 93 (l, r) Top cover 95 Flange part 97 Seal material 99 (l, r) Bottom cover 101 Flange part LB Laser beam

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yukio Uchino 558 Soga Bessho, Odawara-shi, Kanagawa F-term (reference) 4E068 CE04

Claims (5)

[Claims] 1. A Y-axis carriage equipped with a processing head is
An optical axis provided movably on a shaft carriage, movably provided on a pair of X-axis guide rails provided on a base, and using a rack and a pinion as a driving means for the X-axis carriage. In the movable laser beam machine, the rack extending in the X-axis direction and the X-axis guide rail are provided vertically adjacent to each of the left and right side surfaces of the base, and the right leg at one end of the X-axis carriage is provided. An X-axis drive motor having a pinion engaged with the right rack of the rack, a first shaft rotatably driven by the pinion engaged with the right rack, and the other end of the X-axis carriage. A second shaft provided with a pinion that engages with the left rack of the rack on the left leg of the unit, and a driving force transmitting unit that reversely transmits the rotation of the first shaft to the second shaft and transmits the rotation; That Optical axis moving laser processing machine machining head axis feed mechanism for the symptoms. 2. The machining head axis feed mechanism of an optical axis moving type laser beam machine according to claim 1, wherein said driving force transmitting means is close to said first axis and substantially parallel to said first axis. A shaft is provided, and a rotationally-adjustable rotating body that supports one end of the intermediate shaft is provided, and a substantially intermediate portion of the intermediate shaft is supported by a self-aligning bearing that can tilt the shaft. An idle gear that engages with a gear provided on the first shaft is provided between the aligning bearing and the rotating body, and a drive pulley is provided on the other shaft end of the intermediate shaft. A machining head shaft feeding mechanism for an optical axis moving laser beam machine, wherein a belt for transmitting rotation is provided between a driven pulley provided on two axes. 3. A machining head axis feed mechanism for an optical axis moving type laser beam machine according to claim 1, wherein the rack, the surface of the X-axis guide rail, and the side surface of the X-axis carriage leg. Covering seal belts are provided on both left and right sides of the base, and a belt guide for guiding the seal belt is provided on a leg of the X-axis carriage, and a space formed between the base and the upper portion of the seal belt is covered. A machining head axis feeding mechanism for an optical axis moving laser beam machine, wherein an upper surface cover is provided and a lower surface cover covers a space formed between the base and the lower portion of the seal belt. 4. The processing head axis feed mechanism of the optical axis moving laser processing machine according to claim 3, wherein a belt tensioner for applying an appropriate tension to the seal belt is provided at an end of the seal belt. A processing head axis feed mechanism of an optical axis moving type laser beam machine. 5. A machining head axis feed mechanism for an optical axis moving type laser beam machine according to claim 3, wherein a sealing material for sealing between the upper surface cover and the seal belt is provided on the upper surface cover. And a sealing material for sealing between the lower surface cover and the seal belt is provided on the lower surface cover.