JP2002176019A - Work treating tank - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent external heat radiation of a heat from a treating liquid through a work treating tank in the tank for dipping and treating the work in the high-temperature treating liquid. SOLUTION: The work treating tank 10 dips the work 11 in the heated high-temperature treating liquid 12 and treats the work. The tank 10 comprises an inner tank 13 for housing the liquid 12 in an overflowing state, a recovery tank 20 installed to surround an outer periphery of the upper end of the tank 13 to receive and recover the overflowing liquid 12, and an outer tank 21 continuously provided at a lower end of the tank 20 and surrounding the side face and the bottom of the tank 13, and a heat insulator 22 interposed between the tank 21 and the tank 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work processing tank for processing a work such as a semiconductor wafer by immersing the work in a high-temperature processing liquid.

[0002]

2. Description of the Related Art For example, in a process of manufacturing a semiconductor wafer, there is a case where the wafer is immersed in a heated high-temperature processing solution for processing. Usually, a high-temperature processing tank 1 as shown in FIG. 3 is used for such processing, and a plurality of nozzles 2 provided at the bottom of the tank continuously feed high-temperature processing liquid 3 into the tank so as to overflow. While supplying, the workpiece 4 is immersed in the processing liquid 3 to be processed.
The processing liquid 3 overflowing the processing tank 1
And flows into a collecting tank 5 formed around the upper end of the tank.

However, in the conventional processing tank 1, the heat from the high-temperature processing liquid 3 is radiated to the surroundings as it is through the processing tank 1, so that not only the amount of heat radiated is large but also the efficiency is low. In addition, the temperature control of the processing liquid 3 becomes complicated, and the instruments, switches, wiring, etc., which are installed in the vicinity of the processing tank 1, are exposed to heat, and deteriorate quickly due to deterioration. There was a problem such as doing. In addition, there is a danger that the worker comes into contact with the high-temperature processing tank.

[0004]

A technical object of the present invention is to provide a work processing tank for immersing a work in a high-temperature processing liquid for processing, wherein heat from the processing liquid is radiated to the outside through the processing tank. It is to prevent that.

[0005]

According to the present invention, there is provided, in accordance with the present invention, a processing tank for immersing a work in a heated high-temperature processing liquid for processing. A rectangular inner tank for storing in an overflow state, a nozzle for supplying the processing liquid into the inner tank, and a nozzle installed to surround an outer periphery of an upper end portion of the inner tank, and overflow from the inner tank. A collecting tank for receiving and collecting the processing liquid to be treated, and an outer tank connected to the lower end of the collecting tank and surrounding the side and bottom surfaces of the inner tank at a position below the collecting tank. Between the tank and the inner tank,
There is provided a work processing tank provided with a heat insulating material for interrupting the transfer of heat from the inner tank to the outer tank.

In the work processing tank having the above structure, an outer tank is provided around an inner tank in which a high-temperature processing liquid is stored, and a heat insulating material is interposed between the inner tank and the outer tank. High heat from the liquid is not released outside through the inner tank,
This not only enhances the thermal efficiency and simplifies the temperature control of the processing solution, but also reduces the deterioration due to the exposure of each member such as instruments, switches, and wiring installed around the processing tank to heat. It is also possible to surely solve the problem that the durability is lowered early and the problem that the operator comes into contact with the high-temperature processing tank. In addition, since the outer tank is provided around the inner tank below the recovery tank by connecting the outer tank to the lower end of the recovery tank, the outer tank can be compactly installed in the installation area of the recovery tank. And the outer tub does not protrude to the side to occupy space.

According to a specific embodiment of the present invention, the outer tub is provided so as to cover the other side and the bottom except one side of the inner tub, and the outer tub is provided outside the inner tub. A liquid supply pipe communicating with the nozzle is connected to a side not covered by the tank, and a collection pipe for collecting the processing liquid in the collection tank is connected to the collection tank at the position of this side. I have.

[0008]

1 and 2 schematically show a preferred embodiment of a work processing tank according to the present invention.
The work processing tank 10 is used to perform various processes such as etching and cleaning with a heated high-temperature processing liquid 12 on a planar work 11 such as a semiconductor wafer. It is formed of a material having corrosion resistance and heat resistance to the above-mentioned treatment liquid composed of pure water or city water.

The processing tank 10 has an inner tank 13 for storing the processing liquid 12 in an overflow state. The inner tank 13 has a rectangular shape in the upper half, and the lower half has a shape in which the distance between the lower ends of the opposing side surfaces 13b and 13c gradually narrows toward the tank bottom. The inner tank 13 is large enough to hold a plurality of disk-shaped workpieces 11 in a magazine 14 at regular intervals in a parallel state.
A plurality of nozzles 15 for supplying the processing liquid 12 in an overflow manner are provided at the bottom of the nozzle. These nozzles 15 are provided with slit-shaped injection ports 15 a on the side surfaces of the elongated cylindrical body, and are disposed at positions opposite to the bottom of the inner tank 13 so as to cross the inner tank 13. The 15 injection ports 15a are directed obliquely upward so that the processing liquid can be ejected toward the center of the work 11 or upward.

The magazine 14 has a plurality of work support rods 18 mounted between a pair of opposed frames 17, 17, and a plurality of concave grooves 18a are provided at an upper end of each support rod 18 at regular intervals. Work 1 is placed in these concave grooves 18a.
By fitting the outer periphery of the plurality of workpieces 11
Are supported side by side at regular intervals. In this case, each of the support rods 18 is moved from each nozzle 15 to the work 11.
Are disposed so as not to hinder the ejection of the processing liquid 12 ejected toward the central portion.

The magazine 14 is fixedly installed in the inner tank 13, and the work 11 is placed on the magazine 14.
Are transported and set by a transport mechanism (not shown) from the previous process. Then, the workpiece 11 which has been subjected to predetermined processing by being immersed in the processing liquid 12
Is taken out of the inner tank 13 and sent to the next step.

At the upper end of the inner tank 13, a rectangular collecting tank 20 for receiving and collecting the processing liquid 12 overflowing from the inner tank 13 is provided so as to surround the outer periphery of the inner tank 13. I have. This collection tank 20 is used for the inner tank 13
The tank portions 20a to 20c corresponding to the first to third side surfaces 13a to 13c are formed to have a narrow tank width and a small depth, and the tank portion 20d corresponding to the fourth side surface 13d is
The width and depth of the tank are formed so that the processing liquid 12 can be discharged to the outside through the tank portion 20d.
Then, in order to make it easier for the processing liquid 12 flowing into each of the tank portions 20a to 20c to flow into the tank portion 20d, the tank portion 2
The bottom surfaces 20e of 0b and 20c are inclined so as to gradually lower toward the tank portion 20d side. In addition, this collection tank 2
0 is the processing liquid 12 which overflowed the inner tank 13.
Is formed higher than the upper end of the inner tank 13 so as not to leak out.

An outer tank 21 is connected to the lower end of the collecting tank 20 so as to cover the first to third side surfaces 13a to 13c and the bottom surface 13e of the inner tank 13. The outer tank 21 includes a side wall 21a extending straight downward from each of the tank portions 20a to 20c of the collection tank 20, and a bottom wall 21b attached to a lower end of the side wall 21a.
The outer tub 21 and the inner tub 13 are installed so as to be accommodated in the flat area of the
A heat insulating material 22 for preventing heat from the high-temperature processing liquid 12 from being transmitted from the inner tank 13 to the outer tank 21 is filled in between them. The heat insulating material 22 may be made of any material having a low thermal conductivity, such as a synthetic resin foam, a synthetic rubber, and a fibrous substance.

A liquid supply pipe 24 communicating with the nozzle 15 is connected to the fourth side surface 13d of the inner tank 13 which is not covered by the outer tank 21, and the collection is performed at the position of the fourth side surface 13d. The processing liquid 12 in the recovery tank 20 is placed in the tank 20.
Is connected to a collecting pipe 25 for recovering the. The liquid supply pipe 24 and the recovery pipe 25 are connected to a temperature raising device (not shown), and the processing liquid collected from the recovery pipe 25 in a state where the temperature is lowered is heated to a required temperature by a heater in the temperature raising apparatus. And the liquid is supplied to the inner tank 13 through the nozzle 15 through the liquid supply pipe 24 in a circulating manner. Thus, the pipes such as the liquid supply pipe 24 and the recovery pipe 25 are connected to the outer tank 21 and the heat insulating material 2.
By connecting to the inner tank 13 and the collecting tank 20 at the side positions not covered by the step 2 by using the lower space of the tank section 20d having the widest tank width of the collecting tank 20, they can be easily and simply connected. Centralized connection at one place.

In the work tank 10 having the above-described structure, when a plurality of works 11 sent from the previous process are set in parallel on the magazine 14, the work 11 is supplied from the liquid supply pipe 24 through each nozzle 15. The high-temperature processing liquid 12 is supplied to the tank 13 in an overflow state, and is immersed in the processing liquid 12 to be processed. The processing liquid 12 overflowing from the inner tank 13 flows into the collecting tank 20 and is collected from the tank portion 20d through the collecting pipe 25.

On the other hand, the heat generated by the high-temperature processing solution 12 can be controlled by providing an outer tank 21 around the inner tank 13 and interposing a heat insulating material 22 between the inner tank 13 and the outer tank 21. The material 22 prevents the inner tank 13 from being transmitted to the outer tank 21, and is not released to the outside through the outer tank 21. Thereby, the thermal efficiency is improved, and the processing liquid 1
(2) The temperature control is also simplified, and furthermore, the members installed around the processing tank 10, such as instruments, switches, wiring, etc., are exposed to heat, so that deterioration is accelerated and durability is reduced. In addition, problems such as the danger of the worker coming into contact with the high-temperature processing tank 10 can be reliably solved. Moreover, since the outer tank 21 is provided around the inner tank 13 at a position below the collecting tank 20 by being connected to the lower end of the collecting tank 20, the outer tank 21 is Therefore, the outer tank 21 does not protrude to the side and occupy the space.

In the illustrated embodiment, one side surface of the inner tank 13, that is, the fourth side surface 13d is not covered with the outer tank 21 and the heat insulating material 22. However, the outer tub 21 and the heat insulating material 22 may be provided on this side surface similarly to the other side surfaces.

[0018]

As described above, according to the present invention, in a work processing bath for immersing a work in a high-temperature processing solution, heat from the processing solution is radiated to the outside through the processing bath. Can be reliably prevented,
Not only is the thermal efficiency increased and the temperature control of the processing liquid is simplified, but also the instruments, switches, wiring, etc., installed around the processing tank are exposed to heat, which leads to rapid deterioration and durability. In addition, problems such as a decrease in performance and a risk that an operator comes into contact with a high-temperature processing tank can be solved at the same time.

[Brief description of the drawings]

FIG. 1 is a sectional view schematically showing an embodiment of a work processing tank according to the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a sectional view of a conventional work processing tank.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Processing tank 11 Work 12 Processing liquid 13 Inner tank 13a, 13b, 13c, 13d Side surface 13e Bottom 15 Nozzle 20 Recovery tank 21 Outer tank 22 Insulation material 24 Liquid supply pipe 25 Recovery pipe

Claims (2)

[Claims] 1. A processing tank for immersing a workpiece in a heated high-temperature processing liquid to perform processing, the inner tank having a rectangular shape in plan view for storing the processing liquid in an overflow state, and A nozzle for supplying the processing liquid into the tank, and installed to surround the outer periphery of the upper end of the inner tank,
A collecting tank for receiving and collecting the processing liquid overflowing from the inner tank, and an outer tank connected to a lower end of the collecting tank and surrounding the side and bottom surfaces of the inner tank at a position below the collecting tank. A work processing tank, wherein a heat insulating material is provided between the outer tank and the inner tank to block heat transfer from the inner tank to the outer tank. 2. The nozzle according to claim 1, wherein the outer tub is provided so as to cover the other side and the bottom except one side of the inner tub, and the nozzle is provided on a side of the inner tub which is not covered by the outer tub. And a collection pipe for collecting the processing liquid in the collection tank is connected to the collection tank at a position of this side surface. Work processing tank as described.